CN105322824A - Sandwich complex excitation ultrasonic motor, driving platform and driving method thereof - Google Patents
Sandwich complex excitation ultrasonic motor, driving platform and driving method thereof Download PDFInfo
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- CN105322824A CN105322824A CN201510002567.7A CN201510002567A CN105322824A CN 105322824 A CN105322824 A CN 105322824A CN 201510002567 A CN201510002567 A CN 201510002567A CN 105322824 A CN105322824 A CN 105322824A
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Abstract
The invention discloses a sandwich complex excitation ultrasonic motor, a driving platform and a driving method thereof, and solves the technical problem that overall output performance of an elastomer ultrasonic motor adopting a beam structure or a disk structure independently is unsatisfactory. The sandwich complex excitation ultrasonic motor comprises a fixed base, a first elastomer, a second elastomer, a rotator, keys, a thrust ball bearing, a Belleville spring, a nut and an output shaft, wherein the first elastomer is of a beam structure; the second elastomer is of a plate structure; and annular piezoelectric ceramic pieces adopt d33 and d15 excitation modes. Simulated electrical signals in an ultrasonic frequency band are applied to the piezoelectric ceramic pieces, the first elastomer and the second elastomer are simulated to generate torsion and bending vibration modes respectively, driving traveling waves are generated to form driving friction force by utilizing superposed coupling of the vibration mode, and the motion output in positive and negative directions is realized. The sandwich complex excitation ultrasonic motor has the technical advantages of high output power, stable motor operation, wide application range and the like, and has wide application prospects in the technical fields of precision positioning and micro positioning.
Description
Technical field
The present invention relates to a kind of sandwich complex excitation ultrasound electric machine, drive platform and driving method thereof, belong to precision actuation and microposition technical field.
Background technology
Ultrasound electric machine utilizes the inverse piezoelectric effect of piezoelectric element to encourage elastomer to produce ultrasonic vibration a little, realized the small and special electric machine of mechanical energy output by friction coupling.Compared with traditional electrical magneto, be easy to microminiaturization, fast response time because it has structure, without technical advantages such as electromagnetic interference, be widely used in precision actuation and microposition technical field.According to the version of elastomer (or being called stator) and the different of driving incentive mode, ultrasound electric machine mainly contains the several types such as girder construction elastomer ultrasound electric machine and plate structure elastomer ultrasound electric machine.
Chinese patent " rod traveling wave type ultrasonic motor ", Authorization Notice No. is CN100525057C, authorized announcement date is on August 5th, 2009, disclosed a kind of rod traveling wave type ultrasonic motor, piezoelectric ceramic piece group and electrode slice group are screwed connection by the screw rod of base by base and upper balancing weight by its stator module, upper balancing weight is in the form of annular discs, the inside groove boss that upper end has a size relatively little, base outer rim has four screwed holes installed, motor rotor component is by flex rotor, pin, gland, the formations such as axle, precompression between electric machine rotor is obtained by holddown spring and regulates, when motor passes into alternating voltage certain in ultrasonic frequency domain, on electronics stationary part, the particle on the surface of balancing weight and rotor contact does elliptic motion, owing to there is precompression between rotor, frictional force can be produced between rotor, this frictional force can be rotated by drive rotor, Chinese patent " vibrator of beam type linear ultrasonic motor using bending vibration modes ", Authorization Notice No. is CN101626203B, authorized announcement date is on July 20th, 2011, disclosed a kind of vibrator of beam type linear ultrasonic motor using bending vibration modes drives foot by two, two end caps, two insulating cases, two pairs of polarised directions are the piezoelectric ceramic piece of thickness direction, ring flange, two thin walled beams and mount pad composition, the end face of ring flange respectively stretches out a stud along its axis, on each stud, cover has a pair piezoelectric ceramic piece, the projecting end end of each stud is combined with end cap, the end of each end cap is arranged one and drive foot, described every sheet piezoelectric ceramic piece is by combining after cutting, two symmetrical half piezoelectric ceramic piece compositions, between two half piezoelectric ceramic pieces, polarised direction is contrary, the segmentation lines of two pairs of piezoelectric ceramic pieces of flange both sides is mutually vertical, the polarised direction of the piezoelectric ceramic piece in often pair of piezoelectric ceramic piece is contrary, Chinese patent " disc type non-contact ultrasonic motor ", Authorization Notice No. is CN100525056C, authorized announcement date is on August 5th, 2009, disclosed a kind of disc type non-contact ultrasonic motor, primarily of stator module, rotor assembly and making assembly are formed, stator module is pasted by disc stator matrix and piezoelectric ceramic and is formed, the rotor assembly of motor is by rotor matrix, axle, spring, the formations such as nut, motor support base assembly is by base, shell, screw is formed, when motor passes into alternating voltage certain in ultrasonic frequency range, motor stator produces the rotation of supersonic frequency, rotor turns is driven by viscous force, power is exported by axle, Chinese patent " Novel rotating travelling-wave ultrasonic motor ", application notification number is CN102437787A, the application day for announcing is on May 2nd, 2012, disclosed a kind of Novel rotating travelling-wave ultrasonic motor, its critical piece has two stators, rotor, base, friction lining, back-up ring and bearing etc., wherein, the stator that two shapes are identical is arranged symmetrically with and compresses rotor two end faces, ensure that the working face of two stators reliably realizes and rotor surface parallel contact, make rotor contact-making surface uniform force, the radial contact of rotary type travelling wave ultrasonic motor rotor existence that can overcome so at present based on single stator structure is uneven, contact range is little, there is the defects such as radial slippage frictional dissipation in rotor, be expected to the maximum output torque and the efficiency that improve rotary type travelling wave ultrasonic motor, and extend the useful life of rotary type travelling wave ultrasonic motor.
