CN111952433B - Isolated pole structure of piezoelectric traveling wave micro-actuator - Google Patents
Isolated pole structure of piezoelectric traveling wave micro-actuator Download PDFInfo
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- H—ELECTRICITY
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- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
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Abstract
The invention discloses an isolated pole structure of a piezoelectric traveling wave micro-actuator, which comprises a stator and a fixed support, wherein the stator is connected with the fixed support; the stator is including the drive electrode, piezoelectric material layer, bottom electrode and the vibrating diaphragm supporting layer that stack the setting in proper order, and drive electrode is located piezoelectric material layer's top, has the clearance between drive electrode's outside edge and the fixed stay, sets up the isolated pole between drive electrode's outside edge and the fixed stay, and the isolated pole sets up in piezoelectric material layer's top, and the isolated pole can detect and the analysis piezoelectric signal. According to the isolated pole structure of the piezoelectric traveling wave micro actuator, the isolated pole is arranged between the driving electrode and the fixed support, the isolated pole can be used for in-situ online detection of a traveling wave state, a detection signal can accurately reflect a stator surface traveling wave state, and the isolated pole is arranged between the driving electrode and the fixed support, so that the driving signal is not influenced, and the loss of the driving force capability of the actuator is avoided.
Description
Technical Field
The invention relates to the technical field of traveling wave micro-actuators, in particular to an isolated pole structure of a piezoelectric traveling wave micro-actuator.
Background
The piezoelectric travelling wave micro actuator is a micro driving device, and the basic structure of the actuator is a circular ring type diaphragm structure. By utilizing the inverse piezoelectric effect of the piezoelectric material, after the alternating current excitation with specific frequency, amplitude and phase is applied to different areas of the circular ring, the traveling wave which is transmitted along the surface of the diaphragm and around the center of the circle can be excited.
When used as a micro-driver, the frequency, amplitude and phase of the traveling wave often determine the strength of the driving capability. Therefore, it is very important to characterize the state of the traveling wave on the surface of the micro-actuator. In a traditional ultrasonic motor, 1-2 sector areas on the surface of a stator are generally set as detection electrodes, called isolated poles, and piezoelectric signals generated at the positions are detected and analyzed in the traveling wave propagation process, so that the traveling wave state is detected.
The existing piezoelectric traveling wave micro-actuator starts oscillation through an external excitation signal, the states of the traveling wave amplitude, frequency, mode and the like generated on the surface of the micro-actuator are directly determined by external excitation, and the traveling wave state can be regulated and controlled by changing the external excitation amplitude, phase and frequency. In order to realize regulation and control, firstly, the traveling wave state needs to be detected, and the traditional ultrasonic motor usually sets 1-2 sector areas on the surface of a stator as detection electrodes, and detects and analyzes piezoelectric signals generated at the sector areas in the traveling wave propagation process to realize the detection of the traveling wave state. However, this method is not adapted to traveling wave micro-actuators for which the drive torque is a key output indicator. The driving moment has positive correlation with the vibration area and the amplitude. When the surface part of the traveling wave actuator is arranged as the detection electrode, the traveling wave actuator does not receive the external excitation signal to actively start oscillation. On the contrary, the detection electrode part generates forced vibration under the action of other areas of the actuator, and feeds back vibration information to an external circuit in an electric signal mode through a piezoelectric effect, so that vibration mode detection is realized. Therefore, the detection electrode is disposed on the surface of the traveling wave micro-actuator, which usually sacrifices 1-2 sector areas originally used as driving for detection, and thus the output capability of the device is greatly reduced. In addition, the position of the detection electrode needs to be placed at a place where the traveling wave amplitude is significant to obtain a detection signal with a large signal intensity, however, the space size of the micro motor is limited, and it is difficult to obtain a good detection signal in a tiny size.
Therefore, how to change the current situation that the output capability is reduced and the detection signal is not good by arranging the detection electrode in the traveling wave micro-actuator in the prior art becomes a problem to be solved by those skilled in the art.
