CN112254847A - Optical fiber FP pressure sensor based on hydraulic principle - Google Patents
Optical fiber FP pressure sensor based on hydraulic principle Download PDFInfo
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- CN112254847A CN112254847A CN202011081511.2A CN202011081511A CN112254847A CN 112254847 A CN112254847 A CN 112254847A CN 202011081511 A CN202011081511 A CN 202011081511A CN 112254847 A CN112254847 A CN 112254847A
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- optical fiber
- glass shell
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- hydraulic
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- 239000013307 optical fiber Substances 0.000 title claims abstract description 46
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 title claims abstract description 25
- 239000011521 glass Substances 0.000 claims abstract description 50
- 229910052751 metal Inorganic materials 0.000 claims abstract description 30
- 239000002184 metal Substances 0.000 claims abstract description 30
- 239000007788 liquid Substances 0.000 claims abstract description 7
- 229920006264 polyurethane film Polymers 0.000 claims description 15
- 238000005253 cladding Methods 0.000 claims description 8
- 239000003822 epoxy resin Substances 0.000 claims description 7
- 239000003292 glue Substances 0.000 claims description 7
- 229920000647 polyepoxide Polymers 0.000 claims description 7
- 239000012528 membrane Substances 0.000 claims description 6
- 230000003287 optical effect Effects 0.000 claims description 5
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- 239000004568 cement Substances 0.000 claims description 4
- 238000007789 sealing Methods 0.000 claims description 3
- 230000035945 sensitivity Effects 0.000 abstract description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 9
- 239000000835 fiber Substances 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 229920006335 epoxy glue Polymers 0.000 description 2
- 239000008213 purified water Substances 0.000 description 2
- 238000002310 reflectometry Methods 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002121 nanofiber Substances 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/02—Measuring force or stress, in general by hydraulic or pneumatic means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
- G01L1/242—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet the material being an optical fibre
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
- G01L11/02—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means
- G01L11/025—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means using a pressure-sensitive optical fibre
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
The invention discloses an optical fiber FP pressure sensor based on a hydraulic principle, which comprises a glass shell with an opening at the upper end, wherein the bottom of the glass shell is provided with a central hole, a bowl-shaped metal diaphragm is reversely buckled above the central hole, a single-mode optical fiber is inserted into the lower end of the central hole, a sealed FP cavity is formed between the metal diaphragm and the top end surface of the single-mode optical fiber, and one surface of the metal diaphragm facing to the FP cavity is plated with a reflecting film; the glass shell is filled with liquid, and the top of the glass shell is sealed and covered with a layer of film. The pressure sensor disclosed by the invention has the advantages of simple structure, high sensitivity, insensitivity to temperature and long service life.
Description
Technical Field
The invention relates to a pressure sensor, in particular to an optical fiber FP pressure sensor based on a hydraulic principle.
Background
With the rapid development of optical fiber communication technology, optical fiber sensors have achieved fruitful results in the last forty years, and a large number of optical fiber sensors based on technologies such as fiber gratings, michelson interferometers, micro-nano fibers and fabry-perot (F-P) interferometers are emerged, and the fabry-perot interferometers are paid attention by scholars at home and abroad due to the advantages of simple structure, small size, strong anti-interference capability, high precision, low cost and the like, and pressure sensors, refractive index sensors, temperature sensors and the like based on the optical fiber FP interferometers have appeared at present. The principle of the optical fiber FP pressure sensor is that external pressure is applied to the sensor, so that the cavity length of an FP cavity is changed, the reflected light intensity is changed, and the pressure can be calculated by analyzing the spectrum of the reflected light. The existing optical fiber FP pressure sensors generally have two problems, one is that the structure is simple, but the sensitivity is low and the response speed is slow; the other is a complex structure, but is difficult to manufacture.
Chinese patent No. CN103115698A discloses an "optical fiber FP temperature sensor based on alcohol filling", and the manufacturing method fills anhydrous alcohol in the FP cavity to replace vacuum or air, and improves the sensitivity of the sensor by the characteristic of high temperature sensitivity of alcohol. The patent refers to the field of 'measuring electric variables or magnetic variables'. The two end faces of the air-liquid and the air-SMF form an F-P cavity. Although the manufacturing method provides a brand new idea, the shape and the size of the manufactured FP cavity are uncontrollable, and accurate pressure measurement cannot be realized.
Disclosure of Invention
In order to solve the technical problems, the invention provides an optical fiber FP pressure sensor based on a hydraulic principle, so as to achieve the purposes of simple structure, high sensitivity and insensitive temperature.
In order to achieve the purpose, the technical scheme of the invention is as follows:
an optical fiber FP pressure sensor based on a hydraulic principle comprises a glass shell with an opening at the upper end, wherein a central hole is formed in the bottom of the glass shell, a bowl-shaped metal diaphragm is reversely buckled above the central hole, a single-mode optical fiber is inserted into the lower end of the central hole, a sealed FP cavity is formed between the metal diaphragm and the top end face of the single-mode optical fiber, and a reflecting film is plated on one surface, facing the FP cavity, of the metal diaphragm; the glass shell is filled with liquid, and the top of the glass shell is sealed and covered with a layer of film.
In the scheme, the diameter of the top of the glass shell is larger than that of the bottom of the glass shell, and a circle of groove for sealing the film is carved on the outer side surface of the upper end of the glass shell.
In a further technical scheme, the diameter of the top of the glass shell is 1cm, the diameter of the bottom of the glass shell is 4mm, and the diameter of the central hole is 126 micrometers.
In the above scheme, the film is a polyurethane film, and the polyurethane film is sealed on the outer side surface of the glass shell through epoxy resin glue.
In the above scheme, the metal diaphragm material is aluminium, a long limit is left at metal diaphragm border department, seals in glass housing inner bottom surface through epoxy glue.
In the scheme, the joint of the single-mode optical fiber and the glass shell is sealed by adopting optical cement.
In the above scheme, the single-mode optical fiber is externally coated with a cladding.
In the scheme, the cavity length of the FP cavity is 80 mu m.
In the above scheme, the thickness of the glass housing is 150 μm, and the thickness of the metal diaphragm is 50 μm.
In a further technical scheme, the diameter of the single-mode optical fiber is 9 μm, and the diameter of the cladding is 125 μm.
Through the technical scheme, the optical fiber FP pressure sensor based on the hydraulic principle has the following advantages: the glass shell is filled with liquid to form a hydraulic press to conduct stress instead of directly acting on the FP cavity, so that the high-sensitivity FP vacuum pump has extremely high sensitivity; the device can be used for measuring micro force, hydraulic pressure and air pressure; the FP cavity is wrapped inside the hydraulic press, so that the interference of external physical quantity is avoided, the accuracy and the service life of the sensor are improved, and the fast response is realized; the hydraulic press is filled with pure water with low thermal expansion coefficient, so that the influence caused by temperature can be reduced.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below.
Fig. 1 is a schematic structural diagram of an optical fiber FP pressure sensor based on a hydraulic principle according to an embodiment of the present invention.
In the figure, 1, a glass shell; 2. a metal diaphragm; 3. epoxy resin glue; 4. a single mode optical fiber; 5. optical cement; 6. a FP cavity; 7. a cladding layer; 8. purified water; 9. a polyurethane film.
Detailed Description
The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention.
The invention provides an optical fiber FP pressure sensor based on a hydraulic principle, which has the advantages of high sensitivity, high response speed, wide application range, simple structure and the like as shown in figure 1. The structure, principle, operation, etc. will be described in further detail below.
An optical fiber FP pressure sensor based on a hydraulic principle comprises a glass shell 1 with an opening at the upper end, wherein the thermal expansion coefficient of glass is relatively small, and the influence caused by temperature can be reduced. The thickness of the glass envelope 1 is 150 μm, the diameter of the top of the glass envelope 1 is 1cm, and the diameter of the bottom is 4 mm.
The bottom of the glass shell 1 is provided with a central hole, and the diameter of the central hole is 126 mu m. A bowl-shaped metal diaphragm 2 is reversely buckled above the central hole, the metal diaphragm 2 is made of aluminum, and the aluminum sheet is not easy to react with water and has good ductility. The thickness of the metal membrane 2 is 50 μm, a long edge is left at the edge of the metal membrane 2, and the metal membrane is sealed on the inner bottom surface of the glass shell 1 through epoxy resin glue 3. One surface of the metal diaphragm 2 facing the FP cavity 6 is plated with a reflecting film which is a silver film.
