CN112117349A - Solar cell silicon wafer diffusion insert process - Google Patents
Solar cell silicon wafer diffusion insert process Download PDFInfo
- Publication number
- CN112117349A CN112117349A CN202010939655.0A CN202010939655A CN112117349A CN 112117349 A CN112117349 A CN 112117349A CN 202010939655 A CN202010939655 A CN 202010939655A CN 112117349 A CN112117349 A CN 112117349A
- Authority
- CN
- China
- Prior art keywords
- bottom plate
- basket
- plate
- silicon wafer
- push plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 124
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 119
- 239000010703 silicon Substances 0.000 title claims abstract description 119
- 238000000034 method Methods 0.000 title claims abstract description 32
- 230000008569 process Effects 0.000 title claims abstract description 31
- 238000009792 diffusion process Methods 0.000 title claims abstract description 28
- 235000012431 wafers Nutrition 0.000 claims abstract description 122
- 239000010453 quartz Substances 0.000 claims abstract description 89
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 89
- 238000010030 laminating Methods 0.000 claims abstract description 4
- 238000003780 insertion Methods 0.000 description 6
- 230000037431 insertion Effects 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 239000012634 fragment Substances 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000007792 addition Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- -1 polytetrafluoroethylene Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
- H01L21/67781—Batch transfer of wafers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
A solar cell silicon wafer diffusion insert process relates to the technical field of solar energy. A solar cell silicon wafer diffusion insert process comprises the following steps: and step S01, preparing for laminating, placing silicon chips on the front basket of the front flower, and placing silicon chips on the back basket of the back flower. And step S02, combining the plates, wherein the positive flower basket is fixedly arranged on the first bottom plate, the reverse flower basket is fixedly arranged on the second bottom plate, and the opening sides of the positive flower basket and the reverse flower basket are opposite. And adjusting the first base plate and the second base plate to enable the silicon wafer groove of the positive flower basket and the silicon wafer groove of the reverse flower basket to be staggered, and pushing the silicon wafer in the reverse flower basket into the positive flower basket by the second push plate. And step S03, preparing an inserting piece, taking down the reverse basket on the second bottom plate, adjusting the second push plate, and fixedly placing a quartz boat on the second bottom plate, wherein the opening of the clamping groove of the quartz boat is opposite to the opening side of the forward basket. And step S04, adjusting the first bottom plate and the second bottom plate to enable the silicon wafer grooves of the positive flower basket to correspond to the clamping grooves of the quartz boat, and pushing the silicon wafers in the positive flower basket into the quartz boat by the first push plate. The process provided by the invention is efficient and stable.
Description
Technical Field
The invention relates to the technical field of solar energy, in particular to a solar cell silicon wafer diffusion insert process.
Background
With the gradual maturity of the production technology of the polycrystalline silicon solar cell, the production requirement of the industry on the cell is higher and higher, and potential benefits are deeply developed in the aspects of cost reduction and efficiency improvement in the production workshop of the industry. At present, a tubular diffusion furnace is generally adopted in the industry for phosphorus diffusion, an operator needs to insert a silicon wafer into a quartz boat in a single-wafer manner by using a quartz suction pen, and each groove of the quartz boat is inserted with two silicon wafers for single-side diffusion. However, the fragment rate is high, the quartz suction pen is easy to leave suction pen marks when contacting the silicon wafer, the silicon wafer process pollution is caused, a lot of silicon wafers need to be reworked for secondary cleaning, and the cost is increased. And the manual work is taken the silicon chip and is shifted, need consume time more, and get off for a long time the staff and be easier tired.
For example, the invention is named as a solar cell diffusion insert process in patent application publication No. CN109509810A, publication No. 2019, 3 and 22, the application discloses a solar cell diffusion insert process, which comprises a texturing and blanking flower basket, a 0.5cm polytetrafluoroethylene thin pad, a 5cm sponge thick pad, a push plate and a quartz boat, wherein, the two sides of the discharging flower basket of the texturing and blanking machine are respectively a white surface and a black surface, one side of the white surface is always used as a diffusion surface, a piece is detected and combined before the diffusion and the feeding, the palm centers of two hands of an inserting person are opposite to clamp the side edge of a silicon wafer in the texturing and blanking flower basket, the silicon wafer in the texturing and blanking flower basket is slightly lifted and transversely transferred to the upper part of a quartz boat, and aligning the silicon wafer with the clamping grooves of the quartz boats one by one, slightly inserting the silicon wafer into the corresponding quartz boat vertically downwards, and repeating the circulating action until the silicon wafer in the texturing discharging flower basket is completely inserted into the corresponding quartz boat to complete the insertion of the silicon wafer. The solar cell diffusion insert process effectively reduces the fragment rate of a diffusion procedure process from 0.15% to within 0.06%, greatly reduces the insert time of diffusion workshop personnel, further saves labor cost, and achieves the purposes of cost reduction and efficiency improvement. However, when the person inserts the sheet, the operation needs to be repeated and circulated, and each time, great effort needs to be concentrated, errors are easy to occur, and the efficiency is not improved to the maximum extent.
Disclosure of Invention
The invention overcomes the problems that manual insertion is easy to generate errors and low in efficiency in the prior art, and provides an efficient and stable solar cell silicon wafer diffusion insertion process.
In order to achieve the above purpose, the invention is realized by the following technical scheme:
a solar cell silicon wafer diffusion insert process comprises a positive flower basket, a negative flower basket, a wafer pushing device and a quartz boat; the quartz boat comprises a pair of supports and four supporting rods provided with clamping grooves; the supporting rods comprise a first supporting rod, a second supporting rod, a third supporting rod and a fourth supporting rod; the connecting line of the first supporting rod and the second supporting rod and the connecting line of the third supporting rod and the fourth supporting rod form a right angle; when the support is placed on one side in an inclined mode, the connecting line of the first support rod and the second support rod is parallel to the horizontal plane; the sheet pushing device comprises a base, a first bottom plate, a second bottom plate, a first push plate and a second push plate, wherein the first bottom plate and the second bottom plate are arranged on the base; the first bottom plate and the second bottom plate move in the length direction through two bottom plate rails arranged on the base; the first push plate and the second push plate move in the width directions of the first bottom plate and the second bottom plate through push plate rails arranged on two sides of the base; the process comprises the following steps:
step S01, preparing for laminating, placing silicon chips on the front basket and the back basket in a positive mode, and placing silicon chips on the back basket and keeping the shapes and sizes of the front basket and the back basket consistent;
step S02, combining the plates, wherein the positive flower basket is fixedly arranged on the first bottom plate, the reverse flower basket is fixedly arranged on the second bottom plate, and the opening sides of the positive flower basket and the reverse flower basket are opposite; adjusting the first bottom plate and the second bottom plate to enable the silicon wafer grooves of the positive flower basket and the silicon wafer grooves of the reverse flower basket to be staggered, pushing the silicon wafers in the reverse flower basket into the positive flower basket by using the second push plate on one side of the reverse flower basket, confirming that the suede faces are outward, and placing two silicon wafers in each silicon wafer groove of the positive flower basket;
step S03, preparing an insert, taking down the reverse basket on the second bottom plate, adjusting the second push plate on one side of the second bottom plate, and fixedly placing a quartz boat on the second bottom plate, wherein the opening of a clamping groove of the quartz boat is opposite to the opening side of the forward basket;
and step S04, adjusting the first bottom plate and the second bottom plate to enable the silicon wafer grooves of the flower basket to correspond to the clamping grooves of the quartz boat, and pushing the silicon wafers in the flower basket into the quartz boat by using the first push plate on one side of the flower basket.
The silicon wafers are placed in the front flower basket and the reverse flower basket in a reverse mode, so that the silicon wafers in the front flower basket are all arranged with the suede facing outwards after the silicon wafers are combined. The positive flower basket is fixedly placed on the first bottom plate, the reverse flower basket is fixedly placed on the second bottom plate, the positive flower basket and the reverse flower basket can not deviate when the first bottom plate and the second bottom plate are adjusted, and the positive flower basket and the reverse flower basket are not prone to deviating and can not fail to combine when the flower is combined. The first bottom plate and the second bottom plate are adjusted, the silicon wafer groove of the positive flower basket and the silicon wafer groove of the reverse flower basket can be staggered, the silicon wafer groove of the positive flower basket and the clamping groove of the quartz boat can be made to correspond, and the accuracy in the process of combining and inserting pieces is guaranteed. When the quartz boat is placed on one side of the support in a dumping mode, the connecting line of the first supporting rod and the second supporting rod is parallel to the horizontal plane, and therefore the quartz boat can be pushed in better when a silicon wafer is placed. The sheet combining is completed by adopting the push plate for two times, the sheet inserting is completed by adopting the push plate for one time, the efficiency is higher, and the labor is saved.
Preferably, support bars are arranged below the first bottom plate and the second bottom plate and move in the length direction through the rails; through the movement of the first base plate and the second base plate on the rail, the silicon wafer grooves of the first base plate and the second base plate are adjusted to be staggered with the silicon wafer grooves of the reverse flower basket, or the silicon wafer grooves of the first base plate and the second base plate are adjusted to be corresponding to the clamping grooves of the quartz boat.
The supporting strips enable the first bottom plate and the second bottom plate to be more stable when moving, and whether the silicon wafer groove of the positive flower basket is staggered with the silicon wafer groove of the reverse flower basket or not can be judged more accurately when the first bottom plate and the second bottom plate are adjusted, or whether the silicon wafer groove of the positive flower basket corresponds to the clamping groove of the quartz boat or not.
Preferably, the length of the bottom plate track is 0.5CM-1CM longer than that of the support bar.
Therefore, the first bottom plate and the second bottom plate move in the range of 0.5CM-1CM in the length direction, and more time and energy are not consumed for adjustment due to an excessively large moving distance.
Preferably, the first push plate is connected to the push plate track through a first driving arm, and the second push plate is connected to the push plate track through a second driving arm; the driving arm drives the second push plate on one side of the reverse basket to push the silicon wafer in the reverse basket into the positive basket, or drives the first push plate on one side of the positive basket to push the silicon wafer in the positive basket into the quartz boat.
The driving arm is more flexible, and the push plate I and the push plate II can be better moved.
Preferably, the push plate II is connected to the push plate rail through a second driving arm, and a rotary joint is arranged on the second driving arm; step S03 specifically includes: and the second push plate moves to the same plane with the second bottom plate through the movement of the second driving arm on the push plate track and the rotation of the rotary joint, then the reverse basket on the second bottom plate is taken down, and the second push plate moves to an angle matched with the quartz boat through the movement of the second driving arm on the push plate track and the rotation of the rotary joint and then the quartz boat is fixedly placed on the second bottom plate.
The second driving arm can rotate by the rotating joint, so that the second push plate is driven to rotate. And the second push plate moves to the same plane with the second bottom plate through the movement of the second driving arm on the track of the second push plate and the rotation of the rotating joint, and then the reverse basket on the second bottom plate is taken down, so that the reverse basket is more convenient to take. And the second push plate moves to the angle matched with the quartz boat through the movement of the second driving arm on the track of the second push plate and the rotation of the rotary joint, and then the quartz boat is fixedly placed on the second bottom plate, so that the quartz boat is more stably placed and cannot be toppled over due to the insertion piece.
