CN111948292A - Scanning device - Google Patents

Scanning device Download PDF

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Publication number
CN111948292A
CN111948292A CN202010611548.5A CN202010611548A CN111948292A CN 111948292 A CN111948292 A CN 111948292A CN 202010611548 A CN202010611548 A CN 202010611548A CN 111948292 A CN111948292 A CN 111948292A
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CN
China
Prior art keywords
crank
track
scanning
slider
scanning device
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Pending
Application number
CN202010611548.5A
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Chinese (zh)
Inventor
刘成波
刘良检
潘殷豪
陈宁波
张迎
高蓉康
任亚光
陈涛
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Shenzhen Institute of Advanced Technology of CAS
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Shenzhen Institute of Advanced Technology of CAS
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Priority to CN202010611548.5A priority Critical patent/CN111948292A/en
Publication of CN111948292A publication Critical patent/CN111948292A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04Analysing solids
    • G01N29/06Visualisation of the interior, e.g. acoustic microscopy
    • G01N29/0654Imaging
    • G01N29/0672Imaging by acoustic tomography
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04Analysing solids
    • G01N29/06Visualisation of the interior, e.g. acoustic microscopy
    • G01N29/0609Display arrangements, e.g. colour displays
    • G01N29/0645Display representation or displayed parameters, e.g. A-, B- or C-Scan
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04Analysing solids
    • G01N29/06Visualisation of the interior, e.g. acoustic microscopy
    • G01N29/0654Imaging
    • G01N29/0681Imaging by acoustic microscopy, e.g. scanning acoustic microscopy
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22Details, e.g. general constructional or apparatus details
    • G01N29/26Arrangements for orientation or scanning by relative movement of the head and the sensor
    • G01N29/265Arrangements for orientation or scanning by relative movement of the head and the sensor by moving the sensor relative to a stationary material
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00Indexing codes associated with group G01N29/00
    • G01N2291/02Indexing codes associated with the analysed material
    • G01N2291/024Mixtures
    • G01N2291/02475Tissue characterisation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00Indexing codes associated with group G01N29/00
    • G01N2291/02Indexing codes associated with the analysed material
    • G01N2291/024Mixtures
    • G01N2291/02483Other human or animal parts, e.g. bones

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Acoustics & Sound (AREA)
  • Transmission Devices (AREA)

Abstract

The application discloses scanning device, scanning device includes: a rotating electric machine; the crank sliding block mechanism comprises a crank, a connecting rod and a sliding block, one end of the crank is fixedly connected with an output shaft of the rotating motor, the other end of the crank is rotatably connected to one end of the connecting rod, and the other end of the connecting rod is rotatably connected to the sliding block; a scanning probe is arranged on the sliding block; the rotary motor is fixed on the detection table, the detection table comprises a first sliding track, and the sliding block is arranged on the first sliding track and pushed and pulled by the connecting rod to move back and forth between a first position and a second position of the first sliding track. This application scanning device becomes scanning probe's linear motion through slider-crank mechanism with the rotary motion of rotating electrical machines for scanning probe reciprocating motion on first slip track has improved scanning speed.

Description

Scanning device
Technical Field
The application belongs to the technical field of scanning imaging, and particularly relates to a scanning device.
Background
Scanning imaging techniques are used in various industries, for example in clinical or basic medicine, and can realize cross-scale scanning imaging from organelles, cells, tissues to organs. At present, the mechanical scanning mostly adopts a screw motor translation platform to drive an imaging probe to translate and scan, but the screw motor needs to turn in the scanning process, and the screw has a return stroke difference, so that the scanning speed is too slow, the imaging efficiency is poor, and real-time imaging cannot be realized.
Disclosure of Invention
The application mainly provides a scanning device to solve the technical problem that the scanning speed is too slow in the prior art.
