CN112000138A - Gas mass flow controller - Google Patents
Gas mass flow controller Download PDFInfo
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- CN112000138A CN112000138A CN202010900168.3A CN202010900168A CN112000138A CN 112000138 A CN112000138 A CN 112000138A CN 202010900168 A CN202010900168 A CN 202010900168A CN 112000138 A CN112000138 A CN 112000138A
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- 238000000034 method Methods 0.000 claims abstract description 78
- 230000008569 process Effects 0.000 claims abstract description 76
- 238000001514 detection method Methods 0.000 claims abstract description 31
- 230000001105 regulatory effect Effects 0.000 claims abstract description 29
- 230000001276 controlling effect Effects 0.000 claims abstract description 9
- 230000003993 interaction Effects 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 136
- 238000010586 diagram Methods 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 238000004891 communication Methods 0.000 description 2
- 239000000110 cooling liquid Substances 0.000 description 2
- 238000012937 correction Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 206010037660 Pyrexia Diseases 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000000112 cooling gas Substances 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000011143 downstream manufacturing Methods 0.000 description 1
- 229940079593 drug Drugs 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
- G01F1/86—Indirect mass flowmeters, e.g. measuring volume flow and density, temperature or pressure
Abstract
The embodiment of the invention provides a gas mass flow controller, which is used for detecting the flow of gas flowing through a process chamber and comprises a flow detection module, a flow regulation module and a control module which are mutually independent, wherein the flow detection module is arranged at the gas inlet end of the process chamber, is used for detecting the gas flow value at the gas inlet end of the process chamber and sends the gas flow value to the control module; the flow regulating module is arranged at the gas outlet end of the process chamber and is used for regulating the gas flow at the gas outlet end of the process chamber; the control module is used for controlling the flow regulating module to regulate the gas flow at the gas outlet end of the process chamber according to the gas flow value and the flow set value detected by the flow detecting module so as to enable the gas flow flowing through the process chamber to be equal to the flow set value. The gas mass flow controller provided by the embodiment of the invention can improve the control precision, especially can ensure the flow precision of temperature sensitive gas, and is convenient to disassemble, assemble and maintain.
Description
Technical Field
The invention relates to the technical field of gas mass flow control, in particular to a gas mass flow controller.
Background
Mass Flow controllers (Mass Flow controllers, hereinafter MFCs) are used for precisely controlling the Mass Flow of gas, and are used in scientific research and production in various fields such as semiconductor and integrated circuit industries, special material disciplines, chemical industries, petroleum industries, medicines, environmental protection, vacuum and the like.
At present, in some aspects of controlling temperature-sensitive gases, the temperature-sensitive gases are easily decomposed at normal temperature, or the decomposition rate of the gases is drastically changed under the condition of slight temperature change, and the types are extremely unstable. When the existing thermal MFC is used for controlling the flow of the temperature-sensitive gas, the flow regulating valve can continuously release heat during working, and the released heat often influences the stability of the temperature-sensitive gas; at the same time, it also interferes with the performance of the thermal MFC itself.
For the above reasons, current thermal MFCs cannot perform precise measurement and control of these temperature sensitive gases, so that the related processes cannot be realized.
Disclosure of Invention
The embodiment of the invention aims to at least solve one of the technical problems in the prior art, and provides a gas mass flow controller which not only can improve the control precision, especially can ensure the flow precision of temperature-sensitive gas, but also is convenient to disassemble, assemble and maintain.
In order to achieve the above object, an embodiment of the present invention provides a gas mass flow controller, configured to detect a gas flow flowing through a process chamber, and including a flow detection module, a flow adjustment module, and a control module, which are independent of each other, where the flow detection module is disposed at an air inlet end of the process chamber, and is configured to detect a gas flow value at the air inlet end of the process chamber, and send the gas flow value to the control module;
the flow regulating module is arranged at the gas outlet end of the process chamber and is used for regulating the gas flow at the gas outlet end of the process chamber;
the control module is used for controlling the flow regulating module to regulate the gas flow at the gas outlet end of the process chamber according to the gas flow value and the flow set value detected by the flow detecting module, so that the gas flow flowing through the process chamber is equal to the flow set value.
Optionally, the gas mass flow controller further includes a temperature adjustment module, and the temperature adjustment module is detachably disposed at a position close to the flow adjustment module, and is configured to adjust the temperature of the flow adjustment module.
Optionally, the temperature adjustment module includes a heat exchange chamber, and an inlet pipeline and an outlet pipeline respectively connected to an inlet end and an outlet end of the heat exchange chamber, where the heat exchange chamber is disposed at a position close to the flow adjustment module and configured to perform heat exchange with the flow adjustment module; the inflow pipeline is used for conveying a heat exchange medium into the heat exchange chamber; the outflow pipeline is used for outputting the heat exchange medium in the heat exchange chamber.
Optionally, the flow regulating module includes a first base and a flow regulating valve disposed on the first base; the first base is internally provided with a first base channel, and the first base channel is connected with the air outlet end of the process chamber;
the flow regulating valve is used for regulating the gas flow in the first base passage.
Optionally, the gas mass flow controller further includes a connection cable, and two ends of the connection cable are respectively electrically connected to the control module and the flow regulating valve for data interaction.
Optionally, the flow detection module includes a second base and a channel structure arranged in the second base, the channel structure is connected with the air inlet end of the process chamber, a thermal type flow sensor is arranged in the second base, the thermal type flow sensor is connected with the channel structure, and is used for detecting the gas flow value at the air inlet end of the process chamber and sending the gas flow value to the control module.
Optionally, the channel structure includes an air inlet channel, a detection channel, a flow dividing channel and an air outlet channel, which are connected in series in sequence along the air flowing direction, wherein the thermal flow sensor is connected with the flow dividing channel;
and a pressure sensor is also arranged in the second base and is connected with the detection channel to detect the gas pressure value in the detection channel.
Optionally, a temperature sensor is arranged in the second base and close to the thermal flow sensor, and is used for detecting an ambient temperature value around the thermal flow sensor and sending the ambient temperature value to the control module.
Optionally, the control module comprises a microcontroller.
Optionally, the flow rate adjusting module is disposed between the gas outlet end and the gas inlet end of two adjacent process chambers, and is configured to adjust a flow rate of gas flowing through the two adjacent process chambers.
The embodiment of the invention has the following beneficial effects:
in the gas mass flow controller provided by the embodiment of the invention, the flow detection module and the flow regulation module are independent from each other and are respectively arranged at the gas inlet end and the gas outlet end of the process chamber, namely, the flow detection module and the flow regulation module adopt a separated design, so that the influence on the stability of temperature-sensitive gas caused by heat release of the flow regulation module in the working process and the interference on the performance of a thermal MFC (micro-fuel cell) can be avoided, the control precision can be improved, and the flow precision of the temperature-sensitive gas can be especially ensured; meanwhile, the separated flow detection module and the flow regulation module provide convenience for disassembly, assembly and maintenance.
Drawings
FIG. 1 is a block diagram of a prior art gas mass flow controller;
FIG. 2 is a schematic block diagram of a gas mass flow controller provided by an embodiment of the present invention;
fig. 3 is a block diagram of a gas mass flow controller according to an embodiment of the present invention.
Detailed Description
In order to make those skilled in the art better understand the technical solution of the present invention, the following describes the gas mass flow controller provided by the embodiment of the present invention in detail with reference to the accompanying drawings.
Fig. 1 shows a structure of a conventional gas Mass Flow Controller (Mass Flow Controller, hereinafter referred to as MFC). As shown in fig. 1, the conventional MFC is a thermal MFC including a base 1, a flow sensor 2, a circuit board 3, and a flow control valve 4. Wherein, flow sensor 2, circuit board 3 and flow control valve 4 all install on base 1, promptly, adopt integral type structure. When the thermal MFC is used for controlling the flow of the temperature-sensitive gas, as the flow control valve 4 is installed on the base 1, the heat continuously released by the flow control valve 4 during the operation is directly applied to the temperature-sensitive gas, which often affects the stability of the temperature-sensitive gas; meanwhile, because the distance between the flow sensor 2 and the flow control valve 4 is short, the measurement precision of the flow sensor 2 (thermal type flow sensor) is also affected by the heat continuously emitted by the flow control valve 4 during working, so that the self performance of the thermal type MFC is interfered, the process requirements cannot be met, and the thermal type MFC can not be applied to process equipment requiring high-precision gas measurement.
To solve the above problem, referring to fig. 2, an embodiment of the present invention provides a gas mass flow controller 6 for detecting the flow of gas through a process chamber 5. Because the interior of the process chamber 5 is usually closed and has a back pressure sealed space, when the working state of the process chamber 5 is stable, the process chamber 5 is equivalent to a gas pipeline through which gas can flow, and because the gas flow at any position in the pipeline is the same under the same condition, the gas flow in the process chamber 5 and the gas inlet pipeline and the gas outlet pipeline (not shown in the figure) thereof are always the same.
Based on the above principle, the gas mass flow controller 6 includes a flow detection module 61 and a flow adjustment module 62, which are independent of each other, and a control module 63. The flow detection module 61 and the flow adjustment module 62 are independent from each other, specifically, they are separated from each other to form a split structure. The flow detection module 61 is disposed at the gas inlet end of the process chamber 5, for example, disposed on the gas inlet pipeline of the process chamber 5, and is configured to detect a gas flow value at the gas inlet end of the process chamber 5 and send the gas flow value to the control module 63; the flow adjusting module 62 is disposed at the gas outlet end of the process chamber 5, for example, disposed on the gas outlet pipeline of the process chamber 5, and is used for adjusting the gas flow at the gas outlet end of the process chamber 5; the control module 63 is configured to control the flow adjusting module 62 to adjust the gas flow at the gas outlet end of the process chamber 5 according to the gas flow value and the flow set value detected by the flow detecting module 61, so that the gas flow flowing through the process chamber 5 is equal to the flow set value.
Because the process chamber 5 is closed, the gas flow in the process chamber 5 and the gas inlet pipeline and the gas outlet pipeline thereof are always kept the same, in this case, when the control module 63 controls the flow adjusting module 62 to adjust the gas flow in the gas outlet pipeline (i.e., the gas outlet end of the process chamber 5), the gas flow flowing through the gas inlet pipeline and the inside of the process chamber 5 will be changed accordingly, which is equivalent to adjusting the gas flow in the gas inlet pipeline and the inside of the process chamber 5, thereby achieving the purpose of adjusting the gas flow flowing through the process chamber 5. Meanwhile, on the premise that the process chamber 5 and the gas flow rates in the gas inlet pipeline and the gas outlet pipeline thereof are always kept the same, the detected gas flow rate value in the gas inlet pipeline (namely, the gas inlet end of the process chamber 5) can be used as a basis for adjusting the gas flow rate in the gas outlet pipeline by detecting the gas flow rate value in the gas inlet pipeline, so that the flow rate control precision can be still ensured even if the flow rate detection module 61 and the flow rate adjustment module 62 are mutually independent and are arranged at positions far away from each other. Moreover, by adopting a separated design for the flow detection module 61 and the flow adjustment module 62, not only can the influence on the stability of the temperature sensitive gas caused by the heat release of the flow adjustment module 62 during the work be avoided, but also the interference on the performance of the thermal MFC can be avoided, so that the control precision can be improved, and particularly the flow precision of the temperature sensitive gas can be ensured; meanwhile, the separate flow detection module 61 and the separate flow adjustment module 62 provide convenience for disassembly, assembly and maintenance.
In the present embodiment, the gas mass flow controller 6 further includes a temperature adjustment module 7, and the temperature adjustment module 7 is detachably provided at a position close to the flow adjustment module 62 for adjusting the temperature of the flow adjustment module 62. In this way, the effect of the heat released by the flow regulation module 62 itself on the stability of the temperature sensitive gas during operation may be further reduced.
The specific structure of the temperature adjustment module 7 may be various, for example, in this embodiment, the temperature adjustment module 7 includes a heat exchange chamber 71, and an inlet pipeline and an outlet pipeline (not shown in the figure) respectively connected to an inlet end and an outlet end of the heat exchange chamber 71, wherein the heat exchange chamber 71 is disposed near the flow adjustment module 62 for exchanging heat with the flow adjustment module 62; the inlet pipeline is used for conveying heat exchange media to the heat exchange chamber 71; the outflow line is used for outputting the heat exchange medium in the heat exchange chamber 71. The heat exchange medium is, for example, a cooling liquid such as cooling water or a cooling liquid or a cooling gas.
When the heat exchange medium circulates in the heat exchange chamber 71, it cools the flow rate regulation module 62 by exchanging heat with the flow rate regulation module 62 to reduce the heat emitted from the flow rate regulation module 62 itself during operation, so that it can be ensured that the stability of the temperature sensitive gas is not affected.
The specific structure of the flow regulating module 62 can be various, for example, in the embodiment, as shown in fig. 3, the flow regulating module 62 includes a first base 621 and a flow regulating valve 622 disposed on the first base 621; wherein, the first base 621 is provided with a first base channel 621a therein, the first base channel 621a is connected with the air outlet end of the process chamber 5, for example, the first base channel 621a may be connected in series on the air outlet pipeline of the process chamber 5; the flow regulating valve 622 is used to regulate the flow of gas in the first pedestal passageway 621a to regulate the flow of gas at the gas outlet end of the process chamber 5, for example, to regulate the flow of gas in the gas outlet line of the process chamber 5.
Based on the structure of the flow rate adjustment module 62, the control module 63 is used to adjust the gas flow rate at the gas outlet end of the process chamber 5 by controlling the opening degree of the flow rate control valve 62.
In addition, the gas mass flow controller 6 further comprises a connection cable 8, and both ends of the connection cable 8 are electrically connected with the control module 63 and the flow regulating valve 62 respectively for data interaction. Of course, in practical applications, other wired communication methods or wireless communication methods may also be adopted.
The structure of the flow rate detection module 61 may be various, for example, in the present embodiment, as shown in fig. 2 and 3, the flow rate detection module 61 includes a second base 611 and a channel structure disposed in the second base 611, the channel structure is connected to the air inlet end of the process chamber 5, for example, connected in series to the air inlet pipeline of the process chamber 5, and a thermal type flow rate sensor 612 is disposed in the second base 611, and the thermal type flow rate sensor 612 is connected to the channel structure for detecting the gas flow rate value flowing through the channel structure and sending the gas flow rate value to the control module 63.
Further, as shown in fig. 3, the channel structure includes a gas inlet channel 615a, a detection channel 615b, a flow dividing channel 615c, and a gas outlet channel 615d, which are connected in series in the gas flow direction, wherein the thermal flow sensor 612 is connected to the flow dividing channel 615 c. When the gas flows through the diversion channel 615c, most of the gas flows through the diversion channel 615c, and a small portion of the gas passes through the capillary tube of the thermal flow sensor 612, so that the thermal flow sensor 612 can detect and obtain an electrical signal related to the gas flow and send the electrical signal to the control module 63.
In some embodiments, in order to increase the function of the gas mass flow controller and meet different process requirements, a pressure sensor 613 is further disposed in the second base 611, and the pressure sensor 613 is connected to the detection channel 615b to detect the pressure of the gas in the detection channel 615 b.
In some embodiments, in order to increase the function of the gas mass flow controller and meet different process requirements, a temperature sensor 614 is disposed in the second base 611 and close to the thermal flow sensor 612 to detect an ambient temperature value around the thermal flow sensor 612 and send the ambient temperature value to the control module 63.
The control module 63 may calculate and calibrate according to the gas flow value detected by the thermal flow sensor 612 and referring to the gas pressure value and/or the ambient temperature value to obtain a flow correction value, and output the flow correction value to the flow adjustment module 2, so as to control the flow adjustment module 62 to adjust the gas flow at the gas outlet end of the process chamber 5, so that the gas flow flowing through the process chamber 5 is equal to the flow setting value.
In practical use, the control module 62 comprises a microcontroller, which is integrated on a circuit board 631, for example in the form of a chip, as shown in fig. 3. In the present embodiment, the circuit board 631 is mounted on the second base 611, but the present embodiment is not limited thereto, and in practical applications, the circuit board 631 may be disposed independently.
In addition, in practical applications, the flow adjusting module 62 may also be disposed between the gas outlet end and the gas inlet end of two adjacent process chambers 5, and is used for adjusting the flow of the gas flowing through the two adjacent process chambers 5. That is, when the gas mass flow controller 6 is applied to the case of two process chambers 5 connected in series, the two process chambers 5 are equivalent to two sections of pipelines connected in series, and at this time, the flow regulating module 62 is disposed between the gas outlet end and the gas inlet end of the two process chambers 5 to achieve the purpose of simultaneously regulating the gas flow of the gas outlet end and the gas inlet end of the two process chambers 5, so that the gas flow can flow into the downstream process chamber 5 with the same gas flow value while controlling the gas flow value in the upstream process chamber 5 to be equal to the flow set value, so as to meet the requirements of the subsequent process.
In summary, in the gas mass flow controller provided in the embodiment of the present invention, the flow detection module and the flow adjustment module are independent from each other and are respectively disposed at the gas inlet end and the gas outlet end of the closed process chamber, that is, the flow detection module and the flow adjustment module are designed in a separate manner, so that not only can the influence on the stability of the temperature sensitive gas due to heat release of the flow adjustment module during operation be avoided, but also the interference on the performance of the thermal MFC itself can be avoided, thereby improving the control accuracy, and especially ensuring the flow accuracy of the temperature sensitive gas; meanwhile, the separated flow detection module and the flow regulation module provide convenience for disassembly, assembly and maintenance.
It will be understood that the above embodiments are merely exemplary embodiments taken to illustrate the principles of the present invention, which is not limited thereto. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit and substance of the invention, and these modifications and improvements are also considered to be within the scope of the invention.
Claims (10)
1. A gas mass flow controller is used for detecting the flow of gas flowing through a process chamber and is characterized by comprising a flow detection module, a flow regulation module and a control module which are mutually independent, wherein the flow detection module is arranged at the gas inlet end of the process chamber, is used for detecting the gas flow value at the gas inlet end of the process chamber and sends the gas flow value to the control module;
the flow regulating module is arranged at the gas outlet end of the process chamber and is used for regulating the gas flow at the gas outlet end of the process chamber;
the control module is used for controlling the flow regulating module to regulate the gas flow at the gas outlet end of the process chamber according to the gas flow value and the flow set value detected by the flow detecting module, so that the gas flow flowing through the process chamber is equal to the flow set value.
2. The gas mass flow controller of claim 1, further comprising a temperature adjustment module removably disposed proximate to the flow adjustment module for adjusting a temperature of the flow adjustment module.
3. The gas mass flow controller of claim 2, wherein the temperature regulation module comprises a heat exchange chamber and an inlet flow line and an outlet flow line connected to an inlet end and an outlet end of the heat exchange chamber, respectively, wherein the heat exchange chamber is disposed adjacent to the flow regulation module for exchanging heat with the flow regulation module; the inflow pipeline is used for conveying a heat exchange medium into the heat exchange chamber; the outflow pipeline is used for outputting the heat exchange medium in the heat exchange chamber.
4. The gas mass flow controller of any of claims 1-3, wherein the flow regulating module comprises a first base and a flow regulating valve disposed on the first base; the first base is internally provided with a first base channel, and the first base channel is connected with the air outlet end of the process chamber;
the flow regulating valve is used for regulating the gas flow in the first base passage.
5. The gas mass flow controller of claim 4, further comprising a connection cable electrically connected at both ends to the control module and the flow regulating valve, respectively, for data interaction.
6. The gas mass flow controller of claim 1, wherein the flow detection module comprises a second base and a channel structure disposed in the second base, the channel structure being connected to the gas inlet end of the process chamber, and a thermal flow sensor disposed in the second base, the thermal flow sensor being connected to the channel structure for detecting a gas flow value at the gas inlet end of the process chamber and sending the gas flow value to the control module.
7. The gas mass flow controller of claim 6, wherein the channel structure comprises a gas inlet channel, a detection channel, a flow splitting channel and a gas outlet channel connected in series in the gas flow direction, wherein the thermal flow sensor is connected to the flow splitting channel;
and a pressure sensor is also arranged in the second base and is connected with the detection channel to detect the gas pressure value in the detection channel.
8. The gas mass flow controller of claim 7, wherein a temperature sensor is disposed in the second base and adjacent to the thermal flow sensor for detecting an ambient temperature value around the thermal flow sensor and sending the ambient temperature value to the control module.
9. The gas mass flow controller of claim 1, wherein the control module comprises a microcontroller.
10. The gas mass flow controller of claim 1, wherein the flow regulating module is disposed between the gas outlet end and the gas inlet end of two adjacent process chambers for regulating the flow of gas through the two adjacent process chambers.
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| CN202010900168.3A CN112000138B (en) | 2020-08-31 | 2020-08-31 | Gas mass flow controller |
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| CN202010900168.3A CN112000138B (en) | 2020-08-31 | 2020-08-31 | Gas mass flow controller |
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| CN112000138B CN112000138B (en) | 2024-01-09 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113721673A (en) * | 2021-08-31 | 2021-11-30 | 北京七星华创流量计有限公司 | Gas mass flow control method and device |
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