CN112344872A - Online graphite boat deformation detection system and deformation detection method - Google Patents
Online graphite boat deformation detection system and deformation detection method Download PDFInfo
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Abstract
The invention discloses an online graphite boat deformation detection system and a deformation detection method, wherein the detection system comprises: the graphite boat conveying module, the laser measuring module, the analysis processing module and the control module are arranged in the graphite boat conveying module; the control module and the analysis processing module are both arranged on the industrial personal computer, and the control module is in communication connection with the laser measurement module; the graphite boat conveying module is arranged between the PECVD machine table and the automatic loading and unloading machine table and is used for conveying graphite boats; the laser measurement module is arranged at any position between the PECVD machine table and the automatic loading and unloading machine table, measures the moving graphite boat in real time, and uploads the measurement data to the analysis processing module; and the analysis processing module is used for calculating and analyzing the measurement data and obtaining the detection result of whether the graphite boat deforms or not. The invention adopts full-automatic production, and is additionally provided with the laser measurement module and the analysis processing module to detect the deformation of the running graphite boat, thereby saving the work of manual detection of the graphite boat by periodic shutdown and improving the productivity.
Description
Technical Field
The invention relates to the technical field of graphite boat deformation detection, in particular to an online graphite boat deformation detection system and a deformation detection method.
Background
With the continuous reduction of the photovoltaic power generation cost, the solar power generation has wider market space. The graphite boat is used as a carrier when the solar cell is plated with the antireflection film, and the structure and the size of the graphite boat directly influence the conversion efficiency and the production efficiency of the silicon wafer. The automatic loading and unloading machine of the graphite boat places the silicon chips which are not coated with films on the clamping points of the graphite boat pages through the robot sucker, and each boat page can be placed with a fixed number of silicon chips. After all the silicon wafers are placed, the graphite boat is driven by a belt line to enter a PECVD coating machine. The silicon wafers on the graphite boat are subjected to specific chemical reaction in a PECVD coating machine under a high-temperature condition, so that the coating process on the surfaces of the silicon wafers is realized. And the graphite boat after the silicon wafer is coated is withdrawn from the PECVD, and then is transported to an automatic wafer loading and unloading machine through a belt line, and a robot of the automatic wafer loading and unloading machine station unloads the finished silicon wafer after the coating is finished from the graphite boat. And after the finished silicon wafer is unloaded, putting the original silicon wafer without the film coating into the graphite boat again by the robot, and repeating the processes in sequence.
In the production process, the graphite boat is often lifted by a metal tray on a belt line and returns back and forth on the belt line to enter between the automatic loading and unloading machine and the PECVD. The graphite boat is composed of a plurality of graphite boat pages, graphite clamping points are arranged on the graphite boat pages, and the graphite clamping points are used for supporting silicon wafers among the graphite boat pages. The adjacent graphite boat pages are separated by ceramic sleeves and are fixed by ceramic rods, and the two ends of each ceramic rod are assembled and fixed by graphite nuts. The graphite boat after the assembly is composed of a plurality of vertically placed and parallel graphite boat pages, the whole graphite boat is consistent in upper and lower width, the intervals between the graphite boat pages are fixed and equal, and the graphite boat pages are all perpendicular to the ground. However, due to the influence of factors such as vibration of a machine table, graphite boat transportation by a robot, high-voltage discharge and the like in the production process, the conditions of looseness of ceramic sleeves and ceramic rods of the graphite boat, breakage of the ceramic rods and the like can be caused, and as a result, the graphite boat has abnormal conditions such as left and right inconsistency, vertical dislocation, non-parallel boat pieces and the like, and even serious conditions such as boat piece damage and the like can be caused. Become unusual if the graphite boat appears, will lead to graphite boat page or leaf interval not equal, graphite boat distortion, graphite boat page or leaf out of plumb in the circumstances such as ground, this time that will lead to terminal sucking disc that is parallel to each other of robot to loading and unloading the piece in the graphite boat, thereby the condition on the stuck point can not be placed to partial silicon chip has appeared, thereby the silicon chip drops and leads to the piece to take place. The graphite boat with serious deformation can even damage a plurality of suckers arranged on the robot, and the suckers are damaged, so that greater loss is caused.
At present, the graphite boat is carried from the machine table to be manually checked regularly and regularly in the industry, and no matter whether the graphite boat is deformed or not, the operation can lead to process stagnation, greatly influences the productivity of the whole machine table and causes huge loss to production. Therefore, it is necessary to develop a rapid and intelligent detection system and method capable of predicting the deformation of the graphite boat in advance.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provides an online graphite boat deformation detection system and a deformation detection method, so as to solve the problem that the deformation of a graphite boat cannot be judged in advance in the prior art, and whether the graphite boat is deformed or not needs to be checked regularly and manually, so that the working procedure stagnation affects the productivity.
In order to achieve the purpose, the invention is realized by the following technical scheme: the invention provides an online graphite boat deformation detection system, which comprises: the graphite boat conveying module, the laser measuring module, the analysis processing module and the control module are arranged in the graphite boat conveying module; the control module and the analysis processing module are both arranged on an industrial personal computer, the control module is in communication connection with the laser measuring module, and the control module is used for triggering the laser measuring module to be started; the graphite boat conveying module is arranged between the PECVD machine table and the automatic loading and unloading machine table and is used for conveying graphite boats; the laser measurement module is arranged at any position between the PECVD machine table and the automatic loading and unloading machine table, and is used for measuring the graphite boat in motion in real time and uploading measurement data to the analysis processing module; and the analysis processing module is used for calculating and analyzing the measurement data and obtaining the detection result of whether the graphite boat deforms or not.
Further, the graphite boat transport module comprises: the graphite boat loading device comprises a tray, a conveying belt and a driving device, wherein the graphite boat is loaded on the tray, the tray is placed on the conveying belt, and the driving device drives the conveying belt to run; the tray is characterized in that the front end and the rear end of the tray are provided with raised clamping positions, the front end and the rear end of the graphite boat are provided with bases, the bases are provided with two positioning parts corresponding to the clamping positions, and when the graphite boat is loaded on the tray, the clamping position is clamped between the two positioning parts.
Further, the laser measuring module includes: the graphite boat comprises two mounting brackets and a plurality of displacement sensors arranged on the two mounting brackets, wherein the two mounting brackets are arranged on the two opposite outer sides of the conveying belt in a face-to-face mode, the distance between the two mounting brackets is larger than the width of the graphite boat, and the two displacement sensors at the same horizontal height on the two mounting brackets are arranged in a matching mode.
Furthermore, each mounting bracket is provided with two pairs of displacement sensors, and each displacement sensor can be mounted on the mounting bracket in a vertically and horizontally adjustable manner; the two pairs of displacement sensors are respectively arranged on the mounting bracket corresponding to the upper part and the lower part of the graphite boat.
Further, still include a plurality of formula sensors that trigger, a plurality of formula sensors that trigger are located on PECVD board and the automatic piece board of going up and down respectively, a plurality of formula sensors that trigger with go up piece board PLC communication connection, the formula sensor that triggers is used for detecting the graphite boat to send the signal to the last piece board PLC of going down.
Further, the analysis processing module includes: the system comprises a DLL dynamic link library, a real-time database, an analysis unit and a display unit; the DLL dynamic link library is communicated with the laser measurement module in real time, and real-time reading of measurement data is guaranteed; the real-time database is used for simultaneously storing a plurality of measurement data of the laser measurement module; the analysis unit is used for calculating and analyzing the measurement data to obtain the detection result of the graphite boat; the display unit is used for displaying the change trend of the measurement data of the graphite boat.
The invention also provides an online graphite boat deformation detection method, which comprises the following steps:
step 1, when the graphite boat enters a detection area, starting a laser measurement module;
step 2, in the process that the graphite boat passes through the laser measurement module, the displacement sensor continuously measures the graphite boat, and measurement data are stored in a real-time database in parallel through a DLL (dynamic link library);
step 3, the analysis processing module processes data through a data splicing algorithm and calculates the width of each part of the upper part and the lower part of the graphite boat;
step 4, the analysis processing module calculates deformation error data of the graphite boat according to the data information in the step 3, and gives a judgment result whether the graphite boat deforms or not;
and 5, the detection system is restored to the state in the step 1, and a new graphite boat is waited to enter the detection system.
Further, the step 1 further comprises: a trigger sensor detects the entering of the graphite boat and sends a signal to an upper wafer table PLC and a lower wafer table PLC, the upper wafer table PLC and the lower wafer table PLC communicate with a control module according to the signal, and the control module controls a laser measurement module to start measurement;
further, the step 3 also comprises the calculation of the length of the ceramic rod and the distance data of the graphite nut.
Further, the step 4 further includes: and displaying the test result on a display unit in a trend chart mode, informing the upper and lower wafer machine PLC of the deformation error data, and giving a prompt whether the graphite boat needs to be taken out manually by the upper and lower wafer machine PLC.
By adopting the scheme, the invention provides an online graphite boat deformation detection system and a deformation detection method, which have the following beneficial effects:
(1) the graphite boat can be detected in motion, the detection time is short, and the graphite boat does not need to be manually taken down periodically or at regular time for detection. The work of needing to be shut down periodically and carrying out manual inspection on the graphite boat is saved. The labor and the cost are saved, the use efficiency of the graphite boat is improved, and the productivity is improved.
(2) The detection system pairs the displacement sensors in advance, analyzes the data of a plurality of pairs of displacement sensors by adopting a data splicing algorithm, can accurately calculate the data of each acquisition point of the graphite boat, and judges whether the graphite boat is deformed or the graphite nut is loosened, the ceramic rod is broken and the like.
(3) The detection rate of various deformation of the graphite boat in motion is high, and the deformation comprises abnormal, distortion, expansion and the like of the upper, lower, left and right sizes. The detection precision is high, and the um-level precision can be achieved.
Drawings
FIG. 1 is a schematic structural diagram of an online graphite boat deformation detection system according to the present invention.
FIG. 2 is a right side view of the online graphite boat deformation detecting system according to the present invention.
FIG. 3 is a block diagram of the online graphite boat deformation detecting system according to the present invention.
FIG. 4 is a schematic flow chart of the online graphite boat deformation detection method of the present invention.
Detailed Description
The invention is described in detail below with reference to the figures and the specific embodiments.
The invention actively responds to the idea of intelligent manufacturing 2025 advocated by the state, adopts the idea of a digital factory, greatly upgrades the traditional equipment, introduces a laser measurement module on the basis of a graphite boat conveying module, is assisted by a data analysis method of an analysis processing module, realizes the unmanned and intelligent production process of the process, and really realizes a black light factory. The invention particularly provides an online graphite boat deformation detection system which can automatically detect and analyze a running graphite boat, automatically obtain the deformation condition of the graphite boat, has short detection time and high precision, does not need to be stopped for manual detection, greatly improves the use efficiency of the graphite boat and improves the productivity. Through real-time analysis and statistics of the detection data, which part of the graphite boat generates deformation is judged, such as: and (4) loosening the long and wide graphite nuts, breaking the ceramic rods and the like, and then trimming the graphite nuts. Referring to fig. 1-3, the online graphite boat deformation detecting system includes: a graphite boat conveying module 10, a laser measuring module 20, an analysis processing module (not shown) and a control module (not shown). The control module and the analysis processing module run on an industrial personal computer, and the control module is in communication connection with the laser measuring module 20 and is used for triggering the laser measuring module to be started; the graphite boat conveying module 10 is arranged between a PECVD machine table and an automatic loading and unloading machine table and is used for conveying graphite boats 30; the laser measurement module 20 is arranged at any position between the PECVD machine table and the automatic loading and unloading machine table, and is used for measuring the graphite boat 30 in motion in real time and uploading measurement data to the analysis processing module; the analysis processing module performs calculation analysis on the measurement data to obtain a detection result of whether the graphite boat 30 is deformed.
Specifically, as shown in fig. 1, the graphite boat transport module 10 includes: tray 11, conveyer 12 and drive arrangement (not marked), graphite boat 30 load on tray 11, tray 11 connect in conveyer 12 is last, and is preferred, tray 11 is the metal tray, and the metal tray is used for lifting graphite boat 30. The driving device drives the conveying belt 12 to operate, and the tray 11 operates along with the conveying belt 12 to convey the graphite boat 30 loaded on the tray. The front end and the rear end of the tray 11 are respectively provided with a convex clamping position 13, the front end and the rear end of the graphite boat 30 are respectively provided with a base 31, the base 31 is provided with two positioning parts 311 corresponding to the clamping positions 13, when the graphite boat 30 is loaded on the tray 11, the clamping positions 13 are clamped between the two positioning parts 311, and the graphite boat 30 is supported and fixed. The conveyer belt 12 is divided into a plurality of sections and is respectively arranged in the PECVD machine and the automatic loading and unloading piece. Under the drive of the driving device, the graphite boat 30 moves back and forth between the PECVD machine and the automatic loading and unloading machine along with the transmission belt 12. Preferably, two slide rails 14 are further disposed on two sides of the conveyor belt 12, two slide blocks (not shown) are disposed on two sides of the tray 11, the slide blocks can slide along the slide rails 14, and the two slide rails 14 support and stabilize the tray 11 and the graphite boat 30, so that the conveying is more stable. On the automatic wafer loading and unloading machine, the conveying belt 12 carries the graphite boat 30 from the PECVD machine to the robot wafer loading and unloading position, and the robot unloads the coated silicon wafers and the uncoated silicon wafers from the graphite boat 30. The graphite boat 30 loaded with the silicon wafers without film coating is transported to a PECVD machine through the transmission belt 12, and the mechanical arm in the PECVD machine can grab the graphite boat 30 and place the graphite boat in a corresponding high-temperature tube for film coating.
Further, as shown in fig. 1 or 2, the laser measuring module 20 includes: two mounting brackets 21 and a plurality of pairs of displacement sensors 22 arranged on each mounting bracket 21, wherein the two mounting brackets 21 are arranged on two opposite outer sides of the conveying belt 12 in a face-to-face manner, and the distance between the two mounting brackets 21 is larger than the width of the graphite boat 30, so that the graphite boat 30 can pass through the displacement sensors on the two mounting brackets 21. The two displacement sensors 22 at the same horizontal height on the two mounting brackets 21 are arranged in pairs, that is, each pair of displacement sensors 22 is respectively arranged on the two mounting brackets 21, and the mounting heights of each pair of displacement sensors 22 on the two mounting brackets 21 are the same, so that the width value of the graphite boat 30 passing through the point can be obtained through the data measured by the pair of displacement sensors. Preferably, two pairs of displacement sensors are arranged on each mounting bracket 21, each displacement sensor can be mounted on the mounting bracket in a vertically and horizontally adjustable manner, and the position of the displacement sensor can be adjusted according to requirements to obtain the width measurement of the graphite boat at different heights. The two pairs of displacement sensors are respectively arranged on the mounting bracket 21 corresponding to the upper part and the lower part of the graphite boat 30, and the two positions are used for solving the two ends of the graphite boat page so as to ensure that the measured data is accurate enough. Preferably, the displacement sensor 22 is a laser displacement sensor.
Preferably, online graphite boat deformation detecting system still includes a plurality of trigger formula sensors (not mark), a plurality of trigger formula sensors are located the PECVD board respectively and are gone up and down the piece board automatically on, a plurality of trigger formula sensors and last piece board PLC communication connection, trigger formula sensor is used for detecting graphite boat 30 to send the signal to supreme piece board PLC down, inform control module graphite boat by last piece board PLC down and have got into detection area, can carry out the skew and detect.
In addition, the analysis processing module includes: the system comprises a DLL dynamic link library, a real-time database, an analysis unit and a display unit; the DLL dynamic link library is in real-time communication with the laser measurement module, so that the real-time reading of measurement data is ensured, and the situation of loss of the measurement data is avoided. The real-time database is used for simultaneously storing the measurement data of the multiple pairs of displacement sensors of the laser measurement module, and simultaneously storing the measurement data of the displacement sensors to ensure that the calculation result does not generate deviation. The analysis unit is used for analyzing the measurement data and eliminating the fluctuation of the measurement data to obtain the detection result of the graphite boat; the measurement data of the displacement sensors arranged in pairs are calculated by adopting a splicing algorithm, so that the width value of the graphite boat 30 at the measurement point is obtained. It is worth explaining that the splicing data algorithm is used for realizing the data splicing function of two laser displacement sensors which are installed face to face, the graphite boat can shake or jump left and right due to the factors such as belt shaking and tray shaking, and the splicing algorithm needs to solve the problem of measurement data fluctuation caused by the graphite boat, so that a real measurement result is obtained. The display unit is used for displaying a change trend chart of the graphite boat measurement data, and the change trend chart displays the change trend of the measurement data of the whole graphite boat 30 in the movement process in the form of a contour map, so that a field operator can clearly know which position has abnormal conditions.
Specifically, the calculation steps of the splicing algorithm are described as follows:
(1) and generating a corresponding displacement curve graph according to the measurement data of the displacement sensor.
(2) And solving a first derivative of the displacement curve graph to obtain the position of the trough. The formula is as follows:
the independent variable increment delta x is not equal to 0;
function increment Δ y ═ f (x + Δ x) -f (x);
doing business
Extreme limit
(3) And (4) dividing the displacement curve graph according to the positions of the wave troughs to obtain the displacement curves of the ceramic rods and the boat pages. (4) And taking the median value of the displacement curve of the ceramic rod, and simultaneously calculating the slope of the displacement curve of the boat page. The slope formula is as follows:
the formula describes: in the formula, P1(x1, y1) and P2(x2, y2) are coordinates of two points on a straight line, and K is the slope of the straight line.
1. And (4) splicing and calculating the data measured by the two displacement sensors arranged opposite to each other according to the steps (1) to (4).
2. And obtaining the width value of the graphite boat 30 at the measuring point according to the distance between the two displacement sensors which are installed face to face, the median value of the displacement curve of the ceramic rod and the slope of the displacement curve of the boat page. The formula is as follows:
k1×k2＝-1
a2+b2＝c2
the formula describes: k1 and k2 are the slopes of two vertical lines, respectively, alpha is the included angle between the line and the X axis, and a, b and c are two right-angle sides and the hypotenuse of the right triangle.
Corresponding to the above detection system, the present invention further provides an online graphite boat deformation detection method, please refer to fig. 4, which includes the following steps:
step 1, when the graphite boat enters a detection area, a laser measurement module is started.
Preferably, a trigger formula sensor detects the entering of graphite boat, and wafer board PLC about signals gives, and wafer board PLC communicates with control module according to this signal about going up, and control module triggers laser measurement module start-up and measures, and the simultaneous analysis processes module begins the operation.
And 2, in the process that the graphite boat passes through the laser measurement module, the displacement sensor continuously measures the graphite boat, and the measured data are stored in the real-time database in parallel through the DLL.
In the step, the control module receives the measurement data from the plurality of displacement sensors in real time and stores the measurement data into a real-time database in parallel, wherein two pairs of displacement sensors arranged on the two mounting brackets measure simultaneously, the measurement data are also stored into the real-time database simultaneously, and the real size value of the graphite boat at the position can be accurately calculated through the measurement data of the pair of displacement sensors during calculation by the splicing algorithm.
And 3, performing data processing by the analysis processing module through a data splicing algorithm, and calculating the width of each part in the upper part and the lower part of the graphite boat. And (4) comparing the real size value calculated in the step (2) with the calibration size value of the graphite boat to obtain a detection result of whether the graphite boat deforms at the position.
In addition, the calculation of the length of the ceramic rod and the distance data of the graphite nut can be realized in the step, so that whether the ceramic rod or the graphite nut is loosened or damaged or not can be detected.
In the step, the analysis processing module calculates the measurement data of the displacement sensors arranged in a matched mode by adopting a splicing algorithm to obtain the width value of the graphite boat at the measurement point. Specifically, the analysis processing module pairs the analysis with a pair of displacement sensor's measured data, has got rid of because of the belt shake and the tray shakes the error factor that produces such as, can be accurate to um to the measuring result of graphite boat, and measurement accuracy is high, and the data that calculate each measuring point of graphite boat that can be accurate to judge whether this measuring point appears out of shape the condition. Similarly, when the measuring point is located at the position of the ceramic rod or the graphite nut, the measuring point is compared with a preset standard value, and whether the ceramic rod or the graphite nut is loosened or abnormal can be obtained.
And 4, drawing a test result trend graph of the deformation of the graphite boat by the analysis processing module according to the data information in the step 3. The test data result shows the variation trend of the measurement data of the whole graphite boat in a form of a contour diagram, and a field operator can see which position of the graphite boat has abnormal conditions through the contour diagram, so that the situation is clear.
And the step also compares the test result trend graph with the standard graphite boat trend graph to calculate the graphite boat deformation error data, and informs the upper and lower wafer machine PLC of the deformation error data, and the upper and lower wafer machine PLC gives a prompt whether the graphite boat needs to be taken out manually or not. The operator can carry out subsequent operation according to the prompt, and carry out on-site inspection or treatment on the graphite boat with abnormal deformation, thereby ensuring the optimization of the process effect.
And 5, the detection system is restored to the state in the step 1, a new graphite boat is waited to enter the detection system, and a new round of measurement is started.
When the graphite boat passes through the detection area, the laser measurement module cannot measure data, namely the measurement is finished, and at the moment, the control module stops the laser measurement module from working through the Ethernet. And (3) when a trigger sensor senses the graphite boat again, repeating the step (1) and starting to measure the graphite boat newly entering the detection area.
The invention has industrial 4.0MES interface and corresponding database, and arranges the measurement data generated by the production line into corresponding report and database for the access of the whole plant MES system.
In summary, the invention provides an online graphite boat deformation detection system and a deformation detection method, which add a laser measurement module and an analysis processing module on the basis of a graphite boat conveying module, can perform uninterrupted measurement on a running graphite boat, has a high detectable rate of various deformations, saves the work of performing manual detection on the graphite boat by periodic shutdown, saves labor and cost, improves the use efficiency of the graphite boat, and improves productivity.
The present invention is not limited to the above preferred embodiments, and any modifications, equivalent substitutions and improvements made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. An online graphite boat deformation detection system, comprising: the graphite boat conveying module, the laser measuring module, the analysis processing module and the control module are arranged in the graphite boat conveying module; the control module and the analysis processing module are both arranged on an industrial personal computer, the control module is in communication connection with the laser measuring module, and the control module is used for triggering the laser measuring module to be started; the graphite boat conveying module is arranged between the PECVD machine table and the automatic loading and unloading machine table and is used for conveying graphite boats; the laser measurement module is arranged at any position between the PECVD machine table and the automatic loading and unloading machine table, and is used for measuring the graphite boat in motion in real time and uploading measurement data to the analysis processing module; and the analysis processing module is used for calculating and analyzing the measurement data and obtaining the detection result of whether the graphite boat deforms or not.
