CN112388160A - Light path calibration tool and light path calibration method - Google Patents
Light path calibration tool and light path calibration method Download PDFInfo
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- CN112388160A CN112388160A CN202011313006.6A CN202011313006A CN112388160A CN 112388160 A CN112388160 A CN 112388160A CN 202011313006 A CN202011313006 A CN 202011313006A CN 112388160 A CN112388160 A CN 112388160A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
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Abstract
The invention discloses a light path calibration tool and a light path calibration method, which belong to the technical field of calibration of laser equipment, wherein the light path calibration tool comprises a base and a calibration main body, the base is detachably connected to the upper surface of a workbench, and a light path system of the laser equipment is arranged on the upper surface of the workbench; the calibration main body is arranged on the base, a calibration area is arranged on the calibration main body, a round hole structure is arranged at the center of the calibration area, and the distance from the round hole structure to the lower surface of the base is equal to the distance from the optical center of an optical element in an optical path system of the laser equipment to the upper surface of the workbench. The optical path calibration tool and the optical path calibration method provided by the invention have higher accuracy, so that the installation error of the optical path system of the laser equipment is smaller, the quality of a product produced in the later period is ensured, and the optical path calibration tool has the advantages of simpler structure, lower cost and convenience in use.
Description
Technical Field
The invention relates to the technical field of calibration of laser equipment, in particular to a light path calibration tool and a light path calibration method.
Background
Currently, a P-type single-polycrystal PERC battery piece technology becomes the mainstream in the market, and a Selective Emitter (SE) technology of the PERC battery is a technical means which has high conversion efficiency, strong compatibility with a battery piece production line and low consumption cost, and is widely applied to the field of solar batteries. The overlay SE technique is implemented by a laser doping technique, and therefore, the calibration of the optical path system of the laser device directly affects the precision and stability of the PERC cell production.
The optical path system of the laser device generally comprises optical elements such as a laser, two reflectors, a light gate, a beam expander, a diffraction element, an optical diaphragm and a vibrating mirror, and when a light beam emitted by the laser can simultaneously pass through optical centers of the two reflectors, the light gate, the beam expander, the diffraction element, the optical diaphragm and the vibrating mirror, the optical path system of the laser device can be determined to have high collimation degree, the laser energy loss is minimum, and no abnormality exists in a processing light spot. In the prior art, when calibrating an optical path system of a laser device, a laser needs to be turned on, so that the laser emits a laser beam, the laser beam sequentially passes through two reflectors, a light gate, a beam expander, a diffraction element, a beam splitter and a vibrating mirror, and whether a light spot on the vibrating mirror is in an optical center of the vibrating mirror is observed at the vibrating mirror by naked eyes to determine the collimation degree of the optical path system of the laser device. Therefore, in the prior art, a mode of calibrating the optical path system of the laser equipment has a large error, so that the optical path system of the laser equipment has a large installation error, and the quality of a product produced in the later stage is influenced.
Disclosure of Invention
The invention aims to provide a light path calibration tool and a light path calibration method, which have higher accuracy, so that the installation error of a light path system of laser equipment is smaller, and the quality of a product produced in the later stage is ensured.
As the conception, the technical scheme adopted by the invention is as follows:
an optical path calibration tool comprising:
the base is detachably connected to the upper surface of the workbench, and an optical path system of the laser equipment is arranged on the upper surface of the workbench;
the calibration main body is arranged on the base and provided with a calibration area, the center of the calibration area is provided with a round hole structure, and the distance from the round hole structure to the lower surface of the base is equal to the distance from the optical center of an optical element in an optical path system of the laser equipment to the upper surface of the workbench.
Optionally, the surface of the calibration body has a black coating formed by an oxidation treatment.
Optionally, the calibration area is circular, and the circular hole structure is located at the center of the calibration area.
Optionally, a cross calibration strip is arranged on the calibration area, scales are arranged on the cross calibration strip, and the round hole structure is located at the center of the cross calibration strip.
Optionally, the positioning device further comprises a positioning pin, the positioning pin is fixed to the bottom of the base, and the positioning pin is used for being inserted into the positioning hole in the workbench.
Optionally, one of the base and the calibration main body is provided with a sliding groove, the other is provided with a sliding block, the sliding block is slidably arranged in the sliding groove, and the sliding block is in interference fit with the sliding groove.
Optionally, still include the extensible member, the extensible member is fixed in on the base, the calibration main part install in the flexible end of extensible member.
An optical path calibration method is used for the optical path calibration tool, an optical path system of a laser device comprises a laser, a first reflector, a second reflector, an auxiliary element and a vibrating mirror which are all arranged on a workbench, the laser and the first reflector are arranged along a first horizontal direction, the second reflector and the first reflector are arranged along a second horizontal direction perpendicular to the first horizontal direction, the second reflector, the auxiliary element and the vibrating mirror are sequentially arranged along the first horizontal direction, and the optical path calibration method comprises the following steps:
s1, removing the auxiliary element from the workbench;
s2, placing the optical path calibration tool at a first preset position between the first reflector and the second reflector;
s3, adjusting the reflection angle of the first reflector until the laser beam reflected by the first reflector completely passes through the round hole structure on the calibration main body;
s4, placing the optical path calibration tool at a second preset position between the second reflecting mirror and the galvanometer;
s5, adjusting the reflection angle of the second reflector until the laser beam reflected by the second reflector completely passes through the round hole structure on the calibration body;
s6, repeating the steps S2-S5 for a plurality of times;
and S7, mounting the auxiliary element, and adjusting the position of the auxiliary element until the laser beam reflected by the second reflector completely passes through the optical center of the auxiliary element.
Optionally, after step S1, the optical path calibration method further includes:
placing the optical path calibration tool at a third preset position between the laser and the first reflector;
and adjusting the position of the laser or the position of the calibration main body until the laser beam emitted by the laser completely passes through the round hole structure on the calibration main body.
Optionally, the auxiliary element includes a shutter, a beam expander, a diffractive element, and an optical wave sequentially arranged along the first horizontal direction, where the shutter is closer to the second mirror than the beam expander, and step S7 includes:
s71, installing the shutter between the second mirror and the optical path calibration tool;
s72, adjusting the position of the optical shutter until the laser beam reflected by the second reflector passes through the optical shutter and completely passes through the circular hole structure on the calibration main body;
s73, installing the beam expanding lens between the optical shutter and the optical path calibration tool;
s74, adjusting the position and the pitch angle of the beam expander until the laser beam passing through the optical shutter completely passes through the circular hole structure on the calibration main body after passing through the beam expander;
s75, installing the diffraction element between the beam expander and the optical path calibration tool;
s76, adjusting the position and the pitch angle of the diffraction element until the laser beam passing through the beam expander completely passes through the circular hole structure on the calibration main body after passing through the diffraction element;
s77, installing the diaphragm between the diffraction element and the light path calibration tool;
s78, adjusting the position of the diaphragm until the laser beam passing through the diffraction element passes through the diaphragm and then completely passes through the round hole structure on the calibration main body.
The invention has at least the following beneficial effects: ,
the invention provides a light path calibration tool and a light path calibration method, wherein an auxiliary element is firstly detached from a workbench, then the light path calibration tool is placed between a first reflector and a second reflector, the reflection angle of the first reflector is adjusted until a laser beam reflected by the first reflector completely passes through a round hole structure on a calibration main body to finish the calibration of the first reflector, then the light path calibration tool is placed between the second reflector and a vibrating mirror, the reflection angle of the second reflector is adjusted until the laser beam reflected by the second reflector completely passes through the round hole structure to finish the calibration of the second reflector, finally the auxiliary element is installed on the workbench, the position of the auxiliary element is adjusted until the laser beam can pass through the optical center of the auxiliary element, and the calibration of a light path system of laser equipment is realized, compared with the method for observing whether the laser beam completely passes through the optical center of the optical element, the method for calibrating the laser beam through observing whether the laser beam completely passes through the circular hole structure has higher accuracy and is more convenient to observe, so that the installation error of the optical path system of the laser device is smaller, and the optical path calibrating tool is simpler in structure, lower in cost and convenient to use.