Preferably, the first push plate is connected to the push plate track through a first driving arm, and the second push plate is connected to the push plate track through a second driving arm; the first driving arm and the second driving arm are provided with rotating joints; step S02 specifically includes: the first push plate and the second push plate move to the same plane with the first bottom plate and the second bottom plate through the movement of the first driving arm and the second driving arm on the track of the first push plate and the rotation of the rotating joint, the front flower basket is fixedly placed on the first bottom plate, and the reverse flower basket is fixedly placed on the second bottom plate; and then the first push plate and the second push plate move to the positions vertical to the first bottom plate and the second bottom plate through the movement of the first driving arm and the second driving arm on the push plate track and the rotation of the rotating joint.
The arrangement makes the positive flower basket fixedly placed on the first base plate and the reverse flower basket fixedly placed on the second base plate more conveniently, and silicon wafers in the positive flower basket and the reverse flower basket are not easy to damage.
Preferably, two sides of the width positions of the first base plate and the second base plate are respectively provided with a protection plate, and the protection plates are respectively provided with a limiting block at the position close to the other protection plate; when the silicon wafer in the reverse basket is pushed into the positive basket by using the second push plate on one side of the reverse basket, the second push plate stops pushing after contacting the limiting block; when the silicon wafer in the positive flower basket is pushed into the quartz boat by the first push plate on one side of the positive flower basket, the first push plate stops pushing after touching the limiting block.
The limiting block prevents the first push plate and the second push plate from pushing over the head in the pushing process, and the safety of the sheet combination and the sheet insertion is guaranteed.
Preferably, the second support rod and the third support rod of the quartz boat are connected to the support in a sliding manner; the step S03 further includes: and after the positions of the second supporting rod and the third supporting rod are adjusted according to the size of the silicon wafer, placing the quartz boat on the second base plate.
Due to the arrangement, the quartz boat can bear silicon wafers of different sizes, and the application range is wider.
Preferably, two opposite fixed clamping pieces are arranged in the length direction of the first bottom plate and the second bottom plate; the front flower basket is fixedly placed on the first bottom plate through the fixing clamping piece, or the reverse flower basket is fixedly placed on the second bottom plate, or the quartz boat is fixedly placed on the second bottom plate.
The setting makes when adjusting bottom plate one, bottom plate two like this, and positive basket of flowers, anti basket of flowers can not the skew position, also makes positive basket of flowers, anti basket of flowers difficult emergence skew when closing the piece and lead to closing the piece failure. The positive flower basket and the quartz boat are not easy to deviate when inserting the sheet, so that the sheet inserting failure is caused.
Preferably, one of the two fixed clamping pieces on the bottom plate is fixed on the bottom plate through a bolt, and the other fixed clamping piece is movably arranged in the length direction of the bottom plate through a slot in the length direction of the bottom plate; before placing positive basket of flowers, anti-basket of flowers, quartz boat, adjust mobilizable fixed fastener with two fixed fasteners between the distance grow, later readjust mobilizable fixed fastener with positive basket of flowers, anti-basket of flowers, quartz boat fix.
Set up like this for when fixed positive basket of flowers, anti-basket of flowers, quartz boat, it is more convenient, can be according to the nimble adjustment of size of positive basket of flowers, anti-basket of flowers, quartz boat.
The invention has the advantages that:
(1) the sheet combining is completed by adopting the push plate for two times, the sheet inserting is completed by adopting the push plate for one time, the efficiency is higher, and the labor is saved.
(2) Regular flower basket, anti-flower basket, quartz boat are fixed through fixed fastener for when adjusting bottom plate one, bottom plate two, regular flower basket, anti-flower basket can not the skew position, also make when closing the piece, regular flower basket, anti-flower basket are difficult for taking place the skew under the push pedal promotes and lead to closing the piece failure. The positive flower basket and the quartz boat are not easy to deviate when inserting the sheet, so that the sheet inserting failure is caused.
(3) Through the movement of the first base plate and the second base plate on the track, the silicon wafer grooves of the first flower basket and the silicon wafer grooves of the second flower basket are staggered through the adjustment of the first base plate and the second base plate, or the silicon wafer grooves of the first flower basket and the second base plate correspond to the clamping grooves of the quartz boat, so that the silicon wafer combination and the silicon wafer insertion can be more accurate, and the efficiency is higher.
(4) The first push plate and the second push plate can move to the same plane with the first bottom plate and the second bottom plate, so that the front flower basket, the reverse flower basket and the quartz boat can be more conveniently disassembled and assembled.
(5) And the second support rod and the third support rod of the quartz boat are connected to the support in a sliding manner. And after the positions of the second supporting rod and the third supporting rod are adjusted according to the size of the silicon wafer, placing the quartz boat on the second base plate. The quartz boat can bear silicon wafers with different sizes, and the application range is wider.
Drawings
Fig. 1 is an overall schematic view of the present invention.
Fig. 2 is a schematic view of the base plate of the present invention.
Figure 3 is a schematic view of the push plate of the present invention.
FIG. 4 is a schematic view of the quartz boat of the present invention.
FIG. 5 is a side view of the quartz boat of the present invention.
