CN112058326A - Device for assisting femtosecond laser micro-nano manufacturing to realize long-distance high-speed liquid drop transportation - Google Patents

Device for assisting femtosecond laser micro-nano manufacturing to realize long-distance high-speed liquid drop transportation Download PDF

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CN112058326A
CN112058326A CN202010919427.7A CN202010919427A CN112058326A CN 112058326 A CN112058326 A CN 112058326A CN 202010919427 A CN202010919427 A CN 202010919427A CN 112058326 A CN112058326 A CN 112058326A
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micro
liquid drop
feeding
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gradient
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CN112058326B (en
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王文君
陈玉虎
梅雪松
崔健磊
孙小云
胡磊
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Xian Jiaotong University
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/50273Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the means or forces applied to move the fluids
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502707Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/352Working by laser beam, e.g. welding, cutting or boring for surface treatment
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00Moving or stopping fluids
    • B01L2400/04Moving fluids with specific forces or mechanical means
    • B01L2400/0403Moving fluids with specific forces or mechanical means specific forces

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Abstract

A device for assisting femtosecond laser micro-nano manufacturing to realize long-distance high-speed liquid drop transportation comprises a horizontal object stage, wherein the bottom of the horizontal object stage is connected with a shockproof base, an electric printing feeding side plate is connected to the upper surface of the horizontal object stage, a rib plate is connected between the electric printing feeding side plate and the horizontal object stage, and the electric printing feeding side plate is provided with trapezoidal slideways arranged at equal intervals and a high-precision scale plate close to one side; a micro sample injector carrying platform is arranged on the trapezoidal slide way; a microsyringe is fixed on the microsyringe carrying platform; a rotatable flexible hydraulic clamp fixed on the horizontal objective table is arranged right below the microsyringe; the method can effectively assist the femtosecond laser micro-nano processing technology to regulate and control the wettability of the surface of the material, prepare a stable and reconfigurable double-gradient wettability surface with high efficiency and high quality, and can realize long-distance high-speed liquid drop transportation.

Description

Device for assisting femtosecond laser micro-nano manufacturing to realize long-distance high-speed liquid drop transportation
Technical Field
The invention relates to the technical field of material surface wettability regulation, in particular to a device for assisting femtosecond laser micro-nano manufacturing to realize long-distance high-speed liquid drop transportation.
Background
With the research on super-hydrophobic and other extreme-wettability surfaces, various extreme-wettability surfaces are applied to droplet control, such as lossless droplet transfer, droplet transportation and the like, wherein the droplet transportation generally realizes spontaneous and directional movement of droplets under the action of a gradient wettability surface without assistance of external force, and has great application value in the fields of cell engineering, microbial corrosion prevention, micro-fluidic, condensation heat exchange and the like.
Generally, the self-driven gradient wettability surface is mainly realized by a method for constructing a surface chemical composition gradient or a surface microstructure gradient, such as chemical modification of different concentration gradients, construction of a gradient microstructure based on femtosecond laser micro-nano manufacturing, and the like. On one hand, the traditional methods have the defects and shortcomings of complex process, low efficiency, poor durability and stability, low cyclic utilization rate and the like, on the other hand, the surface infiltration gradient realized by the regulation and control of the shape or chemical composition is realized by breaking an asymmetric contact line and overcoming the resistance of liquid drop movement along a specific direction, and although the surface infiltration gradient has the advantages of controllable liquid drop transportation distance and liquid drop transportation speed to a certain extent, the surface infiltration gradient is limited to long-distance low-speed liquid drop transportation or short-distance high-speed liquid drop transportation, namely, the high-speed liquid drop transportation needs a larger infiltration gradient, which in turn limits the liquid drop transportation distance, and correspondingly, a long transportation distance needs a small infiltration gradient, so that the transportation speed is limited, and the long-distance transportation and the high-speed transportation become a pair of spears; in addition, the gradient wettability surface realized based on micro-morphology or chemical composition regulation cannot be simply reconstructed on a liquid drop transportation path, so that the application prospect and the application range of the gradient wettability surface are limited to a certain extent, and the process of the gradient wettability surface turning to practical application is limited.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention aims to provide a device for assisting femtosecond laser micro-nano manufacturing to realize long-distance high-speed liquid drop transportation, which can effectively assist the femtosecond laser micro-nano processing technology to regulate and control the wettability of the surface of a material, prepare a stable and reconfigurable gradient wettability surface with high efficiency and high quality, and realize long-distance high-speed liquid drop transportation.
In order to achieve the purpose, the invention adopts the technical scheme that:
a device for assisting femtosecond laser micro-nano manufacturing to realize long-distance high-speed liquid drop transportation comprises a horizontal object stage 2, wherein the bottom of the horizontal object stage 2 is connected with a shockproof base 1, an electric printing feeding side plate 4 is connected to the upper surface of the horizontal object stage 2, a rib plate 3 is connected between the electric printing feeding side plate 4 and the horizontal object stage 2, and the electric printing feeding side plate 4 is provided with trapezoidal slideways 6 which are arranged at equal intervals and a high-precision scale plate 8 which is close to one side; a microsyringe carrying platform 9 is arranged on the trapezoidal slideway 6; a microsyringe 7 is fixed on the microsyringe mounting platform 9; directly below the microsyringe 7 is a rotatable flexible hydraulic clamp 5 fixed to the horizontal stage 2.
The shaft body direction of the rotatable flexible hydraulic clamp 5 is parallel to the electric printing feeding side plate 4, the rotatable flexible hydraulic clamp is integrally carried on a clamp base 10, horizontal feeding guide rails 11 are symmetrically distributed on the clamp base 10 along the central plane of the clamp base 10, and a horizontal feeding platform 12 is arranged on the horizontal feeding guide rails 11; the right end of the horizontal feeding platform 12 is connected with the output end of the micro differential 21, and the output end of the micro differential 21 is connected with one end of a horizontal feeding connecting rod 22; the other end of the horizontal feeding connecting rod 22 is connected with an adjustable trace horizontal feeding device 23;
the horizontal feeding platform 12 is connected with a clamp extending table 13, the clamp extending table 13 is in a bilateral symmetry structure, and the left side surface and the right side surface of the clamp extending table 13 are connected with an adjustable micro-feeding device fixing frame 14; the outer side of the adjustable micro-feeding device fixing frame 14 is connected with an adjustable micro-feeding device 15, and the inner side is fixed with a locking device 16; the other end of the locking device 16 is connected with a hydraulic feeding device 18; an output shaft of the hydraulic feeding device 18 is connected with the flexible clamp head 17;
an adjustable micro-feeding device inner knob 19 and an adjustable micro-feeding device outer knob 20 are arranged at two ends of the adjustable micro-feeding device 15, the adjustable micro-feeding device inner knob 19 drives the hydraulic feeding device 18 to enable the flexible clamp head 17 to clamp a sample, and the adjustable micro-feeding device outer knob 20 is used for adjusting different angle directions of the flexible clamp head 17.
The shockproof base 1 is made of industrial high-grade rubber materials.
The rib plate 3 is symmetrically arranged by taking the central plane of the horizontal objective table 2 as a central axis, and meanwhile, a fillet with the radius of 10mm is arranged at the junction of the rib plate 3 and the electric printing feeding side plate 4.
The microsyringe 7 is a liquid-phase microsyringe device with the measuring range of 100 mu L, and the shaft body direction of the microsyringe is parallel to the trapezoidal slideway 6.
The high-precision scale plate 8 is a measuring tool with the measuring range of 200mm and the precision of micron level, the reading of the high-precision scale plate directly corresponds to the numerical values of liquid drops with different heights, and the high-precision scale plate can be converted into corresponding Weber numbers.