A single mode fiber 4 is inserted into the lower end of the central hole, and the joint of the single mode fiber 4 and the glass shell 1 is sealed by optical cement 5, so that the influence caused by air flow is reduced, the fiber is protected, and the expansion and the application are facilitated. And a sealed FP cavity 6 is formed between the metal diaphragm 2 and the top end surface of the single-mode optical fiber 4, and the cavity length d of the FP cavity 6 is 80 mu m. The single-mode fiber 4 is externally coated with a cladding 7, the diameter of the single-mode fiber 4 is 9 micrometers, and the diameter of the cladding 7 is 125 micrometers.
The glass shell 1 is filled with purified water 8, the top of the glass shell is sealed and covered with a polyurethane film 9, and the polyurethane film 9 is sealed on the outer side surface of the glass shell 1 through epoxy resin glue. The outer side surface of the upper end of the glass shell 1 is carved with a circle of groove for sealing the polyurethane film 9.
Water is very common in life, is easy to obtain and has low price, and the cost of the sensor is effectively controlled. On the other hand, the thermal expansion coefficient of water is lower, namely 0.000214/DEG C, the molecular weight is smaller, the influence of gravity and temperature on the sensor can be effectively reduced, and the accuracy is improved. The coefficients of thermal expansion of water at different temperatures are shown in table 1. Based on Table 1, the proposed use temperature for the sensor design of the present invention is 0-15 deg.C, which can accommodate more operating environments by replacing the fill fluid.
TABLE 1 coefficient of thermal expansion of water at different temperatures
| Temperature of | Coefficient of performance | Temperature of | Coefficient of performance | Temperature of | Coefficient of performance |
| 0 | 0.00013 | 40 | 0.00782 | 75 | 0.02575 |
| 10 | 0.00025 | 45 | 0.00084 | 80 | 0.02898 |
| 15 | 0.00085 | 50 | 0.01207 | 85 | 0.03230 |
| 20 | 0.00180 | 55 | 0.01447 | 90 | 0.03590 |
| 25 | 0.00289 | 60 | 0.01704 | 95 | 0.03058 |
| 30 | 0.00425 | 65 | 0.01979 | 100 | 0.04342 |
| 35 | 0.00582 | 70 | 0.02269 |
The invention relates to a manufacturing method of an optical fiber FP pressure sensor based on a hydraulic principle, which comprises the following steps:
firstly, punching a center hole with the diameter of 126 microns in the center of the bottom of a glass shell 1, placing a metal membrane 2 opposite to the center hole, and tightly bonding the edge of the metal membrane 2 with the bottom of the glass shell 1 by using epoxy resin glue 3; then fill up water into glass shell 1, cover polyurethane film 9 in glass shell 1 upper end at last, fix polyurethane film 9 along the upper end recess with the fine rule, beat a round of epoxy glue 3 in the seam crossing of polyurethane film 9 and glass shell 1, accomplish sealedly.
The end face of a single-mode optical fiber 4 is cut flatly and inserted into a central hole at the bottom of a glass shell 1, the single-mode optical fiber 4 is tightly adhered to the glass shell 1 through an optical adhesive 5, an FP cavity 6 is formed between the end face at the top of the single-mode optical fiber 4 and a reflecting film on a metal diaphragm 2, and the single-mode optical fiber 4 is coated with a cladding 7.
The invention can be used for measuring hydraulic pressure, air pressure and pressure, and the sensing principle is as follows: the force acts on the polyurethane film 9 at the upper end of the sensor to cause the film to be concave, the stress is conducted through liquid, the metal diaphragm 2 is bent downwards to cause the cavity length of the FP cavity 6 to be obviously changed, and the magnitude of the force can be calculated by detecting and analyzing the light intensity of the reflected light.
When the upper polyurethane film 9 is subjected to a slight pressure F1, the polyurethane film 9 may only deform a little and cannot be directly measured, according to the pascal principle: the sealed and sealed liquid pressure is equal everywhere, the area of the upper polyurethane film 9 is set as S1, the displacement generated by stress is L1, the area of the lower metal diaphragm 2 is S2, the stress is F2, and the generated displacement is L2, so that F1/S1 is F2/S2, and the two ends do work equally, namely F1L 1 is F2L 2, so that L2 is L1S 1/S2, and therefore, the metal diaphragm 2 can generate S1/S2 times displacement, and the cavity length d of the FP cavity 6 can be changed more obviously than the force directly acting on the FP interference structure.
