CN112298751A - Stable form wafer storage device - Google Patents

Stable form wafer storage device Download PDF

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Publication number
CN112298751A
CN112298751A CN202011097050.8A CN202011097050A CN112298751A CN 112298751 A CN112298751 A CN 112298751A CN 202011097050 A CN202011097050 A CN 202011097050A CN 112298751 A CN112298751 A CN 112298751A
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CN
China
Prior art keywords
fixed
pipe
box body
door body
wall
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Withdrawn
Application number
CN202011097050.8A
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Chinese (zh)
Inventor
程香花
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Individual
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Individual
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Priority to CN202011097050.8A priority Critical patent/CN112298751A/en
Publication of CN112298751A publication Critical patent/CN112298751A/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D25/00—Details of other kinds or types of rigid or semi-rigid containers
    • B65D25/02—Internal fittings
    • B65D25/10—Devices to locate articles in containers
    • B65D25/101—Springs, elastic lips, or other resilient elements to locate the articles by pressure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/10—Particle separators, e.g. dust precipitators, using filter plates, sheets or pads having plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00—Cleaning by methods involving the use of air flow or gas flow
    • B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D25/00—Details of other kinds or types of rigid or semi-rigid containers
    • B65D25/02—Internal fittings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D25/00—Details of other kinds or types of rigid or semi-rigid containers
    • B65D25/20—External fittings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D81/00—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents
    • B65D81/02—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents specially adapted to protect contents from mechanical damage
    • B65D81/05—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents specially adapted to protect contents from mechanical damage maintaining contents at spaced relation from package walls, or from other contents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • B65D85/48—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for glass sheets

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The invention relates to a stable wafer storage device, which comprises a box body and a door body, wherein the box body is in a cuboid shape, one side of the box body is provided with an opening, the door body is positioned on the side, provided with the opening, of the box body, the door body is installed on the box body and is in sealed connection with the opening, a storage mechanism and a dust removal mechanism are arranged in the box body, the storage mechanism comprises a fixed pipe, a supporting plate, an adsorption assembly and an auxiliary assembly, the storage mechanism comprises the fixed pipe, the supporting plate, the adsorption assembly and the auxiliary assembly, the adsorption assembly comprises a connecting pipe, a magnet disc, a first spring, a limiting block and a mounting hole, the auxiliary assembly comprises a mounting hole, a push rod, a second spring, a rack, a gear, a rotating shaft, a first bearing, a screw rod, a sliding block, a moving plate, an air bag and two guide units, moreover, the dust removal function is realized through the dust removal mechanism.

Description

Stable form wafer storage device
Technical Field
The invention relates to the field of chip equipment, in particular to a stable wafer storage device.
Background
The chip is a general name of a semiconductor device product, and is also called as a microcircuit, a microchip, and an integrated circuit, during a production process of the chip, a wafer needs to be cut to obtain chips, and during a transportation process of the wafer, the wafer needs to be received by a container so as to be convenient for the transportation of the wafer.
The existing container for containing the wafers is easy to collide with the container in the using process, the wafers are easy to damage due to the fact that the wafer is made of fragile materials, and therefore practicability is reduced.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: in order to overcome the defects of the prior art, a stable wafer storage device is provided.
The technical scheme adopted by the invention for solving the technical problems is as follows: a stable wafer containing device comprises a box body and a door body, wherein the box body is in a cuboid shape, an opening is formed in one side of the box body, the door body is located on the side, provided with the opening, of the box body, the door body is installed on the box body and is connected with the opening in a sealing mode, and a containing mechanism and a dust removing mechanism are arranged in the box body;
the accommodating mechanism comprises a fixed pipe, a supporting plate, an adsorption component and an auxiliary component, wherein the fixed pipe is vertically arranged, the bottom end of the fixed pipe is hermetically and fixedly connected with the bottom in the box body, the supporting plate is horizontally arranged, the supporting plate is hermetically and fixedly connected with the top end of the fixed pipe, the supporting plate is provided with at least two through holes, the through holes are circumferentially and uniformly distributed by taking the axis of the fixed pipe as a center, the through holes are communicated with the fixed pipe, the auxiliary component is arranged at the top of the supporting plate, and the adsorption component is arranged on the fixed pipe;
the adsorption component comprises a connecting pipe, a magnet disc, a first spring, a limiting block and a mounting hole, the mounting hole is arranged on one side of the box body, which is provided with an opening, the connecting pipe is perpendicular to one side of the box body, one end of the connecting pipe is inserted into the mounting hole, the other end of the connecting pipe is fixed on the fixed pipe and is communicated with the fixed pipe, the connecting pipe is hermetically and fixedly connected with the inner wall of the mounting hole, the door body is abutted against and hermetically connected with one end of the connecting pipe, which is far away from the fixed pipe, the magnet disc, the limiting block and the first spring are all arranged in the connecting pipe, the magnet disc and the connecting pipe are coaxially arranged, the magnet disc is slidably and hermetically connected with the inner wall of the connecting pipe, the limiting block is fixed on the inner wall of the connecting pipe and abutted against one side of the magnet disc, which is far away from the fixed pipe, the other, the first spring is in a stretching state, and the door body is made of iron;
the auxiliary assembly comprises a mounting hole, a push rod, a second spring, a rack, a gear, a rotating shaft, a first bearing, a lead screw, a sliding block, a moving plate, an air bag and two guide units, the mounting hole is formed in one side, provided with an opening, of the box body, the push rod is parallel to the connecting pipe and penetrates through the mounting hole, the push rod is in sliding and sealing connection with the inner wall of the mounting hole, one end of the push rod is abutted to one side, close to the box body, of the door body, the other end of the push rod is connected with the inner wall, provided with the opening, of the box body through the second spring, the second spring is in a stretching state, the rotating shaft and the lead screw are coaxially arranged with the fixed pipe, the lead screw is fixed at the bottom end of the rotating shaft, the inner ring and the gear of the first bearing are both installed on the rotating shaft, the outer ring of the first bearing, the guide unit is sleeved on the screw rod, a thread matched with the screw rod is arranged at the joint of the slide block and the screw rod, the movable plate is positioned between the screw rod and the support plate and is parallel to the support plate, a gap is formed between the movable plate and the screw rod, the movable plate is fixedly connected with the slide block, the airbag is positioned between the movable plate and the support plate, the airbag is fixed at the bottom of the movable plate and is abutted against the top of the support plate, and the guide unit is circumferentially and uniformly distributed at the top of the movable plate by taking the axis of the rotating shaft as a;
the guide unit comprises a fixed block and a guide rod, the guide rod is parallel to the rotating shaft and is fixed at the top of the movable plate, the fixed block is fixed on the inner wall of the box body, a guide hole is formed in the fixed block, the guide rod penetrates through the guide hole and is in sliding connection with the inner wall of the guide hole, and a gap is formed between the movable plate and the fixed block;
the dust removal mechanism comprises an air pipe, a filter screen, a transmission assembly and a wind power assembly, wherein an air hole is formed in one side, far away from an opening, of the box body, the air pipe is parallel to the connecting pipe and is located on one side, far away from the door body, of the supporting plate, the air pipe penetrates through the air hole, the air pipe is hermetically and fixedly connected with the inner wall of the air hole, the filter screen is installed in the air pipe, the wind power assembly is arranged in the air pipe and is located on one side, close to the door body, of the filter screen;
the wind power assembly comprises a fan blade, a transmission shaft and a second bearing, the transmission shaft and the air pipe are coaxially arranged, the fan blade is arranged at one end of the transmission shaft, which is far away from the door body, the inner ring of the second bearing is arranged at the middle end of the transmission shaft, and the outer ring of the second bearing is fixedly connected with the inner wall of the air pipe;
the transmission assembly comprises a connecting wire, a fixed pulley, an one-way bearing and a torsion spring, one end of an inner ring installation transmission shaft of the one-way bearing, which is close to the door body, is fixed on the inner wall of the box body, the fixed pulley is positioned on one side of the rack, which is far away from the push rod, and is positioned above the one-way bearing, one end of the connecting wire is fixed on the rack, the other end of the connecting wire bypasses the fixed pulley and is fixed on the outer ring of the one-way bearing, the connecting wire is wound on the outer ring of the one-way bearing, the torsion spring is positioned between the second bearing and the one-way bearing, and the outer ring of.
Preferably, the connection line is a steel wire rope in order to improve the reliability of the connection line.
Preferably, in order to realize buffering and vibration reduction, the limiting block is made of rubber.
Preferably, in order to reduce a gap between the inner wall of the connection pipe and the magnet disk, the inner wall of the connection pipe is coated with a sealing grease.
Preferably, in order to reduce noise, an acoustic board is arranged in the fixing pipe.
Preferably, in order to prolong the service life of the box body, the box body is provided with an anti-corrosion zinc coating.
Preferably, the screw is coated with a lubricating oil in order to reduce the frictional force between the screw and the slider.
Preferably, in order to facilitate the installation of the push rod, chamfers are arranged at two ends of the push rod.
Preferably, in order to improve the stability of the box body, the bottom of the box body is provided with a sucker.
Preferably, the stability of the wafer placed on the supporting plate is improved, and anti-skid grains are arranged on the top of the supporting plate.
The stable wafer storage device has the advantages that the storage mechanism achieves the function of storing wafers, compared with the existing storage mechanism, the storage mechanism absorbs the wafers through the through holes and the air bags extrude the wafers to be combined with each other, the stability of storing the wafers can be improved, the practicability is higher, the dust removal function is achieved through the dust removal mechanism, compared with the existing dust removal mechanism, the dust removal mechanism drives the fan blades to rotate through the movement of the racks, the integrated linkage structure is achieved with the storage mechanism, and the practicability is higher.
Drawings
The invention is further illustrated with reference to the following figures and examples.
FIG. 1 is a schematic view of a stable wafer receiving apparatus according to the present invention;
FIG. 2 is an enlarged view of portion A of FIG. 1;
FIG. 3 is a schematic view of an auxiliary assembly of the stabilized wafer receiving apparatus of the present invention;
FIG. 4 is a schematic structural diagram of a dust removing mechanism of the stable wafer storage device of the present invention;
in the figure: 1. the air-conditioning fan comprises a box body, a door body, a fixed pipe, a supporting plate, a connecting pipe, a magnet disc, a first spring, a limiting block, a push rod, a second spring, a rack 11, a gear 12, a gear 13, a rotating shaft 14, a first bearing 15, a screw rod 16, a sliding block 17, a moving plate 18, an air bag 19, a fixed block 20, a guide rod 21, an air pipe 22, a filter screen 23, a fan blade 24, a transmission shaft 25, a second bearing 26, a connecting wire 27, a fixed pulley 27, a one-way bearing 28, a torsion spring 29, a sound-absorbing plate 30 and a suction disc 31.
Detailed Description
The present invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic views illustrating only the basic structure of the present invention in a schematic manner, and thus show only the constitution related to the present invention.
As shown in fig. 1-3, a stable wafer storage device includes a box body 1 and a door body 2, wherein the box body 1 is in a rectangular parallelepiped shape, an opening is formed in one side of the box body 1, the door body 2 is located on the side of the box body 1 where the opening is formed, the door body 2 is installed on the box body 1 and is hermetically connected with the opening, and a storage mechanism and a dust removal mechanism are arranged in the box body 1;
the accommodating mechanism comprises a fixed pipe 3, a support plate 4, an adsorption component and an auxiliary component, wherein the fixed pipe 3 is vertically arranged, the bottom end of the fixed pipe 3 is hermetically and fixedly connected with the bottom in the box body 1, the support plate 4 is horizontally arranged, the support plate 4 is hermetically and fixedly connected with the top end of the fixed pipe 3, at least two through holes are arranged on the support plate 4, the through holes are circumferentially and uniformly distributed by taking the axis of the fixed pipe 3 as a center, the through holes are communicated with the fixed pipe 3, the auxiliary component is arranged at the top of the support plate 4, and the adsorption component is arranged on the fixed pipe 3;
the adsorption component comprises a connecting pipe 5, a magnet disc 6, a first spring 7, a limiting block 8 and a mounting hole, the mounting hole is arranged on one side of the box body 1 with an opening, the connecting pipe 5 is perpendicular to one side of the box body 1 with the opening, one end of the connecting pipe 5 is inserted into the mounting hole, the other end of the connecting pipe 5 is fixed on the fixed pipe 3 and communicated with the fixed pipe 3, the connecting pipe 5 is sealed and fixedly connected with the inner wall of the mounting hole, the door body 2 is abutted against and hermetically connected with one end of the connecting pipe 5 far away from the fixed pipe 3, the magnet disc 6, the limiting block 8 and the first spring 7 are all arranged in the connecting pipe 5, the magnet disc 6 and the connecting pipe 5 are coaxially arranged, the magnet disc 6 is slidably and hermetically connected with the inner wall of the connecting pipe 5, the limiting block 8 is fixed on the inner wall of the connecting pipe 5 and is abutted against one side of the, the other side of the magnet disc 6 is connected with the inner wall of the connecting pipe 5 close to one side of the fixed pipe 3 through a first spring 7, the first spring 7 is in a stretching state, and the door body 2 is made of iron;