The micro differential 21 is a micro high-precision transmission and is used for regulating and controlling the feeding speed of the horizontal feeding platform 12.
The adjustable micro-feeding device 15, the locking device 16, the flexible clamp head 17 and the hydraulic feeding device 18 are symmetrically arranged on the left side surface and the right side surface of the clamp extending table 13 by taking the central plane of the clamp extending table as a central axis.
The rotatable flexible hydraulic clamp 5 can rotate within the range of-90 degrees to 90 degrees and move in the direction vertical to the trapezoidal slide 6.
The liquid drop transportation process of the device for assisting femtosecond laser micro-nano manufacturing to realize long-distance high-speed liquid drop transportation comprises the following steps:
i) preparing a gradient periodic microstructure on a sample substrate by femtosecond laser in an arc scanning mode of changing scanning intervals;
II) chemical vapor deposition of SiO on gradient periodic microstructures2Preparing a first heavy gradient wettability surface by using the nano particles and a low surface energy substance PFOTS;
III) preparing a second heavy 'gradient' surface, namely a charge density gradient surface, on the first heavy gradient wettability surface by a device for assisting femtosecond laser micro-nano manufacturing to realize long-distance high-speed liquid drop transportation, thereby obtaining a double-gradient wettability surface monomer;
VI) preparing a long-distance high-speed liquid drop transportation surface on a large-area sample substrate by regulating and controlling the array spacing of double-gradient wettability surface monomers and repeating the steps I) -III), wherein the liquid drops meet the requirement of high-speed transportation on the double-gradient wettability surface under the dual action of wettability gradient and charge density gradient, and the long-distance transportation is realized by the alternative array arrangement of the double-gradient wettability surface and an untreated area, so that the requirement of long-distance high-speed liquid drop transportation is finally realized.
Compared with the prior art, the invention has the beneficial effects that:
the device can prepare a 'double-gradient' surface, wherein the first heavy-gradient wettability surface is a wettability gradient directly endowed by a femtosecond laser micro-nano manufacturing method adopting an arc scanning mode for changing scanning intervals and combining with a process of low surface energy chemical modification; the second gradient surface is given by the charge density gradient realized based on the device of the invention, the charge density gradient surface is formed by impacting the sample substrate with water drops with different Weber numbers, on one hand, the charge density gradient surface formed by the sample substrate on the first gradient wettability surface is obtained by impacting the water drops with different Weber numbers, thereby improving the self-driving speed in the process of transporting the liquid drops, on the other hand, the accurate regulation and control of the charge density gradient can be realized because the charge quantity formed by the electric printing technology is in positive correlation with the Weber numbers, thereby realizing the accurate regulation and control of the self-driving speed of the liquid drops.
Because the charge density gradient surface only forms a charge density area above the diagonal line in a certain thickness area and still presents electric neutrality below the charge density gradient surface, the charge density gradient surface can be subjected to contact aging treatment by using materials such as metal with high conductivity and the like, so that the reconstruction of the charge density gradient surface is realized, and the reconstruction of different transport paths, transport speeds and transport distances can be realized.
The realization of long-distance specific-path high-speed droplet transport can be accomplished by repeatedly preparing periodic arrays with dual-gradient features at appropriate pitches on large-area substrates. The invention simultaneously realizes long-distance and high-speed transportation of liquid drops and has the advantages of path selectivity and reconfigurability.
Drawings
Fig. 1 is a side view of the present invention.
Fig. 2 is a three-dimensional schematic of the present invention.
FIG. 3 is a three-dimensional schematic view of a rotatable flexible hydraulic clamp of the present invention.
FIG. 4 is a schematic view of a long-range high-speed droplet transport process using the apparatus of the present invention.
Detailed Description
The technical solution of the present invention will be described in detail below with reference to the accompanying drawings.