Disclosure of Invention
The invention aims to provide an isolated pole structure of a piezoelectric traveling wave micro actuator, which is used for solving the problems in the prior art, avoiding the influence of the isolated pole on a driving signal and reducing the capacity loss of the micro actuator.
In order to achieve the purpose, the invention provides the following scheme: the invention provides an isolated pole structure of a piezoelectric traveling wave micro-actuator, which comprises a stator and a fixed support, wherein the stator is connected with the fixed support; the stator is including the drive electrode, piezoelectric material layer, bottom electrode and the vibrating diaphragm supporting layer that superpose in proper order and set up, the drive electrode is located the top of piezoelectric material layer, the outer border of drive electrode with the clearance has between the fixed bolster, the outer border of drive electrode with set up alone utmost point between the fixed bolster, alone utmost point set up in the top of piezoelectric material layer, alone utmost point can detect and the analysis piezoelectric signal.
Preferably, gaps are arranged among the fixed support, the driving electrode and the isolated pole.
Preferably, the gap between the drive electrode and the isolated pole is larger than the gap between the isolated pole and the fixed support.
Preferably, the thickness of the isolated pole is consistent with the thickness of the drive electrode.
Preferably, the number of the arc poles is multiple, and the arc poles are uniformly distributed around the axis of the stator at equal intervals in a circumferential shape.
Preferably, the isolated poles are quadrangular-prism shaped.
Preferably, the cross section of the isolated pole is square.
Preferably, the driving electrode comprises 12 fan-shaped electrodes which are uniformly distributed in a circumferential manner, and the number of the arc electrodes is 4.
Compared with the prior art, the invention achieves the following technical effects: the isolated pole structure of the piezoelectric traveling wave micro-actuator comprises a stator and a fixed support, wherein the stator is connected with the fixed support; the stator is including the drive electrode, piezoelectric material layer, bottom electrode and the vibrating diaphragm supporting layer that stack the setting in proper order, and drive electrode is located piezoelectric material layer's top, has the clearance between drive electrode's outside edge and the fixed stay, sets up the isolated pole between drive electrode's outside edge and the fixed stay, and the isolated pole sets up in piezoelectric material layer's top, and the isolated pole can detect and the analysis piezoelectric signal. According to the isolated pole structure of the piezoelectric traveling wave micro actuator, the isolated pole is arranged between the driving electrode and the fixed support, the position between the driving electrode and the fixed support is similar to the vibration form of the stator surface traveling wave, the isolated pole has the same phase and frequency, the isolated pole can be used for in-situ online detection of the traveling wave state, the detection signal can accurately reflect the stator surface traveling wave state, and the isolated pole is arranged between the driving electrode and the fixed support, so that the driving signal is not influenced, and the loss of the driving force capability of the actuator is not caused.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to these drawings without creative efforts.
FIG. 1 is a schematic structural diagram of an isolated pole structure of a traveling-wave piezoelectric micro-actuator according to the present invention;
FIG. 2 is a sectional structure diagram of the isolated pole structure of the piezoelectric traveling wave micro-actuator of the present invention;
FIG. 3 is a schematic modal diagram of an isolated pole structure of the piezoelectric traveling wave micro-actuator of the present invention;
wherein, 1 is the fixed stay, 2 is alone utmost point, 3 are the drive electrode, 4 are piezoelectric material layers, 5 are the bottom electrode, 6 are the vibrating diaphragm supporting layer.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without making any creative effort based on the embodiments in the present invention, belong to the protection scope of the present invention.
The invention aims to provide an isolated pole structure of a piezoelectric traveling wave micro actuator, which is used for solving the problems in the prior art, avoiding the influence of the isolated pole on a driving signal and reducing the capacity loss of the micro actuator.
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in further detail below.
