CN105510361B - A kind of scanning means and method of CL system - Google Patents
A kind of scanning means and method of CL system Download PDFInfo
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- CN105510361B CN105510361B CN201410555446.0A CN201410555446A CN105510361B CN 105510361 B CN105510361 B CN 105510361B CN 201410555446 A CN201410555446 A CN 201410555446A CN 105510361 B CN105510361 B CN 105510361B
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Abstract
The present invention relates to the scanning means and method of a kind of CL system.The scanning means includes: bracket, mechanical arm, x-ray source, detector, carrier, objective table；The mechanical arm passes through drive-connecting shaft and the bracket, and the x-ray source and the detector are respectively arranged in the first, second mounting base of the mechanical arm；The carrier is fixedly installed on the bracket, and the objective table is installed on the carrier, has the fixed position of sample on the objective table, the carrier and the objective table are located between the first mounting base and the second mounting base of the mechanical arm；Relative to the bracket, the mechanical arm be can be located in multiple angles, and the x-ray source and the detector and carrier holding are aligned, and when scanning, the detection mode under various modes may be implemented in the mechanical arm swing.
Description
Technical field
The present invention relates to a kind of x-ray imaging detection devices, more particularly to one kind to be based on Computed tomography CL
The scanning means and method of system.
Background technique
X ray computer Tomography technology (CT-computed tomography) is a kind of effective detectable substance
The lossless detection method of internal portion structure three-dimensional structural information, is all widely used in fields such as industry, medical diagnosis, sweeps
It is close to retouch object scale on three-dimensional.It is much larger than the tabular component of thickness in scanning length and width, such as scans multilayer printed circuit
When plate, micro electro mechanical device and paleontological fossil, the imaging effect of CT is simultaneously unsatisfactory.In recent years, x-ray computer is layered
The research and development of scanning imaging technology attracts people's attention, it is characterized in that, the object of scanning is flat object, and x-ray is only
Object is penetrated in thickness direction.Typical CL system mainly includes three parts: x-ray source, detector and objective table.
It is a kind of CT technology of the limited angle projection of non-coaxial scanning on CL technological essence, dedicated for tabular component inspection
The technology of survey, it belongs to non-precision reconstruction, by the endless full scan to component, realizes to its inner constructional form and defect
Chromatography detection can solve the problems, such as that conventional CT scan mode can not carry out tomoscan to tabular component.Since long axis direction is worn
Saturating thickness is big, and the contrast sensitivity of fluoroscopy images reduces, and conventional CT scan is become so that tabular component carries out tomoscan
It obtains very difficult or even cannot achieve because that can not penetrate.And when being scanned using non-coaxial mode, ray is along flat with plate sample
Normal angled direction in face passes through, using tabular component plane normal direction as axis rotated sample, from multiple angles to sample
When being originally scanned, the thickness that ray passes through sample is not much different, and by adjusting ray energy, can obtain preferable contrast
Sensitivity.It is very urgent for the demand of CL technology that the fields such as field, paleontology and composite material research are researched and developed in electronic device
It cuts.
With the development of digital detector and computer technology, modern CL system is with traditional batch imaging technique and CT technology
Deng based on, rapidly develop instead of traditional Stratified Imaging system.The projection under all angles is stored by digital detector
Data recycle the CT image reconstruction algorithm of modification to handle data for projection, finally obtain the faultage image of object.It is a kind of
Common CL system construction drawing is as shown in Figure 1.Object obtains a system by rotary shaft rotary scanning of sample normal in scanning process
The digital projection figure of column.It is compared with the traditional method, the resolution ratio of modern CL technology imaging is higher, and imaging effect is more preferable.Shown in Fig. 1
Although system structure successfully complete CL scanning system, and realize the scanning of micro- grade, but still the space that is significantly improved,
Limited view is to limit its big problem for scanning freedom degree, and unilateral fixed objective table fixed sample inconvenience is also one first
Then, quality larger object hangs down under the influence of gravity and can not rebuild, and the inclination angle of sample is inconvenient to adjust and scanning mode list
It is first-class.
