CN112034005B - 一种旁热式硅基薄膜催化氢气传感器及其加工方法 - Google Patents

一种旁热式硅基薄膜催化氢气传感器及其加工方法 Download PDF

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CN112034005B
CN112034005B CN202010936802.9A CN202010936802A CN112034005B CN 112034005 B CN112034005 B CN 112034005B CN 202010936802 A CN202010936802 A CN 202010936802A CN 112034005 B CN112034005 B CN 112034005B
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thin film
heating coil
layer
silicon
catalytic
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CN112034005A (zh
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沈方平
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Suzhou Xinmagnesium Electronic Technology Co ltd
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Suzhou Xinmagnesium Electronic Technology Co ltd
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Priority to CN202010936802.9A priority Critical patent/CN112034005B/zh
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Priority to PCT/CN2021/070618 priority patent/WO2022052392A1/fr
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00—Investigating or analyzing materials by the use of thermal means
    • G01N25/20—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity
    • G01N25/22—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on combustion or catalytic oxidation, e.g. of components of gas mixtures
    • G01N25/28—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on combustion or catalytic oxidation, e.g. of components of gas mixtures the rise in temperature of the gases resulting from combustion being measured directly
    • G01N25/30—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on combustion or catalytic oxidation, e.g. of components of gas mixtures the rise in temperature of the gases resulting from combustion being measured directly using electric temperature-responsive elements
    • G01N25/32—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on combustion or catalytic oxidation, e.g. of components of gas mixtures the rise in temperature of the gases resulting from combustion being measured directly using electric temperature-responsive elements using thermoelectric elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/14—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature
    • G01N27/16—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature caused by burning or catalytic oxidation of surrounding material to be tested, e.g. of gas

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Combustion & Propulsion (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Molecular Biology (AREA)
  • Electrochemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
CN202010936802.9A 2020-09-08 2020-09-08 一种旁热式硅基薄膜催化氢气传感器及其加工方法 Active CN112034005B (zh)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN202010936802.9A CN112034005B (zh) 2020-09-08 2020-09-08 一种旁热式硅基薄膜催化氢气传感器及其加工方法
PCT/CN2021/070618 WO2022052392A1 (fr) 2020-09-08 2021-01-07 Capteur d'hydrogène catalytique à film mince à base de silicium de type à chauffage latéral et procédé de traitement associé

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CN202010936802.9A CN112034005B (zh) 2020-09-08 2020-09-08 一种旁热式硅基薄膜催化氢气传感器及其加工方法

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CN112034005B true CN112034005B (zh) 2022-05-10

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WO (1) WO2022052392A1 (fr)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112034005B (zh) * 2020-09-08 2022-05-10 苏州芯镁信电子科技有限公司 一种旁热式硅基薄膜催化氢气传感器及其加工方法
CN112763660B (zh) * 2020-12-28 2022-01-04 苏州芯镁信电子科技有限公司 一种钯薄膜氢气传感器
CN113970613B (zh) * 2021-09-15 2023-03-14 苏州芯镁信电子科技有限公司 一种氢气传感器及其制备方法

Family Cites Families (15)

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CN1212514C (zh) * 2002-09-18 2005-07-27 中国科学院大连化学物理研究所 一种在线微量氧含量测量方法及专用传感器
KR101504943B1 (ko) * 2008-09-01 2015-03-24 재단법인 포항산업과학연구원 접촉 연소식 수소센서 및 그 제조방법
WO2010084916A1 (fr) * 2009-01-21 2010-07-29 北陸電気工業株式会社 Corps d'embase pour détecteur de gaz et procédé de fabrication du corps d'embase
JP6467173B2 (ja) * 2014-09-16 2019-02-06 ヤマハファインテック株式会社 接触燃焼式ガスセンサ
CN104316575B (zh) * 2014-10-31 2017-05-31 中国矿业大学 全硅mems甲烷传感器及瓦斯检测应用和制备方法
CN106629575B (zh) * 2016-10-14 2018-02-13 中国科学院上海微系统与信息技术研究所 旁热式微传感器及其制造方法
JP7187139B2 (ja) * 2017-07-03 2022-12-12 新コスモス電機株式会社 接触燃焼式ガスセンサ
CN107703189A (zh) * 2017-10-14 2018-02-16 郑州炜盛电子科技有限公司 Mems气敏元件及模组的陶瓷封装
CN108275649B (zh) * 2018-03-16 2023-06-23 苏州芯镁信电子科技有限公司 一种mems可燃气体传感器及其加工方法
CN207957757U (zh) * 2018-03-16 2018-10-12 苏州钽氪电子科技有限公司 一种mems可燃气体传感器
CN108313972B (zh) * 2018-03-16 2024-03-08 苏州芯镁信电子科技有限公司 一种氢气传感器及其加工方法和用途
CN110794023B (zh) * 2019-11-07 2021-12-14 中国电子科技集团公司第四十九研究所 一种带有陶瓷加热器结构的分压型氧传感器及其制备方法
CN110865100A (zh) * 2019-12-18 2020-03-06 中国电子科技集团公司第四十九研究所 片式结构一体化催化燃烧式可燃气体传感器及其制备方法
CN111443114A (zh) * 2020-04-20 2020-07-24 江苏集萃智能集成电路设计技术研究所有限公司 催化式气体传感元件、加工方法和催化式气体传感器
CN112034005B (zh) * 2020-09-08 2022-05-10 苏州芯镁信电子科技有限公司 一种旁热式硅基薄膜催化氢气传感器及其加工方法

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CN112034005A (zh) 2020-12-04

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