JP2021148498A - Inner surface shape measurement machine and alignment method for the same - Google Patents

Abstract

To provide an inner surface shape measurement machine for properly aligning a position of a hole, and an alignment method for the same.SOLUTION: In a linear tilting stage 16 supported by a rotation body 14 rotating about a rotation axis AR in parallel to a first direction, a workpiece is fixed to the linear tilting stage in which a position in a plane orthogonal to a direction with respect to the rotation body and inclination with respect to the plane are changeable. An amount of light emitted from a light source 19 in a first direction and incoming from a first opening of a narrow hole H of a workpiece W and passing through the narrow hole is acquired, and deviation information between a center axis of a fine hole and a rotation shaft based on the acquired amount of light is output.SELECTED DRAWING: Figure 1

Description

The present invention relates to a technique for measuring the inner surface shape of a small hole formed in a work.

An inner surface shape measuring machine that measures the roundness of a work by rotating the work around a rotation axis in a shape measuring device that measures the shape of the work by moving the contact type or non-contact type probe and the work relative to each other. It has been known. In the inner surface shape measuring machine, it is necessary to match the axis of rotation with the axis of the work.

Patent Document 1 discloses a technique for measuring the roundness of a hole by bringing a contactor of a detector into contact with an inner peripheral portion of a hole of a work placed on a rotary table. In the technique described in Patent Document 1, the contactor of the detector is brought into contact with the outer peripheral surface of the work, the runout of the work is observed at a low magnification while rotating the rotary table, and the work is placed so that the runout is reduced. The position is being adjusted.

Japanese Unexamined Patent Publication No. 2006-145344

When measuring a very small diameter hole using an inner surface shape measuring machine, alignment of the very small diameter hole becomes an issue. That is, when the probe is inserted into the extremely small diameter hole and the work is rotated, there is a problem that the probe and the hole wall collide with each other.

On the other hand, in the case of alignment using the hole and the coaxial shape portion as in the technique described in Patent Document 1, there is a limitation on the shape of the measurable object to be measured.

In addition, when the operator inserts while checking with an observation microscope, the skill of the operator is required. In this case, automation is difficult, and there is a possibility that the probe and the hole wall collide with each other due to an operation error.

The present invention has been made in view of such circumstances, and an object of the present invention is to provide an inner surface shape measuring machine for appropriately aligning the positions of holes, and an alignment method for the inner surface shape measuring machine.

One aspect of the inner surface shape measuring machine for achieving the above object is a rotating body that rotates about a rotation axis parallel to the first direction, and a linear motion tilting stage supported by the rotating body. A first-order probe that includes a linear tilt stage that can change its position in a plane perpendicular to the body and its tilt with respect to the plane, and a contact or non-contact probe that extends parallel to the first direction. A displacement detector that detects the displacement of the inner surface of the small hole of the workpiece that is fixed to the linear motion tilting stage and rotates with the rotating body by a probe that can move in the first direction by the linear motion mechanism, and the first from the light source. A light amount acquisition unit that acquires the amount of light emitted in a direction and that is incident from the first opening of the small hole of the work and has passed through the small hole, and the central axis and rotation of the small hole based on the acquired light amount. It is an inner surface shape measuring machine provided with an output unit that outputs deviation information from the shaft.

According to this aspect, the positions of the holes can be appropriately aligned based on the output deviation information. This is particularly effective when the hole is a very small diameter hole having a diameter of 500 μm or less.

It is preferable to provide a stage control unit that controls the linear motion tilting stage based on the deviation information and keeps the deviation between the central axis and the rotation axis of the small hole within the target value. As a result, the positions of the holes can be automatically aligned.

It is preferable that the light receiving unit includes a light source and a light receiving unit arranged so as to face each other along the first direction, and the light receiving unit receives emitted light emitted from a second aperture different from the first opening. As a result, the light receiving portion can appropriately receive the light emitted from the second opening through the narrow hole.

It is preferable that the work installation jig is fixed to the linear motion tilting stage and the work is installed, and the light source is arranged on the work installation jig. As a result, light can be appropriately incident on the first opening of the narrow hole of the work from the light source.

It is preferable that the position of the tilt axis for changing the tilt of the linear motion tilt stage and the position of the light source match. Thereby, the light incident on the first opening of the narrow hole of the work from the light source can be made uniform regardless of the inclination with respect to the plane orthogonal to the first direction.

A work installation jig fixed to a linear motion tilting stage on which a work is installed, a light receiving part that receives light, and a coaxial illumination optical system that emits light from a light source coaxially with the light receiving direction of the light receiving part. The work installation jig preferably includes a diffuse reflector that reflects light emitted from a second opening different from the first opening and causes it to enter the second opening. As a result, the light that has passed through the small hole and emitted from the second opening is reflected by the diffuse reflector to be incident on the second opening, and the light that has passed through the small hole again and is emitted from the first opening is received by the light receiving unit. Can properly receive light.

One aspect of the inner surface shape measuring machine for achieving the above object is a rotating body that rotates around a rotating axis parallel to the first direction, and a linear motion tilting stage supported by the rotating body. A linear tilt stage capable of changing its position in a plane orthogonal to a first direction with respect to a body and its inclination with respect to a plane, and a contact-type or non-contact-type probe extending parallel to the first direction. Generated from a displacement detector that detects the displacement of the inner surface of a small hole of a workpiece that is fixed to a linear motion tilt stage and rotates with a rotating body by a probe that can be moved in the first direction by a linear motion mechanism, and a pressure gas source. The flow rate is determined by selecting the directionality of the gas flow that flows in from the first opening of the narrow hole of the work and flows out from the second opening that is different from the first opening in the first direction. It is an inner surface shape measuring machine including a flow rate acquisition unit for acquisition and an output unit for outputting deviation information between the central axis and the rotation axis of the small hole based on the acquired flow rate.

According to this aspect, the positions of the holes can be appropriately aligned based on the output deviation information. This is particularly effective when the hole is a very small diameter hole having a diameter of 500 μm or less.

One aspect of the inner surface shape measuring machine for achieving the above object is a rotating body that rotates around a rotating axis parallel to the first direction, and a linear motion tilting stage supported by the rotating body. A linear tilt stage capable of changing its position in a plane orthogonal to a first direction with respect to a body and its inclination with respect to a plane, and a contact-type or non-contact-type probe extending parallel to the first direction. From the displacement detector that detects the displacement of the inner surface of the small hole of the workpiece that is fixed to the linear motion tilt stage and rotates with the rotating body by the probe that can move in the first direction by the linear motion mechanism, and from the ultrasonic source. The intensity of the generated ultrasonic waves by selecting the directivity in the first direction of the ultrasonic waves that flow in from the first opening of the narrow hole of the work and flow out from the second opening different from the first opening. It is an inner surface shape measuring machine including a strength acquisition unit for acquiring the above strength and an output unit for outputting deviation information between the central axis and the rotation axis of the small hole based on the acquired strength.

According to this aspect, the positions of the holes can be appropriately aligned based on the output deviation information. This is particularly effective when the hole is a very small diameter hole having a diameter of 500 μm or less.

One aspect of the alignment method of the inner surface shape measuring machine for achieving the above object is a rotating body that rotates around a rotating axis parallel to the first direction, and a linear motion tilting stage supported by the rotating body. A linear tilt stage capable of changing the position in a plane orthogonal to the first direction with respect to the rotating body and the tilt with respect to the plane, and a contact type or non-contact type probe extending parallel to the first direction. A displacement detector for detecting the displacement of the inner surface of a small hole of a workpiece fixed to a linear motion tilting stage and rotating with a rotating body by a probe that can be moved in a first direction by a first linear motion mechanism. A method of aligning an inner surface shape measuring machine, which is a light amount emitted from a light source in a first direction and obtains the amount of light incident from a first opening of a small hole of a work and passing through the small hole. It is an alignment method of an inner surface shape measuring machine including an acquisition step and an output step of outputting displacement information between the central axis and the rotation axis of a small hole based on the acquired light amount.

According to this aspect, the positions of the holes can be appropriately aligned based on the output deviation information. This is particularly effective when the hole is a very small diameter hole having a diameter of 500 μm or less.

One aspect of the alignment method of the inner surface shape measuring machine for achieving the above object is a rotating body that rotates around a rotating axis parallel to the first direction, and a linear motion tilting stage supported by the rotating body. A linear tilt stage capable of changing the position in a plane orthogonal to the first direction with respect to the rotating body and the tilt with respect to the plane, and a contact type or non-contact type probe extending parallel to the first direction. A displacement detector for detecting the displacement of the inner surface of a small hole of a workpiece fixed to a linear motion tilting stage and rotating with a rotating body by a probe that can be moved in a first direction by a first linear motion mechanism. It is an alignment method of the inner surface shape measuring machine, which is a gas flow generated from a pressure gas source, which flows in from the first opening of the narrow hole of the work and flows out from the second opening different from the first opening. An inner surface including a flow rate acquisition step of selecting the directionality of the gas flow in the first direction and acquiring the flow rate, and an output process of outputting displacement information between the central axis and the rotation axis of the small hole based on the acquired flow rate. This is an alignment method for shape measuring machines.

According to this aspect, the positions of the holes can be appropriately aligned based on the output deviation information. This is particularly effective when the hole is a very small diameter hole having a diameter of 500 μm or less.

One aspect of the alignment method of the inner surface shape measuring machine for achieving the above object is a rotating body that rotates around a rotating axis parallel to the first direction, and a linear motion tilting stage supported by the rotating body. A linear tilt stage capable of changing the position in a plane orthogonal to the first direction with respect to the rotating body and the tilt with respect to the plane, and a contact type or non-contact type probe extending parallel to the first direction. A displacement detector for detecting the displacement of the inner surface of a small hole of a workpiece fixed to a linear motion tilting stage and rotating with a rotating body by a probe that can be moved in a first direction by a first linear motion mechanism. An alignment method for an inner surface shape measuring machine, which is an ultrasonic wave generated from an ultrasonic source, which flows in from a first opening of a fine hole of a work and flows out from a second opening different from the first opening. It includes a strength acquisition step of selecting the directivity of the ultrasonic waves in the first direction to acquire the intensity, and an output process of outputting displacement information between the central axis and the rotation axis of the small hole based on the acquired intensity. This is an alignment method for the inner surface shape measuring machine.

According to this aspect, the positions of the holes can be appropriately aligned based on the output deviation information. This is particularly effective when the hole is a very small diameter hole having a diameter of 500 μm or less.

According to the present invention, the positions of the holes can be properly aligned.

FIG. 1 is a schematic view showing a configuration of an inner surface shape measuring machine according to the first embodiment. FIG. 2 is a schematic view showing an example of a non-contact type and a contact type probe. FIG. 3 is a block diagram showing an electrical configuration of the inner surface shape measuring machine. FIG. 4 is a diagram showing how the camera receives light emitted from the light source in the Z direction, which is incident from the lower opening of the narrow hole of the work, passes through the small hole, and is emitted from the upper opening. be. FIG. 5 is a graph showing the relationship between the angle formed by the central axis of the small hole and the Z direction and the amount of light passing through the small hole. FIG. 6 is a flowchart showing an example of processing of the alignment method of the inner surface shape measuring machine. FIG. 7 is a flowchart showing an example of processing in the camera alignment process. FIG. 8 is a diagram for explaining a camera alignment process. FIG. 9 is a diagram showing an inner surface shape measuring machine before and after the fine hole alignment process. FIG. 10 is a flowchart showing an example of processing in the fine hole alignment step. FIG. 11 is a diagram showing the positional relationship between the camera and the light source before and after the change in the inclination of the linear motion inclination stage. FIG. 12 is a diagram showing the positional relationship between the camera and the light source before and after the tilt change of the linear motion tilt stage. FIG. 13 is a schematic view showing the configuration of the inner surface shape measuring machine according to the second embodiment. FIG. 14 is a block diagram showing an electrical configuration of the inner surface shape measuring machine. FIG. 15 is a diagram showing how the emitted light emitted from the lower opening of the incident light incident on the upper opening of the narrow hole of the work from the coaxial epi-illumination optical system is incident on the diffuse reflector. FIG. 16 is a diagram showing a state of observing the lower opening of the narrow hole of the work by the camera. FIG. 17 is a diagram showing insertion of a diffuse reflector into the lower opening side of the narrow hole of the work. FIG. 18 is a diagram showing insertion of a sponge-like reflector into the lower opening side of the narrow hole of the work. FIG. 19 is a diagram showing the insertion of a clay-like reflector into the lower opening side of the narrow hole of the work. FIG. 20 is a schematic view in the case of detecting the deviation between the rotation axis of the small hole of the work and the rotation axis of the rotating body by using air. FIG. 21 is a schematic view in the case of detecting the deviation between the rotation axis of the small hole of the work and the rotation axis of the rotating body by using ultrasonic waves.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

[First Embodiment]
<Configuration of inner surface shape measuring machine>
FIG. 1 is a schematic view showing the configuration of the inner surface shape measuring machine 10 according to the present embodiment. The inner surface shape measuring machine 10 is a device for measuring the inner surface shape (roundness, etc.) of the small hole H formed in the work W. In this example, the small hole H is a small hole formed along the central axis of the work W. The inner diameter of the small hole H is a very small diameter (for example, the inner diameter is 500 μm or less). In FIG. 1, the X direction, the Y direction, and the Z direction are orthogonal to each other, the X direction is the horizontal direction, the Y direction is the horizontal direction orthogonal to the X direction, and the Z direction is the vertical direction.

As shown in FIG. 1, the inner surface shape measuring machine 10 includes a main body base 12, a rotating body 14, a linear motion tilting stage 16, a work installation jig 18, a column 20, a carriage 22, an arm 24, a displacement detector 28, and a linear motion. The tilt mechanism 33, the camera 34, and the displacement detector 36 for camera alignment are provided.

The rotating body 14 is fixed on the main body base 12. Inside the main body base 12, a motor (not shown) connected to the rotating body 14, an encoder (not shown), and a high-precision rotation mechanism (not shown) are provided. Rotator 14 rotates with high precision around the rotation axis parallel A _R in the Z-direction by a driving motor (an example of a first direction). Further, the rotating body 14 detects the rotation angle of the rotating body 14 by the rotation angle signal output from the encoder.

The linear motion tilting stage 16 (an example of the linear motion tilting stage) is supported by the rotating body 14 so as to be movable relative to the rotating body 14. The linear motion tilting stage 16 is translated in the X and Y directions by driving a motor (not shown). As a result, the position of the linear motion tilt stage 16 in the plane (in the XY plane) orthogonal to the Z direction of the work W fixed to the linear motion tilt stage 16 can be changed. Further, linear tilting stage 16, around a tilt axis of the tilt axis A _{X (see} FIG. 11) and the X direction parallel unillustrated Y direction X direction parallel to the Y direction by a motor (not shown) Each rotates. As a result, the linear motion tilt stage 16 can change the tilt of the work W fixed to the linear motion tilt stage 16 with respect to the XY plane.

The work installation jig 18 is placed on the linear motion tilting stage 16. The work W is installed on the work installation jig 18. That is, the work W is fixed to the linear motion tilting stage 16 via the work installation jig 18. The work W has a small hole H having a very small diameter. Fine hole H penetrates straight through the interior of the workpiece W from the upper opening O _{U (see} FIG. 4) to the lower opening O _{D (see} FIG. 4).

The work installation jig 18 includes a light source 19 inside.

To measure the inner shape of the roundness of the small hole H of the workpiece W in the inner surface shape measuring machine 10, the central axis A _H of the small hole H of the workpiece W is coaxially with the rotational axis A _R of the rotary body 14 It is necessary to align the work W so as to be. The alignment of the work W will be described later. FIG. 1 shows the state of the work W before alignment. Aligned workpiece W is rotated about the axis of rotation A _R together with the rotary member 14.

Further, a column (post) 20 extending in parallel in the Z direction is erected on the main body base 12. The lower end of the column 20 is fixed to the upper surface of the main body base 12.

The carriage 22 is supported by the column 20 so as to be movable in the Z direction. The carriage 22 moves in the Z direction by driving a motor (not shown). The carriage 22 corresponds to a vertical linear motion mechanism (an example of the first linear motion mechanism) for moving the displacement detector 28 and the camera 34 in the Z direction.

The arm 24 is movably supported by the carriage 22 in the X direction (an example of a direction orthogonal to the first direction). The arm 24 moves in the X direction by driving a motor (not shown). The arm 24 corresponds to a horizontal linear motion mechanism for moving the displacement detector 28 and the camera 34 in the X direction.

The displacement detector 28 is supported by the arm 24. The displacement detector 28 includes a non-contact or contact probe 30.

FIG. 2 is a schematic view showing an example of the probe 30. 202A in FIG. 2 shows a non-contact probe 30. The displacement detector 28 (see FIG. 1) including the non-contact probe 30 includes a light emitting element (not shown) that emits detection light and a light receiving element (not shown) that receives reflected light of the detection light emitted from the light emitting element. And. The non-contact probe 30 includes an optical fiber 38 and a reflection mirror 40. The light emitted from the light emitting element (not shown) of the displacement detector 28 (see FIG. 1) is guided to the reflection mirror 40 by the optical fiber 38, reflected by the reflection surface of the reflection mirror 40, and incident on the work W. The reflected light reflected by the work W enters the reflection mirror 40, is reflected by the reflection surface of the reflection mirror 40, and is guided to the optical fiber 38. The reflected light guided to the optical fiber 38 is input to a light receiving element (not shown) of the displacement detector 28. The displacement detector 28 detects the displacement of the work W based on the reflected light received by the light receiving element.

As a method of the non-contact type displacement detector 28, known methods such as a laser interferometer, a white interferometer, SD-OCT (Spectral Domain-Optical Coherence Tomography), and SS-OCT (Swept Source-Optical Coherence Tomography) are applied. can do.

The displacement detector 28 may detect the displacement of the work W by a contact type. 202B in FIG. 2 shows a contact probe 30. The contact probe 30 includes a contact 42 at its tip that is urged toward the work W. When the contactor 42 comes into contact with the work W, the contactor 42 is displaced according to the shape of the work W. The displacement of the contactor 42 is transmitted to the displacement detector 28 via the probe 30. The displacement detector 28 detects the displacement of the work W based on the displacement of the contactor 42.

As the displacement detection mechanism of the contact type displacement detector 28, known mechanisms such as LVDT (Linear Variable Differential Transformer), interferometer, optical triangulation method, and thin film strain measurement can be applied. Further, as the displacement detector 28, a method may be applied in which the contactor 42 is vibrated at the resonance frequency and the resonance point is changed by the contact.

Returning to the description of FIG. 1, when measuring the roundness of the small hole H of the work W with the inner surface shape measuring machine 10, the probe 30 is moved by the carriage 22 together with the displacement detector 28 in the Z direction, and the work W is moved. It is inserted into the small hole H. The displacement detector 28 detects the displacement of the hole wall (inner side surface) of the small hole H by the probe 30.

Further, the arm 24 supports the linear motion tilting mechanism 33. The linear motion tilting mechanism 33 _{fixes the camera 34 with the optical axis AC} (see FIG. 8) of the camera 34 directed downward in the Z direction. The linear motion tilting mechanism 33 is supported by the arm 24 so as to be relatively movable with respect to the arm 24. The linear motion tilting mechanism 33 moves in parallel in the X direction and the Y direction by driving a motor (not shown). As a result, the linear motion tilt mechanism 33 can change the position of the camera 34 fixed to the linear motion tilt mechanism 33 in the XY plane. Further, the linear motion tilting mechanism 33 rotates about an axis parallel to the X direction and an axis parallel to the Y direction by driving a motor (not shown). As a result, the linear motion tilt mechanism 33 can change the tilt of the camera 34 fixed to the linear motion tilt mechanism 33 with respect to the XY plane.

The camera 34 (an example of a light receiving unit) includes a magnifying optical system (microscope) that magnifies and projects an object to be observed. The camera 34 can capture a magnified image of the object to be observed. The camera 34 has an optical axis _{A C} is coaxial with the cylindrical surface 34A of the camera 34. The camera 34 corresponds to a light receiving unit that receives light incident from below in the Z direction. A light receiving element such as a photodiode may be arranged instead of the camera 34.

The camera alignment displacement detector 36 is arranged on the linear motion tilt stage 16. The displacement detector 36 for camera alignment has a contact-type displacement detection mechanism. Camera alignment displacement detector 36, rotates around a rotational axis A _R together with the rotary member 14, by detecting the displacement of the cylindrical surface 34A of the camera 34 with a contact-type, the displacement of the optical axis A _C of the camera 34 To detect. The displacement detector 36 for camera alignment may use a non-contact displacement detection mechanism or an image measurement method.

In the inner surface shape measuring machine 10 configured in this way, the work W is aligned, the probe 30 is inserted into the small hole H of the work W, and the rotating body 14 is rotated to relatively move the work W and the probe 30. By detecting the displacement of the hole wall of the small hole H with the displacement detector 28, the roundness of the small hole H can be measured.

<Electrical configuration of inner surface shape measuring machine>
FIG. 3 is a block diagram showing an electrical configuration of the inner surface shape measuring machine 10. The inner surface shape measuring machine 10 includes a control device 50.

The control device 50 is realized by a general-purpose computer such as a personal computer or a microcomputer. The control device 50 includes a CPU (Central Processing Unit), a ROM (Read Only Memory), a RAM (Random Access Memory), an input / output interface, and the like. In the control device 50, various programs such as control programs stored in the ROM are expanded in the RAM, and the programs expanded in the RAM are executed by the CPU to realize the functions of each part in the inner surface shape measuring machine 10. Then, various arithmetic processes and control processes are executed via the input / output interface.

As shown in FIG. 3, the control device 50 includes a measurement control unit 52, a displacement acquisition unit 54, a roundness calculation unit 56, a camera displacement acquisition unit 57, a camera position tilt control unit 59, a light amount acquisition unit 61, and a stage control unit. 62 and the output unit 63 are included.

The measurement control unit 52 controls a motor (not shown) connected to the carriage 22, the arm 24, and the rotating body 14, respectively, and controls the relative position between the probe 30 of the displacement detector 28 and the small hole H of the work W. ..

The displacement acquisition unit 54 controls the displacement detector 28 and acquires the displacement of the hole wall of the small hole H detected by the displacement detector 28.

The roundness calculation unit 56 calculates the roundness of the small hole H from the relative position between the probe 30 and the work W acquired from the measurement control unit 52 and the displacement detected by the displacement detector 28.

Camera displacement acquiring unit 57 controls the camera alignment displacement detector 36 obtains the displacement of the optical axis A _C of the camera 34. Camera position tilt control unit 59 controls the motor (not shown) for driving the linear motion tilting mechanism 33 based on the displacement of the optical axis A _C of the camera 34 to camera displacement acquiring unit 57 has acquired, the XY plane of the camera 34 Change the position of and the inclination with respect to the XY plane.

The light amount acquisition unit 61 controls the camera 34 and acquires the amount of light incident on the camera 34. The stage control unit 62 controls a motor (not shown) that drives the linear motion tilt stage 16 based on the light intensity acquired by the light intensity acquisition unit 61, and determines the position of the linear motion tilt stage 16 in the XY plane and the tilt with respect to the XY plane. change. The output unit 63 outputs information based on the light amount acquired from the light amount acquisition unit 61 to an output interface (not shown).