According to the classical multi-beam interference theory, if the reflectivity of the reflecting surfaces is R, the incident angle is theta, the incident light wavelength is lambda, the refractive index of the light propagation medium is n, the distance between the two reflecting surfaces is d, and the incident light intensity is IiThen there is reflected light intensity:
phase difference of reflected light directly from incident light:
in the FP pressure sensor, light is considered to be normally incident, i.e., θ is 0 ° and the cavity refractive index n is 1, again due to the reflectivity R<<1, the reflected light intensity IrCan be expressed as:
from the above formula, when the incident light intensity and wavelength are determined, the reflected light intensity and the cavity length d form a cosine relationship, the reflected light intensity changes along with the change of the cavity length d, and the current pressure value can be measured by analyzing the spectrum of the reflected light.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (10)
1. An optical fiber FP pressure sensor based on a hydraulic principle is characterized by comprising a glass shell with an opening at the upper end, wherein a central hole is formed in the bottom of the glass shell, a bowl-shaped metal diaphragm is reversely buckled above the central hole, a single-mode optical fiber is inserted into the lower end of the central hole, a sealed FP cavity is formed between the metal diaphragm and the top end face of the single-mode optical fiber, and a reflecting film is plated on one surface, facing the FP cavity, of the metal diaphragm; the glass shell is filled with liquid, and the top of the glass shell is sealed and covered with a layer of film.
2. The hydraulic-principle-based optical fiber FP pressure sensor according to claim 1, wherein the diameter of the top of the glass shell is larger than that of the bottom of the glass shell, and the outer side surface of the upper end of the glass shell is carved with a circle of groove for sealing the membrane.
3. The hydraulic-principle-based optical fiber FP pressure sensor according to claim 2, wherein the diameter of the top of the glass shell is 1cm, the diameter of the bottom of the glass shell is 4mm, and the diameter of the central hole is 126 μm.
4. The hydraulic-principle-based optical fiber FP pressure sensor according to claim 1, wherein the film is a polyurethane film, and the polyurethane film is sealed on the outer side surface of the glass shell through epoxy resin glue.
5. The optical fiber FP pressure sensor based on the hydraulic principle of claim 1, wherein the metal diaphragm is made of aluminum, a long edge is reserved at the edge of the metal diaphragm, and the metal diaphragm is sealed on the inner bottom surface of the glass shell through epoxy resin glue.
6. The hydraulic principle-based optical fiber FP pressure sensor according to claim 1, wherein the connection between the single-mode optical fiber and the glass shell is sealed by optical cement.
7. The hydraulic-principle-based optical fiber FP pressure sensor according to claim 1, wherein the single-mode optical fiber is coated with a cladding.
8. The hydraulic-principle-based optical fiber FP pressure sensor of claim 1, wherein the cavity length of the FP cavity is 80 μm.
9. The hydraulic-principle-based optical fiber FP pressure sensor according to claim 1, wherein the thickness of the glass shell is 150 μm and the thickness of the metal diaphragm is 50 μm.
10. The hydraulic-principle-based optical fiber FP pressure sensor of claim 7, wherein the single-mode optical fiber has a diameter of 9 μm and a cladding diameter of 125 μm.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202011081511.2A CN112254847B (en) | 2020-10-12 | 2020-10-12 | Optical fiber FP pressure sensor based on hydraulic principle |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114659684A (en) * | 2022-02-28 | 2022-06-24 | 北京航空航天大学 | Low-temperature sensitive FP pressure sensor based on double-layer capillary |
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| CN106017756A (en) * | 2016-07-08 | 2016-10-12 | 燕山大学 | Submicron ultra-smooth metal film based highly sensitive FP pressure sensor |
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2020
- 2020-10-12 CN CN202011081511.2A patent/CN112254847B/en active Active
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| JP2007271278A (en) * | 2006-03-30 | 2007-10-18 | Japan Crown Cork Co Ltd | Inspection method for cap with projection part, and device therefor |
| CN201034758Y (en) * | 2007-04-19 | 2008-03-12 | 山东科技大学 | Optical fiber grating pressure sensor force transform structure |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114659684B (en) * | 2022-02-28 | 2023-06-20 | 北京航空航天大学 | Low-temperature sensitive FP pressure sensor based on double-layer capillary tube |
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