CN112130269B - Automatic filter replacing device of exposure machine - Google Patents

Automatic filter replacing device of exposure machine Download PDF

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Publication number
CN112130269B
CN112130269B CN202011034165.2A CN202011034165A CN112130269B CN 112130269 B CN112130269 B CN 112130269B CN 202011034165 A CN202011034165 A CN 202011034165A CN 112130269 B CN112130269 B CN 112130269B
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China
Prior art keywords
fixedly connected
groove
grooves
sides
driving wheel
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Active
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CN202011034165.2A
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Chinese (zh)
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CN112130269A (en
Inventor
任新庄
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Guangxi Caixing Technology Co ltd
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Zhejiang Huajiang Technology Co ltd
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Priority to CN202011034165.2A priority Critical patent/CN112130269B/en
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/006Filter holders
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70Microphotolithographic exposure; Apparatus therefor
    • G03F7/708Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70825Mounting of individual elements, e.g. mounts, holders or supports
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70Microphotolithographic exposure; Apparatus therefor
    • G03F7/708Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70975Assembly, maintenance, transport or storage of apparatus

Abstract

The invention discloses an automatic filter replacing device of an exposure machine, which comprises a machine body and a mounting groove, wherein an operating platform is fixedly connected to one side of the machine body, a plurality of placing grooves are formed in the upper end of the operating platform, one sides, close to the machine body, of the placing grooves are all set to be inclined planes, first grooves are formed in the sides, far away from the machine body, of the placing grooves, lifting mechanisms are arranged in the first grooves, frames are arranged on the lifting mechanisms and are in inclined plane contact with the corresponding first grooves, filter bodies are fixedly connected to the inner sides of the frames, limiting holes are formed in the two sides of the frames, a plurality of first tooth blocks are uniformly arranged on the surfaces, in contact with the corresponding placing grooves, of the frames, a plurality of second grooves are formed in the upper end of the operating platform, and rotating rods are rotatably connected in the second grooves.

