CN112179849A - Five-axis laser ultrasonic automatic detection equipment and method - Google Patents
Five-axis laser ultrasonic automatic detection equipment and method Download PDFInfo
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- CN112179849A CN112179849A CN202010981205.8A CN202010981205A CN112179849A CN 112179849 A CN112179849 A CN 112179849A CN 202010981205 A CN202010981205 A CN 202010981205A CN 112179849 A CN112179849 A CN 112179849A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/04—Analysing solids
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/26—Arrangements for orientation or scanning by relative movement of the head and the sensor
- G01N29/265—Arrangements for orientation or scanning by relative movement of the head and the sensor by moving the sensor relative to a stationary material
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
- G01N2021/1706—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids in solids
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Abstract
The invention discloses five-axis laser ultrasonic automatic detection equipment and a method, comprising a five-axis motion platform, an industrial personal computer, a pulse excitation laser, a laser ultrasonic signal receiver and a control unit; the excitation pulse laser, the laser ultrasonic signal receiver and the five-axis motion platform are all connected with an industrial personal computer; the five-axis motion platform comprises a swinging head with a translational degree of freedom in the z-axis direction, a translational degree of freedom in the y-axis direction and a rotational degree of freedom in the x-axis direction and a workbench with a translational degree of freedom in the x-axis direction and a rotational degree of freedom in the z-axis direction, the swinging head is positioned above the workbench, the pulse excitation laser comprises a laser emitting head, and the laser emitting head is arranged on the swinging head. According to the invention, the laser three-dimensional scanning path and the irradiation direction are adjusted through coordinated control of the swing head and the workbench, so that efficient and rapid laser ultrasonic automatic detection can be realized, and the laser ultrasonic detection efficiency and detection precision can be greatly improved.
Description
Technical Field
The invention belongs to the field of nondestructive testing, and particularly relates to five-axis laser ultrasonic automatic detection equipment and a method.
Background
Nondestructive testing is a method for evaluating structural integrity, continuity and reliability without destroying the usability of a tested object, and is widely used for testing various engineering structural members. The laser ultrasonic technology is a method for obtaining ultrasonic signals based on the principle of light interference by utilizing pulse laser beams to act on a detected piece to generate a thermoelastic effect and excite ultrasonic waves, and is a non-contact, high-precision and nondestructive ultrasonic nondestructive detection technology. The laser ultrasonic combines the advantages of high precision of ultrasonic detection and optical detection non-contact, and has the advantages of nanoscale high sensitivity and high detection bandwidth.
In order to improve the detection quality and efficiency and save manpower, it is necessary to carry out laser ultrasonic automatic detection. However, the existing laser ultrasonic detection system mostly adopts a mechanical arm and other modes to carry out automatic detection. In the detection mode, the detected object is often fixed, when a workpiece with a larger size, a complex structure and more curved surfaces is faced, due to the limitation of the size and the movement mode of the mechanical arm, a laser beam cannot irradiate all detection parts of the detected workpiece, the posture of the detected object needs to be changed by manual operation in the detection process, the detection efficiency and the detection precision are obviously reduced, and even the defect resolution is greatly reduced because the laser cannot be vertically irradiated on the surface of the workpiece all the time. If a plurality of mechanical arms are integrated for realizing the detection of large-size workpieces, the system development difficulty and the detection cost are increased by times. The existing laser ultrasonic automatic detection equipment has great defects in the aspects of automation level and detection efficiency, the detection accuracy is influenced, and the requirements of high efficiency, high precision, low cost and full automation of current engineering application cannot be met.
Disclosure of Invention
In order to solve the problems in the background art, the invention aims to provide five-axis laser ultrasonic automatic detection equipment and a five-axis laser ultrasonic automatic detection method, which realize the full automation of laser ultrasonic detection under the conditions of low cost and high precision, can detect large-size and complex-structure workpieces, do not need manual intervention in the detection process, and greatly improve the efficiency and the precision of defect detection.