Summary of the invention
The present invention provides a kind of scanning means based on Computed tomography CL system, it is therefore intended that can be realized
Scanning of the appliance computer chromatography imaging technique to plate sample, i.e., complete projection data acquisitions under the conditions of non-coaxial, thus
Plate sample faultage image is rebuild, and the coaxial scanning mode that routine CT is used can not sweep the three-dimensional chromatography of plate sample progress
The problem of retouching completes to rebuild the quality information of tabular component and spatial structural form under micrometer resolution.
To solve the above problems, the present invention provides a kind of scanning means based on Computed tomography CL system,
A kind of scanning means based on Computed tomography CL system, the scanning means include: bracket, mechanical arm, X-ray
Source, detector, carrier, objective table；The mechanical arm has drive-connecting shaft, the first mounting base and the second mounting base, the machinery
For arm by the drive-connecting shaft and the bracket, first mounting base and the second mounting base are located at the drive-connecting shaft
Two sides；The x-ray source is installed on the first mounting base of the mechanical arm, and the detector is installed on the second of the mechanical arm
Mounting base, the detector are aligned with the x-ray source；The carrier is fixedly installed on the bracket, the objective table
It is installed on the carrier, there is the fixed position of sample, the carrier and the objective table are located at institute on the objective table
It states between the first mounting base of mechanical arm and the second mounting base；Relative to the bracket, the mechanical arm can be located at multiple angles
On degree；And the x-ray source is aligned with the detector and carrier holding, can realize that multi-angle scans by mechanical arm swing
Sample, and scan start before do not need to correct.
Based on above-mentioned design, there is the mounting surface of alignment horizontal plane on the carrier, the objective table is installed on described
Mounting surface, the fixed position of sample on the objective table are also aligned horizontal plane, sample it is horizontal positioned, under gravity sample without
It needs to fix.
Based on above-mentioned design, a rotating mechanism, the rotating mechanism are installed between the carrier and the objective table
The objective table is driven to rotate around carrier center vertical line；The objective table has horizontal displacement mechanism.
Based on above-mentioned design, angle driving apparatus, the angle driving are installed between the mechanical arm and the bracket
Device is installed on the mechanical arm or bracket, and the angle driving apparatus drives the mechanical arm to adjust the angle.
Based on above-mentioned design, the horizontal displacement mechanism includes X displacement plate and Y displacement plate, and the X displacement plate and Y are displaced
The stacked connection of plate, wherein the displacement plate for being located at bottom side is connect with the rotating mechanism, wherein the displacement plate top surface for being located at upside is
The fixed position of the sample；The X displacement plate or Y displacement plate include: connecting plate, power device and guide rail, the power dress
It sets and guide rail is between the connecting plate and lower member, the power device drives the connecting plate opposite along the guide rail
X or Y-direction displacement are carried out in lower member, the two dimensional motion of objective table can compensate the visual field by Multiple-Scan, realize to big
The scanning of pattern sheet, being fixed on objective table sample position adjustment can be in control terminal simple realization.
Based on above-mentioned design, the rotating mechanism includes annular swivel base, power device and guide rail, the power device and is led
Rail is located between the annular swivel base and the carrier, and the guide rail guiding annular relatively described carrier of swivel base carries out
It rotates coaxially, the power device driving annular swivel base rotation, the horizontal displacement mechanism is installed on the annular swivel base
On.
Based on above-mentioned design, the rotation axis axial line of the mechanical arm passes through the fixed position of the sample.
Based on above-mentioned design, the machinery arm configuration is rectangular hollow structure arm or the U-shaped structure arm configuration that fell, described
First mounting base and the second mounting base are equipped with sliding rail, and the detector and the x-ray source pass through the sliding rail respectively to be slided
It is installed on first mounting base and the second mounting base dynamicly, high-resolution may be implemented so as to change scanning amplification ratio
Under microscopic scanning, can also realize the whole scan of low resolution.
Based on above-mentioned design, the carrier is overall U-shaped, with consolidating for horizontal mounting surface, middle part annular table and both ends
Fixed arm, the annular table are hollow structure, are located in the middle part of the mounting surface, have at the top of the fixed arm and connect with the bracket
Connecting shaft, the connecting shaft is overlapped with the pivotal axis axial line of the mechanical arm.