the auxiliary assembly comprises a mounting hole, a push rod 9, a second spring 10, a rack 11, a gear 12, a rotating shaft 13, a first bearing 14, a screw rod 15, a sliding block 16, a moving plate 17, an air bag 18 and two guiding units, wherein the mounting hole is formed in one side of the box body 1, which is provided with an opening, the push rod 9 is parallel to the connecting pipe 5 and penetrates through the mounting hole, the push rod 9 is connected with the inner wall of the mounting hole in a sliding and sealing manner, one end of the push rod 9 is abutted to one side, close to the box body 1, of the door body 2, the other end of the push rod 9 is connected with the inner wall of the box body 1, which is provided with the opening, through the second spring 10, the second spring 10 is in a stretching state, the rotating shaft 13 and the screw rod 15 are coaxially arranged with the fixing pipe 3, the screw rod 15 is fixed at the bottom end of the rotating shaft 13, the inner ring of the first bearing 14 and the gear, the rack 11 is fixed at one end, far away from the door body 2, of the push rod 9 and meshed with the gear 12, the slider 16 is sleeved on the screw rod 15, a thread matched with the screw rod 15 is arranged at the joint of the slider 16 and the screw rod 15, the moving plate 17 is positioned between the screw rod 15 and the support plate 4 and is parallel to the support plate 4, a gap is formed between the moving plate 17 and the screw rod 15, the moving plate 17 is fixedly connected with the slider 16, the airbag 18 is positioned between the moving plate 17 and the support plate 4, the airbag 18 is fixed at the bottom of the moving plate 17 and is abutted against the top of the support plate 4, and the guide units are circumferentially and uniformly distributed at the top of the moving plate 17 by taking the axis;
the guide unit comprises a fixed block 19 and a guide rod 20, the guide rod 20 is parallel to the rotating shaft 13 and is fixed at the top of the movable plate 17, the fixed block 19 is fixed on the inner wall of the box body 1, a guide hole is formed in the fixed block 19, the guide rod 20 penetrates through the guide hole and is in sliding connection with the inner wall of the guide hole, and a gap is formed between the movable plate 17 and the fixed block 19;
the door body 2 is opened, at the moment, the distance between the iron door body 2 and the magnet disc 6 is increased, namely, the acting force of mutual attraction between the magnet disc 6 and the iron door body 2 is reduced, when the elastic acting force of the first spring 7 is larger than the mutual attraction between the magnet disc 6 and the door body 2, the magnet disc 6 can move towards the direction far away from the limiting block 8, moreover, under the elastic action of the second spring 10, the push rod 9 can drive the rack 11 to move towards the direction close to the door body 2, namely, the gear 12 can drive the rotating shaft 13 to rotate under the supporting action of the first bearing 14, namely, the screw rod 15 can rotate, meanwhile, the slide block 16 moves towards the direction close to the rotating shaft 13, the movement of the slide block 16 drives the air bag 18 to synchronously move through the moving plate 17, namely, the air bag 18 is separated from the supporting plate 4, the movement of the slide block 17 drives the guide rod 20 to move, the cooperation between guide arm 20 and the fixed block 19 has played the function of direction, subsequently, place the wafer at the top of backup pad 4 and close door body 2, at this moment, the effort of mutual attraction between door body 2 and the magnet dish 6 makes magnet dish 6 move towards being close to stopper 8 direction and makes magnet dish 6 and spacing support to lean on, can make the air in the fixed tube 3 inhale in the connecting pipe 5 promptly, make the atmospheric pressure in the fixed tube 3 reduce, can make the through-hole adsorb the wafer under the effect of atmospheric pressure, the reliability of wafer has been improved, simultaneously, still promote push rod 9 during door body 2 closes and realize reseing, can so that movable plate 17 drives gasbag 18 and moves down, and make gasbag 18 and wafer support to lean on, through the extrusion of gasbag 18 to the wafer, can further improve the stability of wafer.
