CN112000138B - Gas mass flow controller - Google Patents
Gas mass flow controller Download PDFInfo
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- CN112000138B CN112000138B CN202010900168.3A CN202010900168A CN112000138B CN 112000138 B CN112000138 B CN 112000138B CN 202010900168 A CN202010900168 A CN 202010900168A CN 112000138 B CN112000138 B CN 112000138B
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- 238000000034 method Methods 0.000 claims abstract description 79
- 238000001514 detection method Methods 0.000 claims abstract description 31
- 230000001105 regulatory effect Effects 0.000 claims abstract description 25
- 230000001276 controlling effect Effects 0.000 claims abstract description 7
- 230000003993 interaction Effects 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 115
- 239000000110 cooling liquid Substances 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 3
- 238000004891 communication Methods 0.000 description 2
- 238000012937 correction Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000112 cooling gas Substances 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000011143 downstream manufacturing Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000003208 petroleum Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
- G01F1/86—Indirect mass flowmeters, e.g. measuring volume flow and density, temperature or pressure
Abstract
The embodiment of the invention provides a gas mass flow controller which is used for detecting the flow of gas flowing through a process chamber and comprises a flow detection module, a flow regulation module and a control module which are mutually independent, wherein the flow detection module is arranged at the air inlet end of the process chamber and is used for detecting the flow value of the gas at the air inlet end of the process chamber and sending the flow value to the control module; the flow regulating module is arranged at the air outlet end of the process chamber and used for regulating the air flow at the air outlet end of the process chamber; the control module is used for controlling the flow regulating module to regulate the gas flow of the gas outlet end of the process chamber according to the gas flow value and the flow set value detected by the flow detecting module so that the gas flow flowing through the process chamber is equal to the flow set value. The gas mass flow controller provided by the embodiment of the invention not only can improve the control precision, but also can ensure the flow precision of temperature-sensitive gas, and is convenient to assemble, disassemble and maintain.
Description
Technical Field
The invention relates to the technical field of gas mass flow control, in particular to a gas mass flow controller.
Background
The mass flow controller (Mass Flow Controller, hereinafter referred to as MFC) is used for precisely controlling the mass flow of gas, and has important applications in the scientific research and production of various fields such as semiconductor and integrated circuit industry, specialty materials science, chemical industry, petroleum industry, medicine, environmental protection, and vacuum.
At present, in the aspect of temperature-sensitive gas control, the temperature-sensitive gas is easy to decompose at normal temperature, or the decomposition rate of the gas is greatly changed under the condition of slightly changing the temperature, so that the temperature-sensitive gas is extremely unstable. When the existing thermal type MFC is used for controlling the flow of the temperature-sensitive gas, the flow regulating valve can continuously release heat during operation, and the released heat can often influence the stability of the temperature-sensitive gas; at the same time, it can interfere with the performance of the thermal MFC itself.
For the above reasons, current thermal MFCs cannot precisely measure and control these temperature sensitive gases, making related processes impractical.
Disclosure of Invention
The embodiment of the invention aims at solving at least one of the technical problems in the prior art, and provides a gas mass flow controller which can improve the control precision, particularly ensure the flow precision of temperature-sensitive gas and is convenient to assemble, disassemble and maintain.
In order to achieve the above object, an embodiment of the present invention provides a gas mass flow controller for detecting a flow rate of a gas flowing through a process chamber, including a flow rate detection module and a flow rate adjustment module that are independent of each other, and a control module, where the flow rate detection module is disposed at an air inlet end of the process chamber, and is configured to detect a value of the flow rate of the gas at the air inlet end of the process chamber, and send the value to the control module;
the flow regulating module is arranged at the air outlet end of the process chamber and is used for regulating the air flow at the air outlet end of the process chamber;
the control module is used for controlling the flow regulating module to regulate the gas flow of the gas outlet end of the process chamber according to the gas flow value and the flow set value detected by the flow detecting module so as to enable the gas flow flowing through the process chamber to be equal to the flow set value.
Optionally, the gas mass flow controller further comprises a temperature adjustment module detachably disposed near the flow adjustment module for adjusting the temperature of the flow adjustment module.
Optionally, the temperature adjusting module comprises a heat exchange chamber, and an inflow pipeline and an outflow pipeline which are respectively connected with an air inlet end and an air outlet end of the heat exchange chamber, wherein the heat exchange chamber is arranged at a position close to the flow adjusting module and is used for exchanging heat with the flow adjusting module; the inflow pipeline is used for conveying heat exchange media into the heat exchange chamber; the outflow line is for outputting the heat exchange medium in the heat exchange chamber.
Optionally, the flow regulating module comprises a first base and a flow regulating valve arranged on the first base; a first base channel is arranged in the first base, and the first base channel is connected with the air outlet end of the process chamber;
the flow regulating valve is used for regulating the gas flow in the first base channel.
Optionally, the gas mass flow controller further comprises a connection cable, and two ends of the connection cable are respectively and electrically connected with the control module and the flow regulating valve for data interaction.
Optionally, the flow detection module includes a second base and a channel structure disposed in the second base, the channel structure is connected with an air inlet end of the process chamber, and a thermal flow sensor is disposed in the second base, and the thermal flow sensor is connected with the channel structure, and is used for detecting a gas flow value at the air inlet end of the process chamber and sending the gas flow value to the control module.
Optionally, the channel structure includes an air inlet channel, a detection channel, a diversion channel and an air outlet channel which are sequentially connected in series along the air flow direction, wherein the thermal flow sensor is connected with the diversion channel;
and a pressure sensor is further arranged in the second base and connected with the detection channel for detecting the pressure value of the gas in the detection channel.
Optionally, a temperature sensor is disposed in the second base and near the thermal flow sensor, so as to detect an ambient temperature value around the thermal flow sensor, and send the ambient temperature value to the control module.
Optionally, the control module includes a microcontroller.
Optionally, the flow regulating module is disposed between the gas outlet end and the gas inlet end of two adjacent process chambers, and is used for regulating the flow of gas flowing through the two adjacent process chambers.
The embodiment of the invention has the beneficial effects that:
the flow detection module and the flow regulation module of the gas mass flow controller provided by the embodiment of the invention are mutually independent and are respectively arranged at the air inlet end and the air outlet end of the process chamber, namely, the flow detection module and the flow regulation module are in a separated design, so that the influence on the stability of temperature-sensitive gas caused by heat release of the flow regulation module in work and the interference on the performance of the thermal type MFC can be avoided, the control precision can be improved, and the flow precision of the temperature-sensitive gas can be particularly ensured; meanwhile, the separated flow detection module and the flow regulation module provide convenience for disassembly, assembly and maintenance.
Drawings
FIG. 1 is a block diagram of a conventional gas mass flow controller;
FIG. 2 is a schematic block diagram of a gas mass flow controller provided in an embodiment of the present invention;
FIG. 3 is a block diagram of a gas mass flow controller according to an embodiment of the present invention.
Detailed Description
In order to better understand the technical solutions of the present invention, the following describes in detail the gas mass flow controller provided by the embodiments of the present invention with reference to the accompanying drawings.
Fig. 1 shows a structure of a conventional gas mass flow controller (Mass Flow Controller, hereinafter referred to as MFC). As shown in fig. 1, the conventional MFC is a thermal MFC, which includes a base 1, a flow sensor 2, a circuit board 3, and a flow control valve 4. Wherein, flow sensor 2, circuit board 3 and flow control valve 4 are all installed on base 1, namely, adopt integral type structure. When such a thermal MFC is used to control the flow rate of the above temperature-sensitive gas, since the flow control valve 4 is mounted on the base 1, the heat continuously released by the flow control valve 4 itself during operation will directly act on the temperature-sensitive gas, which tends to affect the stability of the temperature-sensitive gas; meanwhile, because the distance between the flow sensor 2 and the flow control valve 4 is relatively short, the heat released by the flow control valve 4 during operation can also influence the measurement accuracy of the flow sensor 2 (thermal flow sensor), thereby causing interference on the performance of the thermal type MFC, failing to meet the process requirements, and being more inapplicable in process equipment requiring high-accuracy gas measurement.
In order to solve the above problems, referring to fig. 2, an embodiment of the present invention provides a gas mass flow controller 6 for detecting the flow of gas flowing through a process chamber 5. Since the interior of the process chamber 5 is usually airtight and has a back pressure sealing space, when the working state of the process chamber 5 is stable, the process chamber 5 is equivalent to a section of gas pipeline capable of flowing gas, and under the same condition, the gas flow rates at any positions in the pipeline are the same, so that the gas flow rates in the process chamber 5 and the gas inlet pipeline and the gas outlet pipeline (not shown in the figure) thereof are always the same.
Based on the above principle, the gas mass flow controller 6 includes a flow rate detection module 61 and a flow rate adjustment module 62, which are independent of each other, and a control module 63. The flow rate detection module 61 and the flow rate adjustment module 62 are independent from each other, specifically, they are separated from each other to form a split structure. Wherein the flow detection module 61 is disposed at the air inlet end of the process chamber 5, for example, disposed on the air inlet pipeline of the process chamber 5, and is configured to detect the air flow value at the air inlet end of the process chamber 5 and send the detected air flow value to the control module 63; the flow regulating module 62 is disposed at the gas outlet end of the process chamber 5, for example, disposed on the gas outlet pipe of the process chamber 5, and is used for regulating the gas flow at the gas outlet end of the process chamber 5; the control module 63 is configured to control the flow adjusting module 62 to adjust the gas flow at the gas outlet end of the process chamber 5 according to the gas flow value and the flow set value detected by the flow detecting module 61, so that the gas flow flowing through the process chamber 5 is equal to the flow set value.
Since the process chamber 5 is closed, the gas flow rates in the process chamber 5 and its inlet and outlet gas lines remain the same throughout, in which case, when the control module 63 controls the flow rate adjustment module 62 to adjust the gas flow rate in the outlet gas line (i.e. the outlet end of the process chamber 5), the gas flow rates flowing through the inlet gas line and the interior of the process chamber 5 will be changed accordingly, which is equivalent to adjusting the gas flow rates in the inlet gas line and the interior of the process chamber 5, thereby achieving the purpose of adjusting the gas flow rate flowing through the process chamber 5. Meanwhile, on the premise that the gas flow rates in the process chamber 5 and the gas inlet and outlet pipelines thereof are always kept the same, the detected gas flow rate value in the gas inlet pipeline (i.e., the gas inlet end of the process chamber 5) can be used as a basis for adjusting the gas flow rate in the gas outlet pipeline, so that even if the flow rate detection module 61 and the flow rate adjustment module 62 are independent of each other and are disposed at positions distant from each other, the flow rate control accuracy can be ensured. Moreover, by adopting a separated design of the flow detection module 61 and the flow regulation module 62, the influence on the stability of the temperature-sensitive gas caused by heat release of the flow regulation module 62 during operation and the interference on the performance of the thermal type MFC can be avoided, so that the control precision can be improved, and the flow precision of the temperature-sensitive gas can be ensured in particular; meanwhile, the separated flow detection module 61 and flow adjustment module 62 provide convenience for disassembly and maintenance.
In this embodiment, the gas mass flow controller 6 further includes a temperature adjustment module 7, the temperature adjustment module 7 being detachably disposed near the flow adjustment module 62 for adjusting the temperature of the flow adjustment module 62. In this way, the flow regulating module 62 itself may be further reduced from exothermically emitting heat during operation, which may affect the stability of the temperature sensitive gas.
The specific structure of the temperature adjustment module 7 may be various, for example, in this embodiment, the temperature adjustment module 7 includes a heat exchange chamber 71 and an inlet pipe and an outlet pipe (not shown) connected to the inlet end and the outlet end of the heat exchange chamber 71, where the heat exchange chamber 71 is disposed near the flow adjustment module 62 for exchanging heat with the flow adjustment module 62; the inflow line is used for conveying heat exchange medium into the heat exchange chamber 71; the outflow line is used for outputting the heat exchange medium in the heat exchange chamber 71. The heat exchange medium is, for example, a cooling liquid or a cooling gas, wherein the cooling liquid is, for example, cooling water or a cooling liquid.
When the heat exchange medium circulates in the heat exchange chamber 71, it cools the flow rate adjustment module 62 by exchanging heat with the flow rate adjustment module 62 to reduce the heat emitted from the flow rate adjustment module 62 itself during operation, so that the stability of the temperature sensitive gas can be ensured not to be affected.
The specific structure of the flow rate adjustment module 62 may be various, for example, in the present embodiment, as shown in fig. 3, the flow rate adjustment module 62 includes a first base 621 and a flow rate adjustment valve 622 provided on the first base 621; wherein, a first base channel 621a is disposed in the first base 621, and the first base channel 621a is connected to the gas outlet end of the process chamber 5, for example, the first base channel 621a may be connected in series to the gas outlet pipe of the process chamber 5; the flow regulating valve 622 is used to regulate the flow of gas in the first base passage 621a to regulate the flow of gas at the outlet end of the process chamber 5, for example, in the outlet line of the process chamber 5.
Based on the structure of the flow rate adjustment module 62, the control module 63 is configured to adjust the gas flow rate at the gas outlet end of the process chamber 5 by controlling the opening of the flow rate control valve 62.
In addition, the gas mass flow controller 6 further comprises a connection cable 8, and two ends of the connection cable 8 are respectively and electrically connected with the control module 63 and the flow regulating valve 62 for data interaction. Of course, in practical application, other wired communication methods or wireless communication methods may also be used.
The flow detection module 61 may have various structures, for example, in this embodiment, as shown in fig. 2 and 3, the flow detection module 61 includes a second base 611 and a channel structure disposed in the second base 611, where the channel structure is connected to an air inlet end of the process chamber 5, for example, connected in series to an air inlet pipe of the process chamber 5, and a thermal flow sensor 612 is disposed in the second base 611, where the thermal flow sensor 612 is connected to the channel structure, and is configured to detect a flow value of gas flowing through the channel structure and send the flow value to the control module 63.
Further, as shown in fig. 3, the above-mentioned channel structure includes an inlet channel 615a, a detection channel 615b, a diverting channel 615c, and an outlet channel 615d, which are sequentially connected in series in the gas flow direction, wherein the thermal flow sensor 612 is connected to the diverting channel 615 c. As the gas flows through the diverting channel 615c, a majority of the gas flows through the diverting channel 615c and a minority of the gas passes through the capillaries of the thermal flow sensor 612 so that the thermal flow sensor 612 can detect and obtain an electrical signal related to the flow of the gas and send it to the control module 63.
In some embodiments, in order to increase the function of the gas mass flow controller and meet the requirements of the unused process, a pressure sensor 613 is further disposed in the second base 611, and the pressure sensor 613 is connected to the detection channel 615b, so as to detect the pressure value of the gas in the detection channel 615 b.
In some embodiments, to increase the functionality of the gas mass flow controller, to meet the unused process requirements, a temperature sensor 614 is disposed in the second base 611 and near the thermal flow sensor 612 to detect the ambient temperature value around the thermal flow sensor 612 and send it to the control module 63.
The control module 63 may calculate and calibrate the flow correction value according to the gas flow value detected by the thermal flow sensor 612 and with reference to the gas pressure value and/or the ambient temperature value, and output the flow correction value to the flow adjustment module 2, so as to control the flow adjustment module 62 to adjust the gas flow at the gas outlet end of the process chamber 5, so that the gas flow flowing through the process chamber 5 is equal to the flow set value.
In practice, the control module 62 comprises a microcontroller, as shown in fig. 3, which is integrated, for example, in the form of a chip on the circuit board 631. In the present embodiment, the circuit board 631 is mounted on the second base 611 described above, but the present embodiment is not limited thereto, and in practical applications, the circuit board 631 may be provided independently.
In addition, in practical applications, the flow rate adjustment module 62 may be further disposed between the gas outlet end and the gas inlet end of the two adjacent process chambers 5, for adjusting the flow rate of the gas flowing through the two adjacent process chambers 5. That is, when the gas mass flow controller 6 is applied to the two serially connected process chambers 5, the two process chambers 5 are serially connected as two sections of pipelines, and the flow adjusting module 62 is disposed between the gas outlet ends and the gas inlet ends of the two process chambers 5, so as to achieve the purpose of adjusting the gas flow rates of the gas outlet ends and the gas inlet ends of the two process chambers 5 at the same time, thereby controlling the gas flow rate value in the upstream process chamber 5 to be equal to the flow rate set value, and simultaneously enabling the gas flow rate to flow into the downstream process chamber 5 at the same gas flow rate value, so as to meet the requirement of the subsequent process.
In summary, in the gas mass flow controller provided by the embodiment of the invention, the flow detection module and the flow regulation module are mutually independent and are respectively arranged at the air inlet end and the air outlet end of the closed process chamber, namely, the flow detection module and the flow regulation module are in a separated design, so that the influence on the stability of temperature-sensitive gas caused by heat release of the flow regulation module in operation and the interference on the performance of the thermal type MFC can be avoided, the control precision can be improved, and the flow precision of the temperature-sensitive gas can be particularly ensured; meanwhile, the separated flow detection module and the flow regulation module provide convenience for disassembly, assembly and maintenance.
It is to be understood that the above embodiments are merely illustrative of the application of the principles of the present invention, but not in limitation thereof. Various modifications and improvements may be made by those skilled in the art without departing from the spirit and substance of the invention, and are also considered to be within the scope of the invention.
Claims (10)
1. A gas mass flow controller for detecting the flow of gas flowing through a process chamber, which is characterized by comprising a flow detection module, a flow regulation module and a control module which are mutually independent, wherein the flow detection module is arranged at the air inlet end of the process chamber and is used for detecting the flow value of the gas at the air inlet end of the process chamber and sending the flow value to the control module; the process chamber is closed so that the gas flow at the gas inlet end and the gas outlet end of the process chamber are always kept the same;
the flow regulating module is arranged at the air outlet end of the process chamber and is used for regulating the air flow at the air outlet end of the process chamber;
the control module is used for controlling the flow regulating module to regulate the gas flow of the gas outlet end of the process chamber according to the gas flow value and the flow set value detected by the flow detecting module so as to enable the gas flow flowing through the process chamber to be equal to the flow set value.
2. The gas mass flow controller of claim 1, further comprising a temperature adjustment module removably disposed proximate the flow adjustment module for adjusting the temperature of the flow adjustment module.
3. The gas mass flow controller of claim 2, wherein the temperature regulation module comprises a heat exchange chamber and an inlet line and an outlet line respectively connected to an inlet end and an outlet end of the heat exchange chamber, wherein the heat exchange chamber is disposed proximate to the flow regulation module for heat exchange with the flow regulation module; the inflow pipeline is used for conveying heat exchange media into the heat exchange chamber; the outflow line is for outputting the heat exchange medium in the heat exchange chamber.
4. A gas mass flow controller as claimed in any one of claims 1 to 3, wherein the flow regulation module comprises a first base and a flow regulation valve provided on the first base; a first base channel is arranged in the first base, and the first base channel is connected with the air outlet end of the process chamber;
the flow regulating valve is used for regulating the gas flow in the first base channel.
5. The gas mass flow controller of claim 4, further comprising a connecting cable having two ends electrically connected to the control module and the flow regulating valve, respectively, for data interaction.
6. The gas mass flow controller of claim 1, wherein the flow detection module comprises a second base and a channel structure disposed in the second base, the channel structure being connected to the inlet end of the process chamber, and a thermal flow sensor being disposed in the second base, the thermal flow sensor being connected to the channel structure for detecting a gas flow value at the inlet end of the process chamber and sending to the control module.
7. The gas mass flow controller of claim 6, wherein the channel structure comprises an inlet channel, a detection channel, a shunt channel, and an outlet channel connected in series in the gas flow direction, wherein the thermal flow sensor is connected to the shunt channel;
and a pressure sensor is further arranged in the second base and connected with the detection channel for detecting the pressure value of the gas in the detection channel.
8. A gas mass flow controller as claimed in claim 7, wherein a temperature sensor is provided in the second base adjacent the thermal flow sensor for detecting an ambient temperature value around the thermal flow sensor and sending it to the control module.
9. A gas mass flow controller as claimed in claim 1, wherein the control module comprises a microcontroller.
10. The gas mass flow controller of claim 1, wherein the flow adjustment module is disposed between the gas outlet and gas inlet ends of two adjacent process chambers for adjusting the flow of gas through the two adjacent process chambers.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202010900168.3A CN112000138B (en) | 2020-08-31 | 2020-08-31 | Gas mass flow controller |
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| CN202010900168.3A CN112000138B (en) | 2020-08-31 | 2020-08-31 | Gas mass flow controller |
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| CN112000138B true CN112000138B (en) | 2024-01-09 |
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| CN113721673A (en) * | 2021-08-31 | 2021-11-30 | 北京七星华创流量计有限公司 | Gas mass flow control method and device |
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