CN112219096A - Method and system for measuring optical shear of a birefringent device beyond the diffraction limit - Google Patents
Method and system for measuring optical shear of a birefringent device beyond the diffraction limit Download PDFInfo
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- 230000010287 polarization Effects 0.000 claims abstract description 77
- 238000006073 displacement reaction Methods 0.000 claims abstract description 32
- 238000004458 analytical method Methods 0.000 claims abstract description 12
- 238000005286 illumination Methods 0.000 claims abstract description 12
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- 238000003384 imaging method Methods 0.000 claims description 12
- 238000000926 separation method Methods 0.000 claims description 8
- 238000010008 shearing Methods 0.000 abstract description 9
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- 238000005259 measurement Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
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- 238000001152 differential interference contrast microscopy Methods 0.000 description 2
- 238000012512 characterization method Methods 0.000 description 1
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
- G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
- G01J9/0215—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods by shearing interferometric methods
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Abstract
Methods and systems for directly measuring optical shear angle and lateral displacement of a light beam passing through a birefringent device (212) having a resolution beyond the diffraction limit. The system for measuring the shear angle comprises an illumination module (310), a polarization control unit (209) or polarizer (309), the birefringent device (212), a lens module (215) and a data acquisition module (218) for recording the light intensity distribution. When using a polarization control unit (209), the polarization of the input light beam (201) from the illumination module (310) is controlled such that two light spots (206, 207) with orthogonal polarizations can be recorded at different frames, respectively. When a polarizer (309) is used, the polarizer (309) is placed in front of the data acquisition module (218) to record two spots (206, 207) with orthogonal polarizations at different frames, respectively, with mixed polarizations of the input beam (201) from the illumination module (310). A localization analysis is then applied to determine the central position of the two spots (206, 207) with perpendicular polarization and to calculate the value of the shearing angle/displacement between the transverse shearing beams. The method can solve the problem that the shearing angle/displacement exceeds the diffraction limit of light.
Description
Technical Field
The present disclosure relates to optical characterization of optical shear of birefringent devices.
Background
Birefringent crystals or prisms may be used to split incident light into two orthogonally polarized beams that are either in different directions or offset by some lateral displacement. Fig. 1 shows a schematic view of such a device. In FIG. 1A, an input light ray 101 is incident on a birefringent device 102 and is split into two beams (104 and 105) at a shear plane 103, 104 and 105 having orthogonal polarizations (P) with a shear angle ε+And P-). In FIG. 1B, an input light ray 106 is incident on a birefringent device 107 and is split into two parallel rays (109 and 110) at a shear plane 108, 109 and 110 having orthogonal polarizations (P) with a transverse shear displacement S+And P-). An example of such a device is a Nomarski (Nomarski) prism, which consists of two birefringent crystal wedges aligned with different optical axes. Nomas prisms are key components of Differential Interference Contrast (DIC) microscopes. For prisms used in DIC microscopes, the shear angle is typically about 10-5rad or even less. While this shear angle is critical to the spatial resolution, contrast and depth of DIC microscopy, commercial manufacturers do not typically provide any such information. For no-mark biological formationIncreasing concerns about image and surface topography have driven the development of quantitative DIC microscopy, which requires accurate determination of beam-shearing parameters of the prism. However, only indirect methods such as the use of calibrated samples or standard optical wedges, dual-focus fluorescence correlation spectroscopy, spatial interference and delay derivatives have been proposed and demonstrated to date. These measurements require complex setup and data analysis.
Consider a collimated monochromatic light beam (e.g., laser light) of wavelength λ and diameter D passing through a birefringent prism. The output is two orthogonally polarized beams propagating along directions separated by a small angle epsilon. Limited by the diffraction effects of light, the shear angle must be greater than the diffraction angle of the beam, i.e.
So that the shearing beam can be spatially resolved. This condition indicates that a sufficiently large incident beam (i.e., a sufficiently large beam) is required if one wants to directly measure the separation of a scattered beam with a small shear angle
). For example, at λ 400nm and a shear angle ε 10 μ rad (μ rad 10)-6rad), the required beam size should be greater than or equal to 5 cm. However, most birefringent devices are much smaller than 5cm in size, which hinders the development of direct methods in this field.
For measuring lateral displacement, if the displacement S is less than or equal to the diffraction limit
Where n is the refractive index, it is also not feasible to use the direct method.
In the present invention, direct spatial measurement of the optical shear of the birefringent device is reconsidered by applying a positional analysis, which enables accurate determination of the centroid of each of the two light waves beyond the diffraction limit. The novelty lies in
Momentum and polarization do not overlap in joint space.