Drawings
Fig. 1 is a schematic structural diagram of an optical path calibration tool according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of another optical path calibration tool according to an embodiment of the present invention;
FIG. 3 is a schematic structural diagram of another optical path calibration tool according to an embodiment of the present invention;
FIG. 4 is a schematic cross-sectional view of an optical path calibration tool according to an embodiment of the present invention;
fig. 5 is a schematic diagram of an optical path system of a laser apparatus according to a second embodiment of the present invention;
fig. 6 is a flowchart of an optical path calibration method according to a second embodiment of the present invention;
FIG. 7 is a schematic diagram of the optical path calibration tool according to the second embodiment of the present invention at a third predetermined position;
FIG. 8 is a schematic diagram of a second embodiment of the present invention, showing a light path calibration tool at a first predetermined position;
FIG. 9 is a schematic diagram of the optical path calibration tool provided in the second embodiment of the present invention at a second predetermined position;
FIG. 10 is a schematic diagram of the optical path calibration tool according to the second embodiment of the present invention positioned on the side of the shutter away from the second mirror;
FIG. 11 is a schematic diagram of an optical path calibration tool according to a second embodiment of the present invention positioned on a side of the beam expander lens away from the shutter;
FIG. 12 is a schematic diagram of an optical path calibration tool according to a second embodiment of the present invention positioned on a side of a diffraction element away from a beam expander;
fig. 13 is a schematic view of the optical path calibration tool provided in the second embodiment of the present invention, which is located on a side away from the diffractive element.
In the figure:
1. a base; 2. calibrating the body; 21. a calibration area; 211. a cross calibration strip; 22. a slider; 3. a circular hole structure; 4. positioning pins; 5. a telescoping member;
10. a laser; 20. a first reflector; 30. a second reflector; 40. an optical shutter; 50. a beam expander; 60. a diffractive element; 70. a smooth wave; 80. a galvanometer.
Detailed Description
In order to make the technical problems solved, the technical solutions adopted and the technical effects achieved by the present invention clearer, the technical solutions of the present invention are further described below by way of specific embodiments with reference to the accompanying drawings. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting of the invention. It should be further noted that, for the convenience of description, only some but not all of the elements associated with the present invention are shown in the drawings.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that unless otherwise explicitly stated or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection or a removable connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Example one
The embodiment provides an optical path calibration tool, which is used for calibrating an optical path system of a laser device, can have smaller error and is convenient to use.
As shown in fig. 1 to 4, the optical path calibration tool includes a calibration body 2 in which a base 1 is disposed on the base 1. Wherein, base 1 can dismantle and connect in the upper surface of workstation, and the upper surface of this workstation is the plane, and laser equipment's optical path system sets up in the upper surface of workstation.
As shown in fig. 1, the calibration body 2 has a calibration area 21 thereon, and the center of the calibration area 21 has a circular hole structure 3, and a distance L1 from the center of the circular hole structure 3 to the lower surface of the base 1 is equal to a distance from the optical center of the optical element in the optical path system of the laser device to the upper surface of the worktable, that is, the center of the circular hole structure 3 and the optical center of the optical element are at the same height with the upper surface of the worktable as a reference surface. The optical elements include a laser 10, a first reflector 20, a second reflector 30, auxiliary elements and a vibrating mirror 80, wherein the auxiliary elements include a shutter 40, a beam expander 50, a diffraction element 60 and an optical wave 70. It should be noted that the workbench may have three preset positions, which are respectively the first to third preset positions, the optical path calibration tool may be located at the three preset positions, and when the optical path calibration tool is located at any preset position and the laser beam can pass through the circular hole structure 3 located at the preset position, it is indicated that the laser beam just passes through the optical center of the optical element at the upstream of the preset position, that is, the optical element at the upstream of the preset position is calibrated or does not need to be calibrated. Wherein, the optical element positioned at the upstream of the preset position is an optical element through which the laser beam passes before the preset position. Illustratively, in the present embodiment, the first preset position is located between the first mirror 20 and the second mirror 30, the second preset position is located between the second mirror 30 and the galvanometer 80, and the third preset position is located between the laser 10 and the first mirror 20.
When the optical path calibration tool provided by the embodiment is used, the auxiliary component is removed from the workbench, that is, the auxiliary component is separated from other components in the optical path system of the laser device, then the optical path calibration tool is placed between the first reflector 20 and the second reflector 30, then the reflection angle of the first reflector 20 is adjusted until the laser beam reflected by the first reflector 20 completely passes through the circular hole structure 3 on the calibration body 2 to complete the calibration of the first reflector 20, then the optical path calibration tool is placed between the second reflector 30 and the vibrating mirror 80, and the reflection angle of the second reflector 30 is adjusted until the laser beam reflected by the second reflector 30 completely passes through the circular hole structure 3 to complete the calibration of the second reflector 30, and finally the auxiliary component is mounted on the workbench and the position of the auxiliary component is adjusted, until laser beam can pass through auxiliary component's optical center, realized the calibration to laser equipment's optical path system, and compare in the optical center of observing laser beam through optical component, the calibration mode through observing whether laser beam passes round hole structure 3 completely in this embodiment has higher degree of accuracy, the observation of being more convenient for, and then make laser equipment's optical path system's installation error less, and the structure of light path calibration instrument is simpler, and the cost is lower, convenient to use.
