CN112259438B - Input window and preparation method and application thereof - Google Patents
Input window and preparation method and application thereof Download PDFInfo
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- CN112259438B CN112259438B CN202011136106.6A CN202011136106A CN112259438B CN 112259438 B CN112259438 B CN 112259438B CN 202011136106 A CN202011136106 A CN 202011136106A CN 112259438 B CN112259438 B CN 112259438B
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- 238000002360 preparation method Methods 0.000 title claims abstract description 22
- 239000011521 glass Substances 0.000 claims abstract description 144
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 35
- 239000000835 fiber Substances 0.000 claims description 78
- 238000005498 polishing Methods 0.000 claims description 63
- 238000000034 method Methods 0.000 claims description 26
- 238000012681 fiber drawing Methods 0.000 claims description 19
- 238000004519 manufacturing process Methods 0.000 claims description 16
- 230000008018 melting Effects 0.000 claims description 15
- 238000002844 melting Methods 0.000 claims description 15
- 238000003825 pressing Methods 0.000 claims description 15
- 239000002131 composite material Substances 0.000 claims description 14
- 238000005520 cutting process Methods 0.000 claims description 12
- 229910052594 sapphire Inorganic materials 0.000 claims description 11
- 239000010980 sapphire Substances 0.000 claims description 11
- 239000007788 liquid Substances 0.000 claims description 10
- 239000011148 porous material Substances 0.000 claims description 9
- 239000012535 impurity Substances 0.000 claims description 8
- 229920002635 polyurethane Polymers 0.000 claims description 8
- 239000004814 polyurethane Substances 0.000 claims description 8
- 235000012431 wafers Nutrition 0.000 claims description 7
- 238000010521 absorption reaction Methods 0.000 description 18
- 239000000725 suspension Substances 0.000 description 15
- 239000002245 particle Substances 0.000 description 13
- 229920006335 epoxy glue Polymers 0.000 description 10
- 230000003287 optical effect Effects 0.000 description 10
- 239000000463 material Substances 0.000 description 8
- 239000004925 Acrylic resin Substances 0.000 description 6
- 229920000178 Acrylic resin Polymers 0.000 description 6
- 238000007517 polishing process Methods 0.000 description 6
- 238000002834 transmittance Methods 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 4
- 238000001514 detection method Methods 0.000 description 4
- 238000007747 plating Methods 0.000 description 4
- 230000005855 radiation Effects 0.000 description 4
- 229910010413 TiO 2 Inorganic materials 0.000 description 3
- 238000000231 atomic layer deposition Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 230000031700 light absorption Effects 0.000 description 2
- 238000003801 milling Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 229920001296 polysiloxane Polymers 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000000825 ultraviolet detection Methods 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- 238000003491 array Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000005670 electromagnetic radiation Effects 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 239000002241 glass-ceramic Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J43/00—Secondary-emission tubes; Electron-multiplier tubes
- H01J43/04—Electron multipliers
- H01J43/28—Vessels, e.g. wall of the tube; Windows; Screens; Suppressing undesired discharges or currents
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J43/00—Secondary-emission tubes; Electron-multiplier tubes
- H01J43/04—Electron multipliers
- H01J43/06—Electrode arrangements
- H01J43/18—Electrode arrangements using essentially more than one dynode
- H01J43/24—Dynodes having potential gradient along their surfaces
- H01J43/246—Microchannel plates [MCP]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Glass Compositions (AREA)
Abstract
The invention relates to an input window and a preparation method and application thereof, wherein the input window comprises a first glass sheet, a channel sheet and a second glass sheet which are sequentially connected; a groove is formed in the first glass sheet; the channel plate comprises a flat plate which is embedded in the groove, a regular micro-channel array is arranged on the flat plate, and the forming direction of the micro-channel array is perpendicular to the plane of the channel plate. The invention adopts the channel structure to replace quartz glass, so that the weight is light; the aperture of the channel can be in the micron level or millimeter level, and miniaturization can be realized.
Description
Technical Field
The invention relates to the technical field of ultraviolet detection, in particular to an input window for an ultraviolet detector, and a preparation method and application thereof.
Background
Compared with infrared detection, the ultraviolet band detection system is not easy to be interfered by long wave electromagnetic waves during working, can work in a strong electromagnetic radiation environment and has good concealment. Therefore, the ultraviolet detection technology has very wide application in military and civil fields such as missile early warning and tracking, ultraviolet communication, astronomical observation, power system inspection and the like. The ultraviolet radiation has a shorter wavelength, and when the ultraviolet radiation irradiates on the surface of an object, the ultraviolet radiation is easily absorbed by the object, so that the ultraviolet radiation has weaker penetrating power than visible light and infrared light, and the difficulty is brought to the manufacture of an input window of an ultraviolet detector.
