CN112362716A - Novel ammonia gas sensor chip and preparation method thereof - Google Patents
Novel ammonia gas sensor chip and preparation method thereof Download PDFInfo
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- CN112362716A CN112362716A CN202011224566.4A CN202011224566A CN112362716A CN 112362716 A CN112362716 A CN 112362716A CN 202011224566 A CN202011224566 A CN 202011224566A CN 112362716 A CN112362716 A CN 112362716A
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- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 title claims abstract description 79
- 238000002360 preparation method Methods 0.000 title claims abstract description 11
- 239000000758 substrate Substances 0.000 claims abstract description 96
- 238000005266 casting Methods 0.000 claims abstract description 90
- 230000003197 catalytic effect Effects 0.000 claims abstract description 61
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 49
- 239000001301 oxygen Substances 0.000 claims abstract description 49
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 49
- 238000010438 heat treatment Methods 0.000 claims abstract description 38
- 238000007639 printing Methods 0.000 claims abstract description 35
- 229910021529 ammonia Inorganic materials 0.000 claims abstract description 19
- 238000005086 pumping Methods 0.000 claims abstract description 7
- 238000012360 testing method Methods 0.000 claims abstract description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 64
- 229910052697 platinum Inorganic materials 0.000 claims description 32
- 239000002245 particle Substances 0.000 claims description 18
- 239000002002 slurry Substances 0.000 claims description 18
- 239000010931 gold Substances 0.000 claims description 12
- 239000007789 gas Substances 0.000 claims description 10
- 238000006243 chemical reaction Methods 0.000 claims description 8
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 8
- 229910052737 gold Inorganic materials 0.000 claims description 8
- 238000009792 diffusion process Methods 0.000 claims description 7
- 230000009467 reduction Effects 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 5
- 239000003292 glue Substances 0.000 claims description 4
- 238000000462 isostatic pressing Methods 0.000 claims description 4
- 239000000843 powder Substances 0.000 claims description 4
- 230000001737 promoting effect Effects 0.000 claims description 4
- 238000005245 sintering Methods 0.000 claims description 4
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N titanium dioxide Inorganic materials O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 4
- 239000010410 layer Substances 0.000 description 84
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 8
- 239000003054 catalyst Substances 0.000 description 5
- 238000006555 catalytic reaction Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000002346 layers by function Substances 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 239000005416 organic matter Substances 0.000 description 2
- 230000036284 oxygen consumption Effects 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000003411 electrode reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000013178 mathematical model Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910000069 nitrogen hydride Inorganic materials 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/406—Cells and probes with solid electrolytes
- G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
- G01N27/4071—Cells and probes with solid electrolytes for investigating or analysing gases using sensor elements of laminated structure
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/406—Cells and probes with solid electrolytes
- G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
- G01N27/41—Oxygen pumping cells
Abstract
The invention discloses a novel ammonia gas sensor chip and a preparation method thereof. The chip comprises a first layer casting substrate to a fifth layer casting substrate which are sequentially arranged from top to bottom, a public external electrode is printed on the front surface of the first layer casting substrate, an inactive electrode is printed on the back surface of the first layer casting substrate, a catalytic electrode is printed on the back surface of the first layer casting substrate or the front surface of the third layer casting substrate, the inactive electrode and the public external electrode form an oxygen pumping functional unit, and the catalytic electrode and the public external electrode form an ammonia measuring functional unit; printing a reference electrode on the reverse side of the third layer of casting substrate or the front side of the fourth layer of casting substrate; and printing a heating resistor on the front surface of the fifth layer casting substrate, printing insulating layers on two sides of the heating resistor respectively, and connecting the heating resistor with a pin on the back surface of the fifth layer casting substrate through a small hole. The invention has the characteristics of simple control and accurate test, and the prepared ammonia gas sensor chip can continuously and accurately measure the contents of oxygen and ammonia gas.
Description
Technical Field
The invention belongs to the technical field of automobile exhaust sensors. In particular to a novel ammonia gas sensor chip and a preparation method thereof.
Background
The current automobile tail gas ammonia sensor chip is formed by adopting a potential difference between a catalytic electrode and a common electrode, and a concentration cell is formed to measure the content of ammonia according to the difference between the consumption of catalytic reaction ammonia on environmental oxygen and the oxygen potential difference consumed by a comparison electrode five.
