CN210206763U

CN210206763U - Visual window structure on vacuum reaction chamber

Info

Publication number: CN210206763U
Application number: CN201920929183.3U
Authority: CN
Inventors: Haoming Wang; 王浩明
Original assignee: Suzhou Zishan Semiconductor Technology Co Ltd
Current assignee: Suzhou Zishan Semiconductor Technology Co Ltd
Priority date: 2019-06-20
Filing date: 2019-06-20
Publication date: 2020-03-31
Anticipated expiration: 2029-06-20

Abstract

The utility model relates to a visual window structure on a vacuum reaction chamber, which comprises a window arranged on the side wall of the vacuum reaction chamber, a groove arranged outside the window, a sealing groove arranged in the groove and positioned at the outer ring of the window, a rubber sealing ring arranged in the sealing groove, a frame part of which can be arranged in the groove, and quartz glass welded or bonded in the frame; the periphery of the outer side of the frame is provided with a connecting edge; the connecting edge is fixed on the side wall of the vacuum reaction chamber through a plurality of bolts; the utility model discloses a with quartz glass direct mount in the frame, it is more convenient not only to dismantle, and in the installation, quartz glass can not produce the offset, and the leakproofness is better to owing to receive the protection of frame, the dismouting in-process can prevent that quartz glass from receiving the damage, has improved life.

Description

Visual window structure on vacuum reaction chamber

Technical Field

The utility model relates to a visual window structure on the vacuum reaction chamber is refered in particular to in the vacuum reaction chamber field.

Background

As shown in fig. 1-2, a viewing window of a conventional vacuum reaction chamber 1 comprises a rubber seal ring 23, a quartz glass 24, and a transparent plastic casing 21, wherein the quartz glass 24 is disposed in a viewing window groove 22, the rubber seal ring 23 is disposed in a seal groove and tightly attached to the quartz glass 24 for sealing, and the transparent plastic casing 21 is mounted outside the viewing window by screws for fixing the quartz glass 24; because the reaction chamber is in the high temperature state in the work, and contain gases such as CL2, Br2 in the reaction chamber gas, can have corrosive action to rubber seal, in order to guarantee sealed effect, can regularly change rubber seal, nevertheless because difficult taking out after the quartz glass installation, lead to dismantling very easily to harm quartz glass at every turn, reduce life, and quartz glass is fixed through the transparent plastic shell, when the transparent plastic shell passes through the screw fixation, the quartz glass who is in the inside takes place offset easily, influence sealed effect.

SUMMERY OF THE UTILITY MODEL

The utility model aims at providing a visual window structure on a vacuum reaction chamber in order to overcome the defects of the prior art.

In order to achieve the above purpose, the utility model adopts the technical scheme that: a visual window structure on a vacuum reaction chamber comprises a window arranged on the side wall of the vacuum reaction chamber, a groove arranged on the outer side of the window, a sealing groove arranged in the groove and positioned on the outer ring of the window, a rubber sealing ring arranged in the sealing groove, a frame part of which can be arranged in the groove, and quartz glass welded or bonded in the frame; the periphery of the outer side of the frame is provided with a connecting edge; the connecting edge is fixed on the side wall of the vacuum reaction chamber through a plurality of bolts.

Preferably, the area of the quartz glass is larger than that of the sealing groove, and a part of the quartz glass protrudes from the inner side surface of the frame.

Preferably, the frame is further provided with an annular baffle plate on the outer side of the quartz glass.

Preferably, the frame, the connecting edge and the annular baffle are integrally formed.

Preferably, the frame is made of a metal material.

Preferably, the joint of the connecting edge and the side wall of the vacuum reaction chamber is further provided with a sealing gasket.

Because of above-mentioned technical scheme's application, compared with the prior art, the utility model have the following advantage:

1. the quartz glass is directly arranged in the frame, so that the disassembly is more convenient, and in the installation process, the quartz glass can not generate position deviation, and the sealing performance is better;

2. the utility model discloses owing to receive the protection of frame, the dismouting in-process can prevent that quartz glass from receiving the damage, has improved life.

Drawings

The technical scheme of the utility model is further explained by combining the attached drawings as follows:

FIG. 1 is a schematic structural diagram of a conventional visual window;

FIG. 2 is a cross-sectional view of a prior art viewing window;

FIG. 3 is a schematic view of the installation of the present invention;

FIG. 4 is an enlarged view of a portion of FIG. 3 at A;

fig. 5 is a front view of the middle frame.

