CN112207376B - Array tubular anode assisted laser electrochemical composite processing method and device based on variable electric field - Google Patents
Array tubular anode assisted laser electrochemical composite processing method and device based on variable electric field Download PDFInfo
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- CN112207376B CN112207376B CN202011071557.6A CN202011071557A CN112207376B CN 112207376 B CN112207376 B CN 112207376B CN 202011071557 A CN202011071557 A CN 202011071557A CN 112207376 B CN112207376 B CN 112207376B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/0093—Working by laser beam, e.g. welding, cutting or boring combined with mechanical machining or metal-working covered by other subclasses than B23K
Abstract
The invention discloses a method and a device for array tubular anode assisted laser electrochemical composite machining based on a variable electric field, and relates to the field of micro machining in a special machining technology. The method of the invention is that an electrochemical loop is formed between the tubular anode and the cathode substrate, the input voltage of the single tubular anode can be adjusted by the voltage adjusting controller, the laser enters the tubular anodes distributed in an array through the liquid crystal mask plate, and the liquid crystal mask plate is controlled by the computer to display the gray image, so that the outline of the laser reaching the processing deposition area is the same as the image on the liquid crystal mask plate. The electro-deposition rate is greatly accelerated in the laser irradiation micro-area due to the thermal effect and the force effect of the laser. The processing of the whole micro-component or the micro-structure of the array is realized by the array of the tubular anodes. The method is suitable for processing the micro parts with complex continuous structures or array micro structures, and is applied to the processing fields of micro manufacturing and the like such as micro machinery, micro electro mechanical systems, metal templates, medical treatment, electronics, aerospace and the like.
Description
Technical Field
The invention relates to the field of micro-machining in a special machining technology, in particular to a variable electric field-based array tubular anode assisted laser electrochemical composite machining method which is suitable for machining micro parts or array micro structures containing complex continuous structures.
Background
With the development of micro-electro-mechanical systems (MEMS), attention has been paid to microfabrication techniques for fabricating minute complex parts that can satisfy specific functions and requirements of the MEMS. The micro electro-deposition processing technology has the advantages of high manufacturing precision, good process flexibility, low cost and the like, but the development and the application of the micro electro-deposition processing technology are restricted due to the defects of low deposition rate, poor deposition localization, poor deposition quality and the like. The laser electrochemical photoelectric composite deposition technology is a multi-energy field composite deposition technology which effectively combines laser energy and electrochemical energy, and can improve deposition rate, deposition localization and deposition quality.
The micro electro-deposition technology developed nowadays shows extraordinary manufacturing capability and ultrahigh freedom, and the forming precision and the surface precision are also quite considerable, but the technology has the disadvantages of excessively complex operation process, tedious and tedious process flow (such as the need of preparing masks for many times), high equipment precision standard requirements (mask alignment and positioning precision and shape precision of processing), and the like, and simultaneously has the technical problems of low deposition speed, poor compactness of a deposition piece, difficult processing of a micro part or an array micro structure with a complicated continuous structure, and the like.
In order to solve these problems, many scholars at home and abroad have made extensive and intensive studies on the micro electro deposition process, and have proposed various micro electro deposition processes.
Chinese patent 'a regular polygon cylinder anode and a method for preparing a large-area metal microstructure by electrodeposition', provides a method for preparing a large-area metal microstructure by the regular polygon cylinder anode and the electrodeposition. Firstly, the regular polygon cylinder anode is composed of a cylinder anode with a regular polygon cross section and an electric insulation mask with a hollow pattern array, and patterns need to be customized again when different microstructures are manufactured. Secondly, to realize the modular forming of the large-area metal microstructure, the microstructure is obtained at different positions by rotating the regular polygon cylinder anode clockwise or anticlockwise, and multiple rows of microstructure arrays are copied on the surfaces of different masks, so that the requirement on the positioning accuracy of the polygon anode is extremely high and is not easy to guarantee.
The Chinese patent 'three-dimensional microstructure electroforming method and device' limits the area where electrodeposition occurs by using a shielding anode diaphragm. In a non-electrodeposition time period, the anode diaphragm plate and the cathode are required to be shielded from relative movement, relative displacement in the x direction and the y direction is determined according to the outline shape of a part, and the positioning precision requirement is extremely high and is not easy to guarantee.
Disclosure of Invention
Aiming at the defects in the prior art, the invention provides a variable electric field-based array tubular anode assisted laser electrochemical composite processing method.
By utilizing the principle of laser-assisted micro electro-deposition, an array tubular anode is used, a laser irradiation pattern is controlled by a liquid crystal mask, and the gray levels of different areas of the liquid crystal mask pattern are different, so that the laser intensity finally irradiated to a deposition area is modulated. Laser penetrates through the liquid crystal mask and then irradiates the micro-area of the processing surface through the optical fiber in the array tubular anode; the voltage of the single tubular anode can be adjusted in real time according to the gray level of the liquid crystal mask, so that the electric field distribution of a processing area is changed, and the efficient combination of laser energy and an electrochemical system is ensured. Due to the thermal effect and the force effect of the combination of the laser and the electrochemistry, the electrodeposition processing of the whole workpiece is realized through the array tubular anode.
The invention also provides an array tubular anode assisted laser electrochemical composite processing device based on the variable electric field, and the device can be used for realizing the method.
The present invention achieves the above-described object by the following technical means.
An array tubular anode assisted laser electrochemical composite processing method based on a variable electric field is characterized in that an electrochemical loop is formed between a tubular anode and a cathode substrate, the input voltage of a single tubular anode can be adjusted through a voltage adjusting controller, laser penetrates through a liquid crystal mask plate to enter the tubular anodes distributed in an array, and a liquid crystal mask plate is controlled by a computer to display gray images, so that the outline of a processing deposition area reached by the laser is the same as the image on the liquid crystal mask plate.
Further, the method comprises the following steps:
step one), placing a cathode substrate in a working groove, and connecting a circuit; the computer control system adjusts the positions of the numerical control platform and the X-Y-Z workbench, and the electrochemical pulse power supply and the circulating liquid changing system are turned on after electroplating liquid is poured;
step two), controlling a liquid crystal mask plate to display a gray image through a computer, enabling laser to penetrate through the liquid crystal mask plate to enter tubular anodes arranged in an array mode, and irradiating the tubular anodes on a cathode substrate to enable the outline of a processing deposition area where the laser reaches to be the same as the image on the liquid crystal mask plate;
step three), according to the gray level image of the liquid crystal mask, voltage regulation of each tubular anode is realized by driving a voltage regulation controller through a computer, so that a variable electric field is formed between the tubular anode and the cathode substrate of the array;
and step four), irradiating the surface of the cathode substrate by laser through the optical fiber in the array tubular anode to start rapid deposition.
Further, the liquid crystal mask plate in the second step) is a pin potential control type transmission type Twisted Nematic (TN) type flat-panel liquid crystal display.
Further, the tubular anode in the second step) comprises a metal conduit, an insulating layer and an optical fiber; the optical fiber is arranged in the metal conduit; an insulating layer is arranged on the wall surface of the outer side surface of the metal conduit, a second focusing lens is arranged above the tubular anode, and the second focusing lens focuses parallel light emitted by the beam expanding lens and irradiates the parallel light onto the cathode substrate through the tubular anode.
Further, the electroplating solution in the step one) is an acidic solution, and the temperature is 30-60 ℃.
Further, the voltage of the tubular anode in the step three) is adjusted according to the gray level of the liquid crystal mask, so that the voltage value of the area with lower gray level is high; and in the step four), the laser penetrates through the tubular anode to irradiate to the cathode substrate, the laser energy of the area with lower gray scale of the liquid crystal mask plate is strong, the voltage of the tubular anode is high, and the deposition rate is higher.
Further, the deposition rate of the cathode substrate can be controlled by changing the voltage of the tubular anode and the parameters of the pulse laser through a voltage regulation controller.
A device for array tubular anode assisted laser electrochemical composite processing based on a variable electric field comprises a workpiece processing system, a control system and a circulating liquid changing system;
the workpiece processing system comprises a laser processing system and an electrochemical processing system; the laser processing system comprises a pulse laser, a reflector, a beam expanding system and a numerical control platform; laser beams emitted by the pulse laser are reflected by a reflector, pass through a beam expanding system, enter an optical fiber 1104 in the tubular anode through a liquid crystal mask, and then pass through the bottom of the tubular anode to be irradiated on a processing surface; the reflector is arranged in the horizontal direction of the pulse laser, and the beam expanding system is arranged right below the reflector; a special working groove is arranged on the numerical control platform; the electrochemical processing system comprises an electrochemical pulse power supply, an ammeter, an array tubular anode and a cathode substrate; the cathode substrate is connected with the negative electrode of the electrochemical pulse power supply; the voltage regulation controller is connected with the anode of the electrochemical pulse power supply; the voltage regulation controller is connected with the array tubular anode, and the tubular anode is vertically placed in the solution; the ammeter is connected in series in the electrochemical loop.
The control system comprises a computer, a control cabinet and an X-Y-Z workbench; the computer is connected with the control cabinet through a connecting port; the control cabinet is connected with the pulse laser, the liquid crystal mask and the X-Y-Z workbench.
The circulating liquid changing system pumps new electroplating liquid to the working tank through the micro pump, and simultaneously conveys the original electroplating liquid back to the liquid changing tank through the filter and the overflow valve.
Furthermore, the wavelength of the pulse laser is 750nm to 850nm, and the power density is 100W/cm to 500W/cm2(ii) a The voltage of the electrochemical pulse power supply is 0-50V, the frequency is 1 kHz-2 MHz, and the duty ratio is 0-100%.
Further, the beam expanding system comprises a first focusing lens 801, a homogenizer 802 and a collimating beam expander 803; laser beams emitted by the laser are reflected by the reflecting mirror, focused by the first focusing lens 801, passed through the homogenizer 802, and emitted as parallel light by the collimating beam expanding lens 803.
The invention has the technical advantages and beneficial effects that:
1. aiming at the characteristic that after laser passes through a gray level image of a liquid crystal mask, different tubular anodes irradiate micro-areas with different laser energies, the voltage of a single tubular anode is adjusted through a computer driving voltage adjusting controller according to the gray level of the image of the liquid crystal mask, so that a variable electric field is formed between the tubular anodes of the array and a cathode substrate, the electric field distribution of a processing area is changed, the multi-dimensional energy composition in the processing area is realized, the efficient composition of the laser energy and an electrochemical system is ensured, the electric field intensity of the area with high laser energy is also high, and the deposition rate is faster.
2. Aiming at the processing of micro parts with complex continuous structures or array micro structures, the processing efficiency is improved through the array tubular anode, and simultaneously, the requirement on multiple positioning on the horizontal plane is greatly reduced.
3. Aiming at the problems of difficult-to-machine materials and high-precision manufacturing, the array tubular anode auxiliary laser electrochemical composite processing method adopting the variable electric field provides a new design idea and method for the difficult-to-machine materials and the high-precision manufacturing.
4. Aiming at the problem that the shape and height of a processed workpiece are limited by a laser-assisted single anode electrodeposition method, the method combines laser electrodeposition and a variable electric field, and can manufacture a fine structure or a part with compact structure, any shape and height and low cost.
5. Aiming at the limitations of the electro-deposition processing on the height, thickness, shape and the like of parts and the problems of pockmarks and air holes of the deposited parts, the invention realizes the manufacture of any parts and different micro-sizes by changing the number of the array tubular anodes so as to meet the requirements of different structures; and simultaneously, a variable electric field and laser compounding are introduced, so that laser energy in the processing micro-area is efficiently compounded with an electrochemical system to manufacture a microstructure or a part with compact tissue, any shape and height.
6. Aiming at the characteristics of low electro-deposition processing rate, poor deposition quality and the like, laser-assisted electro-deposition is introduced, so that the electro-deposition rate is greatly increased, the deposition localization and the deposition quality are improved, and the bonding strength of a deposition layer is improved.
Drawings
Fig. 1 is a schematic structural diagram of an array tubular anode-assisted laser electrochemical hybrid machining device based on a variable electric field according to an embodiment of the present invention;
FIG. 2 is a schematic view of the beam expanding system of FIG. 1 according to the present invention;
FIG. 3 is a schematic view of the tubular anode according to the invention as referred to in FIG. 1;
FIG. 4 is a schematic illustration of the deposition of the laser-electrochemical composite energy field distribution between the tubular anode and cathode substrates of FIG. 1 according to the present invention.