The photomultiplier is a typical photoelectric vacuum ultraviolet detector, the input window of the photomultiplier is usually made of quartz glass, as shown in fig. 1, the quartz glass is processed into a wafer with a step-shaped side surface, an absorption layer is coated on the step surface 5, ultraviolet light in a certain angle range is allowed to pass through, light enters the input window from the incidence surface 4, light 14 with a larger incidence angle (the included angle between the incident light and the normal 15 of the incidence surface) is absorbed by the absorption layer on the step surface 5, and light 13 with a smaller incidence angle passes out from the emergent surface 6. Ultraviolet light passes through quartz glass and then reaches a photocathode to be converted into electrons, and the electrons are multiplied and then read out by a detector, so that the ultraviolet light is detected. This type of input window is typically used in conditions requiring a large field of view. However, if detection of a target azimuth in a small range is to be achieved, the angle of view needs to be controlled, and only target signals in the small range are received, so that noise caused by light entering outside the field of view is prevented. In the quartz glass input window structure, the absorption layer can only be coated on the periphery of the input window, so that the area of the absorption layer needs to be prolonged to reduce the field of view, and the volume is overlarge.
Disclosure of Invention
In view of the above, the present invention aims to provide an input window for an ultraviolet detector, a preparation method and an application thereof, which can change the angle of view according to the needs, realize more accurate orientation and positioning detection for the ultraviolet signal, and have the advantages of light and miniaturization.
The aim and the technical problems of the invention are realized by adopting the following technical proposal. The invention provides an input window, which comprises a first glass sheet, a channel sheet and a second glass sheet which are sequentially connected; a groove is formed in the first glass sheet; the channel plate comprises a flat plate which is embedded in the groove, a regular micro-channel array is arranged on the flat plate, and the forming direction of the micro-channel array is perpendicular to the plane of the channel plate.
Preferably, in the foregoing input window, the groove port of the first glass sheet is fixedly connected with the second glass sheet.
Preferably, in the foregoing input window, the recess port and the second glass sheet are glued by acrylic resin, silicone gel or optical epoxy glue.
Preferably, in the foregoing input window, the angle of view of the input windowWhere d is the aperture of the microchannel and t is the thickness of the channel sheet.
Preferably, in the foregoing input window, the first glass sheet and the second glass sheet are flat sheets.
Preferably, in the input window, the first glass sheet and the second glass sheet are wafers with equal outer diameters, and the thickness of the second glass sheet is smaller than that of the first glass sheet.
Preferably, in the foregoing input window, the inner walls of the micro-channel array are all provided with an ultraviolet absorbing layer.
The aim of the invention and the technical problems can be achieved by adopting the following technical proposal. The preparation method of the input window provided by the invention comprises the following steps:
a, preparing a first glass sheet: engraving the first glass into a round glass sheet with a groove, and then polishing the plane, the groove and the port of the glass sheet respectively;
b, preparation of a channel sheet: processing the third glass into a cylindrical hollow tube and a glass rod with a regular triangle cross section, and respectively performing fiber drawing to obtain hollow tube single fibers and triangle fibers; arranging the hollow tube single fibers into a composite fiber rod in a combined way, filling the gaps among the hollow tube fibers with triangular fibers, and drawing to obtain second fibers; cutting off the second fiber to a fixed length, and arranging the second fiber into a hexagonal prism blank plate; or directly cutting off the hollow tube single fibers to a fixed length, arranging the hollow tube single fibers into a hexagonal prism blank plate, and filling the gaps among the hollow tube single fibers with triangular fibers; carrying out melt pressing on the hexagonal prism blank plate; cutting the blank plate after being melted and pressed into thin slices, engraving and polishing to the external dimension of the required channel slice; removing impurities introduced into the channels to form a micro-channel array with regular arrangement;
c, preparing a second glass sheet: engraving the second glass into a circular sheet; then polishing the round piece;
d, matching: embedding the channel sheet obtained in the step b into the groove of the first glass sheet obtained in the step a, and bonding the port of the groove with the second glass sheet.
Preferably, in the aforementioned method for manufacturing an input window, in step a, the polishing specifically includes: the plane of the glass sheet is polished with a polishing liquid, and then the glass sheet is rotatably connected to a shaft, and the grooves and the ports are polished with polyurethane.
Preferably, in the aforementioned method for manufacturing an input window, in step a, the polishing liquid used in the polishing is CeO 2 Or Fe (Fe) 2 O 3 The concentration of the suspension is 200-400 g/L, and the particle size is less than or equal to 1 mu m.
Preferably, in the method for manufacturing an input window, in the step a, the groove and the center of the circular glass sheet are located on the same straight line.
Preferably, in the aforementioned method for manufacturing an input window, in steps a and c, the first glass is selected from one of quartz glass, ZWB3 transparent glass and sapphire glass; preferably JGS1 quartz glass.
Preferably, in the above method for manufacturing an input window, in the step b, the third glass contains Fe 3+ 、Ti 4+ And Ce (Ce) 4+ At least one of them.
Preferably, in the preparation method of the input window, in the step b, when the aperture of the micro-channel array is 0.25mm or more, the fiber drawing is a single fiber drawing; when the aperture of the micro-channel array is below 0.25mm, the fiber drawing comprises two times of drawing of single fiber and composite fiber; the temperature of the fiber drawing is 70-150 ℃ higher than the softening point of the glass tube.
Preferably, in the preparation method of the input window, in the step b, the melting temperature is 0-10 ℃ higher than the glass softening point.
Preferably, in the method for manufacturing an input window, in the step b, the diameter of the channel plate of the refined carving is 0.01-0.02 mm smaller than the inner diameter of the groove of the first glass plate, and the thickness is 0.15-0.30 mm greater than the depth of the groove; the thickness of the polished channel plate is 0.1-0.2 mm greater than the depth of the groove.
Preferably, in the aforementioned method for manufacturing an input window, in the step b, the channel sheet contains a regularly arranged micro-scale or millimeter-scale circular micro-channel array.
Preferably, in the preparation method of the input window, in the step b, the aperture of the circular micro-channel array is 10-2000 μm.
Preferably, in the aforementioned method for preparing an input window, after step b and before step c, the method further comprises: an ultraviolet light absorption layer is plated on the inner wall of the channel by using an electron beam vacuum evaporation or atomic layer deposition method.
Preferably, in the method for manufacturing an input window, the material of the absorbing layer is Fe 2 O 3 、TiO 2 Or CeO 2 The thickness of the absorption layer is 300-1000 nm.
Preferably, in the method for manufacturing an input window, in the step c, the diameter of the circular sheet is equal to the outer diameter of the first glass sheet, and the thickness is smaller than the first glass sheet.
Preferably, in the method for manufacturing an input window, in the step c, the polishing solution used for polishing is CeO 2 Or Fe (Fe) 2 O 3 A suspension.
Preferably, in the method for manufacturing an input window, in the step d, the bonding is performed by using acrylic resin, silicone gel or optical epoxy glue.
The aim of the invention and the technical problems can be achieved by adopting the following technical proposal. According to the ultraviolet detector provided by the invention, the ultraviolet detector comprises the input window.
The aim of the invention and the technical problems can be achieved by adopting the following technical proposal. According to the invention, an ultraviolet imager comprises the ultraviolet detector.
The aim of the invention and the technical problems can be achieved by adopting the following technical proposal. According to the invention, an ultraviolet telescope comprises the ultraviolet detector.
By means of the technical scheme, the input window and the preparation method and application thereof provided by the invention have at least the following advantages:
1. the specific view field can be detected, and the noise is low. The traditional ultraviolet input window is coated with an absorption layer at the step, is limited by the size of the device, and has a smaller adjustable range for the light admittance angle. The invention adopts the channel structure, the inner wall of the channel array can absorb light rays with large angles, the admission angle can be adjusted by changing the aperture and the thickness of the channel, and the noise caused by the light rays outside the field of view is avoided.
2. Light and small-sized. The invention uses the channel structure to replace quartz glass, and has light weight; the aperture of the channel can be in the micron level or millimeter level, and miniaturization can be realized.
3. Meets the packaging and subsequent processing requirements. The channel layer is coated by two layers of quartz glass sheets, so that the channel layer can be protected, the input window can bear mechanical impact in application, and the second glass sheet can meet the requirement of subsequent photocathode plating.
Drawings
FIG. 1 is a schematic cross-sectional view of a conventional ultraviolet detector input window quartz glass; in the figure, 4-incidence plane; 5-step surface coated with an absorbing layer; 6-an exit face; 13-light rays with smaller angles of incidence; 14-light rays with larger angles of incidence; 15-normal to the incident surface;
FIG. 2 is a schematic diagram of an input window according to the present invention; in the figure, 1-a first glass sheet, 2-a channel sheet, 3 is a second glass sheet;
FIG. 3 is a second schematic diagram of the input window of the present invention; in the figure, 7-groove, 8-port, 9-microchannel array, 10-plane;
FIG. 4 is a schematic illustration of the filling of circular inter-fiber voids with triangular fibers in accordance with the present invention; in the figure, 11-triangle fibers, 12-circle fibers.
Detailed Description
In order to further describe the technical means and effects adopted by the invention to achieve the preset aim, the following is a detailed description of an input window, a preparation method thereof, a specific implementation mode, characteristics and effects thereof according to the invention, and the preparation method, the specific implementation mode, the characteristics and the effects thereof with reference to the attached drawings and the preferred embodiment. In the following description, different "an embodiment" or "an embodiment" do not necessarily refer to the same embodiment. Furthermore, the particular features or characteristics of one or more embodiments may be combined in any suitable manner.
As shown in fig. 2 to 3, the present invention provides an input window, which includes a first glass sheet 1, a channel sheet 2 and a second glass sheet 3 connected in sequence; a groove 7 is formed in the first glass sheet 1; the channel plate 2 comprises a flat plate which is embedded in the groove 7, a regular micro-channel array 9 is arranged on the flat plate, and the forming direction of the micro-channel array 9 is perpendicular to the plane 10 of the channel plate 2. The port 8 of the groove 7 of the first glass sheet is fixedly connected with the second glass sheet. In particular, the port 8 of the groove 7 and the second glass sheet are adhered by acrylic resin, organic silicon gel or optical epoxy glue, and preferably optical epoxy glue is adopted, because the optical epoxy glue has better environmental adaptability.
