CN112757151A - Silicon crystal grinding equipment with function of removing fragments - Google Patents
Silicon crystal grinding equipment with function of removing fragments Download PDFInfo
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- CN112757151A CN112757151A CN202011418572.3A CN202011418572A CN112757151A CN 112757151 A CN112757151 A CN 112757151A CN 202011418572 A CN202011418572 A CN 202011418572A CN 112757151 A CN112757151 A CN 112757151A
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- Prior art keywords
- transmission shaft
- workbench
- pipe
- rod
- hole
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
- B24B37/10—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/27—Work carriers
- B24B37/30—Work carriers for single side lapping of plane surfaces
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/007—Weight compensation; Temperature compensation; Vibration damping
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
- B24B55/06—Dust extraction equipment on grinding or polishing machines
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
- B24B55/12—Devices for exhausting mist of oil or coolant; Devices for collecting or recovering materials resulting from grinding or polishing, e.g. of precious metals, precious stones, diamonds or the like
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
The invention relates to silicon crystal grinding equipment with a function of removing debris, which comprises a workbench, a driving box, a transmission shaft and a grinding disc, the driving box is arranged above the workbench and is fixedly connected with the workbench, the transmission shaft is vertically arranged between the driving box and the workbench, the grinding disc and the transmission shaft are coaxially arranged and are positioned between the workbench and the transmission shaft, gaps are arranged between the workbench and the transmission shaft and the grinding disc, the driving box is provided with a driving device, the driving device is connected with the top end of a transmission shaft, the transmission shaft is provided with a connecting mechanism, the workbench is provided with an auxiliary mechanism, this silicon crystal grinding equipment with clear away piece function has realized the function of cleaing away remaining piece on the silicon crystal through coupling mechanism, moreover, has realized preventing through complementary unit that cooling water splashes and leads to the grinder circuit to wet and take place the short circuit.
Description
Technical Field
The invention relates to the field of integrated circuit production and processing, in particular to silicon crystal grinding equipment with a debris removing function.
Background
The integrated circuit technology is that the transistor, diode, resistor and capacitor which are needed by the circuit are made on a small silicon chip, glass or ceramic substrate by a certain technology, then they are interconnected by a proper technology, and then they are packaged in a tube shell, so the volume of the whole circuit is greatly reduced, the number of leading-out wires and welding points is greatly reduced, wherein, the grinder is one of the integrated circuit production and processing equipments, it is mainly used for grinding silicon crystal, and increasing the surface degree of the silicon crystal.
Current grinding machine is in the course of working, in order to reduce the temperature of silicon crystal, need water and cool off, and the rotation of abrasive disc can make water production splash, easily leads to the grinder circuit to wet and take place the short circuit, has reduced the practicality, moreover, the silicon crystal is at the back that finishes of grinding, and more piece can be remained on the surface, and untimely cleaing away can make the silicon crystal take place the friction with the piece and influence the grinding effect taking in the in-process.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: in order to overcome the defects of the prior art, the silicon crystal grinding equipment with the function of removing the debris is provided.
The technical scheme adopted by the invention for solving the technical problems is as follows: a silicon crystal grinding device with a debris removing function comprises a workbench, a driving box, a transmission shaft and a grinding disc, wherein the driving box is arranged above the workbench and fixedly connected with the workbench, the transmission shaft is vertically arranged between the driving box and the workbench, the grinding disc and the transmission shaft are coaxially arranged and are positioned between the workbench and the transmission shaft, gaps are formed between the workbench and the grinding disc, the driving box is provided with a driving device, the driving device is connected with the top end of the transmission shaft, the transmission shaft is provided with a connecting mechanism, and the workbench is provided with an auxiliary mechanism;
the connecting mechanism comprises a fixed pipe, a first one-way valve, a second one-way valve, an air pipe, two connecting components and two transmission components, the grinding disc is provided with air holes, the air pipe and the air holes are coaxially arranged with the transmission shaft, the axis of the fixed pipe is vertical to and intersected with the axis of the transmission shaft, the fixed tube is fixed on the top of the grinding disc, a gap is arranged between the fixed tube and the transmission shaft, a round hole is arranged at the middle end of the top of the fixed tube, the first one-way valve is arranged in the round hole, the bottom end of the air pipe is inserted into the air hole, the air pipe is hermetically and fixedly connected with the inner wall of the air hole, the fixed pipe is communicated with the air hole through an air pipe, the second one-way valve is arranged in the air pipe, the connecting assembly is circumferentially and uniformly arranged on the transmission shaft by taking the axis of the transmission shaft as a center, the transmission assemblies correspond to the connecting assemblies one by one, and the first one-way valve and the air pipe are located between the two transmission assemblies;
the connecting assembly comprises a sliding block, a guide rod and a first spring, the guide rod is parallel to the transmission shaft, two ends of the guide rod are fixedly connected with the transmission shaft respectively, the sliding block is sleeved on the guide rod, the top of the sliding block is connected with the top end of the guide rod through the first spring, and the sliding block is fixedly connected with the top of the grinding disc;
the transmission assembly comprises a connecting rod and a piston, one end of the piston is inserted into the fixed pipe, the piston is matched with the fixed pipe, the piston is connected with the inner wall of the fixed pipe in a sliding and sealing mode, the piston is hinged to the bottom end of the transmission shaft through the connecting rod, the connecting rod is arranged in an inclined mode, and the distance between one end, close to the transmission shaft, of the connecting rod and the axis of the transmission shaft is smaller than the distance between the other end of the connecting rod and the axis of the transmission shaft;
the auxiliary mechanism comprises a supporting disk, a moving rod, an auxiliary pipe, a moving pipe, two cylinders, two lifting assemblies and two adsorption assemblies, wherein the supporting disk, the moving disk, the auxiliary pipe and the moving pipe are coaxially arranged with a transmission shaft, the workbench is provided with a mounting hole, the transmission shaft penetrates through the mounting hole, the transmission shaft is sealed and fixedly connected with the inner wall of the mounting hole, the supporting disk is fixed at the top end of the transmission shaft, gaps are formed between the workbench and the grinding disk, the diameter of the grinding disk is larger than that of the supporting disk and smaller than the inner diameter of the auxiliary pipe, the bottom end of the auxiliary pipe is sealed and fixedly connected with the top of the workbench, the length of the auxiliary pipe is equal to that of the moving pipe and smaller than the distance between the supporting disk and the workbench and larger than the thickness of the supporting disk, the auxiliary pipe is positioned in the moving pipe, and the moving pipe is in sliding and sealing connection, the movable pipe is abutted against the top of the workbench, the air cylinder is circumferentially and uniformly fixed at the bottom of the workbench by taking the axis of the movable rod as a center, the air cylinder drives the movable rod to move along the axial direction of the transmission shaft, a drain hole is formed in the workbench and is communicated with the bottom end of the auxiliary pipe, the lifting assembly and the adsorption assembly are in one-to-one correspondence with the air cylinder, and the adsorption assembly is arranged on the supporting disc;
the lifting assembly comprises a transmission rod, a second spring, a fixed pulley, a connecting wire and a guide hole, the guide hole is formed in the workbench, the transmission rod is parallel to the moving rod and penetrates through the guide hole, the transmission rod is connected with the inner wall of the guide hole in a sliding mode, the top end of the transmission rod is fixed to the bottom end of the moving pipe, the fixed pulley is located between the transmission rod and the moving rod and fixed to the bottom of the workbench, one end of the connecting wire is fixedly connected with the bottom end of the transmission rod, the other end of the connecting wire bypasses the fixed pulley and is fixed to the moving rod, the two ends of the connecting wire are located below the fixed pulley, and the bottom of the workbench is connected with the bottom end of;
the adsorption component comprises a through hole, a magnet block, a limiting block, an adsorption disc and at least two third springs, the through hole is formed in the supporting disc, the magnet block, the limiting block, the adsorption disc and the third springs are arranged in the through hole, the axis of the adsorption disc is parallel to the transmission shaft, the adsorption disc is connected with the inner wall of the through hole in a sliding and sealing mode, a gap is formed between the bottom of the adsorption disc and the plane of the bottom of the supporting disc through the magnet block, the limiting block is fixed on the inner wall of the through hole and abutted to the top of the adsorption disc, the third springs are evenly arranged at the bottom of the adsorption disc through the axis of the adsorption disc in the circumferential direction of the center, the adsorption disc is connected with the inner wall of the through hole through the third springs, and the manufacturing material of the workbench is.
Preferably, the driving rod is coated with a lubricating oil in order to reduce the friction between the driving rod and the inner wall of the guide hole.
Preferably, in order to facilitate the installation of the transmission rod, both ends of the transmission rod are provided with chamfers.
Preferably, the connection line is a steel wire rope in order to improve the reliability of the connection line.
Preferably, in order to reduce a gap between the stationary pipe and the moving pipe, the inner wall of the stationary pipe is coated with a sealing grease.
Preferably, the top of the driving box is provided with a photovoltaic panel for energy conservation.
Preferably, in order to realize buffering and vibration reduction, the limiting block is made of rubber.
Preferably, in order to improve the friction force between the supporting disc and the silicon crystal, the top of the supporting disc is provided with anti-slip grains.
Preferably, in order to prolong the service life of the moving rod, the moving rod is provided with an anti-corrosion zinc coating.
Preferably, the support plate and the moving rod are integrally formed to improve the reliability of the connection between the support plate and the moving rod.
The silicon crystal grinding equipment with the function of removing the scraps has the advantages that the function of removing the scraps on the silicon crystal is realized through the connecting mechanism, compared with the existing connecting mechanism, the connecting mechanism can realize buffering and vibration reduction through the elastic action of the first spring, the impact force generated when the grinding disc is abutted against the silicon crystal is reduced, the damage of the silicon crystal is prevented, the practicability is higher, in addition, the short circuit caused by the fact that a grinder circuit is affected with damp due to the splashing of cooling water is also prevented through the auxiliary mechanism, compared with the existing auxiliary mechanism, the auxiliary mechanism can also realize the function of adsorbing the silicon crystal by reducing the air pressure in the through hole, the stability of the silicon crystal on the supporting disc is improved, the silicon crystal is prevented from slipping during grinding, and the practicability is higher.
Drawings
The invention is further illustrated with reference to the following figures and examples.
FIG. 1 is a schematic view showing the structure of a silicon crystal polishing apparatus having a function of removing debris according to the present invention;
FIG. 2 is a schematic view showing the structure of a connecting mechanism of a silicon crystal polishing apparatus having a function of removing debris according to the present invention;
FIG. 3 is an enlarged view of portion A of FIG. 2;
FIG. 4 is a schematic structural view of an auxiliary mechanism of a silicon crystal polishing apparatus having a function of removing debris according to the present invention;
FIG. 5 is an enlarged view of portion B of FIG. 4;
FIG. 6 is a schematic view showing the structure of a suction unit of a silicon crystal polishing apparatus having a function of removing debris according to the present invention;
in the figure: 1. the air conditioner comprises a workbench, 2. a driving box, 3. a transmission shaft, 4. a grinding disc, 5. a fixed pipe, 6. a first one-way valve, 7. a second one-way valve, 8. an air pipe, 9. a sliding block, 10. a guide rod, 11. a first spring, 12. a connecting rod, 13. a piston, 14. a supporting plate, 15. a moving rod, 16. an auxiliary pipe, 17. a moving pipe, 18. an air cylinder, 19. a transmission rod, 20. a second spring, 21. a fixed pulley, 22. a connecting wire, 23. a magnet block, 24. a limiting block, 25. an adsorption disc, 26. a third spring and 27. a photovoltaic panel.
Detailed Description
The present invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic views illustrating only the basic structure of the present invention in a schematic manner, and thus show only the constitution related to the present invention.
As shown in fig. 1-3, a silicon crystal grinding device with a function of removing debris comprises a workbench 1, a driving box 2, a transmission shaft 3 and a grinding disc 4, wherein the driving box 2 is arranged above the workbench 1 and is fixedly connected with the workbench 1, the transmission shaft 3 is vertically arranged between the driving box 2 and the workbench 1, the grinding disc 4 and the transmission shaft 3 are coaxially arranged and are positioned between the workbench 1 and the transmission shaft 3, gaps are arranged between the workbench 1 and the transmission shaft 3 and the grinding disc 4, a driving device is arranged on the driving box 2 and is connected with the top end of the transmission shaft 3, a connecting mechanism is arranged on the transmission shaft 3, and an auxiliary mechanism is arranged on the workbench 1;
the connecting mechanism comprises a fixed pipe 5, a first check valve 6, a second check valve 7, a gas pipe 8, two connecting assemblies and two transmission assemblies, wherein a gas hole is formed in the grinding disc 4, the gas pipe 8 and the gas hole are coaxially arranged with the transmission shaft 3, the axis of the fixed pipe 5 is perpendicular to and intersected with the axis of the transmission shaft 3, the fixed pipe 5 is fixed at the top of the grinding disc 4 and is provided with a gap between the fixed pipe 5 and the transmission shaft 3, the middle end of the top of the fixed pipe 5 is provided with a round hole, the first check valve 6 is installed in the round hole, the bottom end of the gas pipe 8 is inserted into the gas hole, the gas pipe 8 is sealed and fixedly connected with the inner wall of the gas hole, the fixed pipe 5 is communicated with the gas hole through the gas pipe 8, the second check valve 7 is installed in the gas pipe 8, the connecting assemblies are evenly arranged on the transmission shaft 3 by taking the axis of, the first one-way valve 6 and the air pipe 8 are positioned between the two transmission components;
the connecting assembly comprises a sliding block 9, a guide rod 10 and a first spring 11, the guide rod 10 is parallel to the transmission shaft 3, two ends of the guide rod 10 are fixedly connected with the transmission shaft 3 respectively, the sliding block 9 is sleeved on the guide rod 10, the top of the sliding block 9 is connected with the top end of the guide rod 10 through the first spring 11, and the sliding block 9 is fixedly connected with the top of the grinding disc 4;
the transmission assembly comprises a connecting rod 12 and a piston 13, one end of the piston 13 is inserted into the fixed pipe 5, the piston 13 is matched with the fixed pipe 5, the piston 13 is connected with the inner wall of the fixed pipe 5 in a sliding and sealing mode, the piston 13 is hinged to the bottom end of the transmission shaft 3 through the connecting rod 12, the connecting rod 12 is arranged in an inclined mode, and the distance between one end, close to the transmission shaft 3, of the connecting rod 12 and the axis of the transmission shaft 3 is smaller than the distance between the other end of the connecting rod 12 and the axis of the transmission shaft 3;
during the use of the equipment, the transmission shaft 3 is rotated by the driving device, the rotation of the transmission shaft 3 drives the grinding disc 4 to rotate by the guide rod 10 and the slide block 9, then the transmission shaft 3 is moved downwards by the driving device, namely, the grinding disc 4 can be moved downwards, when the bottom of the grinding disc 4 is abutted to a silicon crystal, the transmission shaft 3 is continuously moved downwards by one end distance, namely, the distance between the slide block 9 and the top end of the guide rod 10 is reduced, the first spring 11 is also used, meanwhile, the distance between the transmission shaft 3 and the fixed tube 5 can be reduced, the two pistons 13 are driven by the connecting rod 12 to be far away from and move, through the one-way characteristic of the second one-way valve 7, air can be only conveyed into the fixed tube 5 from a round hole, grinding can be realized through the rotation of the grinding disc 4 on the silicon crystal, after grinding is finished, the transmission shaft 3 stops rotating and moves, through the elastic action of first spring 11, make the increase of distance between slider 9 and the guide arm 10 top realize reseing, and make the increase of distance between transmission shaft 3 and the fixed pipe 5, make two pistons 13 be close to the removal simultaneously, at this moment, one-way characteristic through first check valve 6, make the air in the fixed pipe 5 can only follow trachea 8 and carry and discharge after the gas pocket and act on the area silicon crystal, the effect at the air current, can make remaining piece and silicon crystal separation on the silicon crystal, the function of piece on the clean silicon crystal has been realized, here, elastic action through the spring, can reduce the impact force that produces when abrasive disc 4 supports with the silicon crystal and lean on, buffering and damping have been realized, prevent that the silicon crystal from damaging.
As shown in fig. 4-6, the auxiliary mechanism includes a supporting plate 14, a moving rod 15, an auxiliary pipe 16, a moving pipe 17, two cylinders 18, two lifting assemblies and two adsorbing assemblies, the supporting plate 14, the moving plate, the auxiliary pipe 16 and the moving pipe 17 are all coaxially disposed with the transmission shaft 3, the workbench 1 is provided with a mounting hole, the transmission shaft 3 passes through the mounting hole, the transmission shaft 3 is hermetically and fixedly connected with the inner wall of the mounting hole, the supporting plate 14 is fixed at the top end of the transmission shaft 3, a gap is provided between the workbench 1 and the supporting plate 4, the diameter of the grinding plate 4 is larger than the diameter of the supporting plate 14 and smaller than the inner diameter of the auxiliary pipe 16, the bottom end of the auxiliary pipe 16 is hermetically and fixedly connected with the top of the workbench 1, the length of the auxiliary pipe 16 is equal to the length of the moving pipe 17 and smaller than the distance between the supporting plate 14 and the workbench 1 and larger than the thickness of the supporting plate, the auxiliary pipe 16 is positioned in the moving pipe 17, the moving pipe 17 is connected with the auxiliary pipe 16 in a sliding and sealing mode, the moving pipe 17 abuts against the top of the workbench 1, the air cylinder 18 is circumferentially and uniformly fixed at the bottom of the workbench 1 by taking the axis of the moving rod 15 as a center, the air cylinder 18 drives the moving rod 15 to move along the axial direction of the transmission shaft 3, a drain hole is formed in the workbench 1 and communicated with the bottom end of the auxiliary pipe 16, the lifting assembly and the adsorption assembly are in one-to-one correspondence with the air cylinder 18, and the adsorption assembly is arranged on the supporting plate 14;
the lifting assembly comprises a transmission rod 19, a second spring 20, a fixed pulley 21, a connecting wire 22 and a guide hole, the guide hole is formed in the workbench 1, the transmission rod 19 is parallel to the moving rod 15 and penetrates through the guide hole, the transmission rod 19 is in sliding connection with the inner wall of the guide hole, the top end of the transmission rod 19 is fixed to the bottom end of the moving pipe 17, the fixed pulley 21 is located between the transmission rod 19 and the moving rod 15 and fixed to the bottom of the workbench 1, one end of the connecting wire 22 is fixedly connected with the bottom end of the transmission rod 19, the other end of the connecting wire 22 bypasses the fixed pulley 21 and is fixed to the moving rod 15, two ends of the connecting wire 22 are located below the fixed pulley 21, and the bottom of the workbench 1 is connected with the bottom end of the transmission rod 19 through the;
the adsorption component comprises a through hole, a magnet block 23, a limiting block 24, an adsorption disc 25 and at least two third springs, the through hole is formed in the supporting disc 14, the magnet block 23, the limiting block 24, the adsorption disc 25 and the third springs are all arranged in the through hole, the axis of the adsorption disc 25 is parallel to the transmission shaft 3, the adsorption disc 25 slides and is in sealing connection with the inner wall of the through hole, the magnet block 23 is fixed to the bottom of the adsorption disc 25 and is provided with a gap between the plane of the bottom of the supporting disc 14, the limiting block 24 is fixed to the inner wall of the through hole and is abutted to the top of the adsorption disc 25, the third springs are evenly arranged at the bottom of the adsorption disc 25 by taking the axis of the adsorption disc 25 as the center circumferential direction, the adsorption disc 25 is connected with the inner wall of the through hole through third springs, and the manufacturing material of the workbench 1 is.
During grinding, silicon crystals are placed at the top of the supporting plate 14 and the through holes are blocked, then, the moving rod 15 drives the supporting plate 14 to move downwards through the air cylinder 18, the bottom of the supporting plate 14 is attached to the workbench 1, at the moment, the magnet block 23 drives the adsorption disc 25 to move downwards through the interaction force between the magnet block 23 and the iron workbench 1, the third spring is compressed, meanwhile, the air pressure between the adsorption disc 25 and the silicon crystals in the through holes can be reduced, the function of adsorbing the silicon crystals can be realized under the action of the air pressure, the stability of the silicon crystals placed on the supporting plate 14 is improved, in addition, the moving rod 15 descends, the transmission rod 19 is pulled to move upwards through the connecting wire 22, the second spring 20 is compressed, the top end of the fixed tube 5 is positioned in the fixed tube 5 through the upward movement of the transmission rod 19, during grinding, cooling water splashes to the inner walls of the fixed tube 5 and the moving tube 17, and flows out from the drain hole, that is, the short circuit caused by the grinding machine circuit being affected with damp can be prevented, here, the ability of blocking the cooling water can be improved by the upward movement of the moving pipe 17, after the grinding is finished and the grinding disc 4 is reset, the moving rod 15 drives the grinding disc 4 to reset through the air cylinder 18, at this time, the distance between the magnet block 23 and the worktable 1 is increased, the mutual attraction effect between the magnet block 23 and the worktable 1 is reduced to the elastic acting force of the third spring, that is, the adsorption disc 25 can move upward and abut against the limit block 24 under the elastic action of the third spring, at the same time, the through hole stops adsorbing the silicon crystal, the connecting wire 22 is loosened by the upward movement of the moving pipe 15, and the driving rod 19 drives the moving pipe 17 to reset through the elastic action of the second spring 20, that is, that the supporting plate 14 can be located above the moving pipe 17, facilitating removal of the silicon wafer from the support plate 14.
Preferably, the driving rod 19 is coated with a lubricating oil in order to reduce the friction between the driving rod 19 and the inner wall of the guide hole.
The lubricating oil has the function of reducing the friction force between the transmission rod 19 and the inner wall of the guide hole, and the moving fluency of the transmission rod 19 is improved.
Preferably, in order to facilitate the installation of the driving rod 19, both ends of the driving rod 19 are provided with chamfers.
The chamfer serves to reduce the diameter of the transmission rod 19 when passing through the guide hole, and has the effect of facilitating installation.
Preferably, the connection line 22 is a steel wire rope in order to improve the reliability of the connection line 22.
The steel wire rope has the characteristics of high strength, difficulty in breaking and the like, so that the reliability of the connecting wire 22 can be improved.
Preferably, in order to reduce the gap between the fixed pipe 5 and the moving pipe 17, the inner wall of the fixed pipe 5 is coated with a sealing grease.
The sealing grease has the function of reducing the gap between the fixed pipe 5 and the movable pipe 17, and the sealing performance is improved.
Preferably, the top of the driving box 2 is provided with a photovoltaic panel 27 for energy saving.
The photovoltaic panel 27 can absorb light rays to perform photovoltaic power generation, and energy conservation is realized.
Preferably, in order to achieve buffering and vibration reduction, the material of the limiting block 24 is rubber.
The rubber texture is comparatively soft, can reduce the impact force that produces when adsorbing dish 25 and stopper 24 support against, has realized buffering and damping.
Preferably, in order to improve the friction force between the supporting plate 14 and the silicon crystal, the top of the supporting plate 14 is provided with an anti-slip line.
The anti-slip pattern is used for improving the friction force between the supporting plate 14 and the silicon crystal and preventing the silicon wafer from slipping during grinding.
Preferably, in order to prolong the service life of the moving rod 15, the moving rod 15 is provided with an anti-corrosion zinc coating.
The function of anticorrosive galvanizing coat is to promote the rust-resistant ability of carriage release lever 15, has prolonged the life of carriage release lever 15.
Preferably, in order to improve the reliability of the connection between the support plate 14 and the moving rod 15, the support plate 14 and the moving rod 15 are integrally formed.
The integral structure has the characteristic of high strength, so that the reliability of connection between the support plate 14 and the moving rod 15 can be improved.