As shown in fig. 1 and 2, a device for assisting femtosecond laser micro-nano manufacturing to realize long-distance high-speed droplet transportation comprises a horizontal objective table 2, wherein 4 shockproof bases 1 are uniformly distributed at the bottom of the horizontal objective table 2 in a threaded connection mode, and the shockproof bases 1 are made of industrial high-grade rubber materials, so that experimental errors caused by vibration can be effectively reduced or even prevented; an electric printing feeding side plate 4 is connected to the upper surface of the horizontal objective table 2 in a welding mode, a rib plate 3 is connected between the electric printing feeding side plate 4 and the horizontal objective table 2, the rib plate 3 is symmetrically arranged by taking the central surface of the horizontal objective table 2 as a central axis, and meanwhile, a fillet with the radius of 10mm is arranged at the junction of the rib plate 3 and the electric printing feeding side plate 4, so that the generation of stress concentration is reduced and even prevented, and the structural strength and the stability are improved; the electro-printing feeding side plate 4 is provided with trapezoidal slideways 6 which are arranged at equal intervals and a high-precision scale plate 8 which is prepared by laser etching at the position close to the left side; a microsyringe carrying platform 9 is arranged on the trapezoidal slideway 6 in an embedded mode; the microsyringe carrying platform 9 is fixed with the microsyringe 7 in a magnetic adsorption mode; the microsyringe 7 is a liquid-phase microsyringe device with the measuring range of 100 mu L, and the shaft body direction of the microsyringe is parallel to the trapezoidal slideway 6; the high-precision scale plate 8 is a measuring tool with the measuring range of 200mm and the precision of micron level, the reading of the high-precision scale plate directly corresponds to the numerical value of liquid drops with different heights and can be converted into corresponding Weber numbers; a rotatable flexible hydraulic clamp 5 fixed on the horizontal stage 2 through bolt connection is arranged right below the microsyringe 7.
As shown in fig. 3, the shaft direction of the rotatable flexible hydraulic clamp 5 is parallel to the electric printing feeding side plate 4, the whole clamp is carried on a clamp base 10, and horizontal feeding guide rails 11 are symmetrically distributed on the clamp base 10 along the central plane of the clamp base 10; a horizontal feeding platform 12 is arranged on the horizontal feeding guide rail 11 in an embedded mode; the right end face of the horizontal feeding platform 12 is connected with the output end of the micro differential 21 through threads; the micro differential 21 is a micro high-precision transmission and can regulate and control the feeding speed of the horizontal feeding platform 12, and the output end of the micro differential 21 is connected with one end of a horizontal feeding connecting rod 22 through a universal shaft; the other end of the horizontal feeding connecting rod 22 is connected with an adjustable trace horizontal feeding device 23 through threads; the horizontal feeding platform 12 is connected with a clamp extending platform 13 through bolts; the clamp extending table 13 is in a bilateral symmetry structure, and the left side surface and the right side surface of the clamp extending table are connected with an adjustable micro-feeding device fixing frame 14 through threads; the outer side of the adjustable micro-feeding device fixing frame 14 is connected with an adjustable micro-feeding device 15 through threads, and the inner side of the adjustable micro-feeding device fixing frame is also fixed with a locking device 16 in a threaded connection mode; the other end of the locking device 16 is connected with a hydraulic feeding device 18; an output shaft of the hydraulic feeding device 18 is connected with the flexible clamp head 17 in a threaded connection mode; the adjustable micro-feeding device 15, the locking device 16, the flexible clamp head 17 and the hydraulic feeding device 18 are symmetrically arranged on the left side surface and the right side surface of the clamp extending table 13 by taking the central surface of the clamp extending table as a central axis; an adjustable micro-feeding device inner knob 19 and an adjustable micro-feeding device outer knob 20 are arranged at two ends of the adjustable micro-feeding device 15, the adjustable micro-feeding device inner knob 19 drives the hydraulic feeding device 18 to enable the flexible clamp head 17 to clamp a sample, and the adjustable micro-feeding device outer knob 20 is used for adjusting different angle directions of the flexible clamp head 17.
As shown in fig. 4, the droplet transportation process using a device for assisting femtosecond laser micro-nano manufacturing to realize long-distance high-speed droplet transportation includes the following steps:
i) preparing a gradient periodic microstructure on a sample substrate (such as silicon and the like) by femtosecond laser in an arc scanning mode of changing scanning intervals;
II) chemical vapor deposition of SiO on gradient periodic microstructures2Preparing a first heavy gradient wettability surface by using the nano particles and a low surface energy substance PFOTS;
III) preparing a second heavy 'gradient' surface, namely a charge density gradient surface, on the first heavy gradient wettability surface by a device for assisting femtosecond laser micro-nano manufacturing to realize long-distance high-speed liquid drop transportation, thereby obtaining a double-gradient wettability surface monomer;
VI) preparing a long-distance high-speed liquid drop transportation surface on a large-area sample substrate by regulating and controlling the array spacing of double-gradient wettability surface monomers and repeating the steps I) -III), wherein the liquid drops meet the requirement of high-speed transportation on the double-gradient wettability surface under the dual action of wettability gradient and charge density gradient, and the long-distance transportation is realized by the alternative array arrangement of the double-gradient wettability surface and an untreated area, so that the requirement of long-distance high-speed liquid drop transportation is finally realized.
The working principle of the device is as follows:
firstly, femtosecond laser is utilized to combine SiO in an arc scanning mode with different scanning intervals2Carrying out chemical modification on the nanoparticles and the PFOTS low surface energy to enable a sample substrate to obtain a surface with first heavy gradient wettability, and simultaneously carrying out ultrasonic bath and nitrogen drying for 10min by using acetone, absolute ethyl alcohol and deionized water respectively to clean impurities on the surface of the sample; then, the cleaned sample substrate with the first heavy gradient wettability surface is placed on a flexible clamp head 17 fixed on a horizontal objective table 2, an adjustable micro-feeding device inner knob 19 on two sides of a clamp extension table 13 is adjusted to drive a hydraulic feeding device 18, so that the hydraulic feeding device 18 drives the clamp head 17 to slowly draw close to the middle until the sample substrate is clamped, and at the moment, a level meter is utilized to test whether the sample substrate is in the same plane or not, and fine adjustment is carried out to ensure the uniformity in the subsequent processing preparation process; a small amount is fed intoInjecting sufficient deionized water into the sample injector 7, adsorbing and fixing the deionized water on a micro sample injector carrying platform 9, and adjusting the shaft direction of the micro sample injector 7 to be parallel to the trapezoidal slide way 6 so as to ensure accurate electric printing in the dropping process of liquid drops, thereby completing the pretreatment work of preparing the charge density gradient surface by electric printing;
then, the adjustable micro-level feeding device 23 is adjusted to make the level feeding connecting rod 22 complete the telescopic action, the micro differential 21 with preset differential ratio is driven by the level feeding connecting rod 22 to perform micro feeding in the horizontal direction, so as to drive the level feeding platform 12 to perform micro feeding adjustment in the horizontal direction until the position of the sample substrate to be processed and the axis of the micro sample injector 7 are in the same straight line, at this time, the micro sample injector loading platform 9 is adjusted to the Weber number position of the experimental plan (in the invention, the positions with different Weber numbers correspond to different height values, and the values are gradually increased from 10mm to 200mm according to the required increment), and the adjustable micro feeding device outer knob 20 is adjusted to make the flexible clamp head 17 rotate to the required angular orientation (generally, the default in the experiment is from 0 degree, and the increment is gradually increased from 8 degrees to 10 degrees/time), after the above-mentioned action is completed, the push rod of the microsyringe 7 is slowly pushed, so that the liquid drop is released in a volume of 8-10 μ L until the liquid drop completely hits the sample substrate positioned on the flexible clamp head 17, and a charge writing action is completed so far.
