CN112034579A - Cylindrical mirror and coded disc glass bonding device and method based on non-coplanar marking lines - Google Patents

Cylindrical mirror and coded disc glass bonding device and method based on non-coplanar marking lines Download PDF

Info

Publication number
CN112034579A
CN112034579A CN202010790094.2A CN202010790094A CN112034579A CN 112034579 A CN112034579 A CN 112034579A CN 202010790094 A CN202010790094 A CN 202010790094A CN 112034579 A CN112034579 A CN 112034579A
Authority
CN
China
Prior art keywords
cylindrical mirror
adjusting
optical system
line
coded disc
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN202010790094.2A
Other languages
Chinese (zh)
Other versions
CN112034579B (en
Inventor
王婧烨
吕志强
赵晓雨
刘旭力
汪艳
戈强
杨宇
孟宪刚
杨立洲
高修涛
邵逸恺
田广
武宏宇
赵娜
石建民
范汉超
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Beijing Institute of Control Engineering
Original Assignee
Beijing Institute of Control Engineering
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Beijing Institute of Control Engineering filed Critical Beijing Institute of Control Engineering
Priority to CN202010790094.2A priority Critical patent/CN112034579B/en
Publication of CN112034579A publication Critical patent/CN112034579A/en
Application granted granted Critical
Publication of CN112034579B publication Critical patent/CN112034579B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/003Alignment of optical elements
    • G02B7/004Manual alignment, e.g. micromanipulators

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Manufacturing Optical Record Carriers (AREA)

Abstract

The invention relates to a device and a method for bonding a cylindrical mirror and coded disc glass based on non-coplanar marking lines, and belongs to the technical field of photoelectric detectors. The device takes the upper surface of a base as an XOY plane of a measuring system coordinate system, a coordinate axis vertical to the XOY plane is taken as a Z axis of the measuring coordinate system, and a two-dimensional moving platform is positioned on the upper surface of the base and can move along the X axis direction and the Y axis direction of the measuring system coordinate system; the code wheel cylindrical mirror bonding die is positioned on the two-dimensional moving platform, is used for stacking the code wheel and the cylindrical mirror, and can adjust the position of the code wheel or the cylindrical mirror relative to the two-dimensional moving platform along the X-axis direction and the Y-axis direction of a measuring system coordinate system; the stand column is vertically arranged on the base, the microscope optical system and the CCD camera are arranged on the stand column, the microscopic optical system is used for imaging the stacked code disc and the cylindrical mirror, and the lens of the CCD camera is aligned with the eyepiece of the microscopic optical system and used for performing photoelectric conversion on an image formed by the microscopic optical system and uploading the image to the computer.

Description

Cylindrical mirror and coded disc glass bonding device and method based on non-coplanar marking lines
Technical Field
The invention relates to a device and a method for bonding a cylindrical mirror and coded disc glass based on non-coplanar marking lines, belonging to the technical field of photoelectric detectors.
Background
The optical measuring part of the coding type sun sensor is an integrated photoelectric assembly and is formed by bonding a cylindrical mirror, a code disc and an integrated photoelectric cell. The bonding alignment precision of two optical parts, namely the cylindrical mirror and the coded disc, directly determines the precision of the product. According to task requirements, the alignment precision of the 0-0' mark line of the code disc and the optical seam of the cylindrical mirror is better than 3 μm. However, the bonding alignment process of the code wheel cylindrical lens has high operation difficulty and low first-pass yield of the process, and becomes a bottleneck problem which restricts the production efficiency and the benefit of the product.
At present, the bonding alignment of the cylindrical lens and the coded disc is realized by adopting a line pressing alignment mode, a division line of a universal tool microscope is used as an intermediate medium, and the division line is respectively superposed with the upper edges of a coded disc marking line and a cylindrical lens marking line through multiple times of adjustment, and the superposition of the three is used as an alignment basis. The disadvantages of this method are: 1) the visual alignment uncertainty of human eyes is higher and is 60-120 arc seconds. 2) The requirement of the line pressing alignment on the parallelism among the three marking lines is high, the 0-0' marking line of the code wheel and the optical seam of the cylindrical mirror are manufactured by a wet etching process, and the uniformity error of the seam width can influence the parallelism of the alignment marks and the alignment precision. 3) The method has low efficiency, and the division line of the microscope, the 0 bit line of the code wheel and the marking line of the cylindrical mirror can be aligned by multiple adjustments.
The patent 'a lens array and PD array high accuracy aligns paster device and alignment method 201410763969.4' utilizes the method of taking a picture twice to obtain the position of the centre of a circle of lens array and the centre of a circle of the photosensitive surface of PD array, calculates the difference of position slopes of the two, readjusts the position of lens array, recalculates the difference of position slopes, readjusts, guides and satisfies the centre of a circle position completely coincide. This method is only suitable for alignment between two points and is not suitable for the alignment between two lines to be solved in the present invention.
Disclosure of Invention
The technical problem solved by the invention is as follows: the device and the method for bonding the cylindrical mirror and the coded disc glass based on the non-coplanar marking lines overcome the defects of the prior art, overcome the process difficulties that the optical seam of the cylindrical mirror and the 0-0' marking line of the coded disc are not on the same plane, the length and the width of the marking line are different by one order of magnitude, and the requirement on alignment precision is high, improve the one-time qualification rate of the working procedure, and simultaneously improve the production efficiency.
The technical scheme of the invention is as follows: a non-coplanar marking line-based bonding device for a cylindrical mirror and coded disc glass is characterized by comprising a two-dimensional moving platform, a coded disc cylindrical mirror bonding die, a micro-optical system, a CCD camera, a computer, an upright post and a base, wherein the non-coplanar marking lines are respectively a light slit of the cylindrical mirror and a 0-0' marking line of the coded disc;
the upper surface of the base is taken as an XOY plane of a measuring system coordinate system, a coordinate axis perpendicular to the XOY plane is taken as a Z axis of the measuring coordinate system, and the two-dimensional moving platform is positioned on the upper surface of the base and can move along the X axis direction and the Y axis direction of the measuring system coordinate system; the code wheel cylindrical mirror bonding die is positioned on the two-dimensional moving platform, is used for stacking the code wheel and the cylindrical mirror, and can adjust the position of the code wheel or the cylindrical mirror relative to the two-dimensional moving platform along the X-axis direction and the Y-axis direction of a measuring system coordinate system; the stand column is vertically arranged on the base, the microscopic optical system and the CCD camera are arranged on the base, the microscopic optical system is used for imaging the stacked code disc and the cylindrical mirror, and the lens of the CCD camera is aligned with the eyepiece of the microscopic optical system and used for performing photoelectric conversion on an image formed by the microscopic optical system and uploading the image to the computer.
The coded disc cylindrical lens bonding die comprises an integrated base, an upper support, 4 coded disc adjusting screws, 4 cylindrical lens adjusting screws, 2 filler strips, 4 pressing angles, 4 upper support screws and 4 springs;
the center of the integrated base is provided with a groove structure for placing a coded disc, the surface of a 0-0' marking line of the coded disc faces downwards, the side wall of the groove, which is vertical to an XOY plane, is provided with 8 through holes, 4 through holes are respectively arranged below and above the groove, 2 through holes are respectively arranged above and below the groove along the positive direction of a Y axis, 2 through holes are respectively arranged above and below the groove along the negative direction of the Y axis, 4 coded disc adjusting screws are respectively screwed into four through holes below the groove, and 4 cylindrical mirror adjusting screws are respectively screwed into the 4 through holes above the groove; the position of the coded disc along the Y direction is adjusted by rotating the coded disc adjusting screw, and the coded disc adjusting screw and the coded disc are protected by the cushion strip, so that the coded disc made of glass is prevented from being damaged by the coded disc adjusting screw made of metal; a cylindrical mirror is arranged on the coded disc, the surface of the cylindrical mirror light slit is in contact with the coded disc glass, and the upper bracket is used for pressing the cylindrical mirror on the coded disc; 4 through holes are formed in the bottom surface of the integrated base, screws of each upper support are matched with springs one by one and penetrate through the through holes and the pressing angles in sequence, and the upper supports, the cylindrical mirror, the coded disc and the integrated base are fixed; the elastic force values of the 4 springs are equal, so that the cylindrical mirror is ensured to be uniformly stressed; the cylindrical mirror adjusting screw penetrates through the side wall of the integrated base to be in contact with the upper support, and the position of the cylindrical mirror along the Y direction is adjusted by rotating the cylindrical mirror adjusting screw.
The filler strip is made of polytetrafluoroethylene.
The upper bracket is equal to the cylindrical mirror in length, and the contact part of the upper bracket and the cambered surface of the cylindrical mirror is designed by adopting a V-shaped groove; the included angle of two sides of the V-shaped groove is 90 degrees, the depth is the arc height of the cylindrical mirror, and the pressure of the pressing angle on the upper cover plate is uniformly transmitted along the radial direction of the cylindrical mirror, so that the automatic centering effect is achieved, and the parallel relation between the plane of the cylindrical mirror and the upper surface of the coded disc is ensured.
The other technical solution of the invention is as follows: a non-coplanar marking line-based cylindrical mirror and coded disc glass alignment bonding method comprises the following steps:
(1) placing the coded disc into a coded disc cylindrical mirror bonding die, and uniformly coating silicon rubber on the plane of the cylindrical mirror;
(2) placing the cylindrical lens on the bonding surface of the coded disc, and repeatedly and lightly pushing back and forth along the +/-X and +/-Y directions respectively to remove bubbles, and pressing the upper cover plate of the V-shaped groove tightly after confirming that no air line exists;
(3) placing the assembled code wheel cylindrical mirror bonding mould on a two-dimensional moving platform, adjusting the position of the two-dimensional moving platform, and aligning the division line of the microscopic optical system and the optical seam of the cylindrical mirror in a line-clamping alignment manner by adjusting a cylindrical mirror adjusting screw (306) of the code wheel cylindrical mirror bonding mould to lock the two-dimensional moving platform;
(4) adjusting the focal length of the micro-optical system, and aligning and fixing a 0-0' marking line of the code wheel with a division line of the micro-optical system in a cross line alignment manner by adjusting a code wheel adjusting screw (303) of a code wheel cylindrical mirror bonding mould;
(5) and (3) adjusting the focal length of the microscopic optical system, confirming whether the division line of the microscopic optical system is aligned with the cylindrical mirror light slit, if not, repeating the step (3) and the step (4) until the division line of the microscopic optical system is overlapped with the center of the cylindrical mirror light slit and the center of the 0-0' mark line of the code wheel, and if not, finishing.
The specific alignment steps of the code wheel 0-0' marking line and the microscopic optical system division line in a cross line alignment mode are as follows:
(3.1) adjusting the focal plane of the microscopic optical system to the position of the cylindrical mirror and the light seam in the X direction until the imaging of the edge of the light seam is clearest, and locking a three-direction coarse adjusting knob of the universal tool microscope;
(3.2) adjusting a fine adjustment knob of the two-dimensional platform along the Y direction of the coordinate system of the measuring system, and adjusting the division line of the microscopic optical system to the center of the optical seam of the cylindrical mirror;
and (3.3) unlocking the coarse adjustment knob along the X direction of the coordinate system of the measurement system, translating the two-dimensional platform, adjusting the focal plane of the microscopic optical system to the position of the cylindrical mirror-X direction light seam, locking the coarse adjustment knob along the three directions, adjusting the fine adjustment knob of the two-dimensional platform along the Y direction of the coordinate system of the measurement system, and adjusting the division line of the microscopic optical system to the center of the cylindrical mirror light seam.
The code wheel 0-0' marking line and the division line of the micro optical system are aligned in a cross line alignment mode, namely:
the method comprises the following specific steps:
(4.1) unlocking the upright column to coarsely adjust the knob along the Z direction of the coordinate system of the measuring system, and adjusting the focal plane of the micro-optical system to the position of the 0-0' line on the left side of the code disc to the clearest image from the edge of the mark line;
(4.2) adjusting a code wheel adjusting screw on the code wheel cylindrical lens bonding die, and adjusting the center of the division line aligned with the center of the cylindrical lens and the center of the 0-0' marking line of the code wheel to be coincident;
and (4.3) unlocking the translational two-dimensional platform, translating the two-dimensional platform along the rough adjusting knob in the X direction of the coordinate system of the measuring system, adjusting the focal plane of the microscopic optical system to the position of the 0-0 'line on the right side of the code wheel, locking the three-direction rough adjusting knob, and adjusting the division line of the microscopic optical system and the center of the 0-0' mark line of the code wheel to be coincident.
8. The method for aligning and bonding the cylindrical mirror and the coded disc glass based on the non-coplanar marking line according to the device of claim 5, characterized by further comprising the following steps:
(6) and after standing for a period of time, checking whether the division line of the microscopic optical system, the center of the 0-0' marking line of the code disc and the center of the cylindrical mirror light seam coincide or not again, and if the positions of the division line of the microscopic optical system, the center of the 0-0' marking line of the code disc and the center of the cylindrical mirror light seam are deviated, adjusting by a fine adjustment knob of the bonding tool until the division line of the microscopic optical system, the center of the 0-0' marking line of the code disc.
The period of time is not less than 10 minutes.
Compared with the prior art, the invention has the beneficial effects that:
(1) the invention adopts the clamping alignment and cross line alignment methods with higher uncertainty to replace the line pressing alignment method, thereby improving the alignment precision in principle;
(2) the invention adopts the linear contact between the upper cover plate of the V-shaped groove with the self-centering function and the cylindrical mirror, so that the cylindrical mirror is stably installed and clamped, and the precision ultra-difference caused by the relative displacement of the coded disc cylindrical mirror due to the internal tension of silicon rubber is avoided.
(3) The invention realizes the automatic leveling of the plane of the cylindrical mirror by the mutual grinding process of the coded disc parts, avoids the over-tolerance caused by the influence of the thickness of the silicon rubber on the deflection of incident light on the bonding interface, and ensures the product precision.
(4) The method has simple process, can effectively improve the process efficiency of bonding and aligning the coded disc cylindrical mirror, and is particularly suitable for batch production.
(5) The invention also solves the problem of poor precision caused by uneven adhesive thickness of the bonding interface of the code wheel cylindrical mirror.
Drawings
FIG. 1 is a schematic diagram of a cylindrical mirror and code wheel glass aligning and bonding device according to an embodiment of the invention;
FIG. 2 is a schematic diagram of the bonding alignment mark position of a code wheel cylindrical mirror according to an embodiment of the present invention;
FIG. 3 is a schematic structural view of a code wheel cylindrical mirror bonding mold according to an embodiment of the invention;
FIG. 4 is a schematic diagram illustrating code wheel mark line alignment criteria according to an embodiment of the present invention;
fig. 5 is a schematic diagram illustrating alignment criteria of the marking lines of the cylindrical mirror according to the embodiment of the present invention.
In the figure: 101 two-dimensional moving platform, 102 code wheel cylindrical mirror bonding mould, 103 microscopic optical system, 104CCD camera (built-in), 105 computer, 106 upright post, 107 base, 201 code wheel 0-0' marking line, 202 cylindrical mirror light gap, 203 cylindrical mirror light gap surface, 204 cylindrical mirror, 205 bonding interface, 206 code wheel, 207 code wheel 0-0' marking line surface, 301 cylindrical mirror, 302 upper cover plate, 303 code wheel adjusting screw, 304 integrated base, 305 code wheel, 306 cylindrical mirror adjusting screw, 307 backing strip, 308 pressure angle, 309 upper bracket screw, 310 spring, 401 code wheel 0-0' marking line, 402 microscopic parting line, 501 cylindrical mirror light gap, 502 microscopic parting line.
Detailed Description
The invention is further illustrated by the following examples.
As shown in FIG. 1, the invention provides a cylindrical mirror and coded disc glass aligning and bonding device based on non-coplanar mark lines, wherein the non-coplanar mark lines are respectively an optical slit of a cylindrical mirror and a 0-0' mark line of a coded disc, and the device comprises a two-dimensional moving platform 101, a coded disc cylindrical mirror bonding mold 102, a micro-optical system 103, a CCD camera 104, a computer 105, a stand column 106 and a base 107;
taking the upper surface of the base 107 as an XOY plane of a measurement system coordinate system, taking a coordinate axis perpendicular to the XOY plane as a Z axis of the measurement coordinate system, and enabling the two-dimensional moving platform 101 on the upper surface of the base 107 to move along the X axis direction and the Y axis direction of the measurement system coordinate system; the code wheel cylindrical mirror bonding die 102 is positioned on the two-dimensional moving platform 101, is used for stacking the code wheel and the cylindrical mirror, and can adjust the position of the code wheel or the cylindrical mirror relative to the two-dimensional moving platform along the X-axis direction and the Y-axis direction of a measuring system coordinate system; the upright column 106 is vertically arranged on a base 107, the microscope optical system 103 and the CCD camera 104 are arranged on the base 107, the microscope optical system 103 is used for imaging the stacked code disc and the cylindrical mirror, and the lens of the CCD camera 104 is aligned with the ocular lens of the microscope optical system and is used for performing photoelectric conversion on the image formed by the microscope optical system and uploading the image to a computer.
As shown in FIG. 2(a), code wheel 0-0' mark lines 201 are symmetrically distributed at both ends of the part.
As shown in fig. 2(b), the cylindrical optical slit 202 is located at the center of the part and is as long as the part.
As shown in FIG. 2(c), the cylindrical mirror 204 and the code wheel 206 are bonded into a whole by silicon rubber at a bonding interface 205, and a plane 203 of the cylindrical mirror light slit and a plane 207 of the code wheel 0-0' marking line are parallel to each other.
As shown in fig. 3, the code wheel cylindrical mirror bonding mold 102 includes an integrated base 304, an upper bracket 302, 4 code wheel adjusting screws 303, 4 cylindrical mirror adjusting screws 306, 2 shim bars 307, 4 press angles 308, 4 upper bracket screws 309, and 4 springs 310;
the center of the integrated base 304 is provided with a groove structure for placing a coded disc, the surface of a 0-0' marking line of the coded disc faces downwards, the side wall of the groove, which is vertical to an XOY plane, is provided with 8 through holes, 4 through holes are respectively arranged below and above the groove, wherein 2 through holes are respectively arranged above and below the groove along the positive direction of a Y axis, two through holes are respectively arranged above and below the groove along the negative direction of the Y axis, 4 coded disc adjusting screws 303 are respectively screwed into four through holes below, and 4 cylindrical mirror adjusting screws 306 are respectively screwed into the 4 through holes above; the position of the code wheel along the Y direction is adjusted by rotating the code wheel adjusting screw 303, and the code wheel adjusting screw 303 and the code wheel 305 are protected by a gasket 307 made of polytetrafluoroethylene, so that the code wheel 305 made of glass is prevented from being damaged by the code wheel adjusting screw 303 made of metal; a cylindrical mirror is arranged on the coded disc, the surface of the cylindrical mirror light slit is in contact with the coded disc glass, and the upper bracket 302 is used for pressing the cylindrical mirror on the coded disc; the bottom surface of the integrated base 304 is provided with 4 through holes, each upper bracket screw 309 is matched with a spring 310 one by one and sequentially passes through the through holes and the pressing angles 308, and the upper bracket 302, the cylindrical mirror 301, the coded disc 305 and the integrated base 304 are fixed; the elastic force values of the 4 springs 309 are equal, so that the cylindrical mirror 301 is ensured to be uniformly stressed; the cylindrical mirror adjusting screw 306 passes through the integrated base side wall to contact with the upper bracket 302, and the position of the cylindrical mirror along the Y direction is adjusted by rotating the cylindrical mirror adjusting screw 306. The filler strip is made of polytetrafluoroethylene.
The upper bracket 302 is equal to the cylindrical mirror in length, and the contact part with the cambered surface of the cylindrical mirror adopts a V-shaped groove design; the included angle of two sides of the V-shaped groove is 90 degrees, the depth is the arc height of the cylindrical mirror, and the pressure of the pressing angle on the upper cover plate is uniformly transmitted along the radial direction of the cylindrical mirror, so that the automatic centering effect is achieved, and the parallel relation between the plane of the cylindrical mirror and the upper surface of the coded disc is ensured.
Based on the device, the invention also provides a non-coplanar marking line-based cylindrical mirror and coded disc glass alignment bonding method, which is used for solving the alignment problem of the marking lines positioned on different planes among optical parts. The method is simple and visual in process operation, can effectively improve the primary qualified rate and the working efficiency, and specifically comprises the following steps:
(1) placing the code disc into a code disc cylindrical mirror bonding die, and uniformly coating silicon rubber on the plane of the cylindrical mirror by using a stirring rod, wherein the thickness of a rubber layer is required to be as thin and uniform as possible;
before the code disc is placed in the code disc cylindrical mirror bonding mould, the bonding surfaces of the code disc and the cylindrical mirror are wiped clean by using acetone cotton balls.
(2) Placing the cylindrical lens on the bonding surface of the coded disc, repeatedly and lightly pushing the cylindrical lens back and forth along the directions of +/-X and +/-Y (generally pushing for 3-4 times) to remove bubbles and redundant silicon rubber, observing whether air lines exist in the optical seam of the cylindrical lens by naked eyes, if the air lines exist, repeatedly and lightly pushing the cylindrical lens again, and pressing the upper cover plate of the V-shaped groove after confirming the air lines exist;
(3) placing the assembled code wheel cylindrical mirror bonding mould on a two-dimensional moving platform, adjusting the position of the two-dimensional moving platform, and aligning the division line of the micro optical system and the optical seam of the cylindrical mirror in a line-clamping alignment manner by adjusting a cylindrical mirror adjusting screw 306 of the code wheel cylindrical mirror bonding mould to lock the two-dimensional moving platform;
the specific alignment steps of the code wheel 0-0' marking line and the microscopic optical system division line in a cross line alignment mode are as follows:
(3.1) placing the coded disc cylindrical mirror bonding mould on a two-dimensional moving platform, adjusting an X, Y, Z three-direction knob of the universal tool microscope, adjusting a focal plane of a microscopic optical system to a cylindrical mirror and X-direction light seam position until the imaging of the edge of the light seam is clearest, and locking a three-direction coarse adjusting knob of the universal tool microscope;
(3.2) adjusting a fine adjustment knob of the two-dimensional platform along the Y direction of the coordinate system of the measuring system, and adjusting the division line of the microscopic optical system to the center of the optical seam of the cylindrical mirror;
and (3.3) unlocking the coarse adjustment knob along the X direction of the coordinate system of the measurement system, translating the two-dimensional platform, adjusting the focal plane of the microscopic optical system to the position of the cylindrical mirror-X direction light seam, locking the coarse adjustment knob along the three directions, adjusting the fine adjustment knob of the two-dimensional platform along the Y direction of the coordinate system of the measurement system, and adjusting the division line of the microscopic optical system to the center of the cylindrical mirror light seam.
(4) Adjusting the focal length of the micro-optical system, and aligning and fixing a 0-0' mark line of the code wheel with a division line of the micro-optical system in a cross line alignment manner by adjusting a code wheel adjusting screw 303 of a code wheel cylindrical mirror bonding mould;
the code wheel 0-0' marking line and the division line of the micro optical system are aligned in a cross line alignment mode, namely:
the method comprises the following specific steps:
(4.1) unlocking the upright column to coarsely adjust the knob along the Z direction of the coordinate system of the measuring system, and adjusting the focal plane of the micro-optical system to the position of the 0-0' line on the left side of the code disc to the clearest image from the edge of the mark line;
(4.2) adjusting a code wheel adjusting screw 303 on the code wheel cylindrical mirror bonding die, and adjusting the center of the division line aligned with the center of the cylindrical mirror and the center of the 0-0' marking line of the code wheel to be coincident;
and (4.3) unlocking the translational two-dimensional platform, translating the two-dimensional platform along the rough adjusting knob in the X direction of the coordinate system of the measuring system, adjusting the focal plane of the microscopic optical system to the position of the 0-0 'line on the right side of the code wheel, locking the three-direction rough adjusting knob, and adjusting the division line of the microscopic optical system and the center of the 0-0' mark line of the code wheel to be coincident.
(5) And (3) adjusting the focal length of the microscopic optical system, confirming whether the division line of the microscopic optical system is aligned with the center of the cylindrical mirror light slit, if not, repeating the step (3) and the step (4) until the division line of the microscopic optical system is overlapped with the center of the cylindrical mirror light slit and the center of the 0-0' marking line of the code wheel, and if so, ending the process in the state shown in figure 4 and figure 5.
(6) And after standing for a period of time, checking whether the division line 402 of the microscopic optical system, the center of the 0-0' marking line of the code disc and the center of the cylindrical mirror light seam coincide or not again, and if the positions of the division line 402 of the microscopic optical system, the center of the 0-0' marking line of the code disc and the center of the cylindrical mirror light seam are deviated, adjusting by a fine adjustment knob of the bonding tool until the division line 402 of the microscopic optical system, the center of the 0-0' marking line of the code. The period of time is not less than 10 minutes.
Although the present invention has been described with reference to the preferred embodiments, it is not intended to limit the present invention, and those skilled in the art can make variations and modifications of the present invention without departing from the spirit and scope of the present invention by using the methods and technical contents disclosed above.

Claims (9)

1. A non-coplanar marking line-based cylindrical mirror and coded disc glass bonding device is characterized by comprising a two-dimensional moving platform (101), a coded disc cylindrical mirror bonding mold (102), a micro optical system (103), a CCD camera (104), a computer (105), a stand column (106) and a base (107);
the upper surface of the base (107) is taken as an XOY plane of a measuring system coordinate system, a coordinate axis perpendicular to the XOY plane is taken as a Z axis of the measuring system coordinate system, and the two-dimensional moving platform (101) is positioned on the upper surface of the base (107) and can move along the X axis direction and the Y direction of the measuring system coordinate system; the code wheel cylindrical mirror bonding die (102) is positioned on the two-dimensional moving platform (101) and used for stacking the code wheel and the cylindrical mirror, and the position of the code wheel or the cylindrical mirror relative to the two-dimensional moving platform can be adjusted along the X-axis direction and the Y-axis direction of a measuring system coordinate system; the upright post (106) is vertically arranged on the base (107), the microscopic optical system (103) and the CCD camera (104) are arranged on the upright post (106), the microscopic optical system (103) is used for imaging the stacked code disc and the cylindrical mirror, and the lens of the CCD camera (104) is aligned with the eyepiece of the microscopic optical system and used for performing photoelectric conversion on the image formed by the microscopic optical system and uploading the image to the computer.
2. The non-coplanar marking line-based cylindrical mirror and coded disc glass bonding device as claimed in claim 1, characterized in that the coded disc cylindrical mirror bonding mold (102) comprises an integrated base (304), an upper bracket (302), 4 coded disc adjusting screws (303), 4 cylindrical mirror adjusting screws (306), 2 filler strips (307), 4 pressing angles (308), 4 upper bracket screws (309), 4 springs (310);
a groove structure is arranged in the center of the integrated base (304) and used for placing a coded disc, the surface of a 0-0' marking line of the coded disc faces downwards, 8 through holes are arranged on the side wall, perpendicular to an XOY plane, of the groove, 4 through holes are arranged below and above the groove, 2 through holes are arranged above and below the groove along the positive direction of a Y axis, 2 through holes are arranged above and below the groove along the negative direction of the Y axis, 4 coded disc adjusting screws (303) are screwed into four through holes below the groove, and 4 cylindrical lens adjusting screws (306) are screwed into the 4 through holes above; the position of the code wheel along the Y direction is adjusted by rotating the code wheel adjusting screw (303), and the code wheel adjusting screw (303) and the code wheel (305) are protected by a cushion strip (307), so that the code wheel (305) made of glass is prevented from being damaged by the code wheel adjusting screw (303) made of metal; a cylindrical mirror is arranged on the coded disc, the surface of the cylindrical mirror light slit is in contact with the coded disc glass, and an upper bracket (302) is used for pressing the cylindrical mirror on the coded disc; the bottom surface of the integrated base (304) is provided with 4 through holes, each upper support screw (309) is matched with the spring (310) one by one, and penetrates through the through holes and the pressing angles (308) in sequence to fix the upper support (302), the cylindrical mirror (301), the coded disc (305) and the integrated base (304); the elastic force values of the 4 springs (310) are equal, so that the cylindrical mirror (301) is ensured to be uniformly stressed; the cylindrical mirror adjusting screw (306) penetrates through the side wall of the integrated base to be in contact with the upper support (302), and the position of the cylindrical mirror along the Y direction is adjusted by rotating the cylindrical mirror adjusting screw (306).
3. The cylindrical mirror and coded disc glass bonding device based on the non-coplanar marking line as claimed in claim 2, wherein the backing strip (307) is made of polytetrafluoroethylene.
4. The device for aligning and bonding the cylindrical mirror and the coded disc glass based on the non-coplanar marking line is characterized in that the upper bracket (302) is as long as the cylindrical mirror, and a V-shaped groove design is adopted at the contact part with the cambered surface of the cylindrical mirror; the included angle of two sides of the V-shaped groove is 90 degrees, the depth is the arc height of the cylindrical mirror, and the pressure of the pressing angle on the upper cover plate is uniformly transmitted along the radial direction of the cylindrical mirror, so that the automatic centering effect is achieved, and the parallel relation between the plane of the cylindrical mirror and the upper surface of the coded disc is ensured.
5. The method for bonding the cylindrical mirror and the coded disc glass based on the non-coplanar marking line by using the device as claimed in claim 1 is characterized by comprising the following steps:
(1) placing the coded disc into a coded disc cylindrical mirror bonding die, and uniformly coating silicon rubber on the plane of the cylindrical mirror;
(2) placing the cylindrical lens on the bonding surface of the coded disc, and repeatedly and lightly pushing back and forth along the +/-X and +/-Y directions respectively to remove bubbles, and pressing the upper cover plate of the V-shaped groove tightly after confirming that no air line exists;
(3) placing the assembled code wheel cylindrical mirror bonding mould on a two-dimensional moving platform, adjusting the position of the two-dimensional moving platform, and aligning the division line of the microscopic optical system and the optical seam of the cylindrical mirror in a line-clamping alignment manner by adjusting a cylindrical mirror adjusting screw (306) of the code wheel cylindrical mirror bonding mould to lock the two-dimensional moving platform;
(4) adjusting the focal length of the micro-optical system, and aligning and fixing a 0-0' marking line of the code wheel with a division line of the micro-optical system in a cross line alignment manner by adjusting a code wheel adjusting screw (303) of a code wheel cylindrical mirror bonding mould;
(5) and (3) adjusting the focal length of the microscopic optical system, confirming whether the division line of the microscopic optical system is aligned with the center of the cylindrical mirror light slit, if not, repeating the step (3) and the step (4) until the division line of the microscopic optical system is overlapped with the center of the cylindrical mirror light slit and the center of the 0-0' mark line of the code wheel, and if not, finishing.
6. The method for bonding the cylindrical mirror and the coded disc glass based on the non-coplanar marking line as claimed in claim 5, wherein the specific steps of aligning the 0-0' marking line of the coded disc and the division line of the micro optical system in a manner of cross line alignment are as follows:
(3.1) adjusting the focal plane of the microscopic optical system to the position of the cylindrical mirror and the light seam in the X direction until the imaging of the edge of the light seam is clearest, and locking a three-direction coarse adjusting knob of the universal tool microscope;
(3.2) adjusting a fine adjustment knob of the two-dimensional platform along the Y direction of the coordinate system of the measuring system, and adjusting the division line of the microscopic optical system to the center of the optical seam of the cylindrical mirror;
and (3.3) unlocking the coarse adjustment knob along the X direction of the coordinate system of the measurement system, translating the two-dimensional platform, adjusting the focal plane of the microscopic optical system to the position of the cylindrical mirror-X direction light seam, locking the coarse adjustment knob along the three directions, adjusting the fine adjustment knob of the two-dimensional platform along the Y direction of the coordinate system of the measurement system, and adjusting the division line of the microscopic optical system to the center of the cylindrical mirror light seam.
7. The method for bonding the cylindrical mirror and the coded disc glass based on the non-coplanar marking line as claimed in claim 5, wherein the specific steps of aligning the 0-0' marking line of the coded disc and the division line of the micro optical system in a cross-line alignment mode are as follows:
(4.1) unlocking the upright column to coarsely adjust the knob along the Z direction of the coordinate system of the measuring system, and adjusting the focal plane of the micro-optical system to the position of the 0-0' line on the left side of the code disc to the clearest image from the edge of the mark line;
(4.2) adjusting a code wheel adjusting screw (303) on the code wheel cylindrical mirror bonding die, and adjusting the center of the division line aligned with the center of the cylindrical mirror and the center of the 0-0' marking line of the code wheel to be coincident;
and (4.3) unlocking the translational two-dimensional platform, translating the two-dimensional platform along the rough adjusting knob in the X direction of the coordinate system of the measuring system, adjusting the focal plane of the microscopic optical system to the position of the 0-0 'line on the right side of the code wheel, locking the three-direction rough adjusting knob, and adjusting the division line of the microscopic optical system and the center of the 0-0' mark line of the code wheel to be coincident.
8. The method for bonding the cylindrical mirror and the coded disc glass based on the non-coplanar marking line as claimed in claim 5, characterized by further comprising the following steps:
(6) and after standing for a period of time, checking whether the division line (402) of the microscopic optical system, the center of the 0-0' marking line of the code disc and the center of the cylindrical mirror light seam coincide or not again, and if the positions of the division line (402), the center of the 0-0' marking line of the code disc and the center of the cylindrical mirror light seam are deviated, adjusting by a fine adjustment knob of the bonding tool until the division line (402), the center of the 0-0' marking line of the code disc and the center of the cylindrical mirror.
9. The method for bonding the cylindrical mirror and the coded disc glass based on the non-coplanar mark lines as claimed in claim 8, wherein the period of time is not less than 10 minutes.
CN202010790094.2A 2020-08-07 2020-08-07 Cylindrical mirror and coded disc glass bonding device and method based on non-coplanar marking lines Active CN112034579B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202010790094.2A CN112034579B (en) 2020-08-07 2020-08-07 Cylindrical mirror and coded disc glass bonding device and method based on non-coplanar marking lines

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202010790094.2A CN112034579B (en) 2020-08-07 2020-08-07 Cylindrical mirror and coded disc glass bonding device and method based on non-coplanar marking lines

Publications (2)

Publication Number Publication Date
CN112034579A true CN112034579A (en) 2020-12-04
CN112034579B CN112034579B (en) 2022-05-24

Family

ID=73582781

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202010790094.2A Active CN112034579B (en) 2020-08-07 2020-08-07 Cylindrical mirror and coded disc glass bonding device and method based on non-coplanar marking lines

Country Status (1)

Country Link
CN (1) CN112034579B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112781841A (en) * 2020-12-30 2021-05-11 中国科学院西安光学精密机械研究所 Imaging sensor image plane parallelism debugging system and method based on microscopic measurement

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05196422A (en) * 1991-03-02 1993-08-06 Tokyo Inst Of Technol Method and device for detecting position of z coordinate of non-contact type three-dimensional coordinate detection device
JP2002098877A (en) * 2000-09-25 2002-04-05 Matsushita Electric Ind Co Ltd Lens aligning method and bonding device
CN103529557A (en) * 2013-10-21 2014-01-22 中国科学院西安光学精密机械研究所 Cylindrical mirror assembly gluing equipment and method
CN104535052A (en) * 2014-12-11 2015-04-22 武汉光迅科技股份有限公司 Lens array and PD array high-precision alignment mounting device and alignment method thereof
CN109283648A (en) * 2017-07-23 2019-01-29 北京遥感设备研究所 A kind of ccd detector positioning bonding device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05196422A (en) * 1991-03-02 1993-08-06 Tokyo Inst Of Technol Method and device for detecting position of z coordinate of non-contact type three-dimensional coordinate detection device
JP2002098877A (en) * 2000-09-25 2002-04-05 Matsushita Electric Ind Co Ltd Lens aligning method and bonding device
CN103529557A (en) * 2013-10-21 2014-01-22 中国科学院西安光学精密机械研究所 Cylindrical mirror assembly gluing equipment and method
CN104535052A (en) * 2014-12-11 2015-04-22 武汉光迅科技股份有限公司 Lens array and PD array high-precision alignment mounting device and alignment method thereof
CN109283648A (en) * 2017-07-23 2019-01-29 北京遥感设备研究所 A kind of ccd detector positioning bonding device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112781841A (en) * 2020-12-30 2021-05-11 中国科学院西安光学精密机械研究所 Imaging sensor image plane parallelism debugging system and method based on microscopic measurement

Also Published As

Publication number Publication date
CN112034579B (en) 2022-05-24

Similar Documents

Publication Publication Date Title
JP5586580B2 (en) Apparatus and method for semiconductor wafer alignment
WO2016090661A1 (en) Lens array and pd array high-precision alignment mounting device and alignment method therefor
TW528881B (en) Position measuring apparatus
JP7177781B2 (en) Method for bonding at least three substrates
US10668678B2 (en) Die tool, device and method for producing a lens wafer
CN112034579B (en) Cylindrical mirror and coded disc glass bonding device and method based on non-coplanar marking lines
US5103257A (en) Process for producing or inspecting micropatterns on large-area substrates
CN102279532B (en) Device for assembling and regulating lens of projection objective of lithography machine
WO2016010058A1 (en) Lens fixing device, adjustment method for lens fixing device, and lens fixing method
CN114905247A (en) Upper and lower lens base assembling equipment for high-precision optical lens
KR20210139159A (en) System and method for aligning multiple lens elements
US9817216B2 (en) Method and device for producing a plurality of microlenses
CN116430542A (en) Bonding device and bonding method for 45-degree angle bonding of plane reflecting mirror
JPH09148207A (en) Stacking device for three-dimensional lsi
CN214308622U (en) High-precision supporting device and system for film thickness measuring optical machine
TWM485590U (en) Nanometer optical alignment and imprint leveling device
CN117148533A (en) Method for installing and adjusting light collection system
CN112368127B (en) Method for controlling size in projection micro-stereolithography
US20220412795A1 (en) Sensor Arrangement
CN117471634A (en) High-precision assembly method of focal plane spectroscope
CN115223909A (en) Adjusting tool for bonding large-area array chip
CN117656016A (en) Film jig and application method thereof
JPS6050921A (en) Up-down driving device
CN111965779A (en) Scanning type large-area array micro-lens array structure convenient to align
JPS6263426A (en) Exposure system

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant