CN112171517B - Method for processing outer surface of silicon ring - Google Patents
Method for processing outer surface of silicon ring Download PDFInfo
- Publication number
- CN112171517B CN112171517B CN202010962270.6A CN202010962270A CN112171517B CN 112171517 B CN112171517 B CN 112171517B CN 202010962270 A CN202010962270 A CN 202010962270A CN 112171517 B CN112171517 B CN 112171517B
- Authority
- CN
- China
- Prior art keywords
- silicon ring
- spray gun
- sand blasting
- silicon
- sand
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C1/00—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
- B24C1/08—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods for polishing surfaces, e.g. smoothing a surface by making use of liquid-borne abrasives
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C3/00—Abrasive blasting machines or devices; Plants
- B24C3/02—Abrasive blasting machines or devices; Plants characterised by the arrangement of the component assemblies with respect to each other
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C9/00—Appurtenances of abrasive blasting machines or devices, e.g. working chambers, arrangements for handling used abrasive material
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
The invention discloses a method for processing the outer surface of a silicon ring, aiming at solving the defects of high labor intensity, low working efficiency and uneven polished surface in the surface processing of the silicon ring. The invention comprises the following steps: a. after the silicon ring is machined, fixing the silicon ring on a rotary platform of a sand blasting machine, aligning a spray gun of the sand blasting machine to the outer surface of the silicon ring to be treated, starting the sand blasting machine to enable the rotary platform to drive the silicon ring to rotate, and enabling sand sprayed by the spray gun to impact the outer surface of the silicon ring; b. stopping the machine after one side of the silicon ring is subjected to sand blasting, fixing the turned surface of the silicon ring on a rotary platform of a sand blasting machine, aligning a spray gun of the sand blasting machine to the outer surface of the silicon ring to be treated, starting the sand blasting machine to enable the rotary platform to drive the silicon ring to rotate, and enabling sand sprayed by the spray gun to impact the outer surface of the silicon ring; adjusting the roughness variation range of the outer surface of the silicon ring by adjusting the rotating speed of the rotating platform and the pressure of the spray gun; c. and stopping the sand blasting machine, and taking down the silicon ring for cleaning.
Description
Technical Field
The invention relates to a silicon ring processing technology, in particular to a method for processing the outer surface of a silicon ring.
Background
When the plasma etches a silicon wafer, the silicon ring bearing the silicon wafer can also be etched by the plasma, if the surface of the silicon ring is damaged, various impurities can be generated in the etching process, the etched silicon wafer is contaminated, and the yield of final products is influenced, so that the surface roughness of the silicon ring is generally required to be strictly controlled. The silicon ring profile structure is typically finished using a machining center, followed by polishing to obtain a finished surface. Along with the increasingly strict requirements of customers on the surface roughness of the silicon ring, the conventional polishing operation of the silicon ring cannot meet the requirements of the customers, and the surface roughness of the silicon ring can meet the requirements of the customers only by manually polishing and burnishing with sand paper and polishing cloth.
Disclosure of Invention
The invention overcomes the defects of high labor intensity, low working efficiency and uneven polished surface in silicon ring surface processing, and provides the silicon ring outer surface processing method.
In order to solve the technical problems, the invention adopts the following technical scheme: a method for processing the outer surface of a silicon ring comprises the following steps: a. after the silicon ring is machined, fixing the silicon ring on a rotary platform of a sand blasting machine, aligning a spray gun of the sand blasting machine to the outer surface of the silicon ring to be treated, starting the sand blasting machine to enable the rotary platform to drive the silicon ring to rotate, and enabling sand sprayed by the spray gun to impact the outer surface of the silicon ring; b. stopping the machine after one side of the silicon ring is subjected to sand blasting, fixing the turned surface of the silicon ring on a rotary platform of a sand blasting machine, aligning a spray gun of the sand blasting machine to the outer surface of the silicon ring to be treated, starting the sand blasting machine to enable the rotary platform to drive the silicon ring to rotate, and enabling sand sprayed by the spray gun to impact the outer surface of the silicon ring; adjusting the roughness variation range of the outer surface of the silicon ring by adjusting the rotating speed of the rotating platform and the pressure of the spray gun; c. and stopping the sand blasting machine, and taking down the silicon ring for cleaning.