In particular, the angle of view of the input windowWhere d is the aperture of the micro-channel array and t is the thickness of the channel plate.
In specific implementation, the first glass sheet and the second glass sheet are arranged as wafers, so that light rays in all directions in a view field can enter. Specifically, the first glass sheet and the second glass sheet are wafers with the same outer diameter, and the thickness of the second glass sheet is smaller than that of the first glass sheet, so that the requirement of subsequent photocathode plating is met, and the loss of light is reduced.
In the implementation, the inner walls of the micro-channel arrays may also be provided with ultraviolet absorption layers, so as to improve the absorption rate of the inner walls to stray light.
The invention also provides a preparation method of the input window, which comprises the following steps:
a, preparing a first glass sheet: the first glass can be selected from JGS1 quartz glass, ZWB3 transparent glass or sapphire glass with high ultraviolet transmittance, preferably JGS1 quartz glass with high ultraviolet transmittance and easy processing, and ZWB3 ultraviolet transmittance is slightly low, so that sapphire is not easy to process; processing the first glass into a circular glass sheet with a groove by using an engraving machine, wherein the groove and the center of the circular glass sheet are positioned on the same straight line; polishing the plane of the glass sheet by using a polishing machine, wherein the polishing liquid is CeO 2 Or Fe (Fe) 2 O 3 The concentration of the suspension is 200-400 g/L, and the particle size of the suspension is less than or equal to 1 mu m. The glass sheet is fixed on a single-shaft machine, and the grooves and the ports are polished by polyurethane respectively.
b, preparation of a channel sheet: the micro-channel array is obtained by adopting a drawing hollow glass fiber remelting method, and the micro-channel array with high precision and smooth inner wall can be formed by adopting the method. According to the requirements of the angle of viewThe relation of the pore size and thickness of the channel plate is selected. The channel sheet material is a third glass which contains Fe 3+ 、Ti 4+ And Ce (Ce) 4+ At least one of the glass-ceramic has strong absorption to ultraviolet rays. And processing the third glass into a cylindrical hollow tube and a glass rod with a regular triangle cross section, and respectively performing fiber drawing to obtain hollow tube single fibers and triangle fibers. The hollow tube single fiber is used for providing a channel, and because the round fibers cannot realize seamless arrangement, triangular-like pores exist among every three fibers, namelyThe role of the angular fibers is to fill the triangular voids between the hollow tube filaments. If the aperture of the finally prepared micro-channel array is below 0.25mm, the micro-channel array needs to be drawn twice through single fiber and composite fiber. The hollow tube single fibers are arranged into a composite fiber rod, triangular fibers are inserted into gaps to fill the gaps (fig. 4), and second fibers are obtained. The second fibers are cut off in a fixed length and arranged into hexagonal prism blank plates. If the aperture of the finally prepared micro-channel array is 0.25mm or more, only one single fiber drawing is needed, the hollow pipe single fiber is cut off at a fixed length and directly arranged into a hexagonal prism blank plate, and triangular fibers are inserted into gaps of the hollow pipe single fiber for pore filling. The fiber drawing temperature is 70-150 ℃ higher than the softening point of the glass tube. The hexagonal prism blank plate is put into a melting and pressing mold for high-temperature melting and pressing, and the melting and pressing temperature is 0-10 ℃ higher than the softening point of glass, so that the channel walls can be softened and mutually melted and can keep round. Cutting the blank plate after the melting and pressing into thin slices, engraving the thin slices into the external dimension of a required channel slice, wherein the diameter of the thin slices is 0.01-0.02 mm smaller than the inner diameter of a groove of the first glass slice so as to be conveniently embedded into the groove, the thickness of the thin slices is 0.15-0.30 mm higher than the depth of the groove, and polishing the thin slices to be 0.1-0.2 mm higher than the depth of the groove so as to ensure that the thin slices can be completely attached to the second glass slice. Impurities (such as polishing powder particles or glass scraps generated in polishing) introduced into the channels in the polishing process are cleaned to form a channel array with regular arrangement, and the aperture of the channel array is 10-2000 mu m. Or plating ultraviolet light absorption layer on the inner wall of the channel by electron beam vacuum evaporation or atomic layer deposition, wherein the absorption layer is made of Fe 2 O 3 、TiO 2 、CeO 2 And the like, the absorption rate of the inner wall to stray light can be improved by more than 5%. The material of the absorption layer is selected according to the wave band of the ultraviolet light to be detected, the wavelength of the ultraviolet light is 220-280 nm, and CeO is preferred 2 The absorption rate of the inner wall to stray light can be improved by 6 to 8 percent; the wavelength of the ultraviolet light is between 280 and 350nm, preferably TiO 2 The absorption rate of the inner wall to stray light can be improved by 6 to 9 percent; the wavelength of the ultraviolet light is between 350 and 400nm, preferably Fe 2 O 3 The absorption rate of the inner wall to stray light can be improved by 7-10%; the absorbable band can also be enlarged by means of combined doping. Absorption ofThe thickness of the layer is 300-1000 nm, partial ultraviolet light can penetrate due to the fact that the thickness is too thin, the aperture can be influenced due to the fact that the thickness is too thick, and cracks are prone to occurring in the preparation process. For ultraviolet light incident at angles in the range of angles of view, passing through the channel to the second glass sheet, ultraviolet light greater than the angle of view will impinge on the channel walls and be absorbed by the channel walls.
