CN112087541B - Display module and preparation method thereof - Google Patents

Display module and preparation method thereof Download PDF

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Publication number
CN112087541B
CN112087541B CN202010927157.4A CN202010927157A CN112087541B CN 112087541 B CN112087541 B CN 112087541B CN 202010927157 A CN202010927157 A CN 202010927157A CN 112087541 B CN112087541 B CN 112087541B
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electrode layer
layer
display module
sound
display panel
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CN112087541A (en
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胡小波
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Wuhan China Star Optoelectronics Semiconductor Display Technology Co Ltd
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Wuhan China Star Optoelectronics Semiconductor Display Technology Co Ltd
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    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04M—TELEPHONIC COMMUNICATION
    • H04M1/00—Substation equipment, e.g. for use by subscribers
    • H04M1/02—Constructional features of telephone sets
    • H04M1/0202—Portable telephone sets, e.g. cordless phones, mobile phones or bar type handsets
    • H04M1/026—Details of the structure or mounting of specific components
    • H04M1/0266—Details of the structure or mounting of specific components for a display module assembly
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
    • G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
    • G09F9/30—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
    • G09F9/33—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements being semiconductor devices, e.g. diodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/15—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission
    • H01L27/153—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission in a repetitive configuration, e.g. LED bars
    • H01L27/156—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission in a repetitive configuration, e.g. LED bars two-dimensional arrays
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Signal Processing (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Optics & Photonics (AREA)
  • Theoretical Computer Science (AREA)
  • Electroluminescent Light Sources (AREA)

Abstract

The application provides a display module and a preparation method thereof, wherein in the display module, a first electrode layer is arranged on a display panel; the second electrode layer is arranged on the first electrode layer; the exciter is arranged on the second electrode layer; the opening penetrates through the first electrode layer and the second electrode layer; on the periphery of the opening, the suspended part of the second electrode layer, the side wall of the first electrode layer and the display panel define a sound-emitting cavity; the sounding cavity is communicated with the opening. This application overlaps the part of the second electrode of setting on first electrode layer with first electrode layer and is unsettled, and then this unsettled part, the lateral wall of first electrode and display panel border form the sound cavity so that the sound production, reach the effect of practicing thrift the cost and keeping display substrate intensity.

Description

Display module and preparation method thereof
Technical Field
The present disclosure relates to display technologies, and particularly to a display module and a method for manufacturing the same.
Background
The existing screen sounding technology in the market is basically a screen sounding technology, and a generally adopted scheme is that a vibrator is attached to a middle frame of a mobile phone and then drives the mobile phone screen to vibrate, so that sound is generated. The sound production effect of this technique is relatively poor, and the energy consumption is extravagant obvious. In some schemes, holes are dug in a screen, and then a vibrator is attached above the holes to form a sounding microcavity, but the method is high in cost, and the strength of a display substrate is weakened due to the fact that the holes are dug in the screen substrate, and the yield of the hole digging process is difficult to guarantee.
Disclosure of Invention
The embodiment of the application provides a display module and a preparation method thereof, and aims to solve the technical problems that the manufacturing cost of the existing display module adopting the under-screen technology is high or the strength of a display substrate is low.
The embodiment of the application provides a display module assembly, it includes: the display panel and the sound production structure layer are arranged on the display panel;
the sounding structure layer comprises a first electrode layer, a second electrode layer and an exciter, and the first electrode layer is arranged on the display panel; the second electrode layer is arranged on the first electrode layer; the exciter is arranged on the second electrode layer;
the sound production structure layer is also provided with an opening, and the opening penetrates through the first electrode layer and the second electrode layer; on the periphery side of the opening, the second electrode layer comprises a suspended part, the suspended part protrudes out of the first electrode layer, and the suspended part, the side wall of the first electrode layer and the display panel define a sound-emitting cavity; the sound-emitting cavity is communicated with the opening.
In the display module of the embodiment of the present application, the potential of the first electrode layer is lower than the potential of the second electrode layer.
In the display module of the embodiment of the application, the sound generating structure layer further includes a metal layer, and the metal layer is disposed on the second electrode layer; the opening penetrates through the metal layer.
In the display module according to the embodiment of the application, the metal layer is made of one of molybdenum, molybdenum-titanium alloy and titanium, the first electrode layer is made of molybdenum oxide, and the second electrode layer is made of copper.
In the embodiment of the application, the display module assembly, the sound production structural layer still includes a buffer layer, the buffer layer laminating is on display panel, first electrode layer sets up on the buffer layer.
The application also relates to a preparation method of the display module, which comprises the following steps:
sequentially forming a first electrode layer and a second electrode layer on a display panel, wherein the potential of the first electrode layer is lower than that of the second electrode layer;
forming a photoresist layer on the second electrode layer, and patterning the photoresist layer to form an opening;
etching portions of the first electrode layer and the second electrode layer corresponding to the openings so that the openings penetrate through the first electrode layer and the second electrode layer;
stripping the photoresist layer by adopting stripping liquid, wherein the first electrode layer and the second electrode layer form corrosion current in the stripping liquid so as to suspend part of the second electrode layer in the air, and the suspended part, the side wall of the first electrode layer and the display panel define a sound-emitting cavity; the sound-emitting cavity is communicated with the opening;
an actuator is disposed on the second electrode layer.
In the method for manufacturing a display module according to the embodiment of the present application, before the step of forming the photoresist layer on the second electrode layer, the method includes the steps of:
and forming a metal layer on the second electrode layer.
In the preparation method of the display module, the stripping liquid comprises organic amine and a polar organic solvent.
In the preparation method of the display module, the width of the suspended part is larger than 1 micron.
In the preparation method of the display module, the first electrode layer is made of molybdenum oxide, and the second electrode layer is made of copper.
In the method for manufacturing a display module according to the embodiment of the application, the material of the metal layer is selected from one of molybdenum, molybdenum-titanium alloy and titanium.
The display module and the preparation method thereof utilize the process of stripping the photoresist layer to etch the first electrode layer so as to enable the part of the second electrode overlapped on the first electrode layer to be suspended, and then the suspended part, the side wall of the first electrode and the display panel are defined into the sounding cavity so as to sound, thereby achieving the effects of saving cost and maintaining the strength of the display substrate.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required in the embodiments are briefly described below. The drawings in the following description are only some embodiments of the present application, and it will be obvious to those skilled in the art that other drawings can be obtained from the drawings without inventive effort.
Fig. 1 is a schematic structural diagram of a display module according to an embodiment of the present application;
fig. 2 is another schematic structural diagram of a display module according to an embodiment of the present disclosure;
FIG. 3 is a schematic structural diagram of a display module according to an embodiment of the present disclosure;
FIG. 4 is a flowchart illustrating a method for fabricating a display module according to an embodiment of the present disclosure;
fig. 5 is a schematic structural diagram of step S1 in the method for manufacturing a display module according to the embodiment of the present application;
fig. 6 is a schematic structural diagram of step S2 in the method for manufacturing a display module according to the embodiment of the present application;
fig. 7 is a schematic structural diagram of step S3 in the method for manufacturing a display module according to the embodiment of the present application;
fig. 8 is a schematic structural diagram of step S4 in the method for manufacturing a display module according to the embodiment of the present application;
fig. 9 is a schematic structural diagram of step S5 in the method for manufacturing a display module according to the embodiment of the present application.
Detailed Description
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. It is to be understood that the embodiments described are only a few embodiments of the present application and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
In the description of the present application, it is to be understood that the terms "width," "depth," "upper," "lower," and the like, as used herein, refer to an orientation or positional relationship based on that shown in the drawings, which is for convenience and simplicity of description, and does not indicate or imply that the referenced device or element must have a particular orientation, be constructed in a particular orientation, and be operated, and thus should not be construed as limiting the present application. Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, features defined as "first", "second", may explicitly or implicitly include one or more of the described features. In the description of the present application, "a plurality" means two or more unless specifically limited otherwise.
In the description of the present application, it is to be noted that, unless otherwise explicitly specified or limited, the terms "connected" and "connected" are to be interpreted broadly, e.g., as being fixed or detachable or integrally connected; may be mechanically connected, may be electrically connected or may be in communication with each other; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate.
In this application, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may comprise direct contact of the first and second features, or may comprise contact of the first and second features not directly but through another feature in between. Also, the first feature being "on," "over" and "above" the second feature includes the first feature being directly above and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature.
The present application may repeat reference numerals and/or letters in the various examples, which have been repeated for purposes of simplicity and clarity and do not in themselves dictate a relationship between the various embodiments and/or arrangements discussed. In addition, examples of various specific processes and materials are provided herein, but one of ordinary skill in the art may recognize applications of other processes and/or use of other materials.
Referring to fig. 1, fig. 1 is a schematic structural diagram of a display module according to an embodiment of the present disclosure. The embodiment of the present application provides a display module 100, which includes a display panel 11 and a sound generating structure layer 12. The sound generating structure layer 12 is disposed on the display panel 11.
The sound emitting structure layer 12 includes a first electrode layer 121, a second electrode layer 122, and an actuator 123. The first electrode layer 121 is disposed on the display panel 11. The second electrode layer 122 is disposed on the first electrode layer 121. The actuator 123 is disposed on the second electrode layer 122.
The sound generating structure layer 12 is further provided with an opening 124. The opening 124 penetrates the first electrode layer 121 and the second electrode layer 122. On the peripheral side of the opening 124, the second electrode layer 122 includes a suspended portion 12a, and the suspended portion 12a protrudes out of the first electrode layer 121. The overhang portion 12a, the sidewall of the first electrode layer 121 and the display panel 11 define a sound-emitting cavity M. The sound-emitting chamber M communicates with the opening 124.
In the display module 100 of the present embodiment, the display panel 11 may be a liquid crystal display panel, an organic light emitting diode display panel or a Mini-LED display panel. The sound emitting structure layer 12 may be disposed on the light emitting side of the display panel 11, or may be disposed on the backlight side of the display panel 11. The present embodiment is described by taking the example of disposing the sound emitting structure layer 12 on the backlight side of the display panel 11, but is not limited thereto.
In the preparation process of the sounding structure layer 12, the display module 100 of this embodiment etches the first electrode layer 121 by using the process of stripping the photoresist layer, so that the portion of the second electrode 122 overlapped on the first electrode layer 121 is suspended, and then the suspended portion 12a, the sidewall of the first electrode 121 and the boundary of the display panel 11 form a sounding cavity M for sounding, thereby achieving the effects of saving cost and maintaining the strength of the display substrate.
Of course, the sound generating structure layer 12 may be prepared by other methods. It is sufficient to etch a portion of the first electrode layer 121 so that the second electrode layer 122 forms the overhang portion 12 a.
In the display module 100 according to the embodiment of the present application, the potential of the first electrode layer 121 is lower than the potential of the second electrode layer 122.
The present embodiment utilizes the first electrode layer 121 and the second electrode layer 122 to form an effective etching current in the stripping solution. The second electrode layer 122 is an anode, and the first electrode layer 121 is a cathode, so that during the etching process, a part of the first electrode layer 121 is etched and hollowed, i.e., the second electrode layer 122 is partially suspended.
In addition, since the time in the stripping solution is longer, the depth H at which the first electrode layer 121 is hollowed out is deeper, that is, the width of the overhang portion 12a is larger. Optionally, the depth H is greater than 1 micron, such as 1.5 microns, 2 microns, 2.5 microns, 3 microns, and the like.
Optionally, the material of the first electrode layer 121 is molybdenum or molybdenum oxide (MoO)x) And x > 1, but is not limited thereto. The material of the second electrode layer 122 is copper, but is not limited thereto.
Optionally, the thickness of the first electrode layer 121 is between 2000 a and 10000 a, but not limited thereto. The thickness of the second electrode layer 122 is also between 2000 angstroms and 10000 angstroms, but is not limited thereto.
In this embodiment, the material of the first electrode layer 121 is MoOxFor example, wherein MoOxFunctions to bond the second electrode layer 122 and the display panel 11, reducing the risk that the second electrode layer 122 is easily separated.
