CN111935891B - Desktop type plasma ultrafast X-ray source - Google Patents

Desktop type plasma ultrafast X-ray source Download PDF

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Publication number
CN111935891B
CN111935891B CN202010798982.9A CN202010798982A CN111935891B CN 111935891 B CN111935891 B CN 111935891B CN 202010798982 A CN202010798982 A CN 202010798982A CN 111935891 B CN111935891 B CN 111935891B
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target
belt
cavity
shielding
accommodating cavity
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CN111935891A (en
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杨靖
游朋先
胡建波
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Institute of Fluid Physics of CAEP
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Institute of Fluid Physics of CAEP
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05GX-RAY TECHNIQUE
    • H05G2/00Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001X-ray radiation generated from plasma
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E30/00Energy generation of nuclear origin
    • Y02E30/10Nuclear fusion reactors

Abstract

The invention discloses a desktop plasma ultrafast X-ray source which comprises a vacuum cavity, a reaction cavity, a target belt, a shielding belt, an X-ray CCD (charge coupled device), a target belt transmission system, a shielding belt transmission system and an external light path system, wherein the reaction cavity is positioned in the vacuum cavity, the left side wall and the right side wall of the reaction cavity are respectively provided with two vertically-arranged shielding belt strip-shaped through seams and one vertically-arranged target belt strip-shaped through seam, the target belt penetrates through the two target belt strip-shaped through seams on the reaction cavity and is driven to move by the target belt transmission system, the number of the shielding belts is two, the two shielding belts respectively penetrate through the two shielding belt strip-shaped through seams on the rear side of the reaction cavity and the two shielding belt strip-shaped through seams on the front side of the reaction cavity, and the shielding belt transmission system drives the shielding belts to move. The side wall of the vacuum cavity is provided with an optical window positioned at the front side of the reaction cavity and an X-ray window positioned at the rear side of the reaction cavity. When the method is applied, the photon yield is sufficient, the data acquisition period is short, the reliability of experimental data can be ensured, and the performance parameters and the stability of equipment can be greatly improved.

Description

Desktop type plasma ultrafast X-ray source
Technical Field
The invention relates to the field of ultrafast lattice kinetic detection, in particular to a desktop type plasma ultrafast X-ray source.
Background
At present, ultrafast X-rays are mainly applied to the field of ultrafast phenomenon detection, such as ultrafast X-ray diffraction, ultrafast X-ray absorption technology and the like. Short pulse X-ray is used as an important ultrafast detection beam, and a large-scale X-ray short source represented by an advanced three-generation synchrotron radiation source and an X-ray free electron laser has great influence on the development of scientific technology due to the excellent performance and high power of the short pulse X-ray short source. However, the existing X-ray short source is expensive in cost and large in size, and is difficult to popularize small and medium-sized research laboratories to hospitals and other application scenes.
The development of new ultra-short X-ray sources with small size, low cost and excellent performance is receiving more and more attention from people. How to reduce the volume of an ultra-short X-ray source, avoid the shortage of photon yield and the overlong data acquisition period, and ensure the reliability of experimental data becomes a problem generally concerned by people at present, however, no corresponding equipment is provided at present, and no relevant introduction is provided.
Disclosure of Invention
The invention aims to solve the problems of insufficient photon yield, overlong data acquisition period and reduced reliability of experimental data of plasma X-ray source equipment after the volume is reduced, and provides a desktop plasma ultrafast X-ray source which is simple in structure, convenient to implement, low in cost, small in volume, sufficient in photon yield and short in data acquisition period, can ensure the reliability of experimental data, and can greatly improve performance parameters and stability of the equipment.
The purpose of the invention is mainly realized by the following technical scheme:
desktop plasma ultrafast X ray source, including vacuum cavity, reaction chamber, target area, shielding area, X ray CCD, target area transmission system, shielding area transmission system and outside light path system, the reaction chamber is located the vacuum cavity, and the left and right lateral walls of reaction chamber all constitute two shielding area bar-shaped overseams and a vertically arranged target area bar-shaped overseam that set up vertically, and two shielding area bar-shaped overseams that are located on the same lateral wall of reaction chamber are distributed on the both sides of target area bar-shaped overseam on this lateral wall and are close to the both sides end position around this lateral wall respectively, the target area passes two target area bar-shaped overseams on the reaction chamber and is shifted from one side of reaction chamber to the other side by target area transmission system drive it, the quantity of shielding area is two, and a shielding area passes two shielding area bar-shaped overseams that are close to the reaction chamber rear side, and another shielding area passes two shielding area bar-shaped overseams that are close to the reaction chamber front side, the number of the shielding belt transmission systems is two, and each shielding belt transmission system correspondingly drives one shielding belt to move from one side of the reaction cavity to the other side;
an optical window positioned on the front side of the reaction cavity and an X-ray window positioned on the rear side of the reaction cavity are arranged on the side wall of the cavity of the vacuum cavity, the X-ray window is positioned right behind the optical window, an opening which is right opposite to the optical window is arranged on the front side wall of the reaction cavity, an opening which is right opposite to the X-ray window is arranged on the rear side wall of the reaction cavity, and the two shielding belts respectively penetrate through the cavity inner area which is right opposite to the openings on the front side wall and the rear side wall of the reaction cavity;
the external optical path system comprises a femtosecond laser, a beam splitter, a pumping delay optical path and a targeting optical path, wherein the femtosecond laser is used for generating a main laser beam, the beam splitter is used for distributing laser energy generated by the femtosecond laser into a pumping beam and a targeting beam, the pumping delay optical path is used for acting the pumping beam on a sample after time delay, the targeting optical path is used for controlling the targeting beam to act with a target band after passing through an optical window to generate X rays, the X rays pass through an X ray window and then act on the sample, and the pumping beam and the X rays act on the same position of the sample; the X-ray CCD is used for scanning and collecting pumping detection data of the sample. The invention collects the fragments splashed in the process of targeting by the laser focus before and after the targeting by the shielding belt, thereby avoiding polluting the optical window and the X-ray window. The invention changes lattice parameters through laser pumping, detects the parameters of the lattice by X-ray, and records diffraction patterns by X-ray CCD. The invention belongs to the field of ultrafast structure dynamics, is applied based on a femtosecond laser, and under a low vacuum environment, focused laser and a target zone act to generate ultrashort X rays with 50-200 fs pulse width, and the ultrashort X rays and homologous delayed pump light can form a time delay system, so that a scientific experiment based on a pump-detection technology can be completed.
Furthermore, the target belt transmission system comprises a first servo motor, a first encoder, a target belt driving disc and a target belt driven disc, the target belt driving disc and the target belt driven disc are both arranged in the vacuum cavity and are respectively positioned on the left side and the right side of the reaction cavity, two ends of the target belt are respectively fixed on the target belt driving disc and the target belt driven disc, the target belt is wound on the target belt driving disc and/or the target belt driven disc, the first encoder is arranged outside the vacuum cavity and is used for monitoring the angular speed of the target belt driven disc and whether the target belt runs normally, and the first servo motor is arranged outside the vacuum cavity and is used for driving the target belt driving disc to rotate;
the shielding belt transmission system comprises a second servo motor, a second encoder, a shielding belt driving disc and a shielding belt driven disc, the shielding belt driving disc and the shielding belt driven disc are both arranged in a vacuum cavity and are respectively positioned on the left side and the right side of the reaction cavity, the two ends of the shielding belt are respectively fixed on the shielding belt driving disc and the shielding belt driven disc, and the shielding belt is wound on the shielding belt driving disc and/or the shielding belt driven disc, the second encoder is arranged in the vacuum cavity and is used for monitoring the angular speed of the shielding belt driven disc and whether the shielding belt operates normally, and the second servo motor is arranged in the vacuum cavity and is used for driving the shielding belt driving disc to rotate.
Furthermore, the first encoder, the target belt driven disc, the first servo motor, the target belt driving disc, the second encoder, the shielding belt driven disc and the shielding belt driving disc are connected through a transmission mechanism, the transmission mechanism comprises a magnetic fluid sealing bearing fixed at the bottom of the vacuum cavity, a positioning bearing arranged in the vacuum cavity and the lower end of the positioning bearing is connected with the magnetic fluid sealing bearing, and a coupler arranged outside the vacuum cavity and one end of the coupler is connected with the magnetic fluid sealing bearing, the target belt driving disc, the target belt driven disc, the shielding belt driving disc and the shielding belt driven disc respectively comprise a hollow rotating shaft and an upper disc body and a lower disc body which are sleeved on the hollow rotating shaft, the area between the upper disc body and the lower disc body is a belt winding area, the upper end of the positioning bearing is embedded into the hollow rotating shaft from the lower end of the middle idle rotating shaft, and is fixedly connected with two disc bodies sleeved on the hollow rotating shaft; the target belt driving disc and the shielding belt driving disc are linked through a coupler, the other end of the coupler, which is relatively connected with the magnetic fluid sealing bearing end, is connected with an output shaft of the servo motor, and the target belt driven disc and the shielding belt driven disc are linked through a coupler, which is relatively connected with the magnetic fluid sealing bearing end, and are connected with the encoder.
The desktop plasma ultrafast X-ray source further comprises a central control system, a laser displacement sensor which is arranged right opposite to the target belt driving disc is arranged in the vacuum cavity, an aviation plug connected with the laser displacement sensor is arranged on the side wall of the vacuum cavity, the first servo motor is connected with a first controller, the second servo motor is connected with a second controller, and the aviation plug, the first controller and the second controller are all connected with the central control system; wherein:
the laser displacement sensor is used for measuring the radius value of the active winding area of the target belt in real time and transmitting the measured real-time data to the central control system through the aviation plug;
the central control system is used for receiving the real-time radius value measured by the laser displacement sensor, converting the real-time radius value into a first servo motor real-time angular velocity by combining the set target belt linear velocity, sending the real-time angular velocity to the first controller in a pulse signal mode, and controlling the first servo motor angular velocity in unit time to enable the target belt to always keep the linear velocity set by a user in the running process; the servo motor is also used for generating a pulse signal according to artificial control and sending the pulse signal to a second controller to regulate and control the angular speed of a second servo motor in unit time;
the first controller and the second controller are used for receiving pulse signals generated by the central control system so as to adjust the angular speed of the servo motor in real time. Compared with the traditional stepping motor, the servo motor can reduce the defects of step loss, small torque and the like of the stepping motor, and further improves the reliability of a target belt and shielding belt transmission and regulation system.
Further, the desktop type plasma ultrafast X-ray source also comprises target belt winding columns, wherein four target belt winding columns are arranged in the reaction cavity, two target belt winding columns are distributed on the left side and the right side of the reaction cavity and are respectively opposite to two target belt strip-shaped overlines, the other two target belt winding columns are distributed on two sides of the inner area of the reaction cavity opposite to the front opening and the rear opening of the reaction cavity and are close to the area opposite to the opening, a strip-shaped hole which is longitudinally and horizontally arranged is formed at the bottom of the reaction cavity, the strip-shaped hole is positioned on one side of the front side wall and the rear side wall of the reaction cavity opposite to the opening and is close to the area opposite to the opening, the central area of the strip-shaped hole is positioned under the area in the reaction cavity opposite to the target belt strip-shaped overlines, one target belt winding column which is close to the area opposite to the opening is arranged in the strip-shaped overline hole, the other target belt winding column which is close to the area opposite to the opening is arranged on the other side of the area opposite to the opening and is close to the rear side of the reaction cavity, the rear side of the target tape winding column is flush with the rear end of the strip-shaped hole, and the length of the strip-shaped hole is larger than the distance between the central axis of the target tape winding column and the central axis of the strip-shaped hole; one section of the target zone positioned in the reaction cavity sequentially passes through the four target zone winding columns in the reaction cavity, and the included angle between the section of the target zone acted by the laser incident from the optical window and the laser incident from the optical window is 45-90 degrees. According to the invention, the strip-shaped holes are arranged, so that the winding column of the target band at the target shooting position can be adjusted back and forth, and the adjustable range of the laser incidence angle of the target band is conveniently controlled within 45-90 degrees, so that the unirradiation of X-rays is optimized and the photon yield of the X-rays is improved.
Furthermore, the vacuum cavity comprises a reaction cavity accommodating cavity, and a passive disk accommodating cavity and an active disk accommodating cavity which are distributed on the left side and the right side of the reaction cavity accommodating cavity, the active disk accommodating cavity, the passive disk accommodating cavity and the reaction cavity accommodating cavity are rectangular, the active disk accommodating cavity is communicated with the passive disk accommodating cavity, the lengths of the two ends of the reaction cavity accommodating cavity, which are connected with the active disk accommodating cavity and the passive disk accommodating cavity, are smaller than the length of the active disk accommodating cavity and the length of the passive disk accommodating cavity, and the rear sides of the active disk accommodating cavity, the passive disk accommodating cavity and the reaction cavity accommodating cavity are flush; the target belt driving disc and the two shielding belt driving discs are arranged in the driving disc accommodating cavity, the three discs are sequentially arranged from back to front, the target belt driving disc is close to the rear side of the driving disc accommodating cavity, the target belt driven disc and the two shielding belt driven discs are arranged in the driven disc accommodating cavity, the three discs are sequentially arranged from back to front, the target belt driven disc is close to the rear side of the driving disc accommodating cavity, and the reaction cavity is arranged in the reaction cavity accommodating cavity;
two target belt winding posts which are respectively positioned at the left side and the right side of the reaction cavity and are respectively arranged over the two target belt strips on the reaction cavity are arranged in the reaction cavity accommodating cavity, a target belt winding post is arranged at the oblique rear side of the target belt driving disk facing the reaction cavity accommodating cavity in the driving disk accommodating cavity, and a target belt winding post is arranged at the oblique rear side of the target belt driven disk facing the reaction cavity accommodating cavity in the driven disk accommodating cavity; the target tape sequentially bypasses a target tape winding post in the active disc accommodating cavity, a target tape winding post in the reaction cavity accommodating cavity which is positioned at the same side of the reaction cavity as the active disc accommodating cavity, a target tape winding post in the reaction cavity accommodating cavity which is positioned at the same side of the reaction cavity as the passive disc accommodating cavity, and a target tape winding post in the passive disc accommodating cavity;
shielding belt winding columns are arranged in the driving disc accommodating cavity and the driven disc accommodating cavity, a shielding belt winding column is arranged at the corner close to the right rear side, at the right rear side of the rear shielding belt driving disc, at the corner close to the right front side of the reaction chamber accommodating cavity and at the left rear side of the front shielding belt driving disc in the driving disc accommodating cavity, and a shielding belt winding column is arranged at the corner close to the left rear side, at the corner close to the left front side of the reaction chamber accommodating cavity, at the right rear side of the front shielding belt driven disc and at the left rear side of the rear shielding belt driven disc in the driven disc accommodating cavity; one end of a shielding belt which penetrates through the two shielding belt strip-shaped overlines at the rear side of the reaction cavity is fixed on a shielding belt driving disc positioned at the rear side in a driving disc accommodating cavity, and the other end of the shielding belt which penetrates through the two shielding belt strip-shaped overlines at the right rear side of the rear side shielding belt driving disc sequentially bypasses a shielding belt winding post at the right rear side in the rear side shielding belt driving disc, bypasses a shielding belt winding post at a corner close to the left rear side in the driving disc accommodating cavity, penetrates through the two shielding belt strip-shaped overlines at the rear side of the reaction cavity, bypasses a shielding belt winding post at a corner close to the left rear side in the driven disc accommodating cavity of the rear side shielding belt, and is fixed on a rear side shielding belt driven disc; one end of a shielding belt which penetrates through the two shielding belt strip-shaped gap at the front side of the reaction cavity is fixed on a shielding belt driving disc positioned at the front side in the driving disc accommodating cavity, the other end of the shielding belt which penetrates through the two shielding belt strip-shaped gap at the front side of the reaction cavity sequentially bypasses a shielding belt winding post at the left rear side of the shielding belt driving disc at the front side, bypasses a shielding belt winding post at the corner close to the right front side of the reaction cavity accommodating cavity, penetrates through the two shielding belt strip-shaped gap at the front side of the reaction cavity, bypasses the shielding belt winding post at the corner close to the left front side of the reaction cavity accommodating cavity, and is fixed on the front end shielding belt driven disc after the shielding belt winding post at the right rear side of the front side shielding belt driven disc.
