CN111962047A - Method for improving graphite boat treatment effect - Google Patents
Method for improving graphite boat treatment effect Download PDFInfo
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- CN111962047A CN111962047A CN202010832367.5A CN202010832367A CN111962047A CN 111962047 A CN111962047 A CN 111962047A CN 202010832367 A CN202010832367 A CN 202010832367A CN 111962047 A CN111962047 A CN 111962047A
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- graphite boat
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- bubbling
- graphite
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 116
- 229910002804 graphite Inorganic materials 0.000 title claims abstract description 116
- 239000010439 graphite Substances 0.000 title claims abstract description 116
- 238000000034 method Methods 0.000 title claims abstract description 52
- 230000000694 effects Effects 0.000 title claims abstract description 29
- 238000004140 cleaning Methods 0.000 claims abstract description 59
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 37
- 230000005587 bubbling Effects 0.000 claims abstract description 36
- 238000001035 drying Methods 0.000 claims abstract description 32
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims abstract description 30
- 238000002791 soaking Methods 0.000 claims abstract description 14
- 239000007788 liquid Substances 0.000 claims abstract description 10
- 238000005086 pumping Methods 0.000 claims abstract description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 30
- 238000010926 purge Methods 0.000 claims description 30
- 238000005507 spraying Methods 0.000 claims description 21
- 239000008367 deionised water Substances 0.000 claims description 17
- 229910021641 deionized water Inorganic materials 0.000 claims description 17
- 229910052757 nitrogen Inorganic materials 0.000 claims description 14
- 238000005406 washing Methods 0.000 claims description 13
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical group N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 9
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 claims description 5
- 235000011114 ammonium hydroxide Nutrition 0.000 claims description 5
- 239000010865 sewage Substances 0.000 claims description 4
- 238000007599 discharging Methods 0.000 claims description 2
- 229910001873 dinitrogen Inorganic materials 0.000 claims 2
- 238000007664 blowing Methods 0.000 claims 1
- 239000007921 spray Substances 0.000 claims 1
- 239000000243 solution Substances 0.000 description 16
- 239000002253 acid Substances 0.000 description 8
- 229910052581 Si3N4 Inorganic materials 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 235000012431 wafers Nutrition 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 5
- 230000002378 acidificating effect Effects 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 239000012670 alkaline solution Substances 0.000 description 2
- 229910004205 SiNX Inorganic materials 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000013082 photovoltaic technology Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000010408 sweeping Methods 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
- C23C16/4407—Cleaning of reactor or reactor parts by using wet or mechanical methods
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/34—Nitrides
- C23C16/345—Silicon nitride
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
- C23C16/4405—Cleaning of reactor or parts inside the reactor by using reactive gases
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical Vapour Deposition (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
The invention relates to the technical field of graphite boat treatment, and discloses a method for improving the treatment effect of a graphite boat, which comprises the following steps: s1: disassembling: preparing a graphite boat to be cleaned, disassembling the graphite boat and cleaning the graphite boat and the process stuck points respectively; s2: preparing liquid: preparing a hydrofluoric acid solution with the concentration of 7-15% in the cleaning tank; s3: cleaning: putting the whole graphite boat into a prepared hydrofluoric acid solution, soaking for 5-7 hours, and starting bubbling while soaking; s4: liquid pumping: and after the graphite boat is wholly soaked for 5-7 hours, extracting the hydrofluoric acid solution in the step. The invention can ensure that each surface can be effectively sprayed and cleaned, improves the cleaning effect, can prevent water drops on the surface of the graphite boat during drying and residues after drying from influencing the normal use of the graphite boat, and can prevent the graphite boat which is unqualified to be cleaned from being put into use again through the checking step, thereby improving the cleaning effect.
Description
Technical Field
The invention relates to the technical field of graphite boat treatment, in particular to a method for improving the treatment effect of a graphite boat.
Background
With the continuous development of photovoltaic technology, crystalline silicon solar cells have been rapidly developed as a clean energy product for converting solar energy into electric energy. With the continuous development of PECVD (plasma enhanced chemical vapor deposition, which is a process in the process of manufacturing a solar cell), the technology is changed from the original plate-type PECVD to tubular PECVD, and the aim of the technology is to deposit a layer of deep blue SiNx film on the surface (diffusion surface) of a silicon wafer.
