CN110523696A - A kind of cleaning method of PECVD graphite boat - Google Patents
A kind of cleaning method of PECVD graphite boat Download PDFInfo
- Publication number
- CN110523696A CN110523696A CN201910831719.2A CN201910831719A CN110523696A CN 110523696 A CN110523696 A CN 110523696A CN 201910831719 A CN201910831719 A CN 201910831719A CN 110523696 A CN110523696 A CN 110523696A
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- Prior art keywords
- graphite boat
- cleaning method
- integrally
- pecvd
- time
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/048—Overflow-type cleaning, e.g. tanks in which the liquid flows over the tank in which the articles are placed
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/102—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration with means for agitating the liquid
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Cleaning In General (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
The present invention discloses a kind of cleaning method of PECVD graphite boat comprising following steps: matching liquid: configuring hydrofluoric acid solution in rinse bath；Cleaning: graphite boat is integrally put into hydrofluoric acid solution, and soaking time is 5-7 hours, is impregnated while being opened bubbling；Drawing liquid: after graphite boat integrally impregnates 5-7 hours, hydrofluoric acid solution is extracted out；It sprays: graphite boat integrally being sprayed with deionized water, spray time is set as 1-10 minutes for the first time；Washing is bubbled: integrally being carried out overflow 1-2 hour to the graphite boat sprayed using deionized water, bubbling is opened while overflow；Purging: graphite boat surface is purged with air gun；Drying: it will be put into baking oven by the purged graphite boat of air gun.In cleaning method provided by the invention, graphite boat is integrally cleaned, reduces the time of disassembly and installation graphite boat, and shortens graphite boat scavenging period, existing PECVD process production capacity is improved, does not influence the color difference of pecvd process.
Description
Technical field
The present invention relates to graphite boat field used more particularly to a kind of PECVD graphite boats in crystal silicon solar batteries manufacture
Cleaning method.
Background technique
With the continuous development of photovoltaic technology, crystal silicon solar batteries as with it is a kind of convert solar energy into electrical energy it is clear
Clean energy products are grown rapidly.
As (chemical vapor deposition of plasma enhancing is one of the work made in solar battery process to PECVD
Sequence) technology continuous development, it is transformed to tubular type PECVD from original board-like PECVD, its purpose is in silicon chip surface (diffusion
Face) one layer of navy blue SiNx film of deposition, and the effect of this layer of SiNx film is: the reflection of battery surface light is reduced, surface is carried out
And body passivation, the reverse leakage current of battery is reduced, there is good anti-oxidant and insulation performance, while there is good blocking sodium
The ability of ion, barrier metal and water vapor diffusion.After graphite boat runs to certain number, surface deposited very thick nitrogen
SiClx influences contact of the boat wall with silicon wafer, to influence the quality of plated film, cell piece is caused serious color difference problem occur, because
This will carry out the cleaning of graphite boat.Current most of cell piece manufacturers use after graphite boat has used 80-100 times
Fragment cleaning process needs the long period because installing again after disassembly, cleaning after disassembly graphite boat entirety, thereby increases and it is possible to can damage graphite
Boat and influence graphite boat service performance.
Summary of the invention
In order to solve the problems in the existing technology, the present invention provides a kind of cleaning method of PECVD graphite boat, contractings
Short graphite boat scavenging period improves existing PECVD process production capacity, does not influence the color difference of pecvd process, the technical solution is such as
Under:
The present invention provides a kind of cleaning method of PECVD graphite boat comprising following steps:
S1, match liquid: the hydrofluoric acid solution that configuration concentration is 20%~25% in rinse bath；
S2, cleaning: graphite boat being integrally put into S1 step in prepared hydrofluoric acid solution, and soaking time is that 5-7 is small
When, it opens while immersion and is bubbled；
S3, drawing liquid: after graphite boat integrally impregnates 5-7 hours, the hydrofluoric acid solution in S2 step is extracted out；
S4, it sprays: the graphite boat in S3 step integrally being sprayed with deionized water, spray time is set as the first time
1-10 minutes；
S5, washing are bubbled: it is small integrally to carry out overflow 1-2 to the graphite boat sprayed in S4 step using deionized water
When, it opens while overflow and is bubbled；
S6, purging: with graphite boat surface in air gun purging S5 step；
S7, drying: will be put into baking oven in S7 step by the purged graphite boat of air gun, set drying temperature range as
110 DEG C -130 DEG C, drying time range is set as 11-12 hours.
Further, the cleaning method further include: before the purging of S6 step further include following steps:
Second of spray: the graphite boat in S5 step after washing is bubbled integrally is sprayed with deionized water, is sprayed
The leaching time is set as 1-10 minutes.
Further, in second of spray, the graphite boat in S5 step is integrally sprayed with deionized water, is sprayed
Time is 1 minute.
Further, in S2 step, the whole soaking time in hydrofluoric acid of the graphite boat is set as 6 hours, is soaked
It opens and is bubbled while bubble.
Further, in S4 step, whole with the graphite boat in deionized water spray S3 step, spray time is 5 points
Clock.
Further, in S4 step, overturning graphite boat is whole when spraying the graphite boat entirety in S3 step with deionized water
Body.
Further, in S5 step, the number of the overflow is 3 times, and each overflow time is set as 30 minutes.
Further, in S4 step and second of spraying step, graphite boat is integrally sprayed using spray equipment,
The spray equipment has multiple hole for water sprayings.
Further, in S7 step, the drying temperature is set as 110 DEG C, and drying time is set as 12 hours.
Further, in S2 and S5 step, the air pressure range of bubbling is set as 0.40-0.5Mpa.
Technical solution bring provided by the invention has the beneficial effect that:
In the cleaning method of PECVD graphite boat provided by the invention, graphite boat is integrally cleaned, reduces disassembly and peace
The time of graphite boat is filled, and shortens graphite boat scavenging period, existing PECVD process production capacity is improved, does not influence the color of pecvd process
Difference.
Detailed description of the invention
To describe the technical solutions in the embodiments of the present invention more clearly, make required in being described below to embodiment
Attached drawing is briefly described, it should be apparent that, drawings in the following description are only some embodiments of the invention, for
For those of ordinary skill in the art, without creative efforts, it can also be obtained according to these attached drawings other
Attached drawing.
Fig. 1 is the flow chart of the cleaning method of PECVD graphite boat provided in an embodiment of the present invention.
Specific embodiment
In order to enable those skilled in the art to better understand the solution of the present invention, below in conjunction in the embodiment of the present invention
Attached drawing, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is only
The embodiment of a part of the invention, instead of all the embodiments.Based on the embodiments of the present invention, ordinary skill people
The model that the present invention protects all should belong in member's every other embodiment obtained without making creative work
It encloses.
It should be noted that description and claims of this specification and term " first " in above-mentioned attached drawing, "
Two " etc. be to be used to distinguish similar objects, without being used to describe a particular order or precedence order.It should be understood that using in this way
Data be interchangeable under appropriate circumstances, so as to the embodiment of the present invention described herein can in addition to illustrating herein or
Sequence other than those of description is implemented.In addition, term " includes " and " having " and their any deformation, it is intended that cover
Covering non-exclusive includes to be not necessarily limited to for example, containing the process, method of a series of steps or units, device, product or equipment
Step or unit those of is clearly listed, but may include be not clearly listed or for these process, methods, product
Or other step or units that equipment is intrinsic.
In one embodiment of the invention, a kind of cleaning method of PECVD graphite boat is provided, it is specific to walk referring to Fig. 1
It is rapid as follows:
S1, match liquid: the hydrofluoric acid that configuration concentration is 20%~25% in rinse bath, when concrete configuration hydrofluoric acid solution,
Water is first added in the rinse bath, then hydrofluoric acid is added into slot, hydrofluoric acid solution concentration is preferably 20%；
S2, cleaning: graphite boat being integrally put into S1 step in prepared hydrofluoric acid, and soaking time is 5-7 hours, leaching
It opens and is bubbled while bubble, the effect of pressure pulse cleaning is to make the intracorporal chemical flow of slot, and it is surfaces nitrided to accelerate graphite boat
The removing of silicon；The air pressure of bubbling is set as 0.40-0.5Mpa；
S3, drawing liquid: after graphite boat integrally impregnates 5-7 hours, the hydrofluoric acid in S2 step is extracted out；As having hydrogen in secondary slot
The hydrofluoric acid in secondary slot is discharged in fluoric acid liquid；
S4, spray for the first time: with graphite boat entirety 1-10 minutes in deionized water spray S3 step, spray time was preferred
It is 5 minutes, to remove remaining hydrofluoric acid on graphite boat within a short period of time；In addition graphite boat may be reversed in graphite boat entirety
Entirety is so that each position of graphite boat is sufficiently sprayed, to thoroughly remove remaining hydrofluoric acid on graphite boat, raising cleaning
Efficiency saves scavenging period；And by spray removal graphite boat acid impurities, damage will not be generated to graphite boat boat piece；With height
Pressure hydraulic giant flushing may cause to damage to boat piece, and relatively high pressure hydraulic giant sprays more safe and effective；
