CN112305406B - Chip tiny analog signal testing method and testing device - Google Patents
Chip tiny analog signal testing method and testing device Download PDFInfo
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- CN112305406B CN112305406B CN202011095943.9A CN202011095943A CN112305406B CN 112305406 B CN112305406 B CN 112305406B CN 202011095943 A CN202011095943 A CN 202011095943A CN 112305406 B CN112305406 B CN 112305406B
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- 238000012360 testing method Methods 0.000 title claims abstract description 58
- 238000005070 sampling Methods 0.000 claims abstract description 130
- 238000001514 detection method Methods 0.000 claims abstract description 26
- 238000000034 method Methods 0.000 claims abstract description 19
- 238000012935 Averaging Methods 0.000 claims abstract description 7
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 claims description 24
- 230000002452 interceptive effect Effects 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 abstract description 2
- 239000000523 sample Substances 0.000 description 14
- 238000004364 calculation method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000004088 simulation Methods 0.000 description 2
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02D—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN INFORMATION AND COMMUNICATION TECHNOLOGIES [ICT], I.E. INFORMATION AND COMMUNICATION TECHNOLOGIES AIMING AT THE REDUCTION OF THEIR OWN ENERGY USE
- Y02D30/00—Reducing energy consumption in communication networks
- Y02D30/70—Reducing energy consumption in communication networks in wireless communication networks
Abstract
The application relates to the field of wafer-level testing of semiconductors, in particular to a method and a device for testing micro analog signals of chips. The method comprises the following steps: acquiring a target tiny analog signal; sampling the target tiny analog signal through a specific time interval to obtain a plurality of sampling points, wherein each sampling point corresponds to a sampling value; judging whether the sampling point is an interference signal point or not according to the sampling value of the sampling point; removing sampling points which are interference signal points, and averaging sampling values of the remaining sampling points to obtain a denoising signal mean value of the target tiny analog signal; determining a reliability detection interval; if the denoising signal mean value is positioned in the credibility detection interval, determining that the denoising signal mean value is the signal value of the target tiny analog signal; wherein the device is adapted to perform the above method. The chip tiny analog signal testing method and the chip tiny analog signal testing device can realize stable and accurate testing of the chip tiny analog signal.
Description
Technical Field
The application relates to the field of wafer-level testing of semiconductors, in particular to a method and a device for testing micro analog signals of chips.
Background
Before leaving the factory, the wafer is required to be subjected to wafer-level test, namely, target chips on the target wafer are tested successively, so as to judge the performance of the target chips. In wafer chip testing, a target wafer is mounted on a test machine, and a test pad (pad) of the target chip is electrically coupled to the test machine through a probe card, and a test instruction is executed by the test machine to complete a test process of the target chip. After testing one chip, the probe card is electrically coupled with the test pad of the next target chip to continue testing.
In the wafer level test, an analog test is usually performed on the target chip to obtain an analog signal of the target chip. Because the simulation test process can be influenced by the self precision of the test machine and the anti-interference capability of the probe card, and other hardware performances, the obtained simulation signals of the target chip are superimposed with interference signals. Especially for the minute signal whose signal value is minute, it is difficult to eliminate the superimposed interference signal by improving the hardware performance, so that it is more difficult to accurately test the minute signal.
Therefore, what kind of testing method is adopted to realize stable and accurate test on the analog micro signal is a technical problem that needs to be solved by those skilled in the art.
Disclosure of Invention
The application provides a method and a device for testing a chip tiny analog signal, so as to realize stable and accurate test of the chip tiny analog signal.
As a first aspect of the present application, there is provided a chip micro analog signal testing method including:
acquiring a target tiny analog signal;
sampling the target tiny analog signal through a specific time interval to obtain a plurality of sampling points, wherein each sampling point corresponds to a sampling value;
judging whether the sampling point is an interference signal point or not according to the sampling value of the sampling point;
removing sampling points which are interference signal points, and averaging sampling values of the remaining sampling points to obtain a denoising signal mean value of the target tiny analog signal;
determining a reliability detection interval;
and if the denoising signal mean value is positioned in the credibility detection interval, determining that the denoising signal mean value is the signal value of the target tiny analog signal.
Optionally, the method further comprises: determining a time span range of the interference signal;
such that the specific time interval is larger than the time span range of the interfering signal.
Optionally, the step of determining the time span range of the interference signal includes:
providing a random interference signal generation model capable of generating interference signals satisfying a random distribution;
determining probability distribution of the time span of the interference signal according to the random interference signal generation model;
and determining the time span range of the interference signal according to the probability distribution of the time span of the interference signal.