In order to achieve the purpose, the invention adopts the following technical scheme:
a five-axis laser ultrasonic automatic detection device comprises a five-axis motion platform, an industrial personal computer, a pulse excitation laser, a laser ultrasonic signal receiver and a control unit; the excitation pulse laser, the laser ultrasonic signal receiver and the five-axis motion platform are all connected with an industrial personal computer;
the five-axis motion platform comprises a swinging head with a translational degree of freedom in the z-axis direction, a translational degree of freedom in the y-axis direction and a rotational degree of freedom in the x-axis direction and a workbench with a translational degree of freedom in the x-axis direction and a rotational degree of freedom in the z-axis direction, the swinging head is positioned above the workbench, the pulse excitation laser comprises a laser emitting head, and the laser emitting head is arranged on the swinging head.
The five-axis motion platform is further improved in that the five-axis motion platform further comprises a workbench rotating motor, a workbench sliding rail, a workbench linear motor, an upright post, a swing horizontal direction linear motor, a swing horizontal sliding rail, a swing vertical direction linear motor and a swing rotating motor; the workbench is arranged on a workbench sliding rail, a workbench rotating motor is arranged on the workbench, and a workbench linear motor is also arranged on the workbench sliding rail;
an upright post is arranged on one side of the workbench slide rail, and a linear motor with a swinging head in the vertical direction and a swinging head vertical slide rail are arranged on the upright post; the swing head and the swing head horizontal direction linear motor are arranged on a swing head horizontal sliding rail, and the swing head horizontal sliding rail is arranged on a swing head vertical sliding rail;
the swing head rotating motor is arranged on the swing head.
The invention has the further improvement that the workbench rotating motor can drive the workbench to rotate in the z-axis direction;
the workbench linear motor can drive the workbench to translate along the workbench sliding rail in the x-axis direction;
the swing head horizontal direction linear motor can drive the swing head to carry out y-axis direction translation along the swing head horizontal sliding rail;
the swinging head vertical direction linear motor can drive the swinging head horizontal slide rail to carry out z-axis direction translation along the swinging head vertical slide rail;
the head swinging rotating motor can drive the swinging head to rotate around the x-axis direction.
The pulse excitation laser further comprises a laser host, the laser host is arranged on one side of the five-axis motion platform, and the laser emitting head is connected with the laser host through an optical fiber.
The invention is further improved in that the three-dimensional space position between the swing head and the workbench is changed, so that the sub-nanosecond laser beam emitted by the laser emitting head is vertically irradiated on the detected part on the surface of the detected workpiece fixed on the workbench, and the ultrasonic wave is excited.
The invention has the further improvement that the laser ultrasonic signal receiver comprises a vibrating mirror, a reflecting mirror and a laser vibration meter; the laser beam emitted by the laser vibration meter is reflected into the vibrating mirror through the reflecting mirror, and the vibrating mirror enables the laser beam to irradiate at the detection position.
The invention is further improved in that the distance between the irradiation point of the excitation pulse laser and the irradiation point of the laser vibration meter is a certain distance.
The invention has the further improvement that the invention also comprises a control unit which is connected with a control unit power supply; the control unit comprises an excitation pulse laser controller, a five-axis motion platform controller and a signal acquisition controller; the excitation pulse laser controller is connected with the excitation pulse laser and is communicated with the industrial personal computer through an RS communication protocol; the five-axis motion platform controller is connected with the five-axis motion platform and is communicated with the industrial personal computer through an RS communication protocol; the signal acquisition controller is connected with the laser ultrasonic signal receiver and is communicated with the industrial personal computer through the SMA interface.
The invention is further improved in that the bottom of the slide rail of the workbench is provided with a supporting leg.
A five-axis laser ultrasonic automatic detection method is characterized in that a pulse excitation laser excites a pulse laser beam to vertically irradiate the surface of a detected workpiece fixed on a workbench to generate thermoelastic effect excitation ultrasonic waves; the laser ultrasonic signal receiver transmits a detection laser beam and receives an ultrasonic signal; scanning the surface of the detected workpiece by a pulse laser beam, and scanning laser ultrasonic signals of all detection points of the detected workpiece by the detection laser beam; and transmitting the ultrasonic signals collected by the laser ultrasonic signal receiver to an industrial personal computer, and processing the ultrasonic signals to obtain the defect information of the detected workpiece.