Disclosure of Invention
Methods and systems are described for directly measuring optical shear angle and lateral displacement of a light beam passing through a birefringent device having a resolution beyond the diffraction limit. The system for measuring the shear angle comprises an illumination module, a polarization control unit or polarizer, said birefringent means, a lens module, and a data acquisition module for recording the light intensity distribution. The system for measuring shear displacement comprises an illumination module, a polarization control unit or polarizer, the birefringent device, an imaging module, and a data acquisition module for recording the light intensity distribution. When using a polarization control unit, the polarization of the input light beam from the illumination module is controlled such that two light spots with orthogonal polarizations can be recorded at different frames, respectively. When using a polarizer, the polarizer is placed in front of the data acquisition module to record two spots with orthogonal polarizations at different frames, respectively, with mixed polarizations of the input beam from the illumination module. Then, a localization analysis is applied to determine the center position of two spots with perpendicular polarization and to calculate the value of the shear angle/displacement between the transverse shear beams. The method can solve the problem that the shearing angle/displacement exceeds the optical diffraction limit.
Drawings
Fig. 1 shows a schematic representation of the optical shearing effect of two different birefringent devices. FIG. 1A illustrates the shear angle effect of a light ray passing through one type of birefringent device. FIG. 1B illustrates the shear displacement effect of a light ray passing through another type of birefringent device.
Fig. 2A is a schematic diagram of an optical setup for measuring the shear angle of a birefringent device using a Polarization Control Unit (PCU). Fig. 2B shows a block diagram of a corresponding system for measuring the shear angle of a birefringent device using a Polarization Control Unit (PCU).
FIG. 3A is a schematic diagram of an optical setup for measuring the shear angle of a birefringent device using a polarizer. FIG. 3B shows a block diagram of a corresponding system for measuring the shear angle of a birefringent device using a polarizer.
Fig. 4A is a schematic diagram of an optical setup for measuring the shear displacement of a birefringent device using a Polarization Control Unit (PCU). Fig. 4B shows a block diagram of a corresponding system for measuring the shear displacement of a birefringent device using a Polarization Control Unit (PCU).
FIG. 5A is a schematic diagram of an optical setup for measuring the shear displacement of a birefringent device using a polarizer. FIG. 5B shows a block diagram of a corresponding system for measuring the shear displacement of a birefringent device using a polarizer.
Fig. 6 shows the intensity distribution collected by the data acquisition module and the results of the localization analysis. FIG. 6A shows a polarization with mixing P+And P-Of the two overlapping spots. FIG. 6B shows a polarization P+The intensity distribution of the light spot. FIG. 6C shows a polarization P-The intensity distribution of the light spot.
Fig. 7 is a block diagram illustrating the process of a method of measuring the shear angle and displacement of a birefringent device.
Detailed Description
A first optical setup for directly measuring the shear angle of a birefringent device is shown in fig. 2A. The light beam 201 of diameter D is incident into a birefringent device which will have a polarization P behind the shearing plane 202+With respect to the output light beam 203 having a polarization P-Spatially shearing the angle epsilon. Polarization P+And polarization P-Are orthogonal to each other. A Polarization Control Unit (PCU)209 is used to control the polarization state of the input beam 201 and to change the P of the output shear beam+Component sum P–The intensity contribution of the component. A lens 205 of focal length f is used to focus the two sheared beams 203 and 204 into two spots 206 and 207 whose centers are a distance delta apart in the focal plane, which is the fourier transform of the two beams in momentum space. The intensity distribution I (x, y) of the light spot is collected by a recording device 208 in the focal plane. The centroid spacing between the two spots 206 and 207 is estimated as
The spot size of each beam at the focal plane is estimated as
Using conventional direct measurement, the necessary condition for resolving the two spots 206 and 207 in the image is Δ>d, i.e.
In this system, PCU 209 can be used to control input beam polarization so that the intensity distribution of each spot can be collected separately at different camera frames to avoid spot overlap. The above operation is realized by the following steps: 1) when P is equal to P+Where, shooting display P+Polarized light spot I+An image of (x, y); 2) when P is equal to P-Where the shot has P-Polarized light spot I-(x, y) image.
The PCU includes different optical components depending on the polarization state. 1) In the case of unpolarized incident light, the PCU is used to select P+Or P–The switchable polarizing filter of (1). 2) In the case of polarized incident light, the PCU may be used to select P+Or a half-wave plate of P-or a combination of half-wave plate and quarter-wave plate. Depending on the type of birefringent crystal used, the polarization component P+Orthogonal to the P-each other line or circle.
Fig. 2B shows a block diagram of a corresponding system for measuring the shear angle of a birefringent device in a first optical setup. To implement the functionality of fig. 1A, the system consists of an illumination module 210 that emits a light beam, a PCU 209, a birefringent device 212, a lens module 215, and a data acquisition module 218.
Fig. 3A shows a second optical setup for directly measuring the shear angle of a birefringent device. Unlike the first optical setup in fig. 2A, the polarizer 309 is placed in front of the light intensity distribution recording apparatus 208. In this arrangement, the incident beam comprises P+And P–The mixed polarization of the two, the polarizer 309 in this arrangement allows only one polarization to pass through and be collected at 208. By cuttingBy-passing the switch polarizer 309, the intensity I at different data frames can be collected separately without overlap+(x, y) and I-(x，y)。
Fig. 3B shows a block diagram of a corresponding system for measuring the shear angle of a birefringent device in a second optical setup. To implement the functionality of fig. 3A, the system consists of an illumination module 310 that emits a light beam, a birefringent device 212, a lens module 215, a switchable polarizer 309, and a data acquisition module 218.
Fig. 4A shows a first optical setup for directly measuring the shear displacement of a birefringent device. The beam 401 is focused on a shear plane 402 where two output orthogonal polarization components 403 and 404 are laterally offset by a displacement S. Then, the sheared surface is imaged at a magnification M onto the light intensity distribution recording apparatus 208 by the imaging system 405. Finally, 208 collects two spots 406 and 407. PCU 209 is used to control the polarization state of the incident beam so that I can be separately acquired at different data frames+(x, y) and I-(x，y)。
Fig. 4B shows a block diagram of a corresponding system for measuring the shear displacement of a birefringent device in a first optical setup. To achieve the functionality of fig. 4A, the system consists of illumination module 410, PCU 209, birefringence device 412, imaging module 415, and data acquisition module 218 that emit a focused beam of light.
Fig. 5A shows a second optical setup for directly measuring the shear displacement of a birefringent device. A switchable polarizer 309 is placed in front of the light intensity distribution recording means 208. In this arrangement, the incident beam includes a mixed polarization state, P+And P-, the polarizer 309 in this setup allows only one polarization to pass and be collected at 208, so that the intensity distribution I is recorded separately at 208 at different data frames+(x, y) and I-(x，y)。
Fig. 5B shows a block diagram of a corresponding system for measuring the shear displacement of a birefringent device in a second optical setup. To achieve the functionality of fig. 5A, the system consists of an illumination module 510 that emits a focused beam of light with mixed polarizations, a birefringent device 412, an imaging module 415, a polarizer 309, and a data acquisition module 218.
To illustrate the alignment analysis in this method without loss of generality, FIG. 6 shows that the optical shear of the birefringent device (FIG. 1A or FIG. 1B) is less than or equal to
Examples of (2). Three types of results collected by the data acquisition module 218 are presented: 1) FIG. 6A, intensity distribution 601I+(x，y)+I-(x, y); 2) FIG. 6B, intensity distribution 602I+(x, y); 3) FIG. 6C, intensity distribution 604I-(x, y). Clearly, the interval Δ cannot be resolved in fig. 6A. By means of location analysis, the intensity distribution I is determined separately+(x, y) corresponds to the position (x) of the centroid 603 of spot 602+，y+) And intensity distribution I-(x, y) corresponds to the position (x) of the centroid 605 of the spot 604-，y-). The separation between these two positions can then be calculated as
The corresponding shear angle is determined by equation (1). The positioning accuracy is estimated as
Where σ is the standard deviation of the single spot intensity distribution, a is the pixel size of the data acquisition module, N is the number of photons collected, and b is the background noise. Since in principle there is no limit to the photon budget, N is only limited by the camera sensor saturation. Therefore, it is possible to actually achieve a nano-positioning accuracy exceeding the diffraction limit in consideration of system disturbances from the environment, such as mechanical vibration and temperature fluctuation.
To measure the shear angle of the birefringent device in fig. 2 and 3, the value of the shear angle is obtained using equation (1)
Shear angle measurement accuracy or resolution is given by
For the typical configuration of 10cm in f in fig. 2 and 3, the nanopositioning accuracy is such that the shear angle measurement accuracy is 10-8rad。
To measure the shear displacement of the birefringent device of fig. 4 and 5, the shear displacement is determined by:
fig. 7 summarizes the method and process of measuring and determining the shear angle epsilon and shear displacement S. The checking of the type of birefringent device begins at step 701. If the task is to measure the shear angle epsilon, go to step 702 and use the settings in fig. 2 or fig. 3. In step 703, a compound having I is obtained+Frame 1 of (x, y) and having I-Frame 2 of (x, y), and the center positions (x) of frame 1 and frame 2 are obtained using localization analysis+，y+) And (x)-，y-). In step 704, the separation distance between the two centers is obtained
In step 705, a value for the shear angle is obtained
Where f is the focal length of the lens system in fig. 2 and 3. If the task is to measure the shear displacement S, then from 701 to 706 and the settings in fig. 4 or fig. 5 are used. In step 707, get has I+Frame 1 of (x, y) and having I-Frame 2 of (x, y), and the center positions (x) of frame 1 and frame 2 are obtained using localization analysis+，y+) And (x)-，y-). In step 708, the separation distance between the two centers is obtained
In step 709, a value of shear displacement is obtained
Here, M is the lateral image magnification of the imaging module in fig. 4 and 5.
Claims (29)
1. A method for measuring a shear angle of a birefringent device, comprising:
projecting a light beam on the birefringent device;
splitting two orthogonally polarized output beams (a first polarized beam and a second polarized beam) behind the birefringent device, the two orthogonally polarized output beams entering two different directions at a shear angle;
focusing the two beams using a lens system;
placing a light intensity distribution recording device behind the lens system at a position where the beam is focused;
recording a first frame in the light intensity distribution recording apparatus using the first polarized beam;
determining a first center position of a light intensity distribution in the first frame using localization analysis;
recording a second frame in the recording device using the second polarized beam;
determining a second center position of the light intensity distribution in the second frame using localization analysis;
calculating a separation distance between the first center position and the second center position;
and calculating the shear angle from the separation distance and the focal length of the lens system.
2. The method of claim 1, wherein the two orthogonal polarizations can be two orthogonal linear polarizations or two orthogonal circular polarizations, depending on the type of birefringent device.
3. The method of claim 1, wherein the lens system can be a single lens system or a combined multi-lens system.
4. A first system for measuring a shear angle of a birefringent device, comprising:
a light irradiation module that outputs a light beam;
a polarization control unit;
the birefringent means;
a lens module;
and a data acquisition module placed at a position where the light beam is focused.
5. The system of claim 4, wherein the polarization control unit is to control the polarization of the input light beam such that the polarization of the output light beam from the illumination module can be switched between two orthogonal polarizations.
6. The polarization control unit of claim 5, which can be a polarizer in case the light beam is unpolarized, or it can be a half-wave plate, or a combination of half-wave and quarter-wave plates, or other polarization unit.
7. The polarization control unit of claim 5, wherein the two orthogonal polarizations can be two orthogonal linear polarizations or two orthogonal circular polarizations, depending on the type of birefringent prism.
8. The system of claim 4, wherein the lens system can be a single lens system or a combined multi-lens system.
9. The system of claim 5, wherein the data acquisition module can be a CCD camera or a CMOS camera.
10. A second system for measuring a shear angle of a birefringent device, comprising:
a light irradiation module that outputs a light beam;
the birefringent means;
a lens module;
a switchable polarizing filter;
and a data acquisition module placed at a position where the light beam is focused.
11. The system of claim 10, wherein the switchable polarizing filter is used to select one of two orthogonally polarized light components passing through the filter.
12. The system of claim 10, wherein the switchable polarizing filter can be a linear polarizer or a circular polarizing filter, depending on the type of two orthogonal polarizations.
13. The system of claim 10, wherein the two orthogonal polarizations can be two orthogonal linear polarizations or two orthogonal circular polarizations, depending on the type of birefringent prism.
14. The system of claim 10, wherein the lens system can be a single lens system or a combined multi-lens system.
15. The system of claim 10, wherein the data acquisition module can be a CCD camera or a CMOS camera.
16. A method for measuring the shear displacement S of a birefringent device, comprising:
projecting a beam focused on a shear plane of the birefringent device;
splitting two orthogonally polarized output beams (a first polarized beam and a second polarized beam) at the shear plane, the two orthogonally polarized output beams having a transverse shear displacement S;
imaging the sheared surface to a light intensity distribution recording device at an image magnification M using an imaging system;
recording a first frame in the recording device using the first polarized beam;
determining a first center position of a light intensity distribution in the first frame using localization analysis;
recording a second frame in the recording device using the second polarized beam;
determining a second center position of the light intensity distribution in the second frame using localization analysis;
calculating a separation distance Δ between the first center position and the second center position;
and calculating the shear displacement S from the measured separation distance d divided by the imaging magnification M, i.e. S ═ Δ/M.
17. The method of claim 16, wherein the two orthogonal polarizations can be two orthogonal linear polarizations or two orthogonal circular polarizations, depending on the type of birefringent device.
18. A first system for measuring a shear displacement S of a birefringent device, comprising:
a light irradiation module that outputs a focused light beam;
a polarization control unit;
the birefringent device having an s-shear plane when the beam is focused;
an imaging module;
and a data acquisition module placed at a position where an image of the cut surface is formed.
19. The system of claim 18, wherein the polarization control unit is configured to control the polarization of the input light beam such that the polarization of the input light beam can be switched between two orthogonal polarizations.
20. The polarization control unit of claim 19, which can be a polarizer in case the input light beam is unpolarized, or it can be a half-wave plate, or a combination of half-wave and quarter-wave plates, or other polarization units.
21. The polarization control unit of claim 19, wherein the two orthogonal polarizations can be two orthogonal linear polarizations or two orthogonal circular polarizations, depending on the type of birefringent prism.
22. The system of claim 18, wherein the imaging module can be a single lens system or a multi-lens system.
23. The system of claim 18, wherein the data acquisition module can be a CCD camera or a CMOS camera.
24. A second system for measuring the shear displacement S of a birefringent device, comprising:
a light irradiation module that outputs a focused light beam;
the birefringent device having an s-shear plane when the beam is focused;
a switchable polarizing filter;
an imaging module;
and a data acquisition module placed at a position where an image of the cut surface is formed.
25. The system of claim 24, wherein the switchable polarizing filter is used to select one of two orthogonally polarized light components passing through the filter.
26. The system of claim 24, wherein the switchable polarizing filter can be a linear polarizer or a circular polarizing filter, depending on the type of two orthogonal polarizations.
27. The system of claim 24, wherein the two orthogonal polarizations can be two orthogonal linear polarizations or two orthogonal circular polarizations, depending on the type of birefringent device.
28. The system of claim 24, wherein the imaging module can be a single lens system or a multi-lens system.
29. The system of claim 24, wherein the data acquisition module can be a CCD camera or a CMOS camera.
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1786662A (en) * | 2005-12-21 | 2006-06-14 | 哈尔滨工业大学 | Double hole type measural apparatus for scattering angle of laser beam |
| CN201096526Y (en) * | 2007-08-22 | 2008-08-06 | 中国科学院上海光学精密机械研究所 | Phase-shifting lateral shearing interferometer |
| JP3161788U (en) * | 2009-12-22 | 2010-08-12 | 臺灣利他股▲分▼有限公司 | Ceramic heat sink structure |
| CN102981268A (en) * | 2012-11-23 | 2013-03-20 | 西安交通大学 | Birefringent crystal beam splitter with adjustable lateral shearing quantity |
| CN103424196A (en) * | 2013-08-09 | 2013-12-04 | 中国科学院上海光学精密机械研究所 | Double-plate polarization phase-shifting shearing interferometer |
| CN103424195A (en) * | 2013-08-09 | 2013-12-04 | 中国科学院上海光学精密机械研究所 | Phase-shifting shearing interferometer by rotating crystal plate |
| WO2015052715A1 (en) * | 2013-10-07 | 2015-04-16 | Ramot At Tel-Aviv University Ltd. | Polarization-independent differential interference contrast optical arrangement |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010002846A (en) * | 2008-06-23 | 2010-01-07 | Univ Nagoya | Multiple image polarization element group |
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Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1786662A (en) * | 2005-12-21 | 2006-06-14 | 哈尔滨工业大学 | Double hole type measural apparatus for scattering angle of laser beam |
| CN201096526Y (en) * | 2007-08-22 | 2008-08-06 | 中国科学院上海光学精密机械研究所 | Phase-shifting lateral shearing interferometer |
| JP3161788U (en) * | 2009-12-22 | 2010-08-12 | 臺灣利他股▲分▼有限公司 | Ceramic heat sink structure |
| CN102981268A (en) * | 2012-11-23 | 2013-03-20 | 西安交通大学 | Birefringent crystal beam splitter with adjustable lateral shearing quantity |
| CN103424196A (en) * | 2013-08-09 | 2013-12-04 | 中国科学院上海光学精密机械研究所 | Double-plate polarization phase-shifting shearing interferometer |
| CN103424195A (en) * | 2013-08-09 | 2013-12-04 | 中国科学院上海光学精密机械研究所 | Phase-shifting shearing interferometer by rotating crystal plate |
| WO2015052715A1 (en) * | 2013-10-07 | 2015-04-16 | Ramot At Tel-Aviv University Ltd. | Polarization-independent differential interference contrast optical arrangement |
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