The ammonia gas sensor chip has the defects that the oxygen concentration difference potential is in direct proportion to the logarithm of the oxygen content ratio according to the Nernst formula, so that the oxygen concentration difference ratio of two electrodes caused by catalytic oxygen consumption is very close to 1, the corresponding potential difference is extremely small, and the ammonia gas content is difficult to detect; even if the oxygen concentration difference ratio of the two electrodes deviates more than 1 due to the reduction of ambient oxygen through the oxygen pumping process similar to the oxygen pump and the enlargement of catalytic oxygen consumption, the condition for achieving a significant measurement effect is not satisfied.
Disclosure of Invention
The invention aims to provide a novel ammonia gas sensor chip and a preparation method thereof, and provides a sensor chip design and a preparation method for testing the accurate environment ammonia gas content by reducing the environment oxygen content through pumping oxygen and then leading the environment ammonia gas to consume oxygen through catalysis. To solve the problems set forth in the background art described above.
In order to achieve the purpose, the invention adopts the following technical scheme:
a novel ammonia gas sensor chip comprises a first layer of casting substrate, a second layer of casting substrate, a third layer of casting substrate, a fourth layer of casting substrate and a fifth layer of casting substrate which are sequentially arranged from top to bottom, wherein a public external electrode is printed on the front surface of the first layer of casting substrate, an inactive electrode is printed on the reverse surface of the first layer of casting substrate, a catalytic electrode is printed on the reverse surface of the first layer of casting substrate or the front surface of the third layer of casting substrate, the inactive electrode and the public external electrode form an oxygen pumping functional unit, and the catalytic electrode and the public external electrode form an ammonia measuring functional unit; printing a reference electrode on the reverse side of the third layer of casting substrate or the front side of the fourth layer of casting substrate; and printing a heating resistor on the front surface of the fifth layer casting substrate, printing insulating layers on the upper side and the lower side of the heating resistor respectively, and connecting the heating resistor with a pin on the back surface of the fifth layer casting substrate through a small hole.
As a further scheme of the invention: the catalytic electrode is characterized in that a catalytic electrode inactive electrode layer is printed on the surface of a corresponding position, and a catalytic electrode catalytic layer is printed on the catalytic electrode inactive electrode layer by using porous slurry.
As a further scheme of the invention: the inactive electrode and the catalytic electrode are separated by a punched second laminar flow substrate and form an electrical buffer compartment, a first chamber and a second chamber, with a slit diffusion channel left between the two chambers.
A preparation method of a novel ammonia gas sensor chip comprises the following steps:
(1) printing a public external electrode on the front surface of a first layer of casting substrate, printing an inactive electrode on the back surface of the first layer of casting substrate, printing a catalytic electrode on the back surface of the first layer of casting substrate or the front surface of a third layer of casting substrate, separating the inactive electrode and the catalytic electrode by a punched second layer of casting substrate to form a first chamber and a second chamber, reserving a slit diffusion channel between the two chambers, forming a limiting current type main pump by the inactive electrode and the public external electrode for pumping oxygen to test oxygen content, and forming a limiting current type measuring pump by the catalytic electrode and the public external electrode for measuring ammonia content;
(2) a reference electrode is printed on the reverse side of the third layer of casting substrate or the front side of the fourth layer of casting substrate, a heating resistor is printed on the front side of the fifth layer of casting substrate, insulating layers are arranged on the upper side and the lower side of the heating resistor, and the heating resistor is connected with a small hole on the reverse side of the fifth layer of casting substrate through the small hole;
(3) the five layers of substrates are subjected to isostatic pressing and superposed to form an integral green body, and the green body is cut to form a single chip green body; and (3) removing the glue and sintering at 1450 ℃ for 1-3 hours to obtain the novel ammonia gas sensor chip.
As a further scheme of the invention: the catalytic electrode is printed with a non-active electrode, then printed with a catalytic layer, the catalytic layer has the capability of promoting the reaction of ammonia gas and oxygen in the tail gas, and the content of the ammonia gas in the tail gas is calculated according to the reduction of the oxygen content after the reaction.
As a further scheme of the invention: the resistance value of the printing heating resistor is 2-20 ohms.
As a further scheme of the invention: the corresponding slurry used for each element in the novel ammonia gas sensor chip is as follows: the platinum slurry for printing the inactive electrode layer of the catalytic electrode comprises 50-99 wt% of platinum and 1-50 wt% of gold; in the platinum slurry: the particle size of platinum is 0.01-0.5 μm, and the particle size of gold is 0.01-0.5 μm;
printing a plurality of catalytic functional pastes V of catalytic electrode2O5,，WO3，TiO2The content of NiO and Au is 0-50 wt%, and the slurry comprises: the particle size of each powder is 0.01-0.5 μm;
as a further scheme of the invention: the printing of the common external electrode, the lead of the common external electrode, the reference electrode, the lead of the reference electrode, the resistance wire of the heating resistor, the lead of the resistance wire and the lead of the resistance wire is made of platinum paste, and the particle size of platinum in the platinum paste is 0.01-0.5 mu m.
Under the above manufacturing conditions, the inactive electrode and the common external electrode form a limited current type battery, and the catalytic electrode and the common external electrode also form a current type battery. In the working state, the inactive electrode pumps out only oxygen, and the catalytic electrode pumps out residual oxygen and residual oxygen left after ammonia gas further reacts. Under the mode of oxygen pump, main oxygen in the oxygen pump extraction environment in the first cavity, the ammonia is not influenced, consumes certain oxygen at second cavity ammonia catalytic reaction, surveys pump current survey ammonia content, and mathematical model is as follows:
setting the pumping-out oxygen rate constant of the inactive electrode at the working temperatureAt K1, the catalytic electrode pumped oxygen rate constant is K2, while the values of K1 and K2 can be defined by specifying NH3The atmosphere measuring limit current value Ip1 of the content and the oxygen content and the current value Ip2 of the catalytic electrode are calibrated
After calibration, the coefficients K1 and K2, the zero point corrections Ip01, Ip02 and Ip are known values, and the oxygen content and the ammonia content can be known by measuring the limiting currents Ip1 and Ip 2. The heating resistors heat the three batteries to a required temperature and simultaneously provide the value of the temperature for the electronic control unit, or the electronic control unit controls the temperature at a certain value.
Providing a working voltage V to the limiting current battery of the first chamber0The same working voltage V is provided for the two batteries of the second chamber1The heating temperature is controlled, the calibrated value is written into a control program, the output signal is processed, and the system is communicated with an ECU (electronic control Unit) of the system and is completed by a matched special electronic control unit.
Compared with the prior art, the invention has the beneficial effects that:
firstly, the electronic control unit matched with the ammonia sensor chip is simple; the coordination work of three electrochemical oxygen pumps in the prior NOx sensor technology is very difficult, the control process is complex, and an electric control unit required by the chip of the invention does not have a complex three-pump coordination work control process, and only needs two oxygen pumps to work.
Secondly, the ammonia concentration is measured accurately; according to the formula of the invention, the amount of the residual oxygen in the second chamber is smaller than the ambient oxygen content, so that the relative proportion of the ammonia gas is increased, the reduction of the oxygen content after the catalytic electrode reaction is relatively obvious, the measurement resolution is improved, and the measurement precision of the ammonia gas concentration is improved.
Thirdly, the preparation process of the ammonia gas sensor chip is simple; the air channel is reduced, the three pumps are reduced, so that the printing is simplified, and the manufacturing process of the ammonia gas sensor chip is simplified.
Therefore, the invention has the characteristics of simple manufacture and simple circuit control, and the prepared ammonia gas sensor chip has good measuring effect and can measure the oxygen content and the ammonia gas content accurately.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic structural view of a catalytic electrode of the present invention on the front side of a third layer;
in the figure: 1. the device comprises a first layer of casting substrate, a second layer of casting substrate, a third layer of casting substrate, a fourth layer of casting substrate, a fifth layer of casting substrate, a gas inlet buffer room, a first chamber, a common outer electrode, a non-active electrode, a second chamber, a catalytic electrode catalyst layer, a catalytic electrode non-active electrode layer, a reference electrode, a heating resistor, a pin, a reference electrode, a heating resistor, a pin, a reference electrode and a slit, wherein the first layer of casting substrate, the second layer of casting substrate.