During the use of the device, the silicon crystal is placed on the top of the supporting disk 14 and the through hole is blocked, then, the moving rod 15 drives the supporting disk 14 to move downwards through the air cylinder 18, the bottom of the supporting disk 14 is attached to the workbench 1, at the moment, the magnet block 23 drives the adsorption disk 25 to move downwards through the interaction force between the magnet block 23 and the iron workbench 1, and the third spring is compressed, meanwhile, the air pressure between the adsorption disk 25 and the silicon crystal in the through hole can be reduced, the function of adsorbing the silicon crystal can be realized under the action of the air pressure, the stability of the silicon crystal placed on the supporting disk 14 is improved, moreover, the moving rod 15 descends to pull the transmission rod 19 to move upwards through the connecting wire 22, the second spring 20 is compressed, the upward movement of the transmission rod 19 enables the top end of the fixed tube 5 to be positioned in the fixed tube 5, and then, the transmission shaft 3 is rotated through the driving, the rotation of the transmission shaft 3 drives the grinding disc 4 to rotate through the guide rod 10 and the slide block 9, then, the transmission shaft 3 is driven to move downwards through the driving device, so that the grinding disc 4 can move downwards, when the bottom of the grinding disc 4 is abutted to the silicon crystal, the transmission shaft 3 is driven to move downwards for a certain distance, so that the distance between the slide block 9 and the top end of the guide rod 10 is reduced, the first spring 11 is driven, the distance between the transmission shaft 3 and the fixed pipe 5 is reduced, the two pistons 13 are driven to move away through the connecting rod 12, air can be conveyed into the fixed pipe 5 only from a circular hole through the one-way characteristic of the second one-way valve 7, grinding can be realized through the rotation of the grinding disc 4 on the silicon crystal, and during grinding, cooling water splashes to the inner walls of the fixed pipe 5 and the water drain holes of the movable pipe 17 and flows out from the water drain holes, so that the grinding machine circuit can be prevented from being splashed, here, the ability of blocking the cooling water can be improved by the upward movement of the moving pipe 17, after the grinding is finished, the transmission shaft 3 stops rotating and moves upward to realize the reset, the distance between the sliding block 9 and the top end of the guide rod 10 is increased to realize the reset by the elastic action of the first spring 11, the distance between the transmission shaft 3 and the fixed pipe 5 is increased, and simultaneously the two pistons 13 are close to and move, at the moment, the air in the fixed pipe 5 can only be conveyed to the air holes from the air pipe 8 and then discharged and acts on the silicon crystal through the one-way characteristic of the first one-way valve 6, under the action of the air flow, the residual scraps on the silicon crystal can be separated from the silicon crystal, the function of cleaning the scraps on the silicon crystal is realized, here, the impact force generated when the grinding disc 4 is abutted against the silicon crystal can be reduced through the elastic action of the spring, the buffering and the vibration reduction are realized, then, the moving rod 15 drives the grinding disc 4 to reset through the air cylinder 18, at this time, the distance between the magnet block 23 and the worktable 1 is increased, the mutual attraction between the magnet block 23 and the worktable 1 is reduced to the elastic force of the third spring, namely, the adsorption disc 25 is moved upwards and abutted against the limit block 24 under the elastic force of the third spring, the through hole stops adsorbing the silicon crystal, the connecting line 22 is loosened through the upward movement of the moving rod 15, and the transmission rod 19 drives the moving tube 17 to reset through the elastic force of the second spring 20, so that the supporting plate 14 is positioned above the moving tube 17, and the silicon crystal is conveniently removed from the supporting plate 14.
Compared with the prior art, this silicon crystal grinding device with clear away piece function has realized cleaing away remaining clastic function on the silicon crystal through coupling mechanism, compare with current coupling mechanism, this coupling mechanism is through the elastic action of first spring 11, can also realize buffering and damping, reduce the impact force that grinding disk 4 and silicon crystal produced when leaning on, prevent that the silicon crystal from damaging, the practicality is stronger, moreover, still realized preventing through complementary unit that the cooling water from splashing and leading to the grinder circuit to wet and take place the short circuit, compare with current complementary unit, this complementary unit is through reducing the atmospheric pressure in the through-hole, can also realize adsorbing the function of silicon crystal, improved the stability that the silicon crystal prevents on supporting disk 14, prevent to skid during the silicon crystal grinding, the practicality is stronger.
In light of the foregoing description of the preferred embodiment of the present invention, many modifications and variations will be apparent to those skilled in the art without departing from the spirit and scope of the invention. The technical scope of the present invention is not limited to the content of the specification, and must be determined according to the scope of the claims.