Referring to fig. 1-3, fig. 1 is a schematic structural diagram of a lone structure of the traveling-wave piezoelectric micro-actuator of the present invention, fig. 2 is a schematic sectional structural diagram of a lone structure of the traveling-wave piezoelectric micro-actuator of the present invention, and fig. 3 is a schematic modal diagram of the lone structure of the traveling-wave piezoelectric micro-actuator of the present invention.
The invention provides an isolated pole structure of a piezoelectric traveling wave micro-actuator, which comprises a stator and a fixed support 1, wherein the stator is connected with the fixed support 1; the stator is including the drive electrode 3, piezoelectric material layer 4, bottom electrode 5 and the vibrating diaphragm supporting layer 6 that superpose in proper order and set up, and drive electrode 3 is located piezoelectric material layer 4's top, has the clearance between drive electrode 3's outer border and the fixed stay 1, sets up alone utmost point 2 between drive electrode 3's outer border and the fixed stay 1, alone utmost point 2 sets up in piezoelectric material layer 4's top, alone utmost point 2 can detect and the analysis piezoelectric signal.
According to the isolated pole structure of the piezoelectric traveling wave micro actuator, the isolated pole 2 is arranged between the driving electrode 3 and the fixed support 1, the position between the driving electrode 3 and the fixed support 1 is similar to the vibration form of the stator surface traveling wave, the isolated pole 2 has the same phase and frequency, the isolated pole 2 can be used for in-situ online detection of the traveling wave state, a detection signal can accurately reflect the stator surface traveling wave state, and the isolated pole 2 is arranged between the driving electrode 3 and the fixed support 1, so that the driving signal is not influenced, and the loss of the driving force capability of the actuator is not caused.
Specifically, all have the clearance between fixed bolster 1, drive electrode 3 and the pole 2 of separating, avoid separating pole 2 influence fixed bolster 1 and piezoelectric material layer 4, bottom electrode 5, vibrating diaphragm supporting layer 6 and link to each other, avoid separating pole 2 to influence drive electrode 3 work simultaneously.
In the present embodiment, the gap between the drive electrode 3 and the isolated pole 2 is larger than the gap between the isolated pole 2 and the fixed support 1. According to the stator surface traveling wave mode, the vibration form of the isolated pole 2 is similar to that of the traveling wave crest at the corresponding radian, and the isolated pole 2 has the same frequency and phase (the amplitude is slightly lower than that of the crest), so that the isolated pole 2 arranged at the position can accurately reflect the traveling wave vibration state.
In addition, the thickness of the isolated pole 2 is consistent with that of the driving electrode 3, and the structural integrity and structural stability of the stator are improved.
More specifically, the number of the arc poles 2 is multiple, and the multiple arc poles 2 are uniformly distributed around the axis of the stator at equal intervals in a circumferential shape. In practical application, the number and the positions of the isolated poles 2 can be set according to the specific mode of the traveling wave micro actuator, so that the detection accuracy and the flexible adaptability of the actuator are improved.
In other specific embodiments of the invention, the isolated pole 2 is quadrangular prism-shaped, and the cross section of the isolated pole 2 is square, so that the production and manufacturing difficulty is reduced.
When the traveling wave micro-actuator is B 13 When the modal annular traveling wave actuator is adopted, the driving electrodes 3 comprise 12 sector electrodes, the sector electrodes do not completely cover the surface of the stator, the outer diameter of each sector electrode is about 0.7-0.9 time of the radius of the stator, the sector electrodes are uniformly distributed in a circumferential shape, the isolated poles 2 are positioned between the driving electrodes 3 and the fixed supports 1, vibration is generated and traveling waves are emitted after power is supplied by an external driving circuit, and the number of the isolated poles 2 is 4.
According to the isolated pole structure of the piezoelectric traveling wave micro actuator, the isolated pole 2 is arranged between the driving electrode 3 and the fixed support 1, the position between the driving electrode 3 and the fixed support 1 is similar to the vibration form of the stator surface traveling wave, the isolated pole 2 has the same phase and frequency, the isolated pole 2 can be used for in-situ online detection of the traveling wave state, a detection signal can accurately reflect the stator surface traveling wave state, and the isolated pole 2 is arranged between the driving electrode 3 and the fixed support 1, so that the driving signal is not influenced, and the loss of the driving force capability of the actuator is not caused.
The principle and the implementation mode of the invention are explained by applying a specific example, and the description of the embodiment is only used for helping to understand the method and the core idea of the invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, the specific embodiments and the application range may be changed. In view of the foregoing, the description is not to be taken in a limiting sense.
Claims (8)
1. The utility model provides a alone utmost point structure of little executor of piezoelectricity travelling wave which characterized in that: the stator is connected with the fixed support; the stator is including the drive electrode, piezoelectric material layer, bottom electrode and the vibrating diaphragm supporting layer that stack in proper order set up, drive electrode is located piezoelectric material layer's top, drive electrode's outer border with the clearance has between the fixed bolster, drive electrode's outer border with set up the pole of alone between the fixed bolster, alone set up in piezoelectric material layer's top, alone the pole can detect and the analysis piezoelectric signal.
2. The isolated pole structure of traveling-wave piezoelectric microactuator of claim 1 wherein: gaps are arranged among the fixed support, the driving electrode and the isolated pole.
3. The traveling-piezoelectric wave micro-actuator lone pole structure of claim 2, wherein: the gap between the driving electrode and the isolated pole is larger than the gap between the isolated pole and the fixed support.
4. The isolated pole structure of traveling-wave piezoelectric microactuator of claim 1 wherein: the thickness of the isolated pole is consistent with that of the drive electrode.
5. The isolated pole structure of traveling-wave piezoelectric microactuator of claim 1 wherein: the number of the isolated poles is multiple, and the isolated poles are uniformly distributed around the axis of the stator at equal intervals in a circumferential shape.
6. The isolated pole structure of traveling-wave piezoelectric microactuator of claim 1 wherein: the isolated pole is quadrangular.
7. The traveling-wave piezoelectric microactuator of claim 6 having a lone pole structure, wherein: the cross section of the isolated pole is square.
8. The isolated pole structure of traveling-wave piezoelectric microactuator of claim 1 wherein: the driving electrode comprises 12 fan-shaped electrodes which are uniformly distributed in a circumferential mode, and the number of the arc electrodes is 4.
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| CN202010810784.XA CN111952433B (en) | 2020-08-13 | 2020-08-13 | Isolated pole structure of piezoelectric traveling wave micro-actuator |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000023477A (en) * | 1998-04-27 | 2000-01-21 | Seiko Instruments Inc | Piezoelectric actuator and its direction correcting method |
| CN107947631A (en) * | 2017-11-27 | 2018-04-20 | 中国工程物理研究院电子工程研究所 | A kind of MEMS travelling-wave types micro-motor structure |
| CN108306548A (en) * | 2018-04-11 | 2018-07-20 | 中国工程物理研究院电子工程研究所 | A kind of driving structure of traveling wave micro motor |
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- 2020-08-13 CN CN202010810784.XA patent/CN111952433B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000023477A (en) * | 1998-04-27 | 2000-01-21 | Seiko Instruments Inc | Piezoelectric actuator and its direction correcting method |
| US6690100B1 (en) * | 1998-04-27 | 2004-02-10 | Seiko Instruments Inc. | Piezoelectric actuator and method of compensating direction thereof |
| CN107947631A (en) * | 2017-11-27 | 2018-04-20 | 中国工程物理研究院电子工程研究所 | A kind of MEMS travelling-wave types micro-motor structure |
| CN108306548A (en) * | 2018-04-11 | 2018-07-20 | 中国工程物理研究院电子工程研究所 | A kind of driving structure of traveling wave micro motor |
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