And sand blasting is carried out on the surface of the silicon ring by adopting a sand blasting machine, the rotating platform rotates to enable the outer surface of the silicon ring to slowly pass through the lower part of the spray gun, and sand jetted by the spray gun impacts the outer surface of the silicon ring to enable the outer surface of the silicon ring to form uniform roughness. The variation range of the roughness of the outer surface of the silicon ring is adjusted by adjusting the rotating speed of the rotating platform and the pressure of the spray gun. The method for processing the outer surface of the silicon ring has the advantages of convenient operation of processing the surface of the silicon ring, reduced labor intensity, improved working efficiency, strictly controlled roughness change range of the outer surface of the silicon ring and improved surface quality of the silicon ring.
Preferably, a fixing tool is arranged on the rotating platform and is used for fixing the silicon ring. The fixed tool clamps the silicon ring, and the silicon ring is prevented from shifting in the sand blasting process.
Preferably, the sand used by the spray gun is silicon carbide sand, and the mesh number is 220-1000 meshes. The hardness of the silicon carbide is higher than that of the silicon ring, so that particles on the surface of the silicon ring can be better removed.
Preferably, the rotating speed of the rotating platform is 1-300 r/s, and the pressure of the spray gun is 0.1-0.6 MPa.
Preferably, an auxiliary rotating platform is obliquely arranged below the rotating platform, the rotating platform and the auxiliary rotating platform are both of annular structures, the silicon ring is loaded on the auxiliary rotating platform before being loaded on the rotating platform for sand blasting, part of sand is sprayed on the surface of the silicon ring on the auxiliary rotating platform for pre-spraying while the silicon ring on the rotating platform is subjected to sand blasting, and the silicon ring after the pre-spraying is loaded on the rotating platform for sand blasting. The silicon ring is subjected to pre-sand blasting treatment, so that the sand blasting effect is improved.
Preferably, the rotary platform surface and the auxiliary rotary platform surface are both provided with annular adsorption grooves, and the annular adsorption grooves are communicated with the air suction pump. Negative pressure is formed in the annular adsorption groove to adsorb and fix the silicon ring, and the fixation is convenient and reliable.
Preferably, the lower end of the spray gun is movably connected with the spray head, the upper end of the spray head swings around the lower end of the spray gun in any direction, and the included angle between the axis of the spray head at the position with the maximum swing amplitude and the axis of the spray gun is 10 degrees. The jetting head deflects in the circumferential range, so that the sand blasting range to the silicon ring is enlarged, sand is jetted to the jetting head from the jetting gun, and is twisted and rotated due to uneven stress, and when the twisted and rotated sand impacts the surface of the silicon ring, a twisting force is generated on an impact position besides the impact surface, so that the sand blasting impact effect is improved. Compare with the traditional opening through the increase spray gun and improve the sandblast scope, the opening that this scheme need not increase the spray gun just can realize the purpose of increase sandblast scope, and the opening of increase spray gun can reduce the jet power of sandblast to reduce the impact, be unfavorable for the sandblast operation to the silicon ring.
Compared with the prior art, the invention has the beneficial effects that: (1) the silicon ring surface processing operation is convenient, the labor intensity is reduced, the working efficiency is improved, the roughness variation range of the outer surface of the silicon ring can be strictly controlled, and the surface quality of the silicon ring is improved; (2) the sand blasting effect on the surface of the silicon ring is good.
Drawings
Fig. 1 is a schematic diagram of embodiment 1 of the present invention;
FIG. 2 is a schematic structural view of a rotary platform according to embodiment 1 of the present invention;
FIG. 3 is a schematic structural view of a rotary platform according to embodiment 2 of the present invention;
FIG. 4 is a schematic view showing a connecting structure of a spray gun and a spray head according to embodiment 2 of the present invention;
FIG. 5 is a schematic view of a deflected ejection head of embodiment 2 of the present invention;
in the figure: 1. silicon ring, 2, rotary platform, 3, spray gun, 4, sand-blasting box, 5, annular adsorption groove, 6, negative pressure hole, 7, through hole, 8, negative pressure pipe, 9, support, 10, installation cavity, 11, bearing, 12, end cover, 13, auxiliary rotary platform, 14, installation seat, 15, ventilation ring groove, 16, ventilation hole, 17, support, 18, annular seat, 19, support rod, 20, spray head, 21, bulb, 22, connecting sleeve, 23, limiting block, 24, rotating sleeve, 25, shifting block, 26, ejector rod, 27, connecting column, 28, convex ring, 29, connecting rod, 30, connecting sleeve, 31, buffer spring, 32, positioning column.
Detailed Description
The technical scheme of the invention is further described in detail by the following specific embodiments in combination with the attached drawings:
example 1: a method for processing the outer surface of a silicon ring (see figures 1 and 2) comprises the following steps: a. after the silicon ring is machined, fixing the silicon ring 1 on a rotary platform 2 of a sand blasting machine, aligning a spray gun 3 of the sand blasting machine to the outer surface of the silicon ring to be treated, starting the sand blasting machine to enable the rotary platform to drive the silicon ring to rotate, and enabling sand sprayed by the spray gun to impact the outer surface of the silicon ring; b. stopping the machine after one side of the silicon ring is subjected to sand blasting, fixing the turned surface of the silicon ring on a rotary platform of a sand blasting machine, aligning a spray gun of the sand blasting machine to the outer surface of the silicon ring to be treated, starting the sand blasting machine to enable the rotary platform to drive the silicon ring to rotate, and enabling sand sprayed by the spray gun to impact the outer surface of the silicon ring; adjusting the roughness variation range of the outer surface of the silicon ring by adjusting the rotating speed of the rotating platform and the pressure of the spray gun; c. and stopping the sand blasting machine, and taking down the silicon ring for cleaning.
The sand blasting operation of silicon ring is carried out in the sand blasting box 4, and rotary platform installs in the sand blasting box, and rotary platform is last to set up fixed frock, and fixed frock is fixed the silicon ring. Fixed frock is equipped with negative pressure hole 6 including setting up annular adsorption tank 5 on rotary platform in the middle of the rotary platform, and negative pressure hole lower extreme link up rotary platform, sets up through-hole 7 between inside negative pressure hole upper end of rotary platform and the annular adsorption tank, and rotary platform lower extreme negative pressure hole position rotates connects negative pressure pipe 8, and negative pressure union coupling aspiration pump. The rotary platform is rotatably arranged on a support 9, a motor is arranged on the support, and an output shaft of the motor is in transmission connection with the rotary platform. A rotating gear is mounted on an output shaft of the motor, a driven gear ring is arranged on the outer wall of the lower end of the rotating platform, and the driving gear is in meshing transmission with the driven gear ring. The negative pressure pipe is tightly arranged on the support. Be equipped with upper end open-ended installation cavity 10 on the support, rotary platform is T shape, and the installation cavity is arranged in to the rotary platform lower extreme, and the installation cavity is arranged in to motor and negative pressure pipe, connects bearing 11 between rotary platform and the installation cavity, and end cover 12 is connected to the support upper end, and the end cover closes the installation cavity.
The sand used by the spray gun is silicon carbide sand, and the mesh number is 220-1000 meshes. The spray gun is connected with the sand injection pressure tank through a sand feeding pipe. And a sand blasting valve is arranged on the sand conveying pipe. The rotating speed of the rotating platform is 1-300 rpm/s, preferably 5-50 rpm/s, and the pressure of the spray gun is 0.1-0.6 MPa.
The outer surface of the silicon ring is processed by using the automatic sand blasting machine, so that the uniform roughness of the outer surface of the silicon ring is realized. The air pump works to generate negative pressure in the annular adsorption groove so as to fix the silicon ring on a rotary platform of the automatic sand blasting machine, and the silicon carbide sand with specified mesh number uniformly impacts the outer surface of the silicon ring along the injection track through a spray gun of the automatic sand blasting machine. The removal amount of sand on the outer surface of the silicon ring is adjusted by adjusting the rotating speed of the rotating platform and the pressure of the spray gun, so that the surface roughness bandwidth of the silicon ring can be adjusted. By using the processing method, sand impact treatment is carried out on a rotary platform of an automatic sand blasting machine, roughness of a sand impact area is measured by using a roughness meter after treatment, and a roughness bandwidth is obtained by subtracting a roughness minimum value from a roughness maximum value. The process parameters and test results are shown in tables 1 and 2.
Table 1: by adjusting the speed of rotation of the rotary platform
| Rotational speed of the rotating platform (rpm/sec) | 0 | 10 | 20 | 30 |
| Removal amount (micron) | 0 | 2.0 | 3.5 | 5.0 |
| Roughness fluctuation zone of treatment area (micron) | 0 | 0.5 | 0.30 | 0.15 |
The results show that the roughness fluctuation bandwidth of the outer surface area of the silicon ring can be efficiently adjusted and controlled by using the method, and the surface removal amount is adjusted by adjusting the rotating speed of the rotating platform, so that a high-quality silicon ring product is obtained.
Table 2: by adjusting the pressure of the spray gun
| Spray gun pressure (Mpa) | 0 | 0.2 | 0.4 | 0.6 |
| Removal amount (micron) | 0 | 3.0 | 5.0 | 7.0 |
| Roughness fluctuation zone of treatment area (micron) | 0 | 0.45 | 0.25 | 0.10 |
The results show that the method can efficiently adjust and control the roughness fluctuation bandwidth of the outer surface area of the silicon ring, and adjust the surface removal amount by adjusting the pressure of the spray gun, thereby obtaining a high-quality silicon ring product.
Example 2: the steps of a method for processing the outer surface of a silicon ring (see attached figures 3, 4 and 5) are similar to those of embodiment 1, and the method is mainly characterized in that an auxiliary rotary platform 13 which is obliquely arranged is arranged below a rotary platform in the embodiment, the rotary platform and the auxiliary rotary platform are both in an annular structure, the silicon ring is loaded on the auxiliary rotary platform before being loaded on the rotary platform for sand blasting, part of sand is sprayed on the surface of the silicon ring on the auxiliary rotary platform for pre-spraying while the silicon ring on the rotary platform is subjected to sand blasting, and the silicon ring after the pre-spraying is loaded on the rotary platform for sand blasting. And annular adsorption grooves are arranged on the surface of the rotary platform and the surface of the auxiliary rotary platform and are communicated with the air pump.
The spray gun is installed and is carried out the sandblast to the silicon ring in the sand blasting box, installs mount pad 14 in the sand blasting box, is equipped with the mounting groove on the mount pad, and rotary platform rotates to be installed in the mounting groove, is equipped with on the mounting groove lateral wall and ventilates annular 15, installs the negative pressure pipe with the annular intercommunication of ventilating on the mount pad, is equipped with a plurality of intercommunication annular adsorption tanks and the air vent 16 in ventilating annular groove on the rotary platform. A bracket 17 is installed in the sand blasting box, an installation seat is installed on the bracket, and the installation seat and the rotary platform are both in an annular structure; an annular seat 18 is installed below a rotary platform on a support, an annular adsorption groove is formed in the upper end face of the auxiliary rotary platform, the auxiliary rotary platform is rotatably installed on the annular seat, an air ventilation ring groove is formed in the inner wall of the annular seat, a negative pressure pipe communicated with the air ventilation ring groove is installed on the annular seat, a plurality of air vents communicated with the annular adsorption groove and the air ventilation ring groove are formed in the auxiliary rotary platform, a motor used for driving the rotary platform to rotate and a motor used for driving the auxiliary rotary platform to rotate are installed on the support, a plurality of supporting rods 19 are uniformly connected to the upper end face of the auxiliary rotary platform, and the included angle between the upper end face of the auxiliary rotary platform and the horizontal plane is 70-90 degrees. The upper end of the auxiliary rotating platform is arranged close to the sand blasting nozzle.