As shown in fig. 4, the dust removing mechanism includes an air pipe 21, a filter screen 22, a transmission assembly and a wind power assembly, an air hole is formed in one side of the box body 1, which is far away from the opening, the air pipe 21 is parallel to the connecting pipe 5 and is located on one side of the supporting plate 4, which is far away from the door body 2, the air pipe 21 penetrates through the air hole, the air pipe 21 is hermetically and fixedly connected with the inner wall of the air hole, the filter screen 22 is installed in the air pipe 21, the wind power assembly is arranged in the air pipe 21 and is located on one side of the filter screen 22, which is close to the door;
the wind power assembly comprises a fan blade 23, a transmission shaft 24 and a second bearing 25, the transmission shaft 24 and the air pipe 21 are coaxially arranged, the fan blade 23 is installed at one end, far away from the door body 2, of the transmission shaft 24, the inner ring of the second bearing 25 is installed at the middle end of the transmission shaft 24, and the outer ring of the second bearing 25 is fixedly connected with the inner wall of the air pipe 21;
the transmission assembly includes connecting wire 26, fixed pulley 27, one-way bearing 28 and torsion spring 29, the one end that is close to door body 2 of one-way bearing 28's inner circle installation transmission shaft 24, fixed pulley 27 fixes on the inner wall of box 1, fixed pulley 27 is located one side of keeping away from push rod 9 of rack 11 and is located one-way bearing 28's top, the one end of connecting wire 26 is fixed on rack 11, fixed pulley 27 is walked around to the other end of connecting wire 26 and is fixed the outer lane at one-way bearing 28, connecting wire 26 coils the outer lane at one-way bearing 28, torsion spring 29 is located between second bearing 25 and the one-way bearing 28, torsion spring 29 and second bearing 25's outer lane is passed through in one-way bearing 28's outer lane and is connected.
When the door body 2 is opened, the rack 11 moves to pull the outer ring of the one-way bearing 28 to rotate through the connecting line 26, because the one-way bearing 28 can rotate freely in one direction and is locked in the other direction, and at the moment, the rotation of the outer ring of the one-way bearing 28 can drive the inner ring of the one-way bearing 28 to rotate synchronously, namely, the transmission shaft 24 can drive the fan blades 23 to rotate under the supporting action of the second bearing 25, and the torsion spring 29 deforms, air can be conveyed into the box body 1 from the air pipe 21 through the rotation of the fan blades 23, the air in the box body 1 is discharged from the opening, the air in the air pipe 21 is trapped through the filter screen 22, dust on the wafer can be separated from the wafer under the action of air flow, the dust removal function is realized, when the door body 2 is closed, the connecting line 26 can be loosened, at the moment, the outer ring of the one-way bearing 28 reversely rotates and winds the connecting line 26 through the elastic action of the, at this time, the outer ring of the one-way bearing 28 cannot drive the inner ring of the one-way bearing 28 to synchronously rotate, i.e. the fan blade 23 and the box body 1 can keep a relative static position relationship, and the fan blade 23 is prevented from reversely rotating to make air enter the box body 1 from the opening and bring dust into the box body 1.
Preferably, the connection line 26 is a steel wire rope in order to improve the reliability of the connection line 26.
The steel wire rope has the characteristics of high strength, difficulty in breaking and the like, so that the reliability of the connecting wire 26 can be improved.
Preferably, in order to achieve buffering and vibration reduction, the limiting block 8 is made of rubber.
The rubber texture is comparatively soft, can reduce magnet dish 6 and stopper 8 and support the impact force that produces when leaning on, realizes buffering and damping.
Preferably, in order to reduce the gap between the inner wall of the connection pipe 5 and the magnet disk 6, the inner wall of the connection pipe 5 is coated with a sealing grease.
The sealing grease is used for reducing the gap between the inner wall of the connecting pipe 5 and the magnet disc 6 and improving the sealing property.
Preferably, in order to reduce noise, a sound-absorbing plate 30 is provided in the fixing tube 3.
The sound-absorbing panel 30 can absorb noise, achieving noise reduction.
Preferably, in order to prolong the service life of the box body 1, an anti-corrosion zinc coating is arranged on the box body 1.
The function of anticorrosive galvanizing coat is to promote the rust-resistant ability of box 1, prolongs the life of box 1.
Preferably, in order to reduce the friction between the screw rod 15 and the slider 16, the screw rod 15 is coated with a lubricating oil.
The lubricating oil has the function of reducing the friction force between the sliding block 16 and the screw rod 15 and improving the smoothness of the movement of the sliding block 16 on the screw rod 15.
Preferably, in order to facilitate the installation of the push rod 9, both ends of the push rod 9 are provided with chamfers.
The chamfer angle is used for reducing the caliber of the push rod 9 when the push rod passes through the mounting hole, and the effect of convenient mounting is achieved.