S5, washing are bubbled: the graphite boat sprayed in S4 step integrally being used deionized water overflow 1-2 hours, is soaked
It opens and is bubbled when bubble, the air pressure of bubbling is set as 0.40-0.5Mpa, and overflow is to further remove remaining hydrogen on graphite boat
Fluoric acid；Preferably, the number of the overflow is 3 times, and each overflow time is set as 30 minutes, and primary overflow process refers to rinse bath
Interior deionized water to cover graphite boat entirety, i.e., graphite boat is integrally totally submerged in deionized water, and into rinse bath not between
Disconnected discharge deionized water, to the primary overflow time after, deionized water in rinse bath is completely drawn out, then pour pure go
Ionized water carries out overflow；Because graphite boat can reduce overflow number integrally by spray in S5 step in S4 step, guaranteeing clearly
It washes effect simultaneously, plays and save scavenging period purpose；
Second sprays: it is whole with the graphite boat after washing is bubbled in deionized water spray S5 step, when spray
Between be 1-10 minutes, to completely remove remaining hydrofluoric acid on graphite boat, graphite boat can be sprayed again after S5 step,
At this point, it is shorter the time required to spray, preferably 2 minutes；
S6, air gun purging: the graphite boat surface after having carried out second of spray with air gun purging, to purge its surface water
Point；
S7, drying: will be put into baking oven in S6 step by the purged graphite boat of air gun, set drying temperature range as
110 DEG C -130 DEG C, drying time range is set as 11-12 hours, it is preferable that the drying temperature is set as 110 DEG C, and dries
Time is set as 12 hours, drying to be done, opens after oven door naturally cools to room temperature and carries away manually.
In S4 step and second of spraying step, graphite boat is integrally sprayed using spray equipment, the spray
Device is a corrosion resistant general pipeline, has arrived above groove body and has been divided into 2 pipelines, is provided with multiple hole for water sprayings on pipeline, when spray
Deionized water, which is flowed out from hole for water spraying to graphite boat, to be sprayed.
Stone under same cleaning condition, after the cleaning method for using PECVD graphite boat provided by the invention is cleaned
Graphite boat after Mo Zhouyu is cleaned using Conventional cleaning methods is tested for the property comparison, the graphite after two kinds of cleaning method cleanings
The test data comparison of the performance of boat is shown in Table 1.
The performance test data comparison table of graphite boat after the cleaning of 1 two methods of table
| Title | Scavenging period | Service life (access times) |
| Graphite boat after this method cleaning | 19 hours | 100-130 times |
| Graphite boat after conventional clean | 22 hours | Less than 100 times |
As seen from the above table, shortened using the cleaning method scavenging period that the present invention designs, workable number increases after cleaning
Greatly, and after plated film there is no color difference.
In the cleaning method of PECVD graphite boat provided by the invention, graphite boat is integrally cleaned, reduces disassembly and peace
The time of graphite boat is filled, and shortens graphite boat scavenging period, existing PECVD process production capacity is improved, does not influence the color of pecvd process
Difference.
The foregoing is merely presently preferred embodiments of the present invention, is not intended to limit the invention, it is all in spirit of the invention and
Within principle, any modification, equivalent replacement, improvement and so on be should all be included in the protection scope of the present invention.
Claims (10)
1. a kind of cleaning method of PECVD graphite boat, which comprises the following steps:
S1, match liquid: the hydrofluoric acid solution that configuration concentration is 20%~25% in rinse bath；
S2, cleaning: graphite boat being integrally put into S1 step in prepared hydrofluoric acid solution, and soaking time is 5-7 hours, leaching
It opens and is bubbled while bubble；
S3, drawing liquid: after graphite boat integrally impregnates 5-7 hours, the hydrofluoric acid solution in S2 step is extracted out；
S4, it sprays: the graphite boat in S3 step integrally being sprayed with deionized water, spray time is set as 1-10 for the first time
Minute；
S5, washing are bubbled: the graphite boat sprayed in S4 step integrally carried out overflow 1-2 hours using deionized water,
It opens and is bubbled while overflow；
S6, purging: with graphite boat surface in air gun purging S5 step；
S7, drying: it is put into the purged graphite boat of air gun is passed through in S7 step in baking oven, sets drying temperature range as 110
DEG C -130 DEG C, drying time range is set as 11-12 hours.
2. the cleaning method of PECVD graphite boat according to claim 1, which is characterized in that the cleaning method further include:
Further include following steps before the purging of S6 step:
Second sprays: integrally being sprayed with deionized water to the graphite boat in S5 step after washing is bubbled, when spray
Between be set as 1-10 minutes.
3. the cleaning method of PECVD graphite boat according to claim 2, which is characterized in that in second of spray, spend
Ionized water integrally sprays the graphite boat in S5 step, and spray time is 1 minute.
4. the cleaning method of PECVD graphite boat according to claim 1, which is characterized in that in S2 step, the graphite
The whole soaking time in hydrofluoric acid of boat is set as 6 hours, and immersion while, which opens, to be bubbled.
5. the cleaning method of PECVD graphite boat according to claim 2, which is characterized in that in S4 step, use deionization
Graphite boat in water spray S3 step is whole, and spray time is 5 minutes.
6. the cleaning method of PECVD graphite boat according to claim 1, which is characterized in that in S4 step, use deionization
Overturning graphite boat is whole when graphite boat entirety in water spray S3 step.
7. the cleaning method of PECVD graphite boat according to claim 1, which is characterized in that in S5 step, the overflow
Number be 3 times, each overflow time is set as 30 minutes.
8. the cleaning method of PECVD graphite boat according to claim 2, which is characterized in that sprayed in S4 step and second
It drenches in step, graphite boat is integrally sprayed using spray equipment, the spray equipment has multiple hole for water sprayings.
9. the cleaning method of PECVD graphite boat according to claim 1, which is characterized in that in S7 step, the drying
Temperature is set as 110 DEG C, and drying time is set as 12 hours.
10. the cleaning method of PECVD graphite boat according to claim 1, which is characterized in that in S2 and S5 step, drum
The air pressure range of bubble is set as 0.40-0.5Mpa.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910831719.2A CN110523696A (en) | 2019-09-04 | 2019-09-04 | A kind of cleaning method of PECVD graphite boat |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910831719.2A CN110523696A (en) | 2019-09-04 | 2019-09-04 | A kind of cleaning method of PECVD graphite boat |
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| CN110523696A true CN110523696A (en) | 2019-12-03 |
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| CN201910831719.2A Pending CN110523696A (en) | 2019-09-04 | 2019-09-04 | A kind of cleaning method of PECVD graphite boat |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111715606A (en) * | 2020-03-30 | 2020-09-29 | 横店集团东磁股份有限公司 | Full-automatic graphite boat cleaning device and cleaning method thereof |
| CN111962047A (en) * | 2020-08-18 | 2020-11-20 | 无锡鼎桥新能源科技有限公司 | Method for improving graphite boat treatment effect |
| CN113118158A (en) * | 2021-03-18 | 2021-07-16 | 安徽英发睿能科技股份有限公司 | Cleaning method of PECVD graphite boat |
| CN113828584A (en) * | 2021-09-28 | 2021-12-24 | 通威太阳能(眉山)有限公司 | Graphite boat cleaning method and equipment |
| CN114029300A (en) * | 2021-03-12 | 2022-02-11 | 重庆康佳光电技术研究院有限公司 | Method for cleaning graphite plate |
| CN114308814A (en) * | 2021-12-22 | 2022-04-12 | 宁波尤利卡太阳能股份有限公司 | Method for cleaning graphite boat |
| CN115213163A (en) * | 2022-06-07 | 2022-10-21 | 中环领先半导体材料有限公司 | Method for cleaning quartz spare parts by epitaxial part cleaning equipment |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111715606A (en) * | 2020-03-30 | 2020-09-29 | 横店集团东磁股份有限公司 | Full-automatic graphite boat cleaning device and cleaning method thereof |
| CN111962047A (en) * | 2020-08-18 | 2020-11-20 | 无锡鼎桥新能源科技有限公司 | Method for improving graphite boat treatment effect |
| CN114029300A (en) * | 2021-03-12 | 2022-02-11 | 重庆康佳光电技术研究院有限公司 | Method for cleaning graphite plate |
| CN113118158A (en) * | 2021-03-18 | 2021-07-16 | 安徽英发睿能科技股份有限公司 | Cleaning method of PECVD graphite boat |
| CN113828584A (en) * | 2021-09-28 | 2021-12-24 | 通威太阳能(眉山)有限公司 | Graphite boat cleaning method and equipment |
| CN114308814A (en) * | 2021-12-22 | 2022-04-12 | 宁波尤利卡太阳能股份有限公司 | Method for cleaning graphite boat |
| CN114308814B (en) * | 2021-12-22 | 2024-01-12 | 宁波尤利卡太阳能股份有限公司 | Method for cleaning graphite boat |
| CN115213163A (en) * | 2022-06-07 | 2022-10-21 | 中环领先半导体材料有限公司 | Method for cleaning quartz spare parts by epitaxial part cleaning equipment |
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