Furthermore, the target belt winding post comprises a fixed target belt winding post and a rotary target belt winding post, the fixed target belt winding post and the shielding belt winding post respectively comprise a vertically arranged winding post body and an upper limiting ring and a lower limiting ring which are sleeved on the winding post body, and the area between the upper limiting ring and the lower limiting ring is a winding area; the rotary type target area winding post includes two upper and lower spacing rings, the lower winding post body of vertical setting and be fixed in the miniature bearing of winding post body upper end down on the last winding post body is located to the cover of vertical setting, go up in winding post body lower extreme embedding miniature bearing. The target belt winding post comprises a fixed target belt winding post and a rotary target belt winding post, wherein static friction force is generated between a target belt and the fixed target belt winding post when the target belt moves, and rolling friction force is generated between the target belt and the rotary target belt winding post. When the invention is applied, the rotating angular speed of the target belt driving disc can be regulated and controlled in real time, so that the high-precision constant of the linear speed in the running process is realized.
Furthermore, the optical window is made OF white gem or OF-grade fused quartz glass, and an antireflection film is evaporated on the surface OF the optical window; the X-ray window material adopts beryllium, aluminum film or diamond sheet, and the rear side of the X-ray window material is provided with a nickel sheet. The invention can effectively shield Cu K generated by the target strip through the nickel sheet arranged behind the X-ray window β The band X-ray improves the monochromaticity of the X-ray. The invention carries out film coating treatment on the optical window, can prevent the damage of a preceding stage optical element caused by the reflection of the optical window to incident light, and increases the transmittance of the window to laser with a specific wavelength. The invention can let more light energy pass through the antireflection film.
Furthermore, the pumping delay optical path comprises five reflectors and a lens, wherein the centers of the four reflectors are distributed at four vertex points of the same rectangle, the other reflector is positioned on an extension line of a central connecting line of two reflectors positioned on the same side in the four reflectors, three reflectors with centers positioned on the same straight line are all positioned in the extension direction of a pumping beam starting section distributed by the beam splitter, the other two reflectors are arranged on the one-dimensional electric translation table, included angles between the central axes of the five reflectors and the extension line of the pumping beam starting section distributed by the beam splitter are 45 degrees, and the central axes of two reflectors far away from the beam splitter in the four reflectors distributed at the four vertex points of the same rectangle are perpendicular to the central axes of the other three reflectors; the pump beam distributed by the beam splitter is reflected by four reflectors distributed at four vertexes of the same rectangle in sequence, then reflected by a fifth reflector and then passes through a lens to act on a sample;
the shooting light path comprises two reflectors and an off-axis parabolic mirror, wherein one reflector is arranged on a shooting beam initial section distributed by the beam splitter, an included angle between the axis of the reflector and the shooting beam initial section distributed by the beam splitter is 45 degrees, the other reflector is arranged on a shooting beam extension line reflected by the reflector, the axis of the other reflector is vertical to the axis of the reflector, and the off-axis parabolic mirror is arranged on a shooting beam extension line reflected by the reflector of the second reflected shooting beam, is used for reflecting the shooting beam, penetrating through the optical window and focusing on a target belt;
an X-ray focusing element for restraining X-rays is arranged on the rear side of the X-ray window and fixed on the six-dimensional electric translation table. The moving direction of the one-dimensional electric translation stage for mounting the reflecting mirrors is perpendicular to the central lines of the other three reflecting mirrors, and the optical path of the pumping light path can be adjusted through the movement of the translation stage, so that the time of the pumping laser reaching a sample is changed. When the X-ray focusing device is applied, X-rays are focused on a sample 29 by adjusting the six-dimensional electric translation stage, so that a focal point is superposed with a pumping light action area.
Furthermore, the reaction cavity is made of copper, the target belt is a copper belt, and the shielding belt is a Mylar film.
In summary, compared with the prior art, the invention has the following beneficial effects: .
(1) The invention adopts a new structure and layout, adopts a modular design, optimizes a mechanical system, enables quick replacement of vulnerable parts, can reduce the equipment maintenance cost and time, and greatly improves the stability and photon yield of the system.
(2) According to the invention, through designing the independent reaction chamber, the damage of parts such as bearings and the like caused by diffusion pollution of chips and dust in the target shooting process can be reduced, the contact between the target shooting position and a stainless steel material is eliminated, and the secondary radiation is obviously reduced.
(3) The invention can improve the smoothness of the target belt in the rotating process, solves the problem that the line speed is not constant in the rotating process of the target belt, and greatly improves the yield stability of the X-ray source.
(4) The invention can realize the large-range adjustment of the laser incidence angle and support the adjustment of the friction force by replacing a certain proportion of rotary winding posts through improving the target tape winding posts and providing an independent reaction cavity, so that different types of target tapes can be replaced by the system, the target tape can be kept to run at a constant linear speed for a long time, the large-range adjustment of the running linear speed is supported, the linear speed and the laser incidence angle can be adjusted by a user under different target-shooting laser energies, and the yield of an X-ray source is optimized to the maximum extent.
(5) The quick replaceable parts such as the optical window, the X-ray window, the reaction cavity and the like are designed quickly and interchangeably, so that the maintenance cost and time of the system are greatly reduced.
Drawings
The accompanying drawings, which are included to provide a further understanding of the embodiments of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the principles of the invention. In the drawings:
FIG. 1 is a schematic view of a vacuum chamber without a cover plate disposed thereon according to one embodiment of the present invention;
FIG. 2 is a schematic diagram of the arrangement of the components outside and inside the vacuum chamber of FIG. 1;
FIG. 3 is a schematic view of the inverted structure of FIG. 2;
FIG. 4 is an overall intraluminal view of a vacuum chamber in an exemplary embodiment of the invention;
FIG. 5 is a top plan view of the interior of a vacuum chamber in accordance with an embodiment of the present invention;
FIG. 6 is a diagram illustrating the distribution of the hole sites in the reaction chamber according to an embodiment of the present invention;
FIG. 7 is a schematic diagram of the structure of a drive disk of the shield tape and its associated drive mechanism in accordance with one embodiment of the present invention;
FIG. 8 is a schematic illustration of the construction of a driven disk of the shield tape and its associated drive mechanism in accordance with an embodiment of the present invention;
FIG. 9 is a schematic view of a target belt drive disk and its associated drive mechanism according to an embodiment of the present invention;
FIG. 10 is a schematic view of the construction of a target belt driven plate and its associated drive mechanism in accordance with one embodiment of the present invention;
FIG. 11 is a schematic diagram of the construction of a shield tape winding post and a stationary target tape winding post in accordance with an embodiment of the present invention;
FIG. 12 is a schematic diagram of a rotary target strip winding post according to one embodiment of the present invention.
The names corresponding to the reference numbers in the drawings are as follows: 1. a vacuum chamber, 2, a reaction chamber, 3, a target tape, 4, a shield tape, 5, an optical window, 6, an X-ray window, 7, a target tape driving disk, 8, a target tape driven disk, 9, a shield tape driving disk, 10, a shield tape driven disk, 11, a first servo motor, 12, a second servo motor, 13, a first encoder, 14, a second encoder, 15, a target tape winding column, 16, a shield tape winding column, 17, a KF25 vacuum flange interface, 18, a KF40 vacuum flange interface, 19, a laser displacement sensor, 20, an off-axis parabolic mirror, 21, a femtosecond laser, 22, an X-ray CCD, 23, a beam splitter, 24, a lens, 25, an X-ray focusing element, 26, a diaphragm, 27, a bread board, 28, a bottom board, 29, a sample, 30, a shield tape-shaped through-seam, 31, a target-shaped through seam, 32, a strip-shaped hole, 33, a sealed magnetic fluid bearing, 34, a coupler, 35. upper winding cylinder 36, lower winding cylinder 37 and miniature bearing.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail below with reference to examples and accompanying drawings, and the exemplary embodiments and descriptions thereof are only used for explaining the present invention and are not meant to limit the present invention.
Example (b):
as shown in fig. 1 to 12, the desktop plasma ultrafast X-ray source includes a vacuum chamber 1, a reaction chamber 2, a target belt 3, a shielding belt 4, an X-ray CCD22, a target belt transmission system, a shielding belt transmission system, and an external optical path system, wherein the reaction chamber 2 of the present embodiment is a copper reaction chamber, the target belt 3 is a copper belt, and the shielding belt 4 is a mylar film. The reaction cavity 2 is located in the vacuum cavity 1, the left side wall and the right side wall of the reaction cavity 2 are respectively provided with two vertically-arranged shielding belt strip-shaped passing seams 30 and a vertically-arranged target belt strip-shaped passing seam 31, the two shielding belt strip-shaped passing seams 30 on the same side wall of the reaction cavity 2 are distributed on two sides of the target belt strip-shaped passing seam 31 on the side wall and are respectively close to the front end part and the rear end part of the side wall, the target belt 3 penetrates through the two target belt strip-shaped passing seams 31 on the reaction cavity 2 and is driven by a target belt transmission system to move from one side of the reaction cavity 2 to the other side, the number of the shielding belts 4 is two in the embodiment, one shielding belt 4 penetrates through the two shielding belt strip-shaped passing seams 30 close to the rear side of the reaction cavity 2, the other shielding belt 4 penetrates through the two shielding belt strip-shaped passing seams 30 close to the front side of the reaction cavity 2, the number of the shielding belt transmission systems is two, and each shielding belt transmission system correspondingly drives one shielding belt 4 to move from one side of the reaction cavity 2 to the other side.
The cavity side wall of the vacuum cavity 1 of the embodiment is provided with an optical window 5 located at the front side of the reaction cavity 2 and an X-ray window 6 located at the rear side of the reaction cavity 2, wherein the X-ray window 6 is located right behind the optical window 5, the front side wall of the reaction cavity 2 is provided with an opening right facing the optical window 5, the rear side wall of the reaction cavity 2 is provided with an opening right facing the X-ray window 6, and the two shielding belts 4 respectively penetrate through the cavity inner area right facing the openings on the front side wall and the rear side wall of the reaction cavity 2. The external optical path system of the embodiment comprises a femtosecond laser 21, a beam splitter 23, a pumping delay optical path and a targeting optical path, wherein the femtosecond laser 21 is used for generating a main laser beam, the beam splitter 23 is used for distributing laser energy generated by the femtosecond laser 21 into a pumping beam and a targeting beam, the pumping delay optical path is used for delaying the time of the pumping beam and acting on a sample 29, the targeting optical path is used for controlling the targeting beam to act with a target band 3 after passing through an optical window 5 to generate an X-ray, the X-ray passes through an X-ray window 6 and acts on the sample 29, and the pumping beam and the X-ray act on the same position of the sample 29; the X-ray CCD22 is used for scan acquisition of pump detection data of the sample 29. The optical window 5 OF this embodiment is made OF a white gem or OF-grade fused quartz glass, and an antireflection film is evaporated on the surface OF the optical window, wherein the preferred type OF the OF-grade fused quartz glass is corning 7980; the X-ray window 6 of this example is made of beryllium, aluminum film or diamond sheet, and has a nickel sheet on its rear side. The thickness of the optical window of the embodiment is 0.8-1.2 mm, and the optical window and the vacuum cavity are sealed by adopting an O ring. The X-ray window of this example has a thickness of 0.127mm and a diameter of 30mm and is sealed in the same manner as the optical window. The target zone of this embodiment is the smooth surface, also can replace for the frosting to improve laser energy absorption efficiency and promote photon yield.
The femtosecond laser of the embodiment emits a main laser beam with the energy range of 6-10mj, the pulse width of 35fs and the wavelength of 800 nm. The beam splitter of the present embodiment uses a beam splitter with a beam splitting ratio of 1:9, which distributes laser energy, wherein 90% of the energy laser is used to interact with the target zone to generate X-rays, and 10% is used as a pump beam. In the test, in order to avoid the optical path jitter caused by external reasons, the optical path needs to be confirmed and optimized, the diaphragms 26 are arranged on the targeting optical path and the pumping delay optical path as required, and the optical path is roughly adjusted, so that the laser passes through the center position of each diaphragm 26 in the optical path. For keeping the optical path stable. After a time delay of the pump light, which accounts for 10% of the main laser energy, a time delay system between the femtosecond X-ray beam and the pump light is formed. In the embodiment, off-axis parabolic mirror is adopted to focus the target laser (90% energy) to radius of less than 10 μm, and the peak power density reaches 10 16 w/cm 2 The above.
The side wall of the vacuum chamber in this embodiment is made of austenitic 304 stainless steel, and a toughened glass cover is arranged on the side wallThe plate, bottom plate 28 is made of aluminum (7075). The vacuum cavity body opening comprises six bottom magnetic fluid sealing bearing mounting hole positions, a KF25 flange interface 17 and a KF40 vacuum flange interface 18 are arranged at the tail part, the cavity of the real cavity body is connected with an aviation plug and a mechanical pump through flanges, wherein the aviation plug preferably adopts fourteen-core aviation plugs for communication connection, and the mechanical pump is used for controlling the vacuum cavity body to keep vacuum. The vacuum cavity is sealed by adopting an O-ring seal, and when in specific application, the vacuum degree is less than 10 by mechanical pumping - 3 mbar, avoiding excessive consumption of laser energy. The size of the vacuum cavity body of the embodiment is 52.7 multiplied by 67.2cm, when the vacuum cavity body is specifically arranged, the bottom of the vacuum cavity body is connected with a bread board 27 of 70 multiplied by 70cm, a bread board fixed with the optical platform is further arranged below the bread board 27, the two bread boards are connected through six pillars, and the off-axis parabolic mirror of the target shooting optical path and the reflector of the second-time reflection target shooting beam can be fixed on the bread board which is oppositely positioned. The vacuum cavity is fixed on the optical platform through the two optical bread boards and the six middle supporting columns, so that the movement of the cavity caused by external factors is avoided, and the drift of the target shooting point is avoided. The size of the copper reaction chamber is 4.65 multiplied by 10.7cm, and the replaceable design is adopted, so that the secondary radiation is effectively inhibited, the diffusion of debris generated in the target shooting process is prevented, the service life of parts such as a bearing in a vacuum chamber is prolonged, and the chamber is convenient to clean.
The target belt transmission system of this embodiment includes a servo motor 11, a coder 13, target belt drive disk 7 and target belt driven disk 8 of this embodiment are all located in vacuum chamber 1 and are located the 2 left and right sides of reaction chamber respectively, 3 both ends in target belt are fixed in respectively on target belt drive disk 7 and target belt driven disk 8 and target belt 3 twines on target belt drive disk 7 and/or target belt driven disk 8, a coder 13 is located vacuum chamber 1 and is used for monitoring target belt driven disk 8 angular velocity size and target belt 3 and operates normally outward, a servo motor 11 is located vacuum chamber 1 and is used for driving target belt drive disk 7 to rotate outward.
The shielding belt transmission system of this embodiment includes second servo motor 12, second encoder 14, shielding belt drive plate 9 and shielding belt driven plate 10 are all located in vacuum chamber 1 and are located the 2 left and right sides of reaction chamber respectively, shielding belt 4 both ends are fixed in respectively on shielding belt drive plate 9 and shielding belt driven plate 10 and shielding belt 4 winding is on shielding belt drive plate 9 and/or shielding belt driven plate 10, second encoder 14 is located vacuum chamber 1 and is used for monitoring shielding belt driven plate 10 angular velocity size and shielding belt 4 and operates normally outward, second servo motor 12 is located vacuum chamber 1 and is used for driving shielding belt drive plate 9 to rotate outward.
In the embodiment, the first encoder 13 and the target tape driven disk 8, the first servo motor 11 and the target tape driving disk 7, the second encoder 14 and the shield tape driven disk 10, and the second servo motor 12 and the shield tape driving disk 9 are connected through a transmission mechanism. The transmission mechanism of the embodiment comprises a magnetic fluid sealing bearing 33 fixed at the bottom of the vacuum cavity 1, a positioning bearing arranged in the vacuum cavity 1 and having a lower end connected with the magnetic fluid sealing bearing 33, and a coupler 34 arranged outside the vacuum cavity 1 and having one end connected with the magnetic fluid sealing bearing 33, wherein each of the target tape driving disk 7, the target tape driven disk 8, the shield tape driving disk 9 and the shield tape driven disk 10 comprises a hollow rotating shaft and two upper and lower disk bodies sleeved on the hollow rotating shaft, a region between the upper and lower disk bodies is a tape winding region, and the upper end of the positioning bearing is embedded into the hollow rotating shaft from the lower end of the hollow rotating shaft and is fixedly connected with the hollow rotating shaft; the other end of the coupler 34 linked with the target belt driving disc 7 and the shielding belt driving disc 9 is connected with the output shaft of the servo motor relatively, and the other end of the coupler 34 linked with the target belt driven disc 8 and the shielding belt driven disc 10 is connected with the encoder relatively. In the embodiment, the disc bodies of the target belt driving disc 7, the target belt driven disc 8, the shielding belt driving disc 9 and the shielding belt driven disc 10 are fixedly connected with the corresponding positioning bearings through the base meter fastening, so that linkage is realized; the positioning bearing is fixedly connected with the corresponding magnetic fluid sealing bearing 33 through the base meter fastening, so that linkage is realized; the magnetic fluid sealing bearing 33 and the corresponding coupler 34 are fixedly connected through the base meter, so that linkage is realized.
The embodiment also comprises a central control system which is realized by adopting the existing computer, a laser displacement sensor which is right opposite to the target belt driving disc 7 is arranged in the vacuum cavity 1 of the embodiment, an aviation plug which is connected with the laser displacement sensor is arranged on the side wall of the vacuum cavity 1, the first servo motor 11 is connected with a first controller, the second servo motor 12 is connected with a second controller, and the aviation plug, the first controller and the second controller are all connected with the central control system; wherein: the laser displacement sensor is used for measuring the radius value of a tape winding area of the target tape driving disk 7 in real time and transmitting measured real-time data to the central control system through an aviation plug; the central control system is used for receiving the real-time radius value measured by the laser displacement sensor, converting the real-time radius value into a real-time angular velocity of the first servo motor 11 by combining the set linear velocity of the target belt 3, sending the real-time angular velocity to the first controller in a pulse signal mode, and regulating and controlling the angular velocity of the first servo motor 11 in unit time to enable the target belt 3 to always keep the linear velocity set by a user in the running process; the servo motor is also used for generating a pulse signal according to manual control and sending the pulse signal to a second controller to regulate and control the angular speed of the second servo motor 12 in unit time; the first controller and the second controller are used for receiving pulse signals generated by the central control system so as to adjust the angular speed of the servo motor in real time. The linear velocity of the target tape of the embodiment is adjusted within the range of 0.9cm/s to 6cm/s, and the linear velocity is always kept stable in the running process of the target tape. Wherein, the linear speed of the target belt is lower than 0.9cm/s and easy to be penetrated, and the X-ray yield is small when the linear speed is higher than 6 cm/s. The first servo motor and the second servo motor of the present embodiment both employ a two-phase hybrid motor.
The laser displacement sensor of the embodiment is supported and fixed by an aluminum support, Panasonic HL-G108-S-J is adopted, the measuring center distance is 85mm, the measuring range is +/-20 mm, the resolution is 2.5 mu m, the sampling period is 200 mu S, the sensor supports an RS485 communication protocol, the radius value of the active coiling area of the target belt is sent to a central control system once by taking 200 mu S as a period, the received real-time radius value can be converted into the real-time servo motor angular velocity through the relational expression after the linear velocity of the target belt is set according to the relational expression-v-omega-r between the linear velocity (v), the angular velocity (omega) and the radius (r), the servo motor angular velocity in unit time is regulated and controlled in a pulse signal mode, and the linear velocity set by a user is ensured to be always kept in the running process of the target belt. When the laser sensor is used in the embodiment, the laser sensor needs to be preheated for three minutes first when being started each time, so that the laser output is stable. The data of the laser displacement sensor are welded with a signal wire and a power wire through the intracavity data extension line to the needle core at one end of the aviation socket, and the other end of the aviation socket is welded with the data extension line and is connected with a USB-RS 485 serial port, so that the data are transmitted to the central control system in real time.
When the method is applied, the laser displacement sensor measures the radius value of the active coiling area of the target belt in real time, real-time data are transmitted to the central control system from the vacuum cavity through an RS485 communication protocol by using the aviation plug, the central control system carries out real-time data processing to obtain the real-time angular velocity of the target belt driving wheel required for ensuring the constant linear velocity of the target belt, then the real-time angular velocity is converted into a pulse signal for driving the servo motor to adjust the rotating speed in real time, the rotating linear velocity of the target belt can be regulated and controlled by the central control system, and the running state is detected.
The embodiment further comprises target tape winding posts 15, four target tape winding posts 15 are arranged in the reaction chamber 2, two of the target tape winding posts 15 are distributed on the left side and the right side of the reaction chamber 2 and are respectively opposite to the two target tape strip-shaped gap 31, and the other two target tape winding posts 15 are distributed on two sides of the inner area of the reaction chamber 2 with the front opening and the rear opening opposite to each other of the reaction chamber 2 and are close to the area with the front opening opposite to each other. 2 bottoms in reaction chamber of this embodiment constitute the bar hole 32 that has vertical level to set up, bar hole 32 is located 2 front and back lateral wall openings of reaction chamber just to regional one side and is close to the just right regional setting of opening, bar hole 32 central zone is located the just right 2 interior regions in reaction chamber of target area form overline 31, a target area winding post 15 that is close to the just regional setting of opening is installed in bar hole 32, another is close to the opening and just sets up in the just right regional opposite side of opening just to regional setting target area winding post 15 and is close to 2 rear sides in reaction chamber, this target area winding post 15 rear side flushes with bar hole 32 rear end, and the length of bar hole 32 is greater than the interval between 15 axis of this target area winding post and the bar hole 32 axis. One section of the target strip 3 in the reaction chamber 2 of the present embodiment sequentially passes through four target strip winding posts 15 in the reaction chamber 2, and an included angle between one section of the target strip 3 acted by the laser incident from the optical window 5 and the laser incident from the optical window 5 is 45-90 °. In the embodiment, the reaction cavity is arranged close to the opening facing area, and a belt pressing rubber wheel can be arranged beside a target belt winding column on the front side of the reaction cavity, so that belt winding caused by too high speed is avoided, and the target belt keeps highly stable in the running process.
The vacuum cavity 1 of the embodiment comprises a reaction cavity accommodating cavity, and a driven disc accommodating cavity and a driving disc accommodating cavity which are distributed on the left side and the right side of the reaction cavity accommodating cavity, wherein the driving disc accommodating cavity, the driven disc accommodating cavity and the reaction cavity accommodating cavity of the embodiment are rectangular, the driving disc accommodating cavity is communicated with the driven disc accommodating cavity, the reaction cavity accommodating cavity is connected with the driving disc accommodating cavity and the driven disc accommodating cavity, the lengths of the two ends of the driving disc accommodating cavity and the driven disc accommodating cavity are smaller than the length of the driving disc accommodating cavity and the length of the driven disc accommodating cavity, and the rear sides of the driving disc accommodating cavity, the driven disc accommodating cavity and the reaction cavity accommodating cavity are parallel and level; target area driving disk 7 and two shielding area driving disks 9 are all located in the driving disk holding cavity and three disks are arranged from back to front in sequence, target area driving disk 7 is close to the rear side of the driving disk holding cavity, target area driven disk 8 and two shielding area driven disks 10 are all located in the driven disk holding cavity and three disks are arranged from back to front in sequence, target area driven disk 8 is close to the rear side of the driving disk holding cavity, and reaction cavity 2 is located in the reaction cavity holding cavity.
Two target belt winding posts 15 which are respectively positioned on the left side and the right side of the reaction cavity 2 and are respectively opposite to two target belt strip-shaped overseams 31 on the reaction cavity 2 are arranged in the reaction cavity accommodating cavity of the embodiment, one target belt winding post 15 is arranged on the oblique rear side of the target belt driving disk 7 facing the reaction cavity accommodating cavity in the driving disk accommodating cavity, and one target belt winding post 15 is arranged on the oblique rear side of the target belt driven disk 8 facing the reaction cavity accommodating cavity in the driven disk accommodating cavity; the target belt 3 sequentially bypasses a target belt winding post 15 in the driving disc accommodating cavity, a target belt winding post 15 in the reaction cavity accommodating cavity which is positioned at the same side of the reaction cavity 2 as the driving disc accommodating cavity, the target belt winding post 15 in the reaction cavity 2, the target belt winding post 15 in the reaction cavity accommodating cavity which is positioned at the same side of the reaction cavity 2 as the driven disc accommodating cavity, and the target belt winding post 15 in the driven disc accommodating cavity.