Detailed Description
The technical solution in the embodiments of the present invention will be clearly and completely explained below with reference to the drawings in the embodiments of the present invention.
As shown in fig. 1, four layers of casting substrates (1, 3, 4, 5) are printed with corresponding functional layers respectively, a second layer of casting substrate 2 is punched with holes and filled with organic slurry, the five layers of casting substrates are laminated into an integral green body, and the integral green body is cut, de-glued and sintered to form a single ammonia sensor chip.
Printing a common external electrode 8 on the front surface of a first layer of casting substrate 1, printing an inactive electrode 9 on the back surface of the first layer of casting substrate 1, printing a catalytic electrode 12 on the back surface of the first layer of casting substrate 1, separating the first layer of casting substrate 1 by a punched second layer of casting substrate 2, forming an air inlet buffer room 6, a first chamber 7 and a second chamber 10, leaving a slit diffusion channel between the two chambers, forming a limiting current oxygen pump by the inactive electrode 9 and the common external electrode 8, and measuring the ammonia content by the limiting current oxygen pump formed by the catalytic electrode 12 and the common external electrode 8; a reference electrode 13 is printed on the reverse side of the third layer casting substrate 3 or the front side of the fourth layer casting substrate 4, a heating resistor 14 is printed on the front side of the fifth layer casting substrate 5, insulating layers are arranged on the upper side and the lower side of the heating resistor 14, and the heating resistor is connected with a small hole on the reverse side of the fifth layer casting substrate 5 through the small hole; the heating resistor is connected with a pin 15 at the back of the fifth layer casting substrate through a small hole.
The catalytic electrode is printed with an inactive electrode 12 firstly and then printed with a catalytic layer 11, the catalytic layer 11 has the capability of promoting the reaction of ammonia gas and oxygen in the tail gas, and the content of the ammonia gas in the tail gas is calculated according to the reduction of the oxygen content after the reaction;
printing platinum paste on the outer electrode 8 and the reference electrode 13, wherein the particle size of platinum is 0.1 mu m; mixing with proper amount of organic matter to obtain the invented paste meeting the requirements for printing.
The platinum slurry for printing the inactive electrode layer 12 of the catalytic electrode comprises 70wt% of platinum and 45wt% of gold; in the platinum slurry: the particle size of platinum is 0.3 μm, and the particle size of gold is 0.4 μm;
the catalyst layer 11 of the catalyst electrode is printed with a plurality of pastes having a catalytic function, wherein V2O5，WO3，TiO2NiO, Au content 15 wt%, 25wt%, 20 wt%, 40 wt%, 35wt%, respectively, in the slurry: the particle size of each powder is 0.35 μm, 0.4 μm, 0.45 μm, 0.09 μm, 0.25 μm;
the front surface of the fifth layer casting substrate 5 is printed with a heating resistor 14 with the resistance value of 5 ohms, insulating layers 15 are printed on two sides of the heating resistor, and the heating resistor 14 is connected with the back surface pins of the fifth layer casting substrate 5 through conductive small holes.
The lead wire of the public external electrode, the reference electrode, the lead wire of the reference electrode, the resistance wire of the heating resistor, the lead wire of the resistance wire and the lead wire of the resistance wire are printed by platinum paste, and the particle size of platinum in the platinum paste is 0.4 mu m.
The five layers of substrates are subjected to isostatic pressing and are superposed to form an integral green body, and the green body is cut to form a single chip green body; and (3) removing the glue and sintering at 1450 ℃ for 2 hours to prepare the novel ammonia gas sensor chip. After the chip is manufactured, the chip is calibrated in a standard atmosphere and works in combination with the matched electric control unit.
Example 2
As shown in fig. 1, four layers of casting substrates (1, 3, 4, 5) are printed with corresponding functional layers respectively, a second layer of casting substrate 2 is punched with holes and filled with organic slurry, the five layers of casting substrates are laminated into an integral green body, and the integral green body is cut, de-glued and sintered to form a single ammonia sensor chip.
Printing a common external electrode 8 on the front surface of a first layer of casting substrate 1, printing an inactive electrode 9 on the back surface of the first layer of casting substrate 1, printing a catalytic electrode 12 on the back surface of the first layer of casting substrate 1, separating the first layer of casting substrate 1 by a punched second layer of casting substrate 2, forming an air inlet buffer room 6, a first chamber 7 and a second chamber 10, and leaving a slit diffusion channel between the two chambers, wherein the slit diffusion channel comprises a slit 16, the inactive electrode 9 and the common external electrode 8 form a limiting current oxygen pump, and the catalytic electrode 12 and the common external electrode 8 form a limiting current type oxygen pump for measuring the ammonia content; a reference electrode 13 is printed on the reverse side of the third layer casting substrate 3 or the front side of the fourth layer casting substrate 4, a heating resistor 14 is printed on the front side of the fifth layer casting substrate 5, insulating layers 15 are arranged on the upper side and the lower side of the heating resistor 14, and the heating resistor is connected with a small hole on the reverse side of the fifth layer casting substrate 5 through the small hole;
the catalytic electrode is printed with an inactive electrode 12 firstly and then printed with a catalytic layer 11, the catalytic layer 11 has the capability of promoting the reaction of ammonia gas and oxygen in the tail gas, and the content of the ammonia gas in the tail gas is calculated according to the reduction of the oxygen content after the reaction;
printing platinum paste on the outer electrode 8 and the reference electrode 13, wherein the particle size of platinum is 0.1 mu m; mixing with proper amount of organic matter to obtain the invented paste meeting the requirements for printing.
The platinum slurry for printing the inactive electrode layer 12 of the catalytic electrode comprises 70wt% of platinum and 45wt% of gold; in the platinum slurry: the particle size of platinum is 0.3 μm, and the particle size of gold is 0.4 μm;
the catalyst layer 11 of the catalyst electrode is printed with a plurality of pastes having a catalytic function, wherein V2O5,，WO3，TiO2NiO, the content of Au is respectively 25wt%, 35wt%, 15 wt%, 35wt% and 25wt%, and in the slurry: the particle size of each powder is 0.15 μm, 0.35 μm, 0.15 μm, 0.1 μm, 045 μm;
the front surface of the fifth layer casting substrate 5 is printed with a heating resistor 14 with the resistance value of 5 ohms, insulating layers 15 are printed on two sides of the heating resistor, and the heating resistor 14 is connected with the back surface pins of the fifth layer casting substrate 5 through conductive small holes.
The lead wire of the public external electrode, the reference electrode, the lead wire of the reference electrode, the resistance wire of the heating resistor, the lead wire of the resistance wire and the lead wire of the resistance wire are printed by platinum paste, and the particle size of platinum in the platinum paste is 0.3 mu m.
The five layers of substrates are subjected to isostatic pressing and are superposed to form an integral green body, and the green body is cut to form a single chip green body; and (3) removing the glue and sintering at 1450 ℃ for 1 hour to prepare the novel ammonia gas sensor chip. After the chip is manufactured, the chip is calibrated in a standard atmosphere and works in combination with the matched electric control unit.
The foregoing is a preferred embodiment of the present invention, and it will be apparent to those skilled in the art that variations, modifications, substitutions and alterations can be made in the embodiment without departing from the principles and spirit of the invention.
Claims (8)
1. A novel ammonia sensor chip which is characterized in that: the device comprises a first layer of casting substrate, a second layer of casting substrate, a third layer of casting substrate, a fourth layer of casting substrate and a fifth layer of casting substrate which are sequentially arranged from top to bottom, wherein a public external electrode is printed on the front surface of the first layer of casting substrate, an inactive electrode is printed on the back surface of the first layer of casting substrate, a catalytic electrode is printed on the back surface of the first layer of casting substrate or the front surface of the third layer of casting substrate, the inactive electrode and the public external electrode form an oxygen pumping functional unit, and the catalytic electrode and the public external electrode form an ammonia measuring functional unit; printing a reference electrode on the reverse side of the third layer of casting substrate or the front side of the fourth layer of casting substrate; and printing a heating resistor on the front surface of the fifth layer casting substrate, printing insulating layers on the upper side and the lower side of the heating resistor respectively, and connecting the heating resistor with a pin on the back surface of the fifth layer casting substrate through a small hole.