Optionally, the step of determining whether the sampling point is an interference signal point according to the sampling value of the sampling point includes:
sampling is continuously carried out for N times at a specific time interval, and N sampling points and corresponding sampling values thereof are obtained;
sorting the corresponding N sampling points according to the size sequence of the sampling values;
determining the intermediate value of the N sampling values as an effective sampling value;
comparing the sampling value of each sampling point with the effective sampling value;
and if the sampling value of the sampling point deviates from the effective sampling value by more than an effective deviation interval, determining the sampling point as an interference signal point.
Optionally, the step of determining the reliability detection interval includes:
providing an ideal minute signal generation model capable of generating an ideal minute analog signal having a uniform signal value;
determining probability distribution of signal values of the ideal tiny analog signals according to the ideal tiny signal generation model;
determining a signal value range Rt of the ideal tiny analog signal according to the probability distribution of the signal values of the ideal tiny analog signal; the signal value range Rt of the ideal minute analog signal serves as the lower limit of the reliability detection section.
Optionally, the step of determining the reliability detection interval further includes:
providing a random interference signal generation model capable of generating interference signals satisfying a random distribution;
determining signal value probability distribution of the ideal tiny signal after the interference signal is superimposed according to the random interference signal generation model and the ideal tiny signal generation model;
determining a signal value range Rd of the ideal tiny signal superimposed with the interference signal according to the signal value probability distribution of the ideal tiny signal superimposed with the interference signal; and taking the signal value range Rd of the ideal tiny signal after the interference signal is overlapped as the upper limit of the credibility detection interval.
Optionally, if the mean value of the denoising signal is located outside the confidence detection interval, determining that the mean value of the denoising signal is not reliable.
Optionally, the target micro analog signal is an analog signal which is fed back by the target chip, is continuous in a time domain and has a voltage signal value smaller than 10mV.
As a second aspect of the present application, there is provided a chip micro analog signal testing apparatus for performing the chip micro analog signal testing method according to the first aspect of the present application.
The technical scheme of the application at least comprises the following advantages: according to the chip tiny analog signal testing method and the chip tiny analog signal testing device, the target tiny analog signal is sampled at specific time intervals, so that a plurality of sampling points are obtained, and each sampling point corresponds to a sampling value; judging whether the sampling point is an interference signal point or not according to the sampling value of the sampling point; removing sampling points which are interference signal points, and averaging sampling values of the remaining sampling points to obtain a denoising signal mean value of the target tiny analog signal; determining a reliability detection interval; if the mean value of the denoising signal is positioned in the credibility detection interval, determining that the mean value of the denoising signal is the signal value of the target tiny analog signal, and can realize stable and accurate test on the analog tiny signal of the chip.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present application, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a flow chart of a method for testing a chip micro analog signal according to an embodiment of the present application;
fig. 2 and fig. 3 are schematic diagrams of signals after step S2 is completed in the method for testing a chip micro analog signal according to an embodiment of the present application.
Detailed Description
The following description of the embodiments of the present application will be made apparent and complete in conjunction with the accompanying drawings, in which embodiments described are some, but not all, of the embodiments of the present application. All other embodiments, which can be made by one of ordinary skill in the art based on the embodiments herein without making any inventive effort, are intended to be within the scope of the present application.
In the description of the present application, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of description of the present application and to simplify the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present application, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; the two components can be directly connected or indirectly connected through an intermediate medium, or can be communicated inside the two components, or can be connected wirelessly or in a wired way. The specific meaning of the terms in this application will be understood by those of ordinary skill in the art in a specific context.
In addition, the technical features described below in the different embodiments of the present application may be combined with each other as long as they do not collide with each other.
Fig. 1 shows one embodiment of a method for testing a chip micro analog signal according to the first aspect of the present application, and referring to fig. 1, the method for testing a chip micro analog signal includes the following steps:
step S1: a minute analog signal is acquired.
For a tiny analog signal, the signal values are ideally identical at different time nodes. For example, during chip power testing, the power supply ripple has become very small, and more scenarios of micro signal testing can be faced, where the power supply test signal ranges from tens of millivolts to now tens of millivolts, even a few millivolts.
Step S2: and sampling the target tiny analog signal at specific time intervals to obtain a plurality of sampling points, wherein each sampling point corresponds to a sampling value.
Sampling the target micro analog signal at a specific time interval T2 to obtain sampling points shown in fig. 2 and 3, wherein fig. 2 shows a process of sampling the target micro analog signal, and fig. 3 shows sampling points obtained after the sampling is finished and sampling values corresponding to the sampling points. It should be noted that fig. 2 and 3 only show schematic signal diagrams after sampling a portion of the target micro analog signal, and the sampling points in fig. 2 and 3 include D1 to D10.
Referring to fig. 2, as one embodiment of step S2, determining the time span range T1 of the interfering signal is further included. After determining the time width range T1 of the interfering signal, the specific time interval T2 is made larger than the time span range T1 of the interfering signal. Therefore, in the sampling process of the step S2, as few as possible of the sections with the superimposed interference signals can be sampled, and the accuracy of subsequent calculation can be improved.
The step of determining the time span range T1 of the interference signal may be:
first, a random interference signal generation model is provided, wherein the random interference signal generation model is formed by combining a plurality of interference signals, and can generate interference signals meeting random distribution.
Secondly, determining probability distribution of the time span of the interference signal according to the random interference signal generation model;
and determining a time span range T1 of the interference signal according to the probability distribution of the time span of the interference signal.
Step S3: and judging whether the sampling point is an interference signal point or not according to the sampling value of the sampling point.
As one embodiment of step S3, sampling is continuously performed N times at a specific time interval, to obtain N sampling points and corresponding sampling values thereof; sorting the corresponding N sampling points according to the size sequence of the sampling values; determining the intermediate value of the N sampling values as an effective sampling value; comparing the sampling value of each sampling point with the effective sampling value; and if the sampling value of the sampling point deviates from the effective sampling value by more than an effective deviation interval, determining the sampling point as an interference signal point.
It should be explained that when the number of samples N is an odd number, only one intermediate value of the N samples is used, so that the effective sample value is the intermediate value of the N samples. If the sampling number N is even, there are two intermediate values of the N sampling values, so the effective sampling value is an average value of the two intermediate values. In addition, the effective deviation interval is not particularly limited, and needs to be adjusted according to different error requirements.
Continuing with the example of the sample points shown in fig. 2 and 3, the sample points D1, D3, D4, D5, D6, D8, and D10 have a sample value of 6mv, the sample point D2 has a sample value of 8mv, the sample point D7 has a sample value of 11mv, and the sample point D9 has a sample value of 10mv. The middle value of the sampling values of the sampling points D1-D10 is determined to be 6mv, and the effective deviation interval is determined to be 10% up and down of the middle value, namely 5.4 mv-6.6 mv, so that the sampling point D2, the sampling point D7 and the sampling point D9 are all determined to be interference signal points. It should be noted that, for convenience of explanation of the implementation principle, in this embodiment, only ten samples of the sampling points D1 to D10 are used when calculating the intermediate value of the sampling point, however, in actual calculation of the intermediate value of the sampling point, the number of the samples used is far more than ten.
Step S4: and removing sampling points which are interference signal points, and averaging sampling values of the remaining sampling points to obtain a denoising signal mean value of the target micro signal.
After determining that the sampling point is an interference signal point in the step S3, removing the sampling point in the step S4, and then averaging the sampling values of the remaining sampling points, and taking the average value as the mean value of the denoising signal of the target micro signal. Therefore, the interference of the interference signal point on the mean value of the denoising signal can be removed, and the accuracy of calculation is improved.
Step S5: and determining a reliability detection interval.
The credibility detection interval is used for detecting the credibility of the mean value of the denoising signal, and if the detected mean value of the denoising signal is credible, the mean value of the denoising signal is taken as the signal value of the target tiny analog signal. If the detected denoising signal is not authentic, the step S2 is performed again to recalculate the mean value of the denoising signal.
One embodiment of the process of determining the reliability detection interval includes:
firstly, providing an ideal tiny signal generation model; the ideal micro-signal generation model is formed by integrating a plurality of micro-signals, and can generate ideal micro-model signals with uniform signal values.
And secondly, determining probability distribution of signal values of the ideal tiny analog signal according to the ideal tiny signal generation model.
Then, determining a signal value range Rt of the ideal tiny analog signal according to the probability distribution of the signal values of the ideal tiny analog signal; the signal value range Rt of the ideal minute analog signal serves as the lower limit of the reliability detection section.
The random disturbance signal generation model can be provided at the same time of providing the ideal tiny signal generation model; the random interference signal generation model is formed by integrating a plurality of interference signals, and can generate interference signals meeting random distribution.
Then, according to the random interference signal generation model and the ideal tiny signal generation model, determining the probability distribution of signal values after the ideal tiny signal is superimposed with the interference signal;
determining a signal value range Rd of the ideal tiny signal superimposed with the interference signal according to the signal value probability distribution of the ideal tiny signal superimposed with the interference signal; and taking the signal value range Rd of the ideal tiny signal after the interference signal is overlapped as the upper limit of the credibility detection interval.
Step S6: and if the denoising signal mean value is positioned in the credibility detection interval, determining that the denoising signal mean value is the signal value of the target tiny analog signal.