Alternatively, in order to reduce the reflection of the laser beam on the optical path calibration tool, in the present embodiment, the surface of the calibration body 2 has a black coating layer formed by oxidation treatment, that is, the surface of the calibration body 2 needs to be subjected to black oxidation treatment. It will be appreciated that only the calibration area 21 of the calibration body 2 may be subjected to a black oxidation process to further reduce the manufacturing cost of the optical path calibration tool.
Optionally, in this embodiment, as shown in fig. 2 or fig. 3, the calibration area 21 is circular, and the circular hole structure 3 is located at the center of the calibration area 21, so that the circular calibration area 21 can be manufactured conveniently. It will be appreciated that the shape of the calibration area 21 may also be square, triangular, etc.
Further, in order to improve the efficiency of the optical path calibration tool, as shown in fig. 2, a cross calibration strip 211 is disposed on the calibration area 21, the cross calibration strip 211 is in a cross shape, scales may be disposed on the cross calibration strip 211, and the circular hole structure 3 is located at the center of the cross calibration strip 211. When the laser beam reflected by the second reflector 30 does not pass through the circular hole structure 3 but falls on the cross calibration strip 211, the user can adjust the reflection angle of the first reflector 20 according to the position of the light spot on the cross calibration strip 211, which is convenient for the quantitative adjustment of the first reflector 20, and further the light path calibration tool has higher efficiency. For example, the distance between the light spot and the circular hole structure 3 can be determined according to the scale of the light spot on the cross calibration strip 211, so as to determine the angle of the first reflecting mirror 20 to be adjusted.
Optionally, referring to fig. 2, the light path calibration tool further includes a positioning pin 4, where the positioning pin 4 is fixed at the bottom of the base 1 and is used to be inserted into a positioning hole on the workbench to fix the base 1 on the workbench, and also to facilitate positioning of the base 1. Alternatively, one or more positioning pins 4 may be provided, and in this embodiment, two positioning pins 4 are provided, and the distance between two positioning pins 4 is 290 mm. It will be appreciated that a plurality of positioning holes may be provided on the table to enable the base 1 to be fixed at different positions on the table to facilitate calibration of the optical path system of the laser apparatus.
In this embodiment, one of the base 1 and the calibration main body 2 is provided with a chute, the other is provided with a slide block 22, the slide block 22 is slidably disposed in the chute, and the slide block 22 is in interference fit with the chute. As shown in fig. 4, the base 1 is provided with a sliding groove, the calibration body 2 is provided with a sliding block 22, and the sliding block 22 has a T-shaped cross section to prevent the calibration body 2 from tilting during sliding. Through with slider 22 and spout interference fit, can make behind the calibration main part 2 slip to the preset position of base 1, can be more stable, and can not take place to rock at the in-process of calibration to guarantee the precision of calibration. For example, the material of the sliding block 22 in this embodiment may be an elastic material so as to be in interference fit with the sliding groove.
Further, please refer to fig. 3, the optical path calibration tool further includes a telescopic part 5, the telescopic part 5 is fixed on the base 1, the calibration main body 2 is installed at the telescopic end of the telescopic part 5, the telescopic part 5 can be extended and retracted relative to the base 1, and then the calibration main body 2 can be driven to move relative to the base 1, and then the distance between the circular hole structure 3 and the upper surface of the base 1 can be adjusted, and further the optical path calibration tool provided by the embodiment can be applicable to optical path systems of laser devices with different sizes, so that the optical path calibration tool has higher universality.
Illustratively, in the optical path calibration tool shown in fig. 2 provided in this embodiment, the overall height of the optical path calibration tool is 947 mm, the width of the optical path calibration tool is 450 mm, the distance L1 between the center of the circular hole structure 3 and the upper surface of the base is 723 mm, the diameter of the calibration region 21 is 245 mm, the base 1 is a circular disk, the diameter of the base 1 is 450 mm, the thickness of the base 1 is 130 mm, when the positioning pin 4 is provided on the base 1, the diameter of the positioning pin 4 is 40 mm, and the length of the positioning pin 4 is 80 mm. The base 1 and the calibration body 2 in this embodiment may be made of a light material such as plastic, so as to facilitate movement.
Example two
The present embodiment provides an optical path calibration method, which is used in the optical path calibration tool described in the first embodiment above, and is used to calibrate an optical path system of a laser device. As shown in fig. 5, the optical path system of the laser device includes a laser 10, a first reflector 20, a second reflector 30, an auxiliary element, and a vibrating mirror 80, which are all disposed on the worktable, the laser 10 and the first reflector 20 are arranged along a first horizontal direction, the second reflector 30 and the first reflector 20 are arranged along a second horizontal direction perpendicular to the first horizontal direction, and the second reflector 30, the auxiliary element, and the vibrating mirror 80 are sequentially arranged along the first horizontal direction. As shown in fig. 6, the optical path calibration method includes the following steps:
and S1, removing the auxiliary element from the workbench.
The auxiliary element may be removed from the table or other structure of the table, and there is no other element between the second reflecting mirror 30 and the vibrating mirror 80.
S2, placing the optical path calibration tool at a first predetermined position between the first mirror 20 and the second mirror 30.
Optionally, the first preset position may be a position on the workbench, and a positioning hole is preset at the first preset position, and the positioning pin 4 may be inserted into the positioning hole to fix the optical path calibration tool at the first preset position. As shown in fig. 8, when the optical path calibration tool is placed at the first predetermined position, the circular hole structure 3 is radially perpendicular to the transmission direction of the laser beam.
S3, adjusting the reflection angle of the first reflector 20 until the laser beam reflected by the first reflector 20 completely passes through the circular hole structure 3 on the calibration body 2.
In step S3, when the laser beam reflected by the first reflector 20 cannot completely pass through the circular hole structure 3, it indicates that the position of the first reflector 20 is not at the preset position, or the reflection angle of the first reflector 20 deviates from the preset angle, and when the laser beam reflected by the first reflector 20 can completely pass through the circular hole structure 3, it indicates that the position of the first reflector 20 is at the preset position, and the angle of the first reflector 20 is at the preset angle, at this time, calibration of the first reflector 20 is completed. The preset position or the preset angle may be a parameter for the laser apparatus to normally operate.
And S4, placing the optical path calibration tool at a second preset position between the second reflecting mirror 30 and the galvanometer mirror 80.
In step S4, the optical path calibration tool is moved from between the first mirror 20 and the second mirror 30 to a second preset position, where the second preset position may be a position on the worktable, and a positioning hole is preset at the second preset position, and the positioning pin 4 may be inserted into the positioning hole to fix the optical path calibration tool at the second preset position. As shown in fig. 9, when the optical path calibration tool is placed at the second preset position, the circular hole structure 3 is radially perpendicular to the transmission direction of the laser beam.
S5, the reflection angle of the second mirror 30 is adjusted until the laser beam reflected by the second mirror 30 passes completely through the circular hole structure 3 on the collimating body 2.
In step S5, when the laser beam reflected by the second reflecting mirror 30 cannot completely pass through the circular hole structure 3 of the optical path calibration tool at the second predetermined position, since the first reflecting mirror 20 is calibrated, it is described that the position of the second reflecting mirror 30 is not at the predetermined position, or the reflection angle of the second reflecting mirror 30 deviates from the predetermined angle, so that the second reflecting mirror 30 needs to be adjusted until the laser beam can pass through the circular hole structure 3 of the optical path calibration tool at the second predetermined position.
Optionally, in practical applications, since the distance between the galvanometer 80 and the second reflecting mirror 30 is relatively large, the second preset position may be provided in plurality, and the optical path calibration tool may be sequentially placed at the plurality of second preset positions, so as to repeatedly check whether the laser beam can pass through the circular hole structures 3 at different positions, thereby further improving the calibration accuracy of the optical path calibration tool.
S6, repeating the steps S2-S5 for several times.
Alternatively, in order to further improve the calibration accuracy of the optical path calibration tool, after the step S5 is completed, the steps S2 to S5 may be repeatedly performed several times to check whether the first mirror 20 and the second mirror 30 satisfy the requirements. After repeatedly performing steps S2 to S5 several times, step S7 may be continuously performed. The number of repetitions of steps S2 to S5 may be 2, 3, 4, or the like
S7, installing the auxiliary component, and adjusting the position of the auxiliary component until the laser beam reflected by the second reflecting mirror 30 completely passes through the optical center of the auxiliary component.
Alternatively, after the first mirror 20 and the second mirror 30 are aligned, the auxiliary member may be installed such that the optical center of the auxiliary member falls on the laser beam. The position of the auxiliary element may be adjusted by adjusting the horizontal position, the vertical position, the pitch angle, and the like of the auxiliary element.
In the optical path calibration method provided in this embodiment, the auxiliary component is removed from the worktable, that is, the auxiliary component is separated from other components in the optical path system of the laser device, then the optical path calibration tool is placed at a first preset position, and then the reflection angle of the first reflector 20 is adjusted until the laser beam reflected by the first reflector 20 completely passes through the circular hole structure 3 on the calibration body 2 to complete the calibration of the first reflector 20, then the optical path calibration tool is placed at a second preset position, and the reflection angle of the second reflector 30 is adjusted until the laser beam reflected by the second reflector 30 completely passes through the circular hole structure 3 to complete the calibration of the second reflector 30, and finally the auxiliary component is mounted on the worktable and the position of the auxiliary component is adjusted until the laser beam can pass through the optical center of the auxiliary component, the calibration of the optical path system of the laser equipment is realized through the steps, and compared with the optical center of observing the laser beam passing through the optical element, the calibration mode of observing whether the laser beam completely passes through the round hole structure 3 in the embodiment has higher accuracy, the observation is more convenient, and then the installation error of the optical path system of the laser equipment is smaller, and the structure of the optical path calibration tool is simpler, the cost is lower, and the use is convenient.
Optionally, the workbench may further have a fourth preset position, the fourth preset position is located on the side of the galvanometer 80 far away from the optical wave 70, after step S5, the optical path calibration tool may be further placed at the fourth preset position, and the position of the galvanometer 80 is adjusted until the laser passes through the galvanometer 80, and then the laser can completely pass through the circular hole structure 3 on the calibration main body 2 at the fourth preset position.
Optionally, after step S1, the optical path calibration method further includes the following steps:
s10, placing the optical path calibration tool at a third predetermined position between the laser 10 and the first mirror 20.
The third preset position can be a position on the workbench, a positioning hole is preset in the third preset position, and the positioning pin 4 can be inserted into the positioning hole to fix the optical path calibration tool at the third preset position. As shown in fig. 7, when the optical path calibration tool is placed at the third predetermined position, the circular hole structure 3 is radially perpendicular to the transmission direction of the laser beam.
S11, adjusting the position of the laser 10 or adjusting the position of the calibration body 2 until the laser beam emitted by the laser 10 passes completely through the circular hole structure 3 on the calibration body 2.
After the laser 10 is adjusted, all components in the optical path system of the laser device can be calibrated by taking the optical path calibration tool as a reference, and the uniformity of component calibration is ensured.
Optionally, when the auxiliary element includes a shutter 40, a beam expander 50, a diffractive element 60, and a stop 70 sequentially arranged along the first horizontal direction, and the shutter 40 is closer to the second mirror 30 than the beam expander 50, the shutter 40, the beam expander 50, the diffractive element 60, and the stop 70 may be calibrated one by one, specifically, step S7 includes:
s71, the shutter 40 is installed between the second mirror 30 and the optical path calibration tool.
As shown in fig. 10, a shutter 40 is installed downstream of the second mirror 30, and an optical path calibration tool is placed downstream of the shutter 40 to achieve calibration of the shutter 40.
S72, the position of the shutter 40 is adjusted until the laser beam reflected by the second mirror 30 passes through the shutter 40 and passes through the circular hole structure 3 of the calibration body 2 completely.
After the laser beam passes through the optical shutter 40, the laser beam can completely and smoothly pass through the circular hole structure 3, which can indicate that the position of the optical shutter 40 meets the requirement, and further, the calibration of the optical shutter 40 is realized.
S73, the beam expander lens 50 is mounted between the shutter 40 and the optical path calibration tool.
As shown in fig. 11, a beam expander 50 is mounted downstream of the shutter 40, and an optical path calibration tool is placed downstream of the beam expander 50 for calibrating the beam expander 50.
And S74, adjusting the position and the pitch angle of the beam expander 50 until the laser beam passing through the optical shutter 40 passes through the beam expander 50 and then completely passes through the circular hole structure 3 on the calibration main body 2.
After the laser beam passes through the beam expander 50, the laser beam can completely and smoothly pass through the circular hole structure 3, and the position of the beam expander 50 can meet the requirement, so that the beam expander 50 is calibrated.
S75, the diffraction element 60 is mounted between the beam expander 50 and the optical path calibration tool.
As shown in fig. 12, a diffraction element 60 is mounted downstream of the shutter 40, and an optical path calibration tool is placed downstream of the diffraction element 60 for calibrating the diffraction element 60.
And S76, adjusting the position and the pitch angle of the diffraction element 60 until the laser beam passing through the beam expander 50 passes through the diffraction element 60 and then completely passes through the circular hole structure 3 on the calibration body 2.
After the laser beam passes through the diffraction element 60, the laser beam can completely and smoothly pass through the circular hole structure 3, which can indicate that the position of the diffraction element 60 meets the requirement, and further, the calibration of the diffraction element 60 is realized.
And S77, installing the diaphragm 70 between the diffraction element 60 and the optical path calibration tool.
As shown in fig. 13, an optical diaphragm 70 is installed downstream of the shutter 40, and an optical path calibration tool is placed downstream of the optical diaphragm 70 for calibrating the optical diaphragm 70.
And S78, adjusting the position of the diaphragm 70 until the laser beam passing through the diffraction element 60 passes through the diaphragm 70 and then completely passes through the round hole structure 3 on the calibration main body 2.
When the laser beam passes through the diaphragm 70, the laser beam can completely and smoothly pass through the round hole structure 3, so that the position of the diaphragm 70 can meet the requirement, and the calibration of the diaphragm 70 is further realized.
After step S78 is performed, the shutter 40, the beam expander 50, the diffractive element 60 and the optical billows 70 are calibrated respectively, and the optical centers of the shutter 40, the beam expander 50, the diffractive element 60 and the optical billows 70 are on the same straight line.
In this embodiment, the optical path calibration tool may be directly disposed near the galvanometer 80, and in this case, in steps S71 to S78, the shutter 40, the beam expander 50, the diffractive element 60, and the optical diaphragm 70 are only required to be sequentially mounted, and the optical path calibration tool does not need to be moved many times.
Since the positions of the shutter 40, the beam expander 50, the diffractive element 60, and the optical waveguide 70 in the optical path system of the laser device are determined, in this embodiment, the optical path calibration tool is preferentially selected to be moved so as to meet the preset requirements, where the preset requirements include that the shutter 40 is located between the second mirror 30 and the optical path calibration tool, the beam expander 50 is located between the shutter 40 and the optical path calibration tool, the diffractive element 60 is located between the beam expander 50 and the optical path calibration tool, and the optical waveguide 70 is located between the diffractive element 60 and the optical path calibration tool.
The optical path calibration method provided by the embodiment is simple to operate and has high efficiency.
The foregoing embodiments are merely illustrative of the principles and features of this invention, which is not limited to the above-described embodiments, but rather is susceptible to various changes and modifications without departing from the spirit and scope of the invention, which changes and modifications are within the scope of the invention as claimed. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (10)
1. An optical path calibration tool, comprising:
the laser device comprises a base (1), wherein the base (1) is detachably connected to the upper surface of a workbench, and a light path system of the laser device is arranged on the upper surface of the workbench;
the calibration body (2) is arranged on the base (1), the calibration body (2) is provided with a calibration area (21), the center of the calibration area (21) is provided with a round hole structure (3), and the distance from the round hole structure (3) to the lower surface of the base (1) is equal to the distance from the optical center of an optical element in an optical path system of the laser equipment to the upper surface of the workbench.
2. The optical path calibration tool according to claim 1, wherein the surface of the calibration body (2) has a black coating layer formed by oxidation treatment.
3. The optical path calibration tool according to claim 1, wherein the calibration area (21) is circular in shape, and the circular hole structure (3) is located at the center of the calibration area (21).
4. The optical path calibration tool according to claim 1, wherein a cross calibration strip (211) is provided on the calibration area (21), a scale is provided on the cross calibration strip (211), and the circular hole structure (3) is located at the center of the cross calibration strip (211).
5. The optical path calibration tool according to claim 1, further comprising a positioning pin (4), wherein the positioning pin (4) is fixed on the bottom of the base (1), and the positioning pin (4) is used for being inserted into a positioning hole on the workbench.