After the graphite boat runs for a certain number of times, the surface deposits very thick silicon nitride, which affects the contact between the boat wall and the silicon wafer, thereby affecting the quality of the coating film and causing the serious color difference problem of the battery piece, therefore, the graphite boat needs to be cleaned, but the current cleaning method generally has poor cleaning effect and can not meet the requirements of people.
Disclosure of Invention
Technical problem to be solved
Aiming at the defects of the prior art, the invention provides a method for improving the treatment effect of a graphite boat, and mainly aims to solve the problem that the cleaning effect of the prior method on the graphite boat is not good enough.
(II) technical scheme
In order to achieve the purpose, the invention provides the following technical scheme:
a method for improving the treatment effect of a graphite boat comprises the following steps:
s1: disassembling: preparing a graphite boat to be cleaned, disassembling the graphite boat and cleaning the graphite boat and the process stuck points respectively;
s2: preparing liquid: preparing a hydrofluoric acid solution with the concentration of 7-15% in the cleaning tank;
s3: cleaning: putting the whole graphite boat into a prepared hydrofluoric acid solution, soaking for 5-7 hours, and starting bubbling while soaking;
s4: liquid pumping: after the graphite boat is wholly soaked for 5-7 hours, the hydrofluoric acid solution in the step is extracted;
s5: spraying: spraying deionized water to the whole soaked graphite boat for 5-15 min;
s6: washing and bubbling: carrying out bubbling treatment on the whole sprayed graphite boat by using deionized water;
s7: and (4) purging and checking: purging the surface of the graphite boat by using an air gun, cleaning the graphite boat, checking whether the surface of the boat, the joint of the graphite stuck point and the boat sheet and other parts have residues of silicon nitride after cleaning is finished, returning to S3 for re-cleaning if the surface, the joint of the graphite stuck point and the boat sheet and other parts have residues of silicon nitride, preventing water drops on the surface of the graphite boat during drying by purging operation, and preventing the residues from influencing normal use after drying, wherein the checking step can prevent the unqualified graphite boat from being used again, so that the cleaning effect is improved;
s8: drying: and (3) placing the graphite boat subjected to air gun purging into an oven, setting the drying temperature range to be 111-120 ℃, and setting the drying time range to be 11-12 hours.
Further, the process stuck point is washed by pure water for 1-3 times by S1, and then the process stuck point is placed into an ultrasonic reactor to be cleaned by ultrasonic waves, the frequency of the ultrasonic waves is 4.1-4.8KHz, and the water is changed every 30-50 minutes, so that the cleaning efficiency of the graphite boat and the process stuck point is improved, and the cleaning cost of the process stuck point is reduced.
On the basis of the scheme, the graphite boat needs to be manually turned over when spraying in the S5, and each surface can be effectively sprayed and cleaned.
As a further scheme of the invention, ammonia water with the pH value of 7.5-8 is added into deionized water during spraying in S5 for auxiliary cleaning, and a weak base solution can neutralize acidic substances adsorbed in the graphite after acid cleaning, so that the cleaning effect is better, the residual acid on the wall of the graphite boat can be removed more effectively, other impurities are not introduced, and the boat wall and silicon wafers are not corroded.
Furthermore, in the step S6, overflow treatment is performed when the graphite boat is washed with water, the bubbling treatment is started during overflow for 1-3 hours, and sufficient overflow can ensure that weak alkaline solution adhered to the graphite boat during the soaking process is sufficiently cleaned, thereby improving the washing effect.
On the basis of the scheme, the bubbling treatment in the S6 is carried out by bubbling with nitrogen, discharging sewage after bubbling for 10-25 minutes, then washing with deionized water for 10-30min and bubbling with nitrogen.
In a further scheme of the invention, in the step S7, when purging is performed, the purging angle and the inclination of the surface of the graphite boat are ensured to be less than 30 degrees, and the purging time per surface is 1-6 minutes, so as to prevent the graphite boat from being damaged when the inclination angle is too large during purging.
Further, nitrogen is added into the drying box when drying in the S8, wherein the flow rate of the nitrogen is 90L/min, and the stability and the quality of drying are ensured.
