CN112146611A - Calibration device and calibration method for parallelism of detection head and substrate detection device - Google Patents
Calibration device and calibration method for parallelism of detection head and substrate detection device Download PDFInfo
- Publication number
- CN112146611A CN112146611A CN201910579387.3A CN201910579387A CN112146611A CN 112146611 A CN112146611 A CN 112146611A CN 201910579387 A CN201910579387 A CN 201910579387A CN 112146611 A CN112146611 A CN 112146611A
- Authority
- CN
- China
- Prior art keywords
- detection
- head
- adjusting
- parallelism
- reference plane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/22—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring angles or tapers; for testing the alignment of axes
- G01B21/24—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring angles or tapers; for testing the alignment of axes for testing alignment of axes
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention provides a calibration device, a calibration method and a substrate detection device for detecting the parallelism of a detection head. The calibration device comprises a supporting assembly, a cross beam located above the reference plane and a carrying device which is assembled on the cross beam in a sliding mode and used for carrying the detection head. The carrying device comprises a bracket which is assembled on the beam in a sliding way, an adjusting component which is used for driving the detection head to slide or rotate relative to the bracket, and a floating mechanism which is used for fixing the detection head. The device also comprises a detection mechanism which is positioned below the detection head and is used for detecting the offset of the reference line relative to the second direction, and at least 3 displacement sensors which are arranged on the carrying device and are used for detecting the offset of the detection surface relative to the reference plane. The parallelism between the reference line on the detection head and the second direction and the parallelism between the detection surface of the detection head and the reference plane are convenient to calibrate.
Description
Technical Field
The invention relates to the technical field of substrate processing, in particular to a calibration device and a calibration method for detecting parallelism of a head and a substrate detection device.
Background
In the industry of liquid crystal displays, the structural precision of a product (a glass substrate) is high, and if the structural defect in the product needs to be detected, the detection head needs to have higher detection operation precision. Therefore, when the detection head is mounted, it is necessary to maintain a high degree of parallelism with the reference plane, the extending direction of the cross member, and the like. The carrying device for carrying the detection head in the prior art only comprises an adjusting device for adjusting the detection head on six degrees of freedom, and the adjusting device can adjust the detection head through 6 adjusting seats in 6 degrees of freedom. However, this adjustment device cannot ensure that the parallelism of the reference line and the detection surface of the detection head with respect to the reference plane and the extending direction of the cross member is within a set range.
Disclosure of Invention
The invention provides a calibration device and a calibration method for parallelism of a detection head and a substrate detection device, which are used for improving the parallelism between a detection surface of the detection head and a reference plane and the parallelism between a reference line on the detection surface and the extension direction of a cross beam.
In a first aspect, the present invention provides a calibration apparatus for detecting parallelism of a head, wherein the head is used for detecting a substrate on a reference plane, and the head has a detection surface and a reference line on the detection surface. The calibration device comprises a support assembly, a cross beam arranged on the support assembly and positioned above the reference plane, and a carrying device which is assembled on the cross beam in a sliding mode and used for carrying the detection head. The carrying device comprises a support, an adjusting component and a floating mechanism, wherein the support is assembled on the cross beam in a sliding mode, the adjusting component is arranged on the support and used for driving the detection head to slide or rotate relative to the support, and the floating mechanism is arranged on the adjusting component and used for fixing the detection head. The adjusting component can drive the detecting head to slide relative to the support along the first direction, the second direction and the third direction respectively, the adjusting component can also drive the detecting head to rotate relative to the support along the first direction, the second direction and the third direction respectively, and the adjusting component can also lock the detecting head at a set position. The first direction, the second direction and the third direction are pairwise perpendicular, the second direction is parallel to the extending direction of the cross beam, and the third direction is perpendicular to the reference plane. The calibration device also comprises a detection mechanism which is positioned below the detection head and is used for detecting the offset of the reference line relative to the second direction, and at least 3 displacement sensors which are arranged on the carrying device and are used for detecting the offset of the detection surface relative to the reference plane in the first direction and the second direction, wherein at least 3 displacement sensors are not on the same straight line.
In the above-described aspect, the detection mechanism for detecting the parallelism of the reference line with respect to the second direction and the adjustment unit for adjusting the rotation or sliding of the detection head in six degrees of freedom are provided below the detection head, so that the parallelism of the reference line on the detection head with respect to the second direction can be easily calibrated, and the parallelism of the reference line on the detection head with respect to the second direction can be improved. The parallelism of the detection surface of the detection head relative to the reference plane is provided by arranging at least 3 displacement sensors for detecting the offset of the detection surface relative to the reference plane and an adjusting component on the carrying device so as to calibrate the parallelism between the detection surface of the detection head and the reference plane.
In a specific embodiment, the adjusting assembly comprises a first driving mechanism which is arranged on the bracket and drives the detection head to slide along a first direction relative to the bracket, a second driving mechanism which is arranged on the first driving mechanism and drives the detection head to slide along a second direction relative to the bracket, and a third driving mechanism which is arranged on the second driving mechanism and drives the detection head to slide along a third direction relative to the bracket. Through setting up 3 drive detection head gliding actuating mechanism relative to the support to it slides on the support to detect the head.
In a specific embodiment, the adjusting assembly further includes a base fixed to the third driving mechanism, a first adjusting seat rotatably connected to the base via a first rotating shaft, a second adjusting seat rotatably connected to the first adjusting seat via a second rotating shaft, and a third adjusting seat rotatably connected to the second adjusting seat via a third rotating shaft. The axis of the first rotating shaft is parallel to the first direction, the axis of the second rotating shaft is parallel to the second direction, and the axis of the third rotating shaft is parallel to the third direction. Through setting up 3 regulation seats and rotating the pivot of connecting 3 regulation seats to realize detecting the rotation of head in 3 directions.
In a specific embodiment, the first adjusting seat comprises a first connecting plate and a second connecting plate which are perpendicular to each other and fixedly connected, wherein the first connecting plate is rotatably connected with the base through a first rotating shaft. The second adjusting seat comprises a third connecting plate and a fourth connecting plate which are perpendicular to each other and fixedly connected, wherein the third connecting plate is rotatably connected with the second connecting plate through a second rotating shaft. The third adjusting seat comprises a fifth connecting plate which is rotatably connected with the fourth connecting plate through a third rotating shaft. The adjusting seat is formed by adopting a connecting plate mode, so that the space occupied by the adjusting assembly is reduced.
In a specific embodiment, the calibration device further comprises a frame fixedly connected to the fifth connecting plate and used for arranging at least 3 displacement sensors, and the floating mechanism is fixed on the side of the frame facing away from the fifth connecting plate. The frame is adopted to connect the fifth connecting plate and the floating mechanism, so that the displacement sensor can be conveniently arranged.
In a specific embodiment, the adjustment assembly further comprises a first set screw locking the first adjustment seat to the base, a second set screw locking the second adjustment seat to the first adjustment seat, and a third set screw locking the third adjustment seat to the second adjustment seat. So as to lock the detection head in the set position.
In a particular embodiment, the detection mechanism is a camera to detect the amount of displacement of the reference line in the second direction.
In a second aspect, the present invention further provides a method for calibrating parallelism of a detection head based on any one of the above calibration apparatuses, the method mainly includes calibrating parallelism of a reference line and a second direction, and calibrating parallelism of a detection surface and a reference plane. Wherein, detecting the parallelism of the datum line and the second direction comprises: marking mark points on a reference line of the detection surface, wherein the mark points comprise a first mark point and a second mark point; aligning the first marking point with the detection mechanism in a first direction and a second direction; driving the detection head to slide along the second direction to a position where the second mark point is aligned with the detection mechanism in the first direction; the adjustment assembly is adjusted to align the second marking point with the detection mechanism in the second direction. Calibrating parallelism of the detection surface and the reference plane comprises: adjusting at least 3 displacement sensors to make the readings of at least 3 displacement sensors consistent; adjusting the adjusting assembly to enable the detection surface to be attached to the reference plane; the adjustment assembly is adjusted to bring readings of at least 3 displacement sensors into agreement.
In the above solution, the mark point including the first mark point and the second mark point is arranged on the reference line, so that the detection mechanism can detect the offset of the reference line in the second direction, the adjustment assembly can be adjusted conveniently to reduce the offset of the reference line in the second direction, and the parallelism of the reference line on the detection surface in the second direction can be improved. Through at least 3 displacement sensors, the detection surface is never attached to the reference plane, and when the detection surface is attached to the reference plane, the displacement of at least 3 points on the detection head, which are not on the same straight line, is detected, so that the magnitude of the offset is reflected through the reading change of the displacement sensors. The reading of at least 3 displacement sensors is consistent again by adjusting the adjusting assembly, so that the offset between the detection surface and the reference plane is convenient to calibrate, and the parallelism between the detection surface and the reference plane is improved.
In a specific embodiment, calibrating the parallelism between the detection plane and the reference plane further comprises: adjusting the adjusting assembly to enable the detection head to slide along a third direction in a direction far away from the reference plane; judging that the adjusting component enables the readings of at least 3 displacement sensors to be consistent, if the readings of at least 3 displacement sensors are inconsistent, stopping the sliding of the detection head, and adjusting the adjusting component to enable the readings of at least 3 displacement sensors to be consistent; if the readings of at least 3 displacement sensors are consistent, the adjusting component is adjusted to enable the detection head to be out of contact with the reference plane. When the detection head is adjusted to slide towards the direction far away from the reference plane, whether the reading values of at least 3 displacement sensors are consistent or not is judged, and the reading values of at least 3 displacement sensors are kept consistent by adjusting the adjusting assembly, so that the parallelism between the detection surface of the detection head and the reference plane is improved.
In a third aspect, the present invention further provides a substrate detection apparatus, which includes any one of the above calibration devices for detecting parallelism of a head, and a detection head fixed to a floating mechanism. Wherein, supporting component includes the support body structure, set up at the structural reference plane that just is used for placing the base plate of support body and set up the slide rail in the structural support body, the crossbeam sliding assembly is on the slide rail. Through the arrangement mode, the parallelism between the detection surface of the detection head and the reference plane and the parallelism of the reference line on the detection surface in the second direction are improved.
In a specific embodiment, the number of the carrying devices is at least two, the number of the detection heads is at least two, the at least two carrying devices correspond to the at least two detection heads one by one, and each detection head is fixed on the corresponding carrying device. In the above solution, the plurality of detection heads on the same cross beam adopt the same detection mechanism to calibrate the parallelism of the reference line and the second direction on the detection head, so that the offset of the plurality of detection heads on the same cross beam in the second direction is controlled within the same set range.
Drawings
Fig. 1 is a schematic block diagram of a substrate detection apparatus according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a substrate detection apparatus according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of a mounting apparatus according to an embodiment of the present invention;
FIG. 4 is a top view of a test head according to an embodiment of the present invention;
fig. 5 is a schematic view illustrating alignment between a detection mechanism and a first mark point according to an embodiment of the present invention;
fig. 6 is a schematic view illustrating alignment of the detection mechanism and the second mark point in the first direction according to the embodiment of the present invention;
fig. 7 is a schematic diagram of a mounting device according to an embodiment of the present invention.
Reference numerals:
11-slide rail 12-cross beam 121-bracket
13-detection head 131-detection surface 132-datum line
14-datum plane 20-base 21-first adjusting seat
22-second adjusting seat 23-third adjusting seat 211-first connecting plate
212-second connection plate 213-third connection plate 214-fourth connection plate
215-fifth connecting plate 31-first rotating shaft 32-second rotating shaft 33-third rotating shaft
40-frame 41-displacement sensor 50-floating mechanism 63-third driving mechanism
71-first marker 72-second marker 73-third marker
701-first line of symmetry 702-second line of symmetry
80-camera 81-first marking line 82-second marking line
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in further detail with reference to the accompanying drawings.
To facilitate understanding of the calibration apparatus for detecting parallelism of a head according to the embodiment of the present invention, an application scenario thereof will be described first. The detection head is used for detecting the substrate on the reference plane, and the detection head is provided with a detection surface opposite to the reference plane and a reference line arranged on the detection surface. The detection head may be embodied as a prior art air bearing plate, as well as other devices for detecting substrates. The calibration device for detecting the parallelism of the head comprises a support component, a cross beam arranged on the support component and a carrying device which is assembled on the cross beam in a sliding mode and used for carrying the detection head. The calibrating device is particularly applied to calibrating the parallelism between the datum line on the detection surface and the extending direction of the cross beam and the parallelism between the detection surface and the datum plane. The following describes in detail a calibration apparatus for detecting parallelism of a head according to an embodiment of the present invention with reference to the accompanying drawings.
Referring to fig. 1, the calibration device provided by the embodiment of the present invention includes a support assembly, and a cross beam 12 located above a reference plane 14 and disposed on the support assembly, and a carrying device for carrying a detection head 13 is slidably mounted on the cross beam 12. In specific setting, referring to fig. 1, the support assembly includes a frame structure and a slide rail 11 fixed on the frame structure by fastening screws, welding, and the like, and the beam 12 is slidably assembled on the slide rail 11. The frame structure is a supporting structure for supporting the detection head 13 and a carrying device for carrying the detection head 13, which is conventional in the prior art. Referring to fig. 1, the number of the slide rails 11 may be specifically 2, the extending directions of the 2 slide rails 11 are parallel or approximately parallel, and the cross beam 12 is slidably connected to each slide rail 11 of the two slide rails 11. It should be understood that the number of the slide rails 11 is not limited to 2 shown in fig. 1, and besides, the number of the slide rails 11 may also be 3, 4, etc. In a specific application, the extending direction of the slide rail 11 is the same as the moving direction of the detection head 13 when detecting the substrate. Referring to fig. 1, the cross beam 12 is perpendicular or approximately perpendicular to the extending direction of the slide rail 11, and when the cross beam 12 slides on the slide rail 11, the cross beam 12 drives the carrying device and the detection head 13 to slide on the slide rail 11, so that the detection head 13 detects the substrate placed on the reference plane 14.
Referring to fig. 1 and 2, when the detection head 13 is mounted on the cross member 12, the detection head 13 is mounted on the cross member 12 by a mounting device on which the detection head 13 is mounted. When the carrying device is arranged, referring to fig. 2 and 3, the carrying device includes a bracket 121 slidably assembled on the beam 12, and an adjusting assembly disposed on the bracket 121 and used for driving the detecting head 13 to slide or rotate relative to the bracket 121. When setting up adjusting part, adjusting part can drive and detect head 13 and slide along first direction, second direction and third direction respectively relative support 121, and adjusting part still can drive and detect head 13 and rotate along first direction, second direction and third direction respectively relative support 121, and adjusting part still can be with detecting head 13 locking in setting for the position. The first direction, the second direction and the third direction are perpendicular to each other, the second direction is parallel to the extending direction of the beam 12, and the third direction is perpendicular to the reference plane 14. For convenience of description, referring to fig. 1 and 2, an intersection point of the beam 12 and the slide rail 11 located below in fig. 1 is taken as an origin, the first direction is taken as an extending direction of an x-axis, and a positive direction of the x-axis is a direction pointing to the right in fig. 1; the second direction is taken as the extending direction of the y axis, the extending direction of the y axis is parallel to the extending direction of the cross beam 12, and the positive direction of the y axis is the upward direction in fig. 1; the third direction is taken as the extending direction of the z-axis, the extending direction of the z-axis is perpendicular to the reference plane 14, and the positive direction of the z-axis is the direction in which the position of fig. 1 points to the reference plane 14. Through set up on support 121 and be used for driving the relative support 121 of detection head 13 slip or pivoted adjusting part, and adjusting part can drive and detect head 13 and rotate or slide on six degrees of freedom to the concrete position and the angle of adjustment detection head 13 are convenient for.
When the adjusting assembly is provided, referring to fig. 2 and 3, the adjusting assembly includes a first driving mechanism disposed on the bracket 121 and driving the detecting head 13 to slide along a first direction relative to the bracket 121, a second driving mechanism disposed on the first driving mechanism and driving the detecting head 13 to slide along a second direction relative to the bracket 121, and a third driving mechanism 63 disposed on the second driving mechanism and driving the detecting head 13 to slide along a third direction relative to the bracket 121. In the case where each of the first, second, and third driving mechanisms 63 shown above is specifically provided, the driving mechanism may be a linear motor, a driving cylinder, or a mechanism for driving the detection head 13 to slide in a certain direction, which is conventional in the art. The detection head 13 is driven to slide in the first direction, the second direction and the third direction by adopting a driving mechanism so as to adjust the movement of the detection head 13 in three different directions. And when the driving mechanism drives the detection head 13 to the set position, the detection head 13 is locked at the set position by stopping the driving of the detection head 13 by the driving mechanism. In a specific application, when the detection head 13 needs to detect the substrate, the third driving mechanism 63 drives the detection head 13 to move toward the substrate, so that the distance between the detection head 13 and the substrate is within a set distance. When the detection head 13 completes the detection of the substrate, the detection head 13 is driven by the third driving mechanism 63 to move in a direction away from the substrate. It should be understood that the above only shows several ways of implementing the adjustment assembly to drive the detection head 13 to slide in 3 different directions, and besides, other arrangements capable of implementing the detection head 13 to slide in the first direction, the second direction and the third direction may also be adopted.
With continued reference to fig. 2 and 3, the adjusting assembly further includes a base 20 fixed on the third driving mechanism 63, a first adjusting seat 21 rotatably connected to the base 20 via a first rotating shaft 31, a second adjusting seat 22 rotatably connected to the first adjusting seat 21 via a second rotating shaft 32, and a third adjusting seat 23 rotatably connected to the second adjusting seat 22 via a third rotating shaft 33. The axis of the first rotating shaft 31 is parallel to the first direction, the axis of the second rotating shaft 32 is parallel to the second direction, and the axis of the third rotating shaft 33 is parallel to the third direction. Through setting up 3 regulation seats and rotating the pivot of connecting 3 regulation seats to realize detecting the rotation of head 13 in 3 directions. And the base 20, the first adjusting seat 21, the second adjusting seat 22 and the third adjusting seat 23 which are sequentially connected with the adjacent adjusting seats in a rotating manner are arranged on the third driving mechanism 63, so that the adjustment of the adjusting assembly on the detecting head 13 is facilitated.
In a specific arrangement, referring to fig. 3, the base 20 is a connecting plate fixed to the third driving mechanism 63 by means of screw fastening, welding, or the like. The first adjusting seat 21 includes a first connecting plate 211 and a second connecting plate 212 perpendicular to each other and fixedly connected to each other, wherein the first connecting plate 211 is rotatably connected to the base 20 through a first rotating shaft 31. When the first connecting plate 211 and the second connecting plate 212 are connected, the first connecting plate 211 may be fixedly connected to the second connecting plate 212 by welding, clamping, or the like. The first connection plate 211 and the second connection plate 212 are perpendicular to each other, which means that the installation surface of the first connection plate 211 and the installation surface of the second connection plate 212 are perpendicular to each other. And the extending direction of the first rotating shaft 31 is parallel to the extending direction of the x-axis. Through adopting two mutually perpendicular's connecting plate as first regulation seat 21, simplify the structure of first regulation seat 21, reduce the space that first regulation seat 21 took. It should be understood that the manner of composing the first adjusting seat 21 is not limited to the above-described illustrated manner of composing by two connecting plates perpendicular to each other, and other manners of composing may be adopted.
In addition, the adjusting assembly further comprises a first set screw for locking the first adjusting seat 21 to the base 20, and in particular, the first set screw is used for locking the base 20 and the first connecting plate 211. When the first fastening screw is specifically arranged, an annular groove may be formed in the base 20, a circle center of the annular groove is located on an axis of the first rotating shaft 31, a through hole coinciding with the annular groove is formed in the first connecting plate 211, and the first fastening screw penetrates through the first connecting plate 211 and the annular groove in the base 20. When the first set screw is loosened, the first connecting plate 211 can rotate around the first rotating shaft 31 relative to the base 20, and when the first set screw is tightened, the first connecting plate 211 cannot rotate relative to the base 20, so that the first adjusting seat 21 is locked at the set position, and the detection head 13 is set at the set position. It should be understood that the manner of locking the first adjusting seat 21 on the base 20 is not limited to the manner of locking by the first set screw, and other arrangements may be adopted.