6. The optical path calibration tool according to claim 1, wherein one of the base (1) and the calibration body (2) is provided with a sliding groove, and the other is provided with a sliding block, the sliding block is slidably arranged in the sliding groove, and the sliding block is in interference fit with the sliding groove.
7. The optical path calibration tool according to claim 1, further comprising a telescopic member fixed to the base (1), wherein the calibration body (2) is mounted to a telescopic end of the telescopic member.
8. An optical path calibration method for the optical path calibration tool according to any one of claims 1 to 7, wherein an optical path system of the laser device includes a laser, a first reflecting mirror, a second reflecting mirror, an auxiliary element, and a vibrating mirror, all of which are disposed on a worktable, the laser and the first reflecting mirror are arranged along a first horizontal direction, the second reflecting mirror and the first reflecting mirror are arranged along a second horizontal direction perpendicular to the first horizontal direction, and the second reflecting mirror, the auxiliary element, and the vibrating mirror are arranged in sequence along the first horizontal direction, the optical path calibration method comprising the steps of:
s1, removing the auxiliary element from the workbench;
s2, placing the optical path calibration tool at a first preset position between the first reflector and the second reflector;
s3, adjusting the reflection angle of the first reflector until the laser beam reflected by the first reflector completely passes through the round hole structure on the calibration main body;
s4, placing the optical path calibration tool at a second preset position between the second reflecting mirror and the galvanometer;
s5, adjusting the reflection angle of the second reflector until the laser beam reflected by the second reflector completely passes through the round hole structure on the calibration body;
s6, repeating the steps S2-S5 for a plurality of times;
and S7, mounting the auxiliary element, and adjusting the position of the auxiliary element until the laser beam reflected by the second reflector completely passes through the optical center of the auxiliary element.
9. The optical path calibration method according to claim 8, wherein after step S1, the optical path calibration method further comprises:
placing the optical path calibration tool at a third preset position between the laser and the first reflector;
and adjusting the position of the laser or the position of the calibration main body until the laser beam emitted by the laser completely passes through the round hole structure on the calibration main body.
10. The optical path calibration method according to claim 8, wherein the auxiliary components include a shutter, a beam expander, a diffractive element, and a diaphragm, which are sequentially arranged along the first horizontal direction, and the shutter is closer to the second mirror than the beam expander, and step S7 includes:
s71, installing the shutter between the second mirror and the optical path calibration tool;
s72, adjusting the position of the optical shutter until the laser beam reflected by the second reflector passes through the optical shutter and completely passes through the circular hole structure on the calibration main body;
s73, installing the beam expanding lens between the optical shutter and the optical path calibration tool;
s74, adjusting the position and the pitch angle of the beam expander until the laser beam passing through the optical shutter completely passes through the circular hole structure on the calibration main body after passing through the beam expander;
s75, installing the diffraction element between the beam expander and the optical path calibration tool;
s76, adjusting the position and the pitch angle of the diffraction element until the laser beam passing through the beam expander completely passes through the circular hole structure on the calibration main body after passing through the diffraction element;
s77, installing the diaphragm between the diffraction element and the light path calibration tool;
s78, adjusting the position of the diaphragm until the laser beam passing through the diffraction element passes through the diaphragm and then completely passes through the round hole structure on the calibration main body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011313006.6A CN112388160A (en) | 2020-11-20 | 2020-11-20 | Light path calibration tool and light path calibration method |
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| CN202011313006.6A CN112388160A (en) | 2020-11-20 | 2020-11-20 | Light path calibration tool and light path calibration method |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113182671A (en) * | 2021-03-23 | 2021-07-30 | 深圳市大族数控科技股份有限公司 | Vibrating mirror dimming tool, method and device |
| CN115657412A (en) * | 2022-12-28 | 2023-01-31 | 歌尔股份有限公司 | Optical path calibration device and optical path adjustment method |
-
2020
- 2020-11-20 CN CN202011313006.6A patent/CN112388160A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113182671A (en) * | 2021-03-23 | 2021-07-30 | 深圳市大族数控科技股份有限公司 | Vibrating mirror dimming tool, method and device |
| CN115657412A (en) * | 2022-12-28 | 2023-01-31 | 歌尔股份有限公司 | Optical path calibration device and optical path adjustment method |
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