Claims (10)
1. The silicon crystal grinding equipment with the function of removing scraps comprises a workbench (1), a driving box (2), a transmission shaft (3) and a grinding disc (4), wherein the driving box (2) is arranged above the workbench (1) and is fixedly connected with the workbench (1), the transmission shaft (3) is vertically arranged between the driving box (2) and the workbench (1), the grinding disc (4) and the transmission shaft (3) are coaxially arranged and are positioned between the workbench (1) and the transmission shaft (3), gaps are formed between the workbench (1) and the transmission shaft (3) and the grinding disc (4), a driving device is arranged on the driving box (2) and is connected with the top end of the transmission shaft (3), the silicon crystal grinding equipment is characterized in that a connecting mechanism is arranged on the transmission shaft (3), and an auxiliary mechanism is arranged on the workbench (1);
the connecting mechanism comprises a fixed pipe (5), a first one-way valve (6), a second one-way valve (7), an air pipe (8), two connecting assemblies and two transmission assemblies, wherein an air hole is formed in the grinding disc (4), the air pipe (8) and the air hole are coaxially arranged with the transmission shaft (3), the axis of the fixed pipe (5) is perpendicular to and intersected with the axis of the transmission shaft (3), the fixed pipe (5) is fixed at the top of the grinding disc (4) and is provided with a gap with the transmission shaft (3), the middle end of the top of the fixed pipe (5) is provided with a round hole, the first one-way valve (6) is installed in the round hole, the bottom end of the air pipe (8) is inserted into the air hole, the air pipe (8) is sealed and fixedly connected with the inner wall of the air hole, the fixed pipe (5) is communicated with the air hole through the air pipe (8), the second one-way valve (7) is installed in, the connecting assemblies are uniformly arranged on the transmission shaft (3) in the circumferential direction by taking the axis of the transmission shaft (3) as the center, the transmission assemblies correspond to the connecting assemblies one by one, and the first check valve (6) and the air pipe (8) are positioned between the two transmission assemblies;
the connecting assembly comprises a sliding block (9), a guide rod (10) and a first spring (11), the guide rod (10) is parallel to the transmission shaft (3), two ends of the guide rod (10) are fixedly connected with the transmission shaft (3) respectively, the sliding block (9) is sleeved on the guide rod (10), the top of the sliding block (9) is connected with the top end of the guide rod (10) through the first spring (11), and the sliding block (9) is fixedly connected with the top of the grinding disc (4);
the transmission assembly comprises a connecting rod (12) and a piston (13), one end of the piston (13) is inserted into the fixed pipe (5), the piston (13) is matched with the fixed pipe (5), the piston (13) is connected with the inner wall of the fixed pipe (5) in a sliding and sealing mode, the piston (13) is hinged to the bottom end of the transmission shaft (3) through the connecting rod (12), the connecting rod (12) is arranged in an inclined mode, and the distance between one end, close to the transmission shaft (3), of the connecting rod (12) and the axis of the transmission shaft (3) is smaller than the distance between the other end of the connecting rod (12) and the axis of the transmission shaft (3);
the auxiliary mechanism comprises a supporting disk (14), a moving rod (15), an auxiliary pipe (16), a moving pipe (17), two cylinders (18), two lifting assemblies and two adsorption assemblies, wherein the supporting disk (14), the moving disk, the auxiliary pipe (16) and the moving pipe (17) are coaxially arranged with a transmission shaft (3), a mounting hole is formed in the workbench (1), the transmission shaft (3) penetrates through the mounting hole, the transmission shaft (3) is sealed and fixedly connected with the inner wall of the mounting hole, the supporting disk (14) is fixed at the top end of the transmission shaft (3), gaps are formed between the workbench (1) and the grinding disk (4) and the supporting disk (14), the diameter of the grinding disk (4) is larger than that of the supporting disk (14) and smaller than that of the auxiliary pipe (16), the bottom end of the auxiliary pipe (16) is sealed and fixedly connected with the top of the workbench (1), the length of the auxiliary pipe (16) and the length of the moving pipe (17) are equal and smaller than the distance between the supporting plate (14) and the workbench (1) and larger than the thickness of the supporting plate (14), the auxiliary pipe (16) is positioned in the moving pipe (17), the moving pipe (17) is connected with the auxiliary pipe (16) in a sliding and sealing way, the moving pipe (17) is abutted against the top of the workbench (1), the air cylinder (18) is circumferentially and uniformly fixed at the bottom of the workbench (1) by taking the axis of the moving rod (15) as the center, the air cylinder (18) drives the movable rod (15) to move along the axial direction of the transmission shaft (3), a drain hole is arranged on the workbench (1), the drain hole is communicated with the bottom end of the auxiliary pipe (16), the lifting assemblies and the adsorption assemblies are in one-to-one correspondence with the air cylinders (18), and the adsorption assemblies are arranged on the supporting plate (14);
the lifting component comprises a transmission rod (19), a second spring (20), a fixed pulley (21), a connecting wire (22) and a guide hole, the guide hole is arranged on the workbench (1), the transmission rod (19) is parallel to the moving rod (15) and passes through the guide hole, the transmission rod (19) is connected with the inner wall of the guide hole in a sliding way, the top end of the transmission rod (19) is fixed at the bottom end of the moving pipe (17), the fixed pulley (21) is positioned between the transmission rod (19) and the moving rod (15) and is fixed at the bottom of the workbench (1), one end of the connecting wire (22) is fixedly connected with the bottom end of the transmission rod (19), the other end of the connecting line (22) is fixed on the moving rod (15) by passing through the fixed pulley (21), the two ends of the connecting line (22) are located below the fixed pulley (21), and the bottom of the workbench (1) is connected with the bottom end of the transmission rod (19) through a second spring (20);
the adsorption assembly comprises a through hole, a magnet block (23), a limiting block (24), an adsorption disc (25) and at least two third springs, the through hole is formed in the supporting disc (14), the magnet block (23), the limiting block (24), the adsorption disc (25) and the third springs are all arranged in the through hole, the axis of the adsorption disc (25) is parallel to the transmission shaft (3), the adsorption disc (25) is connected with the inner wall of the through hole in a sliding and sealing mode, the magnet block (23) is fixed to the bottom of the adsorption disc (25) and is provided with a gap between the planes of the bottoms of the supporting disc (14), the limiting block (24) is fixed to the inner wall of the through hole and is abutted against the top of the adsorption disc (25), the third springs are evenly arranged at the bottom of the adsorption disc (25) by taking the axis of the adsorption disc (25) as the central circumferential direction, and the adsorption disc (25) is connected with the inner wall of the through hole through the third, the workbench (1) is made of iron.
2. Silicon crystal grinding apparatus with debris removal capability as defined in claim 1 wherein the drive link (19) is coated with a lubricating oil.
3. Silicon crystal grinding apparatus with debris removal capability as defined in claim 1 wherein the drive link (19) is chamfered at both ends.
4. Silicon crystal grinding apparatus with debris removal capability as defined in claim 1 wherein said connecting wire (22) is a steel wire rope.
5. Silicon crystal grinding apparatus with a function of removing debris as defined in claim 1 wherein the inner wall of the stationary tube (5) is coated with a sealing grease.
6. Silicon crystal grinding apparatus with debris removal capability as defined in claim 1 wherein the top of the drive box (2) is provided with a photovoltaic panel (27).
7. Silicon crystal grinding equipment with the function of removing debris as defined in claim 1 wherein the stopper (24) is made of rubber.
8. Silicon crystal grinding apparatus with debris removal capability as defined in claim 1 wherein the top of the support plate (14) is provided with anti-slip texturing.
9. Silicon crystal grinding apparatus with debris removal capability as defined in claim 1 wherein the travel bar (15) is provided with an anti-corrosion zinc coating.
10. Silicon crystal grinding apparatus with debris removal capability as defined in claim 1 wherein the support plate (14) is integral with the movable bar (15).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011418572.3A CN112757151A (en) | 2020-12-07 | 2020-12-07 | Silicon crystal grinding equipment with function of removing fragments |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011418572.3A CN112757151A (en) | 2020-12-07 | 2020-12-07 | Silicon crystal grinding equipment with function of removing fragments |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN112757151A true CN112757151A (en) | 2021-05-07 |
Family
ID=75693436
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011418572.3A Withdrawn CN112757151A (en) | 2020-12-07 | 2020-12-07 | Silicon crystal grinding equipment with function of removing fragments |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112757151A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113334244A (en) * | 2021-05-18 | 2021-09-03 | 长江存储科技有限责任公司 | Bearing device and grinding equipment |
| CN113369779A (en) * | 2021-07-04 | 2021-09-10 | 江苏鸿迅机车有限公司 | Welding tool for assembling electric tricycle |
| CN113753392A (en) * | 2021-08-25 | 2021-12-07 | 广州市顺通达物流供应链有限公司 | Stable form transportation equipment that keeps fresh |
| CN114147563A (en) * | 2021-12-15 | 2022-03-08 | 九江市庐山新华电子有限公司 | Efficient grinding machine for producing wafers |
-
2020
- 2020-12-07 CN CN202011418572.3A patent/CN112757151A/en not_active Withdrawn
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113334244A (en) * | 2021-05-18 | 2021-09-03 | 长江存储科技有限责任公司 | Bearing device and grinding equipment |
| CN113369779A (en) * | 2021-07-04 | 2021-09-10 | 江苏鸿迅机车有限公司 | Welding tool for assembling electric tricycle |
| CN113369779B (en) * | 2021-07-04 | 2021-12-21 | 江苏鸿迅机车有限公司 | Welding tool for assembling electric tricycle |
| CN113753392A (en) * | 2021-08-25 | 2021-12-07 | 广州市顺通达物流供应链有限公司 | Stable form transportation equipment that keeps fresh |
| CN114147563A (en) * | 2021-12-15 | 2022-03-08 | 九江市庐山新华电子有限公司 | Efficient grinding machine for producing wafers |
| CN114147563B (en) * | 2021-12-15 | 2022-11-29 | 九江市庐山新华电子有限公司 | High-efficient machine that grinds of production wafer |
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Application publication date: 20210507 |
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