CN112305394A - Probe socket piece and probe assembly - Google Patents
Probe socket piece and probe assembly Download PDFInfo
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- CN112305394A CN112305394A CN202011227365.XA CN202011227365A CN112305394A CN 112305394 A CN112305394 A CN 112305394A CN 202011227365 A CN202011227365 A CN 202011227365A CN 112305394 A CN112305394 A CN 112305394A
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- 239000000523 sample Substances 0.000 title claims abstract description 123
- 239000007788 liquid Substances 0.000 claims abstract description 83
- 238000012360 testing method Methods 0.000 claims abstract description 54
- 238000003860 storage Methods 0.000 claims abstract description 38
- 238000003466 welding Methods 0.000 claims abstract description 19
- 238000007789 sealing Methods 0.000 claims abstract description 7
- 229910052751 metal Inorganic materials 0.000 claims abstract description 6
- 239000002184 metal Substances 0.000 claims abstract description 6
- 239000012530 fluid Substances 0.000 claims description 32
- 238000000034 method Methods 0.000 claims description 9
- 238000000926 separation method Methods 0.000 claims description 5
- 238000005259 measurement Methods 0.000 abstract 1
- 230000009471 action Effects 0.000 description 7
- 238000006073 displacement reaction Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000005299 abrasion Methods 0.000 description 3
- 238000007373 indentation Methods 0.000 description 3
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 3
- 229940008718 metallic mercury Drugs 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 230000000903 blocking effect Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000010276 construction Methods 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000011900 installation process Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000011550 stock solution Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2607—Circuits therefor
- G01R31/2637—Circuits therefor for testing other individual devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
- G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2601—Apparatus or methods therefor
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Leads Or Probes (AREA)
Abstract
The invention discloses a probe socket piece and a probe assembly, wherein the body of the probe socket piece comprises: a first end opposite to the object to be tested, and a second end opposite to the testing member; the probe socket piece further comprises: a connector disposed on the second end and in resilient contact with the test member; the connecting piece includes: the liquid containing pipe is arranged coaxially with the body, and the elastic column elastically supports the liquid containing pipe at the second end; flourishing liquid pipe includes: directly abutting against the lower pipe orifice on the surface of the test member; the liquid containing pipe passes through the elastic column to maintain the contact strength of the lower pipe orifice and the test member; a column end of the probe penetrates through the second end and extends into the liquid containing pipe until the column end is abutted to a welding pad on the testing component; one end of the liquid storage pipe is inserted into the cavity of the body from the first end, and the other end of the liquid storage pipe is contacted with the object to be detected and forms the sealing of the joint; a metal piston is inflated in the liquid storage tube. The invention effectively protects the object to be measured and the probe, and simultaneously meets the requirements of more accurate and effective measurement.
Description
Technical Field
The invention relates to the technical field of semiconductors, in particular to a probe socket piece and a probe assembly.
Background
Semiconductor devices subjected to complicated processes are subjected to various types of electrical tests to test their characteristics and their defects. For this purpose, metal wires or contact pads mounted on a test board (printed circuit board) in the test equipment and external terminals of a device to be tested (semiconductor package) are electrically connected using sockets and probes.
For example, the invention patent of China, test probe module and test socket, with application number of 201880068269.X, discloses a test probe module. The method comprises the following steps: a conductive tube; a probe inserted into the tube in a non-contact manner and elastically stretchable in a longitudinal direction; and an insulating probe support member configured to support the probe between an inner wall of the tube and an outer surface of the probe. The probe end with elastic expansion can be directly contacted on the surface of an object, and although the electric conduction effect is normal, the following problems still exist when testing circuit board devices:
(1) when the metal probe is contacted with the surface of the substrate of the object to be detected under the action of an applied force, the contact parts generate mutual indentation under the action of the applied force, so that the sensitivity of the probe is reduced, and the circuit board forms a prick mark;
(2) the contact between the point to be measured and the probe slides, which causes the problems of unstable contact and large resistance change, thereby increasing the test error.
Disclosure of Invention
The technical scheme of the invention is as follows: a probe socket piece and a probe assembly are provided, wherein conductive fluid environments are arranged at two ends of the probe socket piece, so that hard contact between the end part of a probe and an object to be tested is converted into indirect flexible contact, and meanwhile, the contact between the end part of the probe and a testing component is more stable; in order to solve the existing: the contact damage of the object to be tested and the probe and the unstable contact of the testing component and the probe.
The probe socket piece structure related in the scheme of the invention comprises: the probe comprises a cylindrical body, a cavity is formed in the body, and the probe is inserted and sleeved along the axial direction of the cavity. Typically, the probe is a socket that is held in a coaxial positional relationship with the probe socket.
The body of probe socket piece includes two upper and lower tip: the first end is opposite to the object to be tested, and the second end is opposite to the testing component.
The two end parts are provided with detachable cover plates, namely a first cover plate is arranged on the first end and a second cover plate is arranged on the second end.
The probe comprises a sleeve, a first column end, a spring and a second column end. The sleeve is a hollow body with two open ends. The first column end of assembly in the telescopic upper end, the second column end of assembly in the telescopic lower extreme, spring action in the sleeve simultaneously between both ends, the spring provides flexible elasticity for first column end, second column end. Under the action of the deformation force of the spring, the first column end is electrically connected with the object to be tested, and the second column end is electrically connected with the testing component.
In particular, the method comprises the following steps of,
the first column end is electrically connected with the object to be detected through a conductive medium in the liquid storage pipe, namely, the liquid storage pipe is arranged on the first cover plate. Generally, the liquid storage pipe can adopt a hollow straight-tube structure, and the liquid storage pipe is inserted from the shaft hole of the first cover plate and is sealed and fixed with the first cover plate in a bonding mode. The lower end of the liquid storage tube is inserted into the cavity, and the upper end of the liquid storage tube extends out of the probe socket piece and is abutted to the surface of the object to be detected. In order to meet the requirement of injecting the conductive fluid into the liquid storage tube, the upper port of the liquid storage tube is in close contact with the surface of the object to be measured as far as possible. Meanwhile, a metal piston is expanded and plugged in the liquid storage tube, and the piston is connected with the first column end of the probe. Therefore, the probe can push the conductive fluid in the liquid storage tube upwards, so that the conductive fluid is in electrical contact with the surface of the object to be detected.
The straight tube-shaped liquid storage tube has low cost and convenient assembly. But the shortcoming is that the straight tube-shape structure makes the intraductal volume too big, and the pressure that needs when the piston bulldozes is great, and the pressure of stock solution pipe upper port department can be less moreover, can make the piston bulldoze the effect unsatisfactory.
Therefore, the improvement is that: the upper end of the liquid storage tube is a funnel-shaped tube opening with a smaller caliber, and the funnel-shaped tube opening is contacted with the object to be detected and covers the electric contact on the object to be detected. The piston of the metal in the liquid storage pipe is connected with the first column end of the probe, when the first column end is pushed upwards by the spring, the first column end simultaneously pushes the piston to move upwards, and when the piston pushes and presses the conductive fluid in the liquid storage pipe upwards, the pressure of the conductive fluid at the upper port of the liquid storage pipe is higher than that of the upper port of the straight cylindrical liquid storage pipe under the same pushing force. Based on the method, the electric contact effect of the first column end and the object to be detected is more stable, and the response speed is higher.
Further, since the stability of the reservoir tube fixed to the first cover plate is not good, a spacing baffle is provided in the cavity between the first cover plate and the second cover plate, which separates the cavity into two parts in the axial direction: the part between the spacing separation blade and the second cover plate is used for assembling the probe, and the part between the spacing separation blade and the first cover plate is used for assembling the liquid storage pipe. Therefore, the liquid storage tube can be well fixed, and axial displacement or radial deflection caused by the expansion and contraction of the probe end part cannot be generated. Moreover, the probe is assembled between the spacing baffle plate and the second end, so that the probe cannot generate axial displacement, and the stability of the whole structure is ensured.
In order to ensure the tightness of the contact between the funnel-shaped pipe orifice and the surface of the object to be detected, the funnel-shaped pipe orifice is provided with a plugging ring, the plugging ring is pressed between the funnel-shaped pipe orifice and the lower surface of the object to be detected, and the conductive fluid cannot overflow out of the funnel-shaped pipe orifice under the action of the plugging ring. After the object to be tested is tested, the position of the object to be tested is adjusted, the next batch of electrical contacts to be tested can be corresponding to the corresponding funnel-shaped pipe openings, then the object to be tested is moved downwards until the plugging ring is fully attached to the lower surface of the object to be tested, deformation of the plugging ring can effectively guarantee that the conductive fluid cannot overflow, the conductive fluid is fully contacted with the lower end face of the object to be tested, and stable electrical connection is achieved.
The second column end is elastically contacted with a welding pad on the testing component, and in order to ensure the stability of the contact environment of the second column end, a connecting piece is arranged between the lower end of the probe socket piece and the testing component. The connector is mounted on the second cover plate and acts on the second cover plate through the elastic column to enable the second cover plate to abut against the surface of the testing component.
