CN112098799A - Alternating current dynamic parameter test calibration device and method for MOSFET device - Google Patents
Alternating current dynamic parameter test calibration device and method for MOSFET device Download PDFInfo
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Abstract
The invention provides a device and a method for testing and calibrating alternating current dynamic parameters of a metal-oxide-semiconductor field effect transistor (MOSFET) device, and belongs to the technical field of MOSFET device testing and calibrating. The device comprises a sorting machine with a testing claw and a guide rail, a tester capable of being electrically connected with the sorting machine through a testing wire, software matched with the tester, an open-circuit calibration tube, a short-circuit calibration unit and a standard calibration unit. The method comprises the following steps: s1, short circuit calibration; s2, performing open circuit calibration to obtain first calibration data; s3, judging whether the first calibration data is qualified, if so, saving the first calibration data and entering the step S4; s4, standard calibration is carried out on the standard calibration tube by using software matched with the tester to obtain second calibration data; and S5, judging whether the second calibration data is qualified, if so, saving and programming the second calibration data. The beneficial effects of the invention include: the line resistance of the test line and the test claw during calibration test can be eliminated, and more accurate calibration data can be obtained.
Description
Technical Field
The invention relates to a testing method in the processing process of a semiconductor device, in particular to a device and a method for testing and calibrating alternating current dynamic parameters of a metal-oxide-semiconductor field effect transistor (MOSFET) device.
Background
High-speed switching performance measurements of MOSFET devices (metal oxide semiconductor field effect transistor devices, also referred to as MOSFET devices) are very sensitive to the effects of stray elements (e.g., capacitance, inductance, and resistance) on the test circuit. At present, an alternating current signal is output to a device to be tested by a tester, then the device to be tested is sampled, resistance and capacitance parameters such as Rg, Ciss, Coss and Crss of the device to be tested are calculated according to sampling values, and then Equivalent Series Resistance (ESR) of a MOSFET is calculated according to the Rg, so that high-speed switching consistency of the MosFet device is ensured. Before testing, calibration and zero setting are needed to eliminate the influence of the wire resistance of the test wire and the like on the precision of test data. The current calibration mode can only use a manual test seat to perform manual test, but cannot use a tester and a sorting machine to perform automatic test. The reason is that the sorting machine is mainly used for testing and sorting the MOSFET devices, the existing calibration device cannot be placed on the sorting machine for testing, and a manual test seat is adopted for testing and calibrating, so that the calibration precision is low due to the peripheral parasitic resistance and the parasitic capacitance, and the subsequent sorting work is not facilitated.
Disclosure of Invention
The present invention aims to address at least one of the above-mentioned deficiencies of the prior art. For example, it is an object of the present invention to provide an apparatus and method that can use a tester and a sorter to perform testing and calibration of MOSFET devices prior to ac dynamic parametric testing, thereby improving the efficiency and accuracy of the testing and calibration.
In order to achieve the above objects, an aspect of the present invention provides an ac dynamic parameter test calibration apparatus for a MOSFET device, the apparatus including a handler having a test jaw and a guide rail, a tester electrically connectable to the handler through a test line, software associated with the tester, an open calibration tube, a short calibration unit, and a standard calibration unit. The short circuit calibration unit is provided with a first short circuit calibration tube, a second short circuit calibration tube and a third short circuit calibration tube. The first short-circuit calibration tube is provided with a first grid pin, a first source pin and a first drain pin, and is configured to be a standard packaging piece in which the first source pin and the first drain pin are in short-circuit connection. The first grid pin can be electrically connected with a first electric connection point and a second electric connection point of the test claw, the first source pin can be electrically connected with a third electric connection point and a fourth electric connection point of the test claw, and the first drain pin can be electrically connected with a fifth electric connection point and a sixth electric connection point of the test claw. The second short-circuit calibration tube is provided with a second grid pin, a second source pin and a second drain pin and is configured to be a standard packaging piece in which the second grid pin and the second drain pin are in short-circuit connection. The second grid electrode pin can be electrically connected with a first electric connection point and a second electric connection point of the test claw, the second source electrode pin can be electrically connected with a third electric connection point and a fourth electric connection point of the test claw, and the second drain electrode pin can be electrically connected with a fifth electric connection point and a sixth electric connection point of the test claw. The third short-circuit calibration tube is provided with a third grid pin, a third source pin and a third drain pin and is configured to be a standard packaging piece in which the third grid pin, the third source pin and the third drain pin are in short-circuit connection with each other. The third grid pin can be electrically connected with a first electric connection point and a second electric connection point of the test claw, the third source pin can be electrically connected with a third electric connection point and a fourth electric connection point of the test claw, and the third drain pin can be electrically connected with a fifth electric connection point and a sixth electric connection point of the test claw. The open-circuit calibration tube has a fourth gate lead, a fourth source lead, and a fourth drain lead, and is configured as a standard package. The fourth grid pin can be electrically connected with a first electric connection point and a second electric connection point of the test claw, the fourth source pin can be electrically connected with a third electric connection point and a fourth electric connection point of the test claw, and the fourth drain pin can be electrically connected with a fifth electric connection point and a sixth electric connection point of the test claw. The standard calibration unit comprises at least 10 standard calibration tubes, each standard calibration tube of the standard calibration unit being configured as a standard package with known capacitance and resistance values.
The invention also provides a method for testing and calibrating the alternating current dynamic parameters of the MOSFET device by using the device. The method comprises the following steps: s1, sequentially placing the first short-circuit calibration tube, the second short-circuit calibration tube and the third short-circuit calibration tube into a guide rail of the sorting machine and connecting the first short-circuit calibration tube, the second short-circuit calibration tube and the third short-circuit calibration tube to a test claw of the sorting machine, and performing short-circuit calibration by using software matched with a tester; s2, placing the open-circuit calibration tube into a guide rail of the sorting machine and connecting the open-circuit calibration tube to a test claw of the sorting machine, and performing open-circuit calibration by using software matched with the tester to obtain first calibration data; s3, judging whether the first calibration data is qualified, if so, saving the first calibration data and entering the step S4, if not, reconnecting the test claw and the test line, and then repeating the step S1 and the step S2 until the first calibration data is qualified; s4, sequentially placing each standard calibration tube of the standard calibration unit into a guide rail of the sorting machine and connecting the standard calibration tube to a test claw of the sorting machine, simultaneously writing the actual C value and the actual R value of each standard calibration tube into the software matched with the tester, performing standard calibration on the standard calibration tubes by using the software matched with the tester to obtain second calibration data, and measuring the pre-calibration C value, the post-calibration C value, the pre-calibration R value and the post-calibration R value of all the standard calibration tubes; and S5, judging whether the second calibration data is qualified, if so, saving and programming the second calibration data, and if not, repeating the step S4 until the second calibration data is qualified.
Compared with the prior art, the beneficial effects of the invention can include: the sorting machine can be directly used for calibration and zero adjustment, and the influence of line resistance of the test line, the test claw and the front end of the test seat is eliminated; the operation is more convenient and faster; more accurate calibration data can be obtained, and the measured alternating current dynamic parameters of the MOSFET device are more accurate and stable.
Drawings
FIG. 1 shows an exemplary diagram of a short circuit calibration unit in an exemplary embodiment of the invention;
FIG. 2 illustrates an exemplary diagram of an open calibration tube in an exemplary embodiment of the invention;
FIG. 3 illustrates an exemplary and schematic view of one of at least 10 standard calibration tubes of the standard calibration unit in an exemplary embodiment of the invention.
Detailed Description
Hereinafter, the ac dynamic parameter test calibration apparatus and method for MOSFET devices according to the present invention will be described in detail with reference to exemplary embodiments.
Herein, the terms "first," "second," "third," "fourth," "fifth," "sixth," and the like are used for convenience of description and for convenience of distinction, and are not to be construed as indicating or implying relative importance or order of magnitude.
Example 1
In one exemplary embodiment of the present invention, the calibration apparatus for ac dynamic parametric testing of MOSFET devices comprises a handler having test jaws and rails, a tester (e.g., a T342 test station) electrically connectable to the handler via test lines, software associated with the tester (e.g., a T324A installation), an open calibration tube, a short calibration unit, and a standard calibration unit.
The test jaw has a first electrical connection point, a second electrical connection point, a third electrical connection point, a fourth electrical connection point, a fifth electrical connection point, and a sixth electrical connection point.
The short circuit calibration unit comprises a first short circuit calibration tube, a second short circuit calibration tube and a third short circuit calibration tube, for example, as shown in fig. 1. The standard calibration unit has at least 10 standard calibration tubes.