Next, the charge writing process at different positions on the sample substrate is completed by adjusting the adjustable micro-level feeding device 23 and the micro-sample injector carrying platform 9 according to the increment principle until all process parameters preset in the experiment are completed, and the preparation of the second "gradient" surface, i.e., the charge density gradient surface, based on the electric printing device is completed, i.e., the preparation of the monomer with the double-gradient wettability surface is completed.
And finally, applying the operation flow to a large-area substrate, and preparing an array periodic structure with double-gradient wettability surface monomers and untreated areas alternated by setting a proper interval to meet the requirement of long-distance high-speed liquid drop transportation.
The invention effectively solves the problem of contradiction between long distance and high speed in liquid drop transportation by utilizing the gradient wettability surface, can flexibly and conveniently carry out contact aging treatment on the substrate with the double-gradient wettability surface by using materials such as metal with larger conductivity while realizing long-distance high-speed transportation of liquid drops, and realizes reconstruction of a liquid drop transportation path, a liquid drop transportation distance and a liquid drop transportation speed; in addition, the gradient wettability surface prepared by the method is greatly improved in the aspects of durability, mechanical comprehensive mechanical resistance, stability and the like.

Claims (10)

1. The utility model provides an assist femto second laser and receive manufacturing a device that realizes long-range high-speed liquid drop transportation a little which characterized in that: the device comprises a horizontal objective table (2), wherein the bottom of the horizontal objective table (2) is connected with a shockproof base (1), the upper surface of the horizontal objective table (2) is connected with an electric printing feeding side plate (4), a rib plate (3) is connected between the electric printing feeding side plate (4) and the horizontal objective table (2), and the electric printing feeding side plate (4) is provided with trapezoidal slideways (6) which are arranged at equal intervals and a high-precision scale plate (8) close to one side; a microsyringe carrying platform (9) is arranged on the trapezoidal slideway (6); a microsyringe (7) is fixed on the microsyringe carrying platform (9); a rotatable flexible hydraulic clamp (5) fixed on the horizontal object stage (2) is arranged right below the micro sample injector (7).
2. The device for assisting femtosecond laser micro-nano manufacturing to realize long-distance high-speed liquid drop transportation according to claim 1, is characterized in that: the shaft body direction of the rotatable flexible hydraulic clamp (5) is parallel to the electric printing feeding side plate (4), the rotatable flexible hydraulic clamp is integrally carried on a clamp base (10), horizontal feeding guide rails (11) are symmetrically distributed on the clamp base (10) along the central plane of the clamp base (10), and a horizontal feeding platform (12) is arranged on the horizontal feeding guide rails (11); the right end of the horizontal feeding platform (12) is connected with the output end of the micro differential (21), and the output end of the micro differential (21) is connected with one end of a horizontal feeding connecting rod (22); the other end of the horizontal feeding connecting rod (22) is connected with an adjustable trace horizontal feeding device (23);
the horizontal feeding platform (12) is connected with a clamp extending table (13), the clamp extending table (13) is in a bilateral symmetry structure, and the left side surface and the right side surface of the clamp extending table are connected with an adjustable micro-feeding device fixing frame (14); the outer side of the adjustable micro-feeding device fixing frame (14) is connected with an adjustable micro-feeding device (15), and the inner side is fixed with a locking device (16); the other end of the locking device (16) is connected with a hydraulic feeding device (18); an output shaft of the hydraulic feeding device (18) is connected with the flexible clamp head (17);
an adjustable micro-feeding device inner knob (19) and an adjustable micro-feeding device outer knob (20) are arranged at two ends of the adjustable micro-feeding device (15), the adjustable micro-feeding device inner knob (19) drives the hydraulic feeding device (18) to enable the flexible clamp head (17) to achieve the action of clamping a sample, and the adjustable micro-feeding device outer knob (20) is used for adjusting different angle directions of the flexible clamp head (17).
3. The device for assisting femtosecond laser micro-nano manufacturing to realize long-distance high-speed liquid drop transportation according to claim 1, is characterized in that: the shockproof base (1) is made of industrial high-grade rubber materials.
4. The device for assisting femtosecond laser micro-nano manufacturing to realize long-distance high-speed liquid drop transportation according to claim 1, is characterized in that: the rib plate (3) is symmetrically arranged by taking the central plane of the horizontal object stage (2) as a central axis, and meanwhile, a fillet with the radius of 10mm is arranged at the junction of the rib plate (3) and the electric printing feeding side plate (4).
5. The device for assisting femtosecond laser micro-nano manufacturing to realize long-distance high-speed liquid drop transportation according to claim 1, is characterized in that: the microsyringe (7) is a liquid-phase microsyringe device with the measuring range of 100 mu L, and the axial direction of the microsyringe is parallel to the trapezoidal slideway (6).
6. The device for assisting femtosecond laser micro-nano manufacturing to realize long-distance high-speed liquid drop transportation according to claim 1, is characterized in that: the high-precision scale plate (8) is a measuring tool with the measuring range of 200mm and the precision of micron, the reading of the high-precision scale plate directly corresponds to the numerical values of liquid drops with different heights, and the high-precision scale plate can be converted into corresponding Weber numbers.
7. The device for assisting femtosecond laser micro-nano manufacturing to realize long-distance high-speed liquid drop transportation according to claim 2, is characterized in that: the micro differential (21) is a micro high-precision transmission and is used for regulating and controlling the feeding speed of the horizontal feeding platform (12).
8. The device for assisting femtosecond laser micro-nano manufacturing to realize long-distance high-speed liquid drop transportation according to claim 2, is characterized in that: the adjustable micro-feeding device (15), the locking device (16), the flexible clamp head (17) and the hydraulic feeding device (18) are symmetrically arranged on the left side surface and the right side surface of the clamp extending table (13) by taking the central plane of the clamp extending table as a central axis.
9. The device for assisting femtosecond laser micro-nano manufacturing to realize long-distance high-speed liquid drop transportation according to claim 2, is characterized in that: the rotatable flexible hydraulic clamp (5) can rotate within the range of-90 degrees to 90 degrees and move in the direction vertical to the trapezoidal slide way (6).
10. The liquid drop transportation process of the device for assisting femtosecond laser micro-nano manufacturing to realize long-distance high-speed liquid drop transportation is characterized by comprising the following steps of:
i) preparing a gradient periodic microstructure on a sample substrate by femtosecond laser in an arc scanning mode of changing scanning intervals;
II) chemical vapor deposition of SiO on gradient periodic microstructures2Preparing a first heavy gradient wettability surface by using the nano particles and a low surface energy substance PFOTS;
III) preparing a second heavy 'gradient' surface, namely a charge density gradient surface, on the first heavy gradient wettability surface by a device for assisting femtosecond laser micro-nano manufacturing to realize long-distance high-speed liquid drop transportation, thereby obtaining a double-gradient wettability surface monomer;
VI) preparing a long-distance high-speed liquid drop transportation surface on a large-area sample substrate by regulating and controlling the array spacing of double-gradient wettability surface monomers and repeating the steps I) -III), wherein the liquid drops meet the requirement of high-speed transportation on the double-gradient wettability surface under the dual action of wettability gradient and charge density gradient, and the long-distance transportation is realized by the alternative array arrangement of the double-gradient wettability surface and an untreated area, so that the requirement of long-distance high-speed liquid drop transportation is finally realized.
CN202010919427.7A 2020-09-04 2020-09-04 Device for assisting femtosecond laser micro-nano manufacturing to realize long-distance high-speed liquid drop transportation Active CN112058326B (en)

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