Description

Automatic filter replacing device of exposure machine
Technical Field
The invention relates to a device for automatically replacing a filter of an exposure machine, and belongs to the technical field of display equipment.
Background
The ultraviolet exposure machine is a machine device which transfers image information on a film or other transparent body to a surface coated with a photosensitive material by turning on light to emit ultraviolet rays with a UVA wavelength. Filter plates in the mounting grooves on the exposure machine are replaced according to different actual conditions so as to meet actual requirements.
The mode of current change filter all utilizes artifical the change usually, and change efficiency is slower, still can harm the filter surface simultaneously when handheld filter, influences the result of use.
Disclosure of Invention
The invention provides a device for automatically replacing a filter of an exposure machine, which effectively solves the problem of low efficiency of manually replacing the filter in the prior art. Meanwhile, the surface of the filter plate can be damaged when the filter plate is held by hands, and the using effect is influenced.
In order to solve the technical problems, the invention provides the following technical scheme:
the invention relates to an automatic filter replacing device of an exposure machine, which comprises a machine body and a mounting groove, wherein an operating table is fixedly connected to one side of the machine body, a plurality of placing grooves are formed in the upper end of the operating table, one sides, close to the machine body, of the placing grooves are arranged to be inclined planes, one sides, far away from the machine body, of the placing grooves are provided with first grooves, lifting mechanisms are arranged in the first grooves, frames are arranged on the lifting mechanisms, the frames are in inclined plane contact with the corresponding first grooves, the inner sides of the frames are fixedly connected with filter bodies, limiting holes are formed in two sides of the frames, a plurality of first tooth blocks are uniformly arranged on the frames in contact with the corresponding placing grooves, a plurality of second grooves are formed in the upper end of the operating table, rotating rods are rotatably connected in the second grooves, rotating cylinders are arranged in the second grooves, the rotating cylinders are arranged on the corresponding rotating rods, the rotating cylinders are fixedly connected with the corresponding rotating rods, a shell is fixedly connected with the corresponding rotating rods, a driving mechanism is arranged outside the operating table, one end of the rotating rods extends into the shell and is connected with the driving mechanism, and two limiting mechanisms are symmetrically arranged in the mounting groove.
According to a preferred technical scheme, the lifting mechanism comprises a first mounting seat, a first motor, a screw, two vertical rods and a lifting plate, the bottom end of the operating platform is fixedly connected with the first motors through the first mounting seats, the output end of the first motor is fixedly connected with the screw, the upper end of the screw extends into the first groove, the screw is rotatably connected with the inner wall of the first groove, the vertical rods are arranged on two sides of the screw, the two vertical rods are fixedly connected on the inner wall of the first groove, the lifting plate is sleeved on the screw and the two vertical rods, the lifting plate is in threaded connection with the screw, the lifting plate is in sliding connection with the two vertical rods, one end of the lifting plate extends out of the first groove, and the bottom end of the frame is placed at the upper end of the lifting plate.
According to a preferred technical scheme, the two limiting mechanisms respectively comprise top grooves, telescopic rods, limiting blocks and springs, the top walls of the mounting grooves are symmetrically provided with the two top grooves, the inner walls of the two top grooves are fixedly connected with the telescopic rods, the telescopic ends of the two telescopic rods are fixedly connected with the limiting blocks, the lower ends of the two limiting blocks extend out of the corresponding top grooves, the springs are fixedly connected between the two limiting blocks and the inner walls of the corresponding top grooves, and the two springs are sleeved on the outer sides of the corresponding telescopic rods.
As a preferred technical scheme of the invention, the lower end surfaces of the two limiting blocks are both in an arc shape, and the two limiting blocks are respectively matched with the two limiting holes on the two sides of the corresponding frame.
As a preferred technical scheme of the invention, the driving mechanism comprises a second mounting seat, a second motor, a first driving wheel, a driving belt and two second driving wheels, the second motor is fixedly connected to the outer side of the shell through the second mounting seat, the output end of the second motor is fixedly connected with the first driving wheel, the first driving wheel is connected with the two second driving wheels through the driving belt in a driving manner, the first driving wheel and the two second driving wheels are both positioned in the shell, the two second driving wheels are respectively positioned on two sides of the first driving wheel, the two second driving wheels are both rotatably connected with the inner wall of the shell, the first driving wheel and the second driving wheels are both fixedly connected with corresponding rotating rods, and the first driving wheel and the two second driving wheels are both of the same specification.