(III) advantageous effects
Compared with the prior art, the invention provides a method for improving the treatment effect of a graphite boat, which has the following beneficial effects:
1. the graphite boat surface has the water droplet when can preventing to dry through sweeping the operation, has remaining after the stoving, influences its normal use, and the step of inspection can prevent to clear up unqualified graphite boat and come into use once more, has improved clean effect moreover.
2. Through washing the technology stuck point with pure water, then put into ultrasonic reactor and wash with the ultrasonic wave, improved the cleaning efficiency of graphite boat and technology stuck point, reduce the cleaning cost of technology stuck point, will artifically overturn the graphite boat when spraying, ensure that every face can both obtain effectual spraying and wash, improve the cleaning performance.
3. The ammonia water with the pH value of 7.5-8 is added into the deionized water during spraying for auxiliary cleaning, the weak base solution can neutralize the acidic substances absorbed in the graphite after acid cleaning, the cleaning effect is better, the residual acid on the wall of the graphite boat can be more effectively removed, other impurities are not introduced, and the boat wall and the silicon wafer cannot be corroded.
4. And (3) carrying out overflow treatment when the graphite boat is washed, wherein the overflow is carried out for 1-3 hours, the bubbling treatment work is started while the graphite boat overflows, and the sufficient overflow can ensure that weak alkaline solution adhered to the graphite boat in the soaking process is sufficiently cleaned, so that the washing effect is improved.
5. When the graphite boat is purged, the purging angle and the surface gradient of the graphite boat are ensured to be less than 30 degrees, and the purging time of each surface is 1-6 minutes, so that the graphite boat is prevented from being damaged when the purging is carried out due to the overlarge inclination angle.
Drawings
FIG. 1 is a schematic view of the flow structure of a method for improving the treatment effect of a graphite boat according to the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example 1
Referring to fig. 1, a method for improving the treatment effect of a graphite boat comprises the following steps:
s1: disassembling: preparing a graphite boat to be cleaned, disassembling the graphite boat and cleaning the graphite boat and the process stuck points respectively;
s2: preparing liquid: preparing a hydrofluoric acid solution with the concentration of 7-15% in the cleaning tank;
s3: cleaning: putting the whole graphite boat into a prepared hydrofluoric acid solution, soaking for 5-7 hours, and starting bubbling while soaking;
s4: liquid pumping: after the graphite boat is wholly soaked for 5-7 hours, the hydrofluoric acid solution in the step is extracted;
s5: spraying: spraying deionized water to the whole soaked graphite boat for 5-15 min;
s6: washing and bubbling: carrying out bubbling treatment on the whole sprayed graphite boat by using deionized water;
s7: and (4) purging and checking: purging the surface of the graphite boat by using an air gun, cleaning the graphite boat, checking whether the surface of the boat, the joint of the graphite stuck point and the boat sheet and other parts have residues of silicon nitride after cleaning is finished, returning to S3 for re-cleaning if the surface, the joint of the graphite stuck point and the boat sheet and other parts have residues of silicon nitride, preventing water drops on the surface of the graphite boat during drying by purging operation, and preventing the residues from influencing normal use after drying, wherein the checking step can prevent the unqualified graphite boat from being used again, so that the cleaning effect is improved;
s8: drying: and (3) placing the graphite boat subjected to air gun purging into an oven, setting the drying temperature range to be 111-120 ℃, and setting the drying time range to be 11-12 hours.
The process stuck point is washed by pure water for 1-3 times in S1, and then the process stuck point is placed in an ultrasonic reactor to be cleaned by ultrasonic waves, the frequency of the ultrasonic waves is 4.1-4.8KHz, and the water is changed every 30-50 minutes, so that the cleaning efficiency of the graphite boat and the process stuck point is improved, the cleaning cost of the process stuck point is reduced, and the graphite boat needs to be manually turned over when spraying in S5, so that each surface can be effectively cleaned by spraying.