c, preparing a second glass sheet: the JGS1 quartz glass, the ZWB3 transparent glass or the sapphire glass is preferably selected from the JGS1 quartz glass, the ultraviolet transmittance is high, the processing is easy, the ZWB3 ultraviolet transmittance is slightly low, and the sapphire is not easy to process; processing the second glass into a round glass sheet by using an engraving machine, wherein the diameter of the round glass sheet is equal to the outer diameter of the first glass sheet, and the thickness of the round glass sheet is smaller than that of the first glass sheet; polishing with CeO polishing liquid 2 Or Fe (Fe) 2 O 3 A suspension.
d, matching: the channel sheet is embedded in a groove of the first glass sheet, and the port of the groove is bonded with the second quartz glass sheet by acrylic resin, organic silicon gel or optical epoxy glue, preferably optical epoxy glue, because the optical epoxy glue has better environmental adaptability.
The invention also provides an ultraviolet detector, which comprises the input window.
The invention also provides an ultraviolet imager which comprises the ultraviolet detector.
The invention also provides an ultraviolet telescope which comprises the ultraviolet detector.
Example 1
The embodiment provides a preparation method of an input window, which comprises the following steps:
a, processing JGS1 quartz glass into a circular lens with a groove by using an engraving and milling machine, wherein the outer diameter is 40.00mm, the thickness is 3.00mm, the inner diameter of the groove is 32.00mm, and the depth of the groove is 0.80mm; polishing the plane of the lens by using a polishing machine, wherein the polishing solution is CeO 2 The suspension has a concentration of 200g/L and a particle size of 1 μm or less. And fixing the glass sheet on a single-shaft machine, and polishing the groove and the port by polyurethane to obtain a first quartz glass sheet.
The b channel plate pore size was designed to be 100 μm. The third glass used as the material of the channel sheet contains Fe 3+ The softening point of the glass was 587 ℃. And processing the third glass into a cylindrical hollow tube and a glass rod with a regular triangle cross section, and respectively performing fiber drawing. Firstly, carrying out single fiber drawing, wherein the drawing temperature is 710 ℃, and after drawing the hollow pipe single fiber with a round section, arranging the hollow pipe single fiber into a composite fiber rod with a regular hexagon section, inserting the triangle fiber drawn by the triangle rod into a gap of the single fiber of the composite fiber rod, and then carrying out composite fiber drawing, wherein the drawing temperature of the composite fiber is 700 ℃, so as to obtain a second fiber. The second fibers were cut (cut length: 100 mm) and arranged into hexagonal prism blanks. The hexagonal prism blank plate is put into a melting and pressing die to be melted and pressed at a high temperature of 587 ℃. Cutting the blank plate after the melting and pressing into a sheet with the thickness of 1.01mm, engraving into a circular sheet with the diameter of 31.98mm, and polishing to the thickness of 1.00mm. And cleaning impurities introduced into the channels in the polishing process to form a channel array with regular arrangement.
c, processing a round JGS1 quartz glass sheet by using an engraving machine, wherein the diameter is 40.00mm, and the thickness is 1.00mm. Polishing with a polishing machine, wherein the polishing liquid is CeO 2 The suspension has a concentration of 200g/L and a particle size of 1 μm or less. A second quartz glass plate was obtained.
d embedding the channel sheet into a groove of the first quartz glass sheet obtained in the step a, and bonding the port of the groove and the second quartz glass sheet obtained in the step c by using acrylic resin through ultraviolet curing.
In this embodiment, the aperture of the prepared channel plate of the input window is 100 μm, the thickness is 1.00mm, the effective light in the field of view is screened out by the channel, and the stray light beyond the field of view is absorbed by the channel wall. The input window prepared by the method has an angle of view of 11 degrees. The input window may be used in an ultraviolet imager or an ultraviolet detector of an ultraviolet telescope.
Example 2
The embodiment provides a preparation method of an input window, which comprises the following steps:
processing sapphire glass into a circular lens with a groove by using a cnc engraving machine, wherein the outer diameter is 60.00mm, the thickness is 7.00mm, and the sapphire glass is arranged in the grooveThe diameter was 49.00mm and the groove depth was 4.90mm. Polishing the plane of the lens by using a polishing machine, wherein the polishing solution is Fe 2 O 3 The suspension has a concentration of 400g/L and a particle size of 1 μm or less. The glass sheet was fixed to a single axis machine and the grooves and ports were polished with polyurethane.
The b channel plate pore size was designed to be 1000 μm. The third glass used as the material of the channel sheet contains Ce 4+ The softening point of the glass was 545 ℃. The third glass was processed into a cylindrical hollow tube and a glass rod having a regular triangle-shaped cross section, which were drawn at 672 ℃ into hollow tube filaments and triangular fibers, respectively, the hollow tube filaments had an inner diameter of 1000 μm, the hollow tube filaments were cut (cut length was 70 mm), arranged into a hexagonal prism blank, and the triangular fibers were inserted into slits of the hollow tube filaments in the hexagonal prism blank. The hexagonal prism blank plate is put into a melting and pressing die to be melted and pressed at a high temperature of 545 ℃. Cutting the blank plate after being melted and pressed into a thin sheet with the thickness of 5.05mm, engraving into a wafer with the diameter of 48.99mm, and polishing to the thickness of 5.00 mm. And cleaning impurities introduced into the channels in the polishing process to form a channel array with regular arrangement. CeO plating on inner wall of channel by electron beam evaporation 2 The film layer (the wavelength of the ultraviolet light to be detected is 220-280 nm) can improve the absorption rate of the inner wall to stray light by 6-8%.
And c, processing the sapphire glass sheet by using an engraving machine, wherein the diameter is 60.00mm, and the thickness is 0.50mm. Polishing with a polishing machine, wherein the polishing liquid is Fe 2 O 3 The suspension has a concentration of 400g/L and a particle size of 1 μm or less. A second quartz glass plate was obtained.
d, embedding the channel sheet into the groove of the first sapphire glass sheet obtained in the step a, and bonding the groove port with the second sapphire glass sheet obtained in the step c by using optical epoxy glue.
In this embodiment, the aperture of the prepared channel plate of the input window is 1000 μm, the thickness is 5.00mm, the effective light in the field of view is screened out through the channel, and the stray light beyond the field of view is absorbed by the channel wall. The input window prepared by the method has an angle of view of 22 degrees. The input window may be used in an ultraviolet imager or an ultraviolet detector of an ultraviolet telescope.
Example 3
The embodiment provides a preparation method of an input window, which comprises the following steps:
a, processing ZWB3 transparent glass into a round lens with a groove by using a cnc engraving machine, wherein the outer diameter is 30.00mm, the thickness is 10.00mm, the inner diameter of the groove is 22.00mm, and the depth of the groove is 7.30mm; polishing the plane of the lens by using a polishing machine, wherein the polishing solution is CeO 2 The suspension has a concentration of 300g/L and a particle size of 1 μm or less. And fixing the glass sheet on a single-shaft machine, and polishing the groove and the port by polyurethane to obtain a first quartz glass sheet.
The b channel plate pore size was designed to be 500 μm. Contains Ti 4+ The glass of (2) is a channel sheet material with a softening point of 572 ℃. Glass is processed into cylindrical hollow tubes and glass rods with regular triangles in cross section, and the cylindrical hollow tubes and the glass rods are respectively drawn into hollow tube single fibers and triangular fibers at 645 ℃, the inner diameter of each hollow tube single fiber is 500 mu m, the hollow tube single fibers are cut (the cut length is 90 mm) and arranged into hexagonal blank plates, and the triangular fibers are inserted into gaps of the hollow tube single fibers in the hexagonal blank plates. The hexagonal prism blank plate is put into a melting and pressing die to be melted and pressed at a high temperature of 582 ℃. Cutting the blank plate after the melting and pressing into a thin sheet with the thickness of 7.60mm, engraving into a circular sheet with the diameter of 21.98mm, and polishing to the thickness of 7.50 mm. The polishing process cleans the channels of impurities introduced therein to form an array of channels having a regular arrangement. Deposition of TiO on inner wall of channel by atomic layer deposition 2 The film layer (the wavelength of the ultraviolet light to be detected is 280-350 nm) can improve the absorption rate of the inner wall to stray light by 6-9%.
c, processing the round ZWB3 transparent purple glass sheet by using an engraving machine, wherein the diameter is 30.00mm, and the thickness is 0.80mm. Polishing with a polishing machine, wherein the polishing liquid is CeO 2 The suspension has a concentration of 300g/L and a particle size of 1 μm or less. A second quartz glass plate was obtained.
d embedding the channel sheet into the groove of the first ZWB3 glass sheet obtained in the step a, and bonding the groove port and the second ZWB3 glass sheet obtained in the step c by using organosilicon gel.
In this embodiment, the aperture of the prepared channel plate of the input window is 500 μm, the thickness is 7.50mm, the effective light in the field of view is screened out through the channel, and the stray light beyond the field of view is absorbed by the channel wall. The input window prepared by the method has a field angle of 7 degrees. The input window may be used in an ultraviolet imager or an ultraviolet detector of an ultraviolet telescope.