Wherein: 1. a vacuum reaction chamber; 21. a transparent plastic housing; 22. a visible window groove; 23. a rubber seal ring; 24. quartz glass; 31. a window; 32. a rubber seal ring; 33. quartz glass; 34. a frame; 35. a groove; 36. a sealing gasket; 37. a connecting edge; 38. an annular baffle.

Detailed Description

The present invention will be described in further detail with reference to the accompanying drawings and specific embodiments.

The first embodiment is as follows:

fig. 3-5 show a visible window structure on a vacuum reaction chamber according to the present invention, which comprises a window 31 disposed on a sidewall of the vacuum reaction chamber 1, a groove 35 disposed outside the window 31, a sealing groove disposed in the groove 35 and located outside the window 31, a rubber sealing ring 32 disposed in the sealing groove, a frame 34 partially disposed in the groove 35, and a quartz glass 33 welded in the frame 34, wherein the quartz glass 33 is welded on metal in the prior art, such as from the scientists team of herring walt university, uk, the welding of glass and metal is realized by an ultrafast laser system in the future, or the quartz glass 33 can be melted at high temperature and injected into the frame 34, and then condensed, so as to realize integral molding; a connecting edge 37 is arranged on the periphery of the outer side of the frame 34; the connecting edge 37 is fixed on the side wall of the vacuum reaction chamber 1 by a plurality of bolts.

Example two:

fig. 3-5 show the structure of the visible window on the vacuum reaction chamber of the present invention, which comprises a window 31 disposed on the sidewall of the vacuum reaction chamber 1, a groove 35 disposed outside the window 31, a sealing groove disposed in the groove 35 and located at the outer ring of the window 31, a rubber sealing ring 32 disposed in the sealing groove, a frame 34 partially disposed in the groove 35, and a quartz glass 33 bonded in the frame 34 by UV shadowless glue, and has the advantages of convenient use, controllable time, fast curing speed, high bonding strength, high light transmittance, no color or trace after bonding, safe operation, etc.; a connecting edge 37 is arranged on the periphery of the outer side of the frame 34; the connecting edge 37 is fixed on the side wall of the vacuum reaction chamber 1 by a plurality of bolts.

Further, the area of the quartz glass 33 is larger than that of the sealing groove, and part of the quartz glass 33 protrudes out of the inner side surface of the frame 34, so that the quartz glass 33 can be fully contacted with the rubber sealing ring 32, and the sealing effect is improved.

Further, an annular baffle 38 is arranged inside the frame 34 and outside the quartz glass 33, so as to play a role in positioning and supporting and reduce the stress between the edge of the quartz glass 33 and the frame 34.

Further, the frame 34, the connecting edge 37 and the annular baffle 38 are integrally formed and made of metal material, so as to facilitate processing.

Furthermore, a sealing gasket 36 is further arranged at the joint of the connecting edge 37 and the side wall of the vacuum reaction chamber 1, so that the sealing effect can be further improved.

The above is only a specific application example of the present invention, and does not constitute any limitation to the protection scope of the present invention. All the technical solutions formed by equivalent transformation or equivalent replacement fall within the protection scope of the present invention.

Claims

1. The utility model provides a visual window structure on vacuum reaction chamber, contains the window of setting on the vacuum reaction chamber lateral wall, sets up in the recess in the window outside, sets up in the recess and be located the seal groove of window outer lane, set up rubber seal and quartz glass in the seal groove, its characterized in that: also comprises a frame with a part capable of being placed in the groove; the quartz glass is welded or bonded in the frame; the periphery of the outer side of the frame is provided with a connecting edge; the connecting edge is fixed on the side wall of the vacuum reaction chamber through a plurality of bolts.

2. A viewing window structure on a vacuum reaction chamber according to claim 1, wherein: the area of the quartz glass is larger than that of the sealing groove, and part of the quartz glass protrudes out of the inner side face of the frame.

3. The structure of the viewing window on the vacuum reaction chamber of claim 1 or 2, wherein: and an annular baffle is arranged on the outer side of the quartz glass in the frame.

4. A viewing window structure on a vacuum reaction chamber according to claim 3, wherein: the frame, the connecting edge and the annular baffle are integrally formed.

5. The window structure of claim 4, wherein: the frame is made of a metal material.

6. The window structure of claim 5, wherein: and a sealing gasket is also arranged at the joint of the connecting edge and the side wall of the vacuum reaction chamber.