The connecting piece includes: liquid containing pipe, spacing post, reset spring, connecting block, sealing washer. The liquid containing pipe is a hollow pipe body and is in coaxial relation with the probe. The lower pipe orifice of the liquid containing pipe is abutted against the surface of the testing component, and the surface of the testing component is generally provided with a layer of welding pad, so that the lower pipe orifice of the liquid containing pipe is contacted with the surface of the welding pad, and the outer edge of the lower pipe orifice of the liquid containing pipe is provided with a sealing ring to ensure the tightness of a contact gap between the pipe orifice and the welding pad. The surface of the liquid containing pipe is provided with two connecting blocks which are symmetrical in position, and the connecting blocks are arranged on a second cover plate of the probe socket piece in a telescopic supporting mode through the limiting columns. The limit post is sleeved with a return spring, namely the elastic post. The return spring provides pressing force for the lower pipe orifice of the liquid containing pipe to abut against the welding pad, so that the contact strength of the lower pipe orifice of the liquid containing pipe and the test component is ensured. The second column end of the probe is inserted into the liquid containing pipe and abuts against the welding pad, meanwhile, the rubber pad is arranged on the welding pad, and the second column end is in contact with the rubber pad to complete alignment.
The test member includes a host computer, a wiring board, a pad, and a driver. The host computer and the wiring board are electrically connected, and the driving piece can push the wiring board to move upwards.
Preferably, when the liquid container is not moved, the distance between the upper nozzle of the liquid containing pipe and the surface of the second cover plate is the distance h. The distance of terminal surface is h can effectively guarantee the holistic stability of removal of probe socket and spigot piece under liquid pipe and the second apron through setting up, also provides the surplus for the position fine setting simultaneously.
Preferably, to further ensure the axial retention of the stylet within the stylet socket, a groove is formed on the inner wall of the stylet socket for assembly of the stylet. A raised positioning ring is formed on the surface of the corresponding probe, or the probe is firstly inserted into a cylindrical pipe, a circle of raised positioning ring is arranged on the surface of the cylindrical pipe, and the groove is matched with the positioning ring to ensure the stable assembly of the probe. Thus, further, the probe socket is embodied in a split construction, split from the groove: the upper layer unit and the lower layer unit can meet the matching installation of the positioning ring.
Preferably, during testing, the liquid containing pipe and the liquid storage pipe are both required to be filled with conductive fluid, and the conductive fluid is metallic mercury which is liquid at normal temperature.
The invention has the advantages that:
1. the conductive fluid can make the spaced second post end of rubber pad and pad fully contact, and the rubber pad has effectively solved the problem that produces scratch and indentation and lead to probe conductivity to reduce on probe and the contact point simultaneously, and second post end and pad carry out abundant electrical contact through conductive fluid, have solved probe and pad because of the great problem of the testing error that the contact is unstable and lead to, have guaranteed contact resistance invariant at every turn simultaneously.
2. The probe and the probe socket piece are detachably combined and installed, so that the simultaneous working of a plurality of probes is guaranteed, when a problem occurs, the fault probe and the corresponding probe socket piece are detached and replaced, the probe socket piece is simple, convenient and effective, the problem that one device breaks down and is integrally scrapped is solved, and the resource waste is avoided.
3. The first column end hard contact of the probe is effectively converted into the flexible body contact, so that the problem that the probe is damaged due to the hard contact with the surface of the substrate of the object to be detected is fully avoided, and the object to be detected is prevented from being damaged. Meanwhile, the tip of the first column end is protected, the abrasion of the force action on the tip of the first column end in the repeated measuring process is avoided, and the sensitivity of the probe is ensured.
Drawings
The invention is further described with reference to the following figures and examples:
FIG. 1 is a cross-sectional view of a probe socket;
FIG. 2 is a schematic view of the second cover plate and the connecting member;
FIG. 3 is a schematic diagram showing a variation of the probe and the probe socket under the force applied by the testing device;
FIG. 4 is a cross-sectional view of a test device equipped with a probe and a probe socket;
FIG. 5 is a cross-sectional view of the probe mated with the reservoir;
wherein, 1, a probe; 1-1, a cylindrical pipe; 1-2, a positioning ring; 1-3, a first column end; 1-4, a spring; 1-5, a first column end; 1-6, sleeve; 1-7, a screw nut; 1-8, a liquid storage pipe; 1-9, a piston; 1-10 parts of funnel-shaped pipe orifice; 1-11, a plugging ring; 1-12, an electrically conductive fluid; 1-13, fixing ring; 2. a probe socket piece; 2-1, an upper layer unit; 2-2, separating baffle plates; 2-3, a first cover plate; 2-4, lower layer unit; 2-5, a second cover plate; 2-6, connecting pieces; 2-6-1, a liquid containing pipe; 2-6-2, connecting blocks; 2-6-3, sealing ring; 2-6-4, a limit column; 2-6-5, a return spring; 3. a support frame; 4. an object to be measured; 4-1, an electric contact; 5. a test member; 5-1, a host; 5-2, a wiring board; 5-3, bonding pad.
Detailed Description
Example 1:
a probe assembly of the embodiment comprises a probe 1, a probe socket 2 and a support frame 3.
The probe 1 is arranged in the probe socket piece 2, the probe socket piece 2 is fixed between an object to be tested 4 and a testing component 5 through a support frame 3, the lower end face of the object to be tested 4 is electrically connected with a first column end 1-3 of the probe 1, and a second column end of the probe 1 is electrically connected with the testing component 5 through conductive fluid in a liquid containing pipe 2-6-2.
When the object to be tested is moved by the instrument, the object to be tested can be moved upwards or downwards to reset the object to be tested 4, and meanwhile, the displacement of the object to be tested 4 in the horizontal direction can be met to ensure the replacement of the point to be tested, so that the mechanical test is realized. Drivers and instruments for controlling the movement of the object 4 are conventional technical means, and are not described in detail herein.
The first column end 1-3, the spring 1-4 and the second column end 1-5 are arranged in the sleeve 1-6, the first column end 1-3 is arranged at the upper end of the sleeve 1-6, the second column end 1-5 is arranged at the lower end of the sleeve 1-6, and the first column end 1-3, the second column end 1-5 and the sleeve 1-6 extend out of the sleeve 1-6 along the part of the sleeve 1-6 and are connected through the spring 1-4.
The two ends of the cylindrical pipe 1-1 are respectively provided with a fixing ring 1-13, the port of the cylindrical pipe 1-1 is internally provided with a thread, the rotary surface of the fixing ring 1-13 is also provided with a thread, and the cylindrical pipe 1-1 and the fixing ring 1-13 can be assembled through the threads.
The upper end of the first column end 1-3 is provided with a thread which is connected with a piston 1-9 arranged in a liquid storage tube 1-8 through a lead screw nut 1-7. As shown in figure 1, the liquid storage pipe is a straight cylindrical liquid storage pipe, the upper port of the liquid storage pipe 1-8 is provided with a plugging ring 1-11, the plugging ring 1-11 is abutted against the lower end face of the object 4 to be detected, and a seal is formed in the liquid storage pipe 1-8, so that conductive fluid 1-12 is injected into the liquid storage pipe 1-8.
The second column end 1-5 directly abuts against the test member 5, specifically: the upper surface of the testing member 5 is provided with the welding pads 5-3, the welding pads 5-3 are provided with a small rubber pad, and the second column ends 1-5 are directly contacted with the rubber pad, so that the tip abrasion of the second column ends 1-5 can be avoided, and the surface of the testing member 5 can be prevented from being damaged.
The force of the springs 1-4 is increased by the force of the test member 5 exerting a pressure on the second column ends 1-5. The first column end 1-3 and the piston 1-9 are pushed by the spring 1-4 to move upwards, so that the liquid level in the funnel-shaped pipe orifice 1-10 rises, and the conductive fluid 1-12 is fully contacted with the lower end surface of the object 4 to be detected.
The contact of the first column end 1-3 of the probe is converted into the contact of the flexible body, so that the problem that the probe is contacted with the surface of the substrate of the object to be detected to generate pricking marks when the probe exerts the force is fully avoided, the object to be detected is prevented from being damaged, the tip of the first column end 1-3 is protected, the abrasion of the tip of the first column end 1-3 in the repeated measuring process is avoided, and the sensitivity of the probe is ensured.
In the installation process, the support frame 3 which is guaranteed to be adjusted can drive the plugging rings 1-11 to slightly displace towards the object 4 to be tested until the plugging rings 1-11 deform and are completely attached to the object 4 to be tested to realize plugging. Under the action of the plugging rings 1 to 11, the extruded conductive fluid 1 to 12 is fully contacted with the lower end surface of the object 4 to be detected, and meanwhile, the conductive fluid 1 to 12 can be prevented from overflowing outside the funnel-shaped pipe orifices 1 to 10.