Each of the first short calibration tube, the second short calibration tube, the third short calibration tube, the open calibration tube and the standard calibration unit is configured as a standard package, for example a TO series package, such as a TO20 or a TO20F standard package.
The first short-circuit calibration tube is provided with a first grid electrode pin, a first source electrode pin and a first drain electrode pin. The first source lead and the first drain lead are connected in a short circuit through a connecting line arranged in the standard package. The first short circuit calibration tube can be electrically connected with a first electric connection point and a second electric connection point of the test claw through the first grid pin, a third electric connection point and a fourth electric connection point of the test claw through the first source pin, and a fifth electric connection point and a sixth electric connection point of the test claw through the first drain pin, and is electrically connected with the sorting machine and further electrically connected with the tester.
The second short-circuit calibration tube is provided with a second grid electrode pin, a second source electrode pin and a second drain electrode pin. The second gate lead and the second drain lead are connected in a short circuit through a connecting wire arranged in the standard package. The second short circuit calibration tube can be electrically connected with a first electric connection point and a second electric connection point of the test claw through a second grid electrode pin, a third electric connection point and a fourth electric connection point of the test claw through a second source electrode pin, and a fifth electric connection point and a sixth electric connection point of the test claw through a second drain electrode pin, and is electrically connected with the sorting machine and further electrically connected with the tester.
The third short-circuit calibration tube is provided with a third grid electrode pin, a third source electrode pin and a third drain electrode pin. And the third grid electrode pin, the third source electrode pin and the third drain electrode pin are mutually connected in a short circuit mode through connecting lines arranged in the standard package. The third short-circuit calibration tube can be electrically connected with the sorting machine through the electric connection of a third grid pin and a first electric connection point and a second electric connection point of the test claw, the electric connection of a third source pin and a third electric connection point and a fourth electric connection point of the test claw, and the electric connection of a third drain pin and a fifth electric connection point and a sixth electric connection point of the test claw, and further is electrically connected with the tester.
The open-circuit calibration tube (e.g., as shown in fig. 2) has a fourth gate lead, a fourth source lead, and a fourth drain lead. The open circuit calibration tube can be electrically connected with a first electric connection point and a second electric connection point of the test claw through a fourth grid pin, a fourth source pin is electrically connected with a third electric connection point and a fourth electric connection point of the test claw, and a fourth drain pin is electrically connected with a fifth electric connection point and a sixth electric connection point of the test claw and a sorting machine to be electrically connected with the tester.
The standard calibration unit comprises at least 10 (e.g. 15) standard calibration tubes configured such that the capacitance value (i.e. C-value) and the resistance value (i.e. R-value) of the standard package are known. Each of the standard calibration tubes has a gate lead, a source lead, and a drain lead, as shown in fig. 3. Each standard calibration tube can be electrically connected with a first electric connection point and a second electric connection point of the test claw through the grid pin, the source pin is electrically connected with a third electric connection point and a fourth electric connection point of the test claw, and the drain pin is electrically connected with a fifth electric connection point and a sixth electric connection point of the test claw and a sorting machine so as to be electrically connected with the tester.
That is to say, the first short-circuit calibration tube, the second short-circuit calibration tube, the third short-circuit calibration tube, the open-circuit calibration tube and each standard calibration tube can be electrically connected with the tester sequentially through the sorting machine and the test wire through the electrical connection with the test claw, so as to ensure the hardware connection basis of the alternating current dynamic parameter test calibration of the MOSFET device.
The test claws, the sorting machine and the test wire are connected in a Kelvin mode, and the first short-circuit calibration pipe is connected into the tester. Specifically, the kelvin connection is formed by the first and second electrical connection points of the test jaw being simultaneously connected to the first gate pin of the first short calibration tube, the third and fourth electrical connection points of the test jaw being simultaneously connected to the first source pin of the first short calibration tube, and the fifth and sixth electrical connection points of the test jaw being simultaneously connected to the first drain pin of the first short calibration tube. The Kelvin connection is beneficial to eliminating the influence of line resistance on test calibration caused by a test claw, a sorting machine, a test line and the like. Similarly, the first, second and third short-circuit calibration tubes, the open-circuit calibration tube and each standard calibration tube are connected to the tester through the sorter and the test line in the same manner as the test claws.
