CN112080797A - Combined type heat-preservation felt disc and heat-preservation felt disc structural member - Google Patents
Combined type heat-preservation felt disc and heat-preservation felt disc structural member Download PDFInfo
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- CN112080797A CN112080797A CN202011109645.0A CN202011109645A CN112080797A CN 112080797 A CN112080797 A CN 112080797A CN 202011109645 A CN202011109645 A CN 202011109645A CN 112080797 A CN112080797 A CN 112080797A
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- felt
- preservation felt
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- heat preservation
- annular
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
- C30B23/002—Controlling or regulating
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/36—Carbides
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
- C30B29/403—AIII-nitrides
Abstract
The invention belongs to the technical field of semiconductor auxiliary tools, in particular to a combined heat-preservation felt disc and a heat-preservation felt disc structural member, which are provided aiming at the defects of inaccurate precision and positioning deviation of the prior heat-preservation felt perforated structure in use, the combined heat-preservation felt disc comprises an annular heat-preservation felt group and a solid heat-preservation felt detachably arranged on the annular heat-preservation felt group, the solid heat-preservation felt is rotatably arranged in a central opening of the annular heat-preservation felt group, and the solid heat-preservation felt and the annular heat-preservation felt group are integrally in a solid disc shape after being assembled; the heat-insulating felt plate structural member is formed by stacking combined heat-insulating felt plates, and the size of the open pore of each combined heat-insulating felt plate layer is adjustable. The invention can quickly adjust the size of the opening of the heat-insulating felt disc according to the requirement, realizes the effects of accurate opening and accurate positioning, and is convenient for adjusting the temperature field structure so as to explore the influence of proper temperature gradient on crystal growth.
Description
The technical field is as follows:
the invention belongs to the technical field of semiconductor auxiliary tools, and particularly relates to a combined heat-insulating felt disc and a heat-insulating felt disc structural member.
Background art:
the third generation semiconductor material is mainly a wide bandgap semiconductor material represented by silicon carbide (SiC), aluminum nitride (AlN), gallium nitride (GaN) and the like, and has very excellent physical and chemical properties compared with the conventional semiconductor material, and is widely applied to the technical fields of high voltage, high frequency and high power. The growth of silicon carbide and aluminum nitride crystals usually adopts a physical vapor deposition method, and the growth quality of the crystals is decisively influenced by regulating and controlling the temperature gradient in a temperature field in the growth process of the crystals. In order to research and adjust the temperature gradient, a heat preservation felt is often used in the crystal growth, and a through hole is formed in the middle of the heat preservation felt according to needs, but the precision of artificial hole forming is inaccurate, the positioning has deviation, and the size of the through hole is difficult to adjust according to needs, which brings many difficulties to the research of a heat preservation structure.
The invention content is as follows:
the invention provides a combined heat-insulating felt disc and a heat-insulating felt disc structural member, aiming at overcoming the defects of inaccurate precision and positioning deviation of the existing heat-insulating felt perforated structure in use.
The technical scheme adopted by the invention is as follows: a modular insulation blanket comprising: annular heat preservation felt group and detachably install the solid heat preservation felt on annular heat preservation felt group, solid heat preservation felt rotates to be installed in the central trompil of annular heat preservation felt group, and solid heat preservation felt and annular heat preservation felt group assembly back wholly are solid discoid.
Preferably, at least two fixed keys are circumferentially fixed on the outer wall of the solid heat insulation felt, an annular key groove is formed in the inner wall of the annular heat insulation felt group, a first positioning groove matched with the fixed keys is formed in the upper surface of the annular heat insulation felt group, the first positioning groove is communicated with the annular key groove, and after the solid heat insulation felt and the annular heat insulation felt group are assembled, the fixed keys can circumferentially rotate in the annular key groove.
Preferably, annular heat preservation felt group is including outer loop heat preservation felt and inner ring heat preservation felt group, outer loop heat preservation felt rotates the cover and establishes the periphery at inner ring heat preservation felt group, and the outer wall circumference of inner ring heat preservation felt group is fixed with two at least navigation keys, has seted up the rotation keyway at the inner wall of outer environmental protection temperature felt, has seted up the constant head tank two with navigation key matched with at the upper surface of outer environmental protection temperature felt, and constant head tank two with rotate the keyway intercommunication, after inner ring heat preservation felt group and outer loop heat preservation felt assembly, the navigation key can be in rotating the keyway internal rotation.
Preferably, the inner ring heat preservation felt group is formed by sleeving at least two single ring heat preservation felts with the same structure, at least two positioning keys are circumferentially fixed on the outer wall of each single ring heat preservation felt, an annular key groove is formed in the inner wall of each single ring heat preservation felt, a first positioning groove is formed in the upper surface of each single ring heat preservation felt and communicated with the annular key groove, and after the adjacent sleeved single ring heat preservation felts are assembled, the positioning keys can circumferentially rotate in the corresponding annular key grooves.
Preferably, an annular groove is formed in the upper surface of the outer environment-friendly warm felt and is located on the periphery of the second positioning groove; the lower surface of the outer ring heat preservation felt is provided with an annular positioning key, and the distance between the annular groove and the annular positioning key and the circle center of the outer ring heat preservation felt is the same.
The heat-insulating felt plate structural member is formed by stacking a plurality of combined heat-insulating felt plates, and the size of the opening of each combined heat-insulating felt plate layer is adjustable.
The invention has the beneficial effects that:
1. the invention can quickly adjust the size of the opening of the heat-insulating felt disc according to the requirement, realizes the effects of accurate opening and accurate positioning, and is convenient for adjusting the temperature field structure so as to explore the influence of proper temperature gradient on crystal growth.
2. The inner ring heat preservation felt group and the outer ring heat preservation felt in the ring heat preservation felt group and the single ring heat preservation felts in the inner ring heat preservation felt group are detachably connected through the keys and the grooves conveniently, and meanwhile, the tightness after connection is guaranteed, so that the heat preservation effect is achieved.
Description of the drawings:
FIG. 1 is a schematic, broken away view of the present invention;
FIG. 2 is a top view of FIG. 1;
FIG. 3 is a cross-sectional view taken along line A-A of FIG. 2;
FIG. 4 is a schematic structural diagram of an outer ring insulation blanket;
FIG. 5 is a schematic structural view of an inner ring heat-insulating felt group;
FIG. 6 is a top view of the present invention in combination;
FIG. 7 is a bottom view of the present invention in combination;
FIG. 8 is a graph showing the crystal growth effect of the heat-insulating felt structure at the same temperature;
wherein: 1 annular heat preservation felt group, 11 outer ring heat preservation felts, 111 rotating key slots, 112 positioning slots II, 113 annular grooves, 114 annular positioning keys, 12 inner ring heat preservation felt groups, 121 single ring heat preservation felts, 122 positioning keys, 123 annular key slots, 124 positioning slots I, 2 solid heat preservation felts, 21 fixed keys, 3 crucibles, 4 combined heat preservation felt trays, 5 heat preservation felt tray structural parts and 6 heat preservation felts.
The specific implementation mode is as follows:
example 1
As shown in fig. 1 to 3, the present invention is a combined heat-insulating felt, comprising: annular heat preservation felt group 1 and solid heat preservation felt 2, solid heat preservation felt 2 installs the central trompil department at annular heat preservation felt group 1 as required detachably, and after solid heat preservation felt 2 and annular heat preservation felt group 1 assembled, the heat preservation felt dish is whole to be solid discoid.
At least two fixed keys 21 are fixed on the outer wall circumference of the solid heat preservation felt 2, the fixed keys 21 are in the shapes of cuboids, cylinders and the like, and are used for connecting the solid heat preservation felt 2 with the annular heat preservation felt group 1, and the embodiment takes the four symmetrically arranged fixed keys 21 as an example for introduction.
The inner wall of the annular heat-preservation felt group 1 is provided with an annular key groove 123, the upper surface of the annular heat-preservation felt group 1 is provided with a first positioning groove 124, the number, the position and the shape of the first positioning grooves 124 are matched with those of the fixed keys 21, the first positioning grooves 124 are communicated with the annular key groove 123, after the solid heat-preservation felt 2 is assembled with the annular heat-preservation felt group 1, the fixed keys 21 penetrate the first positioning grooves 124 to enter the annular key groove 123, the fixed keys 21 can rotate circumferentially in the annular key groove 123, the periphery of the solid heat-preservation felt 2 is in contact with the inner ring side wall of the annular heat-preservation felt group 1 at the moment, and the solid heat-preservation felt 2 and the annular heat-preservation felt.
Example 2
On the basis of the embodiment 1, the difference between the embodiment 2 and the embodiment 1 is that the annular heat-insulating felt group 1 comprises an outer annular heat-insulating felt 11 and an inner annular heat-insulating felt group 12, and the outer annular heat-insulating felt 11 is rotatably sleeved on the outer periphery of the inner annular heat-insulating felt group 12.
At least two positioning keys 122 are circumferentially fixed on the outer wall of the inner environment-friendly warm felt group 12, and the embodiment takes four symmetrically arranged positioning keys 122 as an example for description.
As shown in fig. 4, the outer ring thermal insulation felt 11 is annular, a rotating key groove 111 is formed in the inner wall of the outer ring thermal insulation felt 11, a second positioning groove 112 used for being matched with the positioning key 122 is formed in the upper surface of the outer ring thermal insulation felt 11, the number, the position and the shape of the second positioning groove 112 are all matched with the positioning key 122, and the second positioning groove 112 is communicated with the rotating key groove 111. An annular groove 113 is formed in the upper surface of the outer ring heat preservation felt 11, and the annular groove 113 is located on the periphery of the second positioning groove 112. After the inner ring heat insulation felt group 12 and the outer ring heat insulation felt group 11 are assembled, the positioning key 122 penetrates through the second positioning groove 112 to enter the rotating key groove 111, and the positioning key 122 can circumferentially rotate in the rotating key groove 111, at the moment, the outer wall of the inner ring heat insulation felt group 12 is in contact with the inner ring side wall of the outer ring heat insulation felt group 11, so that the outer ring heat insulation felt group 11 and the inner ring heat insulation felt group 12 are tightly nested.
In order to realize accurate positioning among the heat insulation felt disks when a plurality of sets of heat insulation felt disks are stacked, an annular positioning key 114 is arranged on the lower surface of the outer ring heat insulation felt 11, and the positions of the annular groove 113 and the annular positioning key 114, which are away from the center of the outer ring heat insulation felt 11, are the same.
Example 3
On the basis of the embodiment 2, the difference between the embodiment 3 and the embodiment 2 is that the inner ring heat insulation felt group 12 is formed by sleeving at least two single ring heat insulation felts 121 with the same structure, and the embodiment takes three single ring heat insulation felts 121 as an example for description.
As shown in fig. 5, four positioning keys 122 are circumferentially and symmetrically fixed on the outer wall of the single-ring insulation blanket 121, an annular key groove 123 is formed in the inner wall of the single-ring insulation blanket 121, a first positioning groove 124 for matching with the positioning key 122 is formed in the upper surface of the single-ring insulation blanket 121, each first positioning groove 124 is communicated with the annular key groove 123, when the adjacent single-ring insulation blankets 121 are assembled, the positioning key 122 penetrates through the first positioning groove 124 and enters the annular key groove 123, and the positioning key 122 can circumferentially rotate in the annular key groove 123, at this time, the outer wall of the single-ring insulation blanket 121 located on the inner side contacts with the inner ring side wall of the single-ring insulation blanket 121 sleeved on the outer side, so that the two adjacent single-ring insulation blankets 121 are.
Example 4
Embodiment 4 is an insulation felt structure, which is formed by stacking a plurality of combined insulation felt layers 4 according to embodiments 1 to 3, and the size of the openings of each combined insulation felt layer 4 can be adjusted according to the requirement of the temperature field.
The use process comprises the following steps:
when in use, firstly, the open pore structure of each layer of combined heat-insulating felt tray 4 is adjusted according to the requirement;
secondly, wrapping the outer wall of the crucible 3 by using a heat preservation felt 6;
thirdly, the adjusted combined type heat-insulating felt plate 4 is matched and positioned with the annular positioning key 114 layer by layer through the annular groove 113 and is placed on the top of the crucible 3 in a stacking mode to form a heat-insulating felt plate structural member 5, and the open pore structure of the heat-insulating felt plate structural member 5 meets the requirements of a temperature field experiment;
finally, the heat-preservation felt disk structural member 5 and the whole outer side of the crucible 3 wrapped with the heat-preservation felt 6 are wrapped again by the heat-preservation felt 6.
As shown in fig. 8, in the temperature field experiment, at the same temperature, when the insulation felt disc structure 5 adopts five different open pore structures of g, h, i, j and k, the crystal growth effect is obviously different.
The above description is only a preferred embodiment of the present invention, and these embodiments are based on different implementations of the present invention, and the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are included in the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (6)
1. A combined heat-insulating felt tray, comprising: solid heat preservation felt (2) on annular heat preservation felt group (1) are installed to annular heat preservation felt group (1) and detachably, solid heat preservation felt (2) rotate to be installed in the central trompil of annular heat preservation felt group (1), and solid heat preservation felt (2) are solid discoid with the whole solid discoid that is of annular heat preservation felt group (1) assembly back.
2. The combination insulation blanket set of claim 1 wherein: the solid heat-preservation felt (2) is fixed with two at least fixed keys (21) in outer wall circumference, has seted up annular keyway (123) at the inner wall of annular heat-preservation felt group (1), has seted up at the upper surface of annular heat-preservation felt group (1) with fixed key (21) matched with constant head tank (124), constant head tank (124) and annular keyway (123) intercommunication, after solid heat-preservation felt (2) and annular heat-preservation felt group (1) assembly, fixed key (21) can be at the interior circumferential direction of annular keyway (123) and rotate.
3. A modular insulation blanket as claimed in claim 1 or claim 2 wherein: annular heat preservation felt group (1) is including outer loop heat preservation felt (11) and inner ring heat preservation felt group (12), outer loop heat preservation felt (11) rotate the cover and establish the periphery at inner ring heat preservation felt group (12), including the outer wall circumference of environment protection heat preservation felt group (12) be fixed with two at least navigation keys (122), rotation keyway (111) have been seted up to the inner wall of environment protection heat preservation felt (11) outside, outside the upper surface of environment protection heat preservation felt (11) seted up with navigation key (122) matched with constant head tank two (112), and constant head tank two (112) and rotation keyway (111) intercommunication, after inner ring heat preservation felt group (12) and outer loop heat preservation felt (11) assemble, navigation key (122) can be in rotation keyway (111).
4. A modular insulation blanket as claimed in claim 3 wherein: inner ring heat preservation felt group (12) are the same by two at least structures, and the different monocycle heat preservation felt (121) cover of size establishes and forms, the outer wall circumference of monocycle heat preservation felt (121) is fixed with two at least positioning key (122), has seted up annular keyway (123) at the inner wall of monocycle heat preservation felt (121), has seted up constant head tank one (124) at the upper surface of monocycle heat preservation felt (121), and every constant head tank one (124) and annular keyway (123) intercommunication, after monocycle heat preservation felt (121) the assembly of adjacent cover establishing, positioning key (122) can be in the annular keyway (123) internal circumferential rotation that corresponds.
5. A modular insulation blanket as claimed in claim 3 wherein: an annular groove (113) is formed in the upper surface of the outer ring heat insulation felt (11), and the annular groove (113) is located on the periphery of the second positioning groove (112); an annular positioning key (114) is arranged on the lower surface of the outer ring heat preservation felt (11), and the distance between the annular groove (113) and the annular positioning key (114) and the center of the outer ring heat preservation felt (11) is the same.
6. An insulation felt structure, characterized in that a plurality of combined insulation felt layers (4) according to any one of claims 1 to 5 are stacked, and the size of the opening of each combined insulation felt layer (4) is adjustable.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011109645.0A CN112080797A (en) | 2020-10-16 | 2020-10-16 | Combined type heat-preservation felt disc and heat-preservation felt disc structural member |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011109645.0A CN112080797A (en) | 2020-10-16 | 2020-10-16 | Combined type heat-preservation felt disc and heat-preservation felt disc structural member |
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| Publication Number | Publication Date |
|---|---|
| CN112080797A true CN112080797A (en) | 2020-12-15 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011109645.0A Pending CN112080797A (en) | 2020-10-16 | 2020-10-16 | Combined type heat-preservation felt disc and heat-preservation felt disc structural member |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101775642A (en) * | 2010-03-04 | 2010-07-14 | 北京中联阳光科技有限公司 | Combined resistance heater and energy-saving heat field design for polycrystalline silicon ingot or purifying furnace |
| CN204417641U (en) * | 2014-12-11 | 2015-06-24 | 河北同光晶体有限公司 | The water cooling plant of controllable SiC crystal growth gradient and crystal growing furnace |
| CN206244915U (en) * | 2016-12-09 | 2017-06-13 | 河北同光晶体有限公司 | A kind of silicon carbide monocrystal growth device with thermograde corrective action |
| CN108422368A (en) * | 2018-03-15 | 2018-08-21 | 汽-大众汽车有限公司 | A kind of telescopic bolt adjustment tool |
| CN109280977A (en) * | 2018-11-02 | 2019-01-29 | 山东天岳先进材料科技有限公司 | The method of comprehensive utilization of the long brilliant surplus material of silicon carbide |
-
2020
- 2020-10-16 CN CN202011109645.0A patent/CN112080797A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101775642A (en) * | 2010-03-04 | 2010-07-14 | 北京中联阳光科技有限公司 | Combined resistance heater and energy-saving heat field design for polycrystalline silicon ingot or purifying furnace |
| CN204417641U (en) * | 2014-12-11 | 2015-06-24 | 河北同光晶体有限公司 | The water cooling plant of controllable SiC crystal growth gradient and crystal growing furnace |
| CN206244915U (en) * | 2016-12-09 | 2017-06-13 | 河北同光晶体有限公司 | A kind of silicon carbide monocrystal growth device with thermograde corrective action |
| CN108422368A (en) * | 2018-03-15 | 2018-08-21 | 汽-大众汽车有限公司 | A kind of telescopic bolt adjustment tool |
| CN109280977A (en) * | 2018-11-02 | 2019-01-29 | 山东天岳先进材料科技有限公司 | The method of comprehensive utilization of the long brilliant surplus material of silicon carbide |
Non-Patent Citations (1)
| Title |
|---|
| 金雷: "物理气相传输法生长氮化铝晶体的机制研究", 《中国优秀博硕士论文全文数据库（博士） 工程科技Ⅰ辑》 * |
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Application publication date: 20201215 |