Example 4
The embodiment provides a preparation method of an input window, which comprises the following steps:
a, processing JGS1 quartz glass into a circular lens with a groove by using an engraving and milling machine, wherein the outer diameter is 20.00mm, the thickness is 2.00mm, the inner diameter of the groove is 16.00mm, and the depth of the groove is 0.50mm; polishing the plane of the lens by using a polishing machine, wherein the polishing solution is Fe 2 O 3 The suspension has a concentration of 250g/L and a particle size of 1 μm or less. And fixing the glass sheet on a single-shaft machine, and polishing the groove and the port by polyurethane to obtain a first quartz glass sheet.
The b channel plate pore size was designed to be 80 μm. The third glass used as the material of the channel sheet is Ti-containing 4+ 、Fe 3+ The softening point of the glass is 603 ℃. And processing the third glass into a cylindrical hollow tube and a glass rod with a regular triangle cross section, and respectively performing fiber drawing. Firstly, carrying out single fiber drawing, wherein the drawing temperature is 740 ℃, and after drawing the hollow tube single fiber with a round section, arranging the hollow tube single fiber into a composite fiber rod with a regular hexagon section, inserting the triangle fiber drawn by the triangle rod into a gap of the single fiber of the composite fiber rod, and then carrying out composite fiber drawing, wherein the drawing temperature of the composite fiber is 735 ℃, so as to obtain a second fiber. The second fibers were cut (cut length 80 mm) and arranged into hexagonal prism blanks. The hexagonal prism blank plate is put into a melting and pressing die to be melted and pressed at a high temperature of 611 ℃. Cutting the blank plate after the melting and pressing into a thin sheet with the thickness of 0.75mm, engraving into a circular sheet with the diameter of 15.98mm, and polishing to the thickness of 0.65 mm. And cleaning impurities introduced into the channels in the polishing process to form a channel array with regular arrangement.
c, processing a round JGS1 quartz glass sheet by using an engraving machine, wherein the diameter is 20.00mm, and the thickness is 0.50mm. Polishing with a polishing machine, wherein the polishing liquid is Fe 2 O 3 A suspension with a concentration of 250g/L and a particle size of less thanEqual to 1 μm. A second quartz glass plate was obtained.
d embedding the channel sheet into a groove of the first quartz glass sheet obtained in the step a, and bonding the port of the groove with the second quartz glass sheet obtained in the step c by using optical epoxy glue.
In this embodiment, the aperture of the prepared channel plate of the input window is 80 μm, the thickness is 0.65mm, the effective light in the field of view is screened out by the channel, and the stray light beyond the field of view is absorbed by the channel wall. The angle of view of the input window prepared by this method was 14 °. The input window may be used in an ultraviolet imager or an ultraviolet detector of an ultraviolet telescope.
Example 5
The embodiment provides a preparation method of an input window, which comprises the following steps:
a, processing ZWB3 transparent glass into a round lens with a groove by using a cnc engraving machine, wherein the outer diameter is 25.00mm, the thickness is 2.50mm, the inner diameter of the groove is 21.00mm, and the depth of the groove is 1.05mm; polishing the plane of the lens by using a polishing machine, wherein the polishing solution is CeO 2 The suspension has a concentration of 350g/L and a particle size of 1 μm or less. And fixing the glass sheet on a single-shaft machine, and polishing the groove and the port by polyurethane to obtain a first quartz glass sheet.
The b channel plate pore size was designed to be 300 μm. The third glass used as the material of the channel sheet is Ti-containing 4+ 、Ce 4+ The softening point of the glass is 596 ℃. The third glass was processed into a cylindrical hollow tube and a glass rod with a regular triangle cross section, which were drawn at 727℃into hollow tube filaments and triangular fibers, respectively, the hollow tube filaments had an inner diameter of 300. Mu.m, the filaments were cut (cut length was 100 mm), arranged into hexagonal prism blanks, and the triangular fibers were inserted into the gaps of the filaments in the hexagonal prism blanks. The hexagonal prism blank plate is put into a melting and pressing die to be fused at a high temperature of 600 ℃. Cutting the blank plate after the melting and pressing into a sheet with the thickness of 1.50mm, engraving into a wafer with the diameter of 20.99mm, and polishing to the thickness of 1.30 mm. And cleaning impurities introduced into the channels in the polishing process to form a channel array with regular arrangement.
c, processing the round ZWB3 transparent purple glass sheet with a cnc engraving machine, wherein the diameter is25.00mm and 0.80mm thick. Polishing with a polishing machine, wherein the polishing liquid is CeO 2 The suspension has a concentration of 350g/L and a particle size of 1 μm or less. A second quartz glass plate was obtained.
d embedding the channel sheet into a groove of the first quartz glass sheet obtained in the step a, and bonding the port of the groove and the second quartz glass sheet obtained in the step c by using acrylic resin through ultraviolet curing.
In this embodiment, the aperture of the prepared channel plate of the input window is 300 μm, the thickness is 1.30mm, the effective light in the field of view is screened out by the channel, and the stray light beyond the field of view is absorbed by the channel wall. The input window prepared by the method has an angle of view of 26 degrees. The input window may be used in an ultraviolet imager or an ultraviolet detector of an ultraviolet telescope.
In the description of the present invention, numerous specific details are set forth. However, it is understood that embodiments of the invention may be practiced without these specific details. In some embodiments, well-known methods, structures and techniques have not been shown in detail in order not to obscure an understanding of this description.
In addition, the specific features described in the above embodiments may be combined in any suitable manner, and in order to avoid unnecessary repetition, various possible combinations are not described further.
Moreover, any combination of the various embodiments of the invention can be made without departing from the spirit of the invention, which should also be considered as disclosed herein.
The above description is only of the preferred embodiments of the present invention, and is not intended to limit the present invention in any way, but any simple modification, equivalent variation and modification made to the above embodiments according to the technical substance of the present invention still fall within the scope of the technical solution of the present invention.
Claims (12)
1. An input window is characterized by comprising a first glass sheet, a channel sheet and a second glass sheet which are connected in sequence; a groove is formed in the first glass sheet; the channel plate comprises a flat plate which is embedded in the groove, a regular micro-channel array is arranged on the flat plate, and the forming direction of the micro-channel array is perpendicular to the plane of the channel plate.
2. The input window of claim 1, wherein the recessed port of the first glass sheet is fixedly connected to the second glass sheet.
3. The input window of claim 1, wherein the angle of view of the input windowWhere d is the aperture of the microchannel and t is the thickness of the channel sheet.
4. The input window of claim 1, wherein the first glass sheet and the second glass sheet are wafers of equal outer diameter, and wherein the second glass sheet has a thickness less than the thickness of the first glass sheet.
5. A method of manufacturing an input window as claimed in any one of claims 1 to 4, comprising the steps of:
a, preparing a first glass sheet: engraving the first glass into a round glass sheet with a groove, and then polishing the plane, the groove and the port of the glass sheet respectively;
b, preparation of a channel sheet: processing the third glass into a cylindrical hollow tube and a glass rod with a regular triangle cross section, and respectively performing fiber drawing to obtain hollow tube single fibers and triangle fibers; arranging the hollow tube single fibers into a composite fiber rod in a combined way, filling the gaps among the hollow tube fibers with triangular fibers, drawing to obtain second fibers, cutting the second fibers to a fixed length, and arranging the second fibers into a hexagonal prism blank; or directly cutting off the hollow tube single fibers to a fixed length, arranging the hollow tube single fibers into a hexagonal prism blank plate, and filling the gaps among the hollow tube single fibers with triangular fibers; carrying out melt pressing on the hexagonal prism blank plate; cutting the blank plate after being melted and pressed into thin slices, engraving and polishing to the external dimension of the required channel slice; removing impurities introduced into the channels to form a micro-channel array with regular arrangement;
c, preparing a second glass sheet: engraving the second glass into a circular sheet; then polishing the round piece;
d, matching: embedding the channel sheet obtained in the step b into the groove of the first glass sheet obtained in the step a, and bonding the port of the groove with the second glass sheet.
6. The method of manufacturing an input window according to claim 5, wherein in step a, the polishing specifically comprises: polishing the plane of the glass sheet by using polishing liquid, rotatably connecting the glass sheet on a shaft, and polishing the groove and the port by using polyurethane; in the steps a and c, the first glass is selected from one of quartz glass, ZWB3 transparent glass and sapphire glass; in step b, the third glass contains Fe 3+ 、Ti 4+ And Ce (Ce) 4+ At least one of them.
7. The method of manufacturing an input window according to claim 5, wherein in the step b, when the aperture of the micro-channel array is 0.25mm or more, the fiber drawing is one single fiber drawing; when the aperture of the micro-channel array is below 0.25mm, the fiber drawing comprises two times of drawing of single fiber and composite fiber; the temperature of the fiber drawing is 70-150 ℃ higher than the softening point of the glass tube.
8. The method of manufacturing an input window according to claim 5, wherein in step b, the melting pressure is at a temperature 0 to 10 ℃ higher than the glass softening point; the diameter of the channel plate of the refined carving is 0.01-0.02 mm smaller than the inner diameter of the groove of the first glass plate, and the thickness of the channel plate is 0.15-0.30 mm greater than the depth of the groove; the thickness of the polished channel plate is 0.1-0.2 mm larger than the depth of the groove; in step b, the channel sheet contains a regular array of micro-or millimeter-sized circular micro-channels.
9. The method of claim 8, wherein in step b, the circular micro-channel array has a pore size of 10 to 2000 μm.
10. An ultraviolet detector comprising the input window of any one of claims 1-4.
11. An ultraviolet imager comprising the ultraviolet detector of claim 10.
12. An ultraviolet telescope comprising the ultraviolet detector of claim 10.
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