From the drive principle of ultrasound electric machine, under the same terms, the vibration amplitude of motor stator is larger, and between stator and rotor, effective contact area is larger, is more conducive to the raising of motor overall performance.And the elastomeric ultrasound electric machine of above-mentioned employing girder construction, although motor stator vibration amplitude is comparatively large, between stator and rotor, effective contact area is less, makes the mechanical output performance of girder construction ultrasound electric machine limited; For the elastomeric ultrasound electric machine of employing plate structure, compared with girder construction ultrasound electric machine, although effective contact area is comparatively large between motor stator and rotor, the vibration amplitude of stator is general less, shows as the brute force limiting ultrasound electric machine mechanical output equally and exports.As can be seen here, for adopting girder construction elastomer or the elastomeric ultrasound electric machine of plate structure separately, due to the technical problem such as contact area effective between stator and rotor is little or vibration amplitude is little, cause the overall output performance of ultrasound electric machine undesirable, limit its application & development in precision actuation and microposition technical field.
Summary of the invention
For solving for adopting girder construction elastomer or the elastomeric ultrasound electric machine of plate structure separately, because contact area effective between stator and rotor is little or the vibration amplitude little institute technical problem such as cause the overall output performance of ultrasound electric machine undesirable, the invention discloses a kind of sandwich complex excitation ultrasound electric machine, drive platform and driving method thereof.
The technical solution adopted in the present invention is: described sandwich complex excitation ultrasound electric machine comprises firm banking, the first elastomer, the second elastomer, rotor, key, thrust ball bearing, butterfly spring, nut and output shaft composition.
Described firm banking is plate structure, and described firm banking side end surface is along the circumferential direction evenly provided with n through-hole structure, wherein n be more than or equal to 1 integer; End surface center, described firm banking side is provided with thread pore structure, and described firm banking end side centre of surface position is provided with counter sink structure, and described firm banking thread pore structure and counter sink structure centre position are provided with through-hole structure.Described first elastomer is made up of front mating end, powered electrode sheet, ring-shaped piezo ceramic sheet, rear mating end and insulating sleeve, described front mating end is hollow multidiameter structure, described front mating end one side end is provided with external thread structure, described front mating end end side is provided with external thread structure, the socket that outer cylinder surface between described front mating end step ladder circular ring face and end side external thread structure is used for insulating sleeve is installed, and described front mating end both side ends centre of surface position is provided with through-hole structure; Described ring-shaped piezo ceramic sheet is 4i sheet
d 33exciting pattern with
d 15the annular piezoelectric ceramic piece of exciting pattern, the 2i sheet annular piezoelectric ceramic piece that in described 4i sheet annular piezoelectric ceramic piece, side is arranged adopts
d 33exciting pattern, the 2i sheet annular piezoelectric ceramic piece that in described 4i sheet annular piezoelectric ceramic piece, opposite side is arranged adopts
d 15exciting pattern, described powered electrode sheet is the annular copper sheet being provided with ledge arrangement, 4i sheet annular piezoelectric ceramic piece and 4i+1 sheet powered electrode sheet are by the spaced external peripheral surface being socketed on front mating end step ladder circular ring face place of insulating sleeve, wherein i be more than or equal to 1 integer, described insulating sleeve is thin-wall circular circulus; Described rear mating end is hollow circuit cylinder body structure, and described rear mating end one side end is provided with external thread structure, and described rear mating end end side surface is provided with thread pore structure, and described rear mating end both side ends centre of surface position is provided with through-hole structure.Described second elastomer is plane second elastomer or comb second elastomer.Described rotor is plate structure, and end surface center, described rotor side is provided with circular groove structure, positioned opposite with the second elastomeric circular groove structure; Described rotor end side centre of surface position is provided with flanged structure, described rotor flanged structure end surface is provided with shoulder hole structure, described rotor end surface center is provided with through-hole structure, and described rotor flanged structure inside is provided with keyway arrangements.Described output shaft is multidiameter structure, described output shaft one side end is provided with keyway arrangements, described output shaft is provided with external thread structure near keyway arrangements side, described output shaft end side is provided with external thread structure, and the external peripheral surface that described output shaft and thrust ball bearing are connected is provided with keyway arrangements near keyway arrangements side.
Describedly to be arranged on the first elastomer
d 33the ring-shaped piezo ceramic sheet of exciting pattern forms exciting group A, described in be arranged on the first elastomer
d 15exciting pattern rectangular piezoelectric ceramic sheet form exciting group B.
The driving method of described a kind of sandwich complex excitation ultrasound electric machine is specially: described exciting group A passes to the ac-excited signal of telecommunication of a certain supersonic frequency (being generally greater than 16kHz), and the extensional vibration excited encourages the second elastomer to produce flexural vibration mode; Described exciting group B passes to the ac-excited signal of telecommunication of same supersonic frequency (being generally greater than 16kHz), excites first elastomer at its place to produce torsion modes; Described exciting group A is identical with the amplitude that exciting group B passes to the ac-excited signal of telecommunication, drive phase difference to be 90 degree or 270 degree; The superposition of mode of oscillation is utilized to be coupled, the contact surface of the second elastomer and rotor produces and drives row ripple, being formed and drive frictional force, by regulating the phase difference of exciting group A and the ac-excited signal of telecommunication of exciting group B, the movement output of the positive and negative both direction of the present invention can be realized; The described ac-excited signal of telecommunication can be the periodic electric signals such as sine, square wave or sawtooth waveforms.
The invention has the beneficial effects as follows: the present invention adopts the elastomer of beam slab complex method to carry out exciting to ultrasound electric machine, girder construction elastomer is utilized to be coupled with the superposition of plate structure Vibration of Elastic Bodies mode, while realizing motor stator larger vibration amplitude, effective contact area larger between motor stator and rotor can be obtained, the complete machine output performance of ultrasound electric machine is obtained and significantly promotes.The present invention has that power output is large, motor operates steadily, positioning precision is high, environmental suitability is strong and the technical advantage such as applied range, in precision actuation and microposition technical field, have larger application & development prospect.
Accompanying drawing explanation
Figure 1 shows that the cutaway view of a kind of sandwich complex excitation ultrasound electric machine that the present invention proposes;
Figure 2 shows that the front view of the firm banking of a kind of sandwich complex excitation ultrasound electric machine that the present invention proposes;
Figure 3 shows that the cutaway view of the firm banking of a kind of sandwich complex excitation ultrasound electric machine that the present invention proposes;
Figure 4 shows that the first elastomeric front view of a kind of sandwich complex excitation ultrasound electric machine that the present invention proposes;
Figure 5 shows that the first elastomeric cutaway view of a kind of sandwich complex excitation ultrasound electric machine that the present invention proposes;
Figure 6 shows that the cutaway view of mating end before in the first elastomer of a kind of sandwich complex excitation ultrasound electric machine that the present invention proposes;
Figure 7 shows that the cutaway view of mating end after in the first elastomer of a kind of sandwich complex excitation ultrasound electric machine that the present invention proposes;
Figure 8 shows that the cutaway view of insulating sleeve in a kind of sandwich complex excitation ultrasound electric machine first elastomer that the present invention proposes;
Figure 9 shows that arrangement and the electrifying method schematic diagram of ring-shaped piezo ceramic sheet and powered electrode sheet in the first elastomer of a kind of sandwich complex excitation ultrasound electric machine that the present invention proposes;
Figure 10 shows that the elastomeric front view of plane second of a kind of sandwich complex excitation ultrasound electric machine that the present invention proposes and the driving platform that uses this motor;
Figure 11 shows that the elastomeric cutaway view of plane second of a kind of sandwich complex excitation ultrasound electric machine that the present invention proposes and the driving platform that uses this motor;
Figure 12 shows that the elastomeric front view of comb contact-type second of a kind of sandwich complex excitation ultrasound electric machine that the present invention proposes and the driving platform that uses this motor;
Figure 13 shows that the elastomeric cutaway view of comb contact-type second of a kind of sandwich complex excitation ultrasound electric machine that the present invention proposes and the driving platform that uses this motor;
Figure 14 shows that the front view of the rotor of a kind of sandwich complex excitation ultrasound electric machine that the present invention proposes;
Figure 15 shows that the cutaway view of the rotor of a kind of sandwich complex excitation ultrasound electric machine that the present invention proposes;
Figure 16 shows that the partial sectional view of the output shaft of a kind of sandwich complex excitation ultrasound electric machine that the present invention proposes;
Figure 17 shows that a kind of cutaway view using the driving platform of sandwich complex excitation ultrasound electric machine that the present invention proposes;
Figure 18 shows that a kind of cutaway view using the fixing outrigger of the driving platform of sandwich complex excitation ultrasound electric machine that the present invention proposes;
Figure 19 shows that a kind of vertical view using the fixing outrigger of the driving platform of sandwich complex excitation ultrasound electric machine that the present invention proposes;
Figure 20 shows that a kind of that the present invention proposes uses the first elastomeric front view in the driving platform of sandwich complex excitation ultrasound electric machine;
Figure 21 is depicted as a kind of of the present invention's proposition and uses the first elastomeric cutaway view in the driving platform of sandwich complex excitation ultrasound electric machine;
Figure 22 is depicted as a kind of cutaway view using the first elastomeric front mating end in the driving platform of sandwich complex excitation ultrasound electric machine that the present invention proposes;
Figure 23 is depicted as a kind of cutaway view using the first elastomeric rear mating end in the driving platform of sandwich complex excitation ultrasound electric machine that the present invention proposes;
Figure 24 is depicted as a kind of cutaway view using the rotating platform of the driving platform of sandwich complex excitation ultrasound electric machine that the present invention proposes;
Figure 25 is depicted as a kind of front view using the rotating platform of the driving platform of sandwich complex excitation ultrasound electric machine that the present invention proposes;
Figure 26 is depicted as a kind of partial sectional view using the fastening connection piece of the driving platform of sandwich complex excitation ultrasound electric machine that the present invention proposes.
Embodiment
Embodiment one: composition graphs 1 ~ Figure 11, Figure 14 ~ Figure 16 illustrate present embodiment.Present embodiments provide for a kind of specific embodiments of sandwich complex excitation ultrasound electric machine.Described sandwich complex excitation ultrasound electric machine forms primarily of firm banking 1, first elastomer 2, second elastomer 3, rotor 4, key 5, thrust ball bearing 6, butterfly spring 7, nut 8 and output shaft 9.
Described firm banking 1 is plate structure, and described firm banking 1 side end surface is along the circumferential direction evenly provided with n through hole 1-1 structure, and it is for realizing fixed installation of the present invention, wherein n be more than or equal to 1 integer; End surface center, described firm banking 1 side is provided with screwed hole 1-2 structure, and it is for screwing with the external screw thread 2-1-1 structure of mating end 2-1 mono-side end before the first elastomer 2 the fastening installation being connected and realizing the first elastomer 2; Described firm banking 1 end side centre of surface position is provided with counter sink 1-3 structure, and closely cooperating of its layout for nut 8 and thrust ball bearing 6, realizes the fastening installation of output shaft 9 one side end; Described firm banking 1 screwed hole 1-2 structure and counter sink 1-3 structure centre position are provided with through hole 1-4 structure, and it is arranged for the gap realizing output shaft 9.
Described first elastomer 2 is made up of front mating end 2-1, powered electrode sheet 2-2, ring-shaped piezo ceramic sheet 2-3, rear mating end 2-4 and insulating sleeve 2-5; Described front mating end 2-1 is hollow multidiameter structure, and described front mating end 2-1 mono-side end is provided with external screw thread 2-1-1 structure, and it is for screwing with the screwed hole 1-2 structure of firm banking 1 fixed installation being connected and realizing the first elastomer 2; Described front mating end 2-1 end side is provided with external screw thread 2-1-3 structure, and it is connected the clamping realizing powered electrode sheet 2-2, ring-shaped piezo ceramic sheet 2-3 and insulating sleeve 2-5 connects for screwing with the screwed hole 2-4-2 structure of rear mating end 2-4 mono-side end; The socket that outer cylinder surface 2-1-2 between described front mating end 2-1 step ladder circular ring face and end side external screw thread 2-1-3 structure is used for insulating sleeve 2-5 is installed; Described front mating end 2-1 both side ends centre of surface position is provided with through hole 2-1-4 structure, and it is arranged for the gap realizing output shaft 9.
Described ring-shaped piezo ceramic sheet 2-3 is 4i sheet
d 33exciting pattern with
d 15the annular piezoelectric ceramic piece of exciting pattern, the 2i sheet annular piezoelectric ceramic piece 2-3 that in described 4i sheet annular piezoelectric ceramic piece 2-3, side is arranged adopts
d 33exciting pattern, the 2i sheet annular piezoelectric ceramic piece 2-3 that in described 4i sheet annular piezoelectric ceramic piece 2-3, opposite side is arranged adopts
d 15exciting pattern, described powered electrode sheet 2-2 is the annular copper sheet being provided with ledge arrangement, 4i sheet annular piezoelectric ceramic piece 2-3 and 4i+1 sheet powered electrode sheet 2-2 by the spaced external peripheral surface 2-1-2 being socketed on front mating end 2-1 step ladder circular ring face place of insulating sleeve 2-5, wherein i be more than or equal to 1 integer; Described insulating sleeve 2-5 is thin-wall circular circulus.
Described rear mating end 2-4 is hollow circuit cylinder body structure, and described rear mating end 2-4 mono-side end is provided with external screw thread 2-4-1 structure, and it realizes being fastenedly connected of the first elastomer 2 and the second elastomer 3 for screwing to be connected with the screwed hole 3-1 of the second elastomer 3; Described rear mating end 2-4 end side surface is provided with screwed hole 2-4-2 structure, and it is connected the clamping realizing powered electrode sheet 2-2, ring-shaped piezo ceramic sheet 2-3 and insulating sleeve 2-5 connects for screwing with mating end 2-1 mono-side end external screw thread 2-1-3 structure before the first elastomer 2; Described rear mating end 2-4 both side ends centre of surface position is provided with through hole 2-4-3 structure, and it is arranged for the gap realizing output shaft 9.
Described second elastomer 3 is plane second elastomer, end surface center, described plane second elastomer 3 side is provided with screwed hole 3-1 structure, it is for screwing be connected with mating end 2-4 mono-side end external screw thread 2-4-1 structure after the first elastomer 2, realizes being fastenedly connected of the first elastomer 2 and the second elastomer 3; Described plane second elastomer 3 end side centre of surface position is provided with circular groove 3-3 structure; Described plane second elastomer 3 circular groove 3-3 structure side end surface is provided with friction material 3-4, and it, for increasing the second elastomer 3 and the frictional force of rotor 4 contact surface, realizes high-performance of the present invention and export; Described plane second elastomer 3 circular groove 3-3 structure and screwed hole 3-1 structure centre position are provided with through hole 3-2 structure, and it is arranged for the gap realizing output shaft 9.
Described rotor 4 is plate structure, and end surface center, described rotor 4 side is provided with circular groove 4-1 structure, and the circular groove 3-3 structure of itself and the second elastomer 3 is positioned opposite; Described rotor 4 end side centre of surface position is provided with flange 4-2 structure, and described rotor 4 flange 4-2 structure end surface is provided with shoulder hole 4-3 structure, and it is for realizing closely cooperating of thrust ball bearing 6; Described rotor 4 end surface center is provided with through hole 4-4 structure, and it is arranged for the gap realizing output shaft 9; Described rotor 4 flange 4-2 inside configuration is provided with keyway 4-5 structure, and it realizes the transmission of rotor 4 and output shaft 9 rotary motion and power for being connected with key 5.
Described output shaft 9 is multidiameter structure, and described output shaft 9 one side end is provided with keyway 9-1 structure, and it is for being connected the output realizing motion of the present invention and power with supported complex; Described output shaft 9 is provided with external screw thread 9-2 structure near keyway 9-1 structure side, and it realizes pressurization pretension of the present invention for screwing to be connected with nut 8; Described output shaft 9 end side is provided with external screw thread 9-6 structure, and it realizes pressurization pretension of the present invention for screwing to be connected with nut 8; Described output shaft 9 is used for being connected with thrust ball bearing 6 near the external peripheral surface 9-3 of both sides external screw thread 9-2 and 9-6 structure and 9-5 structure; Between the external peripheral surface 9-3 that described output shaft 9 and thrust ball bearing 6 are connected and 9-5 structure, keyway 9-1 structure side is provided with keyway 9-4 structure, it realizes rotor 4 move and transmission of power with output shaft 9 for being connected with key 5.
Describedly to be arranged on the first elastomer 2
d 33the ring-shaped piezo ceramic sheet 2-3 of exciting pattern forms exciting group A, described in be arranged on the first elastomer 2
d 15exciting pattern rectangular piezoelectric ceramic sheet 2-3 form exciting group B.
Embodiment two: present embodiment is described in conjunction with Figure 13 ~ Figure 19.Present embodiments provide for a kind of specific embodiments using the driving platform of sandwich complex excitation ultrasound electric machine.Described a kind of driving platform of sandwich complex excitation ultrasound electric machine that uses forms primarily of fixing outrigger 1, first elastomer 2, second elastomer 3, rotatable platform 4, rolling element 5, thrust ball bearing 6, butterfly spring 7, fastening connection piece 8 and hexagon socket head cap screw 9, describedly a kind ofly applies the second elastomer 3 in the driving platform of sandwich complex excitation ultrasound electric machine and forms identical with connected mode with the structure of the second elastomer 3 in embodiment one.
Described fixing outrigger 1 is the thin wall circular body structure that a side end is provided with flange, described fixing outrigger 1 flange surrounding is along the circumferential direction evenly provided with q through hole 1-1 structure, it is for realizing the fixed installation of fixing outrigger 1, wherein q be more than or equal to 1 integer; Described fixing outrigger 1 thin-wall circular ring body is provided with through hole 1-2 structure near flange section, and it is for realizing the extraction of electrified wire; Described fixing outrigger 1 thin-wall circular ring body is provided with arc-shaped slideway 1-3 structure inside cantilever end, and it is for being connected the rotary steering and support that realize rotatable platform 4 with rolling element 5; End surface center, described fixing outrigger 1 flange side is provided with shoulder hole 1-4 structure, and it is for realizing the mounting arrangements of the first elastomer 2; Described fixing outrigger 1 flange end side centre of surface position is provided with shoulder hole 1-6 structure, and it is for realizing the mounting arrangements of hexagon socket head cap screw 9; 1-4 structure centre position, described fixing outrigger 1 flange end surface step hole is provided with through hole 1-5 structure, and it is for realizing the fastening installation of the first elastomer 2 with hexagon socket head cap screw 9 matched in clearance.
Described first elastomer 2 is made up of front mating end 2-1, powered electrode sheet 2-2, ring-shaped piezo ceramic sheet 2-3, rear mating end 2-4 and insulating sleeve 2-5; Described front mating end 2-1 is multidiameter structure, and described front mating end 2-1 mono-side end is provided with screwed hole 2-1-1 structure, and it is for screwing with hexagon socket head cap screw 9 fixed installation being connected and realizing the first elastomer 2; Described front mating end 2-1 end side is provided with external screw thread 2-1-3 structure, and it is connected the clamping realizing powered electrode sheet 2-2, ring-shaped piezo ceramic sheet 2-3 and insulating sleeve 2-5 connects for screwing with the screwed hole 2-4-2 structure of rear mating end 2-4 mono-side end; The socket that outer cylinder surface 2-1-2 between described front mating end 2-1 step ladder circular ring face and end side external screw thread 2-1-3 structure is used for insulating sleeve 2-5 is installed.
Described ring-shaped piezo ceramic sheet 2-3 is 4i sheet
d 33exciting pattern with
d 15the annular piezoelectric ceramic piece of exciting pattern, the 2i sheet annular piezoelectric ceramic piece 2-3 that in described 4i sheet annular piezoelectric ceramic piece 2-3, side is arranged adopts
d 33exciting pattern, the 2i sheet annular piezoelectric ceramic piece 2-3 that in described 4i sheet annular piezoelectric ceramic piece 2-3, opposite side is arranged adopts
d 15exciting pattern, described powered electrode sheet 2-2 is the annular copper sheet being provided with ledge arrangement, 4i sheet annular piezoelectric ceramic piece 2-3 and 4i+1 sheet powered electrode sheet 2-2 by the spaced external peripheral surface 2-1-2 being socketed on front mating end 2-1 step ladder circular ring face place of insulating sleeve 2-5, wherein i be more than or equal to 1 integer; Described insulating sleeve 2-5 is thin-wall circular circulus.
Described rear mating end 2-4 is cylindrical structure, and described rear mating end 2-4 mono-side end is provided with external screw thread 2-4-1 structure, and it realizes being fastenedly connected of the first elastomer 2 and the second elastomer 3 for screwing to be connected with the screwed hole 3-1 of the second elastomer 3; Described rear mating end 2-4 end side surface is provided with screwed hole 2-4-2 structure, and it is connected the clamping realizing powered electrode sheet 2-2, ring-shaped piezo ceramic sheet 2-3 and insulating sleeve 2-5 connects for screwing with mating end 2-1 mono-side end external screw thread 2-1-3 structure before the first elastomer 2; Described rear mating end 2-4 end side position is provided with screwed hole 2-4-3 structure, and it is for screwing with fastening connection piece 8 the pressurization pretension being connected and realizing driving platform.
Described rotatable platform 4 is plate structure, and end surface center, described rotatable platform 4 side is provided with circular groove 4-1 structure, and the circular groove 3-3 structure of itself and the second elastomer 3 is positioned opposite; Described rotatable platform 4 end side centre of surface position is provided with counter sink 4-2 structure, and it is for realizing closely cooperating of thrust ball bearing 6; Be provided with through hole 4-3 structure between described rotatable platform 4 circular groove 4-1 structure and counter sink 4-2 structure, it is arranged for the gap realizing fastening connection piece 8; Described rotatable platform 4 external peripheral surface is provided with circular arc slideway 4-5 structure, and it is for being connected the rotary steering and support that realize rotatable platform 4 with rolling element 5; Described rotatable platform 4 end side surface is along the circumferential direction evenly provided with r screwed hole 4-4 structure, and it is for screwing with load the output being connected and realizing driving platform rotary motion and power, wherein r be more than or equal to 1 integer.
Described fastening connection piece 8 is the cylindrical structure that a side end is provided with inner hexagonal hole, described fastening connection piece 8 end side is provided with external screw thread 8-1 structure, and it is for screwing with the screwed hole 2-4-3 of mating end 2-4 mono-side end after the first elastomer 2 the pressurization pretension being connected and realizing driving platform; Outer cylinder surface 8-2 between described fastening connection piece 8 inner hexagonal hole and external screw thread 8-1 structure is used for being closely connected with thrust ball bearing 6.
Describedly to be arranged on the first elastomer 2
d 33the ring-shaped piezo ceramic sheet 2-3 of exciting pattern forms exciting group A, described in be arranged on the first elastomer 2
d 15exciting pattern rectangular piezoelectric ceramic sheet 2-3 form exciting group B.
Embodiment three: present embodiments provide for a kind of sandwich complex excitation ultrasound electric machine and use the specific embodiments of driving method of driving platform of this motor.
Described a kind of sandwich complex excitation ultrasound electric machine and use the specific embodiments of the driving method of the driving platform of this motor to be: described exciting group A passes to the ac-excited signal of telecommunication of a certain supersonic frequency (being generally greater than 16kHz), and the extensional vibration excited encourages the second elastomer 3 to produce flexural vibration mode; Described exciting group B passes to the ac-excited signal of telecommunication of same supersonic frequency (being generally greater than 16kHz), excites first elastomer 2 at its place to produce torsion modes; Described exciting group A is identical with the amplitude that exciting group B passes to the ac-excited signal of telecommunication, drive phase difference to be 90 degree or 270 degree; The superposition of mode of oscillation is utilized to be coupled, the contact surface of the second elastomer 3 and rotor 4 or rotatable platform 4 produces and drives row ripple, being formed and drive frictional force, by regulating the phase difference of exciting group A and the ac-excited signal of telecommunication of exciting group B, the movement output of the positive and negative both direction of the present invention can be realized; The described ac-excited signal of telecommunication can be the periodic electric signals such as sine, square wave or sawtooth waveforms.
Embodiment four: composition graphs 8 and Fig. 9 illustrate present embodiment.The elastomeric implementation of a kind of interdigitated electrode structure second of the second elastomer 3 in the driving platform that present embodiments provide for a kind of sandwich complex excitation ultrasound electric machine and use this motor.
Described second elastomer 3 is interdigitated electrode structure second elastomer, end surface center, described interdigitated electrode structure second elastomer 3 side is provided with screwed hole 3-1 structure, it is for screwing be connected with mating end 2-4 mono-side end external screw thread 2-4-1 after the first elastomer 2, realizes being fastenedly connected of the first elastomer 2 and the second elastomer 3; Described interdigitated electrode structure second elastomer 3 end side centre of surface position is provided with circular groove 3-3 structure; Described interdigitated electrode structure second elastomer 3 circular groove 3-3 structure side end surface is provided with comb 3-6 structure, described interdigitated electrode structure second elastomer 3 comb 3-6 body structure surface is provided with friction material 3-4, it, for increasing the frictional force of the second elastomer 3 and rotor 4 or turntable 4 contact surface, realizes high-performance of the present invention and exports; Described interdigitated electrode structure second elastomer 3 circular groove 3-3 structure and screwed hole 3-1 structure centre position are provided with through hole 3-2 structure, and it is arranged for the gap realizing output shaft 9 or fastening connection piece 8.
Claims (4)
1. a sandwich complex excitation ultrasound electric machine, is made up of firm banking (1), the first elastomer (2), the second elastomer (3), rotor (4), key (5), thrust ball bearing (6), butterfly spring (7), nut (8) and output shaft (9), described firm banking (1) is plate structure, described firm banking (1) side end surface is along the circumferential direction evenly provided with n through hole (1-1) structure, wherein n be more than or equal to 1 integer, end surface center, described firm banking (1) side is provided with screwed hole (1-2) structure, described firm banking (1) end side centre of surface position is provided with counter sink (1-3) structure, and described firm banking (1) screwed hole (1-2) structure and counter sink (1-3) structure centre position are provided with through hole (1-4) structure, described first elastomer (2) is by front mating end (2-1), powered electrode sheet (2-2), ring-shaped piezo ceramic sheet (2-3), rear mating end (2-4) and insulating sleeve (2-5) composition, described front mating end (2-1) is hollow multidiameter structure, described front mating end (2-1) side end is provided with external screw thread (2-1-1) structure, described front mating end (2-1) end side is provided with external screw thread (2-1-3) structure, outer cylinder surface (2-1-2) between described front mating end (2-1) step ladder circular ring face and end side external screw thread (2-1-3) structure is socketed installing insulating sleeve (2-5), described front mating end (2-1) both side ends centre of surface position is provided with through hole (2-1-4) structure, described ring-shaped piezo ceramic sheet (2-3) is 4i sheet
d 33exciting pattern with
d 15the annular piezoelectric ceramic piece of exciting pattern, 2i sheet annular piezoelectric ceramic piece (2-3) that in described 4i sheet annular piezoelectric ceramic piece (2-3), side is arranged adopts
d 33exciting pattern, 2i sheet annular piezoelectric ceramic piece (2-3) that in described 4i sheet annular piezoelectric ceramic piece (2-3), opposite side is arranged adopts
d 15exciting pattern, described powered electrode sheet (2-2) is for being provided with the annular copper sheet of ledge arrangement, 4i sheet annular piezoelectric ceramic piece (2-3) with 4i+1 sheet powered electrode sheet (2-2) by the spaced external peripheral surface (2-1-2) being socketed on front mating end (2-1) step ladder circular ring face place of insulating sleeve 2-5, wherein i be more than or equal to 1 integer, described insulating sleeve (2-5) is thin-wall circular circulus, described rear mating end (2-4) is hollow circuit cylinder body structure, described rear mating end (2-4) side end is provided with external screw thread (2-4-1) structure, described rear mating end (2-4) end side surface is provided with screwed hole (2-4-2) structure, and described rear mating end (2-4) both side ends centre of surface position is provided with through hole (2-4-3) structure, described second elastomer (3) is plane second elastomer, end surface center, described plane second elastomer (3) side is provided with screwed hole (3-1) structure, described plane second elastomer (3) end side centre of surface position is provided with circular groove (3-3) structure, described plane second elastomer (3) circular groove (3-3) structure side end surface is provided with friction material (3-4), described plane second elastomer (3) circular groove (3-3) structure and screwed hole (3-1) structure centre position are provided with through hole (3-2) structure, described rotor (4) is plate structure, end surface center, described rotor (4) side is provided with circular groove (4-1) structure, circular groove (3-3) structure of itself and the second elastomer (3) is positioned opposite, described rotor (4) end side centre of surface position is provided with flange (4-2) structure, described rotor (4) flange (4-2) structure end surface is provided with shoulder hole (4-3) structure, described rotor (4) end surface center is provided with through hole (4-4) structure, described rotor (4) flange (4-2) inside configuration is provided with keyway (4-5) structure, described output shaft (9) is multidiameter structure, described output shaft (9) side end is provided with keyway (9-1) structure, described output shaft (9) is provided with external screw thread (9-2) structure near keyway (9-1) structure side, described output shaft (9) end side is provided with external screw thread (9-6) structure, the external peripheral surface (9-3) of described output shaft (9) near both sides external screw thread (9-2) with (9-6) structure is connected with (9-5) structure and thrust ball bearing (6), between the external peripheral surface (9-3) that described output shaft (9) and thrust ball bearing (6) are connected and (9-5) structure, keyway (9-1) structure side is provided with keyway (9-4) structure, describedly to be arranged on the first elastomer (2)
d 33the ring-shaped piezo ceramic sheet (2-3) of exciting pattern forms exciting group A, described in be arranged on the first elastomer (2)
d 15exciting pattern rectangular piezoelectric ceramic sheet (2-3) form exciting group B.
2. a sandwich complex excitation according to claim 1 drives platform, it is characterized in that: be a kind of driving platform using sandwich complex excitation ultrasound electric machine, described a kind of driving platform of sandwich complex excitation ultrasound electric machine that uses forms by fixing outrigger (1), the first elastomer (2), the second elastomer (3), rotatable platform (4), rolling element (5), thrust ball bearing (6), butterfly spring (7), fastening connection piece (8) and hexagon socket head cap screw (9), described fixing outrigger (1) is the thin wall circular body structure that a side end is provided with flange, described fixing outrigger (1) flange surrounding is along the circumferential direction evenly provided with q through hole (1-1) structure, wherein q be more than or equal to 1 integer, described fixing outrigger (1) thin-wall circular ring body is provided with through hole (1-2) structure near flange section, described fixing outrigger (1) thin-wall circular ring body is provided with arc-shaped slideway (1-3) structure inside cantilever end, end surface center, described fixing outrigger (1) flange side is provided with shoulder hole (1-4) structure, described fixing outrigger (1) flange end side centre of surface position is provided with shoulder hole (1-6) structure, described fixing outrigger (1) flange end surface step hole (1-4) structure centre position is provided with through hole (1-5) structure, described first elastomer (2) is by front mating end (2-1), powered electrode sheet (2-2), ring-shaped piezo ceramic sheet (2-3), rear mating end (2-4) and insulating sleeve (2-5) composition, described front mating end (2-1) is multidiameter structure, described front mating end (2-1) side end is provided with screwed hole (2-1-1) structure, described front mating end (2-1) end side is provided with external screw thread (2-1-3) structure, outer cylinder surface (2-1-2) between described front mating end (2-1) step ladder circular ring face and end side external screw thread (2-1-3) structure is socketed installing insulating sleeve (2-5), described ring-shaped piezo ceramic sheet (2-3) is 4i sheet
d 33exciting pattern with
d 15the annular piezoelectric ceramic piece of exciting pattern, 2i sheet annular piezoelectric ceramic piece (2-3) that in described 4i sheet annular piezoelectric ceramic piece (2-3), side is arranged adopts
d 33exciting pattern, 2i sheet annular piezoelectric ceramic piece (2-3) that in described 4i sheet annular piezoelectric ceramic piece (2-3), opposite side is arranged adopts
d 15exciting pattern, described powered electrode sheet (2-2) is for being provided with the annular copper sheet of ledge arrangement, 4i sheet annular piezoelectric ceramic piece (2-3) with 4i+1 sheet powered electrode sheet (2-2) by the spaced external peripheral surface (2-1-2) being socketed on front mating end (2-1) step ladder circular ring face place of insulating sleeve 2-5, wherein i be more than or equal to 1 integer, described insulating sleeve (2-5) is thin-wall circular circulus, described rear mating end (2-4) is cylindrical structure, described rear mating end (2-4) side end is provided with external screw thread (2-4-1) structure, described rear mating end (2-4) end side surface is provided with screwed hole (2-4-2) structure, and described rear mating end (2-4) end side position is provided with screwed hole (2-4-3) structure, described rotatable platform (4) is plate structure, end surface center, described rotatable platform (4) side is provided with circular groove (4-1) structure, described rotatable platform (4) end side centre of surface position is provided with counter sink (4-2) structure, through hole (4-3) structure is provided with between described rotatable platform (4) circular groove (4-1) structure and counter sink (4-2) structure, described rotatable platform (4) external peripheral surface is provided with circular arc slideway (4-5) structure, described rotatable platform (4) end side surface is along the circumferential direction evenly provided with r screwed hole (4-4) structure, wherein r be more than or equal to 1 integer, described fastening connection piece (8) is the cylindrical structure that a side end is provided with inner hexagonal hole, described fastening connection piece (8) end side is provided with external screw thread (8-1) structure, and the outer cylinder surface (8-2) between described fastening connection piece (8) inner hexagonal hole and external screw thread (8-1) structure and thrust ball bearing (6) are closely connected, describedly to be arranged on the first elastomer (2)
d 33the ring-shaped piezo ceramic sheet (2-3) of exciting pattern forms exciting group A, described in be arranged on the first elastomer (2)
d 15exciting pattern rectangular piezoelectric ceramic sheet (2-3) form exciting group B.
3. a sandwich complex excitation ultrasound electric machine as claimed in claim 1 or 2 and use the driving method of driving platform of this motor, it is characterized in that: described sandwich complex excitation ultrasound electric machine and use the driving method of the driving platform of this motor the to be specially ac-excited signal of telecommunication that exciting group A passes to a certain supersonic frequency (being greater than 16kHz), exciting group B passes to the ac-excited signal of telecommunication of same supersonic frequency (being greater than 16kHz), exciting group A is identical with the amplitude that exciting group B passes to the ac-excited signal of telecommunication, phase difference is driven to be 90 degree or 270 degree, the ac-excited signal of telecommunication is sinusoidal, the periodic electric signal such as square wave or sawtooth waveforms.
4. a sandwich complex excitation ultrasound electric machine according to claim 1 and 2 and use second elastomer (3) of driving platform of this motor, it is characterized in that: be a kind of interdigitated electrode structure second elastomer, end surface center, described interdigitated electrode structure second elastomer (3) side is provided with screwed hole (3-1) structure, described interdigitated electrode structure second elastomer (3) end side centre of surface position is provided with circular groove (3-3) structure, described interdigitated electrode structure second elastomer (3) circular groove (3-3) structure side end surface is provided with comb (3-6) structure, described interdigitated electrode structure second elastomer (3) comb (3-6) body structure surface is provided with friction material (3-4), described interdigitated electrode structure second elastomer (3) circular groove (3-3) structure and screwed hole (3-1) structure centre position are provided with through hole (3-2) structure.
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Cited By (1)
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| CN109407305A (en) * | 2018-09-27 | 2019-03-01 | 中国人民解放军国防科技大学 | Piezoelectric driving deformable mirror for synchrotron radiation light source and assembling method thereof |
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