Preferably, in order to improve the stability of the box body 1, the bottom of the box body 1 is provided with a suction cup 31.
The sucking disc 31 can adsorb on place the platform, improves the stability of box 1.
Preferably, the stability of the wafer placed on the support plate 4 is improved, and the top of the support plate 4 is provided with anti-slip lines.
The anti-slip lines are used for improving the friction force between the wafer and the supporting plate 4, preventing slip and further improving the stability of the wafer.
The door body 2 is opened, at the moment, the distance between the iron door body 2 and the magnet disc 6 is increased, namely, the acting force of mutual attraction between the magnet disc 6 and the iron door body 2 is reduced, when the elastic acting force of the first spring 7 is larger than the mutual attraction between the magnet disc 6 and the door body 2, the magnet disc 6 can move towards the direction far away from the limiting block 8, moreover, under the elastic action of the second spring 10, the push rod 9 can drive the rack 11 to move towards the direction close to the door body 2, namely, the gear 12 can drive the rotating shaft 13 to rotate under the supporting action of the first bearing 14, namely, the screw rod 15 can rotate, meanwhile, the slide block 16 moves towards the direction close to the rotating shaft 13, the movement of the slide block 16 drives the air bag 18 to synchronously move through the moving plate 17, namely, the air bag 18 is separated from the supporting plate 4, the movement of the slide block 17 drives the guide rod 20 to move, the guide rod 20 and the fixing block 19 are matched to play a guiding function, then, the wafer is placed on the top of the support plate 4, the door body 2 is closed, at the moment, the magnet disc 6 moves towards the direction close to the limiting block 8 through the interaction force between the door body 2 and the magnet disc 6, the magnet disc 6 is abutted to the limiting block, namely, air in the fixed tube 3 can be sucked into the connecting tube 5, the air pressure in the fixed tube 3 is reduced, the through hole can adsorb the wafer under the action of the air pressure, the reliability of the wafer is improved, meanwhile, the push rod 9 is pushed to reset during the closing of the door body 2, so that the movable plate 17 drives the air bag 18 to move downwards, the air bag 18 is abutted to the wafer, the wafer is extruded by the air bag 18, the stability of the wafer can be further improved, and during the opening of the door body 2, the movement of the rack 11 pulls the outer ring of the one-way bearing 28, because the one-way bearing 28 is a bearing which can freely rotate in one direction and is locked in the other direction, and the rotation of the outer ring of the one-way bearing 28 can drive the inner ring of the one-way bearing 28 to synchronously rotate, namely, the transmission shaft 24 can drive the fan blades 23 to rotate under the supporting action of the second bearing 25, and the torsion spring 29 is deformed, air can be conveyed into the box body 1 from the air pipe 21 through the rotation of the fan blades 23, the air in the box body 1 is discharged from the opening, the air in the air pipe 21 is trapped through the filter screen 22, dust on the wafer can be separated from the wafer under the action of air flow, the dust removal function is realized, when the door body 2 is closed, the connecting wire 26 can be loosened, at the moment, the outer ring of the one-way bearing 28 reversely rotates and winds the connecting wire 26 through the elastic action of the torsion spring 29, and at the moment, the outer ring of the one-way bearing 28 cannot drive the inner ring of the one-way bearing, therefore, the fan blade 23 and the box body 1 can be kept in a relative static position, and the fan blade 23 is prevented from rotating reversely, so that air enters the box body 1 from the opening and brings dust into the box body 1.
Compared with the prior art, this stable form wafer storage device has realized the function of accomodating the wafer through receiving mechanism, compare with current receiving mechanism, this receiving mechanism adsorbs the extrusion of wafer and gasbag 18 to the wafer and combines each other through the through-hole, can also improve the stability that the wafer was accomodate, the practicality is stronger, moreover, still realize the function of removing dust through dust removal mechanism, compare with current dust removal mechanism, this dust removal mechanism drives flabellum 23 through the removal of rack 11 and rotates, integrated type linkage structure has been realized with receiving mechanism, the practicality is stronger.
In light of the foregoing description of the preferred embodiment of the present invention, many modifications and variations will be apparent to those skilled in the art without departing from the spirit and scope of the invention. The technical scope of the present invention is not limited to the content of the specification, and must be determined according to the scope of the claims.