After the object to be tested is finished, the object to be tested is replaced by adjusting the position of the object to be tested 4. When the test of the previous batch of electric contacts 4-1 is finished, the object 4 to be tested is moved upwards, the extruded plugging ring 1-11 recovers the original shape at the moment, so that the height of the outer edge of the plugging ring 1-11 is increased, and the liquid level in the plugging ring 1-11 is gradually lower than the highest height of the outer edge of the plugging ring 1-11, so as to effectively prevent the overflow of the conductive fluid 1-12. And horizontally moving the object 4 to be tested, corresponding the next batch of electric contacts 4-1 to be tested with the corresponding funnel-shaped pipe orifices 1-10, then moving the object 4 to be tested downwards until the plugging rings 1-11 are compressed to deform, reducing the height of the outermost edges of the plugging rings to ensure that the conductive fluid 1-12 in the plugging rings 1-11 is fully attached to the lower surface of the object 4 to be tested, ensuring the full contact between the conductive fluid 1-12 and the lower surface of the object 4 to be tested, realizing the electric connection, and then obtaining the test data of the electric contacts 4-1 to be tested through the host 5-1.
The test component 5 comprises a host computer 5-1, a wiring board 5-2, a welding pad 5-3 and a driving piece, wherein the host computer 5-1 is electrically connected with the wiring board 5-2, and the driving piece can push the wiring board 5-2 to move upwards.
In this embodiment, the conductive fluid 1 to 12 is liquid metallic mercury at room temperature, and the metallic mercury has good conductivity and does not form residues on the surfaces of the object to be tested and the test member.
Example 2:
the disclosed probe socket piece of this embodiment includes: the device comprises an upper layer unit 2-1, an interval baffle 2-2, a first cover plate 2-3, a lower layer unit 2-4, a second cover plate 2-5 and a connecting piece 2-6.
The upper layer unit 2-1 and the lower layer unit 2-4 are square tubes, and rectangular cavities are formed in the upper layer unit and the lower layer unit to fully adapt to the shape of the columnar tube 1-1, and the columnar tube 1-1 is quadrangular.
The upper-layer unit 2-1 is internally provided with an interval baffle 2-2, the top of the upper-layer unit 2-1 is provided with a first cover plate 2-3, and the lower port of the upper-layer unit 2-1 is butted with the upper port of the lower-layer unit 2-4 to form a complete probe socket piece body. The lower end of the lower layer unit 2-4 is provided with a second cover plate 2-5, and the lower end of the second cover plate 2-5 is provided with a connecting piece 2-6.
The probe 1 is assembled in a cylindrical pipe 1-1, and the cylindrical pipe 1-1 is stably arranged in the probe socket piece through a positioning ring 1-2. Corresponding grooves are formed in the inner walls of the openings correspondingly connected with the upper-layer unit 2-1 and the lower-layer unit 2-4, and the upper-layer unit 2-1 and the lower-layer unit 2-4 are assembled through the matching of the positioning rings 1-2 and the grooves of the cylindrical pipe 1-1.
As shown in fig. 4 and 5, the liquid storage tube is a funnel tube, the upper half part of the liquid storage tube is a funnel-shaped tube opening 1-10 with a smaller caliber, and the lower half part of the liquid storage tube is a bobbin with a larger caliber. The vertical direction of the funnel-shaped pipe orifice 1-10 penetrates through the first cover plate 2-3, the upper pipe orifice of the funnel-shaped pipe orifice 1-10 is contacted with an object to be detected, the lower pipe orifice of the bobbin is contacted with the interval blocking piece, the interval blocking piece 2-2 is provided with a through hole, and the lower pipe orifice of the bobbin is butted with the through hole. The screw nut 1-7 is movably arranged in the through hole, and the first column end 1-3 is connected with the piston 1-9 in the barrel through the screw nut 1-7. The second column end 1-5 penetrates through the second cover plate 2-5 and is electrically connected with the testing component 5 through a connecting piece 2-6.
The upper layer unit 2-1, the spacing baffle piece 2-2, the first cover plate 2-3, the lower layer unit 2-4 and the second cover plate 2-5 can effectively fix the probe body in the cylindrical pipe 1-1, the probe is controlled to move by controlling the support frame 3 on the probe socket piece 2, and meanwhile, the probe socket piece 2 effectively protects the probe body arranged in the probe socket piece and provides effective electrical connection for testing the probe body.
In this embodiment, the upper unit 2-1, the spacing block pieces 2-2, the first cover plate 2-3, the lower unit 2-4 and the second cover plate 2-5 may be connected by a plurality of bolts or by clamping, and the device adopts bolt connection.
The connecting members 2 to 6 include: 2-6-1 parts of a liquid containing pipe, 2-6-2 parts of a connecting block, 2-6-3 parts of a sealing ring, 2-6-4 parts of a limiting column and 2-6-5 parts of a return spring.
