CN111953228A - Beam-free traveling wave motor micro-driver - Google Patents
Beam-free traveling wave motor micro-driver Download PDFInfo
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- CN111953228A CN111953228A CN202010810780.1A CN202010810780A CN111953228A CN 111953228 A CN111953228 A CN 111953228A CN 202010810780 A CN202010810780 A CN 202010810780A CN 111953228 A CN111953228 A CN 111953228A
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- wave motor
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- 230000009286 beneficial effect Effects 0.000 abstract description 3
- 230000006872 improvement Effects 0.000 abstract description 3
- 208000010392 Bone Fractures Diseases 0.000 description 5
- 206010017076 Fracture Diseases 0.000 description 5
- 230000000694 effects Effects 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 230000001788 irregular Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000005457 optimization Methods 0.000 description 2
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/08—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using travelling waves, i.e. Rayleigh surface waves
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/06—Drive circuits; Control arrangements or methods
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- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The invention discloses a micro-driver of a beamless traveling wave motor, which comprises a stator and a fixed support, wherein the stator is connected with the fixed support. According to the beamless traveling wave motor micro-driver, the stator is directly connected with the fixed support, so that a beam structure is omitted, the influence caused by the beam structure is eliminated, and the stator is directly connected with the fixed support, so that the upper surface and the lower surface of a vibrating diaphragm of the stator are free from other constraints and are directly contacted with air, and the micro-driver is beneficial to realizing the improvement of the vibration displacement, and the driving capability is improved.
Description
Technical Field
The invention relates to the technical field of traveling wave micro-drivers, in particular to a beamless traveling wave motor micro-driver.
Background
The travelling wave micro motor is a micro driving device and has great application potential. The travelling wave micro driver (stator) is used as an actuating device in the micro motor and is the key for realizing the rotation of a load (rotor) and the output of torque. Carry out configuration optimization to the micromotor stator and be favorable to realizing the area and carry the ability promotion.
At present, a common stator adopts a ring-shaped diaphragm structure, and by utilizing the inverse piezoelectric effect of piezoelectric materials, after alternating current excitation with specific frequency, amplitude and phase is applied to different areas of a ring, traveling waves which are transmitted along the surface of the diaphragm and around the center of a circle can be excited, and mechanical energy is transmitted to a load rotor through mass point elliptic motion near the wave crest of the traveling waves. The traveling wave mode excited by the stator is B1n mode, i.e. 1 pitch circle and n pitch diameters (n is 3-6). In addition, the diaphragm is connected with the bulk silicon at the outer side of the diaphragm through a supporting beam structure, so that the traveling wave driving circular ring is suspended.
The main problem of the conventional supporting beam structure traveling wave driver stator is that the driving efficiency of the B1n traveling wave mode excited by the conventional supporting beam structure traveling wave driver stator is not high, and the following reasons mainly exist. Firstly, the traveling wave excited by the structure generally has the problem of small radius of the crest of the traveling wave, namely, the driving radius is small in a loaded state, and the effective torque capable of being transmitted is very limited; secondly, after the supporting beam structure stator is excited to move out of the wave, large irregular displacement exists on the edge of the annular diaphragm, the driving efficiency is influenced, and meanwhile, the fracture risk also exists; in addition. The supporting beam type stator is low in structural rigidity, easy to deform under the action of external force, limited in loading capacity and not suitable for working under the pre-tightening force loading condition.
Therefore, how to change the current situation that the driving capability of the supporting beam type stator is not good and the deformation and fracture risks exist in the prior art becomes a problem to be solved by the technical personnel in the field.
Disclosure of Invention
The invention aims to provide a micro-driver of a beamless traveling wave motor, which is used for solving the problems in the prior art, improving the driving capability of the micro-driver and reducing the risks of stator deformation and fracture.
In order to achieve the purpose, the invention provides the following scheme: the invention provides a micro-driver of a beamless traveling wave motor, which comprises a stator and a fixed support, wherein the stator is connected with the fixed support.
Preferably, the stator is annular, the fixed support is sleeved outside the stator, and the outer edge of the stator is connected with the fixed support.
Preferably, the stator includes a support layer, a piezoelectric layer, a driving electrode and a lower electrode, the driving electrode is disposed on the top of the piezoelectric layer, the lower electrode is disposed on the bottom of the piezoelectric layer, and the support layer is disposed on the bottom of the lower electrode.
Preferably, the driving electrode comprises a plurality of sector electrodes, the sector electrodes are uniformly distributed in a circumferential manner around the axis of the stator, and the sector electrodes surround into a ring shape.
Preferably, the traveling wave mode is B1nThe number of the fan-shaped electrodes is 4 times of n.
Preferably, the stator is provided with a groove body, and the groove body is positioned between two adjacent fan-shaped electrodes.
Preferably, the traveling wave mode is B1nAnd the number of the groove bodies is integral multiple of n, and the groove bodies are uniformly distributed in a circumferential manner around the axis of the stator.