In order to solve the technical problem, the application adopts a technical scheme that: there is provided a scanning device including:
a rotating electric machine;
the crank sliding block mechanism comprises a crank, a connecting rod and a sliding block, one end of the crank is fixedly connected with an output shaft of the rotating motor, the other end of the crank is rotatably connected to one end of the connecting rod, and the other end of the connecting rod is rotatably connected to the sliding block; a scanning probe is arranged on the sliding block;
the detection table is fixed on the rotating motor and comprises a first sliding track, and the sliding block is arranged on the first sliding track and pushed and pulled by the connecting rod to move back and forth between a first position and a second position of the first sliding track.
According to an embodiment provided by the application, a connecting line between one end of the crank connected with the rotating motor and one end of the connecting rod connected with the sliding block is the same as the extending direction of the track of the first sliding track, and the track of the first sliding track is a linear track.
According to an embodiment provided by the present application, a connection line between one end of the crank connected to the rotating electrical machine and one end of the connecting rod connected to the slider intersects with a track extending direction of the first sliding track.
According to an embodiment provided by the present application, a difference between lengths of the connecting rod and the crank is greater than an offset distance between one end of the crank connected to the rotating electrical machine and a sliding track center line of the slider.
According to an embodiment provided by the application, a sensor is arranged on the sliding block, a trigger is arranged on the detection table corresponding to the first position or the second position of the first sliding track, and when the sliding block moves to the first position or the second position, the sensor generates a trigger signal under the action of the trigger.
According to an embodiment provided by the present application, the sensor and the scanning probe are respectively disposed at two opposite ends of the slider so as to be respectively located at two sides of the first sliding track, and the sensor and the trigger are located at the same side of the first sliding track.
According to an embodiment of the present application, the sensor is a photogate, and the trigger is a light shielding strip.
According to an embodiment of the present application, the first position is closer to the rotating electrical machine than the second position, and the trigger is disposed corresponding to the second position.
According to an embodiment provided by the present application, the scanning apparatus further includes:
the detection platform is arranged on the second sliding track, and the track extending direction of the second sliding track is perpendicular to the track extending direction of the first sliding track.
According to an embodiment that the application provided, scanning device still includes the shaft coupling subassembly, the shaft coupling subassembly include the base with set up in shaft coupling in the base, the rotating electrical machines install in the base, the crank pass through the coupling joint in the output shaft of rotating electrical machines.
The application provides a scanning device, one end of a crank is fixedly connected with an output shaft of a rotating motor, the other end of the crank is rotatably connected with one end of a connecting rod, the other end of the connecting rod is rotatably connected with a sliding block, a scanning probe is arranged on the sliding block, the rotating motion of the rotating motor is converted into the linear motion of the scanning probe through a crank sliding block mechanism, the scanning probe on the sliding block is pushed and pulled down by the connecting rod to move back and forth between a first position and a second position of a first sliding track, the scanning speed of the scanning device is improved, real-time imaging is realized, the rotating motion process of the rotating motor is not reversed, the problem of poor imaging image precision caused by poor return stroke of the scanning probe is avoided, the reconstruction and splicing of subsequent scanning images are facilitated; the crank-slider mechanism is used as a transmission part for the rotary motion of the rotary motor, so that the scanning speed of the scanning device is improved, and the manufacturing cost of a product is reduced.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the description of the embodiments are briefly introduced below, it is obvious that the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without inventive efforts, wherein:
FIG. 1 is a schematic structural diagram of an embodiment of a scanning apparatus according to the present application;
FIG. 2 is a schematic top view of the scanning apparatus shown in FIG. 1;
FIG. 3 is a schematic view of a simple structure of a centering slider-crank mechanism in the scanning device of the present application;
FIG. 4 is a schematic structural view of a centering slider-crank mechanism in the scanning apparatus shown in FIG. 3;
FIG. 5 is a schematic diagram of a simple structure of an offset slider-crank mechanism in a scanning device according to the present application;
FIG. 6 is a schematic structural diagram of another embodiment of a scanning apparatus of the present application;
FIG. 7 is a simplified diagram of an embodiment of a motion trajectory of a scanning probe in the scanning apparatus of the present application;
fig. 8 is a simplified schematic diagram of another embodiment of the motion trajectory of the scanning probe in the scanning device of the present application.
Detailed Description
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
It should be noted that if directional indications (such as up, down, left, right, front, and back … …) are referred to in the embodiments of the present application, the directional indications are only used to explain the relative positional relationship between the components, the movement situation, and the like in a specific posture (as shown in the drawings), and if the specific posture is changed, the directional indications are changed accordingly.
In addition, if there is a description of "first", "second", etc. in the embodiments of the present application, the description of "first", "second", etc. is for descriptive purposes only and is not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In addition, technical solutions between various embodiments may be combined with each other, but must be realized by a person skilled in the art, and when the technical solutions are contradictory or cannot be realized, such a combination should not be considered to exist, and is not within the protection scope of the present application.
Referring to fig. 1 and fig. 2, fig. 1 is a schematic structural diagram of an embodiment of a scanning device of the present application, and fig. 2 is a schematic top structural diagram of the scanning device shown in fig. 1. The scanning device 10 of the present application is suitable for fast axis scanning of photoacoustic microscopy imaging or photoacoustic computed tomography, and the fast axis is a moving axis for driving the scanning device 10 to perform B-SCAN (B-SCAN) to acquire imaging information of a sample to be scanned.
The scanner device 10 of the present embodiment includes a rotary motor 100, a slider-crank mechanism 200, and a test stage 300.
The crank-slider mechanism 200 includes a crank 21, a connecting rod 22 and a slider 23, one end of the crank 21 is fixedly connected to an output shaft (not shown) of the rotating electrical machine 100, the other end is rotatably connected to one end of the connecting rod 22, and the other end of the connecting rod 22 is rotatably connected to the slider 23, i.e., the rotating electrical machine 100 rotates to drive the crank 21 fixedly connected thereto to rotate, the crank 21 rotates to drive the connecting rod 22 rotatably connected thereto to move, and the connecting rod 22 can drive the slider 23 to move.
The detection platform 300 comprises a first sliding track 31, the first sliding track 31 comprises a first position 311 and a second position 312, and in order to facilitate the slider 23 to move linearly back and forth on the detection platform 300, the slider 23 is disposed on the first sliding track 31, so that the slider 23 moves linearly back and forth on the first sliding track 31 under the pushing of the connecting rod 22. Specifically, the slider 23 may be slidably connected to the first sliding rail 31 in a nesting manner.
The slide 23 is provided with a scanning probe 32. In this embodiment, the rotary motor 100 is used, and the slider 23 is driven to move through the slider-crank mechanism 200, so as to drive the scanning probe 32 to move, the rotary motor 100 rotates for one circle, the scanning probe 32 can scan back and forth once, the rotary motor 100 can realize rapid rotation, and then the scanning probe 32 can also realize rapid scanning. In practice, the first sliding track 31 is also generally referred to as a fast axis.
Moreover, the slider 23 drives the scanning probe 32 to make a linear motion, so that when the scanning probe performs light scanning, the focal point of the laser irradiated by the scanning probe 32 is not changed, that is, the size of a light spot is not changed, and the problem of defocusing cannot occur.
In the present embodiment, the rotary electric machine 100 is fixed to the test stage 300. Specifically, the rotating electrical machine 100 is fixed to the inspection table 300 through the coupling assembly 400, the coupling assembly 400 includes a base 41 and a coupling 42 disposed in the base 41, the rotating electrical machine 100 is mounted on the base 41, and the crank 21 is connected to an output shaft of the rotating electrical machine 100 through the coupling assembly 400.
According to the technical scheme of the embodiment, the rotary motion of the rotary motor 100 is converted into the linear motion of the scanning probe 32 by the crank-slider mechanism 200, so that compared with a screw motor displacement table used for scanning by a traditional machine, the scanning speed is increased, and real-time imaging can be realized.