The connection of the capacitor and the resistor of the standard calibration tube packaged in the standard package is shown in fig. 3. The resistance value of each standard calibration tube of the standard calibration unit is less than 10 omega, and the capacitance value C is between 0.1-20 nF. The value of R is numerically equal to the value of Rg in fig. 3, and the value of C is an equivalent capacitance value obtained by integrating the values of Cgd, Cgs and Cds inside the standard calibration tube in fig. 3.
For example, the standard calibration unit consists of 15 standard calibration tubes as shown in table 1 below.
TABLE 115 relevant parameters for Standard calibration tubes only
| Actual R value (omega) | Actual C value (nF) | |
| Standard calibration tube 1 | 5 | 0.10 |
| Standard calibration tube 2 | 5 | 0.20 |
| Standard calibration tube 3 | 5 | 0.30 |
| Standard calibration tube 4 | 5 | 0.47 |
| Standard calibration tube 5 | 5 | 0.57 |
| Standard calibration tube 6 | 5 | 0.77 |
| Standard calibration tube 7 | 5 | 1.00 |
| Standard calibration tube 8 | 5 | 1.20 |
| Standard calibration tube 9 | 5 | 1.47 |
| Standard calibration tube 10 | 5 | 2.00 |
| Standard calibration tube 11 | 5 | 2.47 |
| Standard calibration tube 12 | 5 | 3.00 |
| Standard calibration tube 13 | 5 | 5.00 |
| Standard calibration tube 14 | 5 | 10.00 |
| Standard calibration tube 15 | 5 | 20.00 |
Example 2
In the present exemplary embodiment, the MOSFET device ac dynamic parameter test calibration method is implemented by the MOSFET device ac dynamic parameter test calibration apparatus described above.
Specifically, the alternating current dynamic parameter test calibration method for the MOSFET device can comprise the following steps S1-S5.
And S1, sequentially placing the first short-circuit calibration tube, the second short-circuit calibration tube and the third short-circuit calibration tube into a guide rail of the sorting machine and connecting the first short-circuit calibration tube, the second short-circuit calibration tube and the third short-circuit calibration tube to a test claw of the sorting machine, and performing short-circuit calibration by using software matched with the tester.
The first electric connection point and the second electric connection point of the test claw are connected to a first grid electrode of the first short-circuit calibration tube, the third electric connection point and the fourth electric connection point of the test claw are connected to a first source electrode of the first short-circuit calibration tube, and the fifth electric connection point and the sixth electric connection point of the test claw are connected to a first drain electrode of the first short-circuit calibration tube and then control the tester to conduct short-circuit calibration of the first short-circuit calibration tube through software matched with the tester.
Similarly, the first electrical connection point and the second electrical connection point of the test claw are connected to the second grid electrode of the second short-circuit calibration tube, the third electrical connection point and the fourth electrical connection point of the test claw are connected to the second source electrode of the second short-circuit calibration tube, and the fifth electrical connection point and the sixth electrical connection point of the test claw are connected to the second drain electrode of the second short-circuit calibration tube and then control the tester to perform short-circuit calibration on the second short-circuit calibration tube by using software matched with the tester.
Similarly, the first electrical connection point and the second electrical connection point of the test claw are connected to a third grid electrode of a third short-circuit calibration tube, the third electrical connection point and the fourth electrical connection point of the test claw are connected to a third source electrode of the third short-circuit calibration tube, and the fifth electrical connection point and the sixth electrical connection point of the test claw are connected to a third drain electrode of the third short-circuit calibration tube and then control the tester to perform short-circuit calibration of the third short-circuit calibration tube by using software matched with the tester.
And S2, placing the open-circuit calibration tube into a guide rail of the sorting machine, connecting the open-circuit calibration tube to a testing claw of the sorting machine, and performing open-circuit calibration by using software matched with the tester to obtain first calibration data.
And the first electric connection point and the second electric connection point of the test claw are connected to a fourth grid electrode of the open-circuit calibration tube, the third electric connection point and the fourth electric connection point of the test claw are connected to a fourth source electrode of the open-circuit calibration tube, and the fifth electric connection point and the sixth electric connection point of the test claw are connected to a fourth drain electrode of the open-circuit calibration tube and then are used for controlling the tester to perform open-circuit calibration by using software matched with the tester. After the short circuit calibration and the open circuit calibration are completed, the software matched with the tester outputs and stores first calibration data according to the short circuit calibration and the open circuit calibration results.
The first calibration data can zero the line resistance brought by the test line and the test claw, and eliminate the influence of the test line and the test claw on the test, such as the influence on the alternating current dynamic parameter test of the MOSFET device.
And S3, judging whether the first calibration data is qualified, if so, saving the first calibration data and entering the step S4, and if not, reconnecting the test claw and the test line, and then repeating the step S1 and the step S2 until the first calibration data is qualified.
If the short circuit calibration and/or the open circuit calibration are not good (the short circuit calibration is not good, the open circuit calibration is not good, and neither the short circuit calibration nor the open circuit calibration is good), the first calibration data output by the software matched with the tester can be not good. The short circuit calibration and/or open circuit calibration is not acceptable because the test wire or test jaw is not connected or in good contact, so the steps S1 and S2 are repeated after reconnecting the test jaw and test wire until the first calibration data is acceptable.
The criterion for judging whether the first calibration data is qualified is as follows: and (3) accessing the manual testing seat into the tester by using a testing wire, controlling the tester by controlling software matched with the tester to carry out over 10 times of idle testing on the three parameters of Ciss, Coss and Crss to obtain each testing result (namely testing value), and if the testing values of each time of the three parameters of Ciss, Coss and Crss are all below 10pF, the first calibration data in the step S3 is qualified. On the contrary, if the test value of any one parameter in more than 10 empty tests of the Ciss, Coss and Crss parameters is greater than 10pF, the first calibration data of step S3 is failed.
And S4, sequentially placing each standard calibration tube of the standard calibration unit into a guide rail of the sorting machine and connecting the standard calibration tube to a test claw of the sorting machine, simultaneously writing the actual C value and the actual R value of each standard calibration tube into the software matched with the tester, calibrating the standard calibration tubes by using the software matched with the tester to obtain second calibration data, and measuring the pre-calibration C value, the post-calibration C value, the pre-calibration R value and the post-calibration R value of all the standard calibration tubes.
After the standard calibration tube is placed into a guide rail of the sorting machine and connected to a testing claw of the sorting machine, the tester is controlled by controlling software matched with the tester to test the standard calibration tube to obtain a pre-calibration C value and a pre-calibration R value, and the standard calibration tube is calibrated to obtain a post-calibration C value and a post-calibration R value of the standard calibration tube. After all the standard calibration tubes are calibrated, the software matched with the tester obtains second calibration data according to the first calibration data and the standard calibration result of the standard calibration tube (namely the calibrated C value and the calibrated R value of the standard calibration tube).
The standard calibration tube is placed into the guide rail of the sorter and connected to the test jaw of the sorter in the order: when the actual resistance values of any two standard calibration tubes are equal, the actual capacitance values are in the order from small to large; when the actual capacitance values of any two standard calibration tubes are equal, the actual resistance values are in the order from small to large; and when the actual capacitance values and the actual resistance values of any two standard calibration tubes are not equal, sequentially changing the actual resistance values from small to large. For example, if the actual R value of the standard calibration pipe 1 is 5 Ω and the actual C value is 0.1nF, and the actual R value of the standard calibration pipe 2 is 5 Ω and the actual C value is 0.2nF, the standard calibration pipe 1 is first placed in the guide rail of the sorting machine and connected to the testing claw of the sorting machine for standard calibration.
The standard calibration can eliminate zero drift of alternating current dynamic parameters of the MOSFET device caused by part aging, temperature rise, local heating or external electromagnetic interference and the like of the tester and the sorting machine as far as possible.
And S5, judging whether the second calibration data is qualified, if so, saving and programming the second calibration data, and if not, repeating the step S4 until the second calibration data is qualified.
If the second calibration data is qualified, interference factors influencing the alternating current dynamic parameter test of the MOSFET device are controlled within a negligible range, and the test result obtained by carrying out the alternating current dynamic parameter test on the MOSFET device can be more accurate than the test result obtained by carrying out the dynamic parameter test after the test calibration is carried out by using the hand test seat, because the influences of the line resistance and the like of the hand test seat are eliminated.
The error between the calibrated C value and the actual C value, and the error between the calibrated R value and the actual R value are determined as the criterion for determining whether the second calibration data is qualified in step S5.
The nominal value may allow a tolerance criterion of + -10%, + -5%, + -3%, + -2%, + -1% or + -0.5%. That is, when the nominal R value of a MOSFET device is 5 Ω + -1% and the C value is 0.1nF + -1%, the actual R value of the MOSFET device ranges from 4.95 Ω to 5.05 Ω and the actual C value ranges from 0.099 to 0.101 nF. Here, the tolerance criterion for the nominal value of the capacitor and the tolerance criterion for the nominal value of the resistor may be the same or different.
By making the error between the measured R value and the actual R value and the error between the measured C value and the actual C value conform to the error standard allowed by the nominal value of the MOSFET device, the second calibration data obtained by the method of the invention can be ensured to be qualified, so that the second calibration data can be used for calibrating the MOSFET device before the AC dynamic parameter test. The specific size of the standard of the allowed error of the nominal value is determined according to the allowed error of the nominal value of the MOSFET which needs to be subjected to the AC dynamic parameter test subsequently.
For example, if the actual R value of any one standard calibration pipe is 5 Ω and the actual C value is 0.1nF, the pre-calibration R value is 4.9069 Ω, the post-calibration R value is 4.9181 Ω, the pre-calibration C value is 10.2052nF, and the post-calibration C value is 10.1456nF, the error between the post-calibration R value and the actual R value is-0.0819 Ω (1.638%), and the error between the post-calibration C value and the actual C value is 10.0456nF (10045.6%), and if the error criterion allowed by the nominal value is ± 1%, the error between the post-calibration C value and the actual C value and the error between the post-calibration R value and the actual R value do not meet the error criterion allowed by the nominal value, the second calibration data is not qualified. Step S4 is repeated, and if the second calibration data is not qualified, the software associated with the tester retains the second calibration data with unqualified history, and repeats step S4 after performing one or more adjustments, such as feedback adjustment or convergence adjustment, on the next calibration until qualified second calibration data is obtained.
For another example, a standard calibration unit is formed by using 15 standard calibration tubes, and the values of the actual C value, the actual R value, the pre-calibration C value, the pre-calibration R value, the post-calibration C value and the post-calibration R value of the 15 standard calibration tubes are shown in table 2 below.
TABLE 2 actual C, R, pre-calibration C, R, and post-calibration C, R
| Actual C value (nF) | Actual R value (omega) | C value before calibration (nF) | R value before calibration (omega) | Calibrated C value (nF) | Calibrated R value (omega) | |
| Standard calibration tube 1 | 0.10 | 5 | 0.1044 | -2.23627 | 0.1011 | 4.9511 |
| Standard calibration tube 2 | 0.20 | 5 | 0.2093 | 1.4879 | 0.2020 | 5.0980 |
| Standard calibration tube 3 | 0.30 | 5 | 0.3150 | 2.7690 | 0.3045 | 5.0496 |
| Standard calibration tube 4 | 0.47 | 5 | 0.4691 | 3.6502 | 0.4531 | 4.9873 |
| Standard calibration tube 5 | 0.57 | 5 | 0.5811 | 3.9181 | 0.5624 | 4.9787 |
| Standard calibration tube 6 | 0.77 | 5 | 0.7843 | 4.2294 | 0.7583 | 4.9529 |
| Standard calibration tube 7 | 1.00 | 5 | 1.0481 | 4.4055 | 1.0112 | 5.0222 |
| Standard calibration tube 8 | 1.20 | 5 | 1.2607 | 4.4879 | 1.2163 | 5.0293 |
| Standard calibration tube 9 | 1.47 | 5 | 1.5037 | 4.5480 | 1.4484 | 5.0324 |
| Standard calibration tube 10 | 2.00 | 5 | 2.0038 | 4.5627 | 2.0038 | 4.9470 |
| Standard calibration tube 11 | 2.47 | 5 | 2.4655 | 4.6030 | 2.4657 | 4.9421 |
| Standard calibration tube 12 | 3.00 | 5 | 3.0462 | 4.6725 | 3.0451 | 4.9062 |
| Standard calibration tube 13 | 5.00 | 5 | 5.0658 | 4.9642 | 5.0665 | 5.0244 |
| Standard calibration tube 14 | 10.00 | 5 | 10.1993 | 4.9206 | 10.1415 | 4.9319 |
| Standard calibration tube 15 | 20.00 | 5 | 20.2575 | 4.9078 | 20.1094 | 4.9210 |
Calculated, the errors of the calibrated C value and the actual C value, and the errors of the calibrated R value and the actual R value of the 15 standard calibration tubes of the standard calibration unit are shown in table 3 below.
TABLE 3C value error, and R value error
| Error of calibrated C value from actual C value (nF) | Error (omega) of calibrated R value and actual R value | |
| Standard calibration tube 1 | 0.0011 | -0.0489 |
| Standard calibration tube 2 | 0.0020 | 0.0980 |
| Standard calibration tube 3 | 0.0045 | 0.0496 |
| Standard calibration tube 4 | -0.0169 | -0.0127 |
| Standard calibration tube 5 | -0.0076 | -0.0213 |
| Standard calibration tube 6 | -0.0117 | -0.0471 |
| Standard calibration tube 7 | 0.0112 | 0.0222 |
| Standard calibration tube 8 | 0.0163 | 0.0293 |
| Standard calibration tube 9 | -0.0216 | 0.0324 |
| Standard calibration tube 10 | 0.0038 | -0.0530 |
| Standard calibration tube 11 | -0.0043 | -0.0579 |
| Standard calibration tube 12 | 0.0451 | -0.0938 |
| Standard calibration tube 13 | 0.0665 | 0.0244 |
| Standard calibration tube 14 | 0.1415 | -0.0681 |
| Standard calibration tube 15 | 0.1094 | -0.0790 |
If the required nominal value allows an error criterion of + -1%, that is, the maximum deviation range of the measured calibrated R value and the actual R value and the calibrated C value and the actual C value of the standard calibration tube is 1%. And then the error between the calibrated C value and the actual C value and the error between the calibrated R value and the actual R value meet the error standard allowed by the nominal value, the second calibration data is qualified, and the second calibration data is stored and programmed for the subsequent alternating current dynamic parameter test of the MOSFET device.
Although the present invention has been described above in connection with the exemplary embodiments and the accompanying drawings, it will be apparent to those of ordinary skill in the art that various modifications may be made to the above-described embodiments without departing from the spirit and scope of the claims.
Claims (10)
1. The alternating current dynamic parameter test and calibration device for the MOSFET device comprises a sorting machine with a test claw and a guide rail, a tester capable of being electrically connected with the sorting machine through a test wire, and software matched with the tester, and is characterized by further comprising an open-circuit calibration tube, a short-circuit calibration unit and a standard calibration unit, wherein,
the test claw is provided with a first electric connection point, a second electric connection point, a third electric connection point, a fourth electric connection point, a fifth electric connection point and a sixth electric connection point;
the short circuit calibration unit is provided with a first short circuit calibration tube, a second short circuit calibration tube and a third short circuit calibration tube,
wherein the first short-circuit calibration tube has a first gate pin, a first source pin and a first drain pin, and is configured as a standard package in which the first source pin and the first drain pin are short-circuited, the first gate pin is capable of being electrically connected to a first electrical connection point and a second electrical connection point of the test jaw, the first source pin is capable of being electrically connected to a third electrical connection point and a fourth electrical connection point of the test jaw, the first drain pin is capable of being electrically connected to a fifth electrical connection point and a sixth electrical connection point of the test jaw,
the second short-circuit calibration tube has a second gate pin, a second source pin and a second drain pin, and is configured as a standard package in which the second gate pin and the second drain pin are short-circuited, the second gate pin is capable of being electrically connected to the first electrical connection point and the second electrical connection point of the test jaw, the second source pin is capable of being electrically connected to the third electrical connection point and the fourth electrical connection point of the test jaw, and the second drain pin is capable of being electrically connected to the fifth electrical connection point and the sixth electrical connection point of the test jaw,
the third short-circuit calibration tube is provided with a third grid pin, a third source pin and a third drain pin and is configured to be a standard packaging part in which the third grid pin, the third source pin and the third drain pin are in short-circuit connection with each other, the third grid pin can be electrically connected with a first electric connection point and a second electric connection point of the test claw, the third source pin can be electrically connected with a third electric connection point and a fourth electric connection point of the test claw, and the third drain pin can be electrically connected with a fifth electric connection point and a sixth electric connection point of the test claw;
the open circuit calibration tube is provided with a fourth grid pin, a fourth source pin and a fourth drain pin and is configured to be a standard package, the fourth grid pin can be electrically connected with the first electric connection point and the second electric connection point of the test claw, the fourth source pin can be electrically connected with the third electric connection point and the fourth electric connection point of the test claw, and the fourth drain pin can be electrically connected with the fifth electric connection point and the sixth electric connection point of the test claw;
the standard calibration unit comprises at least 10 standard calibration tubes, each standard calibration tube of the standard calibration unit being configured as a standard package with known capacitance and resistance values.
2. The alternating current dynamic parameter test calibration device for the MOSFET device according to claim 1, wherein the standard calibration unit comprises 15 standard calibration tubes.
3. The alternating current dynamic parameter test calibration device for the MOSFET device as claimed in claim 1, wherein each standard calibration tube of the standard calibration unit has a resistance R smaller than 10 Ω and a capacitance C between 0.1-20 nF.
4. The MOSFET device AC dynamic parametric test calibration apparatus of claim 1, wherein the standard package is a TO package.
5. A MOSFET device AC dynamic parameter test calibration method using the MOSFET device AC dynamic parameter test calibration device of any one of claims 1-4, comprising the steps of:
s1, sequentially placing the first short-circuit calibration tube, the second short-circuit calibration tube and the third short-circuit calibration tube into a guide rail of the sorting machine and connecting the first short-circuit calibration tube, the second short-circuit calibration tube and the third short-circuit calibration tube to a test claw of the sorting machine, and performing short-circuit calibration by using software matched with a tester;
s2, placing the open-circuit calibration tube into a guide rail of the sorting machine and connecting the open-circuit calibration tube to a test claw of the sorting machine, and performing open-circuit calibration by using software matched with the tester to obtain first calibration data;
s3, judging whether the first calibration data is qualified, if so, saving the first calibration data and entering the step S4, if not, reconnecting the test claw and the test line, and then repeating the step S1 and the step S2 until the first calibration data is qualified;
s4, sequentially placing each standard calibration tube of the standard calibration unit into a guide rail of the sorting machine and connecting the standard calibration tube to a test claw of the sorting machine, simultaneously writing the actual C value and the actual R value of each standard calibration tube into the software matched with the tester, performing standard calibration on the standard calibration tubes by using the software matched with the tester to obtain second calibration data, and measuring the pre-calibration C value, the post-calibration C value, the pre-calibration R value and the post-calibration R value of all the standard calibration tubes;
and S5, judging whether the second calibration data is qualified, if so, saving and programming the second calibration data, and if not, repeating the step S4 until the second calibration data is qualified.
6. The method of claim 5, wherein the step S3 is based on whether the first calibration data is qualified or not, wherein the test result obtained by accessing a manual test socket on the tester and performing more than 10 times of idle tests on each of Ciss, Coss and Crss parameters is less than 10 pF.
7. The calibration method for testing AC dynamic parameters of MOSFET device as claimed in claim 5, wherein the error between the calibrated C value and the actual C value is determined according to the error criterion allowable for the nominal capacitance value and the error between the calibrated R value and the actual R value is determined according to the error criterion allowable for the nominal resistance value in step S5.
8. The method of testing and calibrating alternating current dynamic parameters of MOSFET devices according to claim 5, wherein the step S4 comprises placing each standard calibration tube of the standard calibration unit into the guide rail of the handler in sequence and connecting to the test jaw of the handler in the following order: when the actual resistance values of any two standard calibration tubes are equal, the actual capacitance values are in the order from small to large; when the actual capacitance values of any two standard calibration tubes are equal, the actual resistance values are in the order from small to large; and when the actual capacitance values and the actual resistance values of any two standard calibration tubes are not equal, sequentially changing the actual resistance values from small to large.
9. The method of claim 5, wherein the testing jaws, the handler and the testing wires connect the first short calibration tube, the second short calibration tube, the third short calibration tube, the open calibration tube or each standard calibration tube to the tester in a Kelvin manner.
10. The method of claim 7, wherein the tolerance of the nominal capacitance value is ± 10%, ± 5%, ± 3%, ± 2%, ± 1% or ± 0.5%, and the tolerance of the nominal resistance value is ± 10%, ± 5%, ± 3%, ± 2%, ± 1% or ± 0.5%.
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