CN112130269A - Automatic filter replacing device of exposure machine - Google Patents
Automatic filter replacing device of exposure machine Download PDFInfo
- Publication number
- CN112130269A CN112130269A CN202011034165.2A CN202011034165A CN112130269A CN 112130269 A CN112130269 A CN 112130269A CN 202011034165 A CN202011034165 A CN 202011034165A CN 112130269 A CN112130269 A CN 112130269A
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- fixedly connected
- groove
- frame
- grooves
- driving
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- 230000007246 mechanism Effects 0.000 claims abstract description 28
- 238000009434 installation Methods 0.000 claims abstract description 6
- 230000005540 biological transmission Effects 0.000 claims description 3
- 230000003028 elevating effect Effects 0.000 claims 2
- 244000309464 bull Species 0.000 description 4
- 238000001125 extrusion Methods 0.000 description 3
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/006—Filter holders
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
- G03F7/70825—Mounting of individual elements, e.g. mounts, holders or supports
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70975—Assembly, maintenance, transport or storage of apparatus
Abstract
The invention discloses an automatic filter replacing device of an exposure machine, which comprises a machine body and a mounting groove, wherein an operating platform is fixedly connected to one side of the machine body, a plurality of placing grooves are arranged at the upper end of the operating platform, one sides of the placing grooves, which are close to the machine body, are all arranged into inclined planes, one sides of the placing grooves, which are far away from the machine body, are all provided with first grooves, lifting mechanisms are all arranged in the first grooves, frames are all arranged on the lifting mechanisms, the frames are all in inclined plane contact with the corresponding first grooves, the inner sides of the frames are all fixedly connected with filter bodies, limiting holes are all arranged at two sides of the frames, a plurality of first tooth blocks are evenly arranged at one side of the frames, which is in contact with the corresponding placing grooves, a plurality of second grooves are arranged at the upper end of the operating platform, and rotating rods are all rotatably connected in the second grooves, guarantee the installation effectiveness and the result of use of filter plate body.
Description
Technical Field
The invention relates to a device for automatically replacing a filter plate of an exposure machine, and belongs to the technical field of display equipment.
Background
The ultraviolet exposure machine is a machine device which transfers image information on a film or other transparent body to a surface coated with a photosensitive material by turning on light to emit ultraviolet rays with a UVA wavelength. Filter plates in the mounting grooves on the exposure machine are replaced according to different actual conditions so as to meet actual requirements.
The mode of current change filter all utilizes artifical the change usually, and change efficiency is slower, still can harm the filter surface simultaneously when handheld filter, influences the result of use.
Disclosure of Invention
The invention provides a device for automatically replacing a filter of an exposure machine, which effectively solves the problem of low efficiency of manually replacing the filter in the prior art. Meanwhile, the surface of the filter plate can be damaged when the filter plate is held by hands, and the using effect is influenced.
In order to solve the technical problems, the invention provides the following technical scheme:
the invention relates to an automatic filter replacing device of an exposure machine, which comprises a machine body and a mounting groove, wherein one side of the machine body is fixedly connected with an operating platform, the upper end of the operating platform is provided with a plurality of placing grooves, one sides of the plurality of placing grooves, which are close to the machine body, are all arranged into inclined planes, one sides of the plurality of placing grooves, which are far away from the machine body, are all provided with first grooves, a plurality of first grooves are all internally provided with a lifting mechanism, a plurality of frames are all arranged on the lifting mechanism, are all contacted with the inclined planes corresponding to the first grooves, the inner sides of the plurality of frames are all fixedly connected with a filter body, two sides of the plurality of frames are all provided with limiting holes, one side of the plurality of frames, which is contacted with the corresponding placing grooves, is evenly provided with a plurality of first tooth blocks, the upper end of the operating platform is provided with a, the rotary drum is sleeved on the corresponding rotary rod, the rotary drum is fixedly connected with the corresponding rotary rod, a shell is fixedly connected to the outer side of the operating platform, a driving mechanism is arranged in the shell, the end portion of one end of the rotary rod extends into the shell and is connected with the driving mechanism, and two limiting mechanisms are symmetrically arranged on the top wall of the mounting groove.
According to a preferred technical scheme, the lifting mechanism comprises a first mounting seat, a first motor, a screw, two vertical rods and a lifting plate, the bottom end of the operating platform is fixedly connected with the first motors through the first mounting seats, the output end of the first motor is fixedly connected with the screw, the upper end of the screw extends into the first groove, the screw is rotatably connected with the inner wall of the first groove, the vertical rods are arranged on two sides of the screw, the two vertical rods are fixedly connected on the inner wall of the first groove, the lifting plate is sleeved on the screw and the two vertical rods, the lifting plate is in threaded connection with the screw, the lifting plate is in sliding connection with the two vertical rods, one end of the lifting plate extends out of the first groove, and the bottom end of the frame is placed at the upper end of the lifting plate.
According to a preferred technical scheme, the two limiting mechanisms respectively comprise top grooves, telescopic rods, limiting blocks and springs, the top walls of the mounting grooves are symmetrically provided with the two top grooves, the inner walls of the two top grooves are fixedly connected with the telescopic rods, the telescopic ends of the two telescopic rods are fixedly connected with the limiting blocks, the lower ends of the two limiting blocks extend out of the corresponding top grooves, the springs are fixedly connected between the two limiting blocks and the inner walls of the corresponding top grooves, and the two springs are sleeved on the outer sides of the corresponding telescopic rods.
As a preferred technical scheme of the invention, the lower end surfaces of the two limiting blocks are both in an arc shape, and the two limiting blocks are respectively matched with the two limiting holes on the two sides of the corresponding frame.
As a preferred technical scheme of the invention, the driving mechanism comprises a second mounting seat, a second motor, a first driving wheel, a driving belt and two second driving wheels, the second motor is fixedly connected to the outer side of the shell through the second mounting seat, the output end of the second motor is fixedly connected with the first driving wheel, the first driving wheel is connected with the two second driving wheels through the driving belt in a driving manner, the first driving wheel and the two second driving wheels are both positioned in the shell, the two second driving wheels are respectively positioned on two sides of the first driving wheel, the two second driving wheels are both rotatably connected with the inner wall of the shell, the first driving wheel and the second driving wheels are both fixedly connected with corresponding rotating rods, and the first driving wheel and the two second driving wheels are both of the same specification.
As a preferable technical scheme of the invention, the upper surface of the operating platform and the bottom wall of the mounting groove are positioned at the same horizontal height.
As a preferable technical solution of the present invention, a plurality of second tooth blocks are uniformly and fixedly connected to the outer sides of the plurality of rotary drums, and the plurality of second tooth blocks are engaged with the plurality of corresponding first tooth blocks.
The invention has the following beneficial effects:
1. when the filter body needs to be replaced, a proper filter is selected, a first motor and a second motor are started, the first motor drives a screw to rotate, a lifting plate connected with the screw rises along the screw, meanwhile, the bottom end of the frame is supported by the lifting plate, the frame is made to rise along with the lifting, and the frame is obliquely placed on a first groove inclined plane, therefore, the frame slowly rises, the upper end of the frame is slowly close to the upper surface of an operation table, the first driving wheel and the two second driving wheels are driven to rotate through the second motor, the first driving wheel and the second driving wheels drive corresponding rotating rods and corresponding rotating cylinders to rotate, when a plurality of first tooth blocks on the frame are meshed with a plurality of first tooth blocks on the rotating cylinders, the frame is driven to transversely move through the rotating rods and the rotating cylinders, and the frame is moved towards the installation groove.
2. When the frame removed to the mounting inslot, the frame extrudeed the stopper, make two extrusion pieces shrink and advance to correspond the apical groove, two correspond the spring and shrink, when two spacing holes on the frame corresponded with two stoppers, two stoppers stretched out through the restoring force that corresponds the spring and correspond the apical groove, and combine together with corresponding spacing hole, thereby prescribe a limit to the position of the filter plate body in frame and the frame, very convenient, do not need the manual work to install, guarantee the installation effectiveness and the result of use of filter plate body.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention and not to limit the invention. In the drawings:
FIG. 1 is a schematic view of the internal structure of the present invention;
FIG. 2 is an external structural view of the present invention;
FIG. 3 is a schematic view of the drive mechanism of the present invention;
FIG. 4 is a schematic structural diagram of a limiting mechanism of the present invention;
FIG. 5 is a schematic view of the lift mechanism of the present invention;
FIG. 6 is a schematic top view of the present invention;
FIG. 7 is an enlarged schematic view of the structure at A of the present invention;
fig. 8 is a schematic view of the frame structure of the present invention.
In the figure: 1. a body; 2. mounting grooves; 3. a limiting mechanism; 31. a telescopic rod; 32. a spring; 33. a top groove; 34. a limiting block; 4. a frame; 5. a placement groove; 6. a first groove; 7. a lifting mechanism; 71. a first motor; 72. a first mounting seat; 73. a lifting plate; 74. a vertical rod; 75. a screw; 8. an operation table; 9. a drive mechanism; 91. a second motor; 92. a second mounting seat; 93. a second transmission wheel; 94. a transmission belt; 95. a first drive pulley; 10. a housing; 11. a rotating rod; 12. a limiting hole; 13. a filter body; 14. a second groove; 15. a rotating drum; 16. a second tooth block; 17. a first tooth block.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example (b): as shown in figures 1-8, the automatic filter replacing device of the exposure machine comprises a machine body 1 and a mounting groove 2, wherein one side of the machine body 1 is fixedly connected with an operating platform 8, a plurality of placing grooves 5 are arranged at the upper end of the operating platform 8, one sides of the placing grooves 5 close to the machine body 1 are all arranged into inclined planes, one sides of the placing grooves 5 far away from the machine body 1 are all provided with first grooves 6, a plurality of lifting mechanisms 7 are arranged in the first grooves 6, frames 4 are arranged on the lifting mechanisms 7, the frames 4 are in inclined plane contact with the corresponding first grooves 6, filter bodies 13 are fixedly connected at the inner sides of the frames 4, limiting holes 12 are arranged at two sides of the frames 4, a plurality of first tooth blocks 17 are uniformly arranged at one side of the frames 4 in contact with the corresponding placing grooves 5, a plurality of second grooves 14 are arranged at the upper end of the operating platform 8, rotating rods 11 are rotatably connected in the second grooves 14, all be equipped with rotary drum 15 in a plurality of second recesses 14, a plurality of rotary drums 15 are all established on corresponding bull stick 11, and a plurality of rotary drums 15 and 11 fixed connection of corresponding bull stick, 8 outside fixedly connected with casings 10 of operation panel, be equipped with actuating mechanism 9 in the casing 10, 11 one end tip of a plurality of bull sticks all stretches into in the casing 10 and is connected with actuating mechanism 9, 2 roof symmetries in mounting groove are equipped with two stop gear 3, can automize and install filter plate body 13, do not need artifical handheld filter plate body 13 to install, guarantee filter plate body 13's installation effectiveness and result of use.
A plurality of second toothed blocks 16 are uniformly and fixedly connected to the outer sides of the plurality of rotary drums 15, the plurality of second toothed blocks 16 are meshed with the corresponding plurality of first toothed blocks 17, when the plurality of first toothed blocks 17 on the frame 4 are meshed with the plurality of first toothed blocks 17 on the rotary drums 15, the frame 4 is driven by the rotary rod 11 and the rotary drum 15 to transversely move, the frame 4 is moved into the mounting groove 2, the driving mechanism 9 comprises a second mounting seat 92, a second motor 91, a first driving wheel 95, a driving belt 94 and two second driving wheels 93, the outer side of the shell 10 is fixedly connected with the second motor 91 through the second mounting seat 92, the output end of the second motor 91 is fixedly connected with the first driving wheel 95, the first driving wheel 95 is connected with the two second driving wheels 93 through the driving belt 94, the first driving wheel 95 and the two second driving wheels 93 are both positioned in the shell 10, and the two second driving wheels 93 are respectively positioned at both sides of the, two second driving wheels 93 are rotatably connected with the inner wall of the shell 10, a first driving wheel 95 and a second driving wheel 93 are fixedly connected with a corresponding rotating rod 11, a second motor 91 drives the first driving wheel 95 to rotate, the first driving wheel 95 drives the two second driving wheels 93 to rotate through a driving belt 94, the first driving wheel 95 and the second driving wheel 93 drive the corresponding rotating rod 11 and the corresponding rotary drum 15 to rotate, the first driving wheel 95 and the two second driving wheels 93 are of the same specification, the upper surface of the operating platform 8 and the bottom wall of the mounting groove 2 are positioned at the same horizontal height, so that the frame 4 can enter the mounting groove 2, two limiting mechanisms 3 respectively comprise a top groove 33, an expansion link 31, a limiting block 34 and a spring 32, two top grooves 33 are symmetrically arranged on the top wall of the mounting groove 2, the expansion links 31 are fixedly connected with the inner walls of the two top grooves 33, and the expansion ends of, the lower ends of two limit blocks 34 extend out of corresponding top grooves 33, springs 32 are fixedly connected between the two limit blocks 34 and the inner walls of the corresponding top grooves 33, the two springs 32 are sleeved outside the corresponding telescopic rods 31, when the frame 4 moves into the mounting groove 2, the frame 4 extrudes the limit blocks 34 to enable the two extrusion blocks to be retracted into the corresponding top grooves 33, the two corresponding springs 32 are contracted, when the two limit holes 12 on the frame 4 are opposite to the two limit blocks 34, the two limit blocks 34 extend out of the corresponding top grooves 33 through the restoring force of the corresponding springs 32 and are combined with the corresponding limit holes 12, so that the positions of the filter plate bodies 13 in the frame 4 and the frame 4 are limited, the lower end surfaces of the two limit blocks 34 are both arc-shaped, the two limit blocks 34 are respectively matched with the two limit holes 12 on the two sides of the corresponding frame 4, and the two limit blocks 34 can be contracted towards the inner walls of the corresponding top grooves 33 when contacting the frame 4, the lifting mechanism 7 comprises a first mounting seat 72, a first motor 71, a screw 75, two vertical rods 74 and a lifting plate 73, the bottom end of the operating platform 8 is fixedly connected with the first motors 71 through the first mounting seats 72, the output end of the first motor 71 is fixedly connected with the screw 75, the upper end of the screw 75 extends into the first groove 6, the screw 75 is rotatably connected with the inner wall of the first groove 6, the vertical rods 74 are arranged on both sides of the screw 75, the two vertical rods 74 are fixedly connected on the inner wall of the first groove 6, the lifting plate 73 is sleeved on the screw 75 and the two vertical rods 74, the lifting plate 73 is in threaded connection with the screw 75, the lifting plate 73 is in sliding connection with the two vertical rods 74, one end of the lifting plate 73 extends out of the first groove 6, the bottom end of the frame 4 is placed at the upper end of the lifting plate 73, the first motor 71 drives the screw 75 to rotate, the lifting plate 73 connected with the screw, the lifting plate 73 holds the bottom end of the frame 4, and the frame 4 is lifted.
Specifically, when the filter plate body 13 needs to be replaced, a proper filter plate body 13 is selected, the first motor 71 and the second motor 91 are started, the first motor 71 drives the screw rod 75 to rotate, the lifting plate 73 connected with the screw rod 75 and the screw rod 75 rises along the screw rod 75, meanwhile, the lifting plate 73 supports the bottom end of the frame 4, the frame 4 rises along with the lifting, and the frame 4 is obliquely arranged on the inclined surface of the first groove 6, therefore, as the frame 4 slowly rises, the upper end of the frame 4 is slowly close to the upper surface of the operating platform 8, the second motor 91 drives the first driving wheel 95 to rotate, the first driving wheel 95 drives the two second driving wheels 93 to rotate through the driving belt 94, the first driving wheel 95 and the second driving wheel 93 drive the corresponding rotating rod 11 and the corresponding rotating drum 15 to rotate, when the first tooth blocks 17 on the frame 4 are meshed with the first tooth blocks 17 on the rotating drum 15, drive frame 4 lateral shifting through bull stick 11 and rotary drum 15, move frame 4 to mounting groove 2 in, when frame 4 removed to mounting groove 2 in, frame 4 extrudes stopper 34, make two extrusion pieces receive and contract in corresponding apical groove 33, two correspond spring 32 and contract, when two spacing holes 12 on frame 4 correspond with two stoppers 34, two stoppers 34 stretch out corresponding apical groove 33 through the restoring force that corresponds spring 32, and combine together with corresponding spacing hole 12, thereby prescribe a limit to the position of filter plate body 13 in frame 4 and the frame 4, therefore the device is very convenient, do not need the manual work to install, guarantee filter plate body 13's installation effectiveness and result of use.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (7)
1. The utility model provides an automatic filter device of changing of exposure machine, includes organism (1) and mounting groove (2), its characterized in that, organism (1) one side fixedly connected with operation panel (8), operation panel (8) upper end is equipped with a plurality of standing groove (5), and is a plurality of standing groove (5) are close to one side of organism (1) and all establish to the inclined plane, and are a plurality of one side that organism (1) were kept away from in standing groove (5) all is equipped with first recess (6), and is a plurality of all be equipped with elevating system (7) in first recess (6), and is a plurality of frame (4) have all been placed on elevating system (7), and are a plurality of frame (4) all with correspond first recess (6) inclined plane contact, and are a plurality of frame (4) inboard equal fixedly connected with filter body (13), a plurality of frame (4) both sides all are equipped with spacing hole (12), and are a plurality of frame (4) and the one side that corresponds standing groove (5) contact evenly are equipped with a plurality ) The operating table is characterized in that a plurality of second grooves (14) are formed in the upper end of the operating table (8), the second grooves (14) are internally provided with rotary drums (15) in a plurality of rotary drums (15) which are all sleeved on corresponding rotary bars (11) and are connected with rotary bars (11) in a rotating mode, the rotary drums (15) are fixedly connected with corresponding rotary bars (11), the operating table (8) is fixedly connected with a shell (10) on the outer side of the operating table, driving mechanisms (9) are arranged in the shell (10), the rotary bars (11) are connected with the driving mechanisms (9) at one end of each rotary bar (11) in a stretching-in mode, and two limiting mechanisms (3) are symmetrically arranged on the top wall of the mounting groove (2).
2. The automatic filter replacing device of the exposure machine as claimed in claim 1, wherein the lifting mechanism (7) comprises a first mounting seat (72), a first motor (71), a screw rod (75), two vertical rods (74) and a lifting plate (73), the bottom end of the operating platform (8) is fixedly connected with the first motors (71) through the first mounting seats (72), the output end of the first motor (71) is fixedly connected with the screw rod (75), the upper end of the screw rod (75) extends into the first groove (6), the screw rod (75) is rotatably connected with the inner wall of the first groove (6), the vertical rods (74) are arranged on two sides of the screw rod (75), the two vertical rods (74) are fixedly connected on the inner wall of the first groove (6), the lifting plate (73) is sleeved on the screw rod (75) and the two vertical rods (74), and the lifting plate (73) is in threaded connection with the screw rod (75), lifter plate (73) and two montant (74) sliding connection, first recess (6) are stretched out to lifter plate (73) one end, place lifter plate (73) upper end in frame (4) bottom.
3. The automatic filter device of changing of exposure machine of claim 1, characterized in that, two stop gear (3) all includes apical groove (33), telescopic link (31), stopper (34) and spring (32), mounting groove (2) roof symmetry is equipped with two apical grooves (33), two equal fixedly connected with telescopic link (31), two of apical groove (33) inner wall equal fixedly connected with stopper (34), two of telescopic link (31) flexible end equal fixedly connected with stopper (34), two stopper (34) lower extreme all stretches out corresponding apical groove (33), two equal fixedly connected with spring (32) between stopper (34) and the corresponding apical groove (33) inner wall, two equal cover of spring (32) is established in the corresponding telescopic link (31) outside.
4. The automatic filter replacing device of the exposure machine as claimed in claim 3, wherein the lower end surfaces of the two limiting blocks (34) are both arc-shaped, and the two limiting blocks (34) are respectively matched with the two limiting holes (12) at two sides of the corresponding frame (4).
5. The automatic filter replacing device of the exposure machine according to claim 1, wherein the driving mechanism (9) comprises a second mounting seat (92), a second motor (91), a first driving wheel (95), a driving belt (94) and two second driving wheels (93), the second motor (91) is fixedly connected to the outer side of the housing (10) through the second mounting seat (92), the first driving wheel (95) is fixedly connected to the output end of the second motor (91), the first driving wheel (95) is in transmission connection with the two second driving wheels (93) through the driving belt (94), the first driving wheel (95) and the two second driving wheels (93) are both located in the housing (10), the two second driving wheels (93) are respectively located at two sides of the first driving wheel (95), and the two second driving wheels (93) are both in rotation connection with the inner wall of the housing (10), the first driving wheel (95) and the second driving wheels (93) are fixedly connected with the corresponding rotating rods (11), and the first driving wheel (95) and the two second driving wheels (93) are of the same specification.
6. An exposure machine automatic filter replacing device as claimed in claim 1, wherein the upper surface of the operation table (8) and the bottom wall of the installation groove (2) are at the same level.
7. An automatic filter replacing device of an exposure machine according to claim 1, characterized in that a plurality of second tooth blocks (16) are uniformly and fixedly connected to the outer sides of a plurality of the rotary drums (15), and a plurality of the second tooth blocks (16) are meshed with a plurality of corresponding first tooth blocks (17).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011034165.2A CN112130269B (en) | 2020-09-27 | 2020-09-27 | Automatic filter replacing device of exposure machine |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011034165.2A CN112130269B (en) | 2020-09-27 | 2020-09-27 | Automatic filter replacing device of exposure machine |
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| CN112130269A true CN112130269A (en) | 2020-12-25 |
| CN112130269B CN112130269B (en) | 2022-12-30 |
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| CN202011034165.2A Active CN112130269B (en) | 2020-09-27 | 2020-09-27 | Automatic filter replacing device of exposure machine |
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| CN208805675U (en) * | 2018-10-26 | 2019-04-30 | 江苏友迪激光科技有限公司 | A kind of exposure machine into trigger structure |
| CN111671450A (en) * | 2020-06-29 | 2020-09-18 | 苗娥 | Automatic replacing device for filter disc of medical X-ray machine |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB599743A (en) * | 1945-06-12 | 1948-03-19 | Farnsworth Television & Radio | Automatic phonograph |
| DE19702754A1 (en) * | 1997-01-27 | 1998-07-30 | Zeiss Carl Jena Gmbh | Laser-scan-microscope filter changer |
| JP2000047122A (en) * | 1998-07-22 | 2000-02-18 | Siemens Ag | Filter exchanging device for light emission unit |
| TW530333B (en) * | 2000-04-11 | 2003-05-01 | Nikon Corp | Exposure method and exposure apparatus |
| CN101458453A (en) * | 2007-12-11 | 2009-06-17 | 上海华虹Nec电子有限公司 | Projection aligner |
| CN104375250A (en) * | 2014-11-25 | 2015-02-25 | 宁波江丰生物信息技术有限公司 | Device for automatically switching optical filter |
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| CN111671450A (en) * | 2020-06-29 | 2020-09-18 | 苗娥 | Automatic replacing device for filter disc of medical X-ray machine |
Also Published As
| Publication number | Publication date |
|---|---|
| CN112130269B (en) | 2022-12-30 |
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Effective date of registration: 20231129 Address after: 530000, No. 21 Guokai Avenue East, Nanning Economic and Technological Development Zone, Nanning City, Guangxi Zhuang Autonomous Region Patentee after: Guangxi Caixing Technology Co.,Ltd. Address before: 325200 Yunzhou street urban rural distribution center 524 (Qiaomao town), Ruian City, Wenzhou City, Zhejiang Province Patentee before: Zhejiang Huajiang Technology Co.,Ltd. |
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