<Alignment method>
As described above, in order to measure the inner shape of the roundness of the small hole H of the workpiece W is required alignment to match the central axis A _H of the fine hole H to the rotation axis A _R of the rotary body 14 be. Alignment includes centering that adjusts the position in the XY plane and tilting that adjusts the inclination with respect to the XY plane. The inner surface shape measuring machine 10 can be centered and chilled by the linear motion tilting stage 16.

Figure 4 is a light emitted in the Z direction from the light source 19 (not shown in FIG. 4), it enters from the lower opening O _D of small holes H of the workpiece W, the upper opening O through the small hole H It is a figure which shows the state that the light emitted from _{U is received by the camera 34.} In FIG. 4, the work W is shown in cross section. _{The angle formed by the central axis AH of the small hole H} and the Z direction is different between the work W shown in 204A of FIG. 4 and the work W shown in 204B of FIG. 4, and the work W shown in 204B has a smaller hole. The angle formed by the central axis A _{H of H} and the Z direction is relatively small.

As shown in 204A exit, when the angle formed by the center axis A _H and Z direction fine hole H is relatively large, by multiple scattering at the inner wall (inner surface) of the small hole H, the upper opening O _U The amount of emitted light is relatively small. Further, as shown in 204B, when the angle formed by the center axis A _H and Z direction fine hole H is relatively small, less reflection at the inner wall of the small hole H, output emitted from the upper opening O _U The amount of light emitted is relatively large.

5, in the configuration shown in FIG. 4, the fine hole H central axis A _H and Z direction and forms an angle (unit: °) with the light quantity of the outgoing light emitted from the upper opening O _U (unit: arbitrary, optionally It is a graph which shows the relationship with a unit). Figure 5 is an optical parallel light incident on the lower opening O _D of the fine hole H, the fine hole H upper opening O _U and the lower opening O _D lower opening O of the hole diameter and the upper opening O _U of _{The case} where the aspect ratio with the length up to D is 1:20, the reflectance of the inner surface of the small hole H is 0.5, and no diffused reflection occurs on the inner surface is shown. As shown in FIG. 5, by measuring the quantity of the outgoing light emitted from the upper opening O _U of small holes H, it is possible to estimate the angle between the central axis A _H and Z direction fine hole H.

Inner shape measuring machine 10 corresponds from the light source 19 to the second opening through the small hole H of the incident light entering the lower opening O _D corresponding to the first opening of the small hole H of the workpiece W the emitted light from the upper opening O _U received by the camera 34, by changing the inclination of the linear tilting stage 16 so that the light receiving amount is large, the rotation of the rotating body 14 and the central axis a _H of the small hole H the deviation of the axis a _R is within the target value.

FIG. 6 is a flowchart showing an example of processing of the alignment method of the inner surface shape measuring machine 10. As shown in FIG. 6, the alignment method of the inner surface shape measuring machine 10 includes an alignment step of the camera 34 in step SA and an alignment step of the small hole H in step SB.

FIG. 7 is a flowchart showing an example of processing of the alignment process of the camera 34. Further, FIG. 8 is a diagram for explaining an alignment process of the camera 34.

In step S1, the camera displacement acquiring unit 57 acquires the displacement of the optical axis A _C is coaxial with the cylindrical surface 34A of the camera 34 by the camera alignment displacement detector 36. Here, as shown in 208A in FIG. 8, the camera alignment displacement detector 36, the height of the Z direction to detect the displacement of the cylindrical surface 34A of the measurement height of L _1. The height in the Z direction is the distance in the Z direction from the reference position, and here, it is the distance in the Z direction from the upper end of the camera 34.

In step S2, the camera displacement acquiring unit 57 acquires the displacement of the optical axis A _C is coaxial with the cylindrical surface 34A of the camera 34 by the camera alignment displacement detector 36. Here, as shown in 208B of FIG. 8, the camera alignment displacement detector 36 detects the displacement of the cylindrical surface 34A having the measured height _{L 2 in the Z direction.}

In step S3, the camera displacement acquisition part 57 from the acquired displacement of the measurement height L ₁ of the cylindrical surface 34A of the displacement and the cylindrical surface 34A of the obtained measured height L ₂ in step S2 in the step S1, the camera 34 calculate the position and inclination of the optical axis a _C. Furthermore, the camera displacement acquiring unit 57 calculates the amount of deviation between the optical axis A _C axis of rotation A _R and the camera 34 of the rotating body 14.

Finally, in step S4, the camera position tilt control section 59, based on the amount of deviation between the optical axis A _C axis of rotation A _R and the camera 34 of the rotating body 14 calculated in step S3 of the linear tilt mechanism 33 not It drives the illustrated motor, as shown in 208C of FIG. 8, the optical axis _{a C} of the camera 34 and the rotation axis _{a R} and coaxially of the rotating body 14. In this state, the light source 19 and the camera 34 are arranged so as to face each other along the Z direction. Based on the amount of deviation between the optical axis A _C axis of rotation A _R and the camera 34 of the rotating body 14, the optical axis A _C of the camera 34 may be a rotational axis A _R and coaxially of the rotating body 14 manually by the user.

With the above, the alignment step of the camera 34 in step SA is completed. Subsequently, the alignment step of the small hole H in step SB is performed. In order to perform the alignment step of the small hole H, the user first installs the work W on the work installation jig 18.

FIG. 9 is a diagram showing an inner surface shape measuring machine 10 before and after the fine hole alignment step. 209A of FIG. 9 shows the inner surface shape measuring machine 10 before performing the fine hole alignment step. As shown in 209A, the alignment step prior to the fine hole is deviated and the rotation axis A _R of the rotary body 14 and the central axis A _H of the small hole H of the workpiece W.

FIG. 10 is a flowchart showing an example of processing of the alignment step of the small hole H. In step S11, the light amount acquisition unit 61 turns on the light source 19 which is a passing light generating light source.

In step S12 (an example of a light quantity acquisition step), the measurement control unit 52, such that the upper opening O _U of small holes H of the workpiece W enters the shooting range of the camera 34, respectively (not shown) of the carriage 22 and the arm 24 The motor is driven to move the camera 34. Furthermore, light quantity acquisition unit 61 controls the camera 34 to measure the amount of incident light _{P 1} to the camera 34.

The incident light amount P ₁ is measured by, for example, keeping the aperture of the camera 34 (not shown) constant, discharging the charge of the image pickup element (not shown) by the electronic shutter function, accumulating the charge for a certain period of time, and measuring the accumulated charge amount.

The output unit 63 outputs the incident light amount P ₁ (an example of deviation information between the central axis of the small hole and the rotation axis of the rotating body) acquired by the light amount acquisition unit 61 to the stage control unit 62 (an example of the output process).

In step S13 (an example of the stage control step), the stage control unit 62 controls a motor (not shown) that drives the linear motion tilt stage 16, and changes the tilt of the linear motion tilt stage 16 by the step angle in the set direction. Here, it is assumed that the inclination of the linear motion inclination stage 16 in the X direction is changed. The setting direction is, for example, the left direction shown in FIG. 9 in the X direction, and the step angle is, for example, an angle θ ₁ .

In step S14 (an example of a light quantity acquisition step), the light quantity acquiring unit 61 controls the camera 34 to measure the amount of incident light _{P 2} to the camera 34. The incident light amount P ₂ is measured under the same conditions as the measurement of the incident light amount P _1. The output unit 63 outputs the incident light amount P ₂ of light quantity acquisition unit 61 has acquired to the stage control unit 62.

In step S15, the stage control unit 62 determines whether the _{incident light amount P 1} > the incident light amount P _2. When the incident light amount P ₁ ≤ the incident light amount P _2, that is, when the incident light amount increases or does not change due to the change in the inclination of the linear motion tilt stage 16, the control device 50 performs the process of step S12. That is, the processes of steps S12 to S14 are repeated until the amount of incident light decreases.

On the other hand, when the incident light amount P ₁ > the incident light amount P _2, that is, when the incident light amount is reduced due to the change in the inclination of the linear motion tilt stage 16, the control device 50 performs the process of step S16.

In step S16, the stage control unit 62 reverses the setting direction in step S13. For example, if the setting direction in step S13 is the left direction shown in FIG. 9 in the X direction, the setting direction set here is the right direction shown in FIG. 9 in the X direction. Further, the stage control unit 62 increments the number of inversions in the setting direction.

In step S17, the stage control unit 62 determines whether or not the number of inversions in the setting direction exceeds two times. If the number of inversions in the setting direction does not exceed two, the control device 50 performs the process of step S12. That is, the processes of steps S12 to S14 are repeated until the amount of incident light decreases. On the other hand, when the number of inversions in the setting direction exceeds two, the control device 50 performs the process of step S18.

In step S18, the stage control unit 62 sets the step angle in step S13 to a relatively small step angle. For example, if the step angle in step S13 is the angle θ ₁ , the step angle set here is, for example, the angle θ ₂ (<θ ₁ ). In the following step S19, the stage control unit 62 resets the number of inversions in the setting direction to 0.

In step S20, the stage control unit 62 determines whether or not _{the step angle set in step S18 is less than the specified value of the angle θ TH.} If the step angle is _{not less than the angle θ TH} , the control device 50 performs the process of step S12. On the other hand, when the step angle is _{less than the angle θ TH} , the control device 50 ends the process of this flowchart.

As described above, by changing the inclination of the linear motion inclination stage 16 in the X direction and searching for a position where the amount of light received by the camera 34 increases, the central axes A _H and Z directions of the small hole H of the work W can be determined. The angle in the X direction formed by can be set within the target value. Similarly, in the Y direction, by changing the tilt of the linear motion tilt stage 16 in the Y direction and searching for a position where the amount of light received by the camera 34 increases, the central axes A _H and Z of the narrow hole H of the work W The angle in the Y direction formed by the direction can be set within the target value.

Similarly, by changing the positions of the linear motion tilting stage 16 in the X and Y directions and searching for a position where the amount of light received by the camera 34 increases, the central axis A _H and the rotating body of the small hole H of the work W The deviation of the rotation axis A of 14 can be within the target value.

As shown in 209B of FIG. 9, after the small hole of the alignment process, the central axis A _H of the small hole H and the rotational axis A _R of the rotary body 14 is turned coaxially.

Note that after the central axis A _H and the angle in the Z-direction and X-direction and Y-direction formed by the small holes H of the workpiece W within the target value, observing the upper opening O _U of small holes H of the workpiece W by the camera 34 and, by changing the position of the X and Y directions of the linear tilting stage 16 such that the upper opening O _U in the center of the shooting range of the camera 34 is located, the central axis a _H of the small hole H of the workpiece W deviation between the rotational axis a _R of the rotary body 14 may be within the target value.

Thus, according to the alignment method according to the present embodiment, it is possible to align the center axis A _H of the fine hole H to the rotation axis A _R of the rotary body 14. The alignment method according to the present embodiment is effective when the small hole H is a very small hole having a diameter of 500 μm or less. Further, it is particularly effective when the diameter of the small hole H is 200 μm or less and the diameter of the probe 30 is 100 μm or less. The small hole H having a diameter larger than 500 μm may be used.

The output unit 63 outputs the deviation information between the central axis A _H of the small hole H based on the amount of incident light P ₁ obtained from the light quantity acquisition unit 61 and the rotation axis A _R of the rotary body 14, such as a not shown output interface (Example of output process) may be used. User, a linear tilting stage 16 by operating manually, it is possible to align the center axis A _H of the small hole H of the workpiece W to the rotation axis A _R of the rotary body 14 based on the output displacement information ..

<Position of light source and lower opening of work>
The position of the lower opening O _D of the light source 19 and the workpiece W, configured to match the position of the tilt axis of the tilt axis A _X and Y directions of the X direction of the linear motion tilting stage 16 is preferred.

11 and 12 are diagrams showing the positional relationship between the camera 34 and the light source 19 before and after the tilt change of the linear motion tilt stage 16, respectively. In FIGS. 11 and 12, the work W is shown in cross section. 11 shows a case where the position of the tilt axis A _X of the X direction of the lower opening O _D position and linear motion tilting stage 16 of the light source 19 and the workpiece W is relatively distant. Further, FIG. 12 shows a case where the position of the tilt axis A _X of the X direction of the light source 19 and the position and linear motion tilting stage 16 of the lower opening O _D of the workpiece W match.

In the state shown in 211A in FIG. 11, the lower opening _{O D} of the light source 19 and the workpiece W on the optical axis _{A C} of the camera 34 is disposed. Further, 211B in FIG. 11 shows a state in which the inclination of the linear motion inclination stage 16 in the X direction is changed from the state shown in 211A. As shown in 211B, the lower opening _{O D} of the light source 19 and the workpiece W is deviated from the optical axis _{A C} of the camera 34.

In contrast, in the state shown in 212A in FIG. 12, as with 211A of FIG. 11, the lower opening _{O D} of the light source 19 and the workpiece W on the optical axis _{A C} of the camera 34 is disposed. Further, 212B in FIG. 12 shows a state in which the tilt of the linear motion tilt stage 16 in the X direction is changed from the state shown in 212A. As shown in 212B, be changed slope of the linear tilting stage 16, the lower opening O _D of the light source 19 and the workpiece W is not moved from the optical axis A _C of the camera 34.

Thus, by matching the tilt axis A _X of the X direction of the light source 19 and below the workpiece W side opening O _D position and linear motion tilting stage 16, changing the inclination of the X-direction of the linear motion tilting stage 16 since the lower opening O _D of the light source 19 and the workpiece W even when no movement from the optical axis a _C of the camera 34, less affected by the light amount measurement, the small hole H of the workpiece W more accurately It becomes possible to position. Similarly, by matching the tilt axis position and Y-direction of the linear motion tilting stage 16 of the lower opening O _D of the light source 19 and the workpiece W, or when changing the inclination of the Y-direction of the linear motion tilting stage 16 since the lower opening O _D of the light source 19 and the workpiece W even when not moved from the optical axis a _C of the camera 34, the influence of the light amount measurement is small, to position the small hole H of the workpiece W more accurately Is possible.

<Other aspects of light source>
Depending on the shape of the workpiece W, it may not be possible to face the workpiece setting jig 18 a lower opening O _D. FIG. 13 is a diagram showing a state in which a work W having a special shape is placed on the work installation jig 18. In FIG. 13, the work W is shown in cross section. Workpiece W shown in FIG. 13, other portions of the workpiece W is disposed on the lower opening O _D side of the small hole H. Therefore, even when emitted light above the Z-direction from the light source 19 disposed on the workpiece setting jig 18 can not be made incident light from the lower opening O _D of the fine hole H.

Further, the workpiece W shown in FIG. 13, a narrow lower opening O _D side of the space of the small hole H. Therefore, space for inserting the light source and is insufficient, it is impossible to place the light source on the lower opening O _D side.

For such problems, by inserting a scatterer having a flexible lower opening O _D side of the small hole H of the workpiece W, the incident light from the lower opening O _D by light is incident on the scatterer You may let me.

Figure 14 is a diagram showing the insertion of the scattering body 84 to the lower opening O _D side of the small hole H of the workpiece W. In FIG. 14, the work W is shown in cross section. 214A in FIG. 14 shows before the insertion of the scatterer 84, and 214B shows after the insertion.

The scatterer 84 is a sponge of an open cell structure having elasticity and flexibility. Scatterer 84 is disposed below the opening O _D side of the small hole H. Because the scatterer 84 has flexibility, it can be inserted into the narrow space under the opening O _D side. A light source 70 is attached to the scatterer 84. The light source 70 causes light to enter the scatterer 84. Light incident on the scatterer 84 from the light source 70, the inside of the scattering medium 84 and multiple scattering is incident on the lower opening O _D.

Such scatterer 84 by arranging the lower opening O _D side, it is possible scatterers 84 to form a surface light source due to multiple scattering. Therefore, it is possible to appropriately light enters from the lower opening O _D of small holes H of the workpiece W. Also, the scatterer 84 to deform along the shape of the lower opening O _D side of the workpiece W, it is unnecessary to exact shape molding and positioning, there is an effect that a low cost. Further, since the scatterer 84 has flexibility, there is no concern that the work W will be damaged.

[Second Embodiment]
FIG. 15 is a schematic view showing the configuration of the inner surface shape measuring machine 74 according to the second embodiment. The same reference numerals are given to the parts common to the inner surface shape measuring machine 10, and detailed description thereof will be omitted. As shown in FIG. 15, the inner surface shape measuring machine 74 includes a diffuse reflector 76 on the upper surface of the work installation jig 18.

Diffuse reflection member 76 is a reflective member for entering the lower opening O _D again workpiece W by reflecting the light emitted from the lower opening O _D of the installed workpiece W to workpiece setting jig 18. Since the diffused reflector 76 does not have directionality, the reflecting surface is configured so that the reflecting angles of the incident light incident on the reflecting surface are random. It is desirable that the diffuse reflector 76 has a color such as white, which has high light reflectance.

FIG. 16 is a block diagram showing an electrical configuration of the inner surface shape measuring machine 74. The same reference numerals are given to the parts common to the inner surface shape measuring machine 10, and detailed description thereof will be omitted. As shown in FIG. 16, the inner surface shape measuring machine 74 includes a coaxial epi-illumination optical system 35 in the camera 34. Coaxial (an example of a coaxial illumination optical system) incident-light illumination optical system 35 includes an illumination light source (not shown) _(an example of a light receiving direction of the light receiving portion) optical axis A _C of the light from the illumination light source camera 34 and coaxial illumination light It is provided with a half mirror (not shown) that emits light as.

17, among the light incident from the coaxial incident illumination optical system 35 (in FIG. 17 not shown) to the upper opening O _U of small holes H of the workpiece W, from the lower opening O _D passes through the small hole H It is a figure which shows the state which the emitted light is incident on the diffuse reflector 76. In FIG. 17, the work W is shown in cross section. _{The angle formed by the central axis AH of the small hole H} and the Z direction is different between the work W shown in 217A of FIG. 17 and the work W shown in 217B, and the work W shown in 217B is the center of the small hole H. The angle formed by the axes A _H and the Z direction is relatively small.

As shown in 217A, when the angle formed by the center axis A _H and Z direction fine hole H is relatively large, by multiple scattering at the inner wall of the small hole H, the outgoing light emitted from the lower opening O _D The amount of light is relatively small. Therefore, the amount of light incident on the lower opening O _D again reflected by the diffuse reflection 76 of the outgoing light emitted from the lower opening O _D becomes relatively small, the emission light emitted from the upper opening O _U The amount of light is also relatively small.

Further, as shown in 217B, the angle formed by the center axis A _H and Z direction fine hole H be relatively small, less reflection at the inner wall of the small hole H, exiting the lower opening O _D The amount of emitted light becomes relatively large. Therefore, the amount of light incident on the lower opening O _D again reflected by the diffuse reflection 76 of the outgoing light emitted from the lower opening O _D also becomes relatively large, the outgoing light emitted from the upper opening O _U The amount of light is also relatively large.

Inner surface profile measuring instrument 74, the second opening passes through the small hole H of the incident light incident from the coaxial incident illumination optical system 35 to the upper opening O _U corresponding to the first opening of the small hole H of the workpiece W emitted from the lower opening O _D corresponding to incident on the lower opening O _D again reflected by the diffuse reflection member 76, receiving the emitted light from the upper opening O _U through the small hole H by the camera 34 and, by changing the inclination of the linear tilting stage 16 so that the light receiving amount is large, the deviation between the center axis a _H of the small hole H and the rotation axis a _R of the rotary body 14 within the target value.

When the reflective member arranged on the work installation jig 18 is a specular reflector, the reflected light has directivity, so that the orientation of the reflective member changes when the tilt of the linear motion tilt stage 16 is changed. The amount of light incident on the camera 34 changes, including the effect of. In the inner surface profile measuring instrument 74, for using a diffuse reflection member 76 to diffuse as a reflection member, incident to the camera 34 in accordance with the deviation between the central axis A _H of the small hole H of the workpiece W with the rotational axis A _R of the rotary body 14 The change in the amount of light can be measured.

Incidentally, the work W shown in FIG. 13, other portions of the workpiece W is disposed on the lower opening O _D side of the small hole H. Therefore, emitted from a coaxial epi-illumination optical system 35 (not shown in FIG. 13) even if light is incident on the upper opening O _U of small holes H of the workpiece W, from the lower opening O _D passes through the small hole H The light cannot be incident on the diffused reflector 76 on the upper surface of the work installation jig 18.

Further, the workpiece W shown in FIG. 13, although the narrow lower opening O _D side of the space of the small hole H, it is possible to insert the diffuse reflection member 76 to the lower opening O _D side. However, it is necessary to precisely positioned for a narrow space of the lower opening O _D side. Further, the diffuse reflector 76 and the work W may collide with each other and damage the work W.

For such problems, it may be inserted reflector having a flexible lower opening O _D side of the small hole H of the workpiece W.

Figure 18 is a diagram showing the insertion of a sponge-like reflector 80 to the lower opening O _D side of the small hole H of the workpiece W. In FIG. 18, the work W is shown in cross section. 218A in FIG. 18 shows before the sponge-like reflector 80 is inserted, and 218B shows after the insertion.

The sponge-like reflector 80 is a light reflecting member having elasticity and flexibility. Spongy reflector 80 reflects the small hole H light incident from the upper opening O _U of small holes H in the lower opening O _D side. It is desirable that the sponge-like reflector 80 has a color such as white, which has high light reflectance. Since the sponge-like reflector 80 has flexibility, it can be inserted into the narrow space under the opening O _D side.

Under such a sponge-like reflector 80 by inserting into the lower opening O _D side, again workpiece W by reflecting the light emitted from the lower opening O _D be a workpiece W specially shaped it can be incident on the side opening O _D. Accordingly, the inner surface shape measuring machine 74, that the received light quantity of the camera 34 to change the inclination of the linear tilting stage 16 so as to increase a rotating shaft A _R of the rotary body 14 and the central axis A _H of the small hole H The deviation can be within the target value. Spongy reflector 80 to deform along the shape of the lower opening O _D side of the workpiece W, it is unnecessary to exact shape molding and positioning, there is an effect that a low cost. Further, since the sponge-like reflector 80 has flexibility, there is an effect that there is no concern of damaging the work W.

Further, FIG. 19 is a diagram showing the insertion of a clay-like reflector 82 to the lower opening O _D side of the small hole H of the workpiece W. In FIG. 19, the work W is shown in cross section. 219A in FIG. 19 shows before the insertion of the clay-like reflector 82, and 219B shows after the insertion.

The clay-like reflector 82 is a light reflecting member having plasticity and flexibility. Clay-like reflector 82 reflects the small hole H light incident from the upper opening O _U of small holes H in the lower opening O _D side. It is desirable that the clay-like reflector 82 has a color such as white, which has high light reflectance. Since clay-like reflector 82 has flexibility, it can be inserted into the narrow space under the opening O _D side.

Under such a clay-like reflector 82 by inserting into the lower opening O _D side, again workpiece W by reflecting the light emitted from the lower opening O _D be a workpiece W specially shaped it can be incident on the side opening O _D. Accordingly, the inner surface shape measuring machine 74, that the received light quantity of the camera 34 to change the inclination of the linear tilting stage 16 so as to increase a rotating shaft A _R of the rotary body 14 and the central axis A _H of the small hole H The deviation can be within the target value. Clay-like reflector 82 to deform along the shape of the lower opening O _D side of the workpiece W, it is unnecessary to exact shape molding and positioning, there is an effect that a low cost. Further, since the clay-like reflector 82 has flexibility, there is an effect that there is no concern of damaging the work W.

[Third Embodiment]
As another embodiment for detecting the deviation between the center axis A _H of the small hole H of the workpiece W with the rotational axis A _R of the rotary body 14, a method that uses air, and method using ultrasonic waves is considered.

Figure 20 is a schematic diagram in the case of detecting a shift between the rotation axis A _R of the central axis A _H of the small hole H of the workpiece W rotating member 14 using air. In FIG. 20, the work W is shown in cross section.

Workpiece W, the lower opening O _D side which corresponds to the first opening in the interior of the workpiece holding member 86 is held by being inserted partially. In FIG. 20, the work holding member 86 is shown in cross section. An annular gasket 88 is arranged between the work W and the work holding member 86, and the space inside the work holding member 86 is maintained in airtightness.

The work holding member 86 has an air supply hole 86A. A compressed air source 90 is connected to the air supply hole 86A. The pressure air source 90 (an example of a pressure gas source) supplies air compressed by a compressor (an example of a gas) to the space inside the work holding member 86 through the air supply hole 86A. The pressure air source 90 may be a gas cylinder that supplies an inert gas such as nitrogen gas or a carbon dioxide gas such as argon gas.

The upper opening O _U side corresponding to the second opening of the workpiece W held by the workpiece holding member 86, both ends open internal are arranged cylinder 92 of the cavity. In FIG. 20, the cylinder 92 is shown in cross section. Cylinder 92, the central axis of the cavity is aligned coaxially with the rotation axis A _R of the rotary body 14. The alignment of the cylinder 92 can be adjusted in the same manner as the alignment process of the camera 34.

A thermal gas flow meter 94 is arranged inside the cylinder 92. The thermal gas flow meter 94 detects a change in the electrical resistance of the metal wiring due to the gas passing through the inside of the cylinder 92 cooling the high-temperature metal wiring as a change in the flow rate of the gas. The gas flow meter 94 is not limited to the thermal type, and known methods such as a float type, an impeller type, and an orifice type can be applied. The directivity in the Z direction is selected by the cylinder 92 and the gas flow meter 94 to obtain the gas flow rate.

The air supplied to the workpiece holding member 86 from the pressure air source 90 flows from the lower opening O _D of the workpiece W in the fine hole H, and flows out from the upper opening O _U through the small hole H. Air flowing from the upper opening O _U flows into the cylinder 92, the flow rate of air flowing into the cylinder 92 is measured by the gas flow meter 94 (an example of a flow obtaining unit) (an example of a flow obtaining step).

Since the central axis of the cylinder 92 is the rotation axis A _R and coaxial with the rotary body 14, as the deviation of the rotation axis A _R of the central axis A _H of the small hole H of the workpiece W rotating body 14 is smaller cylinder The air flowing into 92 increases.

The angle formed by the central axis A _H of the small hole H and the Z direction is different between the work W shown in 220A and the work W shown in 220B, and the work W shown in 220B is the center of the small hole H. The angle formed by the axes A _H and the Z direction is relatively small.

As shown in 220A, when the angle formed by the center axis A _H and Z direction fine hole H is relatively large, air flowing flows out of the upper opening O _U of the workpiece W inside the cylinder 92, It hits the inner wall of the cavity of the cylinder 92 and the flow is obstructed. Therefore, the flow rate measured by the gas flow meter 94 becomes relatively small.

Further, as shown in 220B, when the angle formed by the center axis A _H and Z direction fine hole H is relatively small, has flowed to flow out from the upper opening O _U of the workpiece W inside the cylinder 92 the air Reduces the amount of flow obstructed by the inner wall of the cavity of the cylinder 92. Therefore, the flow rate measured by the gas flow meter 94 becomes relatively large.

Thus, by selecting the directivity of the air stream by the cylinder 92 and the gas flow meter 94, detecting a deviation of the rotation axis A _H of the small hole H of the workpiece W with the rotational axis A _R of the rotary body 14 Can be done. The method using air is simple in configuration and can be realized at low cost.

[Fourth Embodiment]
Figure 21 is a schematic view when using ultrasound to detect the deviation of the rotation axis A _R of the rotary body 14 and the rotation axis A _H of the small hole H of the workpiece W. In FIG. 21, the work W is shown in cross section.

The lower opening O _D side which corresponds to the first aperture of the workpiece W, ultrasonic transducer 96 is disposed. The ultrasonic wave generation source 96 emits ultrasonic waves upward in the Z direction. Ultrasound is a sound wave having a frequency of 20 kHz or more and several GHz or less, which is inaudible to the human ear.

The upper opening O _U side corresponding to the second opening of the workpiece W, both ends open internal are arranged cylinder 97 of the cavity. FIG. 21 shows the cylinder 97 in cross section. Cylinder 97, the central axis of the cavity is aligned coaxially with the rotation axis A _R of the rotary body 14. The alignment of the cylinder 97 can be adjusted in the same manner as the alignment process of the camera 34.

An ultrasonic detector 98 is arranged inside the cylinder 97. The ultrasonic detector 98 detects the intensity of the ultrasonic waves incident on the cylinder 97. As the ultrasonic wave generation source 96 and the ultrasonic wave detector 98, known configurations such as a method using piezoelectric ceramics can be applied. The directivity in the Z direction is selected by the cylinder 97 and the ultrasonic detector 98 to acquire the intensity of ultrasonic waves.

The ultrasonic wave emitted toward the ultrasonic transducer 96 above the Z-direction is incident from the lower opening O _D of the workpiece W in the fine hole H, emitted from the upper opening O _U through the small hole H .. Ultrasound emitted from the upper opening O _U enters the cylinder 97, the intensity of the ultrasonic wave incident on the cylindrical 97 is measured by the ultrasonic detector 98 (an example of the intensity obtaining section) (an example of the intensity obtaining step).

Since the central axis of the cylinder 97 is the rotation axis A _R and coaxial with the rotary body 14, as the deviation of the rotation axis A _R of the central axis A _H of the small hole H of the workpiece W rotating body 14 is smaller cylinder The ultrasonic waves incident on 97 increase.

_{The angle formed by the central axis A H} of the small hole H and the Z direction is different between the work W shown in 221A of FIG. 21 and the work W shown in 221B, and the work W shown in 221B is the center of the small hole H. The angle formed by the axes A _H and the Z direction is relatively small.

As shown in 221A, when the angle formed by the center axis A _H and Z direction fine hole H is relatively large, the ultrasonic incident is emitted from the upper opening O _U of the workpiece W inside the cylinder 97 , It hits the inner wall of the cavity of the cylinder 97 and attenuates. Therefore, the intensity of the ultrasonic wave measured by the ultrasonic detector 98 becomes relatively small.

Further, as shown in 221B, when the angle formed by the center axis A _H and Z direction fine hole H is relatively small, the air that enters the interior of the tube 92 is emitted from the upper opening O _U, fine The amount of attenuation is reduced by the inner wall of the cavity in the hole H. Therefore, the intensity of the ultrasonic wave measured by the ultrasonic detector 98 becomes relatively high.

Thus, by selecting the ultrasonic directivity by the cylinder 97 and the ultrasonic detector 98, for detecting a deviation of the rotation axis A _H of the small hole H of the workpiece W with the rotational axis A _R of the rotary body 14 be able to. Similar to the method using air, the method using ultrasonic waves has a simple configuration and can be realized at low cost.

〔others〕
The technical scope of the present invention is not limited to the scope described in the above embodiments. The configurations and the like in each embodiment can be appropriately combined between the respective embodiments without departing from the spirit of the present invention.

10 ... Inner surface shape measuring machine 12 ... Main body base 14 ... Rotating body 16 ... Linear tilt stage 18 ... Work installation jig 19 ... Light source 20 ... Column 22 ... Carriage 24 ... Arm 28 ... Displacement detector 30 ... Probe 33 ... Linear motion Tilt mechanism 34 ... Camera 35 ... Coaxial epi-illumination optical system 36 ... Displacement detector for camera alignment 38 ... Optical fiber 40 ... Reflection mirror 42 ... Contact 50 ... Control device 52 ... Measurement control unit 54 ... Displacement acquisition unit 56 ... Perfect circle Degree calculation unit 57 ... Camera displacement acquisition unit 59 ... Camera position tilt control unit 61 ... Light amount acquisition unit 62 ... Stage control unit 63 ... Output unit 74 ... Inner surface shape measuring machine 76 ... Diffuse reflector 80 ... Sponge-like reflector 82 ... Clay Reflector 84 ... Scatterer 86 ... Work holding member 86A ... Air supply hole 88 ... Gasket 90 ... Pressure air source 92 ... Cylinder 94 ... Gas flow meter 96 ... Ultrasonic source 97 ... Cylinder 98 ... Ultrasonic detector A _C ... optical axis _{a H} ... central axis _{a R} ... rotational axis _{a X} ... tilt axis H ... fine hole _{O D} ... lower opening _O of the X-direction _U ... upper opening SA, SB, S1~S4, S11~S20 ... inner surface Each step of the process of the alignment method of the shape measuring machine W ... Work

Claims (11)

A rotating body that rotates around a rotation axis parallel to the first direction,
A linear tilting stage supported by the rotating body, wherein the position in the plane orthogonal to the first direction with respect to the rotating body and the tilting with respect to the plane can be changed.
A contact-type or non-contact-type probe extending parallel to the first direction, which is fixed to the linear motion tilting stage by a probe that can move in the first direction by the first linear motion mechanism. A displacement detector that detects the displacement of the inner surface of the small hole of the workpiece that rotates with the rotating body,
A light amount acquisition unit that acquires the amount of light emitted from the light source in the first direction and that is incident from the first opening of the small hole of the work and has passed through the small hole.
An output unit that outputs deviation information between the central axis of the small hole and the rotation axis based on the acquired light amount, and
Inner surface shape measuring machine equipped with. The inner surface shape measuring machine according to claim 1, further comprising a stage control unit that controls the linear motion tilting stage based on the deviation information and keeps the deviation between the central axis of the small hole and the rotation axis within a target value. The light source and the light receiving portion arranged so as to face each other along the first direction are provided.
The inner surface shape measuring device according to claim 1 or 2, wherein the light receiving unit receives light emitted from a second opening different from the first opening. A work installation jig fixed to the linear motion tilting stage and on which the work is installed is provided.
The inner surface shape measuring machine according to claim 3, wherein the light source is arranged on the work installation jig. The inner surface shape measuring machine according to claim 4, wherein the position of the tilt axis for changing the tilt of the linear motion tilt stage and the position of the light source match. A work installation jig fixed to the linear motion tilting stage and on which the work is installed,
A light receiving part that receives light and
A coaxial illumination optical system that emits light from the light source coaxially with the light receiving direction of the light receiving unit.
With
The inner surface shape measurement according to claim 1 or 2, wherein the work installation jig includes a diffuse reflector that reflects light emitted from a second opening different from the first opening and causes it to enter the second opening. Machine. A rotating body that rotates around a rotation axis parallel to the first direction,
A linear tilting stage supported by the rotating body, wherein the position in the plane orthogonal to the first direction with respect to the rotating body and the tilting with respect to the plane can be changed.
A contact-type or non-contact-type probe extending parallel to the first direction, which is fixed to the linear motion tilting stage by a probe that can move in the first direction by the first linear motion mechanism. A displacement detector that detects the displacement of the inner surface of the small hole of the workpiece that rotates with the rotating body,
The first direction of the gas flow generated from the pressure gas source and flowing out from the first opening of the narrow hole of the work and flowing out from the second opening different from the first opening. A flow rate acquisition unit that selects the directivity of the gas and acquires the flow rate,
An output unit that outputs deviation information between the central axis of the small hole and the rotation axis based on the acquired flow rate, and
Inner surface shape measuring machine equipped with. A rotating body that rotates around a rotation axis parallel to the first direction,
A linear tilting stage supported by the rotating body, wherein the position in the plane orthogonal to the first direction with respect to the rotating body and the tilting with respect to the plane can be changed.
A contact-type or non-contact-type probe extending parallel to the first direction, which is fixed to the linear motion tilting stage by a probe that can move in the first direction by the first linear motion mechanism. A displacement detector that detects the displacement of the inner surface of the small hole of the workpiece that rotates with the rotating body,
The first ultrasonic wave generated from an ultrasonic source and flowing out from a first opening of the narrow hole of the work and flowing out from a second opening different from the first opening. A strength acquisition unit that selects the directivity of the direction and acquires the strength,
An output unit that outputs deviation information between the central axis of the small hole and the rotation axis based on the acquired strength, and
Inner surface shape measuring machine equipped with. A rotating body that rotates around a rotation axis parallel to the first direction,
A linear tilting stage supported by the rotating body, wherein the position in the plane orthogonal to the first direction with respect to the rotating body and the tilting with respect to the plane can be changed.
A contact-type or non-contact-type probe extending parallel to the first direction, which is fixed to the linear motion tilting stage by a probe that can move in the first direction by the first linear motion mechanism. A displacement detector that detects the displacement of the inner surface of the small hole of the workpiece that rotates with the rotating body,
It is an alignment method of an inner surface shape measuring machine equipped with
A light amount acquisition step of acquiring the amount of light emitted from a light source in the first direction and incident from the first opening of the small hole of the work and passing through the small hole.
An output step of outputting deviation information between the central axis of the small hole and the rotation axis based on the acquired light amount, and
Alignment method of the inner surface shape measuring machine provided with. A rotating body that rotates around a rotation axis parallel to the first direction,
A linear tilting stage supported by the rotating body, wherein the position in the plane orthogonal to the first direction with respect to the rotating body and the tilting with respect to the plane can be changed.
A contact-type or non-contact-type probe extending parallel to the first direction, which is fixed to the linear motion tilting stage by a probe that can move in the first direction by the first linear motion mechanism. A displacement detector that detects the displacement of the inner surface of the small hole of the workpiece that rotates with the rotating body,
It is an alignment method of an inner surface shape measuring machine equipped with
The first direction of the gas flow generated from the pressure gas source and flowing out from the first opening of the narrow hole of the work and flowing out from the second opening different from the first opening. The flow rate acquisition process, which selects the directivity of the gas and acquires the flow rate,
An output process that outputs deviation information between the central axis of the small hole and the rotation axis based on the acquired flow rate, and
Alignment method of the inner surface shape measuring machine provided with. A rotating body that rotates around a rotation axis parallel to the first direction,
A linear tilting stage supported by the rotating body, wherein the position in the plane orthogonal to the first direction with respect to the rotating body and the tilting with respect to the plane can be changed.
A contact-type or non-contact-type probe extending parallel to the first direction, which is fixed to the linear motion tilting stage by a probe that can move in the first direction by the first linear motion mechanism. A displacement detector that detects the displacement of the inner surface of the small hole of the workpiece that rotates with the rotating body,
It is an alignment method of an inner surface shape measuring machine equipped with
The first ultrasonic wave generated from an ultrasonic source and flowing out from a first opening of the narrow hole of the work and flowing out from a second opening different from the first opening. The strength acquisition process to select the directivity of the direction and acquire the strength,
An output step for outputting deviation information between the central axis of the small hole and the rotation axis based on the acquired strength, and
Alignment method of the inner surface shape measuring machine provided with.

Images