CN112038275A - Integrated circuit turnover device and operation method thereof - Google Patents

Integrated circuit turnover device and operation method thereof Download PDF

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Publication number
CN112038275A
CN112038275A CN202010914452.6A CN202010914452A CN112038275A CN 112038275 A CN112038275 A CN 112038275A CN 202010914452 A CN202010914452 A CN 202010914452A CN 112038275 A CN112038275 A CN 112038275A
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wall
placing plate
plate
integrated circuit
block
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陈静
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706Mechanical details, e.g. roller, belt
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches

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  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
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Abstract

The invention discloses an integrated circuit turnover device and an operation method thereof, and belongs to the field of turnover of integrated circuits. The integrated circuit turnover device comprises a base, wherein an upper placing plate matched with a lower placing plate is fixedly connected to the outer wall of a driven gear; the bottom of the upper placing plate is provided with a trapezoidal block, the outer wall of the top of the lower placing plate is respectively provided with a groove and a placing groove, an integrated circuit body is placed in the placing groove, the outer wall of the piston is connected with a sliding block matched with the trapezoidal block, and the bottom and the top of the sliding block are provided with inclined planes with different gradients; the outer wall of the top of the base is provided with a cylinder, the bottom of the base is provided with a connecting pipe, the lower placing plate is provided with a buffering clamping mechanism, and the connecting pipe is communicated with the inflator through the buffering clamping mechanism; the invention can conveniently fix the upper placing plate and the lower placing plate, thereby conveniently overturning the integrated circuit, reducing the labor intensity and improving the working efficiency.

Description

Integrated circuit turnover device and operation method thereof
Technical Field
The invention relates to the technical field of integrated circuit turnover, in particular to an integrated circuit turnover device and an operation method thereof.
Background
Integrated circuits are a way in electronics to miniaturize circuits (including primarily semiconductor devices, including passive components, etc.) and are often fabricated on the surface of a semiconductor wafer.
The integrated circuit needs to be tested in multiple items, some tests need to be tested from the top surface of the integrated circuit, and some tests need to be tested from the bottom surface of the integrated circuit; when the test of one procedure is finished and the turn-over is required to enter the test of the other procedure, the turn-over workload is large because the integrated circuits are mostly produced in batches; manual turnover is low in efficiency and is not beneficial to organizing integrated circuit test line production; in order to overcome the defects that manual turnover of an integrated circuit is low in efficiency and is not beneficial to organizing integrated circuit test line production at present, the design of an integrated circuit turnover device which is high in turnover efficiency and is beneficial to organizing integrated circuit test line production and an operation method thereof becomes a problem to be solved urgently.
Disclosure of Invention
The invention aims to solve the defects in the prior art and provides an integrated circuit turnover device and an operation method thereof.
In order to achieve the purpose, the invention adopts the following technical scheme:
the integrated circuit turnover device comprises a base, wherein a bottom plate is fixedly connected to the outer wall of the top of the base, and a lower placing plate is arranged at the top of the bottom plate; the outer wall of the top of the base is fixedly connected with a frame plate, a screw rod is rotationally connected in the frame plate, a thread block is in threaded connection with the screw rod, a fixed shaft is fixedly connected with the outer wall of the thread block, one end, far away from the thread block, of the fixed shaft is rotatably connected with a driven gear, and an upper placing plate matched with the lower placing plate is fixedly connected with the outer wall of the driven gear;
the bottom of the upper placing plate is provided with a trapezoidal block, the outer wall of the top of the lower placing plate is respectively provided with a groove and a placing groove, an integrated circuit body is placed in the placing groove, the trapezoidal block is connected in the groove, the side wall of the groove is provided with an air cylinder, a second piston is connected in the air cylinder in a sliding mode, the outer wall of the piston is connected with a sliding block matched with the trapezoidal block, and the bottom and the top of the sliding block are provided with inclined planes with different gradients;
the outer wall of the top of the base is provided with a cylinder, the bottom of the base is provided with a connecting pipe, the lower placing plate is provided with a buffering clamping mechanism, and the connecting pipe is communicated with the inflator through the buffering clamping mechanism.
Preferably, the buffering clamping mechanism mainly comprises an air bag and a first hollow pipe, a square groove and an elongated slot are further formed in the lower placing plate, the first hollow pipe is fixedly connected to the outer wall of the top of the bottom plate and is inserted into the elongated slot, an annular plate matched with the first hollow pipe is further connected to the elongated slot in a sliding mode, a second hollow pipe is fixedly connected to the outer wall of the top of the annular plate, and the air bag is communicated with the air cylinder and the second hollow pipe respectively.
Preferably, the bottom of the square groove is provided with a square frame, the air bag is communicated with the square frame, the outer wall of the top of the second hollow pipe is fixedly connected with a baffle, the baffle abuts against the inner wall of the square groove, a sealing gasket is arranged at the abutting position, and the top of the second hollow pipe is provided with a through hole communicated with the square frame.
Preferably, the side wall of the groove is provided with a sliding groove, the outer wall of the second piston is fixedly connected with a connecting rod, the sliding block is connected to the outer wall of the connecting rod, the outer wall of the connecting rod is sleeved with a second spring, the second spring is connected between the sliding block and the second piston, and the sliding block is connected in the sliding groove in a sliding mode.