In the figure: 1-first support bar, 2-second support bar, 3-third support bar, 4-fourth support bar, 5-support, 6-sliding groove, 7-base, 8-first bottom plate, 9-second bottom plate, 10-first push plate, 11-second push plate, 12-bottom plate rail, 13-push plate rail, 14-rotating joint, 15-connecting rod, 16-supporting bar, 17-protecting plate, 18-limiting block, 19-fixing fastener, 20-slotting and 21-silicon chip.
Detailed Description
The following are specific embodiments of the present invention and are further described with reference to the drawings, but the present invention is not limited to these embodiments.
As shown in fig. 1-5, a solar cell silicon wafer diffusion insert process comprises a positive flower basket, a negative flower basket, a wafer pushing device and a quartz boat; the quartz boat comprises a pair of supports 5 and four supporting rods provided with clamping grooves; the struts comprise a first strut 1, a second strut 2, a third strut 3 and a fourth strut 4; the connecting line of the first supporting rod 1 and the second supporting rod 2 forms a right angle with the connecting line of the third supporting rod 3 and the fourth supporting rod 4; when the support 5 is placed in a toppling manner on one side, the connecting line of the first support rod 1 and the second support rod 2 is parallel to the horizontal plane; the sheet pushing device comprises a base 7, a first bottom plate 8 and a second bottom plate 9 which are arranged on the base 7, a first pushing plate 10 arranged on the outer side of the first bottom plate 8, and a second pushing plate 11 arranged on the outer side of the second bottom plate 9; the first bottom plate 8 and the second bottom plate 9 move in the length direction through two bottom plate rails 12 arranged on the base 7; the first push plate 10 and the second push plate 11 move in the width directions of the first bottom plate 9 and the second bottom plate 9 through push plate rails 13 arranged on two sides of the base 7; the process comprises the following steps:
step S01, preparing for laminating, wherein the silicon wafer 21 is placed on the front basket of the front flower, the silicon wafer 21 is placed on the back basket of the back flower, and the shapes and the sizes of the front basket and the back basket of the back flower are consistent;
the positive flower basket and the reverse flower basket are respectively provided with a plurality of silicon wafer grooves, a single silicon wafer groove of the reverse flower basket can only contain one silicon wafer 21, and a single silicon wafer groove of the positive flower basket can contain two silicon wafers 21. The silicon wafers 21 are placed on the front basket and the silicon wafers 21 are placed on the reverse basket, so that the silicon wafers 21 in the front basket are all suede-outward after the silicon wafers are combined.
And step S02, combining the plates, wherein the positive flower basket is fixedly arranged on the first bottom plate 8, the reverse flower basket is fixedly arranged on the second bottom plate 9, and the opening sides of the positive flower basket and the reverse flower basket are opposite. And adjusting the first base plate 8 and the second base plate 9 to enable the silicon wafer grooves of the positive flower basket and the silicon wafer grooves of the reverse flower basket to be staggered, pushing the silicon wafers 21 in the reverse flower basket into the positive flower basket by using the second push plate 11 on one side of the reverse flower basket, confirming that the suede faces outwards, and placing two silicon wafers 21 in each silicon wafer groove of the positive flower basket.
The positive flower basket is fixedly placed on the first bottom plate 8, the reverse flower basket is fixedly placed on the second bottom plate 9, the positive flower basket and the reverse flower basket can not deviate when the first bottom plate 8 and the second bottom plate 9 are adjusted, and the positive flower basket and the reverse flower basket are not prone to shifting under pushing plate pushing and failure in sheet combination is also caused when the sheet combination is carried out.
Preferably, two opposite fixing clamping pieces 19 are arranged in the length direction of the first bottom plate 8 and the second bottom plate 9. The fixed clamping piece 19 is a cuboid, and one surface of the inward placed object is a frosted surface. The front flower basket is fixedly placed on the first bottom plate 8 through the fixing clamping piece 19, and the reverse flower basket is fixedly placed on the second bottom plate 9. The setting makes when adjusting bottom plate 8, bottom plate two 9 like this, and positive basket of flowers, anti basket of flowers can not the skew position, also makes positive basket of flowers, anti basket of flowers difficult emergence skew when closing the piece and lead to closing the piece failure. Preferably, two fixing clips 19 are arranged on the bottom plate, one is fixed on the bottom plate through a bolt, and the other is movably arranged in the length direction of the bottom plate through a slot 20 in the length direction of the bottom plate. Before placing the positive flower basket and the reverse flower basket, the distance between the two fixed clamping pieces 19 is increased by adjusting the movable fixed clamping pieces 19, and then the movable fixed clamping pieces 19 are adjusted to fix the positive flower basket and the reverse flower basket. Set up like this for when fixed positive basket of flowers, anti-basket of flowers, it is more convenient, can be according to the nimble adjustment of the size of positive basket of flowers, anti-basket of flowers.
Preferably, the first push plate 10 is connected to the push plate rail 13 through a first driving arm, and the second push plate 11 is connected to the push plate rail 13 through a second driving arm. Preferably, the first driving arm and the second driving arm are provided with a rotating joint 14. Three rotary joints 14 are arranged on one driving arm, and the three rotary joints 14 are connected together through connecting rods 15. The step S02 specifically includes: the first push plate 10 and the second push plate 11 move to the same plane with the first bottom plate 8 and the second bottom plate 9 through the movement of the first driving arm and the second driving arm on the push plate track 13 and the rotation of the rotating joint 14, and then the front flower basket is fixedly placed on the first bottom plate 8, and the reverse flower basket is fixedly placed on the second bottom plate 9. And then, the first push plate 10 and the second push plate 11 move to the positions vertical to the first bottom plate 8 and the second bottom plate 9 through the movement of the first driving arm and the second driving arm on the push plate track 13 and the rotation of the rotating joint 14. Due to the arrangement, the positive flower basket is fixedly placed on the first base plate 8, the reverse flower basket is more conveniently and fixedly placed on the second base plate 9, and silicon wafers 21 in the positive flower basket and the reverse flower basket are not easy to damage.
