CN112198177A - In-situ light field sample rod of tiltable sample - Google Patents
In-situ light field sample rod of tiltable sample Download PDFInfo
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- CN112198177A CN112198177A CN202010908388.0A CN202010908388A CN112198177A CN 112198177 A CN112198177 A CN 112198177A CN 202010908388 A CN202010908388 A CN 202010908388A CN 112198177 A CN112198177 A CN 112198177A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G01N23/20008—Constructional details of analysers, e.g. characterised by X-ray source, detector or optical system; Accessories therefor; Preparing specimens therefor
- G01N23/20025—Sample holders or supports therefor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
- G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
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- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Abstract
The invention discloses an in-situ light field sample rod of a tiltable sample, which comprises a rod head, a sample rod and a hand grab handle, wherein the rod head is arranged at one end of the sample rod, the hand grab handle is sleeved at the other end of the sample rod, the rod head comprises a U-shaped frame and a micro-motion probe assembly, the micro-motion probe assembly is connected to the end part of the sample rod, and the U-shaped frame is connected to the sample rod. The invention controls the piezoelectric ceramics to move by the inverse piezoelectric principle, and then amplifies the micro displacement of the piezoelectric ceramics by utilizing the micro-motion probe component fixed on the piezoelectric ceramics by the resonance principle, thereby achieving the purpose of moving the probe, enabling the probe to be directly dipped with the nano wire for in-situ test, further enabling the adsorbed nano wire to receive light source irradiation at different angles, and accurately researching the influence of an optical field on the structural components of the sample; no damage to the sample, practicality, convenience and accurate adjustment.
Description
Technical Field
The invention relates to the technical field of electron microscope in-situ, in particular to an in-situ light field sample rod of a tiltable sample.
Background
The transmission electron microscope is a powerful tool for representing the external appearance of a material, can realize high-precision nano-machining and performance testing, and deeply observes lattice defects inside the material. With the continuous maturation and development of in situ techniques, researchers have combined in situ sample rods with transmission electron microscopes to apply different types of external fields to the specimen, such as: dynamic observations of the force field, thermal field, optical field, and the like are made to further study the internal structure of the semiconductor device. However, since the sample rod needs to be placed in the vacuum chamber of the transmission electron microscope, the procedure of placing and taking out the sample is relatively complicated, and the size of the sample is limited to some extent. Meanwhile, physical characteristics of a material or a device can be reflected due to optical properties. For example, the light emission characteristics can represent the energy level characteristics of the semiconductor material, and the fluorescence spectrum can highlight the position and the type of a specific element.
In-situ optical field experiments are of great significance to the research of semiconductor devices or materials, but the application of in-situ optical fields has technical challenges. At present, the mainstream method is to guide the optical signal out of the transmission electron microscope through an optical fiber or a light guide tube and analyze the optical signal by using a spectrometer, but the testing device has the defects of more complicated steps, higher cost and higher technical difficulty. Therefore, it is highly desirable to find a low cost, non-destructive in situ optical field application technique.
Disclosure of Invention
The invention aims to provide an in-situ light field sample rod of a tiltable sample, which solves the problems in the prior art, and enables an in-situ light field experiment to be simple in operation, free of sample damage and accurate in adjustment.
In order to achieve the purpose, the invention provides the following scheme:
the invention provides an in-situ light field sample rod of a tiltable sample, which comprises a rod head, a sample rod and a hand grab handle, wherein the rod head is arranged at one end of the sample rod, the hand grab handle is sleeved at the other end of the sample rod, the rod head comprises a U-shaped frame and a micro-motion probe assembly, the micro-motion probe assembly is connected to the end part of the sample rod, the U-shaped frame is detachably connected to the sample rod, and the micro-motion probe assembly is positioned in the U-shaped frame.
Preferably, a plurality of filling cavities are detachably arranged on the U-shaped frame, the filling cavities are made of transparent silicon carbide, and different types of fluorescent powder are arranged in each filling cavity.
Preferably, the top and the two sides of the U-shaped frame are provided with the packing cavities, the packing cavities are cuboids, one side of each packing cavity is provided with a stud, the studs are connected with threaded holes in the U-shaped frame, and the micro-motion probe assembly is located in a space surrounded by the three packing cavities.
Preferably, the micro-motion probe assembly comprises a probe, a copper cap, a micro-motion amplification mechanism, piezoelectric ceramics and a fixed column, the probe is arranged on the small end face of the copper cap, the micro-motion amplification mechanism is arranged between the large end face of the copper cap and the piezoelectric ceramics, the piezoelectric ceramics is arranged on the fixed column, and the fixed column is arranged at the end part of the sample rod.
Preferably, the micro-motion amplification mechanism comprises clamping jaws and a control ball, a plurality of clamping jaws are uniformly distributed on the large end face of the copper cap, the control ball is arranged on the piezoelectric ceramic in a rotating mode, and the clamping jaws clamp the control ball.
Preferably, the control ball is connected with a ball body through a connecting rod, the ball body is nested in the piezoelectric ceramic, the connecting rod is rotatably connected with the piezoelectric ceramic, and a gap is formed between the ball body and the piezoelectric ceramic.
Preferably, the jaw is connected to the copper cap through a thread.
Preferably, the probe is detachably arranged on the copper cap.
Compared with the prior art, the invention has the following technical effects:
the invention controls the piezoelectric ceramics to move by the inverse piezoelectric principle, and then amplifies the micro displacement of the piezoelectric ceramics by utilizing the micro-motion probe component fixed on the piezoelectric ceramics by the resonance principle, thereby achieving the purpose of moving the probe, enabling the probe to be directly dipped with the nano wire for in-situ test, further enabling the adsorbed nano wire to receive light source irradiation at different angles, and accurately researching the influence of an optical field on the structural components of the sample; no damage to the sample, practicality, convenience and accurate adjustment.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.
FIG. 1 is a schematic structural diagram of a rod head in an in-situ optical field sample rod for a tiltable sample according to the present invention;
FIG. 2 is a schematic structural diagram of a control sphere in an in-situ light field sample rod of a tiltable sample according to the present invention;
FIG. 3 is a schematic structural diagram of an in-situ light field sample rod of a tiltable sample according to the present invention;
FIG. 4 is a schematic structural diagram of a filling cavity in an in-situ optical field sample rod of a tiltable sample according to the present invention;
wherein: 1-rod head, 2-sample rod, 3-grab handle, 4-claw, 5-control ball, 6-piezoelectric ceramic, 7-fixed column, 8-stud, 9-copper cap, 10-U-shaped frame, 11-filling cavity and 12-probe.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without inventive effort based on the embodiments of the present invention, are within the scope of the present invention.
The invention aims to provide an in-situ light field sample rod of a tiltable sample, which solves the problems in the prior art, and enables in-situ light field experiments to be simple in operation, free of sample damage and accurate in adjustment.
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in further detail below.
As shown in fig. 1 to 4: the embodiment provides an normal position light field sample rod 2 of tilting sample, including pole head 1, sample rod 2 and grab handle 3, the one end of sample rod 2 is provided with pole head 1, another pot head of sample rod 2 is equipped with grab handle 3, pole head 1 includes U type frame 10 and fine motion probe subassembly, the tip in sample rod 2 is connected to the fine motion probe subassembly, U type frame 10 is connected on sample rod 2, U type frame 10 makes the piece for an organic whole with sample rod 2 in this embodiment, the fine motion probe subassembly is located U type frame 10.
The U-shaped frame 10 is detachably provided with a packing cavity 11, the packing cavity 11 is made of transparent silicon carbide, and fluorescent powder of different types is filled in the packing cavity 11 during manufacturing, so that a completely sealed cavity is formed. The top and both sides of U type frame 10 all can be dismantled and be provided with packing chamber 11, and a side of packing chamber 11 passes through the threaded hole connection on double-screw bolt 8 and the U type frame 10, and the fine motion probe subassembly is located the space that three packing chamber 11 enclose. The U-shaped frame 10 with the filler cavity 11 in the embodiment has the characteristics of no interference, high sealing performance, high hardness, transparency, detachability and the like, and corresponding fluorescent powder is filled in the filler cavity 11 of the U-shaped frame, so that a sample can stably absorb light released by the fluorescent powder, the damage of an optical field to a nanowire sample can be reduced to the greatest extent, and illumination with different wavelengths can be realized by selecting different fluorescent powder; and the light intensity of the fluorescent powder is weaker, so that the sample can be prevented from being stimulated by strong light to the maximum extent, and the integrity of the sample is ensured.
The micro-motion probe assembly comprises a probe 12, a copper cap 9, a micro-motion amplification mechanism, piezoelectric ceramics 6 and a fixed column 7, wherein the probe 12 is arranged on the small end face of the copper cap 9, the micro-motion amplification mechanism is arranged between the large end face of the copper cap 9 and the piezoelectric ceramics 6, the piezoelectric ceramics 6 is arranged on the fixed column 7 and is connected with electricity, the fixed column 7 is arranged at the end part of the sample rod 2, and the piezoelectric ceramics 6 penetrates through the fixed column 7 and the sample rod 2 through a lead to be connected with an adjustable external power supply. The jack catch 4 is connected to the copper cap 9 through threads, so that the assembly and disassembly are convenient. The probe 12 is detachably arranged on the copper cap 9, and in the embodiment, the probe 12 is conveniently taken down to dip the sample through threaded connection or plug connection.
The micro-motion amplification mechanism comprises clamping jaws 4 and control balls 5, a plurality of clamping jaws 4 are uniformly distributed on the large end face of the copper cap 9, the control balls 5 are rotatably arranged on the piezoelectric ceramics 6, and the clamping jaws 4 clamp the control balls 5. The control ball 5 is connected with a ball body through a connecting rod, the ball body is nested in the piezoelectric ceramic 6, the same resonance frequency as the piezoelectric ceramic 6 is achieved, and the micro displacement is amplified through the resonance principle. The connecting rod is rotationally connected with the piezoelectric ceramics 6, and a gap is arranged between the ball body and the piezoelectric ceramics 6. The probe 12 correspondingly moves under the action of the piezoelectric ceramic 6, so that the illumination of the sample at different angles is realized, and the in-situ light field experiment is carried out.
When the embodiment is used, the probe 12 is firstly used for dipping the adsorption nanowire sample, the fluorescent powder filled with a specific model is filled into the filling cavity 11, the fluorescent powder is fixed on the U-shaped frame 10 through the stud 8, the sample rod 2 is then placed into the transmission electron microscopy instrument, the experimental observation position of the sample is selected, voltage is applied to the piezoelectric ceramic 6, the control ball 5 is moved, the clamping jaw 4 and the copper cap 9 are driven to amplify the micro movement of the piezoelectric ceramic 6, and the probe 12 is driven to move the sample. After the experiment, the sample rod 2 of the nanowire is manually moved out of the transmission electron microscope, the application of voltage to the piezoelectric ceramic 6 is stopped, the nanowire is released from the probe 12, and the prepared sample is adsorbed by using a vacuum suction pen and is placed in a small sealed box.
The principle and the implementation mode of the present invention are explained by applying specific examples in the present specification, and the above descriptions of the examples are only used to help understanding the method and the core idea of the present invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, the specific embodiments and the application range may be changed. In view of the above, the present disclosure should not be construed as limiting the invention.
Claims (8)
1. An in-situ light field sample rod of a tiltable sample, which is characterized in that: including pole head, sample pole and grab handle, the one end of sample pole is provided with the pole head, another pot head of sample pole is equipped with the grab handle, the pole head includes U type frame and fine motion probe subassembly, fine motion probe subassembly connect in the tip of sample pole, U type frame attach in on the sample pole, fine motion probe subassembly is located in the U type frame.
2. The in-situ light field sample holder of a tiltable sample according to claim 1, wherein: the U-shaped frame is detachably provided with a plurality of packing cavities, the packing cavities are made of transparent silicon carbide, and different types of fluorescent powder are arranged in each packing cavity.
3. The in-situ light field sample holder of a tiltable sample according to claim 1, wherein: the top and the both sides of U type frame all are provided with the packing chamber, the packing chamber is the cuboid and is provided with the double-screw bolt on one side, the double-screw bolt with screw hole on the U type frame is connected, fine motion probe subassembly is located three in the space that the packing chamber encloses.
4. The in-situ light field sample holder of a tiltable sample according to claim 1, wherein: the micro-motion probe assembly comprises a probe, a copper cap, a micro-motion amplification mechanism, piezoelectric ceramics and a fixed column, wherein the probe is arranged on the small end face of the copper cap, the micro-motion amplification mechanism is arranged between the large end face of the copper cap and the piezoelectric ceramics, the piezoelectric ceramics are arranged on the fixed column, and the fixed column is arranged at the end part of the sample rod.
5. The in-situ light field sample holder of a tiltable sample according to claim 4, wherein: the micro-motion amplification mechanism comprises clamping jaws and a control ball, a plurality of clamping jaws are uniformly distributed on the large end face of the copper cap, the control ball is arranged on the piezoelectric ceramic in a rotating mode, and the clamping jaws clamp the control ball.
6. The in-situ light field sample holder of a tiltable sample according to claim 5, wherein: the control ball is connected with a ball body through a connecting rod, the ball body is nested in the piezoelectric ceramics, the connecting rod is rotationally connected with the piezoelectric ceramics, and a gap is formed between the ball body and the piezoelectric ceramics.
7. The in-situ light field sample holder of a tiltable sample according to claim 4, wherein: the clamping jaw is connected to the copper cap through threads.
8. The in-situ light field sample holder of a tiltable sample according to claim 4, wherein: the probe is detachably arranged on the copper cap.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010908388.0A CN112198177B (en) | 2020-09-02 | 2020-09-02 | In-situ light field sample rod of tiltable sample |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202010908388.0A CN112198177B (en) | 2020-09-02 | 2020-09-02 | In-situ light field sample rod of tiltable sample |
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| CN112198177A true CN112198177A (en) | 2021-01-08 |
| CN112198177B CN112198177B (en) | 2021-12-17 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114324417A (en) * | 2021-12-29 | 2022-04-12 | 华东师范大学 | Device for reducing deformation of in-situ liquid cavity window in negative pressure environment |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114324417A (en) * | 2021-12-29 | 2022-04-12 | 华东师范大学 | Device for reducing deformation of in-situ liquid cavity window in negative pressure environment |
| CN114324417B (en) * | 2021-12-29 | 2024-02-13 | 华东师范大学 | Device for reducing deformation of in-situ liquid cavity window in negative pressure environment |
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| CN112198177B (en) | 2021-12-17 |
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