In some embodiments, referring to fig. 2, the display module 200 of the embodiment is based on the display module 100 of the embodiment, the sound generating structure layer 12 further includes a buffer layer 125, the buffer layer 125 is disposed on the display panel 11, and the first electrode layer 121 is disposed on the buffer layer 125. The opening 124 may or may not extend through the buffer layer 125.
The buffer layer 125 is used to prevent the etching solution from damaging the display panel 11, and to improve the adhesion stability between the first electrode layer 121 and the display panel 11.
In some embodiments, referring to fig. 3, the display module 300 of the embodiment is based on the display module 100 and the display module 200 of the embodiment, which takes the display module 100 as an example; the sound generating structure layer 12 further includes a metal layer 126, and the metal layer 126 is disposed on the second electrode layer 122. The opening 124 extends through the metal layer 126.
The metal layer 126 is disposed on the second electrode layer 122 to protect the second electrode layer 122 from oxidation. In the manufacturing process of the sound emitting structure layer 12, when the first electrode layer 121 and the second electrode layer 122 form corrosion current in the stripping solution, the second electrode layer 122 is oxidized; the metal layer 126 is formed on the second electrode layer 122, so that the oxidation degree of the second electrode layer 122 can be reduced.
Optionally, the material of the metal layer 126 is selected from one of molybdenum-titanium alloy and titanium, but is not limited thereto.
In addition, in the display module 100 of the embodiment, the exciter 123 is controlled by the chip, the exciter 123 generates mechanical vibrations with different frequencies and amplitudes to drive the second electrode layer 122 to generate mechanical vibrations, and the sound generating cavity M exists between the second electrode layer 122 and the display panel 11, so that the second electrode layer 122 vibrates to generate sound, thereby enabling the display module 100 to generate sound.
Referring to fig. 4, fig. 4 is a flowchart of a method for manufacturing a display module according to an embodiment of the present disclosure. The preparation method of the display module 100 in the embodiment of the application includes the following steps:
step S1: sequentially forming a first electrode layer and a second electrode layer on a display panel, wherein the potential of the first electrode layer is lower than that of the second electrode layer;
step S2: forming a photoresist layer on the second electrode layer, and patterning the photoresist layer to form an opening;
step S3: etching portions of the first electrode layer and the second electrode layer corresponding to the openings so that the openings penetrate through the first electrode layer and the second electrode layer;
step S4: stripping the photoresist layer by adopting stripping liquid, wherein the first electrode layer and the second electrode layer form corrosion current in the stripping liquid so as to suspend part of the second electrode layer, and the suspended part of the second electrode layer, the side wall of the first electrode layer and the display panel define a sound-emitting cavity; the sound-emitting cavity is communicated with the opening;
step S5: an actuator is disposed on the second electrode layer.
The method for manufacturing the display module 100 of the present embodiment is used to manufacture the display module 100 of the above embodiment. According to the preparation method, the first electrode layer 121 is etched in the process of stripping the photoresist layer, so that the part of the second electrode 122 overlapped on the first electrode layer 121 is suspended, and then the suspended part 12a, the side wall of the first electrode 121 and the display panel 11 define the sounding cavity M to sound, so that the effects of saving cost and maintaining the strength of the display substrate are achieved.
The following describes a method for manufacturing the display module 100 of this embodiment.
Referring to fig. 5, step S1: a first electrode layer 121 and a second electrode layer 122 are sequentially formed on the display panel 11. The potential of the first electrode layer 121 is lower than the potential of the second electrode layer 122.
Optionally, the material of the first electrode layer 121 is molybdenum or molybdenum oxide (MoO)x) And x > 1, but is not limited thereto. The material of the second electrode layer 122 is copper, but is not limited thereto.
Optionally, the thickness of the first electrode layer 121 is between 2000 a and 10000 a, but not limited thereto. The thickness of the second electrode layer 122 is also between 2000 angstroms and 10000 angstroms, but is not limited thereto.
In this embodiment, the material of the first electrode layer 121 is MoOxFor example, wherein MoOxFunctions to bond the second electrode layer 122 and the display panel 11, reducing the risk that the second electrode layer 122 is easily separated.
Subsequently, the process proceeds to step S2.
Step S2: a photoresist layer 131 is formed on the second electrode layer 122, and the photoresist layer 131 is patterned to form an opening 124.