Claims (10)

1. A stable wafer containing device comprises a box body (1) and a door body (2), wherein the box body (1) is cuboid, an opening is formed in one side of the box body (1), the door body (2) is located on the side, provided with the opening, of the box body (1), the door body (2) is installed on the box body (1) and is in sealing connection with the opening, and the stable wafer containing device is characterized in that a containing mechanism and a dust removing mechanism are arranged in the box body (1);
the storage mechanism comprises a fixed pipe (3), a support plate (4), an adsorption component and an auxiliary component, wherein the fixed pipe (3) is vertically arranged, the bottom end of the fixed pipe (3) is hermetically and fixedly connected with the bottom in the box body (1), the support plate (4) is horizontally arranged, the support plate (4) is hermetically and fixedly connected with the top end of the fixed pipe (3), at least two through holes are formed in the support plate (4), the through holes are circumferentially and uniformly distributed by taking the axis of the fixed pipe (3) as the center, the through holes are communicated with the fixed pipe (3), the auxiliary component is arranged at the top of the support plate (4), and the adsorption component is arranged on the fixed pipe (3);
the adsorption component comprises a connecting pipe (5), a magnet disc (6), a first spring (7), a limiting block (8) and a mounting hole, the mounting hole is arranged on one side of the box body (1) provided with an opening, the connecting pipe (5) is perpendicular to one side of the box body (1) provided with the opening, one end of the connecting pipe (5) is inserted into the mounting hole, the other end of the connecting pipe (5) is fixed on the fixed pipe (3) and communicated with the fixed pipe (3), the connecting pipe (5) is sealed and fixedly connected with the inner wall of the mounting hole, the door body (2) is abutted against and hermetically connected with one end of the connecting pipe (5) far away from the fixed pipe (3), the magnet disc (6), the limiting block (8) and the first spring (7) are all arranged in the connecting pipe (5), the magnet disc (6) is coaxially arranged with the connecting pipe (5), and the magnet disc (6) is slidably and hermetically connected with the inner wall of the connecting pipe (5), the limiting block (8) is fixed on the inner wall of the connecting pipe (5) and is abutted against one side, far away from the fixed pipe (3), of the magnet disc (6), the other side of the magnet disc (6) is connected with the inner wall, close to the fixed pipe (3), of the connecting pipe (5) through a first spring (7), the first spring (7) is in a stretching state, and the door body (2) is made of iron;
the auxiliary assembly comprises a mounting hole, a push rod (9), a second spring (10), a rack (11), a gear (12), a rotating shaft (13), a first bearing (14), a screw rod (15), a sliding block (16), a moving plate (17), an air bag (18) and two guide units, wherein the mounting hole is formed in one side, provided with an opening, of the box body (1), the push rod (9) is parallel to the connecting pipe (5) and penetrates through the mounting hole, the push rod (9) is connected with the inner wall of the mounting hole in a sliding and sealing mode, one end of the push rod (9) is abutted to one side, close to the box body (1), of the door body (2), the other end of the push rod (9) is connected with the inner wall, provided with the opening side, of the box body (1) through the second spring (10), the second spring (10) is in a stretching state, and the rotating shaft (13) and the screw rod (15) are both, the bottom at axis of rotation (13) is fixed in lead screw (15), the inner circle and gear (12) of first bearing (14) are all installed on axis of rotation (13), the inner wall fixed connection of the outer lane of first bearing (14) and box (1), rack (11) are fixed in the one end of keeping away from door body (2) of push rod (9) and mesh with gear (12), slider (16) cover is established on lead screw (15), the junction of slider (16) and lead screw (15) is equipped with the screw thread that matches with lead screw (15), movable plate (17) are located between lead screw (15) and backup pad (4) and are parallel with backup pad (4), be equipped with the clearance between movable plate (17) and lead screw (15), slider (17) and slider (16) fixed connection, gasbag (18) are located between movable plate (17) and backup pad (4), the air bags (18) are fixed at the bottom of the moving plate (17) and are abutted against the top of the supporting plate (4), and the guide units are circumferentially and uniformly distributed on the top of the moving plate (17) by taking the axis of the rotating shaft (13) as a center;
the guide unit comprises a fixed block (19) and a guide rod (20), the guide rod (20) is parallel to the rotating shaft (13) and is fixed at the top of the moving plate (17), the fixed block (19) is fixed on the inner wall of the box body (1), the fixed block (19) is provided with a guide hole, the guide rod (20) penetrates through the guide hole and is in sliding connection with the inner wall of the guide hole, and a gap is formed between the moving plate (17) and the fixed block (19);
the dust removal mechanism comprises an air pipe (21), a filter screen (22), a transmission assembly and a wind power assembly, wherein an air hole is formed in one side, far away from an opening, of the box body (1), the air pipe (21) is parallel to the connecting pipe (5) and is located on one side, far away from the door body (2), of the supporting plate (4), the air pipe (21) penetrates through the air hole, the air pipe (21) is sealed and fixedly connected with the inner wall of the air hole, the filter screen (22) is installed in the air pipe (21), the wind power assembly is arranged in the air pipe (21) and is located on one side, close to the door body (2), of the filter screen (22), and the transmission assembly is arranged in the box;
the wind power assembly comprises fan blades (23), a transmission shaft (24) and a second bearing (25), the transmission shaft (24) and the air pipe (21) are coaxially arranged, the fan blades (23) are installed at one end, far away from the door body (2), of the transmission shaft (24), the inner ring of the second bearing (25) is installed at the middle end of the transmission shaft (24), and the outer ring of the second bearing (25) is fixedly connected with the inner wall of the air pipe (21);
the transmission assembly comprises a connecting line (26), a fixed pulley (27), a one-way bearing (28) and a torsion spring (29), the inner ring of the one-way bearing (28) is provided with one end of the transmission shaft (24) close to the door body (2), the fixed pulley (27) is fixed on the inner wall of the box body (1), the fixed pulley (27) is positioned on one side of the rack (11) far away from the push rod (9) and above the one-way bearing (28), one end of the connecting wire (26) is fixed on the rack (11), the other end of the connecting wire (26) is fixed on the outer ring of the one-way bearing (28) by winding the fixed pulley (27), the connecting wire (26) is wound around the outer ring of the one-way bearing (28), the torsion spring (29) is located between the second bearing (25) and the one-way bearing (28), the outer ring of the one-way bearing (28) is connected with the outer ring of the second bearing (25) through a torsion spring (29).
2. The stable wafer containment device of claim 1, wherein the connecting wire (26) is a steel wire rope.
3. The stable wafer receiving device according to claim 1, wherein the stopper (8) is made of rubber.
4. A stable wafer receiving apparatus according to claim 1, wherein the inner wall of the connecting tube (5) is coated with a sealing grease.
5. A stable wafer receiving apparatus according to claim 1, wherein an acoustic panel (30) is provided in the mounting tube (3).
6. The stable wafer storage device according to claim 1, wherein the box (1) is provided with an anti-corrosion zinc coating.
7. The stable wafer receiving apparatus of claim 1, wherein the lead screw (15) is coated with a lubricant.
8. The stable wafer receiving device according to claim 1, wherein both ends of the push rod (9) are chamfered.
9. A stable wafer receiving apparatus according to claim 1, wherein a suction cup (31) is provided at the bottom of the box (1).
10. The stable wafer receiving device according to claim 1, wherein the top of the supporting plate (4) is provided with an anti-slip pattern.
CN202011097050.8A 2020-10-14 2020-10-14 Stable form wafer storage device Withdrawn CN112298751A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202011097050.8A CN112298751A (en) 2020-10-14 2020-10-14 Stable form wafer storage device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202011097050.8A CN112298751A (en) 2020-10-14 2020-10-14 Stable form wafer storage device

Publications (1)

Publication Number Publication Date
CN112298751A true CN112298751A (en) 2021-02-02

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN202011097050.8A Withdrawn CN112298751A (en) 2020-10-14 2020-10-14 Stable form wafer storage device

Country Status (1)

Country Link
CN (1) CN112298751A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113349942A (en) * 2021-05-28 2021-09-07 吴永立 Medical apparatus storage device with dust removal function
CN113665950A (en) * 2021-08-25 2021-11-19 广州市顺通达物流供应链有限公司 Stable form cold chain transportation equipment
CN113753392A (en) * 2021-08-25 2021-12-07 广州市顺通达物流供应链有限公司 Stable form transportation equipment that keeps fresh

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113349942A (en) * 2021-05-28 2021-09-07 吴永立 Medical apparatus storage device with dust removal function
CN113665950A (en) * 2021-08-25 2021-11-19 广州市顺通达物流供应链有限公司 Stable form cold chain transportation equipment
CN113753392A (en) * 2021-08-25 2021-12-07 广州市顺通达物流供应链有限公司 Stable form transportation equipment that keeps fresh

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