The first bottom plate 8 and the second bottom plate 9 are adjusted, so that the silicon wafer grooves of the front flower basket and the silicon wafer grooves of the reverse flower basket can be staggered, and the accuracy in wafer combination is guaranteed. Preferably, support bars 16 are arranged below the first bottom plate 8 and the second bottom plate 9, and the support bars 16 move in the length direction through the rails, so that the first bottom plate 8 and the second bottom plate 9 are driven to move in the length direction. Through the movement of the first bottom plate 8 and the second bottom plate 9 on the rail, the first bottom plate 8 and the second bottom plate 9 are adjusted to enable the silicon wafer grooves of the positive flower basket and the silicon wafer grooves of the negative flower basket to be staggered. The support strip 16 enables the first bottom plate 8 and the second bottom plate 9 to be more stable when moving, and whether the silicon wafer grooves of the positive flower basket and the silicon wafer grooves of the negative flower basket are staggered or not can be more accurately judged when the first bottom plate 8 and the second bottom plate 9 are adjusted.
Preferably, the track length is 0.5CM to 1CM longer than the support strip 16. Therefore, the first bottom plate 8 and the second bottom plate 9 can move in the range of 0.5CM-1CM in the length direction, and the adjustment does not take more time and energy due to an excessive moving distance.
And then, the driving arm drives the second push plate 11 on one side of the reverse basket to push the silicon wafer 21 in the reverse basket into the positive basket.
Preferably, both sides of the width positions of the first base plate 8 and the second base plate 9 are provided with a protection plate 17, the protection plate 17 is provided with a limit block 18 at a position close to the other protection plate 17, and when the silicon wafer 21 in the reverse basket is pushed into the front basket by the second push plate 11 on one side of the reverse basket, the second push plate 11 stops pushing after contacting the limit block 18. The second push plate 11 cannot be pushed over the head in the pushing process by the limiting block 18, and the safety of the sheet combination is ensured.
The sheet combination is completed by adopting the second push plate 11 at one time, so that the efficiency is higher and the labor is saved.
And step S03, preparing an inserting piece, taking down the reverse basket on the second bottom plate 9, adjusting the second push plate 11 on one side of the second bottom plate 9, and fixedly placing a quartz boat on the second bottom plate 9, wherein the opening of the clamping groove of the quartz boat is opposite to the opening side of the forward basket. When the quartz boat is placed on one side of the support 5 in a dumping manner, the connecting line of the first supporting rod 1 and the second supporting rod 2 is parallel to the horizontal plane, so that the quartz boat can be pushed in better when the silicon wafer 21 is placed.
The first push plate 10 is connected to the push plate track 13 through a first driving arm, and the second push plate 11 is connected to the push plate track 13 through a second driving arm. Preferably, the second driving arm is provided with a rotary joint 14. Three rotary joints 14 are arranged on one driving arm, and the three rotary joints 14 are connected together through connecting rods 15. The second push plate 11 moves to the same plane with the second bottom plate 9 through the movement of the second driving arm on the second push plate rail 13 and the rotation of the rotating joint 14, and then the reverse basket on the second bottom plate 9 is taken down, so that the reverse basket is taken more conveniently. The second push plate 11 moves to an angle matched with the quartz boat through the movement of the second driving arm on the second push plate rail 13 and the rotation of the rotating joint 14, and then the quartz boat is fixedly placed on the second bottom plate 9.
Preferably, the second support rod 2 and the third support rod 3 of the quartz boat are connected on the support 5 in a sliding way through a sliding groove 6. After the positions of the second supporting rod 2 and the third supporting rod 3 are adjusted according to the size of the silicon wafer 21, the quartz boat is placed on the second bottom plate 9. Due to the arrangement, the quartz boat can bear silicon wafers 21 with different sizes, and the application range is wider.
Preferably, two opposite fixing clamping pieces 19 are arranged in the length direction of the first bottom plate 8 and the second bottom plate 9. The fixed clamping piece 19 is a cuboid, and one surface of the inward placed object is a frosted surface. The quartz boat is fixedly placed on the second bottom plate 9 through the fixing clamping piece 19. The arrangement enables the quartz boat to be difficult to deviate when inserting the quartz boat into the wafer so as to cause the failure of the wafer inserting when the first base plate 8 and the second base plate 9 are adjusted. Preferably, two fixing clips 19 are arranged on the bottom plate, one is fixed on the bottom plate through a bolt, and the other is movably arranged in the length direction of the bottom plate through a slot 20 in the length direction of the bottom plate. Before the quartz boat is placed, the distance between the two fixed clamping pieces 19 is increased by adjusting the movable fixed clamping pieces 19, and then the quartz boat is fixed by adjusting the movable fixed clamping pieces 19. Set up like this for when fixed quartz boat, it is more convenient, can be according to the nimble adjustment of size of quartz boat.
And step S04, adjusting the first bottom plate 8 and the second bottom plate 9 to enable the silicon wafer grooves of the positive flower basket to correspond to the clamping grooves of the quartz boat, and pushing the silicon wafers 21 in the positive flower basket into the quartz boat by using the first push plate 10 on one side of the positive flower basket.
The first adjusting bottom plate 8 and the second adjusting bottom plate 9 correspond to the silicon wafer groove of the flower basket and the clamping groove of the quartz boat, and accuracy in inserting is guaranteed. Preferably, a support strip 16 is arranged below the first bottom plate 8 and the second bottom plate 9, and the support strip 16 moves in the length direction through a rail. The first bottom plate 8 and the second bottom plate 9 are adjusted to enable the silicon wafer grooves of the flower basket to correspond to the clamping grooves of the quartz boat through movement of the first bottom plate 8 and the second bottom plate 9 on the rail. The supporting bars 16 make the first bottom plate 8 and the second bottom plate 9 more stable during movement, and ensure the accuracy during inserting.
Preferably, the first push plate 10 is connected to the first push plate rail 13 through a first driving arm, the second push plate 11 is connected to the second push plate rail 13 through a second driving arm, and the first push plate 10 on one side of the front basket is driven to push the silicon wafer 21 in the front basket into the quartz boat. The driving arm is more flexible, and the push plate I10 and the push plate II 11 can move better.
Preferably, both sides of the width positions of the first base plate 8 and the second base plate 9 are provided with a protection plate 17, the protection plate 17 is provided with a limit block 18 at a position close to the other protection plate 17, and when the silicon wafer 21 in the front basket is pushed into the quartz boat by the first push plate 10 on one side of the front basket, the first push plate 10 stops pushing after contacting the limit block 18. The limiting block 18 enables the first push plate 10 not to push over the head in the pushing process, and the safety of the inserting piece is guaranteed.
The inserting sheet is completed by a push plate 10 at a time, so that the efficiency is higher and the labor is saved.
The specific embodiments described herein are merely illustrative of the spirit of the invention. Various modifications or additions may be made to the described embodiments or alternatives may be employed by those skilled in the art without departing from the spirit or ambit of the invention as defined in the appended claims.
Claims (10)
1. A solar cell silicon wafer diffusion insert process is characterized by comprising a positive flower basket, a negative flower basket, a wafer pushing device and a quartz boat; the quartz boat comprises a pair of supports and four supporting rods provided with clamping grooves; the supporting rods comprise a first supporting rod, a second supporting rod, a third supporting rod and a fourth supporting rod; the connecting line of the first supporting rod and the second supporting rod and the connecting line of the third supporting rod and the fourth supporting rod form a right angle; when the support is placed on one side in an inclined mode, the connecting line of the first support rod and the second support rod is parallel to the horizontal plane; the sheet pushing device comprises a base, a first bottom plate, a second bottom plate, a first push plate and a second push plate, wherein the first bottom plate and the second bottom plate are arranged on the base; the first bottom plate and the second bottom plate move in the length direction through two bottom plate rails arranged on the base; the first push plate and the second push plate move in the width directions of the first bottom plate and the second bottom plate through push plate rails arranged on two sides of the base; the process comprises the following steps:
step S01, preparing for laminating, placing silicon chips on the front basket and the back basket in a positive mode, and placing silicon chips on the back basket and keeping the shapes and sizes of the front basket and the back basket consistent;
step S02, combining the plates, wherein the positive flower basket is fixedly arranged on the first bottom plate, the reverse flower basket is fixedly arranged on the second bottom plate, and the opening sides of the positive flower basket and the reverse flower basket are opposite; adjusting the first bottom plate and the second bottom plate to enable the silicon wafer grooves of the positive flower basket and the silicon wafer grooves of the reverse flower basket to be staggered, pushing the silicon wafers in the reverse flower basket into the positive flower basket by using the second push plate on one side of the reverse flower basket, confirming that the suede faces are outward, and placing two silicon wafers in each silicon wafer groove of the positive flower basket;
step S03, preparing an insert, taking down the reverse basket on the second bottom plate, adjusting the second push plate on one side of the second bottom plate, and fixedly placing a quartz boat on the second bottom plate, wherein the opening of a clamping groove of the quartz boat is opposite to the opening side of the forward basket;
and step S04, adjusting the first bottom plate and the second bottom plate to enable the silicon wafer grooves of the flower basket to correspond to the clamping grooves of the quartz boat, and pushing the silicon wafers in the flower basket into the quartz boat by using the first push plate on one side of the flower basket.
2. The solar cell silicon wafer diffusion insert process according to claim 1, wherein support bars are arranged below the first base plate and the second base plate and move in the length direction through rails; through the movement of the first base plate and the second base plate on the rail, the silicon wafer grooves of the first base plate and the second base plate are adjusted to be staggered with the silicon wafer grooves of the reverse flower basket, or the silicon wafer grooves of the first base plate and the second base plate are adjusted to be corresponding to the clamping grooves of the quartz boat.
3. The solar cell silicon wafer diffusion insert process of claim 2, wherein the length of the bottom plate track is 0.5CM to 1CM longer than the support bar.
4. The solar cell silicon wafer diffusion insert process according to claim 1, wherein the first push plate is connected to the push plate rail through a first driving arm, and the second push plate is connected to the push plate rail through a second driving arm; the driving arm drives the second push plate on one side of the reverse basket to push the silicon wafer in the reverse basket into the positive basket, or drives the first push plate on one side of the positive basket to push the silicon wafer in the positive basket into the quartz boat.
5. The solar cell silicon wafer diffusion insert process according to claim 1, wherein the second push plate is connected to a push plate rail through a second driving arm, and the second driving arm is provided with a rotary joint; step S03 specifically includes: and the second push plate moves to the same plane with the second bottom plate through the movement of the second driving arm on the push plate track and the rotation of the rotary joint, then the reverse basket on the second bottom plate is taken down, and the second push plate moves to an angle matched with the quartz boat through the movement of the second driving arm on the push plate track and the rotation of the rotary joint and then the quartz boat is fixedly placed on the second bottom plate.
6. The solar cell silicon wafer diffusion insert process according to claim 1, wherein the first push plate is connected to the push plate rail through a first driving arm, and the second push plate is connected to the push plate rail through a second driving arm; the first driving arm and the second driving arm are provided with rotating joints; step S02 specifically includes: the first push plate and the second push plate move to the same plane with the first bottom plate and the second bottom plate through the movement of the first driving arm and the second driving arm on the track of the first push plate and the rotation of the rotating joint, the front flower basket is fixedly placed on the first bottom plate, and the reverse flower basket is fixedly placed on the second bottom plate; and then the first push plate and the second push plate move to the positions vertical to the first bottom plate and the second bottom plate through the movement of the first driving arm and the second driving arm on the push plate track and the rotation of the rotating joint.
7. The solar cell silicon wafer diffusion sheet inserting process according to claim 1, wherein two sides of the width positions of the first base plate and the second base plate are respectively provided with a protection plate, and the protection plates are respectively provided with a limiting block at a position close to the other protection plate; when the silicon wafer in the reverse basket is pushed into the positive basket by using the second push plate on one side of the reverse basket, the second push plate stops pushing after contacting the limiting block; when the silicon wafer in the positive flower basket is pushed into the quartz boat by the first push plate on one side of the positive flower basket, the first push plate stops pushing after touching the limiting block.
8. The solar cell silicon wafer diffusion insert process according to claim 1, wherein the second support rod and the third support rod of the quartz boat are slidably connected to the support; the step S03 further includes: and after the positions of the second supporting rod and the third supporting rod are adjusted according to the size of the silicon wafer, placing the quartz boat on the second base plate.
9. The solar cell silicon wafer diffusion insert process according to claim 1, wherein two opposite fixing clamping pieces are arranged in the length direction of the first bottom plate and the second bottom plate; the front flower basket is fixedly placed on the first bottom plate through the fixing clamping piece, or the reverse flower basket is fixedly placed on the second bottom plate, or the quartz boat is fixedly placed on the second bottom plate.
10. The solar cell silicon wafer diffusion insert process according to claim 9, wherein two fixing clamps on the bottom plate, one fixing clamp is fixed on the bottom plate through a bolt, and the other fixing clamp is movably arranged in the length direction of the bottom plate through a slot in the length direction of the bottom plate; before placing positive basket of flowers, anti-basket of flowers, quartz boat, adjust mobilizable fixed fastener with two fixed fasteners between the distance grow, later readjust mobilizable fixed fastener with positive basket of flowers, anti-basket of flowers, quartz boat fix.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010939655.0A CN112117349B (en) | 2020-09-09 | 2020-09-09 | Solar cell silicon wafer diffusion insert process |
| PCT/CN2020/120060 WO2022052195A1 (en) | 2020-09-09 | 2020-10-10 | Solar cell silicon wafer diffusion insertion process |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010939655.0A CN112117349B (en) | 2020-09-09 | 2020-09-09 | Solar cell silicon wafer diffusion insert process |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112117349A true CN112117349A (en) | 2020-12-22 |
| CN112117349B CN112117349B (en) | 2022-05-24 |
Family
ID=73802907
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010939655.0A Active CN112117349B (en) | 2020-09-09 | 2020-09-09 | Solar cell silicon wafer diffusion insert process |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN112117349B (en) |
| WO (1) | WO2022052195A1 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114551638A (en) * | 2022-01-21 | 2022-05-27 | 无锡松煜科技有限公司 | Quartz boat sheet inserting method and sheet taking method |
| CN114558865A (en) * | 2021-12-16 | 2022-05-31 | 杭州大和热磁电子有限公司 | Quartz wafer cleaning and fixing device and method |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115233186A (en) * | 2022-07-20 | 2022-10-25 | 无锡松煜科技有限公司 | Method for improving LPCVD surface coating process |
| CN117059703B (en) * | 2023-08-30 | 2024-01-09 | 安徽旭合新能源科技有限公司 | Flower basket structure for transmitting high-efficiency solar cell |
| CN117457804B (en) * | 2023-12-21 | 2024-03-22 | 阳光中科（福建）能源股份有限公司 | Silicon wafer surface cleaning device for solar cell |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1136304A (en) * | 1965-05-10 | 1968-12-11 | Rca Corp | Diffusion method |
| JPS5880848A (en) * | 1981-11-09 | 1983-05-16 | Toshiba Corp | Wafer transferring jig |
| EP1139392A2 (en) * | 2000-03-28 | 2001-10-04 | Amtech Systems, Inc. | Improved wafer boat support and method for twin tower wafer boat loader |
| CN103545401A (en) * | 2013-10-24 | 2014-01-29 | 中电电气（扬州）光伏有限公司 | Novel slice inserting device for diffusion quartz boat |