The outer side wall of the liquid containing pipe 2-6-1 is provided with two symmetrical connecting blocks 2-6-2, and the lower port of the liquid containing pipe 2-6-1 is provided with a sealing ring 2-6-3. One end of the limiting column 2-6-4 is arranged on the connecting block 2-6-2, and the other end is inserted into the second cover plate 2-5. Specifically, the second cover plate 2-5 is provided with a blind hole, the end part of the limiting column 2-6-4 is inserted into the blind hole, the blind hole limits the end part of the limiting column 2-6-4 through a flange cover on the second cover plate 2-5 to ensure that the limiting column 2-6-4 can stretch and retract relative to the second cover plate 2-5, then the reset spring 2-6-5 is sleeved on the limiting column 2-6-4, and the reset spring 2-6-5 acts between the connecting block 2-6-2 and the flange cover to realize elastic expansion and retraction.
The welding pad 5-3 arranged on the wiring board 5-2 corresponds to the lower ends of the liquid containing pipe 2-6-1 and the second column end 1-5, the wiring board 5-2 can be pushed to move upwards through the driving piece, and the welding pad 5-3 is in contact with the lower port of the liquid containing pipe 2-6-1 to form plugging. And (3) injecting conductive fluid 1-12 into the liquid containing pipe 2-6-1 after plugging, wherein the conductive fluid 1-12 can electrically connect the second column end 1-5 separated by the rubber gasket with the welding pad 5-3. The rubber pad effectively solves the problem that scratches and indentations are generated on the probe and the electric contact 4-1, and meanwhile, the second column end 1-5 and the welding pad 5-3 are electrically connected and fully contacted through the conductive fluid 1-12, so that the problem that the probe and the welding pad are unstable in contact is solved, and meanwhile, the contact resistance is constant every time.
Example 3:
a method for testing a probe assembly, as shown in fig. 4, includes the following steps;
step a, selecting an electric contact 4-1 to be detected on an object 4 to be detected for marking at a point to be detected;
b, forming a closed circuit, aligning the funnel-shaped pipe orifice 1-10 to an electric contact 4-1 to be detected by the probe socket piece through the fine adjustment support frame 3, simultaneously fully attaching the plugging ring 1-11 to the lower surface of the object 4 to be detected, pushing the distribution board 5-2 to move upwards through the driving piece, completely abutting the lower end of the second column end 1-5 against the welding pad 5-3, and abutting the upper end of the liquid containing pipe 2-6-1 against the lower end surface of the second cover plate 2-5, so that the lower end of the liquid containing pipe 2-6-1 and the upper end surface of the welding pad 5-3 form a closed space, and facilitating the injection of liquid to form a primary closed circuit;
c, injecting liquid into the lower layer, namely injecting conductive fluid 1-12 into the liquid containing pipe 2-6-1 along a liquid injection hole formed in the upper end of the outer wall of the liquid containing pipe 2-6-1, so that the second column end 1-5 is fully immersed in the conductive fluid 1-12;
d, electrifying the test component 5, wherein the driving part can push the distribution board 5-2 to move upwards, and the liquid level of the conductive fluid in the funnel-shaped pipe orifice 1-10 rises to ensure that the conductive fluid in the funnel-shaped pipe orifice 1-10 is fully contacted with the lower end surface of the object to be tested 4; obtaining test data about the electrical contact 4-1 to be tested by the host 5-1;
and e, replacing the measuring points, when the test of the previous electric contact 4-1 is finished, moving the object to be tested upwards, horizontally moving the object to be tested 4, corresponding the next electric contact 4-1 to be tested with the corresponding funnel-shaped pipe orifice 1-10, moving the object to be tested 4 downwards until the plugging ring 1-11 is fully attached to the lower surface of the object to be tested 4, and then testing the electric contact of the next batch.
The embodiments are merely illustrative of the principles and effects of the present invention, and do not limit the invention. Any person skilled in the art can modify or change the above-mentioned embodiments without departing from the spirit and scope of the present invention. Accordingly, it is intended that all equivalent modifications or changes which can be made by those skilled in the art without departing from the spirit and technical concepts disclosed herein be covered by the appended claims.
Claims (11)
1. A probe socket, comprising: a cavity for inserting the probe along the axial direction is formed in the cylindrical body; the body includes: a first end opposite to the object to be tested, and a second end opposite to the testing member; the method is characterized in that: further comprising:
a connector disposed on the second end and in resilient contact with the test member;
the connecting piece includes: the liquid containing pipe is coaxially arranged with the body, and the elastic column elastically supports the liquid containing pipe at the second end;
flourishing liquid pipe is axial hollow pipe, flourishing liquid pipe includes: directly abutting against the lower pipe orifice on the surface of the test member; the liquid containing pipe passes through the elastic column to maintain the contact strength of the lower pipe orifice and the test member;
one end of the liquid storage pipe is inserted into the cavity from the first end, and the other end of the liquid storage pipe is in contact with the object to be detected and forms a seam for sealing; a metal piston is inflated in the liquid storage tube.
2. The probe socket of claim 1, wherein: the body comprises separation baffles forming axial space separation; a probe is assembled between the spacing baffle piece and the second end.
3. The probe socket of claim 1, wherein: the body includes axially spaced apart: an upper layer unit and a lower layer unit; the spacing baffle is positioned in the upper layer unit.
4. The probe socket of claim 3, wherein: the inner wall of the cavity includes a radially recessed groove for assembly and positioning of the probe.
5. The probe socket according to claim 4, wherein: the body is partitioned into the upper layer unit and the lower layer unit from a middle portion of the groove.
6. The probe socket of claim 2, wherein: the spacing separation blade comprises a hole for inserting and sleeving the column end of the probe.
7. The probe socket of claim 1, wherein: a detachable cover plate is arranged at the end part of the body.
8. The probe socket of claim 7, wherein: the elastic column comprises a limiting column and a return spring; the limiting column is telescopically supported on the cover plate on the second end, and the reset spring is sleeved on the limiting column.
9. The probe socket of claim 8, wherein: the surface of the liquid containing pipe comprises a connecting block; the limiting column is supported between the connecting block and the second end.
10. The probe socket of claim 1, wherein: when the liquid storage tube does not move, the distance between the upper tube opening of the liquid storage tube and the surface of the cover plate on the second end is the distance h.
11. A probe assembly assembled from the probe socket of claim 1, wherein: the method comprises the following steps: a probe socket piece and a probe;
the probe comprises a second column end which is abutted to the welding pad on the testing component and a first column end which is indirectly contacted with the object to be tested;
the first column end is in contact with an object to be detected through conductive fluid in the liquid storage pipe to realize electrical connection; the second column end penetrates through the liquid containing pipe and the conductive fluid therein to be electrically connected with the test component.
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| CN202011227365.XA CN112305394B (en) | 2020-11-06 | 2020-11-06 | Probe socket piece and probe assembly |
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| CN202011227365.XA CN112305394B (en) | 2020-11-06 | 2020-11-06 | Probe socket piece and probe assembly |
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| CN112305394A true CN112305394A (en) | 2021-02-02 |
| CN112305394B CN112305394B (en) | 2021-04-27 |
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Citations (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH038585B2 (en) * | 1983-12-01 | 1991-02-06 | Intaanashonaru Bijinesu Mashiinzu Corp | |
| JPH04217338A (en) * | 1990-12-19 | 1992-08-07 | Hitachi Ltd | Contacting method and apparatus for electrical contact terminal |
| EP1489428A2 (en) * | 2003-06-13 | 2004-12-22 | Solid State Measurements, Inc. | Flexible membrane probe and method of use thereof |
| JP2007142246A (en) * | 2005-11-21 | 2007-06-07 | Tokyo Seimitsu Co Ltd | Prober and wafer test method |
| CN1982896A (en) * | 2005-12-12 | 2007-06-20 | 大西电子株式会社 | Inspection fixture for printed wiring board |
| CN101256201A (en) * | 2007-02-27 | 2008-09-03 | 南茂科技股份有限公司 | Probe head module group capable of detecting multiple positions |
| DE102007035020A1 (en) * | 2007-07-26 | 2009-01-29 | Qimonda Ag | Contact device for use in chip test arrangement, for contacting electrical contact, has opening through which electrically conductive liquid produces contact for electrical contact |
| CN102650675A (en) * | 2011-02-23 | 2012-08-29 | 京元电子股份有限公司 | High-hardness wear-resistant probe and manufacturing method thereof |
| CN202837349U (en) * | 2012-08-23 | 2013-03-27 | 旺矽科技股份有限公司 | High-speed module used for wafer-level probe card and probe card using same |
| CN202886421U (en) * | 2012-10-22 | 2013-04-17 | 陈惠铃 | Improved detection probe |
| CN204177830U (en) * | 2014-09-11 | 2015-02-25 | 法特迪精密科技（苏州）有限公司 | The automatic assignment test socket of multistation |
| US20150268273A1 (en) * | 2014-03-20 | 2015-09-24 | Apple Inc. | Conductive test probe including conductive, conformable components |
| CN106019126A (en) * | 2016-07-29 | 2016-10-12 | 王汉清 | Semiconductor testing device and testing method thereof |
| CN107037243A (en) * | 2016-02-03 | 2017-08-11 | 京元电子股份有限公司 | Probe card assembling structure, assembling method thereof and method for taking out broken pins |
| CN109239578A (en) * | 2018-09-26 | 2019-01-18 | 华进半导体封装先导技术研发中心有限公司 | Wafer tester and crystal round test approach |
| CN109581173A (en) * | 2018-11-30 | 2019-04-05 | 华进半导体封装先导技术研发中心有限公司 | A kind of TSV switching board test device and method based on micro-nano mitron array |
| CN210323140U (en) * | 2019-07-12 | 2020-04-14 | 深圳市宾德宝电子科技有限公司 | A prevent crushing test probe structure for PCB board testing arrangement |
| CN111722093A (en) * | 2019-03-18 | 2020-09-29 | 中华精测科技股份有限公司 | Probe card testing device |
-
2020
- 2020-11-06 CN CN202011227365.XA patent/CN112305394B/en active Active
Patent Citations (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH038585B2 (en) * | 1983-12-01 | 1991-02-06 | Intaanashonaru Bijinesu Mashiinzu Corp | |
| JPH04217338A (en) * | 1990-12-19 | 1992-08-07 | Hitachi Ltd | Contacting method and apparatus for electrical contact terminal |
| EP1489428A2 (en) * | 2003-06-13 | 2004-12-22 | Solid State Measurements, Inc. | Flexible membrane probe and method of use thereof |
| JP2007142246A (en) * | 2005-11-21 | 2007-06-07 | Tokyo Seimitsu Co Ltd | Prober and wafer test method |
| CN1982896A (en) * | 2005-12-12 | 2007-06-20 | 大西电子株式会社 | Inspection fixture for printed wiring board |
| CN101256201A (en) * | 2007-02-27 | 2008-09-03 | 南茂科技股份有限公司 | Probe head module group capable of detecting multiple positions |
| DE102007035020A1 (en) * | 2007-07-26 | 2009-01-29 | Qimonda Ag | Contact device for use in chip test arrangement, for contacting electrical contact, has opening through which electrically conductive liquid produces contact for electrical contact |
| CN102650675A (en) * | 2011-02-23 | 2012-08-29 | 京元电子股份有限公司 | High-hardness wear-resistant probe and manufacturing method thereof |
| CN202837349U (en) * | 2012-08-23 | 2013-03-27 | 旺矽科技股份有限公司 | High-speed module used for wafer-level probe card and probe card using same |
| CN202886421U (en) * | 2012-10-22 | 2013-04-17 | 陈惠铃 | Improved detection probe |
| US20150268273A1 (en) * | 2014-03-20 | 2015-09-24 | Apple Inc. | Conductive test probe including conductive, conformable components |
| CN204177830U (en) * | 2014-09-11 | 2015-02-25 | 法特迪精密科技（苏州）有限公司 | The automatic assignment test socket of multistation |
| CN107037243A (en) * | 2016-02-03 | 2017-08-11 | 京元电子股份有限公司 | Probe card assembling structure, assembling method thereof and method for taking out broken pins |
| CN106019126A (en) * | 2016-07-29 | 2016-10-12 | 王汉清 | Semiconductor testing device and testing method thereof |
| CN109239578A (en) * | 2018-09-26 | 2019-01-18 | 华进半导体封装先导技术研发中心有限公司 | Wafer tester and crystal round test approach |
| CN109581173A (en) * | 2018-11-30 | 2019-04-05 | 华进半导体封装先导技术研发中心有限公司 | A kind of TSV switching board test device and method based on micro-nano mitron array |
| CN111722093A (en) * | 2019-03-18 | 2020-09-29 | 中华精测科技股份有限公司 | Probe card testing device |
| CN210323140U (en) * | 2019-07-12 | 2020-04-14 | 深圳市宾德宝电子科技有限公司 | A prevent crushing test probe structure for PCB board testing arrangement |
Non-Patent Citations (1)
| Title |
|---|
| 姜劭栋: "一种用于油气井持气率测量的高可靠性光纤探针", 《半导体光电》 * |
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Address after: No. 200 Xingpu Road, Industrial Park, Suzhou City, Jiangsu Province, 215000, 5 # 101, 102, 201, 202 Patentee after: Suzhou Fatedi Technology Co.,Ltd. Country or region after: China Address before: No. 200 Xingpu Road, Industrial Park, Suzhou City, Jiangsu Province, 215000, 5 # 101, 102, 201, 202 Patentee before: FTDEVICE TECHNOLOGY (SUZHOU) CO.,LTD. Country or region before: China |