2. A novel ammonia gas sensor chip as defined in claim 1 wherein: the catalytic electrode is characterized in that a catalytic electrode inactive electrode layer is printed on the surface of a corresponding position, and a catalytic electrode catalytic layer is printed on the catalytic electrode inactive electrode layer by using porous slurry.
3. A novel ammonia gas sensor chip as defined in claim 1 wherein: the inactive electrode and the catalytic electrode are separated by a punched second laminar flow substrate and form an air inlet buffer room, a first chamber and a second chamber, and a slit diffusion channel is reserved between the two chambers.
4. A method for preparing a novel ammonia gas sensor chip as claimed in any one of claims 1 to 3, characterized by comprising the following steps:
(1) printing a public external electrode on the front surface of a first layer of casting substrate, printing an inactive electrode on the back surface of the first layer of casting substrate, printing a catalytic electrode on the back surface of the first layer of casting substrate or the front surface of a third layer of casting substrate, separating the inactive electrode and the catalytic electrode by a punched second layer of casting substrate to form a first chamber and a second chamber, reserving a slit diffusion channel between the two chambers, forming a limiting current type main pump by the inactive electrode and the public external electrode for pumping oxygen to test oxygen content, and forming a limiting current type measuring pump by the catalytic electrode and the public external electrode for measuring ammonia content;
(2) a reference electrode is printed on the reverse side of the third layer of casting substrate or the front side of the fourth layer of casting substrate, a heating resistor is printed on the front side of the fifth layer of casting substrate, insulating layers are arranged on the upper side and the lower side of the heating resistor, and the heating resistor is connected with a small hole on the reverse side of the fifth layer of casting substrate through the small hole;
(3) the five layers of substrates are subjected to isostatic pressing and superposed to form an integral green body, and the green body is cut to form a single chip green body; and (3) removing the glue and sintering at 1450 ℃ for 1-3 hours to obtain the novel ammonia gas sensor chip.
5. The preparation method of the novel ammonia gas sensor chip according to claim 4, wherein the catalytic electrode is printed with an inactive electrode and then printed with a catalytic layer, the catalytic layer has the capability of promoting the reaction of ammonia gas and oxygen in the tail gas, and the content of ammonia gas in the tail gas is calculated according to the reduction of the oxygen content after the reaction.
6. The preparation method of the novel ammonia gas sensor chip as claimed in claim 4, wherein the resistance value of the printed heating resistor is 2-20 ohms.
7. The method for preparing the novel ammonia gas sensor chip as claimed in claim 4, wherein the corresponding slurry used for each element in the novel ammonia gas sensor chip is: the platinum slurry for printing the inactive electrode layer of the catalytic electrode comprises 50-99 wt% of platinum and 1-50 wt% of gold; in the platinum slurry: the particle size of platinum is 0.01-0.5 μm, and the particle size of gold is 0.01-0.5 μm;
printing a plurality of catalytic functional pastes V of catalytic electrode2O5, WO3,TiO2The content of NiO and Au is 0-50 wt%, and the slurry comprises: the particle size of each powder is 0.01 to 0.5 μm.
8. The preparation method of the novel ammonia gas sensor chip as claimed in claim 4, wherein the common external electrode, the lead of the common external electrode, the reference electrode, the lead of the reference electrode, the resistance wire of the heating resistor, the lead of the resistance wire and the platinum paste for printing of the lead of the resistance wire are used, and the platinum particle size in the platinum paste is 0.01-0.5 μm.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114414641A (en) * | 2022-01-24 | 2022-04-29 | 深圳市富济新材料科技有限公司 | Platinum-rhodium composite electrode for nitrogen-oxygen sensor chip and preparation method thereof |
| CN115078503A (en) * | 2022-06-21 | 2022-09-20 | 武汉科技大学 | Sensor chip for simultaneously measuring nitrogen oxide and ammonia gas and manufacturing method thereof |
| CN115078502A (en) * | 2022-06-21 | 2022-09-20 | 武汉科技大学 | Step-by-step integrated ammonia gas sensor chip and manufacturing method thereof |
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