If the denoising signal mean value calculated in the step S4 is located in the reliability detection interval determined in the step S5, determining that the denoising signal mean value is reliable, otherwise, determining that the denoising signal mean value is not reliable. The reliable mean value of the denoising signal is taken as the signal value of the target tiny analog signal.
A second aspect of the present application provides one embodiment of a chip micro analog signal testing apparatus, where the chip micro analog signal testing apparatus is configured to perform the chip micro analog signal testing method described in the first aspect of the present application.
As can be understood from the above description, the chip micro analog signal testing method and the chip micro analog signal testing device provided in the embodiments of the present application sample the target micro analog signal at specific time intervals to obtain a plurality of sampling points, where each sampling point corresponds to a sampling value; judging whether the sampling point is an interference signal point or not according to the sampling value of the sampling point; removing sampling points which are interference signal points, and averaging sampling values of the remaining sampling points to obtain a denoising signal mean value of the target tiny analog signal; determining a reliability detection interval; if the mean value of the denoising signal is positioned in the credibility detection interval, determining that the mean value of the denoising signal is the signal value of the target tiny analog signal, and can realize stable and accurate test on the analog tiny signal of the chip.
It is apparent that the above examples are given by way of illustration only and are not limiting of the embodiments. Other variations or modifications of the above teachings will be apparent to those of ordinary skill in the art. It is not necessary here nor is it exhaustive of all embodiments. While nevertheless, obvious variations or modifications may be made to the embodiments described herein without departing from the scope of the invention.
Claims (7)
1. The chip micro analog signal testing method is characterized by comprising the following steps of:
acquiring a target tiny analog signal;
sampling the target tiny analog signal through a specific time interval to obtain a plurality of sampling points, wherein each sampling point corresponds to a sampling value;
judging whether the sampling point is an interference signal point or not according to the sampling value of the sampling point;
removing sampling points which are interference signal points, and averaging sampling values of the remaining sampling points to obtain a denoising signal mean value of the target tiny analog signal;
determining a reliability detection interval;
if the denoising signal mean value is positioned in the credibility detection interval, determining that the denoising signal mean value is the signal value of the target tiny analog signal;
the step of determining the reliability detection interval includes:
providing an ideal minute signal generation model capable of generating an ideal minute analog signal having a uniform signal value;
determining probability distribution of signal values of the ideal tiny analog signals according to the ideal tiny signal generation model;
determining a signal value range Rt of the ideal tiny analog signal according to the probability distribution of the signal values of the ideal tiny analog signal; the signal value range Rt of the ideal tiny analog signal is used as the lower limit of the credibility detection interval;
providing a random interference signal generation model capable of generating a random distribution;
determining signal value probability distribution of the ideal tiny signal after the interference signal is superimposed according to the random interference signal generation model and the ideal tiny signal generation model;
determining a signal value range Rd of the ideal tiny signal superimposed with the interference signal according to the signal value probability distribution of the ideal tiny signal superimposed with the interference signal; and taking the signal value range Rd of the ideal tiny signal after the interference signal is overlapped as the upper limit of the credibility detection interval.
2. The chip microcomputer analog signal testing method of claim 1, further comprising: determining a time span range of the interference signal;
such that the specific time interval is larger than the time span range of the interfering signal.
3. The method for testing a chip microcomputer analog signal according to claim 2, wherein the step of determining a time span range of the interference signal includes:
providing a random interference signal generation model capable of generating interference signals satisfying a random distribution;
determining probability distribution of the time span of the interference signal according to the random interference signal generation model;
and determining the time span range of the interference signal according to the probability distribution of the time span of the interference signal.
4. The method for testing a chip micro analog signal according to claim 1, wherein the step of judging whether the sampling point is an interference signal point according to the sampled value of the sampling point comprises:
sampling is continuously carried out for N times at a specific time interval, and N sampling points and corresponding sampling values thereof are obtained;
sorting the corresponding N sampling points according to the size sequence of the sampling values;
determining the intermediate value of the N sampling values as an effective sampling value;
comparing the sampling value of each sampling point with the effective sampling value;
and if the sampling value of the sampling point deviates from the effective sampling value by more than an effective deviation interval, determining the sampling point as an interference signal point.
5. The method for testing a chip micro analog signal according to claim 1, wherein if the mean value of the denoising signal is outside the confidence detection interval, determining that the mean value of the denoising signal is not reliable.
6. The method for testing chip micro analog signals according to claim 1, wherein the target micro analog signals are analog signals which are fed back by the target chip, are continuous in time domain and have voltage signal values less than 10mV.
7. A chip micro analog signal testing apparatus for performing the chip micro analog signal testing method according to any one of claims 1 to 6.
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