It should be particularly noted that ammonia water with a PH value of 7.5-8 is added into deionized water in the spraying process in S5 for auxiliary cleaning, a weak base solution can neutralize acidic substances adsorbed in the graphite after acid cleaning, the cleaning effect is better, residual acid on the wall of the graphite boat can be removed more effectively, other impurities are not introduced, the boat wall and a silicon wafer are not corroded, overflow treatment is performed in the water washing process of the graphite boat in S6, the bubbling treatment is performed for 1-3 hours while overflowing, the bubbling treatment work is started, sufficient overflow can ensure that the weak base solution adhered in the soaking process of the graphite boat is sufficiently cleaned, the water cleaning effect is improved, nitrogen is used for bubbling in the bubbling treatment in S6, sewage is discharged after bubbling for 10-25 minutes, then deionized water is used for washing for 10-30 minutes and nitrogen is used for bubbling, a purging angle and the inclination of the surface of the graphite boat are ensured to be less than 30 degrees in the purging process in S7, and each surface is purged for 1-6 minutes, the graphite boat is prevented from being damaged when the inclination angle is too large during purging, nitrogen is added into the drying box when drying in S8, the nitrogen flow is 90L/min, and the drying stability and quality are ensured.
Example 2
Referring to fig. 1, a method for improving the treatment effect of a graphite boat comprises the following steps:
s1: disassembling: preparing a graphite boat to be cleaned, disassembling the graphite boat and cleaning the graphite boat and the process stuck points respectively;
s2: preparing liquid: preparing a hydrofluoric acid solution with the concentration of 9% -15% in a cleaning tank;
s3: cleaning: putting the whole graphite boat into a prepared hydrofluoric acid solution, soaking for 5-7 hours, and starting bubbling while soaking;
s4: liquid pumping: after the graphite boat is wholly soaked for 5-7 hours, the hydrofluoric acid solution in the step is extracted;
s5: spraying: spraying deionized water to the whole soaked graphite boat for 5-15 min;
s6: washing and bubbling: carrying out bubbling treatment on the whole sprayed graphite boat by using deionized water;
s7: and (4) purging and checking: purging the surface of the graphite boat by using an air gun, cleaning the graphite boat, checking whether the surface of the boat, the joint of the graphite stuck point and the boat sheet and other parts have residues of silicon nitride after cleaning is finished, returning to S3 for re-cleaning if the surface, the joint of the graphite stuck point and the boat sheet and other parts have residues of silicon nitride, preventing water drops on the surface of the graphite boat during drying by purging operation, and preventing the residues from influencing normal use after drying, wherein the checking step can prevent the unqualified graphite boat from being used again, so that the cleaning effect is improved;
s8: drying: and (3) placing the graphite boat subjected to air gun purging into an oven, setting the drying temperature range to be 115-120 ℃, and setting the drying time range to be 11-12 hours.
The process stuck point is washed by pure water for 1-3 times in S1, and then the process stuck point is placed in an ultrasonic reactor to be cleaned by ultrasonic waves, the frequency of the ultrasonic waves is 4.1-4.5KHz, and the water is changed every 30-55 minutes, so that the cleaning efficiency of the graphite boat and the process stuck point is improved, the cleaning cost of the process stuck point is reduced, and the graphite boat needs to be manually turned over when spraying in S5, so that each surface can be effectively cleaned by spraying.
It should be particularly noted that ammonia water with a PH value of 7.5-8 is added into deionized water in the spraying process in S5 for auxiliary cleaning, a weak base solution can neutralize acidic substances adsorbed in the graphite after acid cleaning, the cleaning effect is better, residual acid on the wall of the graphite boat can be removed more effectively, other impurities are not introduced, the boat wall and a silicon wafer are not corroded, overflow treatment is performed in the water washing process of the graphite boat in S6, the bubbling treatment is performed for 1-3 hours while overflowing, the bubbling treatment work is started, sufficient overflow can ensure that the weak base solution adhered in the soaking process of the graphite boat is sufficiently cleaned, the water cleaning effect is improved, nitrogen is used for bubbling in the bubbling treatment in S6, sewage is discharged after bubbling for 10-28 minutes, then deionized water is used for washing for 10-30 minutes and nitrogen bubbling, a purging angle and the inclination of the surface of the graphite boat are ensured to be less than 40 degrees in the purging process in S7, and each surface is purged for 1-6 minutes, the graphite boat is prevented from being damaged when the inclination angle is too large during purging, nitrogen is added into the drying box when drying in S8, the nitrogen flow is 90L/min, and the drying stability and quality are ensured.