Preferably, the inner wall of the square groove is connected with a sliding plate in a sliding manner, the sliding plate is matched with the air bag, and a third spring is fixedly connected between the sliding plate and the inner wall of the square groove.
Preferably, the outer wall of the second hollow pipe is sleeved with a fourth spring, and the fourth spring is connected between the inner wall of the top of the long groove and the outer wall of the annular plate.
Preferably, the bottom of the thread block is fixedly connected with a supporting rod, the bottom of the supporting rod is provided with a push plate, a first piston is arranged in the cylinder, the first piston is connected to the outer wall of the screw rod in a sliding mode, the outer wall of the screw rod is sleeved with a first spring, and the first spring is connected between the first piston and the outer wall of the top of the base.
Preferably, the outer wall of the thread block is fixedly connected with a stepping motor, the output end of the stepping motor is fixedly connected with a driving gear, the driving gear is meshed with a driven gear, and the outer wall of the fixed shaft is further in threaded connection with a limit nut matched with the driven gear.
Preferably, the top outer wall fixedly connected with box of deckle board, it is connected with the pivot to rotate in the box, the one end that pivot and lead screw were arranged in the box all is equipped with the band pulley that links to each other through the belt.
An operation method of an integrated circuit turnover device adopts the following steps:
s1, rotating the rotating shaft to rotate the screw rod, so that the thread block drives the upper placing plate to move downwards and then is matched with the lower placing plate;
s2, the trapezoidal block moves to the groove, and the push plate is matched with the first piston, so that the gas in the cylinder enters the air bag through the connecting pipe;
s3, pushing the slide block to move by the air bag, so as to block the trapezoidal block and fix the position of the trapezoidal block;
s4, the trapezoid block is matched with the inclined plane at the top of the sliding block when moving downwards, the sliding block can enable the gas in the inflator to be injected into the gas bag when moving, and after the trapezoid block moves to the position below the sliding block, the expanded gas bag can enable the gas to be discharged, so that the gas enters the inflator, the sliding block blocks the trapezoid block, and the upper placing plate is fixedly connected with the lower placing plate;
and S5, the upper placing plate and the lower placing plate are driven by the thread blocks to ascend and then driven to rotate by the stepping motor, so that overturning is realized.
Compared with the prior art, the invention provides an integrated circuit turnover device and an operation method thereof, and the integrated circuit turnover device has the following beneficial effects:
1. when the integrated circuit needs to be rotated, firstly, the rotating shaft is rotated to drive the screw rod to rotate through the belt wheel and the belt, so that the thread block in threaded connection with the rotating shaft moves downwards, then the push plate is driven to move downwards through the supporting rod, meanwhile, the upper placing plate is driven to move downwards through the fixed shaft, and the limit nut is abutted against the driven gear, so that the driven gear cannot rotate, the upper placing plate is positioned at a horizontal position, then the push plate can press the first piston in the cylinder to move, so that gas enters the buffering clamping mechanism through the connecting pipe and enters the gas cylinder through the buffering clamping mechanism, at the moment, the trapezoidal block at the bottom of the upper placing plate is matched with the groove in the lower placing plate, then the second piston in the gas cylinder can drive the sliding block to move through the connecting rod, so as to abut against the trapezoidal block, so that the upper placing plate is fixedly connected with the lower placing plate, then the reverse rotation pivot makes the lead screw drive the screw block and rises, and the screw block then can drive and place the board and rise with placing the board down, unscrews limit nut, then starts step motor, makes it drive the driving gear and rotates, makes it and driven gear mesh mutually to place the board on the messenger and place the board rotation with placing down, overturn.
2. The integrated circuit turn-over device comprises a buffer clamping mechanism, wherein the buffer clamping mechanism comprises the following specific working processes: gas can enter the first hollow pipe through the connecting pipe, the annular plate can be pushed to rise after the first hollow pipe is inserted into the long groove, the second hollow pipe is driven to rise while the fourth spring is compressed, the baffle plate rises to be not propped against the inner wall of the square groove, the gas can enter the square frame through the through hole, then the gas can enter the gas bag through the square frame, then the gas enters the gas cylinder through the gas bag, so that the second piston moves, then the sliding block is pushed to move through the connecting rod, so that the trapezoidal block is blocked, the position of the trapezoidal block is fixed, the trapezoidal block can be matched with the inclined plane at the top of the sliding block when moving downwards, the gas in the gas cylinder can be injected into the gas bag when the sliding block moves, after the trapezoidal block moves to the lower part of the sliding block, the expanded gas bag can discharge the gas under the action of the third spring and the sliding plate, so that the gas can, make the slider block trapezoidal piece, place the board on making and put the board fixed continuous with putting down, shelves screw thread piece drives and places the board and put the board down when removing, can make first hollow tube remove out the elongated slot, then the fourth spring then can make the baffle block square groove, thereby make it sealed through sealed the pad, avoid gas discharge, thereby make on placing the board and put the board all the time fixed continuous with putting down, after the upset, press the annular plate, then can make the gas discharge in the gasbag, thereby make the trapezoidal piece can cooperate with the inclined plane of slider bottom, thereby make the trapezoidal piece conveniently shift out.
Drawings
Fig. 1 is a first schematic structural diagram of an integrated circuit flip-chip apparatus according to the present invention;
FIG. 2 is a second schematic structural diagram of an integrated circuit flip-chip apparatus according to the present invention;
FIG. 3 is a side view of an integrated circuit turn-over apparatus according to the present invention;
fig. 4 is a schematic structural diagram of the matching of the upper placing plate and the lower placing plate of the integrated circuit turnover device according to the present invention;
FIG. 5 is a schematic diagram of a portion A of the flip-chip apparatus of FIG. 4 according to the present invention;
fig. 6 is a schematic structural diagram of a portion B in fig. 4 of an integrated circuit turn-over apparatus according to the present invention.
In the figure: 1. a base; 101. a frame plate; 102. a base plate; 103. placing the plate downwards; 104. a groove; 2. a box body; 201. a screw rod; 202. a rotating shaft; 203. a pulley; 3. a thread block; 301. a driving gear; 302. a support bar; 303. pushing the plate; 304. a stepping motor; 305. a driven gear; 306. placing the plate on the frame; 307. a trapezoidal block; 308. a fixed shaft; 309. a limit nut; 4. a cylinder; 401. a first piston; 402. a first spring; 5. a slider; 501. a connecting rod; 502. a second spring; 503. an air cylinder; 504. a square groove; 505. an air bag; 506. a slide plate; 507. a third spring; 6. a long groove; 601. an annular plate; 602. a first hollow tube; 603. a second hollow tube; 604. a through hole; 605. a baffle plate; 606. a fourth spring; 607. and (5) a block.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.
In the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention.
Example 1:
referring to fig. 1-6, an integrated circuit turn-over device comprises a base 1, and is characterized in that a bottom plate 102 is fixedly connected to the outer wall of the top of the base 1, and a lower placing plate 103 is arranged at the top of the bottom plate 102; the outer wall of the top of the base 1 is fixedly connected with a frame plate 101, a screw rod 201 is rotatably connected in the frame plate 101, a thread block 3 is in threaded connection with the screw rod 201, a fixed shaft 308 is fixedly connected to the outer wall of the thread block 3, one end, far away from the thread block 3, of the fixed shaft 308 is rotatably connected with a driven gear 305, and an upper placing plate 306 matched with the lower placing plate 103 is fixedly connected to the outer wall of the driven gear 305;
the bottom of the upper placing plate 306 is provided with a trapezoidal block 307, the outer wall of the top of the lower placing plate 103 is respectively provided with a groove 104 and a placing groove, an integrated circuit body is placed in the placing groove, the trapezoidal block 307 is connected in the groove 104, the side wall of the groove 104 is provided with an air cylinder 503, a second piston is connected in the air cylinder 503 in a sliding mode, the outer wall of the piston is connected with a sliding block 5 matched with the trapezoidal block 307, and the bottom and the top of the sliding block 5 are provided with inclined planes with different gradients;
the outer wall of the top of the base 1 is provided with a cylinder 4, the bottom of the base 1 is provided with a connecting pipe, the lower placing plate 103 is provided with a buffering clamping mechanism, and the connecting pipe is communicated with the inflator 503 through the buffering clamping mechanism.
The bottom fixedly connected with bracing piece 302 of screw block 3, the bottom of bracing piece 302 is equipped with push pedal 303, is equipped with first piston 401 in the drum 4, and first piston 401 sliding connection has first spring 402 in the outer wall of lead screw 201, and the outer wall of lead screw 201 has cup jointed first spring 402, and first spring 402 is connected between the top outer wall of first piston 401 and base 1.
The outer wall fixedly connected with step motor 304 of screw block 3, the output fixedly connected with driving gear 301 of step motor 304, driving gear 301 and driven gear 305 intermeshing, the outer wall of fixed axle 308 still threaded connection have with driven gear 305 matched with stop nut 309.
The top outer wall fixedly connected with box 2 of deckle board 101, the box 2 internal rotation is connected with pivot 202, and the one end that box 2 was arranged in to pivot 202 and lead screw 201 all is equipped with the band pulley 203 that links to each other through the belt.
In the invention, when the integrated circuit needs to be rotated, firstly the rotating shaft 202 is rotated to drive the screw rod 201 to rotate through the belt wheel 203 and the belt, so that the thread block 3 in threaded connection with the rotating shaft moves downwards, then the supporting rod 302 drives the push plate 303 to move downwards, meanwhile, the fixed shaft 308 drives the upper placing plate 306 to move downwards, and the limit nut 309 abuts against the driven gear 305, so that the driven gear 305 cannot rotate, the upper placing plate 306 is in a horizontal position, then the push plate 303 presses the first piston 401 in the cylinder 4 to move, so that the gas enters the buffering and clamping mechanism through the connecting pipe, and then enters the gas cylinder 503 through the buffering and clamping mechanism, at the moment, the trapezoidal block 307 at the bottom of the upper placing plate 306 is matched with the groove 104 in the lower placing plate 103, then the second piston in the gas cylinder 503 drives the sliding block 5 to move through the connecting rod 501, thereby support trapezoidal piece 307 to the board 306 is placed on the messenger and the board 103 is placed down to be fixed continuous, then antiport pivot 202 makes lead screw 201 drive screw block 3 rise, and screw block 3 then can drive and place board 306 and the board 103 is placed down and rise, unscrews stop nut 309, then starts step motor 304, makes it drive driving gear 301 and rotates, makes it and driven gear 305 mesh mutually, thereby makes and places board 306 and the board 103 is placed down and rotates, overturns on the messenger.
Example 2:
referring to fig. 1 to 6, an integrated circuit turn-over device is substantially the same as that in embodiment 1, and further, the buffering clamping mechanism mainly includes an air bag 505 and a first hollow tube 602, the lower placing plate 103 is further provided with a square groove 504 and an elongated slot 6, the top outer wall of the bottom plate 102 is fixedly connected with the first hollow tube 602, the first hollow tube 602 is inserted into the elongated slot 6, the elongated slot 6 is further connected with an annular plate 601 matched with the first hollow tube 602 in a sliding manner, the top outer wall of the annular plate 601 is fixedly connected with a second hollow tube 603, and the air bag 505 is respectively communicated with the air bag 503 and the second hollow tube 603.
The bottom of the square groove 504 is provided with a square frame 607, the air bag 505 is communicated with the square frame 607, the outer wall of the top of the second hollow tube 603 is fixedly connected with a baffle 605, the baffle 605 abuts against the inner wall of the square groove 504, a sealing gasket is arranged at the abutting position, and the top of the second hollow tube 603 is provided with a through hole 604 communicated with the square frame 607.