Based on above-mentioned design, the internal stent forms an operating space, and the carrier is located at the operating space, institute
Mechanical arm at least one end is stated to adjust in the operating space；The bracket is provided with the first fulcrum in the operating space two sides
And second fulcrum；The carrier both ends are respectively positioned in first fulcrum, the second fulcrum；The pivotal axis of the mechanical arm with
First fulcrum and the second fulcrum wherein at least one fulcrum are overlapped.
The present invention also provides a kind of scan methods of aforementioned scanning means, comprising the following steps:
Sample is placed on the objective table；
Adjust the angle φ of the mechanical arm with respect to the horizontal plane；
According to sample resolution demand, amplification ratio is adjusted, that is, adjusts x-ray source sample opposite with the detector
There is the case where particular/special requirement in position to scanning cone-beam cone angle or count level, can further or push away the remote detector and the X is penetrated
Line source；
Scan sample emphasis is moved to the luggage carrier center by objective table fine tuning；
When starting scanning, the objective table drives sample to carry out spinning motion and/or the mechanical arm drive x-ray source
It turns an angle with the detector, acquires the data for projection that the detector obtains；
Data for projection is rebuild to obtain the faultage image of object using corresponding algorithm using computer.
In conclusion the present invention provides a kind of scanning means based on Computed tomography CL system, it is effective to obtain
It solves scanning of the computer assisted tomography technology to plate sample, i.e., completes projection data acquisitions under the conditions of non-coaxial, from
And rebuild plate sample faultage image；Three-dimension layer can not be carried out to plate sample by solving the coaxial scanning mode that conventional CT is used
The problem of analysis scanning, completes to rebuild the quality information of tabular component and spatial structural form under micrometer resolution；Furthermore originally
Invention has stronger adaptability for new scanning mode following under CL scanning mode, and the condition of scanning for adjusting includes amplification
Than scanning angle, sample position etc., system is more flexible and changeable.
Detailed description of the invention
Fig. 1 is prior art computer Tomography CL system structure diagram.
Fig. 2 is Computed tomography CL system structure composition schematic diagram of the present invention.
Fig. 3 is Computed tomography CL system unit correspondence diagram of the present invention.
Fig. 4 is the simple space schematic diagram of Computed tomography CL system of the present invention.
Fig. 5 is Computed tomography CL system structure diagram of the present invention.
Specific embodiment
The exemplary embodiments for embodying feature of present invention and advantage will describe in detail in the following description.It should be understood that this
Invention can have various variations in different embodiments, neither depart from the scope of the present invention, and it is therein explanation and
Diagram inherently is illustrated as being used, rather than to limit the present invention.
Referring to shown in Fig. 2, Fig. 3: the scanning means of CL system provided in an embodiment of the present invention includes at least a bracket 1
(being not shown in Fig. 2), the 4, carriers 5 of the detector of x-ray source 3, one of mechanical arm 2, one and an objective table 6.
Mechanical arm 2 has the first mounting base of bottom and the second mounting base of upper end, and mechanical arm 2 is rotatably installed on branch
Frame 1, the first mounting base and the second mounting base are located at the two sides in mechanical arm pivot joint axle center；X-ray source 3 is installed on mechanical arm 2
First mounting base of bottom end, is fixed on track by sliding block, and x-ray source 3 can emit upwards x-ray along mechanical arm 2.In ray
6 rotation center of heart beacon alignment objective table, x-ray source 3, can be on sliding blocks along 2 length direction of mechanical arm in order to adjust amplification ratio
It slides up and down.
Detector 4 is installed on the second mounting base of upper end of mechanical arm 2, and detector 4 is aligned with x-ray source 3；Detector 4 is logical
It crosses sliding block and sliding rail is fixed on the second mounting base, sliding rail is installed along 2 length direction of mechanical arm, and detector 4 can be slided along sliding rail, x
Ray center beam passes through 6 center alignment detector of objective table, 4 center, central beam and vertical, the sliding block of detector 4 plane holding
Drive detector that projected resolution is adjusted.In scanning process as shown in Figure 3, guarantee x-ray source 3- objective table 6 in scanning process
4 sight alignment of center-detector.