Preferably, the axial section of the groove body is rectangular, and the longer side of the axial section of the groove body is parallel to the radius direction of the stator.
Compared with the prior art, the invention has the following technical effects: the invention relates to a beamless traveling wave motor micro-driver, which comprises a stator and a fixed support, wherein the stator is connected with the fixed support. According to the beamless traveling wave motor micro-driver, the stator is directly connected with the fixed support, so that a beam structure is omitted, the influence caused by the beam structure is eliminated, and the stator is directly connected with the fixed support, so that the upper surface and the lower surface of a vibrating diaphragm of the stator are free from other constraints and are directly contacted with air, and the micro-driver is beneficial to realizing the improvement of the vibration displacement, and the driving capability is improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without inventive exercise.
FIG. 1 is a schematic top view of a traveling wave motor micro-drive of the beamless type of the present invention;
FIG. 2 is a schematic view of a cross-sectional structure of the micro-driver of the beamless traveling wave motor of the present invention;
FIG. 3 is a graph comparing the traveling wave drive radii of a beamless traveling wave motor microactuator of the present invention and a prior art beam microactuator;
FIG. 4 is a comparison of stator traveling wave modes for a beamless traveling wave motor microactuator of the present invention and a prior art beamless microactuator;
wherein, 1 is a stator, 2 is a fixed support, 3 is a sector electrode, 4 is a groove body, A is a curve of the traveling wave driving radius of the beam type micro-driver in the prior art, and B is a curve of the traveling wave driving radius of the beamless traveling wave motor micro-driver.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The invention aims to provide a micro-driver of a beamless traveling wave motor, which is used for solving the problems in the prior art, improving the driving capability of the micro-driver and reducing the risks of stator deformation and fracture.
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in further detail below.
Referring to fig. 1-4, fig. 1 is a schematic top view of a traveling-wave motor microdriver without a beam according to the present invention, fig. 2 is a schematic cross-sectional view of the traveling-wave motor microdriver without a beam according to the present invention, fig. 3 is a graph comparing traveling-wave driving radii of the traveling-wave motor microdriver without a beam according to the present invention and a beam according to the prior art, and fig. 4 is a graph comparing traveling-wave modes of stators of the traveling-wave motor microdriver without a beam according to the present invention and the beam according to the prior art.
The invention provides a micro-driver of a beamless traveling wave motor, which comprises a stator 1 and a fixed support 2, wherein the stator 1 is connected with the fixed support 2.
According to the micro-driver of the beamless traveling wave motor, the stator 1 is directly connected with the fixed support 2, so that a beam structure is omitted, the influence caused by the beam structure is eliminated, and the stator 1 is directly connected with the fixed support 2, so that the upper surface and the lower surface of a vibrating diaphragm of the stator 1 are free from other constraints and are directly contacted with air, the micro-driver is beneficial to realizing the improvement of the vibration displacement, and the driving capability is improved.
Wherein, stator 1 is the annular, and fixed stay 2 suit is in the outside of stator 1, and the outside border of stator 1 links to each other with fixed stay 2, reduces stator 1's deformation, fracture risk.
In addition, the stator 1 comprises a supporting layer, a piezoelectric layer, a driving electrode and a lower electrode, the driving electrode is arranged at the top of the piezoelectric layer, the lower electrode is arranged at the bottom of the piezoelectric layer, the supporting layer is arranged at the bottom of the lower electrode, the whole thickness of the stator 1 is small, and the upper surface and the lower surface of the stator are free of other constraints.
Specifically, the driving electrode comprises a plurality of fan-shaped electrodes 3, the fan-shaped electrodes 3 are uniformly distributed in a circumferential manner around the axis of the stator 1, and the fan-shaped electrodes 3 are encircled into a ring shape. Number of sector electrodes 3 and traveling wave mode B1nIn this regard, the number of the sector electrodes 3 is generally 4 times as large as n.
More specifically, the stator 1 is provided with a slot 4, the slot 4 is located between two adjacent fan-shaped electrodes 3, structural rigidity adjustment and modal optimization are achieved by arranging the slot 4, and the slot 4 is arranged at the edge of the stator 1. The same number of tanks 4 and travelling waveMode B1nIn relation to this, the number of the slots 4 is usually an integral multiple of n, and the plurality of slots 4 are uniformly distributed in a circumferential manner around the axis of the stator 1, thereby improving the structural stability of the stator 1.
In the present embodiment, the axial cross section of the slot body 4 is rectangular, the longer side of the axial cross section of the slot body 4 is parallel to the radial direction of the stator 1, and the slot body 4 is quadrangular, so that the difficulty in production and manufacturing is reduced.
The invention relates to a beamless traveling wave motor micro-driver, which adopts a beamless structure, and the edge of a driver stator 1 is directly connected with a fixed support 2, thereby eliminating the influence caused by the beam structure; the rigidity and the traveling wave mode of the system are adjusted by the groove body 4 at the edge of the stator 1, and the wave crest radius of the traveling wave is effectively improved, so that the output capacity of the micro motor is improved by increasing the driving force arm. Meanwhile, the beamless traveling wave motor micro-driver can effectively inhibit irregular large displacement of the edge in the traveling wave excitation process while improving the driving radius, thereby obviously improving the driving stability and the driving efficiency of the driver. In addition, the invention improves the structural rigidity of the traveling wave micro-driver, has smaller displacement deformation under the external force state and has better stability. Therefore, the belt loading capacity is strong, and the applicability is wide.
The principle and the implementation mode of the invention are explained by applying a specific example, and the description of the embodiment is only used for helping to understand the method and the core idea of the invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, the specific embodiments and the application range may be changed. In view of the above, the present disclosure should not be construed as limiting the invention.
Claims (8)
1. A beamless traveling wave motor micro-driver is characterized in that: the stator is connected with the fixed support.
2. The traveling wave motor micro-driver of the beamless type of claim 1, wherein: the stator is annular, the fixed support is sleeved outside the stator, and the outer edge of the stator is connected with the fixed support.
3. The traveling wave motor micro-driver of the beamless type of claim 2, wherein: the stator comprises a supporting layer, a piezoelectric layer, a driving electrode and a lower electrode, wherein the driving electrode is arranged at the top of the piezoelectric layer, the lower electrode is arranged at the bottom of the piezoelectric layer, and the supporting layer is arranged at the bottom of the lower electrode.
4. The travelling wave motor micro-drive of the beamless type of claim 3, wherein: the driving electrode comprises a plurality of fan-shaped electrodes, the fan-shaped electrodes are uniformly distributed around the axis of the stator in a circumferential mode, and the fan-shaped electrodes are annularly enclosed.
5. The travelling wave motor micro-drive of the beamless type of claim 4, wherein: the traveling wave mode is B1nThe number of the fan-shaped electrodes is 4 times of n.
6. The travelling wave motor micro-drive of the beamless type of claim 4, wherein: the stator is provided with a groove body, and the groove body is positioned between two adjacent fan-shaped electrodes.
7. The travelling wave motor micro-drive of the beamless type of claim 6, wherein: the traveling wave mode is B1nAnd the number of the groove bodies is integral multiple of n, and the groove bodies are uniformly distributed in a circumferential manner around the axis of the stator.
8. The travelling wave motor micro-drive of the beamless type of claim 6, wherein: the axial cross section of the groove body is rectangular, and the longer side of the axial cross section of the groove body is parallel to the radius direction of the stator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010810780.1A CN111953228A (en) | 2020-08-13 | 2020-08-13 | Beam-free traveling wave motor micro-driver |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010810780.1A CN111953228A (en) | 2020-08-13 | 2020-08-13 | Beam-free traveling wave motor micro-driver |
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| CN111953228A true CN111953228A (en) | 2020-11-17 |
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| CN202010810780.1A Pending CN111953228A (en) | 2020-08-13 | 2020-08-13 | Beam-free traveling wave motor micro-driver |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1366379A (en) * | 2001-12-21 | 2002-08-28 | 清华大学 | Single-pitch non-axial-symmetrical vibration membrane type micromotor with piezoelectric membrane |
| JP2002369556A (en) * | 2001-06-05 | 2002-12-20 | Canon Inc | Electrical-mechanical energy conversion element and vibration wave drive apparatus |
| CN108306548A (en) * | 2018-04-11 | 2018-07-20 | 中国工程物理研究院电子工程研究所 | A kind of driving structure of traveling wave micro motor |
| CN110087175A (en) * | 2019-04-17 | 2019-08-02 | 海菲曼（天津）科技有限公司 | A kind of electrostatic loudspeaker stator plate and electrostatic loudspeaker |
| CN111181441A (en) * | 2020-01-07 | 2020-05-19 | 哈尔滨工业大学 | Multi-disc circumference arranged's atmospheric pressure energy converter under flexible seal |
-
2020
- 2020-08-13 CN CN202010810780.1A patent/CN111953228A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002369556A (en) * | 2001-06-05 | 2002-12-20 | Canon Inc | Electrical-mechanical energy conversion element and vibration wave drive apparatus |
| CN1366379A (en) * | 2001-12-21 | 2002-08-28 | 清华大学 | Single-pitch non-axial-symmetrical vibration membrane type micromotor with piezoelectric membrane |
| CN108306548A (en) * | 2018-04-11 | 2018-07-20 | 中国工程物理研究院电子工程研究所 | A kind of driving structure of traveling wave micro motor |
| CN110087175A (en) * | 2019-04-17 | 2019-08-02 | 海菲曼（天津）科技有限公司 | A kind of electrostatic loudspeaker stator plate and electrostatic loudspeaker |
| CN111181441A (en) * | 2020-01-07 | 2020-05-19 | 哈尔滨工业大学 | Multi-disc circumference arranged's atmospheric pressure energy converter under flexible seal |
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Application publication date: 20201117 |
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