The lateral wall of recess 104 is equipped with the spout, and the outer wall fixedly connected with connecting rod 501 of second piston, slider 5 connect at the outer wall of connecting rod 501, and second spring 502 has been cup jointed to the outer wall of connecting rod 501, and second spring 502 is connected between slider 5 and second piston, and slider 5 sliding connection is in the spout.
A sliding plate 506 is slidably connected to the inner wall of the square groove 504, the sliding plate 506 is matched with the air bag 505, and a third spring 507 is fixedly connected between the sliding plate 506 and the inner wall of the square groove 504.
And a fourth spring 606 is sleeved on the outer wall of the second hollow pipe 603, and the fourth spring 606 is connected between the inner wall of the top of the elongated slot 6 and the outer wall of the annular plate 601.
In the invention, the concrete working process of the buffering clamping mechanism is as follows: the gas enters the first hollow pipe 602 through the connecting pipe, after the first hollow pipe 602 is inserted into the long groove 6, the annular plate 601 is pushed to ascend, the fourth spring 606 is compressed and the second hollow pipe 603 is driven to ascend, the baffle 605 is lifted to be not abutted against the inner wall of the square groove 504, so that the gas can enter the block 607 through the through hole 604, then the gas can enter the air bag 505 through the block 607, then the gas enters the air cylinder 503 through the air bag 505, so that the second piston moves, then the sliding block 5 is pushed to move through the connecting rod 501, so that the trapezoidal block 307 is blocked, the position of the trapezoidal block 307 is fixed, the trapezoidal block 307 is matched with the inclined surface at the top of the sliding block 5 when moving downwards, the gas in the air cylinder 503 is injected into the air bag 505 when the sliding block 5 moves, after the trapezoidal block 307 moves to the lower part of the sliding block 5, the expanded air bag 505 can discharge the gas under the action of the third spring 507 and the sliding plate 506, therefore, gas enters the gas cylinder 503, the sliding block 5 blocks the trapezoidal block 307, the upper placing plate 306 is fixedly connected with the lower placing plate 103, when the upper placing plate 306 and the lower placing plate 103 are driven to move by the thread blocking block 3, the first hollow tube 602 can move out of the long groove 6, then the baffle 605 can block the square groove 504 by the fourth spring 606, so that the upper placing plate 306 and the lower placing plate 103 are sealed through the sealing gasket, gas discharge is avoided, the upper placing plate 306 and the lower placing plate 103 are always fixedly connected, after overturning, the annular plate 601 is pressed, the gas in the air bag 505 can be discharged, the trapezoidal block 307 can be matched with the inclined plane at the bottom of the sliding block 5, and the trapezoidal block 307 can be conveniently moved out.
Example 3:
referring to fig. 1-6, a method of operating an integrated circuit turn-over apparatus, comprising the steps of:
s1, rotating the rotating shaft 202 to rotate the screw rod 201, so that the thread block 3 drives the upper placing plate 306 to move downwards and then is matched with the lower placing plate 103;
s2, the trapezoidal block 307 moves into the groove 104, and the push plate 303 cooperates with the first piston 401, so that the gas in the cylinder 4 enters the air bag 505 through the connecting tube;
s3, the gas pushes the slider 5 to move through the air bag 505, so as to block the trapezoidal block 307, and the position of the trapezoidal block 307 is fixed;
s4, the trapezoidal block 307 moves downwards to match with the slope at the top of the sliding block 5, the sliding block 5 moves to make the gas in the gas cylinder 503 inject into the gas bag 505, after the trapezoidal block 307 moves to the lower part of the sliding block 5, the expanded gas bag 505 discharges the gas, so that the gas enters into the gas cylinder 503, the sliding block 5 blocks the trapezoidal block 307, and the upper placing plate 306 is fixedly connected with the lower placing plate 103;
s5, the screw block 3 drives the upper placing plate 306 and the lower placing plate 103 to ascend, and then drives them to rotate by the stepping motor 304, thereby turning over.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and the technical solutions and the inventive concepts thereof according to the present invention should be equivalent or changed within the scope of the present invention.

Claims (10)

1. The integrated circuit turn-over device comprises a base (1), and is characterized in that the outer wall of the top of the base (1) is fixedly connected with a bottom plate (102), and a lower placing plate (103) is arranged at the top of the bottom plate (102); a frame plate (101) is fixedly connected to the outer wall of the top of the base (1), a screw rod (201) is rotatably connected to the frame plate (101), a thread block (3) is connected to the screw rod (201) in a threaded manner, a fixed shaft (308) is fixedly connected to the outer wall of the thread block (3), a driven gear (305) is rotatably connected to one end, far away from the thread block (3), of the fixed shaft (308), and an upper placing plate (306) matched with the lower placing plate (103) is fixedly connected to the outer wall of the driven gear (305);
the bottom of the upper placing plate (306) is provided with a trapezoidal block (307), the outer wall of the top of the lower placing plate (103) is provided with a groove (104) and a placing groove respectively, an integrated circuit body is placed in the placing groove, the trapezoidal block (307) is connected in the groove (104), the side wall of the groove (104) is provided with an air cylinder (503), a second piston is connected in the air cylinder (503) in a sliding mode, the outer wall of the piston is connected with a sliding block (5) matched with the trapezoidal block (307), and the bottom and the top of the sliding block (5) are provided with inclined planes with different gradients;
the outer wall of the top of the base (1) is provided with a cylinder (4), the bottom of the base (1) is provided with a connecting pipe, the lower placing plate (103) is provided with a buffering clamping mechanism, and the connecting pipe is communicated with an air cylinder (503) through the buffering clamping mechanism.
2. The integrated circuit turn-over device according to claim 1, wherein the buffering clamping mechanism mainly comprises an air bag (505) and a first hollow tube (602), the lower placing plate (103) is further provided with a square groove (504) and a long groove (6), the top outer wall of the bottom plate (102) is fixedly connected with the first hollow tube (602), the first hollow tube (602) is inserted into the long groove (6), the long groove (6) is further internally and slidably connected with an annular plate (601) matched with the first hollow tube (602), the top outer wall of the annular plate (601) is fixedly connected with a second hollow tube (603), and the air bag (505) is respectively communicated with the air cylinder (503) and the second hollow tube (603).
3. The integrated circuit turn-over device according to claim 2, characterized in that a square frame (607) is arranged at the bottom of the square groove (504), the air bag (505) is communicated with the square frame (607), a baffle (605) is fixedly connected to the outer wall of the top of the second hollow tube (603), the baffle (605) is abutted against the inner wall of the square groove (504), a sealing gasket is arranged at the abutted position, and a through hole (604) communicated with the square frame (607) is arranged at the top of the second hollow tube (603).
4. The integrated circuit turn-over device according to claim 3, characterized in that the side wall of the groove (104) is provided with a sliding groove, the outer wall of the second piston is fixedly connected with a connecting rod (501), the sliding block (5) is connected to the outer wall of the connecting rod (501), the outer wall of the connecting rod (501) is sleeved with a second spring (502), the second spring (502) is connected between the sliding block (5) and the second piston, and the sliding block (5) is slidably connected in the sliding groove.
5. The integrated circuit turn-over device according to claim 4, characterized in that a sliding plate (506) is slidably connected to the inner wall of the square groove (504), the sliding plate (506) is matched with the air bag (505), and a third spring (507) is fixedly connected between the sliding plate (506) and the inner wall of the square groove (504).
6. The integrated circuit turn-over device according to claim 5, wherein a fourth spring (606) is sleeved on the outer wall of the second hollow tube (603), and the fourth spring (606) is connected between the top inner wall of the elongated slot (6) and the outer wall of the annular plate (601).
7. The integrated circuit turn-over device according to claim 1, wherein a support rod (302) is fixedly connected to the bottom of the thread block (3), a push plate (303) is arranged at the bottom of the support rod (302), a first piston (401) is arranged in the cylinder (4), the first piston (401) is slidably connected to the outer wall of the screw rod (201), a first spring (402) is sleeved on the outer wall of the screw rod (201), and the first spring (402) is connected between the first piston (401) and the outer wall of the top of the base (1).
8. The integrated circuit turn-over device according to claim 1, characterized in that a stepping motor (304) is fixedly connected to the outer wall of the thread block (3), a driving gear (301) is fixedly connected to the output end of the stepping motor (304), the driving gear (301) and a driven gear (305) are meshed with each other, and a limit nut (309) matched with the driven gear (305) is further connected to the outer wall of the fixed shaft (308) in a threaded manner.
9. The integrated circuit turn-over device according to claim 1, characterized in that a box body (2) is fixedly connected to the outer wall of the top of the frame plate (101), a rotating shaft (202) is rotatably connected to the box body (2), and a belt wheel (203) connected through a belt is arranged at each of the rotating shaft (202) and one end of the screw rod (201) arranged in the box body (2).
10. A method of operating an integrated circuit turn-over apparatus, comprising an integrated circuit turn-over apparatus as claimed in any one of claims 1 to 9, characterized by the steps of:
s1, rotating the rotating shaft (202) to rotate the screw rod (201), so that the thread block (3) drives the upper placing plate (306) to move downwards and then is matched with the lower placing plate (103);
s2, the trapezoidal block (307) moves into the groove (104), and the push plate (303) is matched with the first piston (401), so that the gas in the cylinder (4) enters the air bag (505) through the connecting pipe;
s3, pushing the slide block (5) to move by the gas through the gas bag (505), so that the trapezoidal block (307) is blocked, and the position of the trapezoidal block (307) is fixed;
s4, the trapezoidal block (307) is matched with the inclined plane at the top of the sliding block (5) when moving downwards, the sliding block (5) can enable the gas in the gas cylinder (503) to be injected into the gas bag (505) when moving, after the trapezoidal block (307) moves to the lower part of the sliding block (5), the expanded gas bag (505) can enable the gas to be discharged, so that the gas enters the gas cylinder (503), the sliding block (5) blocks the trapezoidal block (307), and the upper placing plate (306) is fixedly connected with the lower placing plate (103);
s5, the upper placing plate (306) and the lower placing plate (103) are driven to ascend by the thread block (3), and then the upper placing plate and the lower placing plate are driven to rotate by the stepping motor (304), so that overturning is achieved.
CN202010914452.6A 2020-09-03 2020-09-03 Integrated circuit turnover device and operation method thereof Withdrawn CN112038275A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202010914452.6A CN112038275A (en) 2020-09-03 2020-09-03 Integrated circuit turnover device and operation method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202010914452.6A CN112038275A (en) 2020-09-03 2020-09-03 Integrated circuit turnover device and operation method thereof

Publications (1)

Publication Number Publication Date
CN112038275A true CN112038275A (en) 2020-12-04

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CN202010914452.6A Withdrawn CN112038275A (en) 2020-09-03 2020-09-03 Integrated circuit turnover device and operation method thereof

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Country Link
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114750057A (en) * 2022-06-13 2022-07-15 富芯微电子有限公司 Back thinning equipment and process for producing composite fast recovery diode

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114750057A (en) * 2022-06-13 2022-07-15 富芯微电子有限公司 Back thinning equipment and process for producing composite fast recovery diode

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Application publication date: 20201204