As a preferable technical scheme of the invention, the upper surface of the operating platform and the bottom wall of the installation groove are positioned at the same horizontal height.
As a preferred technical solution of the present invention, a plurality of second tooth blocks are uniformly and fixedly connected to the outer sides of the plurality of rotary drums, and the plurality of second tooth blocks are meshed with the corresponding plurality of first tooth blocks.
The invention has the following beneficial effects:
1. when the filter plate body needs to be replaced, a proper filter plate is selected, a first motor and a second motor are started, the first motor drives a screw rod to rotate, a lifting plate connected with the screw rod rises along the screw rod, meanwhile, the lifting plate supports the bottom end of the frame, the frame rises along with the lifting, and the frame is obliquely placed on a first groove inclined plane.
2. When the frame removed to the mounting groove in the time, the frame extruded the stopper, make two extrusion pieces shrink and advance to correspond the apical trough in, two correspond the spring and shrink, when two spacing holes on the frame corresponded with two stoppers, two stoppers stretched out through the restoring force that corresponds the spring and correspond the apical trough, and combine together with corresponding spacing hole, thereby prescribe a limit to the position of the filter plate body in frame and the frame, it is very convenient, do not need the manual work to install, guarantee the installation effectiveness and the result of use of filter plate body.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention and not to limit the invention. In the drawings:
FIG. 1 is a schematic view of the internal structure of the present invention;
FIG. 2 is an external structural view of the present invention;
FIG. 3 is a schematic view of the drive mechanism of the present invention;
FIG. 4 is a schematic structural diagram of a limiting mechanism of the present invention;
FIG. 5 is a schematic view of the lift mechanism of the present invention;
FIG. 6 is a schematic top view of the present invention;
FIG. 7 is an enlarged schematic view of the structure at A of the present invention;
fig. 8 is a schematic view of the frame structure of the present invention.
In the figure: 1. a body; 2. mounting grooves; 3. a limiting mechanism; 31. a telescopic rod; 32. a spring; 33. a top groove; 34. a limiting block; 4. a frame; 5. a placement groove; 6. a first groove; 7. a lifting mechanism; 71. a first motor; 72. a first mounting seat; 73. a lifting plate; 74. a vertical rod; 75. a screw; 8. an operation table; 9. a drive mechanism; 91. a second motor; 92. a second mounting seat; 93. a second transmission wheel; 94. a transmission belt; 95. a first drive pulley; 10. a housing; 11. a rotating rod; 12. a limiting hole; 13. a filter body; 14. a second groove; 15. a rotating drum; 16. a second tooth block; 17. a first tooth block.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without making any creative effort based on the embodiments in the present invention, belong to the protection scope of the present invention.
Example (b): as shown in figures 1-8, the automatic filter replacing device of the exposure machine comprises a machine body 1 and a mounting groove 2, wherein one side of the machine body 1 is fixedly connected with an operating platform 8, a plurality of placing grooves 5 are arranged at the upper end of the operating platform 8, one sides of the placing grooves 5 close to the machine body 1 are all arranged into inclined planes, one sides of the placing grooves 5 far away from the machine body 1 are all provided with first grooves 6, lifting mechanisms 7 are arranged in the first grooves 6, frames 4 are arranged on the lifting mechanisms 7, the frames 4 are in inclined plane contact with the corresponding first grooves 6, filter bodies 13 are fixedly connected at the inner sides of the frames 4, two sides of the frames 4 are all provided with limiting holes 12, one side of the frames 4 in contact with the corresponding placing grooves 5 is evenly provided with a plurality of first tooth blocks 17, 8 upper ends of operation panel are equipped with a plurality of second recesses 14, all rotate in a plurality of second recesses 14 and be connected with bull stick 11, all be equipped with rotary drum 15 in a plurality of second recesses 14, a plurality of rotary drums 15 all overlap and establish on corresponding bull stick 11, and a plurality of rotary drums 15 and 11 fixed connection that correspond the bull stick, 8 outside fixedly connected with casings 10 of operation panel, be equipped with actuating mechanism 9 in the casing 10, 11 one end tip of a plurality of bull sticks all stretch into the casing 10 in be connected with actuating mechanism 9, 2 roof symmetries in mounting groove are equipped with two stop gear 3, can automize and install filter plate body 13, do not need artifical handheld filter plate body 13 to install, guarantee filter plate body 13's installation effectiveness and result of use.
A plurality of second toothed blocks 16 are uniformly and fixedly connected to the outer sides of the plurality of rotary drums 15, the plurality of second toothed blocks 16 are meshed with a plurality of corresponding first toothed blocks 17, when the plurality of first toothed blocks 17 on the frame 4 are meshed with the plurality of first toothed blocks 17 on the rotary drum 15, the frame 4 is driven to transversely move by the rotary rods 11 and the rotary drums 15, the frame 4 is moved into the mounting groove 2, the driving mechanism 9 comprises a second mounting seat 92, a second motor 91, a first driving wheel 95, a driving belt 94 and two second driving wheels 93, the outer side of the casing 10 is fixedly connected with the second motor 91 by the second mounting seat 92, the output end of the second motor 91 is fixedly connected with the first driving wheel 95, the first driving wheel 95 is connected with two second driving wheels 93 by a driving belt 94, the first driving wheel 95 and the two second driving wheels 93 are both located in the casing 10, the two second driving wheels 93 are respectively located on both sides of the first driving wheel 95, the two second driving wheels 93 are rotatably connected with the inner wall of the casing 10, the first driving wheel 95 and the second driving wheel 93 are both fixedly connected with the corresponding rotary rods 11, the top wall of the mounting groove 31, the telescopic rod 31 and the top wall of the telescopic rod 31 are connected with two telescopic rod mechanisms, the telescopic link mechanisms 33, the top wall of the telescopic link 31 and the telescopic link 31, the telescopic link 31 are both located on the top wall of the top groove 3 and the top groove 3, the lower ends of two limit blocks 34 extend out of corresponding top grooves 33, springs 32 are fixedly connected between the two limit blocks 34 and the inner walls of the corresponding top grooves 33, the two springs 32 are sleeved outside the corresponding telescopic rods 31, when the frame 4 moves into the mounting groove 2, the frame 4 extrudes the limit blocks 34 to enable the two extrusion blocks to be retracted into the corresponding top grooves 33, the two corresponding springs 32 are contracted, when the two limit holes 12 on the frame 4 are opposite to the two limit blocks 34, the two limit blocks 34 extend out of the corresponding top grooves 33 through the restoring force of the corresponding springs 32 and are combined with the corresponding limit holes 12, so that the positions of the filter plate bodies 13 in the frame 4 and the frame 4 are limited, the lower end surfaces of the two limit blocks 34 are both arc-shaped, the two limit blocks 34 are respectively matched with the two limit holes 12 on the two sides of the corresponding frame 4, and the two limit blocks 34 can be contracted towards the inner walls of the corresponding top grooves 33 when contacting the frame 4, the lifting mechanism 7 comprises a first mounting seat 72, a first motor 71, a screw 75, two vertical rods 74 and a lifting plate 73, the bottom end of the operating platform 8 is fixedly connected with the first motors 71 through the first mounting seats 72, the output end of the first motor 71 is fixedly connected with the screw 75, the upper end of the screw 75 extends into the first groove 6, the screw 75 is rotatably connected with the inner wall of the first groove 6, the vertical rods 74 are arranged on both sides of the screw 75, the two vertical rods 74 are fixedly connected on the inner wall of the first groove 6, the lifting plate 73 is sleeved on the screw 75 and the two vertical rods 74, the lifting plate 73 is in threaded connection with the screw 75, the lifting plate 73 is in sliding connection with the two vertical rods 74, one end of the lifting plate 73 extends out of the first groove 6, the bottom end of the frame 4 is placed on the upper end of the lifting plate 73, the first motor 71 drives the screw 75 to rotate, the lifting plate 73 connected with the screw 75 and the screw 75 rises along the screw 75, at the same time, the lifting plate 73 holds the bottom end of the frame 4, so that the frame 4 is lifted.
Specifically, when the filter body 13 needs to be replaced, a proper filter body 13 is selected, the first motor 71 and the second motor 91 are started, the first motor 71 drives the screw 75 to rotate, the lifting plate 73 connected with the screw 75 of the screw 75 rises along the screw 75, meanwhile, the lifting plate 73 supports the bottom end of the frame 4, the frame 4 rises along with the lifting, and the frame 4 is obliquely arranged on the inclined surface of the first groove 6, therefore, as the frame 4 slowly rises, the upper end of the frame 4 is slowly close to the upper surface of the operating platform 8, the second motor 91 drives the first transmission wheel 95 to rotate, the first transmission wheel 95 drives the two second transmission wheels 93 to rotate through the transmission belt 94, the first transmission wheel 95 and the second transmission wheels 93 drive the corresponding rotating rods 11 and the corresponding rotating cylinders 15 to rotate, when a plurality of first tooth blocks 17 on frame 4 and a plurality of first tooth blocks 17 on the rotary drum 15 mesh mutually, drive frame 4 lateral shifting through bull stick 11 and rotary drum 15, move frame 4 to mounting groove 2 in, when frame 4 removed to mounting groove 2 in, frame 4 extrudees stopper 34, make two extrusion piece receipts shrink into corresponding top groove 33 in, two correspond spring 32 and contract, two spacing holes 12 on frame 4 are corresponding with two stopper 34, two stopper 34 stretch out corresponding top groove 33 through the restoring force that corresponds spring 32, and combine together with corresponding spacing hole 12, thereby prescribe a limit to the position of filter plate body 13 in frame 4 and the frame 4, it is very convenient, do not need the manual work to install, guarantee the installation effectiveness and the result of use of filter plate body 13.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (6)

1. The automatic filter replacing device of the exposure machine comprises a machine body (1) and a mounting groove (2), and is characterized in that one side of the machine body (1) is fixedly connected with an operating platform (8), the upper end of the operating platform (8) is provided with a plurality of placing grooves (5), one sides of the placing grooves (5) close to the machine body (1) are all arranged into inclined planes, one sides of the placing grooves (5) far away from the machine body (1) are all provided with a first groove (6), a plurality of first grooves (6) are all internally provided with a lifting mechanism (7), a plurality of lifting mechanisms (7) are all provided with frames (4), a plurality of frames (4) are all in inclined plane contact with corresponding first grooves (6), a plurality of inner sides of the frames (4) are all fixedly connected with filter bodies (13), a plurality of two sides of the frames (4) are all provided with limiting holes (12), a plurality of the surfaces of the frames (4) in contact with corresponding placing grooves (5) are all provided with a plurality of first tooth blocks (17), the upper end of the operating platform (8) is provided with a plurality of second grooves (14), a plurality of rotating rods (14) are all connected with a plurality of rotating rods (15), and a plurality of rotating cylinders (15) are all connected with corresponding rotating rods (15), a shell (10) is fixedly connected to the outer side of the operating platform (8), a driving mechanism (9) is arranged in the shell (10), one end parts of a plurality of rotating rods (11) extend into the shell (10) and are connected with the driving mechanism (9), and two limiting mechanisms (3) are symmetrically arranged on the top wall of the mounting groove (2);
a plurality of second tooth blocks (16) are uniformly and fixedly connected to the outer sides of the plurality of rotary drums (15), and the plurality of second tooth blocks (16) are meshed with the corresponding plurality of first tooth blocks (17).
2. The automatic filter replacing device of the exposure machine as claimed in claim 1, wherein the lifting mechanism (7) comprises a first mounting seat (72), a first motor (71), a screw rod (75), two vertical rods (74) and a lifting plate (73), the bottom end of the operating platform (8) is fixedly connected with a plurality of first motors (71) through a plurality of first mounting seats (72), the output end of the first motor (71) is fixedly connected with the screw rod (75), the upper end of the screw rod (75) extends into the first groove (6), the screw rod (75) is rotatably connected with the inner wall of the first groove (6), the vertical rods (74) are arranged on both sides of the screw rod (75), the two vertical rods (74) are fixedly connected on the inner wall of the first groove (6), the lifting plate (73) is sleeved on the screw rod (75) and the two vertical rods (74), the lifting plate (73) is in threaded connection with the screw rod (75), the lifting plate (73) is slidably connected with the two vertical rods (74), one end of the lifting plate (73) extends out of the first groove (6), and the lifting plate (73) is placed on the upper end of the frame (4).
3. The automatic filter device of changing of exposure machine of claim 1, characterized in that, two stop gear (3) all includes apical groove (33), telescopic link (31), stopper (34) and spring (32), mounting groove (2) roof symmetry is equipped with two apical grooves (33), two equal fixedly connected with telescopic link (31), two of apical groove (33) inner wall equal fixedly connected with stopper (34), two of telescopic link (31) flexible end equal fixedly connected with stopper (34), two corresponding apical groove (33) is all stretched out to stopper (34) lower extreme, two equal fixedly connected with spring (32) between stopper (34) and the corresponding apical groove (33) inner wall, two equal cover of spring (32) is established in the corresponding telescopic link (31) outside.
4. The automatic filter replacing device of the exposure machine as claimed in claim 3, wherein the lower end surfaces of the two limiting blocks (34) are both provided with arc shapes, and the two limiting blocks (34) are respectively matched with the two limiting holes (12) at two sides of the corresponding frame (4).
5. The automatic filter replacing device of the exposure machine as claimed in claim 1, wherein the driving mechanism (9) comprises a second mounting seat (92), a second motor (91), a first driving wheel (95), a driving belt (94) and two second driving wheels (93), the second motor (91) is fixedly connected to the outer side of the housing (10) through the second mounting seat (92), the first driving wheel (95) is fixedly connected to an output end of the second motor (91), the first driving wheel (95) is in transmission connection with the two second driving wheels (93) through the driving belt (94), the first driving wheel (95) and the two second driving wheels (93) are both located in the housing (10), the two second driving wheels (93) are respectively located on two sides of the first driving wheel (95), the two second driving wheels (93) are both in rotation connection with the inner wall of the housing (10), the first driving wheel (95) and the second driving wheel (93) are both in fixed connection with the corresponding rotating rod (11), and the first driving wheel (95) and the second driving wheel (93) are both in the same specification.
6. The automatic filter replacing device of the exposure machine as claimed in claim 1, wherein the upper surface of the operation table (8) and the bottom wall of the installation groove (2) are at the same level.
CN202011034165.2A 2020-09-27 2020-09-27 Automatic filter replacing device of exposure machine Active CN112130269B (en)

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Application Number Priority Date Filing Date Title
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Application Number Priority Date Filing Date Title
CN202011034165.2A CN112130269B (en) 2020-09-27 2020-09-27 Automatic filter replacing device of exposure machine

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CN112130269B true CN112130269B (en) 2022-12-30

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DE19702754A1 (en) * 1997-01-27 1998-07-30 Zeiss Carl Jena Gmbh Laser-scan-microscope filter changer
JP2000047122A (en) * 1998-07-22 2000-02-18 Siemens Ag Filter exchanging device for light emission unit
CN104375250A (en) * 2014-11-25 2015-02-25 宁波江丰生物信息技术有限公司 Device for automatically switching optical filter
WO2016123986A1 (en) * 2015-02-04 2016-08-11 深圳市华星光电技术有限公司 Automatic filter-replacing device of exposure apparatus and exposure apparatus
CN208459304U (en) * 2018-06-25 2019-02-01 上海恩迪检测控制技术有限公司 A kind of ray tube filtering sheet devices of quick adjustment radiographic inspection detection system
CN208805675U (en) * 2018-10-26 2019-04-30 江苏友迪激光科技有限公司 A kind of exposure machine into trigger structure
CN111671450A (en) * 2020-06-29 2020-09-18 苗娥 Automatic replacing device for filter disc of medical X-ray machine

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GB599743A (en) * 1945-06-12 1948-03-19 Farnsworth Television & Radio Automatic phonograph
JP2001358062A (en) * 2000-04-11 2001-12-26 Nikon Corp Method and apparatus for exposure
CN101458453A (en) * 2007-12-11 2009-06-17 上海华虹Nec电子有限公司 Projection aligner
CN104391431B (en) * 2014-12-12 2016-06-29 合肥京东方光电科技有限公司 Exposure imaging method and system, Exposure Control Module
CN204440009U (en) * 2014-12-29 2015-07-01 长兴(广州)光电材料有限公司 A kind of for checking the exposure machine of laser direct imaging dry film quality

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19702754A1 (en) * 1997-01-27 1998-07-30 Zeiss Carl Jena Gmbh Laser-scan-microscope filter changer
JP2000047122A (en) * 1998-07-22 2000-02-18 Siemens Ag Filter exchanging device for light emission unit
CN104375250A (en) * 2014-11-25 2015-02-25 宁波江丰生物信息技术有限公司 Device for automatically switching optical filter
WO2016123986A1 (en) * 2015-02-04 2016-08-11 深圳市华星光电技术有限公司 Automatic filter-replacing device of exposure apparatus and exposure apparatus
CN208459304U (en) * 2018-06-25 2019-02-01 上海恩迪检测控制技术有限公司 A kind of ray tube filtering sheet devices of quick adjustment radiographic inspection detection system
CN208805675U (en) * 2018-10-26 2019-04-30 江苏友迪激光科技有限公司 A kind of exposure machine into trigger structure
CN111671450A (en) * 2020-06-29 2020-09-18 苗娥 Automatic replacing device for filter disc of medical X-ray machine

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