| CN105336653A (en) * | 2015-09-29 | 2016-02-17 | 横店集团东磁股份有限公司 | Diffusion quartz boat sheet inserting device |
| CN107527971A (en) * | 2017-08-14 | 2017-12-29 | 深圳市拉普拉斯能源技术有限公司 | A kind of silicon chip disperser and silicon chip inserted sheet method |
| CN207097791U (en) * | 2017-08-30 | 2018-03-13 | 东方日升新能源股份有限公司 | For installing the groove material basket of photovoltaic cell silicon chip |
| CN207409469U (en) * | 2017-09-25 | 2018-05-25 | 浙江正泰太阳能科技有限公司 | For the sucker protective device of diffusing insert pieces machine and diffusing insert pieces machine |
| CN207505194U (en) * | 2017-11-30 | 2018-06-15 | 中硅索纳(厦门)新能源有限公司 | The diffusion automation plug-in sheet machine that a kind of band destatics |
| CN109509810A (en) * | 2018-10-25 | 2019-03-22 | 江苏彩虹永能新能源有限公司 | A kind of solar battery diffusing insert pieces technique |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106784145B (en) * | 2016-12-23 | 2018-03-06 | 中赣新能源股份有限公司 | A kind of silicon chip inserted sheet method |
| CN107681019A (en) * | 2017-09-19 | 2018-02-09 | 中建材浚鑫科技有限公司 | The feeding and blanking device for spreading or annealing for solar cell |
| CN107881559A (en) * | 2017-11-08 | 2018-04-06 | 中赣新能源股份有限公司 | A kind of silicon chip of solar cell inserting piece device |
-
2020
- 2020-09-09 CN CN202010939655.0A patent/CN112117349B/en active Active
- 2020-10-10 WO PCT/CN2020/120060 patent/WO2022052195A1/en active Application Filing
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1136304A (en) * | 1965-05-10 | 1968-12-11 | Rca Corp | Diffusion method |
| JPS5880848A (en) * | 1981-11-09 | 1983-05-16 | Toshiba Corp | Wafer transferring jig |
| EP1139392A2 (en) * | 2000-03-28 | 2001-10-04 | Amtech Systems, Inc. | Improved wafer boat support and method for twin tower wafer boat loader |
| CN103545401A (en) * | 2013-10-24 | 2014-01-29 | 中电电气（扬州）光伏有限公司 | Novel slice inserting device for diffusion quartz boat |
| CN105336653A (en) * | 2015-09-29 | 2016-02-17 | 横店集团东磁股份有限公司 | Diffusion quartz boat sheet inserting device |
| CN107527971A (en) * | 2017-08-14 | 2017-12-29 | 深圳市拉普拉斯能源技术有限公司 | A kind of silicon chip disperser and silicon chip inserted sheet method |
| CN207097791U (en) * | 2017-08-30 | 2018-03-13 | 东方日升新能源股份有限公司 | For installing the groove material basket of photovoltaic cell silicon chip |
| CN207409469U (en) * | 2017-09-25 | 2018-05-25 | 浙江正泰太阳能科技有限公司 | For the sucker protective device of diffusing insert pieces machine and diffusing insert pieces machine |
| CN207505194U (en) * | 2017-11-30 | 2018-06-15 | 中硅索纳(厦门)新能源有限公司 | The diffusion automation plug-in sheet machine that a kind of band destatics |
| CN109509810A (en) * | 2018-10-25 | 2019-03-22 | 江苏彩虹永能新能源有限公司 | A kind of solar battery diffusing insert pieces technique |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114558865A (en) * | 2021-12-16 | 2022-05-31 | 杭州大和热磁电子有限公司 | Quartz wafer cleaning and fixing device and method |
| CN114551638A (en) * | 2022-01-21 | 2022-05-27 | 无锡松煜科技有限公司 | Quartz boat sheet inserting method and sheet taking method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN112117349B (en) | 2022-05-24 |
| WO2022052195A1 (en) | 2022-03-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN112117349B (en) | Solar cell silicon wafer diffusion insert process | |
| CN204621453U (en) | A kind of mechanical positioner of cell piece | |
| CN206509790U (en) | A kind of multi-work piece clamping device | |
| CN106783710A (en) | Wafer transfer device | |
| CN106584162A (en) | Device for clamping multiple workpieces | |
| CN207327329U (en) | Crystalline silicon device for discharging and crystalline silicon shear | |
| CN206230285U (en) | The rotation clamping device of workpiece | |
| CN206584905U (en) | Wafer transfer device | |
| CN209249429U (en) | Wafer heat device | |
| CN215787321U (en) | Electronic board wave-soldering smelting tool | |
| CN217122811U (en) | Robot and polishing equipment | |
| CN214675888U (en) | Insert frame equipment | |
| CN205833894U (en) | A kind of bender | |
| CN108529225A (en) | A kind of chucking device of glass processing | |
| CN109037128B (en) | High-stability crystalline silicon transfer device for solar cell | |
| CN113734776A (en) | Pipeline grabbing robot and grabbing method thereof | |
| CN207474440U (en) | A kind of chip bearing apparatus | |
| CN213443252U (en) | Ceramic substrate product packaging clamp | |
| CN214779178U (en) | Automatic crystal support overturning and feeding device | |
| CN206343818U (en) | A kind of clamping device for box-type workpieces | |
| CN110125637A (en) | A kind of magnetic adsorption plate shifting apparatus | |
| CN209238656U (en) | A kind of infrared fileter copper sheet cleaning tool | |
| CN214313161U (en) | Automatic acid soaking device for monocrystalline silicon wafer | |
| CN218613633U (en) | Clamping device is used in processing convenient to location prevents skew | |
| CN213646941U (en) | Corner grinding device for manufacturing clamp |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: 313000 No. 102, building 10, North District, Licheng Intelligent Manufacturing Industrial Park, Wuxing District, Huzhou City, Zhejiang Province Patentee after: Zhejiang Aobo quartz Technology Co.,Ltd. Country or region after: China Address before: No.7 Xinsheng, Wuxing science and Technology Pioneer Park, balidian Town, Wuxing District, Huzhou City, Zhejiang Province, 313000 Patentee before: HUZHOU OPAL QUARTZ TECH Co.,Ltd. Country or region before: China |