CN112363263B - 金属-介质型激光红外多波段兼容隐身薄膜及其制备方法 - Google Patents
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Abstract
本发明涉及一种金属‑介质型激光红外多波段兼容隐身薄膜及其制备方法,该薄膜为多层膜结构,所述多层膜结构包括基底,以及在所述的基底上由内向外依次交替叠加的一氧化硅膜层和铝膜层;所述基底材料为无纺布,或PI、PET、TPU、PVC、BOPP中的一种。本发明的金属‑介质型激光红外多波段兼容隐身薄膜,实现了中远红外波段(3‑5μm和8‑14μm)和激光波长(1.064μm和10.6μm)的兼容隐身,其制作原材料只有两种材料,膜层层数只有5层,结构简单,重量轻、厚度薄,加工制作工艺成熟,易于规模化生产和应用。
Description
技术领域
本发明涉及军事隐身技术领域,尤其涉及一种金属-介质型激光红外多波段兼容隐身薄膜及其制备方法。
背景技术
现代战争中,多波段光电侦察与精确制导武器的广泛应用,对军事目标的生存带来巨大的威胁。隐身作为一种重要的对抗措施,目的是要降低目标和背景的辐射对比度或者减弱回波信号。由此产生了红外隐身、激光隐身等军事需求。
为了能实现良好的多波段隐身效果,需要隐身材料在中远红外探测波段(3-5μm和8-14μm)具有低发射率(高反射率),在激光测距或激光目标指示器的工作波长上(1.064μm和10.6μm)具有低反射率。虽然用含金属的材料制作成涂料或者薄膜能实现红外隐身,但是其在整个红外波段对激光的反射都比较大,这和激光隐身的低反射率要求是矛盾的,随着激光制导武器的广泛应用,必需解决激光和红外的多波段兼容隐身问题。
用不含金属的全介质材料制作红外低发射、激光低反射的薄膜,能够实现激光和红外的多波段兼容隐身,但是一般实现这一功能的薄膜层数较多,厚度较大,在一定程度上限制了其应用性能。
发明内容
本发明的目的在于提供一种金属-介质型激光红外多波段兼容隐身薄膜及其制备方法,该薄膜能实现中远红外波段和激光波长的兼容隐身,并且只有5层,厚度薄、容易制备。
为实现上述目的,本发明采用了以下技术方案:
一种金属-介质型激光红外多波段兼容隐身薄膜,该薄膜为多层膜结构,所述多层膜结构包括基底,以及在所述的基底上由内向外依次交替叠加的一氧化硅膜层和铝膜层;所述基底材料为无纺布,或PI、PET、TPU、PVC、BOPP中的一种。
优选的,所述多层膜在3-5μm的平均反射率>90%,在8-14μm的平均反射率>45%,在1.05-1.08μm的最大反射率<1%,在10.55-10.65μm的最大反射率<5%。
优选的,所述基底上共叠加有5层膜层,且最内层和最外层均为一氧化硅层;5层膜层由内向外各层的厚度依次为:300±20nm、50±40nm、230±10nm、15±5nm、980±10nm。。
本发明还提供了上述金属-介质型激光红外多波段兼容隐身薄膜的制备方法,具体为采用镀膜法在所述基底材料上依次交替沉积一氧化硅层和铝层。
优选的,所述镀膜法为电子束蒸发镀膜、热蒸发镀膜、磁控溅射镀膜中的一种。
本发明的有益效果在于:
本发明的金属-介质型激光红外多波段兼容隐身薄膜,实现了中远红外波段(3-5μm和8-14μm)和激光波长(1.064μm和10.6μm)的兼容隐身,若将其应用于装备上,对于保护我军重要军事目标,提高武器装备的生存概率具有重要的意义。
本发明的激光红外多波段兼容隐身薄膜制作原材料只有两种材料,膜层层数只有5层,结构简单,重量轻、厚度薄,加工制作工艺成熟,易于规模化生产和应用。
附图说明
图1为本发明的金属-介质型激光红外多波段兼容隐身薄膜的结构示意图;
图2为本发明的金属-介质型激光红外多波段兼容隐身薄膜在380nm-15000nm波长范围的法向反射光谱图;
图3为本发明的金属-介质型激光红外多波段兼容隐身薄膜在1000nm-1150nm波长范围的法向反射光谱图。
具体实施方式
下面结合具体实施方式对本发明做进一步说明:
图1为本发明的金属-介质型激光红外多波段兼容隐身薄膜的结构示意图。基底3材料为PI薄膜,在基底材料上交替镀制了一氧化硅(SiO)膜层1和铝(Al)膜层2,本实施例的基底材料为无纺布,或PI、PET、TPU、PVC、BOPP等高分子薄膜材料中的一种。各膜层的厚度自内向外依次为:302nm、50nm、234nm、11nm、983nm。
隐身薄膜在中远红外探测波段(3-5μm和8-14μm)具有低发射率(高反射率),在激光测距或激光目标指示器的工作波长上(1.064μm和10.6μm)具有低反射率,具备激光红外多波段兼容隐身能力。。
上述隐身薄膜使用电子束蒸发镀膜方式制备。制备的工艺参数为背景真空度为5.0×10-3Pa,一氧化硅的沉积速率为0.3nm/s,铝的沉积速率为0.1nm/s,基底温度为120℃。
图2和图3为本发明的金属-介质型激光红外多波段兼容隐身薄膜的法向反射光谱图。从图中分析可得,在3-5μm的平均反射率为91.1%,在8-14μm的平均反射率为50.1%,在1.05-1.08μm的最大反射率为0.4%,在10.55-10.65μm的最大反射率为4.7%,能够实现中远红外波段(3-5μm和8-14μm)和激光波长(1.064μm和10.6μm)的兼容隐身。
以上所述的实施例仅仅是对本发明的优选实施方式进行描述,并非对本发明的范围进行限定,在不脱离本发明设计精神的前提下,本领域普通技术人员对本发明的技术方案作出的各种变形和改进,均应落入本发明权利要求书确定的保护范围内。
Claims (2)
1.一种金属-介质型激光红外多波段兼容隐身薄膜,其特征在于:该薄膜为多层膜结构,所述多层膜结构包括基底,以及在所述的基底上由内向外依次交替叠加的一氧化硅膜层和铝膜层;
所述多层膜在3-5μm的平均反射率>90%,在8-14μm的平均反射率>45%,在1.05-1.08μm的最大反射率<1%,在10.55-10.65μm的最大反射率<5%;
所述基底材料为无纺布,或PI、PET、TPU、PVC、BOPP中的一种;
所述基底上共叠加有5层膜层,且最内层和最外层均为一氧化硅层;5层膜层由内向外各层的厚度依次为:
300±20nm、50±40nm、230±10nm、15±5nm、980±10nm;
采用镀膜法在所述基底材料上依次交替沉积一氧化硅层和铝层。
2.根据权利要求1所述的金属-介质型激光红外多波段兼容隐身薄膜的制备方法,其特征在于:所述镀膜法为电子束蒸发镀膜、热蒸发镀膜、磁控溅射镀膜中的一种。
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