Compared with the prior art, the invention has the beneficial effects that:
(1) the five-axis laser ultrasonic automatic detection equipment provided by the invention adopts a five-axis motion platform with a swinging head and a workbench as a laser ultrasonic detection scanning platform, the emission head of an excitation pulse laser is fixed on the swinging head, a detected workpiece is placed on the workbench, and the swinging head and the workbench are mutually independent and work in cooperation, so that the omnibearing automatic scanning of a large-scale complex structure can be realized under the condition of no manual intervention, meanwhile, a laser beam can always vertically irradiate the surface of the workpiece, the energy efficiency and the signal resolution are ensured, and the detection efficiency and the defect identification precision are improved.
(2) The laser emitting head of the excitation pulse laser is fixed on the swinging head, and the irradiation direction and position of the excitation laser beam are controlled by controlling the movement posture of the swinging head; the laser ultrasonic signal receiver can control a laser beam light path; the excitation pulse laser and the laser ultrasonic signal receiver are independently controlled and adjustable, receive instructions of the industrial personal computer in a unified mode, and are convenient for flexibly adjusting the positions of excitation light beams and detection light beams, so that ideal ultrasonic waves can be excited and received aiming at workpieces with different structures and sizes and defects in different shapes and directions.
(3) The control unit controls the excitation pulse laser, the laser ultrasonic signal receiver and the five-axis motion platform, so that the detection track can be synchronously controlled, the position data and the ultrasonic signals of the detection point are collected, the unification and the correspondence of the detection data, the detection position and the detection time are ensured, and the reliability and the accuracy of subsequent data processing and defect analysis are improved.
Drawings
Fig. 1 is a schematic structural diagram of five-axis laser ultrasonic automated detection equipment.
Fig. 2 is a partial structural schematic diagram of a machine head of the five-axis laser ultrasonic automatic detection equipment.
FIG. 3 is a block diagram of a detection system of the five-axis laser ultrasonic automatic detection device.
The reference numbers are as follows:
1-swinging head, 2-laser emitting head, 3-vibrating mirror, 4-reflecting mirror, 5-laser vibration meter, 6-detected workpiece, 7-workbench, 8-workbench rotating motor, 9-workbench sliding rail, 10-supporting foot, 11-workbench linear motor, 12-upright post, 13-swinging head horizontal direction linear motor, 14-swinging head horizontal sliding rail, 15-swinging head vertical sliding rail, 16-swinging head vertical direction linear motor, 17-swinging head rotating motor, 18-industrial personal computer, 19-excitation pulse laser, 20-laser ultrasonic signal receiver, 21-control unit and 22-control unit power supply.
Detailed Description
The invention will be described in further detail below with reference to the accompanying drawings:
in order to improve the detection efficiency, the detection precision and the automatic detection level of laser ultrasonic detection, as shown in fig. 1, fig. 2 and fig. 3, the invention provides five-axis laser ultrasonic automatic detection equipment, which comprises a five-axis motion platform, an industrial personal computer 18, a pulse excitation laser 19, a laser ultrasonic signal receiver 20 and a control unit 21; the excitation pulse laser 19, the laser ultrasonic signal receiver 20 and the five-axis motion platform are all connected with a control unit 21, and the control unit 21 is connected with an industrial personal computer 18. The control unit 21 is connected to a control unit power supply 22 and is powered by the control unit power supply 22.
Referring to fig. 3, the excitation pulse laser 19 can emit pulse laser to irradiate the surface of the detected workpiece, generate a thermo-elastic effect and excite ultrasonic waves; the laser ultrasonic signal receiver 20 obtains an ultrasonic signal based on the principle of light interference; the five-axis motion platform can continuously adjust the beam emission direction emitted by the excitation pulse laser 19 and the spatial attitude of the detected workpiece, so that the pulse laser beam can always vertically irradiate the surface of the workpiece with any shape, and the energy loss caused by laser reflection is avoided; the control unit 21 is responsible for receiving and executing instructions of the industrial personal computer 18, so that each component completes corresponding actions; the industrial personal computer 18 is provided with a high-speed data acquisition board card which can receive, store, calculate and process the acquired ultrasonic signals; the software running in the industrial personal computer is Visual Studio 2015. The bandwidth of the high-speed data acquisition board card is 1.5GHz, the sampling rate is 1MS/s to 1.25GS/s, data transmission is carried out with an industrial personal computer through a PCIE2.0 protocol, and data transmission is carried out with the laser ultrasonic signal receiver 20 through a BNC interface.
The five-axis motion platform comprises a base, a swing head 1, a workbench 7, a workbench rotating motor 8, a workbench sliding rail 9, five-axis motion platform supporting legs 10, a workbench linear motor 11, a stand column 12, a swing head horizontal direction linear motor 13, a swing head horizontal sliding rail 14, a swing head vertical sliding rail 15, a swing head vertical direction linear motor 16 and a swing head rotating motor 17; the swing head 1 is positioned above the workbench 7,
the workbench 7 has a translational degree of freedom in the x-axis direction and a rotational degree of freedom in the z-axis direction, and the swing head has a translational degree of freedom in the z-axis direction, a translational degree of freedom in the y-axis direction and a rotational degree of freedom in the x-axis direction.
A workbench sliding rail 9 is arranged on the base, the workbench 7 is arranged on the workbench sliding rail 9, and a workbench rotating motor 8 is arranged on the workbench 7, is responsible for driving the workbench 7 to rotate in the z-axis direction and can translate along the workbench sliding rail 9 in the x-axis direction along with the workbench 7;
the base is provided with an upright post 12, the upright post 12 is positioned at one end of the workbench slide rail 9, the upright post 12 is provided with a swing horizontal slide rail 14 and a swing vertical slide rail 15, and the workbench linear motor 11 is arranged at the bottom of the upright post 12 and the tail end of the workbench slide rail 9 and is responsible for driving the workbench 7 to move horizontally along the swing horizontal slide rail 14 in the x-axis direction;
the swing head 1 and the swing head horizontal direction linear motor 13 are arranged on a swing head horizontal sliding rail 14, and the swing head 1 can perform y-axis direction translation along the swing head horizontal sliding rail 14 under the driving of the swing head horizontal direction linear motor 13;
the swing vertical slide rail 15 and the swing vertical direction linear motor 16 are arranged on the upright post 12, and the swing vertical direction linear motor 16 is responsible for driving the swing horizontal slide rail 14, so that the swing horizontal slide rail 14 and the swing head 1 arranged on the swing horizontal slide rail 14 can perform z-axis direction translation along the swing vertical slide rail 15;
the swing head rotating motor 17 is mounted on the swing head 1 and is responsible for driving the swing head 1 to rotate around the x-axis direction, and the swing head rotating motor 17 can translate along the z-axis direction and the y-axis direction along with the swing head 1.
The supporting feet 10 are arranged at the bottom of the base and provide support for the equipment.
The laser emitted by the pulse excitation laser 19 is subnanosecond pulse laser; the pulse excitation laser 19 is arranged on the swing head 1, the pulse excitation laser 19 comprises a laser emitting head 2 and a laser host, the laser host is placed outside the five-axis motion platform, and the laser emitting head 2 is connected with the laser host through an optical fiber; the laser emitting head 2 is fixed on the swing head 1 and can move along with the swing head; the detected workpiece 6 is fixed on the workbench 7 and can move along with the workbench 7; the three-dimensional spatial position relationship between the swing head 1 and the workbench 7 is continuously changed, so that the laser beam emitted by the laser emitting head 2 fixed on the swing head 1 can continuously scan the detected workpiece 6 according to a preset path; meanwhile, the irradiation position and the irradiation direction of the laser beam are controlled, so that the laser beam emitted by the laser emitting head 2 can vertically irradiate the detected part on the surface of the detected workpiece 6, and the ultrasonic wave is excited.
The laser ultrasonic signal receiver 20 is arranged on the swing head 1 and comprises a vibrating mirror 3, a reflecting mirror 4 and a laser vibration meter 5; laser beams emitted by the laser vibration meter 5 are reflected into the vibration mirror 3 through the reflecting mirror 4, and the vibration mirror 3 can control a laser beam light path by controlling the angle between the internal lenses, so that the laser beams irradiate at a specific detection position. The detection laser beam and the excitation pulse laser beam do not interfere, the distance between the irradiation positions of the two laser beams is determined according to the propagation sound velocity of the workpiece 6 to be detected, and the judgment condition is that the defect reflected wave of the laser ultrasonic wave is not overlapped with the bottom wave.
The distance between the irradiation point of the excitation pulse laser 19 and the irradiation point of the laser vibration meter 5 needs to be a certain distance, and the distance is determined according to the condition that the defect reflection signal is not overlapped with the bottom wave signal.
The control unit 21 comprises an excitation pulse laser controller, a five-axis motion platform controller and a signal acquisition controller; the excitation pulse laser controller is connected with the excitation pulse laser 19 and is communicated with the industrial personal computer 18 through an RS485 communication protocol; the five-axis motion platform controller is connected with the five-axis motion platform and is communicated with the industrial personal computer 18 through an RS485 communication protocol; the signal acquisition controller is connected with the laser ultrasonic signal receiver 20 and is communicated with the industrial personal computer 18 through the SMA interface.
The industrial personal computer 18 provides a physical connection interface of the control unit 21 and a command program development and operation environment.
The industrial personal computer 18 sends instructions to each execution part through the control unit 21, so that the excitation pulse laser 19, the laser ultrasonic signal receiver 20 and the five-axis motion platform work cooperatively, all areas to be detected of the detected workpiece 6 are scanned, laser ultrasonic signal data are recorded and analyzed, and a laser ultrasonic detection task is completed.
The detected workpiece 6 is placed on the workbench 7 and can perform linear and rotary motion along with the workbench 7; the pulse excitation laser 19 and the laser ultrasonic signal receiver 20 are mounted on the swing head 1 and can move along with the swing head 1 to adjust the detection position.
The workbench 7 has a translational degree of freedom in the x-axis direction and a rotational degree of freedom in the z-axis direction, and is respectively controlled by a workbench linear motor 11 and a workbench rotating motor 8; the swing head 1 has a translational degree of freedom in the z-axis direction, a translational degree of freedom in the y-axis direction and a rotational degree of freedom in the x-axis direction, and is respectively controlled by a swing head rotating motor 17, a swing head vertical direction linear motor 16 and a swing head horizontal direction linear motor 13; and carrying out continuous motion according to a preset track.
The pulse excitation laser 19 generates pulse laser by a laser host, the pulse laser is emitted by the laser emitting head 2 and vertically irradiates the surface of the workpiece 6 to be detected, the surface of the workpiece 6 to be detected generates a thermoelastic effect under the action of the excitation laser, and a local temperature field and a stress field are generated, so that ultrasonic waves are formed and transmitted in the workpiece 6 to be detected in various forms such as surface waves, transverse waves, longitudinal waves and the like;
a laser vibration meter 5 in the laser ultrasonic signal receiver 20 emits a detection laser beam, the detection laser beam is reflected by a reflecting mirror 4 and a vibrating mirror 3 in sequence and vertically irradiates the surface of a detected workpiece 6, the detection laser beam is modulated with micro displacement generated by the action of ultrasonic waves, and the light beam is reflected back to the laser vibration meter 5 through an original light path to be processed to obtain a laser ultrasonic signal; in the detection process, the lens in the galvanometer 3 can deflect under control to adjust the irradiation position and the irradiation angle of the detection laser beam, and the detection part is replaced;
the five-axis laser ultrasonic automatic detection method comprises the following steps:
step 1: initializing a five-axis laser ultrasonic detection system. Resetting the swing head 1 and the workbench 7 to return to the initial coordinate position; the industrial personal computer 18, the pulse excitation laser 19, the laser ultrasonic signal receiver 20 and the control unit 21 are turned on, power is supplied, starting self-checking is completed, and all parts are in a standby state;
step 2: and installing the detected workpiece. The detected workpiece is arranged on the workbench 7, and the detected workpiece which can be stably placed on a plane can be directly and naturally placed on the workbench 7; for the detected workpiece with special requirements, the clamp is mounted on the workbench 7 after being clamped on the clamp.
And step 3: and carrying out laser ultrasonic detection and acquiring laser ultrasonic signals. The pulse excitation laser 19 excites a pulse laser beam to vertically irradiate the surface of the detected workpiece to generate thermoelastic effect excitation ultrasonic waves; the laser ultrasonic signal receiver 20 emits a detection laser beam to receive an ultrasonic signal; the pulse laser beam scans the surface of the detected workpiece under the control of the oscillating head 1, and the detection laser beam scans all detection points of the detected workpiece under the control of the vibrating mirror 3; the high-speed data acquisition card acquires, processes and transmits the ultrasonic signals acquired by the laser ultrasonic signal receiver 20 to the industrial personal computer 18.
And 4, step 4: and (5) processing and analyzing laser ultrasonic signals. The laser ultrasonic detection signal stored in the industrial personal computer 18 is post-processed (how to perform post-processing is well known in the art), and the defect information of the detected workpiece is obtained.
And 5: and finishing laser ultrasonic detection. And after the defect information of the detected workpiece is obtained, the swinging head 1 and the workbench 7 return to the initial coordinate position, the detected workpiece is unloaded, and the laser ultrasonic detection is completed.
In the detection process, the swing head 1 and the workbench 7 continuously adjust the spatial position to ensure that the excitation pulse laser beam vertically irradiates the surface of the detected workpiece to excite ultrasonic waves; the galvanometer 3 continuously adjusts the irradiation angle of the detection laser beam and detects the laser ultrasonic signal at the position; the industrial personal computer 18 carries out real-time automatic processing on the acquired laser ultrasonic signals. The whole detection process does not need manual intervention.
The invention can realize high-efficiency and rapid laser ultrasonic automatic detection and can greatly improve the laser ultrasonic detection efficiency and detection precision.
Claims (10)
1. The five-axis laser ultrasonic automatic detection equipment is characterized by comprising a five-axis motion platform, an industrial personal computer (18), a pulse excitation laser (19), a laser ultrasonic signal receiver (20) and a control unit (21); the excitation pulse laser (19), the laser ultrasonic signal receiver (20) and the five-axis motion platform are all connected with an industrial personal computer (18);
the five-axis motion platform comprises a swinging head (1) with a z-axis direction translational degree of freedom, a y-axis direction translational degree of freedom and an x-axis direction rotational degree of freedom and a workbench (7) with an x-axis direction translational degree of freedom and a z-axis direction rotational degree of freedom, the swinging head (1) is positioned above the workbench (7), a pulse excitation laser (19) comprises a laser emitting head (2), and the laser emitting head (2) is arranged on the swinging head (1).
2. The five-axis laser ultrasonic automatic detection equipment according to claim 1, wherein the five-axis motion platform further comprises a workbench rotating motor (8), a workbench sliding rail (9), a workbench linear motor (11), an upright post (12), a head-swinging horizontal direction linear motor (13), a head-swinging horizontal sliding rail (14), a head-swinging vertical sliding rail (15), a head-swinging vertical direction linear motor (16) and a head-swinging rotating motor (17); wherein the workbench (7) is arranged on a workbench sliding rail (9), the workbench (7) is provided with a workbench rotating motor (8), and the workbench sliding rail (9) is also provided with a workbench linear motor (11);
an upright post (12) is arranged on one side of the workbench sliding rail (9), and a swinging head vertical direction linear motor (16) and a swinging head vertical sliding rail (15) are arranged on the upright post (12); the swing head (1) and the swing head horizontal direction linear motor (13) are arranged on a swing head horizontal sliding rail (14), and the swing head horizontal sliding rail (14) is arranged on a swing head vertical sliding rail (15);
the swing head rotating motor (17) is arranged on the swing head (1).
3. The five-axis laser ultrasonic automatic detection equipment as claimed in claim 2, wherein the workbench rotating motor (8) can drive the workbench (7) to rotate in the z-axis direction;
the workbench linear motor (11) can drive the workbench (7) to translate along the x-axis direction of the workbench sliding rail (9);
the swing head horizontal direction linear motor (13) can drive the swing head (1) to carry out y-axis direction translation along the swing head horizontal sliding rail (14);
the swing head vertical direction linear motor (16) can drive the swing head horizontal slide rail (14) to carry out z-axis direction translation along the swing head vertical slide rail (15);
the swing head rotating motor (17) can drive the swing head (1) to rotate around the x-axis direction.
4. The five-axis laser ultrasonic automatic detection equipment as claimed in claim 1, wherein the pulse excitation laser (19) further comprises a laser host, the laser host is arranged on one side of the five-axis motion platform, and the laser emitting head (2) is connected with the laser host through an optical fiber.
5. The five-axis laser ultrasonic automatic detection equipment as claimed in claim 1, wherein by changing the three-dimensional space position between the swing head (1) and the workbench (7), a sub-nanosecond laser beam emitted by the laser emitting head (2) is vertically irradiated on a detected part on the surface of a detected workpiece (6) fixed on the workbench (7), and ultrasonic waves are excited.
6. The five-axis laser ultrasonic automatic detection equipment according to claim 1, wherein the laser ultrasonic signal receiver (20) comprises a galvanometer (3), a reflector (4) and a laser vibrometer (5); laser beams emitted by the laser vibration meter (5) are reflected into the vibrating mirror (3) through the reflecting mirror (4), and the vibrating mirror (3) enables the laser beams to irradiate the detection position.
7. The five-axis laser ultrasonic automatic detection equipment according to claim 6, characterized in that the irradiation point of the excitation pulse laser (19) is spaced from the irradiation point of the laser vibration meter (5).
8. The five-axis laser ultrasonic automatic detection equipment according to claim 1, characterized by further comprising a control unit (21), wherein the control unit (21) is connected with a control unit power supply (22); the control unit (21) comprises an excitation pulse laser controller, a five-axis motion platform controller and a signal acquisition controller; the excitation pulse laser controller is connected with the excitation pulse laser (19) and is communicated with the industrial personal computer (18) through an RS (485) communication protocol; the five-axis motion platform controller is connected with the five-axis motion platform and is communicated with the industrial personal computer (18) through an RS (485) communication protocol; the signal acquisition controller is connected with the laser ultrasonic signal receiver (20) and is communicated with the industrial personal computer (18) through the SMA interface.
9. The five-axis laser ultrasonic automatic detection equipment according to claim 1, wherein a supporting foot (10) is arranged at the bottom of the workbench sliding rail (9).
10. A five-axis laser ultrasonic automatic detection method based on the device of claim 1 is characterized in that a pulse excitation laser (19) excites a pulse laser beam to vertically irradiate the surface of a detected workpiece (6) fixed on a workbench (1) to generate thermoelastic effect excitation ultrasonic waves; the laser ultrasonic signal receiver (20) emits a detection laser beam and receives an ultrasonic signal; scanning the surface of the detected workpiece (6) by a pulse laser beam, and scanning laser ultrasonic signals of all detection points of the detected workpiece by the detection laser beam; and transmitting the ultrasonic signals collected by the laser ultrasonic signal receiver (20) to an industrial personal computer (18), and processing the ultrasonic signals to obtain the defect information of the detected workpiece.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113484421A (en) * | 2021-07-01 | 2021-10-08 | 中国工程物理研究院机械制造工艺研究所 | Laser ultrasonic internal defect multimode imaging method and system based on synthetic aperture |
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