With reference to fig. 2 and fig. 3, the second adjusting base 22 includes a third connecting plate 213 and a fourth connecting plate 214 that are perpendicular to each other and fixedly connected, wherein the third connecting plate 213 is rotatably connected to the second connecting plate 212 via the second rotating shaft 32. When the third connecting plate 213 and the fourth connecting plate 214 are connected specifically, the third connecting plate 213 may be fixedly connected to the fourth connecting plate 214 by welding, clamping, or the like. The third connection plate 213 and the fourth connection plate 214 are perpendicular to each other, which means that the installation surface of the third connection plate 213 and the installation surface of the fourth connection plate 214 are perpendicular to each other. And the extending direction of the second rotating shaft 32 is parallel to the extending direction of the y-axis. By adopting two mutually perpendicular connecting plates as the second adjusting seat 22, the structure of the second adjusting seat 22 is simplified, and the space occupied by the second adjusting seat 22 is reduced. It should be understood that the manner of forming the second adjustment seat 22 is not limited to the above-described arrangement of two perpendicular connection plates, and other arrangements may be used.
In addition, the adjusting assembly further comprises a second set screw for locking the second adjusting seat 22 to the first adjusting seat 21, and in particular, the second set screw is used for locking the second connecting plate 212 and the third connecting plate 213. In a specific arrangement, an annular groove may be formed in the second connecting plate 212, a center of the annular groove is located on an axis of the second rotating shaft 32, a through hole coinciding with the annular groove is formed in the third connecting plate 213, and the second set screw passes through the annular grooves formed in the third connecting plate 213 and the second connecting plate 212. When the second set screw is loosened, the third connecting plate 213 can rotate around the second rotating shaft 32 relative to the second connecting plate 212, and when the second set screw is tightened, the third connecting plate 213 cannot rotate relative to the second connecting plate 212, so that the second adjusting seat 22 is locked at the set position, and the detection head 13 is set at the set position. It should be understood that the manner of locking the second adjusting seat 22 to the first adjusting seat 21 is not limited to the manner of locking by the second set screw, and other arrangements may be adopted.
With continued reference to fig. 2 and 3, the third adjusting seat 23 includes a fifth connecting plate 215 rotatably connected to the fourth connecting plate 214 by the third rotating shaft 33. Specifically, the fifth connecting plate 215 is rotatably connected to the fourth connecting plate 214 by the third rotating shaft 33, wherein the axial direction of the third rotating shaft 33 is parallel to the z-axis direction. By adopting the fifth connecting plate 215 as the third adjusting seat 23, the structure of the third adjusting seat 23 is simplified, and the space occupied by the third adjusting seat 23 is reduced. It should be understood that the manner of composing the third adjusting seat 23 is not limited to the above-described illustrated manner of composing by the fifth connecting plate 215, and other manners of composing may be adopted.
In addition, the adjusting assembly further comprises a third set screw for locking the third adjusting seat 23 to the second adjusting seat 22, and in particular, the third set screw is used for locking the fifth connecting plate 215 and the fourth connecting plate 214. In a specific arrangement, an annular groove may be formed in the fourth connecting plate 214, a center of the annular groove is located on an axis of the third rotating shaft 33, a through hole coinciding with the annular groove is formed in the fifth connecting plate 215, and the third set screw passes through the annular grooves formed in the fifth connecting plate 215 and the fourth connecting plate 214. When the third set screw is unscrewed, the fifth connecting plate 215 can rotate around the third rotating shaft 33 relative to the fourth connecting plate 214, and when the third set screw is screwed, the fifth connecting plate 215 cannot rotate relative to the fourth connecting plate 214, so that the third adjusting seat 23 is locked at the set position, and the detection head 13 is set at the set position. It should be understood that the manner of locking the third adjusting seat 23 to the second adjusting seat 22 is not limited to the manner of locking by the third set screw, and other arrangements may be adopted. In addition, in the above scheme, the adjusting seat is formed by adopting a connecting plate mode, so that the space occupied by the adjusting component is reduced.
It should be understood that the above only illustrates a few ways of adjusting the assembly, and that other arrangements may be used, as long as: the protection scope of the embodiment of the present invention is within the scope of the present invention, wherein the detection head 13 is driven to slide along the first direction, the second direction and the third direction respectively relative to the bracket 121, the detection head 13 is driven to rotate along the first direction, the second direction and the third direction respectively relative to the bracket 121, and the adjustment assembly can lock the detection head 13 at the set position.
Referring to fig. 2 and 3, the calibration device provided by the embodiment of the present invention further includes a floating mechanism 50 disposed on the adjustment assembly and used for fixing the detection head 13. The floating mechanism 50 for fixing the detection head 13 is arranged on the adjusting assembly, so that the detection head 13 can move relative to the adjusting assembly within a certain range. In a specific arrangement, referring to fig. 3, a frame 40 is fixedly connected to the fifth connecting plate 215 by welding, screw fastening, clamping, or the like, and a floating mechanism 50 is disposed on a side of the frame 40 away from the fifth connecting plate 215. When the floating mechanism 50 is specifically arranged, the floating mechanism 50 includes a spring, one end of which is fixedly connected with the detection head 13 by welding, clamping, and the like, and the other end of which is fixedly connected with the frame 40. The number of springs may be 1, 2, 3, 4, etc. The detection head 13 can be rotated relative to the frame 40 by the floating mechanism 50, so that the detection head 13 can be moved within a predetermined range. It should be understood that the above description shows only one way of making up the float mechanism 50, and that other arrangements may be used in addition thereto. That is, the arrangement mode that only the detecting head 13 can be driven to float within a certain range relative to the adjusting component is within the protection scope of the embodiment of the present invention. In addition, it should be noted that the floating mechanism 50 is not limited to be disposed on the frame 40, and may be fixedly connected to the fifth connecting plate 215 directly by means of screw fastening, welding, or the like.
In order to calibrate the parallelism of the reference line 132 on the detection surface 131 of the detection head 13 relative to the second direction, referring to fig. 2, the calibration apparatus provided in the embodiment of the present invention further includes a detection mechanism located below the detection head 13 and configured to detect the offset of the reference line 132 on the detection surface 131 relative to the second direction. When the detection mechanism is specifically provided, referring to fig. 2, the detection mechanism is a camera 80, and the camera 80 includes a camera for detecting the position of the reference line 132 of the detection surface 131. When having an application, referring to fig. 4, a plurality of marking points are provided on the reference line 132 of the detection surface 131. Before the detection head 13 detects the substrate, the parallelism of the reference line 132 of the detection surface 131 in the second direction is first calibrated so that the parallelism of the reference line 132 of the detection head 13 in the second direction is within a set range. When the marking points are specifically set, the number of the marking points can be any value not less than 2, such as 2, 3, 4 and the like. Referring to fig. 4, 3 marker points are disposed on the detection surface 131, and the 3 marker points are equidistantly distributed. It should be understood that the 3 marking points are not limited to the equidistant arrangement, i.e. the distance between the first marking point 71 and the second marking point 72 may not be equal to the distance between the first marking point 71 and the third marking point 73. In addition, it should be noted that the number of the marker points is not limited to 3 shown in fig. 5, and in addition to this, the number of the marker points may be 2, specifically, only the first marker point 71 and the second marker point 72 may be set, and the third marker point 73 may not be set.
When each mark point is set, referring to fig. 5 and 6, each mark point is composed of four rectangles, the four rectangles are arranged along a cross shape, and the mark point includes two symmetrical lines, one of the symmetrical lines coincides with the reference line 132 of the detection surface 131, and the other symmetrical line is perpendicular to the reference line 132 of the detection surface 131. For the convenience of the following description, the symmetrical line perpendicular to the reference line 132 at the marking point is a first symmetrical line 701, and the symmetrical line coincident with the reference line 132 at the marking point is a second symmetrical line 702. It should be understood that fig. 5 and 6 only show one way of composing the marking points, and other arrangements may be adopted.
When the parallelism of the reference line 132 of the detection head 13 in the y direction is specifically calibrated, referring to fig. 5, the adjustment assembly is adjusted to align the camera with the first mark point 71 in both the first direction and the second direction, specifically, the first symmetric line 701 on the first mark point 71 coincides or approximately coincides with one of the cross-shaped mark lines on the camera, and the second symmetric line 702 coincides or approximately coincides with the other of the cross-shaped mark lines on the camera. For convenience of description, a mark line parallel to the x-axis direction in the cross-shaped mark lines on the camera is a first mark line 81, and a mark line parallel to the y-axis direction in the cross-shaped mark lines is a second mark line 82. When the camera is aligned with the first mark point 71 in both the first direction and the second direction, the first symmetrical line 701 on the first mark point 71 is coincident or approximately coincident with the first mark line 81, and the second symmetrical line 702 on the second mark point 72 is coincident or approximately coincident with the second mark line 82.
Then, the detection head 13 is moved along the y direction, so that the second mark point 72 is detected by the camera and the camera is aligned with the second mark point 72 in the first direction. Specifically, referring to fig. 6, the first mark line 81 in the cross-shaped mark line in the camera is closely overlapped with the first symmetry line 701 in the second mark point 72. At this time, since the extending direction of the reference line 132 on the detection surface 131 is not completely parallel to the second direction, the second symmetrical line 702 of the second mark point 72 does not coincide or nearly coincide with the second mark line 82 among the cross-shaped mark lines of the camera. And the larger the distance between the second line of symmetry 702 and the second mark line 82, the larger the amount of displacement of the reference line 132 on the detection surface 131 in the second direction. The smaller the distance between the second line of symmetry 702 and the second mark line 82, the smaller the amount of displacement of the reference line 132 on the detection surface 131 in the second direction.
The adjustment assembly is then adjusted to make the second marking line 82 on the camera coincide or approximately coincide with the second symmetry line 702 on the second marking point 72, so as to reduce the offset of the reference line 132 on the detection surface 131 in the second direction. Specifically, the adjustment assembly is adjusted to rotate the detection head 13 in the third direction, so that the second marking line 82 on the camera coincides or approximately coincides with the second symmetry line 702 on the second marking point 72, thereby calibrating the parallelism between the reference line 132 on the detection surface 131 and the second direction.
When the number of the mark points is 3 or more than 3, the adjusting component can be adjusted to enable the adjusting component to drive the detecting head 13 to slide to other positions along the second direction, and whether the mark points at other positions are overlapped or approximately overlapped with the cross mark line on the camera is observed. If the first symmetrical line 701 on the third mark point 73 is coincident or approximately coincident with the first mark line 81 on the camera and the second symmetrical line 702 on the third mark point 73 is coincident or approximately coincident with the second symmetrical line 702 on the camera, it means that the offset of the reference line 132 on the detection surface 131 in the second direction is small, and it is determined that the parallelism between the reference line 132 on the detection surface 131 and the second direction is within the set range.
In this way, the parallelism of the reference line 132 on the detection surface 131 in the second direction can be calibrated without measuring the displacement deviation, thereby facilitating the calibration.
Referring to fig. 2, 3 and 7, the calibration apparatus according to the embodiment of the invention further includes at least 3 displacement sensors 41 disposed on the adjustment assembly and used for detecting the displacement of the detection surface 131 in the first direction and the second direction relative to the reference plane 14, and the at least 3 displacement sensors 41 are not in the same line. In a specific setting, the number of the displacement sensors 41 may be any value of not less than 3, such as 3, 4, 5, and the like. Referring to fig. 3, at least 3 displacement sensors 41 are fixed to the frame 40 by means of screw fastening, snap fitting or the like. It should be understood that the arrangement of the at least 3 displacement sensors 41 is not limited to the arrangement on the frame 40 shown above, and other arrangements capable of detecting the displacement amount between the detection surface 131 and the reference plane 14 may be adopted. When the detecting surface 131 is close to the reference plane 14 along the z-axis in the positive direction and completely attached to the reference plane 14, the position change of a plurality of different points on the detecting head 13 is detected by at least 3 displacement sensors 41 to reflect the deflection amount of the detecting head 13 relative to the reference plane 14, so that the adjusting assembly is convenient to adjust to improve the parallelism between the detecting surface 131 on the detecting head 13 and the reference plane 14.
In a specific application, at least 3 displacement sensors 41 are adjusted, so that the readings of at least 3 displacement sensors 41 are the same, and the readings of at least 3 displacement sensors 41 are greater than the floating range of the floating mechanism 50.
The detection head 13 is then slid in the forward direction of the z-axis by adjusting the adjustment assembly so that the detection head 13 moves closer to the reference plane 14. Since the detection surface 131 of the detection head 13 has a displacement amount with respect to the reference plane 14, a portion of the detection surface 131 of the detection head 13 first comes into contact with the reference plane 14. Then, the third driving mechanism 63 drives the detection head 13 to move continuously in the direction approaching the reference plane 14, and at this time, the floating mechanism 50 can rotate within a certain range, so that the detection surface 131 of the detection head 13 rotates, and the detection surface 131 of the detection head 13 and the reference plane 14 can be completely attached. Since the displacement variation of different points on the detection surface 131 in the z-axis direction during the rotation of the detection surface 131 is different, the readings of at least 3 displacement sensors 41 are different, so as to reflect the offset between the detection surface 131 of the detection head 13 and the reference plane 14. If the difference of the readings of at least 3 displacement sensors 41 is larger, the larger the displacement amount of the detection surface 131 from the reference plane 14 is; the smaller the difference in the readings of at least 3 displacement sensors 41, the smaller the amount of displacement of the detection surface 131 from the reference plane 14.
The adjustment assembly is then adjusted so that the readings of at least 3 displacement sensors 41 are the same again. Specifically, the first adjusting seat 21 is rotated in the first direction relative to the base 20, and the second adjusting seat 22 is rotated in the second direction relative to the first adjusting seat 21, so that the readings of at least 3 displacement sensors 41 tend to be consistent, and the offset between the detection surface 131 of the detection head 13 and the reference plane 14 is reduced, thereby improving the parallelism of the detection surface 131 of the detection head 13 relative to the reference plane 14.
The adjustment assembly is then adjusted to move the detection head 13 in the negative direction of the z-axis to separate the detection head 13 from the reference plane 14. During the separation of the detection head 13 from the reference plane 14, since the floating mechanism 50 floats within a certain range, the detection head 13 rotates, so that the readings of at least 3 displacement sensors 41 change, and the readings of at least 3 displacement sensors 41 may be inconsistent again. However, since the floating range of the floating mechanism 50 is specifically determined at this time, the amount of displacement between the detection surface 131 of the detection head 13 and the reference plane 14 is equal to or smaller than the floating range of the floating mechanism 50. And the floating range of the floating mechanism 50 is adjustable, so that the amount of deviation between the detection surface 131 of the detection head 13 and the reference plane 14 can be controlled within a set range by reducing the floating range of the floating mechanism 50 and reducing the amount of deviation between the detection surface 131 of the detection head 13 and the reference plane 14.
In addition, in order to further reduce the offset amount of the detection surface 131 of the detection head 13 with respect to the reference plane 14, when the adjustment unit is adjusted to slide the detection head 13 in the third direction in a direction away from the reference plane 14, the readings of at least 3 displacement sensors 41 can be made to coincide by observing the judgment adjustment unit. If the readings of at least 3 displacement sensors 41 are inconsistent, the sliding of the detection head 13 is stopped, and the adjustment component is adjusted to make the readings of at least 3 displacement sensors 41 consistent, and the specific adjustment manner refers to the above description and is not repeated herein. If the readings of at least 3 displacement sensors 41 are consistent, the adjustment assembly is adjusted to bring the detection head 13 out of contact with the reference plane 14. When the detection head 13 is adjusted to slide in a direction away from the reference plane 14, whether the readings of at least 3 displacement sensors 41 are consistent or not is judged, and the readings of at least 3 displacement sensors 41 are kept consistent through adjusting the adjusting assembly, so that the parallelism between the detection surface 131 of the detection head 13 and the reference plane 14 is improved.
By providing a detection mechanism for detecting the parallelism of the reference line 132 with respect to the second direction and an adjustment assembly for adjusting the rotation or sliding of the detection head 13 in six degrees of freedom under the detection head 13, it is convenient to calibrate the parallelism of the reference line 132 on the detection head 13 with respect to the second direction and to improve the parallelism of the reference line 132 on the detection head 13 with respect to the second direction. The parallelism of the detection surface 131 of the detection head 13 with respect to the reference plane 14 is provided by providing at least 3 displacement sensors for detecting the amount of displacement of the detection surface 131 with respect to the reference plane 14, and an adjustment member on the mounting device so as to calibrate the parallelism between the detection surface 131 of the detection head 13 and the reference plane 14.
In addition, the embodiment of the present invention further provides a calibration method for the parallelism of the detection head 13 based on any one of the calibration apparatuses described above, which mainly includes calibrating the parallelism of the reference line 132 and the second direction, and calibrating the parallelism of the detection surface 131 and the reference plane 14.
The detecting reference line 132 and the second direction have a parallelism, including: marking mark points on the reference line 132 of the detection surface 131, wherein the mark points include a first mark point 71 and a second mark point 72; aligning the first mark point 71 with the detection mechanism in the first direction and the second direction; driving the detection head 13 to slide along the second direction to a position where the second mark point 72 is aligned with the detection mechanism in the first direction; the adjustment assembly is adjusted to align the second marker point 72 with the detection mechanism in the second direction. For a specific operation mode, reference is made to the above description, and details are not repeated herein.
Calibrating the parallelism of the detection surface 131 with the reference plane 14 includes: adjusting at least 3 displacement sensors 41 to make readings of at least 3 displacement sensors 41 consistent; adjusting the adjusting assembly to make the detection surface 131 fit with the reference plane 14; the adjustment assembly is adjusted to bring the readings of at least 3 displacement sensors 41 into agreement. For a specific operation mode, reference is made to the above description, and details are not repeated herein.
Calibrating the parallelism between the detection surface 131 and the reference plane 14 further includes: adjusting the adjusting assembly to enable the detection head 13 to slide in a third direction in a direction away from the reference plane 14; judging that the adjusting component enables the readings of at least 3 displacement sensors 41 to be consistent, if the readings of at least 3 displacement sensors 41 are inconsistent, stopping the sliding of the detection head 13, and adjusting the adjusting component to enable the readings of at least 3 displacement sensors 41 to be consistent; if the readings of at least 3 displacement sensors 41 are consistent, the adjustment assembly is adjusted to bring the detection head 13 out of contact with the reference plane 14. When the detection head 13 is adjusted to slide in a direction away from the reference plane 14, whether the readings of at least 3 displacement sensors 41 are consistent or not is judged, and the readings of at least 3 displacement sensors 41 are kept consistent through adjusting the adjusting assembly, so that the parallelism between the detection surface 131 of the detection head 13 and the reference plane 14 is improved. For a specific operation mode, reference is made to the above description, and details are not repeated herein.
It should be noted that the above-mentioned order of the parallelism of the reference line 132 of the calibration detection surface 131 in the second direction and the parallelism of the calibration detection surface 131 and the reference plane 14 may be reversed, that is, the parallelism of the detection surface 131 and the reference plane 14 may be calibrated first, and then the parallelism of the reference line 132 of the detection surface 131 in the second direction may be calibrated later.
By arranging the mark points including the first mark point 71 and the second mark point 72 on the reference line 132, the detection mechanism can detect the offset of the reference line 132 in the second direction, so that the adjustment assembly can be adjusted conveniently to reduce the offset of the reference line 132 in the second direction, and the parallelism of the reference line 132 on the detection surface 131 in the second direction can be improved. When the detection surface 131 is not attached to the reference plane 14 until the detection surface 131 is attached to the reference plane 14 by at least 3 displacement sensors 41, the amount of displacement is reflected by the change in the reading of the displacement sensors 41 at least at 3 points on the same straight line on the detection head 13. Parallelism between the sensing surface 131 and the reference plane 14 is improved by adjusting the adjustment assembly to bring the readings of at least 3 displacement sensors 41 into agreement again, thereby facilitating calibration of the offset between the sensing surface 131 and the reference plane 14.
In addition, the embodiment of the present invention further provides a substrate detection apparatus, and referring to fig. 1, the substrate detection apparatus includes any one of the above-mentioned calibration devices for detecting the parallelism of the head 13, and the head 13 fixed on the floating mechanism 50. Wherein, the supporting component includes the support body structure, set up on the support body structure and be used for placing the reference plane 14 of base plate and set up the slide rail 11 on the support body structure, and crossbeam 12 sliding fit is on slide rail 11. For the specific setting, reference is made to the above description, and details are not repeated here.
Referring to fig. 1, the number of the detection heads 13 on the beam 12 is plural, the number of the carrying devices is plural, the plurality of detection heads 13 correspond to the plurality of carrying devices one by one, and each detection head 13 is fixed on the corresponding carrying device. As shown in fig. 1, the substrate inspection apparatus includes 3 inspection heads 13 and 3 corresponding mounting devices provided on a beam 12. It should be understood that the number of the detection heads 13 and the carrying devices provided on the same cross beam 12 is not limited to 3 shown in fig. 1 and 2, and the number of the detection heads 13 and the carrying devices provided on the same cross beam 12 may be 2, 4, 5, or the like.
Before the substrate is detected, one of the detection heads 13 on the beam 12 is calibrated according to the method, so that the parallelism between the detection surface 131 of one of the detection heads 13 and the reference plane 14 is within a set range, and the parallelism of the reference line 132 on one of the detection surfaces 131 in the second direction is within a set range.
Thereafter, the detection head 13 and the mounting device are slid in the extending direction of the beam 12 so that the detection head 13 is not positioned above the detection mechanism. The other detection head 13 on the beam 12 is slid above the detection mechanism, and the other detection head 13 on the beam 12 is calibrated by the above-described calibration method. Through the above operation, the parallelism of the reference lines 132 of the detection surfaces 131 in the second direction on the plurality of detection heads 13 on the same cross beam 12 is within the same set range, and the parallelism of the detection surfaces 131 on the plurality of detection heads 13 on the same cross beam 12 with respect to the reference plane 14 is within the same set range.
It should be understood that the number of the beams 12 slidably fitted on the slide rail 11 is not limited to the one shown above, and the number of the beams 12 may be 2 or more than 2. When the number of the beams 12 is 2 or more than 2, the plurality of detection heads 13 on one of the beams 12 may be calibrated in the above manner, and then the detection heads 13 on the other beams 12 may be calibrated according to the same calibration method. Through the above operation, the parallelism of the reference lines 132 of the detection surfaces 131 of the plurality of detection heads 13 in the same substrate detection apparatus in the second direction is within the same set range, and the parallelism of the detection surfaces 131 of the plurality of detection heads 13 in the same substrate detection apparatus with respect to the reference plane 14 is within the same set range.
The above description is only for the specific embodiments of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art can easily conceive of the changes or substitutions within the technical scope of the present invention, and the changes or substitutions should be covered within the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (11)
1. A calibration apparatus for detecting parallelism of a head for detecting a substrate on a reference plane, the head having a detection surface and a reference line on the detection surface, the calibration apparatus comprising:
a support assembly;
a cross beam disposed on the support assembly and above the reference plane;
the carrying device is assembled on the cross beam in a sliding mode and used for carrying the detection head, and comprises a support assembled on the cross beam in a sliding mode, an adjusting assembly arranged on the support and used for driving the detection head to slide or rotate relative to the support, and a floating mechanism arranged on the adjusting assembly and used for fixing the detection head; the adjusting component can drive the detecting head to slide along a first direction, a second direction and a third direction relative to the bracket respectively, the adjusting component can also drive the detecting head to rotate along the first direction, the second direction and the third direction relative to the bracket respectively, and the adjusting component can also lock the detecting head at a set position; the first direction, the second direction and the third direction are pairwise perpendicular, the second direction is parallel to the extending direction of the cross beam, and the third direction is perpendicular to the reference plane;
the detection mechanism is positioned below the detection head and used for detecting the offset of the datum line relative to the second direction;
and at least 3 displacement sensors which are arranged on the carrying device and are used for detecting the displacement of the detection surface relative to the reference plane in the first direction and the second direction, wherein the at least 3 displacement sensors are not on the same straight line.
2. The device for calibrating parallelism of a test head according to claim 1, wherein the adjustment assembly includes a first drive mechanism disposed on the carriage and driving the test head to slide relative to the carriage in the first direction, a second drive mechanism disposed on the first drive mechanism and driving the test head to slide relative to the carriage in the second direction, and a third drive mechanism disposed on the second drive mechanism and driving the test head to slide relative to the carriage in the third direction.
3. The device for calibrating the parallelism of the inspection heads according to claim 2, wherein the adjustment assembly further comprises a base fixed to the third driving mechanism, a first adjustment base rotatably connected to the base via a first rotating shaft, a second adjustment base rotatably connected to the first adjustment base via a second rotating shaft, and a third adjustment base rotatably connected to the second adjustment base via a third rotating shaft; the axis of the first rotating shaft is parallel to the first direction, the axis of the second rotating shaft is parallel to the second direction, and the axis of the third rotating shaft is parallel to the third direction.
4. The device for calibrating the parallelism of a test head according to claim 3, wherein the first adjustment base comprises a first connecting plate and a second connecting plate which are relatively vertical and fixedly connected, wherein the first connecting plate is rotatably connected with the base through the first rotating shaft;
the second adjusting seat comprises a third connecting plate and a fourth connecting plate which are perpendicular to each other and fixedly connected with each other, wherein the third connecting plate is rotatably connected with the second connecting plate through the second rotating shaft;
the third adjusting seat comprises a fifth connecting plate which is rotatably connected with the fourth connecting plate through the third rotating shaft.
5. The head parallelism calibrating device according to claim 4, further comprising a frame fixedly connected to the fifth connecting plate and configured to hold the at least 3 displacement sensors, wherein the floating mechanism is fixed to a side of the frame facing away from the fifth connecting plate.
6. The head parallelism calibration device of claim 3, wherein the adjustment assembly further comprises:
a first set screw locking the first adjustment seat to the base;
a second set screw for locking the second adjusting seat on the first adjusting seat;
and a third set screw for locking the third adjusting seat on the second adjusting seat.
7. A calibration device for detecting head parallelism according to any one of claims 1 to 6, wherein the detection mechanism is a camera.
8. A method for calibrating parallelism of a test head based on the device for calibrating parallelism of a test head according to any one of claims 1 to 7, comprising:
calibrating the parallelism of the reference line and the second direction, comprising: marking mark points on the reference line of the detection surface, wherein the mark points comprise a first mark point and a second mark point; aligning the first marking point with the detection mechanism in the first and second directions; driving the detection head to slide along the second direction to a position where the second mark point is aligned with the detection mechanism in the first direction; adjusting the adjustment assembly to align a second marking point with the detection mechanism in the second direction;
calibrating parallelism of the detection surface and the reference plane, comprising: adjusting the at least 3 displacement sensors to make the readings of the at least 3 displacement sensors consistent; adjusting the adjusting assembly to enable the detection surface to be attached to the reference plane; adjusting the adjustment assembly to bring readings of the at least 3 displacement sensors into agreement.
9. The method of calibrating parallelism of a test head according to claim 8, wherein said calibrating parallelism of the test face and the reference plane further comprises:
adjusting the adjusting assembly to enable the detection head to slide along a third direction in a direction away from the reference plane;
judging whether the reading values of the at least 3 displacement sensors are consistent, if the reading values of the at least 3 displacement sensors are inconsistent, stopping the sliding of the detection head, and adjusting the adjusting assembly to enable the reading values of the at least 3 displacement sensors to be consistent; and if the readings of the at least 3 displacement sensors are consistent, adjusting the adjusting assembly to enable the detection head to be out of contact with the reference plane.
10. A substrate inspection apparatus comprising the inspection head parallelism calibration apparatus according to any one of claims 1 to 7, and an inspection head fixed to the floating mechanism; the support assembly comprises a frame body structure, a reference plane and a slide rail, wherein the reference plane is arranged on the frame body structure and used for placing the substrate, and the slide rail is arranged on the frame body structure; the cross beam is assembled on the sliding rail in a sliding mode.
11. The substrate detection apparatus according to claim 10, wherein the number of the mounting devices is at least two, and the number of the detection heads is at least two; the at least two carrying devices correspond to the at least two detection heads one by one, and each detection head is fixed on the corresponding carrying device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910579387.3A CN112146611B (en) | 2019-06-28 | 2019-06-28 | Calibration device and calibration method for parallelism of detection head and substrate detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910579387.3A CN112146611B (en) | 2019-06-28 | 2019-06-28 | Calibration device and calibration method for parallelism of detection head and substrate detection device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112146611A true CN112146611A (en) | 2020-12-29 |
| CN112146611B CN112146611B (en) | 2021-11-19 |
Family
ID=73891519
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910579387.3A Active CN112146611B (en) | 2019-06-28 | 2019-06-28 | Calibration device and calibration method for parallelism of detection head and substrate detection device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112146611B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114472098A (en) * | 2022-01-27 | 2022-05-13 | 苏州希盟智能装备有限公司 | Optical waveguide piece dispensing and laminating equipment |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02179409A (en) * | 1988-12-29 | 1990-07-12 | Mitsutoyo Corp | Linear displacement detector |
| JP2006267032A (en) * | 2005-03-25 | 2006-10-05 | Nsk Ltd | Angle measurement method for holding head, and angle measuring instrument for holding head |
| EP2306142A1 (en) * | 2009-10-01 | 2011-04-06 | Canon Kabushiki Kaisha | Surface shape measurement apparatus |
| US20110085178A1 (en) * | 2009-10-13 | 2011-04-14 | Mitutoyo Corporation | Offset amount calibrating method and surface texture measuring machine |
| US20170248399A1 (en) * | 2016-02-25 | 2017-08-31 | Mitutoyo Corporation | Inner-wall measuring instrument and offset-amount calculation method |
| CN206593628U (en) * | 2017-03-20 | 2017-10-27 | 常州信息职业技术学院 | A kind of parallelism detecting device |
| CN109283135A (en) * | 2017-07-21 | 2019-01-29 | 合肥欣奕华智能机器有限公司 | A kind of display panel testing |
| CN109520421A (en) * | 2018-12-21 | 2019-03-26 | 中国航空工业集团公司北京航空精密机械研究所 | A kind of the adjustment device and its method of adjustment of image gauge head posture |
-
2019
- 2019-06-28 CN CN201910579387.3A patent/CN112146611B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02179409A (en) * | 1988-12-29 | 1990-07-12 | Mitsutoyo Corp | Linear displacement detector |
| JP2006267032A (en) * | 2005-03-25 | 2006-10-05 | Nsk Ltd | Angle measurement method for holding head, and angle measuring instrument for holding head |
| EP2306142A1 (en) * | 2009-10-01 | 2011-04-06 | Canon Kabushiki Kaisha | Surface shape measurement apparatus |
| US20110085178A1 (en) * | 2009-10-13 | 2011-04-14 | Mitutoyo Corporation | Offset amount calibrating method and surface texture measuring machine |
| US20170248399A1 (en) * | 2016-02-25 | 2017-08-31 | Mitutoyo Corporation | Inner-wall measuring instrument and offset-amount calculation method |
| CN206593628U (en) * | 2017-03-20 | 2017-10-27 | 常州信息职业技术学院 | A kind of parallelism detecting device |
| CN109283135A (en) * | 2017-07-21 | 2019-01-29 | 合肥欣奕华智能机器有限公司 | A kind of display panel testing |
| CN109520421A (en) * | 2018-12-21 | 2019-03-26 | 中国航空工业集团公司北京航空精密机械研究所 | A kind of the adjustment device and its method of adjustment of image gauge head posture |
Non-Patent Citations (2)
| Title |
|---|
| TEETER M. 等: "RADIOSTEREOMETRIC ANALYSIS USING CLINICAL RADIOGRAPHIC VIEWS: MEASURING TOTAL HIP CUP POSITION AND WEAR", 《ORTHOPAEDIC PROCEEDINGS》 * |
| 林正德: "YHD—1型测高机活动测头的改进", 《内燃机配件》 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114472098A (en) * | 2022-01-27 | 2022-05-13 | 苏州希盟智能装备有限公司 | Optical waveguide piece dispensing and laminating equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| CN112146611B (en) | 2021-11-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US9194700B2 (en) | Device and method for reducing a wedge error | |
| EP2813811B1 (en) | Inside-diameter measurement device | |
| US9211647B2 (en) | Parallel link robot | |
| CN101310162B (en) | Adjustment device for a measuring head | |
| JP4745727B2 (en) | Paste applicator | |
| CN105140168A (en) | Carrying platform and wafer thickness detecting device | |
| CN115790455B (en) | Ink jet printing base plate roughness detecting system | |
| CN113649966B (en) | Product positioning device | |
| US9194698B2 (en) | Geodetic device and a method for determining a characteristic of the device | |
| CN108663836A (en) | Liquid crystal display panel detects and positioning device | |
| CN101915562A (en) | Calibrating device for tilt angle sensor | |
| CN112146611B (en) | Calibration device and calibration method for parallelism of detection head and substrate detection device | |
| US12106993B2 (en) | Method and device for aligning substrates | |
| US11258015B2 (en) | Mask cassette alignment device and method of aligning mask cassette | |
| CN107869963B (en) | Measuring device | |
| CN117470070A (en) | High-precision reflector angle measurement equipment and measurement method | |
| CN109959350A (en) | The detection method and device of prism right angle working face verticality | |
| CN213857989U (en) | Position fine adjustment equipment and assembly production line | |
| CN210800571U (en) | Two-degree-of-freedom adjusting device | |
| CN109887695B (en) | Positioning device and scribing equipment | |
| KR101467895B1 (en) | A localization method of marking unit and an appartus for marking using the same | |
| CN111254067A (en) | Clamping positioner of biochip | |
| JP6662089B2 (en) | Stage equipment | |
| KR101533382B1 (en) | System for measuring and assembling center of gravity for 2-axis driving apparatus | |
| JP3542451B2 (en) | Precision XYθ stage θ alignment method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 230013 Southwest District of Hefei City, Anhui Province Patentee after: Hefei xinyihua Intelligent Machine Co.,Ltd. Address before: 230013 Southwest District of Hefei City, Anhui Province Patentee before: HEFEI SINEVA INTELLIGENT MACHINE Co.,Ltd. |