The reference numbers are as follows:
1-a computer; 2-electrochemical pulse power supply; 3-an oscilloscope; 4-a motion control card; a 5-x-y-z three-axis table; 6-a pulsed laser; 7-a mirror; 8-a beam expanding lens; 801-a first focusing lens; an 802-homogenizer; 803-collimating beam expander; 9-a liquid crystal mask plate; 10-voltage regulation controller; 11-a tubular anode; 1101-a second focusing lens; 1102-an insulating layer; 1103-a metal conduit; 1104-an optical fiber; 12-deposition; 13-a cathode substrate; 14-a filter; 15-an overflow valve; 16-a liquid storage tank; 17-a micro pump; 18-a working tank; 19-electroplating solution; 20-ammeter.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are illustrative and intended to be illustrative of the invention and are not to be construed as limiting the invention.
In the description of the present invention, it is to be understood that the terms "central," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "axial," "radial," "vertical," "horizontal," "inner," "outer," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the present invention and for simplicity in description, and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and are not to be considered limiting. Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.
In the present invention, unless otherwise expressly specified or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
The following first describes in detail embodiments according to the present invention with reference to the accompanying drawings
With reference to fig. 1, a device for array tubular anode assisted laser electrochemical hybrid machining based on a variable electric field comprises a workpiece machining system, a control system and a circulating liquid changing system; the workpiece processing system comprises a laser processing system and an electrochemical processing system; the laser processing system comprises a pulse laser 6, a reflector 7 and a beam expanding system 8; laser beams emitted by the pulse laser 6 are reflected by a reflecting mirror 7, pass through a beam expanding system 8, enter optical fibers 1104 in tubular anodes 11 arranged in an array mode through a liquid crystal mask plate 9, and are irradiated on the processing surface of a cathode substrate 13; the reflector 7 is arranged in the horizontal direction of the pulse laser 6, and the beam expanding system 8 is arranged right below the reflector 4; a special working groove 18 is arranged on the numerical control platform 5; the electrochemical processing system comprises an electrochemical pulse power supply 2, an ammeter 20, an array tubular anode 11 and a cathode substrate 13; the cathode substrate 13 is connected with the negative electrode of the electrochemical pulse power supply 2, and the array tubular anode 11 is connected with the positive electrode of the electrochemical pulse power supply 2 and vertically placed in the electroplating solution 19; the ammeter 20 is connected in series in an electrochemical loop;
the control system comprises a computer 1, a control cabinet 4 and an X-Y-Z worktable 5; the computer 1 is connected with the control cabinet 4 through a connecting port; the control cabinet 4 is connected with the pulse laser 6, the X-Y-Z worktable 5 and the liquid crystal mask plate 9.
Wherein the wavelength of the pulse laser 6 is 750nm to 850nm, and the power density is 100W/cm to 500W/cm2(ii) a The voltage of the electrochemical pulse power supply 2 is 0-50V,the frequency is 1 kHz-2 MHz, and the duty ratio is 0-100%. The electroplating solution is an acidic solution, and the temperature is 30-60 ℃; the side surface of the array tubular anode is coated with an insulating layer; the tubular anode of the array is internally provided with an optical fiber 1104, and the diameter of the optical fiber 1104 is 1-5 mm; the formed variable electric field is formed between the array tubular anode and the cathode substrate by adjusting the voltage of the single tubular anode through a computer driving voltage adjusting controller according to the gray level of the liquid crystal mask image. The rate of deposition of the layer formed is controlled by the voltage of the electrochemical pulse power supply 2 and the parameters of the laser 6.
With reference to fig. 2 and 3, the beam expanding system 8 includes a first focusing lens 801, a homogenizer 802, and a collimating beam expander 803; the laser beam emitted by the pulse laser 6 is reflected by the reflecting mirror 7 to the first focusing lens 801 for focusing, then passes through the homogenizer 802, then passes through the collimating beam expander 803 to be emitted in parallel light to the second focusing lens 1101 above the tubular anode 11 for focusing, and the laser beam after being focused again is reflected by the optical fiber 1104 in the tubular anode 11 and then emitted from the bottom of the tubular anode 11 to form a laser energy field to be irradiated on the processing micro-area on the cathode substrate 13.
Referring to FIG. 4, a schematic diagram of deposition under the laser-electrochemical composite energy field distribution between the tubular anode and the cathode substrate is shown, and it can be seen from the figure that the voltage of each tubular anode 11 is controlled by the voltage regulating controller 10, so that U is formed1Highest voltage, U1The voltage on the two sides is gradually reduced, meanwhile, the gray level image of the liquid crystal mask plate 9 is adjusted according to the computer 1, it can be seen that the central laser energy field is strongest, the thickness of the deposit 12 at the middle position is thickest, and the deposit 12 is gradually thinned from the middle to the two sides according to the laser intensity and the electric field intensity.
A method for array tubular anode assisted laser electrochemical composite processing based on a variable electric field comprises the following steps:
adjusting the numerical control platform 4 and the X-Y-Z worktable 5 to enable the tubular anodes 11 arranged in an array to be higher than the surface of the cathode substrate 13 and enable laser spots in the tubular anodes 11 arranged in an array to be irradiated;
the computer 1 is connected with the liquid crystal mask plate 9, so that the liquid crystal mask plate 9 displays a gray image, and the outline of the laser reaching the processing deposition area is approximately the same as that of the liquid crystal mask image;
after the circuit is connected, pouring electroplating solution 19, and turning on the electrochemical pulse power supply 2 and the circulating solution changing system;
according to the gray image of the liquid crystal mask 9, the voltage adjusting controller 10 is driven by the computer 1 to realize the voltage adjustment of each tubular anode 11, so that a variable electric field is formed between the tubular anodes 11 and the cathode substrate 13 of the array.
According to the formation of the variable electric field, the multi-dimensional energy field recombination in the processing area is realized, the efficient recombination of the laser energy and an electrochemical system is ensured, and the processing of a micro part or an array micro structure with a complex structure is completed.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention, and that variations, modifications, substitutions and alterations can be made in the above embodiments by those of ordinary skill in the art without departing from the principle and spirit of the present invention.
Claims (10)
1. A method for auxiliary laser electrochemical composite processing of array tubular anodes based on a variable electric field is characterized in that an electrochemical loop is formed between a tubular anode (11) and a cathode substrate (13), the input voltage of a single tubular anode (11) can be adjusted through a voltage adjusting controller (10), laser enters the tubular anodes (11) distributed in an array through a liquid crystal mask plate (9), a liquid crystal mask plate (9) is controlled by a computer (1) to display gray images, the voltage adjusting controller (10) is driven by the computer (1) according to the gray images of the liquid crystal mask plate (9), voltage adjustment of the tubular anode (11) is achieved, the voltage value of an area with lower gray is high, and the variable electric field is formed between the tubular anode (11) distributed in the array and the cathode substrate (13); the outline of the laser reaching the processing deposition area is the same as the image on the liquid crystal mask plate (9).
2. The method for the variable electric field based array tubular anode assisted laser electrochemical machining composite according to claim 1, characterized by comprising the following steps:
step one), placing a cathode substrate (13) in a working groove (18) and connecting a circuit; the computer (1) adjusts the position of the X-Y-Z worktable (5) through the control cabinet (4), and the electrochemical pulse power supply (2) and the circulating liquid changing system are turned on after electroplating liquid (19) is poured;
controlling a liquid crystal mask plate (9) to display a gray image through a computer (1), enabling laser to penetrate through the liquid crystal mask plate (9) to enter tubular anodes (11) arranged in an array mode, and irradiating the tubular anodes on a cathode substrate (13) to enable the outline of a processing and depositing area where the laser reaches to be the same as the image on the liquid crystal mask plate (9);
thirdly), according to the gray level image of the liquid crystal mask plate (9), the voltage regulation controller (10) is driven by the computer (1) to realize the voltage regulation of each tubular anode (11), so that a variable electric field is formed between the tubular anodes (11) and the cathode substrate (13) of the array;
and step four), the laser penetrates through the optical fiber (1104) in the tubular anode (11) of the array, and the surface of the cathode substrate (13) is irradiated to start rapid deposition.
3. The method for the variable electric field based array tubular anode assisted laser electrochemical composite processing according to claim 2, wherein the liquid crystal mask (9) in the second step) is a pin potential controlled transmissive twisted nematic flat panel liquid crystal display.
4. The method for laser-assisted electrochemical machining based on the array tubular anode of the variable electric field as claimed in claim 2, wherein the tubular anode (11) in the second step) comprises a metal conduit (1103), an insulating layer (1102) and an optical fiber (1104); the optical fiber (1104) is disposed within a metal conduit (1103); an insulating layer (1102) is arranged on the outer side wall surface of the metal conduit (1103), a second focusing lens (1101) is arranged above the tubular anode (11), and parallel light emitted by the beam expanding lens (8) is focused by the second focusing lens (1101) and then is irradiated onto the cathode substrate (13) through the tubular anode (11).
5. The method for laser-electrochemical hybrid machining with the tubular anode assistance based on the variable electric field as claimed in claim 2, wherein the electroplating solution (19) in the step one) is an acidic solution, and the temperature is 30 ℃ to 60 ℃.
6. The method for array tubular anode assisted laser electrochemical machining based on the variable electric field according to claim 2, characterized in that in the third step, the voltage of the tubular anode (11) is adjusted according to the gray scale of the liquid crystal mask (9), so that the voltage value of the area with lower gray scale is high; in the fourth step), the laser penetrates through the tubular anode (11) to irradiate the cathode substrate (13), the laser energy of the area with lower gray scale of the liquid crystal mask plate (9) is strong, the voltage of the tubular anode (11) is also high, and the deposition rate is faster.
7. The method for variable electric field based array tubular anode assisted laser electrochemical machining according to claim 1, characterized in that the rate of deposit (12) formation of the cathode substrate (13) can be controlled by changing the voltage of the tubular anode (11) and the parameters of the pulsed laser (6) through a voltage regulation controller (10).
8. A device for array tubular anode assisted laser electrochemical composite machining based on a variable electric field is characterized by comprising a workpiece machining system, a control system and a circulating liquid changing system;
the workpiece processing system comprises a laser processing system and an electrochemical processing system; the laser processing system comprises a pulse laser (6), a reflector (7), a beam expanding system (8) and an X-Y-Z workbench (5); laser beams emitted by the pulse laser (6) are reflected by the reflector (7), pass through the beam expanding system (8), penetrate through the liquid crystal mask plate (9), enter the optical fiber (1104) in the tubular anode (11), and then penetrate through the bottom of the tubular anode (11) to be irradiated on the processing surface; the reflector (7) is arranged in the horizontal direction of the pulse laser (6), and the beam expanding system (8) is arranged right below the reflector (7); a working groove (18) is arranged on the X-Y-Z working table (5); the electrochemical machining system comprises an electrochemical pulse power supply (2), an ammeter (20), an array tubular anode (11) and a cathode substrate (13); the cathode substrate (13) is connected with the negative electrode of the electrochemical pulse power supply (2); the voltage regulation controller (10) is connected with the anode of the electrochemical pulse power supply (2); the voltage regulation controller (10) is connected with the array tubular anode (11), and the tubular anode (11) is vertically placed in the solution; the ammeter (20) is connected in series in an electrochemical loop;
the control system comprises a computer (1) and a control cabinet (4); the computer (1) is connected with the control cabinet (4) through a connecting port; the control cabinet (4) is connected with the pulse laser (6), the liquid crystal mask plate (9) and the X-Y-Z workbench (5);
the circulating liquid changing system pumps new electroplating liquid to a working tank (18) through a micro pump (17), and simultaneously conveys the original electroplating liquid (19) back to the liquid changing tank through a filter (14) and an overflow valve (15).
9. The device for the laser-assisted electrochemical machining with tubular anodes based on the variable electric field as claimed in claim 8, wherein the wavelength of the pulse laser (6) is 750nm to 850nm, and a power density of 100 to 500W/cm2(ii) a The voltage of the electrochemical pulse power supply (2) is 0-50V, the frequency is 1 kHz-2 MHz, and the duty ratio is 0-100%.
10. The device for variable electric field based array tubular anode assisted laser electrochemical machining composite as claimed in claim 8, wherein the beam expanding system (8) comprises a first focusing lens (801), a homogenizer (802) and a collimating beam expander lens (803); laser beams emitted by the laser are reflected by the reflecting mirror (7), focused by the first focusing lens (801), passed through the homogenizer (802), and emitted as parallel light by the collimating beam expanding lens (803).
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