Carrier 5 is fixedly installed on bracket 1, is a hollow turntable in the middle part of carrier 5, and objective table 6 is installed on carrying
It is mountable between carrier 5 and objective table 6 to have a rotating mechanism on frame 5, with rotating mechanism driving objective table 6 in carrier 5
The rotation of heart vertical line makes sample with itself normal axis autobiography, realizes the purpose projected needed for scanning.There is sample on objective table 6
This fixation position, objective table 6 can drive sample to move on two-dimensional surface, move partially into what is most paid close attention in sample in the visual field
The heart, carrier 5 and objective table 6 are located between the first mounting base and the second mounting base of mechanical arm 2.
Relative to bracket, mechanical arm be can be located in multiple angles；And x-ray source and detector and carrier are kept pair
Together.So the high resolution scanning to large-scale sample can be achieved in cooperation.
Now establish and sketch the system scanning means scanning theory such as the space Fig. 4: the cone-beam emitted by x-ray source 3 relative to
Sample keeps certain angle oblique incidence；X-ray source 3 is all remain stationary in detector 4, and sample is revolved by shaft of its centre normal
Turn, rotates in a circumferential direction and be scanned.It is obtainable perpendicular to component direction and being parallel to component side to scan the data for projection formed
To quality information, projection information achievable digital faultage image for constructing scanned region after undergoing reconstruction.
The standard scan process of this system is as follows:
1. according to angle needed for scanning, adjusting mechanical arm 2 is horizontal by angle φ, since objective table 6 keeps horizontal,
It can thus guarantee that ray and sample angle are φ when scanning；
2. adjusting amplification ratio according to sample resolution demand, i.e. x-ray source 3 moves under sliding block drive with detector 4
At the position of corresponding proportion, there is the case where particular/special requirement to scanning cone-beam cone angle or count level, it can be in corresponding amplification ratio item
Far detector 4 and x-ray source 3 are furthered or pushed away under part；
3；Scan sample emphasis is finely tuned to the hollow turntable center for being moved to luggage carrier 5 by objective table 6；When starting scanning
The sample that rotating mechanism is carried with dynamic object stage 6 is carried out using sample normal as the spinning motion of center line, degree is adopted from 0 degree to 360
Data for projection needed for collection is rebuild to obtain the tomograph of object to data for projection using computer using reasonable algorithm
Picture.
Below in conjunction with attached drawing, to present invention specific embodiment shown in fig. 5, detailed description are as follows:
As shown in figure 5, forming an operating space 11 in embodiment inside bracket 1, the bottom end of mechanical arm 2 can be in operating space
It is rotated in 11, the two sides of operating space 11 are respectively the first support riser 12 and the second support riser 13, and bottom is that a support is horizontal
Plate 14；The both ends of transverse slat 14 are supported to be connected respectively with the bottom end of the first support riser 12 and the second support riser 13, bracket 1 is whole
Body structure is the structure of a U-like shape.The top of first support riser 12 and the second support riser 13 is respectively formed one first
Point 121 and one second fulcrum 131, and the first fulcrum 121 and fulcrum 131 are located at the two sides of operating space 11, in order to
Support carrying frame 5,1 purposes of bracket is mainly supporting role.The specific form of bracket 1 is for illustration purposes only, is not intended to be limited to this
Planform.
Mechanical arm 2 is rotatably installed on the first fulcrum 121 with bracket 1；Preferably pacify between mechanical arm 2 and bracket 1
Equipped with angle driving apparatus 21, angle driving apparatus 21 is installed on mechanical arm 2 or bracket 1, and angle driving apparatus 21 can drive
Mechanical arm 2 adjusts the angle, and angle driving apparatus 21 provides accurate drive control by servo motor in the present embodiment, can pass through gear
Or transmission belt drives mechanical arm 2 to rotate, or by servo motor directly with mechanical arm 2 is coaxial is connected.It is of course also possible to not use
The angle driving apparatus 21 that servo motor drives, for example increase by 2 positioning device of a mechanical arm (such as gear type braking mechanism), only
The angle that mechanical arm 2 can be selectively fixed on to needs is wanted, can for example drive 2 turns of mechanical arm in a manual fashion
The angle for moving needs, is then fixed by positioning device, can also be simply implemented.2 structure of mechanical arm can be rectangular hollow structure
Arm or the U-shaped structure arm configuration to fall, middle part are left a blank, to prevent that movement interference, mechanical arm 2 occurs with carrier 5 and objective table 6
First mounting base 22 of U-shaped frame body and bottom end in having and the second mounting base 23 of a upper end, three parts are solderable to be formed, material
Matter can be the good metal material of rigidity, such as high-carbon steel, aluminum titanium alloy (lightweight can also be energy saving, reduces error caused by abrasion).
The two mounting bases can be triangular frame structure, the installing arm with one along 2 length direction of mechanical arm, in the peace as shown in the figure
It fills on arm for installation sliding rail.First mounting base 22 and the second mounting base 23 are located at the two sides in the pivot joint axle center of mechanical arm 2,
First mounting base 22 and the second mounting base 23 are respectively provided with the first guide rail 221 and the second guide rail 231；Detector 4 is with rear portion body
It is slidably installed on the first guide rail 221, x-ray source 3 is slidably installed on the second guide rail 231 by a radiographic source frame
On, and detecting 4 with x-ray source is always aligned condition.
As shown in Fig. 2 to 5, carrier 5 is fixedly installed on bracket 1, and carrier 5 is overall U-shaped, has horizontal mounting surface
51, the fixed arm 53 upwardly extended positioned at the annular table 52 (namely hollow turntable) at middle 51 middle part of horizontal mounting surface and both ends,
Annular table 52 is hollow structure, has the connecting shaft 54 connecting with bracket, the pivot of connecting shaft 54 and mechanical arm 2 at the top of fixed arm 53
Rotating shaft core line is overlapped, and one of connecting shaft 54 and the drive-connecting shaft of mechanical arm 2 can be sleeve axle construction, is connected by bearing
In this side connecting shaft 54, it can be also fixed on the first fulcrum 121 with the drive-connecting shaft that other connection types pass through mechanical arm 2.
Annular table 52 includes annular swivel base 521, power device 522 and guide rail, and power device 522 and guide rail are located at annular and turn
Between seat 521 and carrier 5, guide rail guides the opposite carrier 5 of annular swivel base 521 and is rotated coaxially, and power device 522 drives
Annular swivel base 521 rotates, and power device 522 includes but is not limited to motor, motor etc..And objective table 6 is fixed on annular swivel base 521
On, so that the objective table 6 can be driven and rotation by annular swivel base 521.
As shown in Fig. 2 to 5, objective table 6 is installed on carrier 5, has replaceable support board 61, loading on objective table 6
Plate matter is that can be replaced poly (methyl methacrylate) plate for the sample for differentiating more demanding to the lesser carbon fiber board of X-ray absorption；It carries
Object plate 61 is aligned horizontal plane and the rotation axis axial line of above-mentioned mechanical arm 2 passes through 61 place horizontal plane of support board；Carrier 5 and load
Object platform 6 is located between the first mounting base 22 of mechanical arm 2 and the second mounting base 23.
Objective table 6 include X displacement plate 62 and Y displacement plate 63, X displacement plate be arranged between annular swivel base 521 be equipped with it is dynamic
Power device 64 and guide rail 65, X displacement plate 62 carry out X-direction displacement along annular swivel base 521 by power device 64 and guide rail 65.Y
The upper surface of displacement plate 63 is the fixed position 61 of sample, and Y displacement plate 63 is installed power device 64 and led between X displacement plate 62
Rail 65, Y displacement plate 63 carry out Y-direction displacement along X displacement plate 62 by power device 64 and guide rail 65；The present embodiment power device
64 be screw rod and driving motor, and power device 64 can also be hydraulic cylinder or motor-driven gear and rack teeth mechanism etc..
The scanning means of this system can also implement other scanning imageries other than completing classical CL scanning mode
Mode.Such as: in the case where objective table does not rotate, mechanical arm turns over certain angle with the variation of the angle φ after beginning acquired projections data
The projected image scanned after degree just can obtain object tomographic imaging result according to corresponding feasible algorithm for reconstructing；
Or in the case where the angle φ moves back and forth variation in a certain range, turntable keeps obtaining scanning throwing in the case of rotation
Shadow image obtains the faultage image of object using corresponding reconstruction according to the angle φ variation track；
In the case where turntable does not rotate, mechanical arm week more than the 0-360 degree rotates the scanning shape that traditional CT can be achieved
Formula；
Larger and visual field deficiency the situation for resolution ratio needed for sample, can by sample according under required level of resolution, depending on
Wild size be divided into it is multiple in close proximity to and have fraction be overlapped piecemeal, for each piecemeal carry out mode standard scanning, then
The projection result scanned using in the case of the big visual field of low resolution will be rebuild gained tomographic map and be spliced into according to piecemeal as reference
Complete sample image.
The scanning means design of this CL system has following improvement compared with traditional technology:
1. objective table is horizontal positioned, sample is without fixing under gravity, and sample position adjustment can be simple in control terminal
It realizes；
2. guaranteeing x-ray-objective table center-detector sight alignment, system by mechanical arm rigidity and Mechanical Reliability
It sets up and scans and do not need to correct before starting；
3. objective table is able to achieve two dimensional motion, the visual field can be compensated by Multiple-Scan, realize the scanning to large-scale sample；
4.x radiographic source and detector can freely adjust position, and so as to change scanning amplification ratio, height may be implemented
Microscopic scanning under resolution ratio, can also realize the whole scan of low resolution；
5. this system scanning flexible form is changeable, can be simply implemented by the swing of turntable, objective table and mechanical arm
Various complicated scannings require, and leave many to the scanning mode that do not practiced and probe into space.
Although exemplary embodiment describes the present invention with reference to several, it is to be understood that, term used is explanation and shows
Example property, term and not restrictive.The spirit or reality that can be embodied in a variety of forms due to the present invention without departing from invention
Matter, it should therefore be appreciated that above-described embodiment is not limited to any of the foregoing details, and the spirit defined by appended claims
It all should be accompanying power with the whole change and modification widely explained, therefore fallen into claim or its equivalent scope in range
Benefit requires to be covered.
Claims (8)
1. a kind of scanning means of CL system, the scanning means include: bracket, mechanical arm, x-ray source, detector, carrier
And objective table；It is characterized in that,
First mounting base of mechanical arm and the second mounting base, the mechanical arm are rotatably installed on the bracket, and described
One mounting base and the second mounting base are located at the two sides in mechanical arm pivot joint axle center；
The x-ray source is installed on the first mounting base of the mechanical arm, and the detector is installed on the second of the mechanical arm
Mounting base, the detector are aligned with the x-ray source；
The carrier is fixedly installed on the bracket, and the objective table is installed on the carrier, on the objective table
Position is fixed with sample, the carrier and the objective table are mounted on the first mounting base and second of the mechanical arm
Between mounting base；
Relative to the bracket, the mechanical arm be can be located in multiple angles；And it the x-ray source and the detector and holds
Carrier keeps alignment,
One rotating mechanism is installed, the rotating mechanism drives the objective table around institute between the carrier and the objective table
State the rotation of carrier center vertical line；The objective table has horizontal displacement mechanism,
The rotating mechanism includes annular swivel base, power device and guide rail, and the power device and guide rail are located at the annular and turn
Between seat and the carrier, the guide rail guiding annular relatively described carrier of swivel base is rotated coaxially, described dynamic
The power device driving annular swivel base rotation, the horizontal displacement mechanism are installed on the annular swivel base,
Carrier includes horizontal mounting surface, be located in be horizontally mounted the annular table of Middle face and fixed arm that both ends upwardly extend,
Annular table is hollow structure, has the connecting shaft connecting with bracket, the pivotal axis axle center of connecting shaft and mechanical arm at the top of fixed arm
Line is overlapped, and the drive-connecting shaft of connecting shaft and mechanical arm is sleeve axle construction.
