CN112233991B - 一种利用飞秒脉冲激光诱导银纳米线互连的方法 - Google Patents
一种利用飞秒脉冲激光诱导银纳米线互连的方法 Download PDFInfo
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Abstract
本发明公开了一种利用飞秒脉冲激光诱导银纳米线互连的方法，该方法先将含银纳米线浓度10mg/mL的溶液用乙醇以1:15‑25的比例稀释，然后利用滴涂工艺将银纳米线溶液涂覆到二氧化硅基底表面，最后进行激光辐照诱导银纳米线实现互连。本发明无需精准定位，工艺简单，加工效率高，可大规模使用，得到的银纳米线互连结构的接头较光滑。
Description
技术领域
本发明属于纳米线结构互连领域，具体涉及一种利用飞秒脉冲激光诱导银纳米线互连的方法。
背景技术
随着智能触摸交互终端、可穿戴电子设备、柔性太阳能电池等行业快的速发展，对透明导电薄膜的透明、质轻、柔韧、高导电、大幅面和低成本等性能提出了更高要求，然而传统透明导电薄膜的电极材料由于存在电阻率高、紫外吸收及刚性强等问题，已经越来越不适用于柔性电子领域。新型的透明导电薄膜材料如碳纳米管薄膜、石墨烯薄膜、金属氧化物薄膜正逐步成为研究热点。其中银纳米线由于较高的导电性及尺寸效应下的高透明度使其成为制备透明导电薄膜电极材料最好的选择。但是未经连接的纳米线存在较大的接触电阻，制备成膜的表面粗糙度也较高，因此将散乱的纳米线连接起来对于解决银纳米线的实际应用有着极其重要的意义。目前连接纳米线的方法主要有附加粘结剂连接、通电烧结连接、冷焊连接及激光辐照连接。其中激光辐照连接操作简单、不要需要精准定位、无接触等特点已经被应用于纳米材料的连接领域。激光的辐照时间和激光的能量调控是诱导银纳米线互连的关键，传统的互连工艺通常需要精准定位而且需要的工艺较为繁琐，不利于大规模的生产应用。
发明内容
为了克服上述现有技术的缺点，本发明的目的在于提供一种利用飞秒脉冲激光诱导银纳米线互连的方法，无需精准定位，工艺简单，加工效率高，可大规模使用。
为了实现上述目的，本发明采用的技术方案为：
一种利用飞秒脉冲激光诱导银纳米线互连的方法，包括以下步骤：
1)将银纳米线溶液滴涂于二氧化硅基底表面，然后将滴涂后的二氧化硅基底移至加热台在50-60℃加热1-2min；
2)搭建飞秒激光辐照系统：所搭建的飞秒激光辐照系统包括飞秒激光器、第一反射镜、1/2波片、分光棱镜、快门、第二反射镜、光阑和聚焦平凸透镜，其用于将飞秒超短脉冲激光聚焦于移动载物台上，并实时对激光功率进行调节，搭建好光路后，将二氧化硅基底固定在移动载物台上；
3)设置飞秒激光参数并诱导连接：采用飞秒激光辐照系统进行激光诱导，激光的具体参数为：脉冲宽度为1000fs、波长为800nm的飞秒激光，焦距为100mm的聚焦平凸透镜，70-100mW的激光能量辐照二氧化硅基底上的银纳米线10-30s，即得到互连的银纳米线结构。
本发明进一步的改进在于，银纳米线溶液的配置方法为：
按照体积比为1:15-25，在Ag浓度为10mg/mL的银纳米线溶液中加入溶剂混合，并搅拌均匀，其中溶剂为水，乙醇，或异丙醇。
本发明进一步的改进在于，按照体积比为1:20，在Ag浓度为10mg/mL的银纳米线溶液中加入溶剂混合。
本发明进一步的改进在于，使用槽式超声波清洗机超声混合30-35分钟。
本发明进一步的改进在于，步骤2)中，所搭建的飞秒激光辐照系统中，飞秒激光器的输出激光经过所述第一反射镜使光路转动90°，反射光依次经过所述1/2波片、所述分光棱镜、所述快门、所述第二反射镜、所述光阑、所述聚焦平凸透镜垂直照射在移动载物台的加工工位上，搭建好光路后，将二氧化硅基底固定在移动载物台上。
本发明进一步的改进在于，步骤3)中，设置飞秒激光参数并诱导连接的具体步骤为：使用1/2波片将出口功率为4W的飞秒脉冲激光调节至70-100mW，并使用功率计进行检测；然后用焦距的100mm的聚焦平凸透镜将圆形光斑激光束进行聚焦，并将焦点调至诱导二氧化硅基底上方1-1.5cm处，采用焦后诱导连接；设置快门，使飞秒激光作用时间为10-30s，当到达辐照时间后，立即关闭光路，防止破坏诱导互连后的纳米线结构。
本发明至少具有如下有益的技术效果：
利用飞秒激光的无接触、多光子非线性吸收等特点诱导二氧化硅基底上的银纳米线进行互连，形成的纳米线互连结构基本完整，接头质量较好，无类似焊接、烧蚀等热累积作用形成的接头，本发明工艺简单，可大规模使用并且对所选基底无损伤。
附图说明
图1为本发明所述光路的结构示意图。
图2(a)-(b)分别为实施例1所得银纳米线互连结构图。
图3(a)-(b)分别为实施例2所得银纳米线互连结构图。
图4(a)-(b)分别为实施例3所得银纳米线互连结构图。
图5(a)-(b)分别为实施例4所得银纳米线互连结构图。
图6(a)-(b)分别为实施例5所得银纳米线互连结构图。
附图标记说明：
1-飞秒激光器；2-第一反射镜；3-1/2波片；4-分光棱镜；5-功率计；6-快门；7-第二反射镜；8-聚焦平凸透镜；9-移动载物台；10-二氧化硅基底。
具体实施方式
下面结合附图和实施例对本发明进一步说明。
本发明提供的一种利用飞秒脉冲激光诱导银纳米线互连的方法，包括以下步骤：
1)调节银纳米线浓度并制备二氧化硅基底；所使用的银纳米线原液中Ag浓度为10mg/mL的溶液，纯度大于99wt％，其中溶剂为水，乙醇，异丙醇。此时银纳米线浓度过高，需要进一步稀释以实现银纳米线之间的互连，因此按照体积比为1:15-25，在Ag浓度为10mg/mL的银纳米线溶液中加入溶剂混合，并搅拌均匀，优选的按照体积比为1:20。将配置好的银纳米线溶液滴涂于二氧化硅基底表面，然后将滴涂后的二氧化硅基底移至加热台在50-60℃加热1-2min。
2)搭建光路：所搭建的光路主要包括飞秒激光器、第一反射镜、1/2波片、分光棱镜、快门、第二反射镜、光阑、聚焦平凸透镜，其作用是将飞秒超短脉冲激光聚焦于移动载物台上，并实时对激光功率进行调节，搭建好光路后，将二氧化硅基底固定在移动载物台上。
3)设置飞秒激光参数并诱导连接：采用飞秒激光辐照系统进行激光诱导，激光的具体参数为：脉冲宽度为1000fs、波长为800nm的飞秒激光，焦距为100mm的聚焦平凸透镜，70-100mW的激光能量辐照二氧化硅基底上的银纳米线10-30s，即得到互连的银纳米线结构。
所述的步骤2)搭建光路的具体步骤为：飞秒激光器的输出激光经过所述第一反射镜使光路转动90°，反射光依次经过所述1/2波片、所述分光棱镜、所述快门、所述第二反射镜、所述光阑、所述聚焦平凸透镜垂直照射在移动载物台的加工工位上。其中分光棱镜设置有功率计，用于检测光路中的激光功率，1/2波片用于调节光路中的激光功率，快门用于控制光路中激光的通断，聚焦平凸透镜将飞秒激光器输出的圆形光斑激光束进行聚焦，搭建好光路后，将二氧化硅基底固定在移动载物台上。
所述的步骤3)设置飞秒激光参数并诱导连接的具体工艺为：
a、使用1/2波片将出口功率为4W的飞秒脉冲激光调节至70-100mW，并使用功率计进行检测。
b、使用焦距的100mm的聚焦平凸透镜将圆形光斑激光束进行聚焦，并将焦点调至诱导二氧化硅基底上方1-1.5cm处，采用焦后诱导连接。
c、设置快门，使飞秒激光作用时间为10-30s，当到达作用时间后，立即关闭光路，防止破坏诱导互连后的纳米线结构。
实施例1，本发明提供的一种利用飞秒脉冲激光诱导银纳米线互连的方法，包括以下步骤：
1)调节银纳米线浓度并制备二氧化硅基底：在烧杯中加入10mL Ag浓度为10mg/mL的溶液，再加入乙醇溶液进行稀释，比例为1:20，然后使用槽式超声波清洗机超声混合30分钟。最后将配置好的银纳米线溶液滴涂于二氧化硅基底表面，然后将滴涂后的二氧化硅基底移至加热台在50℃加热1min。
2)搭建光路：飞秒激光器的输出激光经过所述第一反射镜使光路转动90°，反射光依次经过所述1/2波片、所述分光棱镜、所述快门、所述第二反射镜、所述光阑、所述聚焦平凸透镜垂直照射在移动载物台的加工工位上，搭建好光路后，将样片固定在移动载物台上。
3)设置飞秒激光参数并诱导连接：使用1/2波片将出口功率为4W的飞秒脉冲激光调节至100mW，并使用功率计进行检测。然后用焦距的100mm的聚焦平凸透镜将圆形光斑激光束进行聚焦，并将焦点调至诱导二氧化硅基底上方1cm处，采用焦后诱导连接。设置快门，使飞秒激光作用时间为30s，当到达辐照时间后，立即关闭光路，防止破坏诱导互连后的纳米线结构。
本实施例的有益效果：参照图2，本实施例得到银纳米线在激光作用下，形成了接头光滑的银纳米线互连结构，并且连接后的纳米线非激光作用区域结构保留完整。
实施例2：将实施例1步骤3)调整为：100mW的飞秒激光能量辐照10s，其它步骤顺序和参数不变，可以得到接头较好的银纳米线互连结构，参照图3。
实施例3：将实施例1步骤3)调整为：70mW的飞秒激光能量辐照30s，其它步骤顺序和参数不变，可以得到接头较好的银纳米线互连结构，参照图4。
实施例4：将实施例1步骤3)调整为：70mW的飞秒激光能量辐照10s，其它步骤顺序和参数不变，可以得到接头较好的银纳米线互连结构，参照图5。
实施例5：将实施例1步骤3)调整为：80mW的飞秒激光能量辐照10s，其它步骤顺序和参数不变，可以得到接头较好的银纳米线互连结构，参照图6。
Claims (3)
1.一种利用飞秒脉冲激光诱导银纳米线互连的方法，其特征在于，包括以下步骤：
1)将银纳米线溶液滴涂于二氧化硅基底表面，然后将滴涂后的二氧化硅基底移至加热台在50-60℃加热1-2min；银纳米线溶液的配置方法为：按照体积比为1:15-25，在Ag浓度为10mg/mL的银纳米线溶液中加入溶剂混合，并搅拌均匀，其中溶剂为水，乙醇，或异丙醇；
2)搭建飞秒激光辐照系统：所搭建的飞秒激光辐照系统包括飞秒激光器、第一反射镜、1/2波片、分光棱镜、快门、第二反射镜、光阑和聚焦平凸透镜，其用于将飞秒超短脉冲激光聚焦于移动载物台上，并实时对激光功率进行调节，搭建好光路后，将二氧化硅基底固定在移动载物台上；所搭建的飞秒激光辐照系统中，飞秒激光器的输出激光经过所述第一反射镜使光路转动90°，反射光依次经过所述1/2波片、所述分光棱镜、所述快门、所述第二反射镜、所述光阑、所述聚焦平凸透镜垂直照射在移动载物台的加工工位上，搭建好光路后，将二氧化硅基底固定在移动载物台上；
3)设置飞秒激光参数并诱导连接：采用飞秒激光辐照系统进行激光诱导，激光的具体参数为：脉冲宽度为1000fs、波长为800nm的飞秒激光，焦距为100mm的聚焦平凸透镜，70-100mW的激光能量辐照二氧化硅基底上的银纳米线10-30s，即得到互连的银纳米线结构；设置飞秒激光参数并诱导连接的具体步骤为：使用1/2波片将出口功率为4W的飞秒脉冲激光调节至70-100mW，并使用功率计进行检测；然后用焦距的100mm的聚焦平凸透镜将圆形光斑激光束进行聚焦，并将焦点调至诱导二氧化硅基底上方1-1.5cm处，采用焦后诱导连接；设置快门，使飞秒激光作用时间为10-30s，当到达辐照时间后，立即关闭光路，防止破坏诱导互连后的纳米线结构。
2.根据权利要求1所述的一种利用飞秒脉冲激光诱导银纳米线互连的方法，其特征在于，按照体积比为1:20，在Ag浓度为10mg/mL的银纳米线溶液中加入溶剂混合。
3.根据权利要求1所述的一种利用飞秒脉冲激光诱导银纳米线互连的方法，其特征在于，使用槽式超声波清洗机超声混合30-35分钟。
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