CN209408256U - A kind of automatic sand-aerating machine - Google Patents
A kind of automatic sand-aerating machine Download PDFInfo
- Publication number
- CN209408256U CN209408256U CN201822080104.4U CN201822080104U CN209408256U CN 209408256 U CN209408256 U CN 209408256U CN 201822080104 U CN201822080104 U CN 201822080104U CN 209408256 U CN209408256 U CN 209408256U
- Authority
- CN
- China
- Prior art keywords
- exhaust tube
- high pressure
- pressure gas
- suction tray
- gas holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Nozzles (AREA)
Abstract
The utility model discloses a kind of automatic sand-aerating machine, including high pressure gas holder, high pressure gas holder is connected with sandbox, sandbox bottom is provided with abrasive material valve, abrasive material valve is connected with blast tube, and blast tube one end connects high pressure gas holder, and the blast tube other end is connected with spray gun, exhaust tube is provided with below spray gun, it is provided with suction tray in exhaust tube nozzle, several first apertures are provided on suction tray, several first apertures are connected to exhaust tube, exhaust tube is connected with vacuum tank, and vacuum tank is connected with vacuum pump；Suction tray is nearby provided with gas nozzle, and gas nozzle connects high pressure gas holder.The utility model is provided with exhaust tube, and exhaust tube connects vacuum tank, and during sandblasting, abrasive material is taken away by exhaust tube, on the one hand improves observation sight when sandblasting, on the other hand improves the impact force of sandblasting.
Description
Technical field
The utility model relates to polissoir fields, it particularly relates to a kind of automatic sand-aerating machine.
Background technique
It during chip production, needs to polish smooth on the surface of semiconductor silicon, existing production and processing mode is most
It is polished using sand-blasting machine, but needs the smooth degree of observation silicon wafer in real time in polishing, and the abrasive material meeting that sand-blasting machine sprays
Sight is blocked, a small amount of abrasive material is had stopped sandblasting and is attached to above silicon wafer, influences to observe clear with silicon chip surface
Cleanliness.
For the problems in the relevant technologies, currently no effective solution has been proposed.
Utility model content
For above-mentioned technical problem in the related technology, the utility model proposes a kind of automatic sand-aerating machines, are able to solve
State problem.
To realize the above-mentioned technical purpose, the technical solution of the utility model is achieved in that
A kind of automatic sand-aerating machine, including high pressure gas holder, the high pressure gas holder are connected with sandbox, and the sandbox bottom is provided with
Abrasive material valve, the abrasive material valve are connected with blast tube, and described blast tube one end connects the high pressure gas holder, the blast tube other end
It is connected with spray gun, is provided with exhaust tube below the spray gun, be provided with suction tray in the exhaust tube nozzle, on the suction tray
Several first apertures are provided with, several first apertures are connected to the exhaust tube, and the exhaust tube is connected with vacuum tank, described
Vacuum tank is connected with vacuum pump；The suction tray is nearby provided with gas nozzle, and the gas nozzle connects the high pressure gas holder.
Further, the high pressure gas holder is connected with inflator pump.
Further, dust arrester is provided between the exhaust tube and the vacuum tank.
Further, rubber pad is provided on the suction tray, be provided on the rubber pad with it is several described first small
The corresponding several second orifices in hole.
Further, the suction tray is nearby provided with baffle with the gas nozzle opposite side.
The utility model has the beneficial effects that the utility model is provided with exhaust tube, exhaust tube connects vacuum tank, in sandblasting
In the process, abrasive material is taken away by exhaust tube, on the one hand improves observation sight when sandblasting, on the other hand improves the impact of sandblasting
Power.
Detailed description of the invention
In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment
Needed in attached drawing be briefly described, it should be apparent that, the accompanying drawings in the following description is only the utility model
Some embodiments for those of ordinary skill in the art without creative efforts, can also be according to this
A little attached drawings obtain other attached drawings.
Fig. 1 is the structural schematic diagram of automatic sand-aerating machine；
Fig. 2 is the cross-sectional view of exhaust tube and suction tray.
In figure: 1. high pressure gas holders, 2. sandboxes, 3. abrasive material valves, 4. blast tubes, 5. spray guns, 6. exhaust tubes, 7. suction trays, 8.
Vacuum tank, 9. vacuum pumps, 10. gas nozzles, 11. inflator pumps, 12. baffles, 13. silicon wafers.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art's every other embodiment obtained, all belongs to
In the range of the utility model protection.
As shown in Figure 1, according to a kind of automatic sand-aerating machine of the utility model embodiment, including high pressure gas holder 1, high pressure gas holder
1 is connected with sandbox 2, and 2 bottom of sandbox is provided with abrasive material valve 3, and abrasive material valve 3 is connected with blast tube 4, and 4 one end of blast tube connects high pressure
Gas tank 1,4 other end of blast tube are connected with spray gun 5, and exhaust tube 6 is provided with below spray gun 5, is provided with absorption in 6 nozzle of exhaust tube
Disk 7 is provided with several first apertures on suction tray 7, and several first apertures are connected to exhaust tubes 6, and exhaust tube 6 is connected with vacuum tank 8,
Vacuum tank 8 is connected with vacuum pump 9；Suction tray 7 is nearby provided with gas nozzle 10, and gas nozzle 10 connects high pressure gas holder 1.
In a specific embodiment of the utility model, high pressure gas holder 1 is connected with inflator pump 11.
In a specific embodiment of the utility model, dust arrester is provided between exhaust tube 6 and vacuum tank 8.
In a specific embodiment of the utility model, rubber pad is provided on suction tray 7, be provided on rubber pad with
The corresponding several second orifices of several first apertures.
In a specific embodiment of the utility model, suction tray 7 is nearby and 10 opposite side of gas nozzle is provided with baffle
12。
In order to facilitate the above-mentioned technical proposal for understanding the utility model, below by way of practical new to this in specifically used mode
The above-mentioned technical proposal of type is described in detail.
When specifically used, a kind of automatic sand-aerating machine according to the present utility model, spray gun 5 sprays the silicon wafer of abrasive material to lower section
13 surface, suction tray 7 are equipped with the first aperture of connection exhaust tube 6, by the of lower section when silicon wafer 13 is placed on suction tray 7
One aperture adsorbs, and will not be subjected to displacement because of the impact of abrasive material, and exhaust tube 6 can siphon away rapidly the abrasive material around silicon wafer 13,
Preferable field of view is provided.Gas nozzle 10, which can also help to blow away on 13 surface of silicon wafer, simultaneously is difficult to the abrasive material being sucked away, gas nozzle
The baffle 12 of 10 opposite sides prevents abrasive material from blowing off the nozzle of exhaust tube 6, guarantees that abrasive material can be siphoned away by exhaust tube 6.
The above is only the preferred embodiment of the utility model only, is not intended to limit the utility model, all at this
Within the spirit and principle of utility model, any modification, equivalent replacement, improvement and so on should be included in the utility model
Protection scope within.
Claims (5)
1. a kind of automatic sand-aerating machine, including high pressure gas holder (1), which is characterized in that the high pressure gas holder (1) is connected with sandbox (2),
Sandbox (2) bottom is provided with abrasive material valve (3), and the abrasive material valve (3) is connected with blast tube (4), described blast tube (4) one end
It connects the high pressure gas holder (1), blast tube (4) other end is connected with spray gun (5), is provided with pumping below the spray gun (5)
Tracheae (6) is provided with suction tray (7) in exhaust tube (6) nozzle, is provided with several first apertures on the suction tray (7),
Several first apertures are connected to the exhaust tube (6), and the exhaust tube (6) is connected with vacuum tank (8), the vacuum tank (8)
It is connected with vacuum pump (9)；The suction tray (7) is nearby provided with gas nozzle (10), and the gas nozzle (10) connects the high pressure gas holder
(1).
2. automatic sand-aerating machine according to claim 1, it is characterised in that: the high pressure gas holder (1) is connected with inflator pump
(11).
3. automatic sand-aerating machine according to claim 1, it is characterised in that: the exhaust tube (6) and the vacuum tank (8) it
Between be provided with dust arrester.
4. automatic sand-aerating machine according to claim 1, it is characterised in that: be provided with rubber pad on the suction tray (7), institute
It states and is provided with several second orifices corresponding with several first apertures on rubber pad.
5. automatic sand-aerating machine according to claim 1, it is characterised in that: the suction tray (7) nearby with the gas nozzle
(10) opposite side is provided with baffle (12).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822080104.4U CN209408256U (en) | 2018-12-12 | 2018-12-12 | A kind of automatic sand-aerating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822080104.4U CN209408256U (en) | 2018-12-12 | 2018-12-12 | A kind of automatic sand-aerating machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209408256U true CN209408256U (en) | 2019-09-20 |
Family
ID=67937529
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822080104.4U Expired - Fee Related CN209408256U (en) | 2018-12-12 | 2018-12-12 | A kind of automatic sand-aerating machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209408256U (en) |
-
2018
- 2018-12-12 CN CN201822080104.4U patent/CN209408256U/en not_active Expired - Fee Related
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP3678468B2 (en) | Polishing device | |
| CN103654668B (en) | Dish-washing machine | |
| EP2287095A2 (en) | Non-contact type of vacuum pad | |
| KR101581871B1 (en) | Portable grinding equipment of cyclone dust collector | |
| CN208117520U (en) | Fashioned iron derusting device | |
| CN104213368A (en) | Portable laundry treating apparatus | |
| CN207757473U (en) | A kind of speed reducer precision component processing grinding device with dedusting function | |
| KR20010012435A (en) | Cleaning device for surface plate correcting dresser | |
| CN209408256U (en) | A kind of automatic sand-aerating machine | |
| CN108290274B (en) | Surface processing device and surface treatment method | |
| CN110281137A (en) | Improve the polissoir and polishing method of float glass flatness | |
| CN208468116U (en) | Tube body sand blasting room | |
| CN111430262A (en) | Wafer back side edge area cleaning equipment and wafer back side cleaning method | |
| CN209648464U (en) | A kind of vehicle body polishing dust exhaust apparatus | |
| JP2010177424A (en) | Surface treatment device and surface treatment method | |
| CN209793433U (en) | Chamfer grinding device | |
| CN108705455A (en) | A kind of general rush-harvesting and rush-planting water mist sand-blasting machine | |
| CN207563338U (en) | A kind of shaping tool with cleaning function | |
| CN107007196A (en) | A kind of glass cleaning device | |
| KR101951624B1 (en) | High Pressure Cleaning Apparatus using Wet Blast | |
| CN208034451U (en) | A kind of sand-blasting machine | |
| CN209566004U (en) | A kind of conveying-type automated fluid abrasive blast equipment | |
| CN102797027A (en) | Coating bath with air exhausting and blasting devices | |
| JP2011104693A (en) | Substrate polishing device | |
| CN112171517A (en) | Method for processing outer surface of silicon ring |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190920 Termination date: 20211212 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |