CN112327524B - Method and device for inspecting substrate film defect - Google Patents
Method and device for inspecting substrate film defect Download PDFInfo
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- CN112327524B CN112327524B CN202011268167.8A CN202011268167A CN112327524B CN 112327524 B CN112327524 B CN 112327524B CN 202011268167 A CN202011268167 A CN 202011268167A CN 112327524 B CN112327524 B CN 112327524B
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
Abstract
A method and a device for inspecting a substrate film defect are provided, the method comprises the following steps: according to standard reflective data, actually measured reflective data, standard light-transmitting data and actually measured light-transmitting data of a plurality of pixels from a substrate, whether the pixels have defects is compared one by one, if the pixels have the defects, whether the conditions are met, the difference value obtained by subtracting the standard reflective data from the actually measured reflective data is not less than a threshold value, the absolute value of the difference value between the actually measured light-transmitting data and the standard light-transmitting data is less than the threshold value, the pixels are not in the range of a black matrix area, if the conditions are judged to be the standard state, if the conditions are judged to be the no, a repair sending command is generated. Therefore, the inspection throughput of the substrate film defect can be improved.
Description
Technical Field
The present invention relates to a defect inspection technology, and more particularly, to a substrate film defect inspection method and apparatus for inspecting a pinhole defect in an indium tin oxide film in a color filter substrate of a liquid crystal display.
Background
In a thin film transistor liquid crystal display (TFT-LCD) manufacturing process, a color filter substrate (i.e., an upper plate) may generate defects (defects), such as ITO pinholes, when an Indium Tin Oxide (ITO) film process is performed.
Typically, the ITO pinholes are simply inspected by a Repair machine (Repair), such as determining that the Code has no Repair (e.g., laser or grinding).
However, without further inspection, if a defect density (defect density) is higher, the overall process is affected, such as the CF Repair yield and the First Pass Yield (FPY) are seriously affected, and the Repair machine productivity burden and the labor waste of Repair personnel are further caused.
Therefore, there is a need to provide a solution to the problems of the prior art.
Disclosure of Invention
In view of the above, the present invention provides a method and an apparatus for inspecting a defect of a substrate film, so as to solve the problem of insufficient inspection capability of the defect of the substrate film in the prior art.
In order to achieve the above objects, one aspect of the present invention provides a method for inspecting a substrate film defect, which is performed by a controller, comprising: driving a substrate to undergo a reflection test and a transmittance test to obtain actual measurement reflection data and actual measurement transmittance data of a plurality of pixels from the substrate; reading standard light reflection data and standard light transmission data of a plurality of pixels corresponding to the substrate, and reading a black matrix area range of the substrate; comparing whether the pixel has defects or not one by one according to the standard reflective data, the actual measurement reflective data, the standard light transmission data and the actual measurement light transmission data, recording the pixel as a standard state if the pixel has no defects, and judging whether the pixel meets the following conditions or not if the pixel has defects: the difference value of the actually measured reflective data minus the standard reflective data is greater than or equal to a threshold value; and the absolute value of the difference value between the actually measured light transmission data and the standard light transmission data is smaller than the threshold value; and the pixel is not in the range of the black matrix area; if the judgment result is yes, the standard reaching state is recorded, and if the judgment result is no, a repair sending command is generated to drive the position of the pixel to carry out a repair operation.
In an embodiment of the present invention, the step of comparing one by one whether the pixel is defective includes: judging whether the following conditions are met: the absolute value of the difference value between the standard reflective data and the measured reflective data is smaller than the threshold value; and the absolute value of the difference value between the standard light transmission data and the actually measured light transmission data is smaller than the threshold value; if the judgment result is yes, the defect is not existed, and if the judgment result is no, the defect is existed.
In an embodiment of the invention, the reflective test uses a first camera to capture an image generated by a first light source reflected by the substrate as the actually measured reflective data; and the light transmission test is to take an image generated by a second light source penetrating through the substrate by a second camera as the actual measurement light transmission data.
In an embodiment of the invention, each of the standard reflective data, the measured reflective data, the standard transmissive data and the measured transmissive data includes at least one pixel gray scale value.
In an embodiment of the present invention, the substrate film defect inspection method is suitable for inspecting a pinhole defect of an indium tin oxide film in a color film substrate of a liquid crystal display.
Another aspect of the present invention provides a substrate thin film defect inspection apparatus, comprising: a platform for placing a substrate; the first light source emits light towards one side of the platform, so that the substrate reflects the light; the first camera and the first light source are arranged on the same side of the platform and used for shooting an image of the light rays reflected by the substrate; the second light source emits light towards one side of the platform, so that the substrate transmits the light; the second camera and the second light source are arranged on two opposite sides of the platform and used for shooting images of the substrate transmitted light; the controller is electrically connected with the first light source, the first camera, the second light source and the second camera; wherein the controller controls the first light source, the first camera, the second light source, and the second camera to cause the substrate to undergo a reflection test and a transmittance test to obtain measured reflection data and measured transmittance data for a plurality of pixels from the substrate; reading standard light reflection data and standard light transmission data of a plurality of pixels corresponding to the substrate, and reading a black matrix area range of the substrate; comparing whether the pixel has defects or not one by one according to the standard reflective data, the actual measurement reflective data, the standard light transmission data and the actual measurement light transmission data, recording the pixel as a standard state if the pixel has no defects, and judging whether the pixel meets the following conditions or not if the pixel has defects: the difference value of the actually measured reflective data minus the standard reflective data is greater than or equal to a threshold value; and the absolute value of the difference value between the actually measured light transmission data and the standard light transmission data is smaller than the threshold value; and the pixel is not in the range of the black matrix area; if the judgment is yes, the standard reaching state is recorded, and if the judgment is no, a repair sending command is generated.
In an embodiment of the invention, the platform is configured as a conveyor, the conveyor is connected to a repairing machine, the controller is electrically connected to the conveyor, and the controller drives the conveyor to deliver the substrate to the repairing machine according to the repair delivering command.
In an embodiment of the present invention, the step of comparing one by one whether the pixel is defective includes: judging whether the following conditions are met: the absolute value of the difference value between the standard reflective data and the measured reflective data is smaller than the threshold value; and the absolute value of the difference value between the standard light transmission data and the actually measured light transmission data is smaller than the threshold value; if the judgment result is yes, the defect is not existed, and if the judgment result is no, the defect is existed.
In an embodiment of the invention, the first camera is configured to capture an image generated by the first light source being reflected by the substrate as the measured reflectance data; and the second camera is configured to capture an image generated by the second light source through the substrate as the measured transmission data.
In an embodiment of the invention, each of the standard reflective data, the measured reflective data, the standard transmissive data and the measured transmissive data includes at least one pixel gray scale value.
Compared with the prior art, the method and the device for inspecting the defects of the substrate film judge whether the following conditions are met or not: the difference value of the actually measured reflective data minus the standard reflective data is greater than or equal to a threshold value; and the absolute value of the difference value between the actually measured light transmission data and the standard light transmission data is smaller than the threshold value; and the pixel is not in the range of the black matrix area; if the judgment result is yes, the standard reaching state is recorded, and if the judgment result is no, a repair sending command is generated to drive the position of the pixel to carry out a repair operation. Therefore, if the pixel has defects, the parts which are not needed to be repaired can be effectively filtered, for example, people who are not needed to be repaired are filtered from a plurality of Indium Tin Oxide (ITO) pinholes, the density of the ITO pinholes to be repaired is effectively reduced, and further the burden of a repairing machine and the labor waste of repairing personnel are reduced.
Drawings
FIG. 1 is a flow chart of a method for inspecting a substrate film defect according to an embodiment of the present invention.
Fig. 2 is a block diagram of a substrate film defect inspection apparatus according to an embodiment of the present invention.
Fig. 3 is a schematic diagram of the improvement effect before and after the embodiment of the present invention is adopted.
Detailed Description
The following description of the embodiments refers to the accompanying drawings for illustrating the specific embodiments in which the invention may be practiced. Furthermore, directional phrases used herein, such as, for example, upper, lower, top, bottom, front, rear, left, right, inner, outer, side, peripheral, central, horizontal, transverse, vertical, longitudinal, axial, radial, uppermost and lowermost, are simply those referring to the orientation of the appended figures. Accordingly, the directional terms used are used for explanation and understanding of the present invention, and are not used for limiting the present invention.
Referring to fig. 1, a substrate film defect inspection apparatus according to an embodiment of the present invention includes a stage F, a first light source L1, a first camera C1, a second light source L2, a second camera C2, and a controller P. The platform F can be used for placing a substrate G, such as Color film substrate (Color Filter) glass of a liquid crystal display; the first light source L1 may emit light toward one side of the stage F, so that the substrate G reflects the light; the first camera C1 and the first light source L1 are disposed on the same side of the platform F, for example, the first camera C1 and the first light source L1 are disposed on two sides of a normal line, and are configured to capture an image of light reflected by the substrate G; the second light source L2 can emit light toward one side of the stage F, so that the substrate F transmits the light; the second camera C2 and the second light source L2 are disposed on opposite sides of the platform F, and are configured to capture an image of the light transmitted by the substrate G; the controller P is electrically connected to the first light source L1, the first camera C1, the second light source L2, and the second camera C2. The following examples illustrate the embodiments described above, but are not limited thereto.
For example, as shown in fig. 1, the platform F may be configured to allow the substrate G to be placed flat for inspection, such as: frame type construction, etc., but not limited thereto; the first light source L1 and the second light source L2 may be light sources that are easy to observe reflection and transmission phenomena, such as white Light Emitting Diodes (LEDs); the first camera C1 and the second camera C2 may be electronic devices such as a Charge Coupled Device (CCD) or the like which are easy to capture images; the controller P may be an electronic device, such as a DSP or an ASIC processor, capable of controlling the cooperation of the above components according to a pre-stored instruction, and the controller P may further be coupled to a database or a memory, where the database or the memory may pre-store the instruction and data required by the instruction, so that the controller P can read and write data for performing related control.
For example, as shown in fig. 1, the controller P can control the first light source L1, the first camera C1, the second light source L2 and the second camera C2 to make the substrate G undergo a reflection test and a transmission test, and obtain measured reflection data and measured transmission data of a plurality of pixels from the substrate G.
Additionally, as shown in fig. 1, the controller P may read and read a Black Matrix (BM) area range of the substrate G and standard reflective data and standard transmissive data corresponding to a plurality of pixels of the substrate G from the related data storage medium, for example, the standard reflective data and the standard transmissive data may be collected, classified and processed in advance by using artificial intelligence, internet, big data, and the like, so as to be ready for use.
Additionally, as shown in fig. 1, the controller P may further compare whether the pixel is defective or not one by one according to the standard reflective data, the measured reflective data, the standard transparent data and the measured transparent data, and record a standard status if the pixel is not defective, for example, record the position of the pixel of the substrate G under inspection as a standard status, for example, as 0x00, as a basis for not performing the repairing operation; if the defect exists, judging whether the following conditions are met: "the difference between the measured reflective data and the standard reflective data is greater than or equal to a threshold (e.g., a positive integer, such as a positive integer from 1 to 50, which can be fine-tuned according to actual conditions)" and "the absolute value of the difference between the measured transmissive data and the standard transmissive data is less than the threshold" and "the pixel is not within the range of the black matrix area", if yes, the pixel is recorded as the standard state, if no, a repair command is generated, such as an output command value of 0x01, but not limited thereto, and the repair command may further include repair parameters (e.g., repair position and mode, etc.) as a basis for performing the repair operation.
In one embodiment, the step of comparing one by one whether the pixel is defective comprises: judging whether the following conditions are met: "the absolute value of the difference between the standard reflective data and the actual measurement reflective data is smaller than the threshold" and "the absolute value of the difference between the standard light transmission data and the actual measurement light transmission data is smaller than the threshold", if judged yes, the data is free of defects, if judged no, the data is defective. Therefore, if the defect-free condition is judged to be met, the repairing operation is not carried out, and the inspection can be stopped in advance, so that the capacity burden of the repairing machine is reduced, and the repairing manpower resource is saved.
In one embodiment, as shown in fig. 1, the first camera C1 may be configured to capture an image generated by the first light source L1 reflected by the substrate G as the measured reflective data (e.g., the measured reflective data includes reflective information of a plurality of pixels in a specific area); in addition, the second camera C2 is configured to capture an image generated by the second light source L2 through the substrate G as the measured light transmission data (e.g., the measured light transmission data includes light transmission information of a plurality of pixels in a specific area).
Optionally, in an embodiment, each of the standard reflective data, the measured reflective data, the standard transmissive data, and the measured transmissive data includes at least one pixel gray scale value, such as a pixel gray scale value, but not limited thereto. Therefore, the component is used for collecting the pixel gray scale value as the optical characteristic feature of the substrate, so that the inspection result can be quickly and effectively determined, and the inspection result can be obtained in time and can be used as a basis for adjusting the capacity of the repairing machine.
Optionally, in an embodiment, as shown in fig. 1, the platform F may also be configured as a conveyor, the conveyor is connected to a Repair machine (Repair), the controller P is further electrically connected to the conveyor, and the controller P may drive the conveyor to deliver the substrate G to the Repair machine according to the Repair delivering command for performing the Repair operation. For example: when the repairing machine senses that the substrate G arrives, repairing operation can be carried out, such as repairing at a specific position of the substrate G; for example, the controller P may be electrically connected to the conveyor and the repairing machine, and drive the conveyor to convey the substrate and the repairing machine to repair the substrate according to the repair sending command. Thus, the repair process can be accelerated to improve the yield efficiency.
Accordingly, referring to fig. 1 and fig. 2, a method for inspecting a defect of a substrate film according to an embodiment of the present invention is suitable for inspecting a pinhole (e.g. an ITO pinhole) defect of an ITO film in a color filter substrate of a liquid crystal display, the method can be executed by a controller P, for example, the above apparatus for inspecting a defect of a substrate film can be used, and the method includes: an initial inspection step S1 and a re-inspection step S2. The following examples are given by way of illustration and not by way of limitation.
For example, as shown in fig. 1 and 2, the initial inspection step S1 may include: driving a substrate G to undergo a reflection test and a transmittance test to obtain actual measurement reflection data and actual measurement transmittance data of a plurality of pixels from the substrate G; reading standard reflection data and standard light transmission data of a plurality of pixels corresponding to the substrate G, and reading a black matrix area range of the substrate G; and comparing whether the pixel has a defect or not one by one according to the standard reflective data, the actually measured reflective data, the standard light transmission data and the actually measured light transmission data, recording the pixel as a standard state if the pixel has no defect, and performing the rechecking step S2 if the pixel has a defect.
As shown in fig. 1 and fig. 2, the rechecking step S2 may include: judging whether the following conditions are met: "the difference between the measured reflective data and the standard reflective data is greater than or equal to a threshold (e.g., a positive integer, such as a positive integer from 1 to 50, which can be trimmed according to actual conditions)", and "the absolute value of the difference between the measured transparent data and the standard transparent data is smaller than the threshold", and "the pixel is not in the range of the black matrix area", if yes, the pixel is recorded as the standard state, if no, a repair sending command is generated to drive the position of the pixel to perform a repair operation, for example, the substrate G is sent to the repair machine by the conveyor according to the repair sending command. The following is an example of the implementation of the above embodiments of the present invention, but not limited thereto.
In one embodiment, the step of comparing one by one whether the pixel is defective comprises: judging whether the following conditions are met: "the absolute value of the difference between the standard reflective data and the actual measurement reflective data is smaller than the threshold value" and "the absolute value of the difference between the standard light transmission data and the actual measurement light transmission data is smaller than the threshold value", if the judgment is yes, the defect is not detected, and if the judgment is no, the defect is detected. Therefore, if the situation of no defect is judged to be met, the repairing operation is not carried out, and the inspection can be stopped in advance, so that the capacity burden of the repairing machine is reduced, and the repairing manpower resource is saved.
For example, if the absolute value of the difference between the standard reflectance data and the measured reflectance data is less than the threshold value (e.g., a positive integer, such as a positive integer from 1 to 50, such as 1, 2, \8230;, 50, etc.), and the absolute value of the difference between the standard transmittance data and the measured transmittance data is less than the threshold value, taking the threshold value as 1 as an example, such as the measured reflectance data (e.g., 122) is less than the standard reflectance data (e.g., 122), and the measured transmittance data (e.g., 112) is less than the standard transmittance data (e.g., 112), then it may be defined as "defect-free", otherwise it may be defined as "defect-free".
For example, as shown in fig. 1 and 2, in the preliminary inspection step S1, if the substrate G is inspected for defects, the re-inspection step S2 may be performed.
For example, the controller P may predefine parameters such as: if the difference between the measured reflectance data minus the standard reflectance data is greater than or equal to the threshold value (e.g., a positive integer, such as 1 to 50, such as 1, 2, \8230;, 50, etc.), taking the threshold value of 1 as an example, such as the measured reflectance data (e.g., 122) is greater than the standard reflectance data (e.g., 121), a "reflection white" defect may be defined.
On the other hand, if the difference between the standard reflectance data minus the measured reflectance data is greater than or equal to the threshold value, for example, if the threshold value is 1, such as the measured reflectance data (e.g., 120) is less than the standard reflectance data (e.g., 121), then a "black reflectance" defect may be defined.
On the other hand, if the difference between the measured transmittance data and the standard transmittance data is greater than or equal to the threshold value, for example, the threshold value is 1, such as the measured transmittance data (e.g. 122) is greater than the standard transmittance data (e.g. 121), then a "white transmittance" defect may be defined.
On the other hand, if the difference between the standard transmittance data and the measured transmittance data is greater than or equal to the threshold value, for example, the threshold value is 1, for example, the measured transmittance data (e.g. 121) is smaller than the standard transmittance data (e.g. 122), a "transmission black" defect may be defined.
Therefore, if the detected result of a certain pixel of the substrate G is "white detected reflected light" and "black not detected transmitted light" and "white not detected transmitted light" and "not in the black matrix area", the determination conditions such as "the difference between the measured reflected light data and the standard reflected light data is greater than or equal to the threshold" and "the absolute value of the difference between the measured transparent data and the standard transparent data is less than the threshold" and "the pixel is not in the black matrix area" are met, and the controller can record the up-to-standard state and does not send the repairing machine; otherwise, the controller can generate the repair sending command for sending the repair machine to drive the position of the pixel to carry out repair operation.
In one embodiment, as shown in fig. 1, the reflection test uses a first camera C1 to capture an image of a first light source L1 reflected by the substrate G as the measured reflection data; and the light transmission test is to take an image generated by a second light source L2 through the substrate G by a second camera C2 as the actually measured light transmission data.
Optionally, in an embodiment, each of the standard reflective data, the measured reflective data, the standard transmissive data, and the measured transmissive data includes at least one pixel gray scale value, such as a pixel gray scale value, but not limited thereto. Therefore, the inspection result can be quickly and effectively determined through the components, and the inspection result can be obtained immediately and can be used as a basis for adjusting the capacity of the repairing machine.
In addition, as shown in fig. 3, the horizontal axis is time, the vertical axis is ITO pinhole density (density), if it is applied to detecting ITO pinhole defects in an ITO thin film in a color filter substrate of a liquid crystal display, the vertical thick black line between M11 and M12 is used as the time boundary for performing the method and apparatus for detecting substrate film defects according to the above embodiments of the present invention. As can be seen from the figure, the density of the ITO pinholes before the adoption is obviously higher, the density of the ITO pinholes after the adoption is obviously lower, the average density of the ITO pinholes is reduced from 11.3 to 3.4, and the reduction ratio is about 70%. Therefore, the method and the device for inspecting the defects of the substrate film, provided by the embodiment of the invention, can effectively reduce the density of the ITO pinholes and solve the problem that the inspection quantity of the defects of the substrate film in the prior art is insufficient.
The method and the device for inspecting the defects of the substrate film in the embodiment of the invention judge whether the following conditions are met: the difference value of the actually measured reflective data minus the standard reflective data is greater than or equal to a threshold value; and the absolute value of the difference value between the actually measured light transmission data and the standard light transmission data is smaller than the threshold value; and the pixel is not in the range of the black matrix area; if the judgment result is yes, the standard reaching state is recorded, and if the judgment result is no, a repair sending command is generated to drive the position of the pixel to carry out a repair operation. Therefore, if the pixel has defects, the parts which are not needed to be repaired can be effectively filtered, for example, the parts which are not needed to be repaired are filtered from a plurality of Indium Tin Oxide (ITO) pinholes, the density of the ITO pinholes to be repaired is effectively reduced, and the burden of a repairing machine and the labor waste of repairing personnel are further reduced.
The present invention has been described in relation to the above embodiments, which are only exemplary of the implementation of the present invention. It must be noted that the disclosed embodiments do not limit the scope of the invention. On the contrary, the intention is to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the invention as defined by the appended claims.
Claims (8)
1. A method for inspecting a defect of a thin film on a substrate, which is performed by a controller, comprises: the method comprises the following steps:
driving a substrate to undergo a reflection test and a transmittance test to obtain actual measurement reflection data and actual measurement transmittance data of a plurality of pixels from the substrate;
reading standard light reflection data and standard light transmission data of a plurality of pixels corresponding to the substrate, and reading a black matrix area range of the substrate;
comparing whether the pixel has defects one by one according to the standard reflective data, the actually measured reflective data, the standard light transmission data and the actually measured light transmission data;
the step of comparing one by one whether the pixel is defective is to judge whether the following conditions are met:
the absolute value of the difference value between the standard reflective data and the measured reflective data is less than a threshold value; and is
The absolute value of the difference value between the standard light transmission data and the measured light transmission data is smaller than the threshold value;
if the judgment result is yes, the defect is not existed, and if the judgment result is no, the defect is existed;
if the pixel is not defective, recording the pixel as a standard-reaching state;
if the pixel is defective, judging whether the following conditions are met:
the difference value of the actually measured reflective data minus the standard reflective data is greater than or equal to the threshold value; and is
The absolute value of the difference value between the actually measured light transmission data and the standard light transmission data is smaller than the threshold value; and is
The pixel is not in the range of the black matrix area;
if the judgment result is yes, the standard reaching state is recorded, and if the judgment result is no, a repair sending command is generated to drive the position of the pixel to carry out a repair operation.
2. The method for inspecting a defect of a thin film of a substrate according to claim 1, wherein: the reflection test is to take an image generated by a first light source reflected by the substrate by a first camera as the actually measured reflection data; and the light transmission test takes an image generated by a second light source penetrating through the substrate and shot by a second camera as the actually measured light transmission data.
3. The method for inspecting a defect of a thin film of a substrate according to claim 1, wherein: each of the standard reflective data, the measured reflective data, the standard transparent data, and the measured transparent data includes at least one pixel gray scale value.
4. The method for inspecting a defect of a thin film of a substrate according to claim 1, wherein: the method is suitable for detecting the pinhole defect of the indium tin oxide film in a color film substrate of a liquid crystal display.
5. A substrate film defect inspection device is characterized in that: the method comprises the following steps:
a platform for placing a substrate;
the first light source emits light towards one side of the platform, so that the substrate reflects the light;
the first camera and the first light source are arranged on the same side of the platform and used for shooting images of light rays reflected by the substrate;
the second light source emits light towards one side of the platform, so that the substrate transmits the light;
the second camera and the second light source are arranged on two opposite sides of the platform and used for shooting images of the light rays transmitted by the substrate; and
the controller is electrically connected with the first light source, the first camera, the second light source and the second camera;
wherein the controller controls the first light source, the first camera, the second light source, and the second camera to cause the substrate to undergo a reflection test and a transmittance test to obtain measured reflection data and measured transmittance data for a plurality of pixels from the substrate; reading standard light reflection data and standard light transmission data of a plurality of pixels corresponding to the substrate, and reading a black matrix area range of the substrate; comparing whether the pixel has defects one by one according to the standard reflective data, the actually measured reflective data, the standard light transmission data and the actually measured light transmission data;
the step of comparing one by one whether the pixel is defective is to judge whether the following conditions are met:
the absolute value of the difference value between the standard reflective data and the measured reflective data is less than a threshold value; and is provided with
The absolute value of the difference value between the standard light transmission data and the measured light transmission data is smaller than the threshold value;
if the judgment result is yes, the defect is not existed, and if the judgment result is no, the defect is existed;
if the pixel is not defective, recording the pixel as a standard-reaching state;
if the pixel is defective, judging whether the following conditions are met:
the difference value of the measured reflective data minus the standard reflective data is greater than or equal to the threshold value; and is provided with
The absolute value of the difference value between the actually measured light transmission data and the standard light transmission data is smaller than the threshold value; and is
The pixel is not in the range of the black matrix area;
if the judgment is yes, the standard reaching state is recorded, and if the judgment is no, a repair sending command is generated.
6. The substrate film defect inspection apparatus of claim 5, wherein: the platform is configured to be a conveyor, the conveyor is connected with a repairing machine, the controller is electrically connected with the conveyor, and the controller drives the conveyor to convey the substrate to the repairing machine according to the repairing conveying command.
7. The substrate film defect inspection apparatus of claim 5, wherein: the first camera is configured to capture an image of the first light source as the measured reflectance data as a result of being reflected by the substrate; and the second camera is configured to capture an image generated by the second light source through the substrate as the measured transmission data.
8. The substrate film defect inspection apparatus of claim 5, wherein: each of the standard reflective data, the measured reflective data, the standard light transmission data, and the measured light transmission data includes at least one pixel gray scale value.
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| CN202903689U (en) * | 2012-08-29 | 2013-04-24 | 北京大恒图像视觉有限公司 | Presswork surface quality detecting device |
| AU2013321411B2 (en) * | 2012-09-28 | 2017-04-20 | Jx Nippon Oil & Energy Corporation | Device for inspecting substrate having irregular rough surface and inspection method using same |
| US11328380B2 (en) * | 2018-10-27 | 2022-05-10 | Gilbert Pinter | Machine vision systems, illumination sources for use in machine vision systems, and components for use in the illumination sources |
| CN111366582A (en) * | 2018-12-26 | 2020-07-03 | 东莞市吉洋自动化科技有限公司 | Automatic judgment method based on automatic optical detection |
| JP7063839B2 (en) * | 2019-03-27 | 2022-05-09 | 日立グローバルライフソリューションズ株式会社 | Inspection method and inspection system |
| CN210690434U (en) * | 2019-07-26 | 2020-06-05 | 苏州康代智能科技股份有限公司 | Circuit board through hole defect final inspection equipment |
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