The lower end of the spray gun is movably connected with an injection head 20, the upper end of the injection head swings in any direction around the lower end of the spray gun, and the included angle between the axis of the injection head at the position with the maximum swing amplitude and the axis of the spray gun is 10 degrees. The spray gun lower extreme is equipped with bulb 21, the chamber in the spray gun runs through the bulb, the injector head upper end is equipped with adapter sleeve 22, the adapter sleeve inner wall is indent arc spherical surface structure, adapter sleeve and bulb rotate the suit together, the bulb upper end is equipped with stopper 23 that is used for spacing adapter sleeve, the installation is driven pivoted commentaries on classics cover 24 by the motor on the spray gun, the motor is installed on the spray gun outer wall, connect shifting block 25 on the commentaries on classics cover, the shifting block lower surface sets up by the top slope down along the rotation direction of commentaries on classics cover, commentaries on classics cover upper end equipartition is equipped with a plurality of ejector pins 26, the shifting block lower surface promotes the ejector pin downstream with the ejector pin contact and makes the commentaries on classics cover rotate, the injector head deflects appears. The shifting block is provided with a connecting column 27, a convex ring 28 is arranged on the connecting column, the rotating sleeve is connected with a connecting rod 29, the connecting rod is provided with a connecting sleeve 30, the connecting column is sleeved in the connecting sleeve, a buffer spring 31 is arranged between the upper end of the connecting column and the connecting sleeve, the connecting sleeve is connected with a positioning column 32, and the lower end of the convex ring is abutted against the positioning column. The rotating sleeve rotates to drive the shifting block to slide through the ejector rod, the lower surface of the shifting block is obliquely arranged, so that the ejector rod is pushed downwards, the connecting sleeve deflects, and the injector head deflects. The rotating sleeve rotates continuously, and the shifting block slides through the ejector rod continuously, so that the connecting sleeve deflects in different directions. Other structures and steps are the same as those of embodiment 1.
The above-described embodiments are merely preferred embodiments of the present invention, which is not intended to be limiting in any way, and other variations and modifications are possible without departing from the scope of the invention as set forth in the appended claims.
Claims (5)
1. The method for processing the outer surface of the silicon ring is characterized by comprising the following steps of: a. after the silicon ring is machined, fixing the silicon ring on a rotary platform of a sand blasting machine, aligning a spray gun of the sand blasting machine to the outer surface of the silicon ring to be treated, starting the sand blasting machine to enable the rotary platform to drive the silicon ring to rotate, and enabling sand sprayed by the spray gun to impact the outer surface of the silicon ring; b. stopping the machine after one side of the silicon ring is subjected to sand blasting, fixing the turned surface of the silicon ring on a rotary platform of a sand blasting machine, aligning a spray gun of the sand blasting machine to the outer surface of the silicon ring to be treated, starting the sand blasting machine to enable the rotary platform to drive the silicon ring to rotate, and enabling sand sprayed by the spray gun to impact the outer surface of the silicon ring; adjusting the roughness variation range of the outer surface of the silicon ring by adjusting the rotating speed of the rotating platform and the pressure of the spray gun; c. stopping the sand blasting machine, and taking down the silicon ring for cleaning; an auxiliary rotating platform which is obliquely arranged is arranged below the rotating platform, the rotating platform and the auxiliary rotating platform are both in annular structures, silicon rings are loaded on the auxiliary rotating platform before being loaded on the rotating platform for sand blasting, part of sand is sprayed onto the surface of the silicon ring on the auxiliary rotating platform for pre-spraying while the silicon rings on the rotating platform are subjected to sand blasting, and the silicon rings subjected to pre-spraying are loaded on the rotating platform for sand blasting; the lower end of the spray gun is movably connected with an injection head, the upper end of the injection head swings in any direction around the lower end of the spray gun, and the included angle between the axis of the injection head at the position with the maximum swing amplitude and the axis of the spray gun is 10 degrees; the spray gun lower extreme is equipped with the bulb, the chamber in the spray gun is said and is run through the bulb, the injector head upper end is equipped with the adapter sleeve, the adapter sleeve inner wall is indent arc spherical surface structure, adapter sleeve and bulb rotate the suit together, the bulb upper end is equipped with the stopper that is used for spacing adapter sleeve, the installation is driven pivoted commentaries on classics cover by the motor on the spray gun, the motor is installed on the spray gun outer wall, connect the shifting block on the commentaries on classics cover, the shifting block lower surface sets up along the rotation direction from bottom to top slope of commentaries on classics cover, commentaries on classics cover upper end equipartition is equipped with a plurality of ejector pins, the shifting block lower surface promotes the ejector pin downstream with the ejector pin contact and makes the commentaries on classics cover rotate, the injector head deflects.
2. The method as claimed in claim 1, wherein the rotary platform is provided with a fixing tool for fixing the silicon ring.
3. The method as claimed in claim 1, wherein the sand used in the lance is silicon carbide sand with a mesh size of 220-1000 meshes.
4. The method as claimed in claim 1, wherein the rotation speed of the rotary platform is 1-300 rpm, and the pressure of the spray gun is 0.1-0.6 Mpa.
5. The method as claimed in claim 1, wherein the rotary platform and the auxiliary rotary platform are provided with annular adsorption grooves, and the annular adsorption grooves are communicated with the air pump.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010962270.6A CN112171517B (en) | 2020-09-14 | 2020-09-14 | Method for processing outer surface of silicon ring |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010962270.6A CN112171517B (en) | 2020-09-14 | 2020-09-14 | Method for processing outer surface of silicon ring |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112171517A CN112171517A (en) | 2021-01-05 |
| CN112171517B true CN112171517B (en) | 2021-11-09 |
Family
ID=73920935
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010962270.6A Active CN112171517B (en) | 2020-09-14 | 2020-09-14 | Method for processing outer surface of silicon ring |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112171517B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113953981B (en) * | 2021-10-29 | 2023-05-09 | 山东工业陶瓷研究设计院有限公司 | Pretreatment method and roughening system for metal connecting ring |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2012086255A1 (en) * | 2010-12-22 | 2012-06-28 | 新東工業株式会社 | Shot process apparatus |
| CN107717750A (en) * | 2017-11-21 | 2018-02-23 | 河南省博宇新能源有限公司 | Silicon chip polishing sand-blasting machine |
| CN107791161A (en) * | 2017-11-24 | 2018-03-13 | 无锡市日升机械厂 | Box multiaxis Full-automatic sand blasting machine |
| CN207788670U (en) * | 2017-12-07 | 2018-08-31 | 天津市双涛达克罗技术有限公司 | A kind of sand-blasting machine of sandblasting angle adjustable |
| CN209125638U (en) * | 2018-11-25 | 2019-07-19 | 日照同圆祥联铸造股份有限公司 | A kind of die surface sandblasting circulator |
| CN209648476U (en) * | 2019-01-04 | 2019-11-19 | 永康市汇鑫涂料有限公司 | A kind of kitchen tools sand-blasting machine |
| CN111015521A (en) * | 2018-10-09 | 2020-04-17 | 山东莱阳市昌誉密封产品有限公司 | Processing method for reducing friction torque of box-type oil seal and special sand blasting device thereof |
| CN111318961A (en) * | 2018-12-13 | 2020-06-23 | 有研半导体材料有限公司 | Method for processing silicon ring |
-
2020
- 2020-09-14 CN CN202010962270.6A patent/CN112171517B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2012086255A1 (en) * | 2010-12-22 | 2012-06-28 | 新東工業株式会社 | Shot process apparatus |
| CN107717750A (en) * | 2017-11-21 | 2018-02-23 | 河南省博宇新能源有限公司 | Silicon chip polishing sand-blasting machine |
| CN107791161A (en) * | 2017-11-24 | 2018-03-13 | 无锡市日升机械厂 | Box multiaxis Full-automatic sand blasting machine |
| CN207788670U (en) * | 2017-12-07 | 2018-08-31 | 天津市双涛达克罗技术有限公司 | A kind of sand-blasting machine of sandblasting angle adjustable |
| CN111015521A (en) * | 2018-10-09 | 2020-04-17 | 山东莱阳市昌誉密封产品有限公司 | Processing method for reducing friction torque of box-type oil seal and special sand blasting device thereof |
| CN209125638U (en) * | 2018-11-25 | 2019-07-19 | 日照同圆祥联铸造股份有限公司 | A kind of die surface sandblasting circulator |
| CN111318961A (en) * | 2018-12-13 | 2020-06-23 | 有研半导体材料有限公司 | Method for processing silicon ring |
| CN209648476U (en) * | 2019-01-04 | 2019-11-19 | 永康市汇鑫涂料有限公司 | A kind of kitchen tools sand-blasting machine |
Also Published As
| Publication number | Publication date |
|---|---|
| CN112171517A (en) | 2021-01-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107443255B (en) | Axle type part peening equipment | |
| CN112171517B (en) | Method for processing outer surface of silicon ring | |
| CN103313823A (en) | A method and an apparatus for treating at least one workpiece | |
| KR20190093122A (en) | Grinding and polishing apparatus and grinding and polishing method | |
| CN106141919A (en) | Emery wheel clamping mechanism and use the wheel dresser of this clamping mechanism | |
| CN211278027U (en) | Multi-station high-speed metal plate sand blasting machine | |
| CN208117520U (en) | Fashioned iron derusting device | |
| CN110270934B (en) | Surface treatment process system and process for automobile plastic parts | |
| JP2004535940A (en) | Ceramic spraying apparatus and method for preventing gear pitting | |
| KR20190100023A (en) | Grinding apparatus | |
| JPH08267360A (en) | Expanding method and device of working pattern in blasting work | |
| CN209190514U (en) | A kind of mill component of sanding machine | |
| CN215546655U (en) | Burr removing device for engraving and milling machine | |
| CN215201365U (en) | Hemisphere type PCB product surface treatment device | |
| CN112192450B (en) | Silicon ring sand blasting device | |
| CN115179178A (en) | Water jet strengthening and polishing integrated system and method for blade of blade disc | |
| CN111719106B (en) | Method for supersonic spraying airtight tungsten carbide alloy | |
| TWM555271U (en) | Grinding head of main bore taper grinding machine | |
| CN209688033U (en) | Space flight and aviation fuel pump mirror surface gear | |
| CN107553349A (en) | A kind of stainless steel door handle automatic polishing device | |
| CN205870305U (en) | Stainless steel door is manual burnishing device | |
| CN110202482B (en) | Surface treatment system for automobile plastic parts and surface treatment process for plastic parts | |
| CN205630200U (en) | Lens lift edging machine | |
| CN219767926U (en) | Jet passivating machine before coating | |
| CN209408256U (en) | A kind of automatic sand-aerating machine |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |