CN111103020A - Flow detection device, flow control system and flow detection method - Google Patents
Flow detection device, flow control system and flow detection method Download PDFInfo
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- CN111103020A CN111103020A CN201811267566.5A CN201811267566A CN111103020A CN 111103020 A CN111103020 A CN 111103020A CN 201811267566 A CN201811267566 A CN 201811267566A CN 111103020 A CN111103020 A CN 111103020A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
- G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
- G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
- G01F1/363—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction with electrical or electro-mechanical indication
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
- G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
Abstract
The invention provides a flow detection device, a flow control system and a flow detection method, belongs to the technical field of semiconductor process manufacturing, and can at least partially solve the problems of inaccuracy in gas flow detection and slow response of the conventional flow detection device. The invention relates to a flow detection device, which is used for detecting the flow in a gas channel, wherein the gas channel comprises an upstream channel and a downstream channel which are connected, a throat is formed at the joint of the upstream channel and the downstream channel, the cross section area of the throat is smaller than the cross section area of any one of the upstream channel and the downstream channel, and the flow detection device comprises: the first pressure testing unit is used for determining a first pressure value of the upstream channel; the second pressure test unit is used for measuring a second pressure value of the downstream channel; and the flow calculation unit is respectively connected with the first pressure test unit and the second pressure test unit so as to obtain a corrected flow value according to the first pressure value and the second pressure value.
Description
Technical Field
The invention belongs to the technical field of semiconductor process manufacturing, and particularly relates to a flow detection device, a flow control system and a flow detection method.
Background
A Mass Flow Controller (MFC) is used for precisely measuring and controlling a Mass Flow of gas, and is mainly applied to scientific research and production in various fields such as a semiconductor integrated circuit process, a special material, a chemical industry, a petroleum industry, medicine, environmental protection and the like.
A gas mass flow control system in the prior art mainly includes a thermal sensitive element, a differential amplifier, a filter, a controller, and the like, and the gas mass flow control system mainly controls the flow rate of gas by detecting the temperature of the gas, but because temperature conduction requires a certain time, there are problems of long preheating time, poor control accuracy and repeatability, and the like when the thermal sensitive element is used for controlling the flow rate of the gas.
Another prior art gas mass flow control system generally includes a pressure sensor, a controller, and a gas passage having an orifice whose gas flow rate is determined by measuring the pressure at the orifice. However, if the gas outlet of the gas channel is suddenly shut off due to external influence or fault, the mass flow of the gas at this time should be zero, but the gas in the gas channel has a certain gas pressure, so the flow measured by the gas pressure does not show as zero, that is, although the actual gas flow in the gas channel is zero, the gas mass flow control system cannot measure that the flow is zero, so that the gas mass flow control system is inaccurate in controlling the gas flow, thereby causing adverse effect on actual scientific research or production.
Disclosure of Invention
The invention at least partially solves the problems of inaccurate gas flow detection and slow response of the existing flow detection device, and provides the flow detection device with high detection efficiency and good accuracy.
The technical scheme adopted for solving the technical problem of the invention is that
A flow rate detecting device for detecting a flow rate in a gas passage including an upstream passage and a downstream passage connected to each other, a throat being formed at a junction of the upstream passage and the downstream passage, and a cross-sectional area of the throat being smaller than a cross-sectional area of either of the upstream passage and the downstream passage, the flow rate detecting device comprising:
a first pressure test unit for determining a first pressure value of the upstream channel;
a second pressure test unit for determining a second pressure value of the downstream channel;
and the flow calculation unit is respectively connected with the first pressure test unit and the second pressure test unit so as to obtain a corrected flow value according to the first pressure value and the second pressure value.
It is further preferred that the first pressure value P is dependent oniAnd said second pressure value PjThe corrected flow rate value Q is obtained by the following relational expressionV：
Wherein Q isVRepresenting the corrected flow value, k representing a proportionality constant, PiRepresenting said first pressure value, PjRepresenting the second pressure value.
Further preferably, the first pressure test unit includes: a first sensor for connection with the upstream channel to determine a first pressure value of the upstream channel; the first sensor driving circuit is connected with the first sensor and used for driving the first sensor; and the first A/D conversion circuit is respectively connected with the first sensor and the flow calculation unit, and is used for converting the first pressure value from an analog signal to a digital signal and transmitting the first pressure value of the digital signal to the flow calculation unit.
Further preferably, the second pressure test unit includes: a second sensor for connection with the downstream channel to determine a second pressure value of the downstream channel; the second sensor driving circuit is connected with the second sensor and used for driving the second sensor; and the second A/D conversion circuit is respectively connected with the second sensor and the flow calculation unit, and is used for converting the second pressure value from an analog signal to a digital signal and transmitting the second pressure value of the digital signal to the flow calculation unit.
The technical scheme adopted for solving the technical problem of the invention is another flow control system, which comprises:
the flow rate detection device described above;
the gas channel comprises an upstream channel and a downstream channel which are connected, and gas flows in from the upstream channel and flows out from the downstream channel, wherein a throat is further formed at the joint of the upstream channel and the downstream channel, and the cross sectional area of the throat is smaller than that of any one of the upstream channel and the downstream channel;
and the valve device is arranged at the air inlet of the upstream channel and used for controlling the gas flow of the gas channel according to the corrected flow value obtained by the flow detection device.
Further preferably, the valve device includes: the piezoelectric valve is arranged at the air inlet of the upstream channel and used for controlling the size of the air inlet of the upstream channel; the piezoelectric driving circuit is connected with the piezoelectric valve and is used for driving the piezoelectric valve; and the third A/D conversion circuit is respectively connected with the piezoelectric driving circuit and the flow calculation unit and is used for converting the corrected flow value from a digital signal to an analog signal and controlling the piezoelectric driving circuit by using the corrected flow value of the analog signal.
The technical scheme adopted for solving the technical problem of the invention is another detection method of a flow detection device, and the flow detection method comprises the following steps:
when gas passes through a throat of a gas channel, respectively measuring a first pressure value of the upstream channel and a second pressure value of the downstream channel;
and obtaining a correction flow value by analyzing the first pressure value and the second pressure value.
Further preferably, according toThe first pressure value PiAnd said second pressure value PjThe corrected flow rate value Q is obtained by the following relational expressionV：
Wherein Q isVRepresenting the corrected flow value, k representing a proportionality constant, PiRepresenting said first pressure value, PjRepresenting the second pressure value.
Further preferably, the step of obtaining the corrected flow value further comprises: and controlling the gas flow in the gas channel according to the corrected flow value.
Further preferably, the controlling the gas flow in the gas channel according to the corrected flow value includes: the gas flow in the gas channel is controlled by a piezoelectric valve.
The flow detection device can be part of a gas mass flow control system and is mainly used for detecting the flow in a gas channel, and obtaining a corrected flow value according to the first pressure value and the second pressure value, so that the problem of inaccurate gas flow detection when a gas outlet of the gas channel is suddenly shut off due to external influence or faults can be avoided, the detection performance of the flow detection device is improved, and the control precision of the gas mass flow control system on the gas flow is improved.
In addition, the flow rate detection device of the present invention detects the flow rate mainly by using the pressure sensor, and has a higher response speed than the flow rate control device that controls the flow rate of the gas by detecting the temperature of the gas in the related art, thereby improving the detection efficiency.
Drawings
Fig. 1 is a schematic structural diagram of a flow control system according to an embodiment of the present invention;
FIG. 2 is a graph of a first pressure value versus a flow value in a flow control system according to an embodiment of the present invention;
fig. 3 is a schematic diagram of a detection method of a flow detection device according to an embodiment of the present invention;
wherein the reference numerals are: 10 flow detection means; 11 a first pressure test unit; 12 a second pressure test unit; 13 a flow rate calculation unit; 20 gas channels; 21, a laryngeal opening; 22 an air inlet; 23 air outlet; 30 valve means.
Detailed Description
In order to make the technical solutions of the present invention better understood, the present invention will be described in further detail with reference to the accompanying drawings and specific embodiments.
Example 1:
the present invention provides a flow rate detection device 10, and the flow rate detection device 10 may be a gas mass flow rate detection device, a gas volume flow rate detection device, or other suitable gas flow rate detection devices, and in the present embodiment, the gas mass flow rate detection device is taken as an example for description.
As shown in fig. 1, the flow rate detecting device 10 of the present embodiment is used for detecting a flow rate in a gas channel 20, the gas channel 20 includes an upstream channel and a downstream channel which are connected, a throat 21 is formed at a junction of the upstream channel and the downstream channel, and a cross-sectional area of the throat 21 is smaller than a cross-sectional area of either one of the upstream channel and the downstream channel, the flow rate detecting device 10 includes:
a first pressure test unit 11 for determining a first pressure value of the upstream channel;
a second pressure test unit 12 for determining a second pressure value of the downstream channel;
and the flow calculating unit 13 is respectively connected with the first pressure testing unit 11 and the second pressure testing unit 12 and is used for obtaining a corrected flow value according to the first pressure value and the second pressure value.
The cross-sectional area of the throat 21 (which means the area of the space through which gas can actually pass) of the gas channel 20 may gradually increase from the cross-sectional area of the upstream channel and the downstream channel to the cross-sectional area of the throat 21, so as to form two tapered channels on both sides of the throat 21. When gas passes through the throat 21 from the gas passage 20, the accommodation space of the gas passage 20 is larger than that at the throat 21, and a certain pressure difference is generated between the gas at the upstream passage and the throat 21. Under the effect of this pressure differential, the velocity of the gas as it flows through the throat 21 increases (e.g., reaches sonic velocity), thereby achieving a linear relationship of gas flow to gas pressure in the upstream channel, as shown in FIG. 2. Based on the throat 21, the pressure values of the upstream channel and the downstream channel are respectively tested to obtain a corrected flow value, so as to realize the detection of the gas mass flow flowing through the gas channel 20.
The flow detection device 10 of the present invention can be a part of a gas mass flow control system, and the flow detection device 10 can avoid the problem of inaccurate gas flow detection when the gas outlet 23 of the gas channel 20 is suddenly shut off due to external influence or fault, so as to improve the detection performance of the flow detection device 10 and further improve the control accuracy of the gas mass flow control system on the gas flow.
The flow rate detection device 10 of the present invention detects the flow rate mainly by using a pressure sensor, and the flow rate detection device 10 of the present invention has a higher response speed and can improve the detection efficiency as compared with a flow rate control device that controls the flow rate of gas by detecting the temperature of gas in the related art.
In particular, according to a first pressure value PiAnd said second pressure value PjThe corrected flow rate value Q is obtained by the following relationV：
Wherein Q isVRepresenting corrected flow rate value, k representing proportionality constant, PiRepresenting a first pressure value, PjA second pressure value is indicated.
Wherein, in the present invention, when the gas flow in the gas passage 20 is abnormal, for example, due to the blockage of the gas outlet 23 of the gas passage 20 due to a failure, the pressure of the gas to the upstream passage is approximately equal to the pressure of the gas to the downstream passage, that is, when the gas flow through the gas passage 20 is abnormal, the first pressure value is approximately equal to the second pressure valueValue (P)i≈Pj) (ii) a When the gas normally passes through the gas passage 20, the pressure of the gas to the upstream passage is greatly different from the pressure of the gas to the downstream passage (for example, P)i≈2Pj) That is, when the gas normally passes through the gas passage 20, the first pressure value and the second pressure value are not approximately equal, so that the flow rate value can be obtained by multiplying the first pressure value by the coefficient k.
Based on the above theory, the β parameter in the formula can be used to accurately determine whether the gas normally flows in the gas channel 20, i.e. the gas mass flow of the gas channel 20 can be accurately detected, for example, when the gas normally flows through the gas channel 20, β is 1, and the actual flow is proportional to the first pressure (Q) valueV＝kPi) When the gas flow in the gas passage 20 is abnormal, β is 0, and the actual flow value is 0.
Preferably, the first pressure test unit 11 includes: the first sensor is connected with the upstream channel to measure a first pressure value of the upstream channel; the first sensor driving circuit is connected with the first sensor and used for driving the first sensor; and the first A/D conversion circuit is respectively connected with the first sensor and the flow calculation unit 13 and is used for converting the first pressure value from an analog signal into a digital signal and transmitting the first pressure value of the digital signal to the flow calculation unit 13.
Here, the first sensor may be a pressure sensor, one end of which may be directly connected to the upstream channel of the gas channel 20, and the other end of which may be connected to the flow rate calculation unit 13 through a first a/D conversion circuit, so that a first pressure value measured by the first sensor may be converted into a digital signal by the first a/D conversion circuit and transmitted to the flow rate calculation unit 13, so as to smoothly obtain a corrected flow rate value.
Preferably, the second pressure test unit 12 includes: a second sensor for connection with the downstream channel to determine a second pressure value of the downstream channel; the second sensor driving circuit is connected with the second sensor and used for driving the second sensor; and the second A/D conversion circuit is respectively connected with the second sensor and the flow calculation unit 13, and is used for converting the second pressure value from the analog signal into a digital signal and transmitting the second pressure value of the digital signal to the flow calculation unit 13.
Here, the second sensor may be a pressure sensor, one end of which may be directly connected to the downstream channel of the gas channel 20, and the other end of which may be connected to the flow rate calculation unit 13 through a second a/D conversion circuit, so that a second pressure value measured by the second sensor may be converted into a digital signal by the second a/D conversion circuit and transmitted to the flow rate calculation unit 13, so as to smoothly obtain a corrected flow rate value.
Further, the flow calculating unit 13 may include a control module, which may be a closed-loop control system, and the closed-loop control system may receive feedback data, so that data transmission is more stable, and performance of the flow detecting device 10 is improved.
Example 2:
as shown in fig. 1, the present embodiment provides a flow control system, including:
the flow rate detection device 10 in embodiment 1;
the gas channel 20 comprises an upstream channel and a downstream channel which are connected, and gas flows in from the upstream channel and flows out from the downstream channel, wherein a throat 21 is formed at the joint of the upstream channel and the downstream channel, and the cross sectional area of the throat 21 is smaller than that of any one of the upstream channel and the downstream channel;
and a valve device 30 provided at the inlet 22 of the upstream passage for controlling the gas flow rate of the gas passage 20 based on the corrected flow rate value obtained by the flow rate detecting device 10.
The cross-sectional area of the throat 21 of the gas channel 20 may gradually increase from the cross-sectional area of the upstream channel to the cross-sectional area of the downstream channel to the cross-sectional area of the throat 21, so as to form two tapered channels on both sides of the throat 21. When gas passes through the throat 21 from the gas passage 20, the accommodation space of the gas passage 20 is larger than that at the throat 21, and a certain pressure difference is generated between the gas at the upstream passage and the throat 21. Under the effect of this pressure differential, the velocity of the gas as it flows through the throat 21 increases (e.g., reaches sonic velocity), thereby achieving a linear relationship of gas flow to gas pressure in the upstream channel, as shown in FIG. 2.
The valve device 30 can directly acquire the corrected flow value detected by the flow rate detecting device 10, so that the size of the gas inlet 22 of the gas passage 20 can be accurately controlled to control the gas flow rate in the gas passage 20.
Preferably, the valve device 30 comprises: a piezoelectric valve provided at the inlet port 22 of the upstream passage for controlling the size of the inlet port 22 of the upstream passage; the piezoelectric driving circuit is connected with the piezoelectric valve and used for driving the piezoelectric valve; and the third A/D conversion circuit is respectively connected with the piezoelectric valve and the flow calculation unit and is used for converting the corrected flow value from a digital signal to an analog signal and controlling the piezoelectric driving circuit by using the corrected flow value of the analog signal.
Here, the piezoelectric valve can directly control the size of the gas inlet 22 of the gas channel 20, and it can be connected to the flow calculating unit 13 through the piezoelectric driving circuit and the third a/D converting circuit, so that the corrected flow value obtained by the flow calculating unit 13 can be converted into an analog signal by the third a/D converting circuit and the piezoelectric valve is controlled to adjust the flow of the gas.
The flow control system of the invention can avoid the phenomenon that gas flows abnormally in the gas channel 20 when the gas outlet 23 of the gas channel 20 is suddenly cut off due to external influence or faults, thereby improving the control accuracy of the flow control system and further improving the performance of the flow control system.
In addition, the flow rate control system of the present invention detects and controls the flow rate mainly by using the pressure sensor, and has a higher response speed than the flow rate control device that controls the flow rate of the gas by detecting the temperature of the gas in the related art, thereby improving the control efficiency.
Example 3:
as shown in fig. 3, the present embodiment provides a detection method of a flow rate detection device, which may be a method for a gas mass flow rate detection device, a method for a gas volume flow rate detection device, or other suitable gas flow rate detection methods, and in the present embodiment, the detection method for a gas mass flow rate detection device is described as an example
The detection method of the flow detection device comprises the following steps:
s10, measuring a first pressure value of the upstream channel and a second pressure value of the downstream channel of the gas channel 20 respectively when the gas passes through the throat 21 of the gas channel 20.
Wherein the gas channel 20 comprises an upstream channel and a downstream channel which are connected, the junction of the upstream channel and the downstream channel forms a throat 21, and the cross-sectional area of the throat 21 is smaller than the cross-sectional area of either of the upstream channel and the downstream channel.
The cross-sectional area of the throat 21 of the gas channel 20 may gradually increase from the cross-sectional area of the upstream channel to the cross-sectional area of the downstream channel to the cross-sectional area of the throat 21, so as to form two tapered channels on both sides of the throat 21. When gas passes through the throat 21 from the gas passage 20, the accommodation space of the gas passage 20 is larger than that at the throat 21, and a certain pressure difference is generated between the gas at the upstream passage and the throat 21. Under the effect of this pressure differential, the velocity of the gas as it flows through the throat 21 increases (e.g., reaches sonic velocity), thereby achieving a linear relationship of gas flow to gas pressure in the upstream channel, as shown in FIG. 2. Based on the throat 21, the pressure values of the upstream channel and the downstream channel are respectively tested to obtain a corrected flow value, so as to realize the detection of the gas mass flow flowing through the gas channel 20.
And S20, obtaining a corrected flow value by analyzing the first pressure value and the second pressure value.
In particular, according to said first pressure value PiAnd said second pressure value PjThe corrected flow rate value Q is obtained by the following relational expressionV：
Wherein Q isVRepresenting corrected flow rate value, k representing proportionality constant, PiRepresenting a first pressure value, PjA second pressure value is indicated.
Wherein, in the present invention, when the gas flow in the gas passage 20 is abnormal, for example, due to the blockage of the gas outlet 23 of the gas passage 20 due to a failure, the pressure of the gas to the upstream passage is approximately equal to the pressure of the gas to the downstream passage, that is, when the gas flow through the gas passage 20 is abnormal, the first pressure value is approximately equal to the second pressure value (P)i≈Pj) (ii) a When the gas normally passes through the gas passage 20, the pressure of the gas to the upstream passage is greatly different from the pressure of the gas to the downstream passage (for example, P)i≈2Pj) That is, when the gas normally passes through the gas passage 20, the first pressure value and the second pressure value are not approximately equal, so that the flow rate value can be obtained by multiplying the first pressure value by the coefficient k.
Based on the above theory, the β parameter in the formula can be set to accurately determine that the gas flows normally in the gas channel 20, i.e. the mass flow rate of the gas in the gas channel 20 can be accurately detected, for example, when the gas normally passes through the gas channel 20, β is 1, and the actual flow rate is proportional to the first pressure value (Q)V＝kPi) When the gas flow in the gas passage 20 is abnormal, β is 0, and the actual flow value is 0.
And S30, controlling the gas flow rate through the gas channel 20 according to the corrected flow rate value.
Here, the size of the gas inlet 22 of the gas channel 20 may be controlled by a piezoelectric valve to control the gas flow rate in the gas channel 20.
The detection method of flow rate detection of the present embodiment can solve the problem of an abnormal flow of gas in the gas passage 20 when the gas outlet 23 of the gas passage 20 is suddenly shut off.
It will be understood that the above embodiments are merely exemplary embodiments taken to illustrate the principles of the present invention, which is not limited thereto. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit and substance of the invention, and these modifications and improvements are also considered to be within the scope of the invention.
Claims (10)
1. A flow rate detecting device for detecting a flow rate in a gas passage, the gas passage including an upstream passage and a downstream passage connected to each other, a throat being formed at a junction of the upstream passage and the downstream passage, and a cross-sectional area of the throat being smaller than a cross-sectional area of either of the upstream passage and the downstream passage, the flow rate detecting device comprising:
a first pressure test unit for determining a first pressure value of the upstream channel;
a second pressure test unit for determining a second pressure value of the downstream channel;
and the flow calculation unit is respectively connected with the first pressure test unit and the second pressure test unit so as to obtain a corrected flow value according to the first pressure value and the second pressure value.
2. Flow rate detection device according to claim 1, characterised in that it is responsive to said first pressure value PiAnd said second pressure value PjThe corrected flow rate value Q is obtained by the following relational expressionV：
Wherein Q isVRepresenting the corrected flow value, k representing a proportionality constant, PiRepresenting said first pressure value, PjRepresenting the second pressure value.
3. The flow sensing device of claim 1, wherein the first pressure testing unit comprises:
a first sensor for connection with the upstream channel to determine a first pressure value of the upstream channel;
the first sensor driving circuit is connected with the first sensor and used for driving the first sensor;
and the first A/D conversion circuit is respectively connected with the first sensor and the flow calculation unit, and is used for converting the first pressure value from an analog signal to a digital signal and transmitting the first pressure value of the digital signal to the flow calculation unit.
4. The flow sensing device of claim 1, wherein the second pressure testing unit comprises:
a second sensor for connection with the downstream channel to determine a second pressure value of the downstream channel;
the second sensor driving circuit is connected with the second sensor and used for driving the second sensor;
and the second A/D conversion circuit is respectively connected with the second sensor and the flow calculation unit, and is used for converting the second pressure value from an analog signal to a digital signal and transmitting the second pressure value of the digital signal to the flow calculation unit.
5. A flow control system, comprising:
the flow sensing device of any one of claims 1-4;
the gas channel comprises an upstream channel and a downstream channel which are connected, and gas flows in from the upstream channel and flows out from the downstream channel, wherein a throat is further formed at the joint of the upstream channel and the downstream channel, and the cross sectional area of the throat is smaller than that of any one of the upstream channel and the downstream channel;
and the valve device is arranged at the air inlet of the upstream channel and used for controlling the gas flow of the gas channel according to the corrected flow value obtained by the flow detection device.
6. The flow control system of claim 5, wherein the valve arrangement comprises:
the piezoelectric valve is arranged at the air inlet of the upstream channel and used for controlling the size of the air inlet of the upstream channel;
the piezoelectric driving circuit is connected with the piezoelectric valve and is used for driving the piezoelectric valve;
and the third A/D conversion circuit is respectively connected with the piezoelectric driving circuit and the flow calculation unit and is used for converting the corrected flow value from a digital signal to an analog signal and controlling the piezoelectric driving circuit by using the corrected flow value of the analog signal.
7. A flow detection method, comprising:
when gas passes through a throat of the gas channel, respectively measuring a first pressure value of the upstream channel and a second pressure value of the downstream channel;
and obtaining a correction flow value by analyzing the first pressure value and the second pressure value.
8. Method according to claim 7, characterized in that it is carried out according to said first pressure value PiAnd said second pressure value PjThe corrected flow rate value Q is obtained by the following relational expressionV：
Wherein Q isVRepresenting the corrected flow value, k representing a proportionality constant, PiRepresenting said first pressure value, PjRepresenting the second pressure value.
9. The method of claim 7, wherein said deriving a corrected flow value further comprises:
and controlling the gas flow in the gas channel according to the corrected flow value.
10. The method of claim 9, wherein said controlling the flow of gas in the gas channel based on the corrective flow value comprises: the gas flow in the gas channel is controlled by a piezoelectric valve.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111883465A (en) * | 2020-08-05 | 2020-11-03 | 北京七星华创流量计有限公司 | Process chamber pressure control device |
| CN112000139A (en) * | 2020-09-09 | 2020-11-27 | 北京七星华创流量计有限公司 | Gas mass flow controller and fault self-checking method |
| CN114485758A (en) * | 2021-12-30 | 2022-05-13 | 钢铁研究总院 | Valve group instrument detection device and method |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000075932A (en) * | 1998-08-31 | 2000-03-14 | Horiba Ltd | Gas flow rate controller |
| CN1494672A (en) * | 2001-12-28 | 2004-05-05 | ��ʽ���縻ʿ�� | Advanced pressure type flow control device |
| CN1682235A (en) * | 2002-07-19 | 2005-10-12 | 米克罗利斯公司 | Fluid flow measuring and proportional fluid flow control device |
| CN103765168A (en) * | 2011-05-23 | 2014-04-30 | 微动公司 | System and method for preventing false flow measurements in a vibrating meter |
| CN104704434A (en) * | 2012-09-25 | 2015-06-10 | Mks仪器公司 | Method and apparatus for self verification of pressure based mass flow controllers |
-
2018
- 2018-10-29 CN CN201811267566.5A patent/CN111103020B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000075932A (en) * | 1998-08-31 | 2000-03-14 | Horiba Ltd | Gas flow rate controller |
| CN1494672A (en) * | 2001-12-28 | 2004-05-05 | ��ʽ���縻ʿ�� | Advanced pressure type flow control device |
| CN1682235A (en) * | 2002-07-19 | 2005-10-12 | 米克罗利斯公司 | Fluid flow measuring and proportional fluid flow control device |
| CN103765168A (en) * | 2011-05-23 | 2014-04-30 | 微动公司 | System and method for preventing false flow measurements in a vibrating meter |
| CN104704434A (en) * | 2012-09-25 | 2015-06-10 | Mks仪器公司 | Method and apparatus for self verification of pressure based mass flow controllers |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111883465A (en) * | 2020-08-05 | 2020-11-03 | 北京七星华创流量计有限公司 | Process chamber pressure control device |
| CN112000139A (en) * | 2020-09-09 | 2020-11-27 | 北京七星华创流量计有限公司 | Gas mass flow controller and fault self-checking method |
| CN112000139B (en) * | 2020-09-09 | 2024-04-16 | 北京七星华创流量计有限公司 | Gas mass flow controller and fault self-checking method |
| CN114485758A (en) * | 2021-12-30 | 2022-05-13 | 钢铁研究总院 | Valve group instrument detection device and method |
| CN114485758B (en) * | 2021-12-30 | 2022-11-15 | 钢铁研究总院 | Valve group instrument detection device and method |
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