In the description herein, it is noted that relational terms such as first and second, and the like, are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (8)
1. A method for improving the treatment effect of a graphite boat is characterized by comprising the following steps:
s1: disassembling: preparing a graphite boat to be cleaned, disassembling the graphite boat and cleaning the graphite boat and the process stuck points respectively;
s2: preparing liquid: preparing a hydrofluoric acid solution with the concentration of 7-15% in the cleaning tank;
s3: cleaning: putting the whole graphite boat into a prepared hydrofluoric acid solution, soaking for 5-7 hours, and starting bubbling while soaking;
s4: liquid pumping: after the graphite boat is wholly soaked for 5-7 hours, the hydrofluoric acid solution in the step is extracted;
s5: spraying: spraying deionized water to the whole soaked graphite boat for 5-15 min;
s6: washing and bubbling: carrying out bubbling treatment on the whole sprayed graphite boat by using deionized water;
s7: and (4) purging and checking: blowing the surface of the graphite boat by using an air gun, cleaning the graphite boat, checking whether the surface of the boat, the joint of the graphite stuck point and the boat sheet and other parts have silicon nitride residues after cleaning is finished, and returning to S3 for re-cleaning if the silicon nitride residues exist;
s8: drying: and (3) placing the graphite boat subjected to air gun purging into an oven, setting the drying temperature range to be 111-120 ℃, and setting the drying time range to be 11-12 hours.
2. The method of claim 1, wherein the process stuck point is washed 1-3 times with pure water and then cleaned with ultrasonic waves in an ultrasonic reactor at a frequency of 4.1-4.8KHz, and the water is changed every 30-50 minutes at S1.
3. The method of claim 1, wherein the graphite boat is manually turned over during spraying in S5 to ensure effective spray cleaning on each side.
4. The method of claim 1, wherein the deionized water used in the spraying of S5 is supplemented with ammonia water having a pH of 7.5-8.
5. The method of claim 1, wherein in step S6, the graphite boat is washed with water and then overflows for 1-3 hours, and bubbling is started simultaneously with the overflowing.
6. The method of claim 5, wherein the bubbling in S6 is performed by bubbling with nitrogen gas, discharging the sewage after bubbling for 10-25 min, and then washing with deionized water for 10-30min and bubbling with nitrogen gas.
7. The method of claim 2, wherein the purging in step S7 is performed to ensure that the purging angle and the inclination of the boat surface are less than 30 degrees, and the purging time is 1-6 minutes per surface.
8. The method for improving the treatment effect of the graphite boat as claimed in claim 6, wherein nitrogen is added into the drying box during the drying in S8, and the flow rate of nitrogen is 90L/min, so as to ensure the stability and quality of the drying.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202010832367.5A CN111962047A (en) | 2020-08-18 | 2020-08-18 | Method for improving graphite boat treatment effect |
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| CN202010832367.5A CN111962047A (en) | 2020-08-18 | 2020-08-18 | Method for improving graphite boat treatment effect |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113118158A (en) * | 2021-03-18 | 2021-07-16 | 安徽英发睿能科技股份有限公司 | Cleaning method of PECVD graphite boat |
| CN113333374A (en) * | 2021-06-10 | 2021-09-03 | 厦门士兰明镓化合物半导体有限公司 | Method for cleaning graphite plate |
| CN113787048A (en) * | 2021-09-13 | 2021-12-14 | 通威太阳能(眉山)有限公司 | Method for cleaning graphite boat |
| CN113828584A (en) * | 2021-09-28 | 2021-12-24 | 通威太阳能(眉山)有限公司 | Graphite boat cleaning method and equipment |
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| CN113118158A (en) * | 2021-03-18 | 2021-07-16 | 安徽英发睿能科技股份有限公司 | Cleaning method of PECVD graphite boat |
| CN115181956A (en) * | 2021-04-06 | 2022-10-14 | 天津爱旭太阳能科技有限公司 | Graphite boat repairing method and graphite boat |
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| CN113828584A (en) * | 2021-09-28 | 2021-12-24 | 通威太阳能(眉山)有限公司 | Graphite boat cleaning method and equipment |
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