2. scanning means as described in claim 1, which is characterized in that have the installation of alignment horizontal plane on the carrier
Face, the objective table are installed on the mounting surface, and the fixed position of the sample on the objective table is also aligned horizontal plane.
3. scanning means as described in claim 1, which is characterized in that installed between the mechanical arm and the bracket angled
Driving device, the angle driving apparatus are installed on the mechanical arm or bracket, and the angle driving apparatus drives the machinery
Arm adjusts the angle.
4. scanning means as described in claim 1, which is characterized in that the horizontal displacement mechanism includes X displacement plate and Y displacement
The stacked connection of plate, the X displacement plate and Y displacement plate, wherein the displacement plate for being located at bottom side is connect with the rotating mechanism, wherein position
Displacement plate top surface in upside is the fixed position of the sample；The X displacement plate or Y displacement plate include: connecting plate, power dress
It sets and guide rail, the power device and guide rail are between the connecting plate and lower member, described in the power device driving
Connecting plate carries out X or Y-direction displacement relative to lower member along the guide rail.
5. scanning means as described in claim 1, which is characterized in that the rotation axis axial line of the mechanical arm passes through the sample
This fixation position.
6. scanning means as described in claim 1, which is characterized in that the machinery arm configuration is rectangular hollow structure arm or puts
U-shaped structure arm configuration, first mounting base and the second mounting base are equipped with sliding rail, the detector and the X-ray
Source is slidably mounted on first mounting base and the second mounting base by the sliding rail respectively.
7. such as scanning means as claimed in any one of claims 1 to 6, which is characterized in that it is empty that the internal stent forms an operation
Between, the carrier is located at the operating space, and the mechanical arm at least one end adjusts in the operating space；The bracket
The operating space two sides are provided with the first fulcrum and the second fulcrum；The carrier both ends are respectively positioned in described first
Point, the second fulcrum；The pivotal axis of the mechanical arm is overlapped with first fulcrum and the second fulcrum wherein at least one fulcrum.
8. a kind of scan method of the scanning means as described in any one of claim 1 to 7 comprising step:
Sample is placed on the objective table；
Adjust the angle φ of the mechanical arm with respect to the horizontal plane；
According to sample resolution demand, amplification ratio is adjusted, that is, adjusts the position of x-ray source sample opposite with the detector
It sets, has the case where particular/special requirement to scanning cone-beam cone angle or count level, can further or push away the remote detector and the X-ray
Source；
Scan sample emphasis is moved to the luggage carrier center by objective table fine tuning；
When starting scanning, the objective table drives sample to carry out spinning motion and/or the mechanical arm drive x-ray source and institute
It states detector to turn an angle, acquires the data for projection that the detector obtains；
Data for projection is rebuild to obtain the faultage image of object using corresponding algorithm using computer.
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| CN105954304A (en) * | 2016-06-08 | 2016-09-21 | 清华大学 | Flat component scanning rotary table and multi-mode industrial CT scanning working table |
| CN107436308B (en) * | 2017-09-15 | 2024-02-09 | 中国特种设备检测研究院 | CT (computed tomography) chromatographic scanning device for plate-shaped workpiece |
| CN107726994B (en) * | 2017-09-27 | 2023-06-20 | 深圳市易尚康瑞技术有限公司 | Three-dimensional scanning device |
| CN108593687B (en) * | 2018-04-27 | 2021-05-25 | 中国科学院高能物理研究所 | Rapid defect detection method based on three-dimensional tomography |
| CN109085190A (en) * | 2018-08-10 | 2018-12-25 | 首都师范大学 | A kind of X-ray three dimensional CT data scanning system and its scan method for plate object |
| CN110108734A (en) * | 2019-06-11 | 2019-08-09 | 丹东奥龙射线仪器集团有限公司 | Non-destructive testing X-ray original position on-line measuring device |
| CN113533339A (en) * | 2021-05-27 | 2021-10-22 | 重庆九源机械有限公司 | Multi-axis detection system |
| CN117630063A (en) * | 2023-12-05 | 2024-03-01 | 无锡日联科技股份有限公司 | Off-line type nano-scale open tube X-ray 3D detection equipment |
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