Referring to fig. 3-5, fig. 3 is a schematic structural diagram of a centering type crank-slider mechanism in a scanning device of the present application, fig. 4 is a schematic structural diagram of a centering type crank-slider mechanism in a scanning device of fig. 3, and fig. 5 is a schematic structural diagram of an offset type crank-slider mechanism in a scanning device of the present application.
In the centering crank slider mechanism shown in fig. 3 and 4, the connecting line between the end of the crank 21 connected to the rotary electric machine 100 and the end of the connecting rod 22 connected to the slider 23 is the same as the track extending direction of the first slide track 31. Wherein, the track of first slip track is the straight line track.
For the offset slider-crank mechanism shown in fig. 5, the offset slider-crank mechanism can perform a full-circle motion or a non-full-circle motion under the driving of the rotating electrical machine 100, and has a snap-back characteristic. In the offset type slider-crank mechanism, a line connecting one end of the crank 21 connected to the rotary electric machine 100 and one end of the connecting rod 22 connected to the slider 23 intersects with the track extending direction of the first slide track 31.
In the embodiment, in order to ensure that the offset slider-crank mechanism can perform a complete cycle movement under the rotation of the rotating electrical machine 100, the length difference between the connecting rod 22 and the crank 21 is set to be greater than the offset distance e between the end of the crank 21 connected to the rotating electrical machine 100 and the center line of the sliding track of the slider 23.
In practical applications, a person skilled in the art can select the type of the crank-slider mechanism 200 according to practical situations, and regarding the detailed technical solutions of this section, the detailed development is not repeated here.
In this embodiment, the crank 21 drives the connecting rod 22 to move under the action of the rotating motor 100, so that the slider 23 rotationally connected with the connecting rod 22 moves back and forth between the first position 311 and the second position 312 of the first sliding track 31, and the rotating motion of the rotating motor 100 is converted into the linear motion of the scanning probe 32, thereby increasing the scanning speed, realizing real-time imaging, avoiding the problem of poor precision caused by poor return scanning of the scanning probe 32 due to no reversing in the rotating motion process of the rotating motor 100, facilitating the reconstruction and splicing of subsequent scanning images, and improving the quality of the images; the slider-crank mechanism 200 is used as a transmission member for the rotational motion of the rotary motor 100, thereby improving the scanning speed and range of the scanning device 10 and improving the image quality.
Regarding the arrangement and position of the scanning probe 32 on the slider 23, the scanning probe 32 is suspended, that is, there is no detection platform 300 under the scanning probe 32, and meanwhile, considering the structure and sliding arrangement of the slider 23, the scanning probe 32 can be arranged on the side surface of the slider 23, specifically, the bottom surface of the slider 23 is connected to the first sliding track 31, and the scanning probe 32 is arranged on the side surface of the bottom surface of the connecting slider 23, so as to scan the sample to be scanned.
In order to adjust the scanning position of the scanning probe 32, the scanning probe 32 can be telescopically arranged on the sliding block 23 to realize the adjustment of the scanning probe 32.
When the slider 23 moves back and forth between the first position 311 and the second position 312 of the first sliding track 31, the scanning device 10 may not know the start and the end of the scanning in time, which may cause the scanning to be repeated or affect the image quality after the scanning.
Therefore, in the present embodiment, a sensor 33 and a trigger 34 are further introduced, the sensor 33 is disposed on the slider 23, the trigger 34 is disposed on the detection platform 300 corresponding to the first position 311 of the first sliding track 31, in another embodiment, the trigger 34 is disposed on the detection platform 300 corresponding to the second position 312 of the first sliding track 31, and in other embodiments, the trigger 34 is disposed on the detection platform 300 corresponding to both the first position 311 and the second position 312 of the first sliding track 31. The sensor 33 and the trigger 34 are cooperatively arranged to generate a trigger signal, and the sensor 33 and the trigger 34 correspond to a reference point, so as to know the start or the end of one scan of the scanning probe 32 in time, thereby facilitating the reconstruction and stitching process of subsequent images.
Specifically, when the slider 23 moves back and forth between the first position 311 and the second position 312 of the first sliding track 31, the sensor 33 generates a trigger signal under the action of the trigger 34, and the sensor 33 should be disposed on a side surface of the slider 23, and may be disposed on a side surface parallel to the moving direction of the slider 23.
In order to facilitate the sensor 33 and the scanning probe 32 to achieve their respective functions, the sensor 33 and the scanning probe 32 are respectively disposed at two opposite ends of the slider 23 to be respectively located at two sides of the first sliding track 31, that is, the sensor 33 and the scanning probe 32 are respectively located at two sides parallel to the moving direction of the slider 23, and the slider 23 drives the sensor 33 and the scanning probe 32 to move back and forth in the track extending direction of the first sliding track 31 when moving back and forth at the first position 311 and the second position 312 of the first sliding track 31. When the sensor 33 passes through the trigger 34, the sensor 33 starts to work, generates an electric signal, and sends the electric signal to a program to indicate the start or the end of scanning, if the scanning is finished, the sensor 33 passes through the trigger 34 again to be used as the start of the next scanning, the scanning probe 32 moves back by the same stroke as the previous scanning, the scanning mode is one time and one time, the data acquired by the two times of scanning of the scanning probe 32 are both effective data, and the data are reciprocated by matching with other slow axes, so that the spliced image can be reconstructed.
Regarding the arrangement of the sensor 33 and the trigger 34, in a specific embodiment, the sensor 33 can be disposed on the side of the sliding block 23 in a telescopic manner, so as to adjust the position of the sensor 33, so that the sensor 33 can pass through the trigger 34 under the driving of the sliding block 23 to trigger the generation of the trigger signal.
The trigger 34 may be fixedly disposed on a side surface of the detection platform 300, or may be disposed on a surface of the detection platform 300 close to the slider 23, so that the sensor 33 can be driven by the slider 23 through the trigger 34, and the specific disposition position of the trigger 34 is not limited in this embodiment.
In a particular embodiment, the sensor 33 may be a photogate and the trigger 34 may be a shutter bar. When the photoelectric door passes through the light shielding strip under the driving of the sliding block 23, the light of the photoelectric door is triggered to work at the moment of being shielded by the light shielding strip, an electric signal is generated and transmitted to a program, and the start or the end of one-time scanning is known in time.
In practical applications, when the slider 23 moves the sensor 33 and the scanning probe 32 from the first position 311 to the second position 312 of the first sliding track 31, that is, when the scanning probe 32 performs B-scan on the fast axis, the sensor 33 just passes through the trigger 34, and triggers to generate a trigger signal, which indicates that one scan is finished, and if the sensor 33 passes through the trigger 34 again and generates the trigger signal, it indicates that the next scan is started.
Referring to fig. 6, fig. 6 is a schematic structural diagram of another embodiment of a scanning device according to the present application. In fig. 6, the scanning device 10 further includes a supporting platform 500, i.e. a linear module, the supporting platform 500 is disposed to enable the scanning probe 32 to scan in a direction perpendicular to the track extending direction of the first sliding track 31, and the supporting platform 500 is disposed to expand the moving dimension of the scanning probe 32, so as to assist the fast axis to complete a full scan.
Specifically, the second sliding rail 51 is disposed on the supporting platform 500, and the rail extending direction of the second sliding rail 51 is perpendicular to the rail extending direction of the first sliding rail 31, so that the movement range of the scanning probe 32 is expanded, the scanning probe 32 scans in a wider range, and the scanning speed is increased.
Compared with the movement of the slider 23 on the first sliding track 31, the movement of the slider 23 on the second sliding track 51 can be pushed by another motor or manually, specifically, since the slider 23 is located on the detection table 300, the detection table 300 is disposed on the second sliding track 51, and when the slider 23 is driven by the rotating motor 100 to move back and forth on the first sliding track 31, the detection table 300 is driven by the motor or manually to move on the second sliding track 31, so that the slider 31 located on the detection table 300 can drive the scanning probe 32 to scan and image on the plane where the first sliding track 31 and the second sliding track 51 are located. In practical applications, the second sliding track is also referred to as slow axis.
In a specific embodiment, the arrangement manner of the detecting table 300 and the second sliding track 51 may be a sliding arrangement, which is not limited in this embodiment.
In the embodiment, the scanning probe 32 can be assisted by the slow axis to scan on the fast axis, so that the scanning dimension of the scanning probe 32 is expanded, the scanning range of the scanning probe 32 is expanded, and the scanning probe 32 has multiple scanning tracks. Taking the scanning probe 32 for scanning in the horizontal direction (x, y axis) as an example, refer to fig. 7 and 8 in detail, fig. 7 is a simple schematic diagram of an embodiment of a motion trajectory of the scanning probe in the scanning apparatus of the present application, and fig. 8 is a simple schematic diagram of another embodiment of the motion trajectory of the scanning probe in the scanning apparatus of the present application.
In fig. 7, after the scanning probe 32 is driven by the slider 23 to scan from the first position 311 to the second position 312 of the first sliding track 31, the detecting platform 300 moves on the second sliding track 51 by a preset distance, and after the scanning probe 32 is driven by the slider 23 to scan from the second position 312 to the first position 311 of the first sliding track 31, the detecting platform 300 steps on the second sliding track 51 by the preset distance, and the above process is repeated to obtain the motion track of the scanning probe 32 shown in fig. 7. In a specific embodiment, the preset distance may be set according to actual conditions.
Wherein, the x-axis is a direction of the slider 23 moving from the first position 311 to the second position 312 of the first sliding track 31, i.e. a fast axis direction, the y-axis represents a sliding direction of the detection table 300 on the second sliding track 51, i.e. a slow axis direction, and specific directions of the x-axis and the y-axis can be referred to fig. 6.
In practical application, the motion scanning of the scanning probe 32 in the x-axis direction is effective data, and the reciprocating motion is performed in cooperation with the y-axis (slow axis), which is beneficial to the subsequent reconstruction imaging of each B-SCAN. In fig. 8, when the scanning probe 32 is driven by the slider-crank mechanism 200 to scan from the first position 311 to the second position 312 of the first sliding rail 31, the scanning probe 32 simultaneously scans on the x and y axes along with the sliding movement of the detection table 300 on the second sliding rail 51. That is, the scanning probe 32 is driven by the slider-crank mechanism 200 to perform B-scan on the fast axis, and the slow axis assists the scanning probe 32 to perform scanning motion on the fast axis, so as to obtain the motion trajectory of the scanning probe 32 shown in fig. 8. The slider-crank mechanism 200 in this embodiment may be an eccentric slider-crank mechanism, or may be a centric slider-crank mechanism, and if the eccentric slider-crank mechanism is used, there is a snap-back characteristic, so that the scanning probe 32 cannot acquire useful data during the back-and-forth movement on the sliding track, which results in the inability to image in real time.
In this embodiment, the scanning device includes: a rotating electric machine; the crank sliding block mechanism comprises a crank, a connecting rod and a sliding block, one end of the crank is fixedly connected with an output shaft of the rotating motor, the other end of the crank is rotatably connected to one end of the connecting rod, and the other end of the connecting rod is rotatably connected to the sliding block; a scanning probe is arranged on the sliding block; the rotary motor is fixed on the detection table, the detection table comprises a first sliding track, and the sliding block is arranged on the first sliding track and pushed and pulled by the connecting rod to move back and forth between a first position and a second position of the first sliding track. This application turns into scanning probe's linear motion with the rotary motion of rotating electrical machines through slider-crank mechanism for scanning probe on the slider is in the connecting rod push-and-pull down in first position and the second position back and forth movement between first slip track, has improved scanning device's scanning speed, has realized real-time formation of image. Compared with the traditional screw rod motor, the rotating motor has no reversing in the rotating motion process, the problem of poor precision caused by poor return scanning of the scanning probe is avoided, and the quality of images is improved; the crank-slider mechanism is used as a transmission part for the rotary motion of the rotary motor, so that the scanning speed, the scanning range and the image quality of the scanning device are improved, the manufacturing cost of a product is reduced, and the crank-slider mechanism has a good market popularization prospect; compared with the traditional galvanometer scanning, the scanning probe is arranged on the sliding block, so that the scanning probe is driven by the slider-crank mechanism to perform B scanning on a fast axis, the scanning probe does not need to swing, and the problem that the scanning probe changes in spot size and even goes out of focus in the scanning process is avoided; when the scanning probe scans a sample to be scanned on the fast axis, the slow axis assists the fast axis to move, and the scanning dimension of the scanning probe is expanded, so that the scanned images can be spliced again conveniently.
The above description is only an example of the present application and is not intended to limit the scope of the present application, and all modifications of equivalent structures and equivalent processes, which are made by the contents of the specification and the drawings, or which are directly or indirectly applied to other related technical fields, are intended to be included within the scope of the present application.

Claims (10)

1. A scanning device, characterized in that the scanning device comprises:
a rotating electric machine;
the crank sliding block mechanism comprises a crank, a connecting rod and a sliding block, one end of the crank is fixedly connected with an output shaft of the rotating motor, the other end of the crank is rotatably connected to one end of the connecting rod, and the other end of the connecting rod is rotatably connected to the sliding block; a scanning probe is arranged on the sliding block;
the detection table is fixed on the rotating motor and comprises a first sliding track, and the sliding block is arranged on the first sliding track and pushed and pulled by the connecting rod to move back and forth between a first position and a second position of the first sliding track.
2. The scanning device according to claim 1, wherein a line connecting one end of the crank to the rotary motor and one end of the connecting rod to the slider has the same direction as a track of the first sliding track, and the track of the first sliding track is a linear track.
3. The scanning device according to claim 1, wherein a line connecting one end of the crank to the rotary motor and one end of the connecting rod to the slider intersects with a track extending direction of the first slide track.
4. The scanning device according to claim 3, wherein a difference between lengths of the connecting rod and the crank is larger than an offset distance between an end of the crank connected to the rotary motor and a center line of a slide rail of the slider.
5. The scanning device according to claim 1, wherein a sensor is disposed on the slider, a trigger is disposed on the detection table corresponding to the first position or the second position of the first sliding track, and the sensor generates a trigger signal under the action of the trigger when the slider moves to the first position or the second position.
6. The scanning device according to claim 5, wherein the sensor and the scanning probe are respectively disposed at two opposite ends of the slider so as to be respectively located at two sides of the first sliding rail, and the sensor and the trigger are located at the same side of the first sliding rail.
7. The scanning device of claim 6, wherein the sensor is a photogate and the trigger is a shutter bar.
8. The scanning device of claim 5, wherein the first position is closer to the rotating motor than the second position, and the trigger is disposed corresponding to the second position.
9. The scanning device of claim 1, further comprising:
the detection platform is arranged on the second sliding track, and the track extending direction of the second sliding track is perpendicular to the track extending direction of the first sliding track.
10. The scanning device of claim 1, further comprising a coupling assembly, wherein the coupling assembly comprises a base and a coupling disposed in the base, the rotating electrical machine is mounted to the base, and the crank is coupled to an output shaft of the rotating electrical machine via the coupling.
CN202010611548.5A 2020-06-29 2020-06-29 Scanning device Pending CN111948292A (en)

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Application publication date: 20201117