Referring to fig. 6, in particular, the photoresist layer 131 is patterned by a photolithography process to form the opening 124. The opening 124 may be a hole-like opening or a channel-like opening. The number of openings 124 is at least one. In the present embodiment, the number of the openings 124 is plural to improve the sound effect.
Subsequently, the process proceeds to step S3.
Referring to fig. 7, step S3: portions of the first electrode layer 121 and the second electrode layer 122 corresponding to the openings 124 are etched so that the openings 124 penetrate the first electrode layer 121 and the second electrode layer 122.
Specifically, the etching solution may be an alkaline etching solution or an acidic etching solution. Such as hydrogen peroxide (H)2O2) Sulfuric acid and persulfuric acid, and the like.
Exposing the second electrode layer 122 through the opening 124 by using the patterned photoresist layer 131 as a mask; and etching the exposed second electrode layer 122 by using an etching solution, wherein after the second electrode layer 122 is etched through, the etching solution continues to etch the exposed first electrode layer 121 until the first electrode layer 121 and the second electrode layer 122 corresponding to the area of the opening 124 are completely etched. That is, the opening 124 penetrates the first electrode layer 121 and the second electrode layer 122.
Subsequently, the process proceeds to step S4.
Referring to fig. 8, step S4: and stripping the photoresist layer 131 by using a stripping solution, wherein the first electrode layer 121 and the second electrode layer 122 form corrosion current in the stripping solution, so that part of the second electrode layer 122 is suspended. The suspending portion 12a of the second electrode layer 122, the sidewall of the first electrode layer 121 and the display panel 11 define a sound-emitting cavity M. The sound-emitting chamber M communicates with the opening 124.
Specifically, the above structure is placed in a stripping solution to strip the photoresist layer 131. The stripping liquid comprises organic amine and a polar organic solvent. Since the first electrode layer 121, the second electrode layer 122 and the photoresist layer 131 are all in the stripping solution. On one hand, the stripping liquid is used for stripping the photoresist layer 131; on the other hand, the first electrode layer 121 and the second electrode layer 122 form an effective etching current in the stripping solution, and since the potential of the second electrode layer 122 is higher than that of the first electrode layer 121, the second electrode layer 122 serves as an anode and the first electrode layer 121 serves as a cathode. The first electrode layer 121 is etched in the stripping solution to make a portion of the second electrode layer 122 dangle. Then, the suspending portion 12a, the sidewall of the first electrode 121 and the display panel 11 define a sound generating chamber M for generating sound, thereby achieving the effects of saving cost and maintaining the strength of the display substrate.
It is understood that, since the time in the stripping liquid is longer, the depth to which the first electrode layer 121 is hollowed out is deeper, that is, the width of the overhang portion 12a is larger. Optionally, the width of the overhang portion 12a is greater than 1 micron, such as 1.5 microns, 2 microns, 2.5 microns, 3 microns, and the like.
Subsequently, the process proceeds to step S5.
Referring to fig. 9, step S5: an actuator 123 is provided on the second electrode layer 122 to form the sound emitting structure layer 12.
Specifically, the actuator 123 is attached to the second electrode layer 122. In addition, in the display module 100 of the embodiment, the exciter 123 is controlled by the chip, the exciter 123 generates mechanical vibrations with different frequencies and amplitudes to drive the second electrode layer 122 to generate mechanical vibrations, and the sound generating cavity M exists between the second electrode layer 122 and the display panel 11, so that the second electrode layer 122 vibrates to generate sound, thereby enabling the display module 100 to generate sound.
Thus, the manufacturing process of the display module 100 of the present embodiment is completed.
In some embodiments, before the step S2 of forming the photoresist layer 131 on the second electrode layer 122, the method includes the steps of: a metal layer 126 is formed on the second electrode layer 122.
That is, the first electrode layer 121, the second electrode layer 122, and the metal layer 126 are sequentially formed on the display panel 11. Then, the steps S3-S5 are performed in sequence.
In step S3 of this embodiment, specifically, the opening 124 exposes the metal layer 126, and then the etching solution etches away the first electrode layer 121, the second electrode layer 122, and the metal layer 126 corresponding to the opening 124.
In step S4 of this embodiment, specifically, when the first electrode layer 121 and the second electrode layer 122 form an etching current in the stripping solution, the second electrode layer 122 is oxidized; the metal layer 126 is formed on the second electrode layer 122, so that the oxidation degree of the second electrode layer 122 can be reduced.
Optionally, the material of the metal layer 126 is selected from one of molybdenum-titanium alloy and titanium, but is not limited thereto.
In step S5 of this embodiment, the actuator 123 is attached to the metal layer 126, as shown in fig. 3.
The display module and the preparation method thereof utilize the process of stripping the photoresist layer to etch the first electrode layer, so that the part of the second electrode overlapped on the first electrode layer is suspended, and the suspended part, the side wall of the first electrode and the display panel define a sounding cavity so as to sound, thereby achieving the effects of saving cost and maintaining the strength of the display substrate.
The display module and the manufacturing method thereof provided by the embodiment of the application are described in detail, a specific example is applied to explain the principle and the implementation manner of the application, and the description of the embodiment is only used for helping to understand the technical scheme and the core idea of the application; those of ordinary skill in the art will understand that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; such modifications or substitutions do not depart from the spirit and scope of the present disclosure as defined by the appended claims.

Claims (10)

1. A display module, comprising: the display panel and the sound production structure layer are arranged on the display panel;
the sounding structure layer comprises a first electrode layer, a second electrode layer and an exciter, and the first electrode layer is arranged on the display panel; the second electrode layer is arranged on the first electrode layer; the exciter is arranged on the second electrode layer;
the sound production structure layer is also provided with an opening, and the opening penetrates through the first electrode layer and the second electrode layer; on the periphery side of the opening, the second electrode layer comprises a suspended part, the suspended part protrudes out of the first electrode layer, and the suspended part, the side wall of the first electrode layer and the display panel define a sound-emitting cavity; the sound-emitting cavity is communicated with the opening.
2. The display module of claim 1, wherein the potential of the first electrode layer is lower than the potential of the second electrode layer.
3. The display module of claim 2, wherein the sound generating structure layer further comprises a metal layer disposed on the second electrode layer; the opening penetrates through the metal layer.
4. The display module according to claim 3, wherein the metal layer is made of one of molybdenum-titanium alloy and titanium, the first electrode layer is made of molybdenum oxide, and the second electrode layer is made of copper.
5. The display module assembly of claim 1, wherein the sound generating structure layer further comprises a buffer layer, the buffer layer is attached to the display panel, and the first electrode layer is disposed on the buffer layer.
6. A preparation method of a display module is characterized by comprising the following steps:
sequentially forming a first electrode layer and a second electrode layer on a display panel, wherein the potential of the first electrode layer is lower than that of the second electrode layer;
forming a photoresist layer on the second electrode layer, and patterning the photoresist layer to form an opening;
etching portions of the first electrode layer and the second electrode layer corresponding to the openings so that the openings penetrate through the first electrode layer and the second electrode layer;
stripping the photoresist layer by adopting stripping liquid, wherein the first electrode layer and the second electrode layer form corrosion current in the stripping liquid so as to suspend part of the second electrode layer in the air, and the suspended part, the side wall of the first electrode layer and the display panel define a sound-emitting cavity; the sound-emitting cavity is communicated with the opening;
an actuator is disposed on the second electrode layer.
7. The method for manufacturing a display module according to claim 6, wherein the step of forming a photoresist layer on the second electrode layer comprises the steps of:
and forming a metal layer on the second electrode layer.
8. The method for manufacturing a display module according to claim 6 or 7, wherein the stripping solution comprises an organic amine and a polar organic solvent.
9. The method for manufacturing a display module according to claim 6 or 7, wherein the width of the overhang portion is greater than 1 μm.
10. The method for manufacturing a display module according to claim 7, wherein the first electrode layer is made of molybdenum oxide, the second electrode layer is made of copper, and the metal layer is made of one of molybdenum-titanium alloy and titanium.
CN202010927157.4A 2020-09-07 2020-09-07 Display module and preparation method thereof Active CN112087541B (en)

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