2. The on-line graphite boat deformation detection system of claim 1, wherein the graphite boat transport module comprises: the graphite boat loading device comprises a tray, a conveying belt and a driving device, wherein the graphite boat is loaded on the tray, the tray is placed on the conveying belt, and the driving device drives the conveying belt to run; the tray is characterized in that the front end and the rear end of the tray are provided with raised clamping positions, the front end and the rear end of the graphite boat are provided with bases, the bases are provided with two positioning parts corresponding to the clamping positions, and when the graphite boat is loaded on the tray, the clamping position is clamped between the two positioning parts.
3. The on-line graphite boat deformation detection system of claim 1, wherein the laser measurement module comprises: the graphite boat comprises two mounting brackets and a plurality of displacement sensors arranged on the two mounting brackets, wherein the two mounting brackets are arranged on the two opposite outer sides of the conveying belt in a face-to-face mode, the distance between the two mounting brackets is larger than the width of the graphite boat, and the two displacement sensors at the same horizontal height on the two mounting brackets are arranged in a matching mode.
4. The on-line graphite boat deformation detecting system of claim 3, wherein each mounting bracket is provided with two pairs of displacement sensors, each displacement sensor being mounted on the mounting bracket in a vertically and horizontally adjustable manner; the two pairs of displacement sensors are respectively arranged on the mounting bracket corresponding to the upper part and the lower part of the graphite boat.
5. The on-line graphite boat deformation detecting system according to any one of claims 1 to 4, further comprising a plurality of trigger sensors respectively disposed on the PECVD platform and the automatic wafer loading and unloading platform, wherein the plurality of trigger sensors are in PLC communication connection with the wafer loading and unloading platform, and the trigger sensors are configured to detect the graphite boat and transmit signals to the wafer loading and unloading platform PLC.
6. The on-line graphite boat deformation detection system of claim 1, wherein the analysis processing module comprises: the system comprises a DLL dynamic link library, a real-time database, an analysis unit and a display unit; the DLL dynamic link library is communicated with the laser measurement module in real time, and real-time reading of measurement data is guaranteed; the real-time database is used for simultaneously storing a plurality of measurement data of the laser measurement module; the analysis unit is used for calculating and analyzing the measurement data to obtain the detection result of the graphite boat; the display unit is used for displaying the change trend of the measurement data of the graphite boat.
7. A deformation detecting method using the on-line graphite boat deformation detecting system of any one of claims 1 to 6, comprising the steps of:
step 1, when the graphite boat enters a detection area, starting a laser measurement module;
step 2, in the process that the graphite boat passes through the laser measurement module, the displacement sensor continuously measures the graphite boat, and measurement data are stored in a real-time database in parallel through a DLL (dynamic link library);
step 3, the analysis processing module processes data through a data splicing algorithm and calculates the width of each part of the upper part and the lower part of the graphite boat;
step 4, the analysis processing module calculates deformation error data of the graphite boat according to the data information in the step 3, and gives a judgment result whether the graphite boat deforms or not;
and 5, the detection system is restored to the state in the step 1, and a new graphite boat is waited to enter the detection system.
8. The deformation sensing method according to claim 7, wherein the step 1 further comprises: a trigger formula sensor detects the entering of graphite boat, and wafer board PLC about signals gives, and wafer board PLC communicates with control module according to this signal about going up, and control module control laser measurement module starts to measure.
9. The deformation sensing method according to claim 7, wherein said step 3 further comprises calculating the data of the length of the ceramic rod and the distance between the graphite nuts.
10. The deformation sensing method according to claim 7, wherein the step 4 further comprises: and displaying the test result on a display unit in a trend chart mode, informing the upper and lower wafer machine PLC of the deformation error data, and giving a prompt whether the graphite boat needs to be taken out manually by the upper and lower wafer machine PLC.
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