CN112034689B - 一种浸没式光刻机浸液温控装置 - Google Patents
一种浸没式光刻机浸液温控装置 Download PDFInfo
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- CN112034689B CN112034689B CN202010994847.1A CN202010994847A CN112034689B CN 112034689 B CN112034689 B CN 112034689B CN 202010994847 A CN202010994847 A CN 202010994847A CN 112034689 B CN112034689 B CN 112034689B
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
- G03F7/70883—Environment aspects, e.g. pressure of beam-path gas, temperature of optical system
- G03F7/70891—Temperature
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70341—Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN202010994847.1A CN112034689B (zh) | 2020-09-21 | 2020-09-21 | 一种浸没式光刻机浸液温控装置 |
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CN202010994847.1A CN112034689B (zh) | 2020-09-21 | 2020-09-21 | 一种浸没式光刻机浸液温控装置 |
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CN112034689A CN112034689A (zh) | 2020-12-04 |
CN112034689B true CN112034689B (zh) | 2021-10-08 |
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CN202010994847.1A Active CN112034689B (zh) | 2020-09-21 | 2020-09-21 | 一种浸没式光刻机浸液温控装置 |
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Families Citing this family (1)
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CN112445084B (zh) * | 2020-12-20 | 2021-11-30 | 华中科技大学 | 一种浸没式光刻机的温度控制方法及装置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006269762A (ja) * | 2005-03-24 | 2006-10-05 | Nikon Corp | 露光装置 |
CN103176369A (zh) * | 2013-03-13 | 2013-06-26 | 华中科技大学 | 用于浸没式光刻的浸液温控装置 |
CN104199483A (zh) * | 2014-08-20 | 2014-12-10 | 华中科技大学 | 一种多路液体温度调节装置及温度控制方法 |
CN111527452A (zh) * | 2017-12-26 | 2020-08-11 | 佳能株式会社 | 冷却设备、半导体制造装置和半导体制造方法 |
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2020
- 2020-09-21 CN CN202010994847.1A patent/CN112034689B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006269762A (ja) * | 2005-03-24 | 2006-10-05 | Nikon Corp | 露光装置 |
CN103176369A (zh) * | 2013-03-13 | 2013-06-26 | 华中科技大学 | 用于浸没式光刻的浸液温控装置 |
CN104199483A (zh) * | 2014-08-20 | 2014-12-10 | 华中科技大学 | 一种多路液体温度调节装置及温度控制方法 |
CN111527452A (zh) * | 2017-12-26 | 2020-08-11 | 佳能株式会社 | 冷却设备、半导体制造装置和半导体制造方法 |
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Effective date of registration: 20230417 Address after: 430075 No.8, Ligou South Road, Donghu New Technology Development Zone, Wuhan City, Hubei Province Patentee after: WUHAN INTELLIGENT EQUIPMENT INDUSTRIAL INSTITUTE Co.,Ltd. Address before: 430074 Hubei city of Wuhan province Luo Yu Road, No. 1037 Patentee before: HUAZHONG University OF SCIENCE AND TECHNOLOGY Patentee before: WUHAN INTELLIGENT EQUIPMENT INDUSTRIAL INSTITUTE Co.,Ltd. |
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Effective date of registration: 20230828 Address after: 430075 No.8, Ligou South Road, Donghu New Technology Development Zone, Wuhan City, Hubei Province Patentee after: Wuhan micro environmental control technology Co.,Ltd. Address before: 430075 No.8, Ligou South Road, Donghu New Technology Development Zone, Wuhan City, Hubei Province Patentee before: WUHAN INTELLIGENT EQUIPMENT INDUSTRIAL INSTITUTE Co.,Ltd. |