In the embodiment, shielding belt winding posts 16 are arranged in the driving disc accommodating cavity and the driven disc accommodating cavity, a shielding belt winding post 16 is arranged at a corner close to the right rear side in the driving disc accommodating cavity, at the right rear side of the rear shielding belt driving disc 9, at a corner close to the right front side of the reaction chamber accommodating cavity, and at the left rear side of the front shielding belt driving disc 9, and a shielding belt winding post 16 is arranged at a corner close to the left rear side in the driven disc accommodating cavity, at a corner close to the left front side of the reaction chamber accommodating cavity, at the right rear side of the front shielding belt driven disc 10, and at the left rear side of the rear shielding belt driven disc 10; one end of the shielding belt 4 passing through the two shielding belt strip-shaped overjoints 30 at the rear side of the reaction cavity 2 is fixed on the shielding belt driving disk 9 at the rear side in the driving disk accommodating cavity, and the other end of the shielding belt 4 sequentially bypasses the shielding belt winding post 16 at the right rear side of the rear shielding belt driving disk 9, bypasses the shielding belt winding post 16 close to the right rear side corner in the driving disk accommodating cavity, passes through the two shielding belt strip-shaped overjoints 30 at the rear side of the reaction cavity 2, bypasses the shielding belt winding post 16 close to the left rear side corner in the driven disk accommodating cavity, bypasses the shielding belt winding post 16 at the left rear side of the rear shielding belt driven disk 10, and is fixed on the rear shielding belt driven disk 10; one end of a shielding belt 4 which penetrates through two shielding belt strip-shaped gap-crossing seams 30 on the front side of the reaction cavity 2 is fixed on a shielding belt driving disk 9 on the front side in a driving disk accommodating cavity, the other end of the shielding belt 4 bypasses a shielding belt winding post 16 on the left rear side of the front side shielding belt driving disk 9 in sequence, bypasses the shielding belt winding post 16 close to the right front side corner of the reaction cavity accommodating cavity, penetrates through two shielding belt strip-shaped gap-crossing seams 30 on the front side of the reaction cavity 2, bypasses the shielding belt winding post 16 close to the left front side corner of the reaction cavity accommodating cavity, and is fixed on a front end shielding belt driven disk 10 after bypassing the shielding belt winding post 16 on the right rear side of the front side shielding belt driven disk 10.
The target belt winding post 15 comprises a fixed target belt winding post and a rotary target belt winding post, the fixed target belt winding post and the shielding belt winding post 16 respectively comprise a vertically arranged winding post body and an upper limiting ring and a lower limiting ring sleeved on the winding post body, and the area between the upper limiting ring and the lower limiting ring is a winding area; the rotary target tape winding post comprises an upper winding post body 35 which is vertically arranged, an upper limiting ring, a lower winding post body 36 which is vertically arranged and a micro bearing 37 which is fixed at the upper end of the lower winding post body 36, wherein the upper limiting ring and the lower limiting ring are sleeved on the upper winding post body 35, and the lower end of the upper winding post body 35 is embedded into the micro bearing 37.
The pumping delay optical path of the embodiment includes five reflectors and a lens 24, wherein the centers of four reflectors are distributed at four vertex points of the same rectangle, another reflector is located on an extension line of a central connection line of two reflectors located on the same side among the four reflectors, three reflectors whose centers are located on the same straight line are all located in the extending direction of the initial segment of the pumping beam distributed by the beam splitter 23, the other two reflectors are installed on the one-dimensional electric translation stage, the included angles between the central axes of the five reflectors and the extension line of the initial segment of the pumping beam distributed by the beam splitter 23 are both 45 °, and the central axes of two reflectors far away from the beam splitter 23 among the four reflectors distributed at the four vertex points of the same rectangle are perpendicular to the central axes of the other three reflectors; the pump beam distributed by the beam splitter 23 is reflected by four reflectors distributed at four vertices of the same rectangle, then reflected by a fifth reflector, and then passes through the lens 24 to act on the sample 29. The target practice light path of this embodiment includes two reflectors and an off-axis parabolic mirror 20, wherein one of the reflectors is disposed on the initial segment of the target practice beam distributed by the beam splitter 23, and an included angle between the axis and the initial segment of the target practice beam distributed by the beam splitter 23 is 45 °, the other reflector is disposed on the extension of the target practice beam reflected by the above reflector, and the axis is perpendicular to the central axis of the above reflector, and the off-axis parabolic mirror 20 is disposed on the extension of the target practice beam reflected by the second reflector reflecting the target practice beam, and is used for reflecting the target practice beam, passing through the optical window 5, and focusing on the target tape. The X-ray focusing element 25 for restricting X-rays is provided on the rear side of the X-ray window 6 in the present embodiment, and the X-ray focusing element 25 is fixed to the six-dimensional motorized translation stage. The X-ray focusing element of the embodiment can select a capillary tube to focus the X-ray or a slit to improve the signal to noise ratio of the signal according to different sample testing requirements. The X-ray beam can be focused to a diameter of 200 μm by means of an X-ray focusing element. The model of the one-dimensional electric translation stage in the embodiment is preferably NRT150/M (stroke: 150mm maximum speed: 30mm/s bidirectional repetition precision: 1 μ M), the moving direction is perpendicular to the central connecting line of the other three reflectors, and the optical path of the pump laser is changed through the movement of the one-dimensional electric translation stage, so that the time for the pump laser to reach the sample is changed. The present embodiment focuses the X-rays on the sample 29 by adjusting the six-dimensional motorized translation stage so that the focal point coincides with the region of action of the pump light.
When the embodiment is applied, a lead shielding cover and at least two radiation alarms can be arranged to protect the life safety of operators. In a specific application of the embodiment, the X-ray focusing element is mounted on a six-dimensional motorized translation stage, the six-dimensional motorized translation stage is preferably of the type Thorlabs MAX683/M (adjustment range of theta X, theta y and theta z: 6 degrees or 105mrad, adjustment range of X, Y, Z: 4mm), the X-ray CCD is mounted on a four-dimensional motorized translation stage, the four-dimensional motorized translation stage is formed by combining a three-dimensional motorized translation stage and a motorized rotation stage, the three-dimensional motorized translation stage is preferably of the type Thorlabs RollerBlock (motorized customization, adjustment range of X, Y, Z: 13mm), and the rotation stage is of the type Thorlabs HDR50 (precision: +/-820 μ rad, maximum load: 50 KG). The central control system uniformly controls the electric four-dimensional translation stage and the electric six-dimensional translation stage to work, and then drives the X-ray focusing element and the X-ray CCD to shift. When the X-ray CCD of the embodiment collects data, the X-ray CCD can self-define detailed parameters such as exposure time and the like, and can automatically store data files according to preset file naming rules. The system sets the time logic relation between the X-ray CCD and the translation stage, for example, the stay time when the translation stage moves to a certain delay time is longer than the sum of the single integral time of the X-ray CCD and the data access time. Therefore, the position of the equipment can be directly adjusted when the device is applied, and for experiments with different samples and experiment conditions, the user can be allowed to archive the optimal adjustment position information of different experiments, and the subsequent experiments can be directly called, so that the adjustment time is shortened. The central control system of the embodiment integrates all functions of completing the whole ultrafast X-ray diffraction experiment, including subsystems such as motion control, data acquisition, safety logic, experiment monitoring and the like, and greatly improves the automation degree and the acquisition efficiency of the system.
In the embodiment, in a specific application, the priority between the rotation of the target belt and the control of the laser light path switch by the electric shutter is required to be controlled. If the target belt does not rotate, the opening instruction of the shutter is invalid; when the laser shutter remains open, the close command for target band motion is not valid. The purpose of this logic is to limit the focused light from directly striking the target strip when it is stationary, ablating the back end X-ray window. The regional control of still accessible a plurality of cameras when this embodiment is used, including the whole layout control of control and pumping detection experiment of laser target spot position, the picture can show in central management and control system in real time, and real-time data monitoring can show CCD data integral process under this exposure time, has improved the unexpected factor that appears in the experimentation and the abnormal conditions that appear in the data acquisition process in time.
This embodiment is according to selecting for use different grade type target area (like smooth surface, frosting), adjusts the target area elasticity to the accessible increases or reduces rotary type target area wiring post, and regulation and control frictional force size promotes the target area and rotates the stability of in-process. In the laser focusing process, a 60X objective lens and a visible light CCD (charge coupled device) can be adopted to monitor the laser focal spot, and the focusing element is finely adjusted to enable the focal spot to be optimally imaged. The embodiment carries out pumping detection data self-scanning collection through the X-ray CCD, can carry out target point real-time observation, and sets up safe operation logic, so, can realize the automatic collection of whole data acquisition in-process data.
When this embodiment is used, can both switch the target surface and keep the target point stable for guaranteeing the target area at every pulse of laser shooting in-process, need to make the target area with certain linear velocity steady movement, concrete theory of operation is for obtaining the radius value of target area initiative dish rotation in-process in real time through laser displacement sensor, and with test data transmission to central control system, calculate under required specific rotational speed through central control system, servo motor need walk the step number per second, and with control command transmission to first controller, realize servo motor's real-time regulation and control.
The off-axis parabolic mirror of this embodiment focuses the targeting laser using an off-axis parabolic mirror (OAP) with a divergence focal length of 150.2mm, and the angle (off-axis angle) between the focused beam and the collimated beam is 90 °, so as to obtain the off-axis parabolic mirrorIdeally, the beam is focused, and the axis of propagation of the collimated beam should be perpendicular to the bottom of the substrate. In order to accurately adjust the off-axis parabolic mirror, coarse adjustment and fine adjustment are needed, in order to avoid the risk factors of overlarge laser focusing energy to operators and optical elements in the adjusting process, a helium-neon laser with the wavelength of 632nm is used as analog light, the analog light is adjusted to be coaxial with the targeting laser, the laser beam of the incident off-axis parabolic mirror is collimated, the coarse adjustment OAP mounting base is perpendicular to the collimated incident beam, a white paperboard is placed close to an optical window (about 7cm away from the OAP), and the inclination angle of an optical adjusting frame of the OAP is adjusted to enable the light spot to be in the most circular state by visual observation on the white board. In the fine adjustment of the embodiment, a 60X objective lens is adopted to match with an adapter tube and a visible light CCD, so that laser is reversely lifted, the objective lens is finely adjusted to enable a focused light spot to enter a lens, the shape of the light spot on the display to reach the minimum and maximum round state can be achieved by finely adjusting the mechanical angle of an optical adjustment frame on the OAP, finally, the simulated light is replaced by femtosecond laser attenuated to nano-joule (nj) level by a neutral attenuation sheet, the light spot is adjusted to be in the minimum and maximum round state, and the size of the focal spot is generally within the range of 5-10 μm. Before formal data acquisition is started, whether the performance of equipment is adjusted to an optimal state needs to be checked, namely whether each system such as system connection, vacuum degree, target belt and shielding belt transmission works normally needs to be checked, and finally, an X-123 energy spectrometer needs to be used for detecting the yield of the system. The target of this embodiment takes between drive plate and target area driven plate and the target area, and the shielding takes between drive plate and the shielding area driven plate and the shielding area all to adopt the sticky tape fixed, whether need the inspection fixed firm, prevent idle running phenomenon. In this example, after the cover glass was closed, the mechanical pump was turned on, and after about 30 seconds, it was checked whether the degree of vacuum was less than 10 -3 mbar. Need open laser displacement sensor earlier and detect whether central management and control system shows the radius value during the inspection, try to run transmission system, above-mentioned inspection is all normal back, waits for three minutes after the laser is stable, through the electronic shutter control in the light path shooting, whether sends the chimes of doom through the radiation alarm and judges whether system produces the X ray.
In preparation for calibrating the yield of the equipment, an X-123 energy spectrometer is adopted and placed about 50cm away from the target point, and the energy spectrum is avoidedThe instrument generates a two-photon absorption phenomenon, and a lead sheet with the diameter of 0.3mm is fixed in front of a beryllium window of the energy spectrometer. Integrating for 5-30s to obtain X-ray energy spectrum, wherein in experiment, when the laser energy reaches 6mj, the photon yield can reach 1 × 10 11 photons/s。
After the debugging of the X-ray source is completed, the time delay of the pump light accounting for 10% of the energy of the main laser is needed, and then a time delay system between the femtosecond X-ray beam and the pump light is formed. For different test conditions, the capillary tube can be used for focusing an X-ray source emitted by the system, the size of a focal spot is about 100-200 mu m, and the size of the focal spot can be changed by pump light through the distance between a sample and the lens. The femtosecond laser is used as a pumping source, and can be replaced by a terahertz source, an electric pulse, an infrared band laser and the like according to different samples or physical mechanisms to be detected. In order to prevent misoperation, before the electric shutter is opened, the target belt and the shielding belt are ensured to keep rotating, otherwise, high-energy focused laser ablates an X-ray window at the rear part of a target point and the shielding belt in front of the target point and ablates an X-ray window, and similarly, the electric shutter is firstly closed, and then the target belt stops running.
The ultrafast X-ray diffraction experiment of this embodiment compares like experiment, and this application has high automation, high yield, high stability, high reliability, operating time are long, monochromaticity advantage such as better through improving the design to desktop formula plasma X ray source.
The above-mentioned embodiments are intended to illustrate the objects, technical solutions and advantages of the present invention in further detail, and it should be understood that the above-mentioned embodiments are merely exemplary embodiments of the present invention, and are not intended to limit the scope of the present invention, and any modifications, equivalent substitutions, improvements and the like made within the spirit and principle of the present invention should be included in the scope of the present invention.

Claims (10)

1. Desktop plasma ultrafast X ray source, characterized in that, including vacuum cavity (1), reaction chamber (2), target area (3), shielding area (4), X ray CCD (22), target area transmission system, shielding area transmission system and outside light path system, reaction chamber (2) is located vacuum cavity (1), and the lateral wall all constitutes two vertical shielding area bar-shaped seam (30) and one vertical target area bar-shaped seam (31) of crossing that set up about reaction chamber (2), and two shielding area bar-shaped seams (30) that are located on the same lateral wall of reaction chamber (2) distribute in the both sides of target area bar-shaped seam (31) on this lateral wall and be close to both sides end position around this lateral wall respectively, target area (3) pass two target area bar-shaped seam (31) on reaction chamber (2) and are driven by target area transmission system and are shifted from one side of reaction chamber (2) to another side, the number of the shielding belts (4) is two, one shielding belt (4) penetrates through two shielding belt strip-shaped overlines (30) close to the rear side of the reaction cavity (2), the other shielding belt (4) penetrates through two shielding belt strip-shaped overlines (30) close to the front side of the reaction cavity (2), the number of the shielding belt transmission systems is two, and each shielding belt transmission system correspondingly drives one shielding belt (4) to move from one side of the reaction cavity (2) to the other side;
an optical window (5) positioned on the front side of the reaction cavity (2) and an X-ray window (6) positioned on the rear side of the reaction cavity (2) are arranged on the side wall of the cavity of the vacuum cavity (1), the X-ray window (6) is positioned right behind the optical window (5), an opening right facing the optical window (5) is arranged on the side wall of the front side of the reaction cavity (2), an opening right facing the X-ray window (6) is arranged on the side wall of the rear side of the reaction cavity (2), and the two shielding belts (4) respectively penetrate through the cavity area right facing the openings on the side walls of the front side and the rear side of the reaction cavity (2);
the external optical path system comprises a femtosecond laser (21), a beam splitter (23), a pumping delay optical path and a targeting optical path, wherein the femtosecond laser (21) is used for generating a main laser beam, the beam splitter (23) is used for distributing laser energy generated by the femtosecond laser (21) into a pumping beam and a targeting beam, the pumping delay optical path is used for delaying the time of the pumping beam and acting on a sample (29), the targeting optical path is used for controlling the targeting beam to act with a target zone (3) after passing through an optical window (5) to generate X-rays, the X-rays pass through an X-ray window (6) and act on the sample (29), and the pumping beam and the X-rays act on the same position of the sample (29); the X-ray CCD (22) is used for scanning and acquiring pumping detection data of the sample (29).
2. The desktop plasma ultrafast X-ray source of claim 1, the target belt transmission system comprises a first servo motor (11), a first encoder (13), a target belt driving disc (7) and a target belt driven disc (8), the target belt driving disc (7) and the target belt driven disc (8) are both arranged in the vacuum cavity (1) and are respectively positioned at the left side and the right side of the reaction cavity (2), the two ends of the target belt (3) are respectively fixed on the target belt driving disc (7) and the target belt driven disc (8), the target belt (3) is wound on the target belt driving disc (7) and/or the target belt driven disc (8), the first encoder (13) is arranged outside the vacuum cavity (1) and is used for monitoring the angular speed of the target belt driven disc (8) and whether the target belt (3) runs normally or not, the first servo motor (11) is arranged outside the vacuum cavity (1) and used for driving the target belt driving disc (7) to rotate;
the shielding belt transmission system comprises a second servo motor (12), a second encoder (14), a shielding belt driving disc (9) and a shielding belt driven disc (10), wherein the shielding belt driving disc (9) and the shielding belt driven disc (10) are arranged in the vacuum cavity (1) and are respectively located on the left side and the right side of the reaction cavity (2), two ends of the shielding belt (4) are respectively fixed on the shielding belt driving disc (9) and the shielding belt driven disc (10), the shielding belt (4) is wound on the shielding belt driving disc (9) and/or the shielding belt driven disc (10), the second encoder (14) is arranged at the vacuum cavity (1) and is used for monitoring the angular velocity of the shielding belt driven disc (10) and judging whether the shielding belt (4) operates normally, and the second servo motor (12) is arranged at the vacuum cavity (1) and is used for driving the shielding belt driving disc (9) to rotate.
3. The desktop plasma ultrafast X-ray source of claim 2, wherein the first encoder (13) and the target driven disk (8), the first servo motor (11) and the target driven disk (7), the second encoder (14) and the shielding driven disk (10), and the second servo motor (12) and the shielding driven disk (9) are connected through a transmission mechanism, the transmission mechanism comprises a magnetic fluid sealing bearing (33) fixed at the bottom of the vacuum chamber (1), a positioning bearing arranged in the vacuum chamber (1) and having a lower end connected with the magnetic fluid sealing bearing (33), and a coupling (34) arranged outside the vacuum chamber (1) and having one end connected with the magnetic fluid sealing bearing (33), the target driven disk (7), the target driven disk (8), the shielding driven disk (9), and the shielding driven disk (10) each comprise a hollow rotating shaft, a magnetic shield, and a magnetic shield, The upper end of the positioning bearing is embedded into the hollow rotating shaft from the lower end of the idle rotating shaft and fixedly connected with the two disc bodies sleeved on the hollow rotating shaft; the target belt driving disc (7) and the shielding belt driving disc (9) are in linkage with each other, a coupler (34) is connected with the other end of the magnetic fluid sealing bearing (33) relatively, and is connected with an output shaft of the servo motor, and the target belt driven disc (8) and the shielding belt driven disc (10) are in linkage with each other, and the coupler (34) is connected with the other end of the magnetic fluid sealing bearing (33) relatively, and is connected with the encoder.
4. The desktop plasma ultrafast X-ray source of claim 2, further comprising a central control system, wherein a laser displacement sensor is disposed in the vacuum chamber (1) and is opposite to the target belt driving disk (7), an aviation plug connected with the laser displacement sensor is disposed on a side wall of the vacuum chamber (1), the first servo motor (11) is connected with a first controller, the second servo motor (12) is connected with a second controller, and the aviation plug, the first controller and the second controller are all connected with the central control system; wherein:
the laser displacement sensor is used for measuring the radius value of a tape winding area of the target tape driving disk (7) in real time and transmitting measured real-time data to the central control system through the aviation plug;
the central control system is used for receiving the real-time radius value measured by the laser displacement sensor, converting the real-time radius value into a real-time angular velocity of the first servo motor (11) by combining the set linear velocity of the target belt (3), sending the real-time angular velocity to the first controller in a pulse signal mode, and controlling the angular velocity of the first servo motor (11) in unit time to enable the target belt (3) to always keep the linear velocity set by a user in the running process; the servo motor is also used for generating a pulse signal according to artificial control and sending the pulse signal to a second controller to regulate and control the angular speed of a second servo motor (12) in unit time;
the first controller and the second controller are used for receiving pulse signals generated by the central control system so as to adjust the angular speed of the servo motor in real time.
5. The desktop plasma ultrafast X-ray source of claim 2, characterized in that, it further comprises target tape winding posts (15), four target tape winding posts (15) are arranged in the reaction chamber (2), wherein two target tape winding posts (15) are distributed on the left and right sides of the reaction chamber (2) and are respectively opposite to two target tape strip-shaped overseams (31), the other two target tape winding posts (15) are distributed on the two sides of the inner region of the reaction chamber (2) with opposite front and back openings of the reaction chamber (2) and are close to the region with opposite openings, the bottom of the reaction chamber (2) is formed with a strip-shaped hole (32) which is longitudinally and horizontally arranged, the strip-shaped hole (32) is located on one side of the region with opposite front and back side wall openings of the reaction chamber (2) and is close to the region with opposite openings, the central region of the strip-shaped hole (32) is located under the region in the reaction chamber (2) with opposite target tape overseams (31), a target belt winding post (15) which is arranged close to the opening dead zone is arranged in the strip-shaped hole (32), the other target belt winding post (15) which is arranged close to the opening dead zone is arranged on the other side of the opening dead zone and close to the rear side of the reaction cavity (2), the rear side of the target belt winding post (15) is flush with the rear end of the strip-shaped hole (32), and the length of the strip-shaped hole (32) is greater than the distance between the central axis of the target belt winding post (15) and the central axis of the strip-shaped hole (32); one section of the target belt (3) positioned in the reaction cavity (2) sequentially passes through four target belt winding columns (15) in the reaction cavity (2), and the included angle between the section of the target belt (3) under the action of the laser incident from the optical window (5) and the laser incident from the optical window (5) is 45-90 degrees.
6. The desktop plasma ultrafast X-ray source of claim 5, wherein the vacuum chamber (1) comprises a reaction chamber accommodating cavity, and a passive disk accommodating cavity and an active disk accommodating cavity distributed on the left and right sides of the reaction chamber accommodating cavity, the active disk accommodating cavity, the passive disk accommodating cavity and the reaction chamber accommodating cavity are rectangular, the active disk accommodating cavity and the passive disk accommodating cavity are communicated, the lengths of two ends of the reaction chamber accommodating cavity connecting the active disk accommodating cavity and the passive disk accommodating cavity are less than the lengths of the active disk accommodating cavity and the passive disk accommodating cavity, and the rear sides of the active disk accommodating cavity, the passive disk accommodating cavity and the reaction chamber accommodating cavity are flush; the target belt driving disc (7) and the two shielding belt driving discs (9) are arranged in the driving disc accommodating cavity, the three discs are sequentially arranged from back to front, the target belt driving disc (7) is close to the rear side of the driving disc accommodating cavity, the target belt driven disc (8) and the two shielding belt driven discs (10) are both arranged in the driven disc accommodating cavity, the three discs are sequentially arranged from back to front, the target belt driven disc (8) is close to the rear side of the driving disc accommodating cavity, and the reaction cavity (2) is arranged in the reaction cavity accommodating cavity;
two target belt winding columns (15) which are respectively positioned on the left side and the right side of the reaction cavity (2) and are respectively arranged right opposite to two target belt strip-shaped overseams (31) on the reaction cavity (2) are arranged in the reaction cavity accommodating cavity, one target belt winding column (15) is arranged on the oblique rear side, facing the reaction cavity accommodating cavity, of the target belt driving disc (7) in the driving disc accommodating cavity, and one target belt winding column (15) is arranged on the oblique rear side, facing the reaction cavity accommodating cavity, of the target belt driven disc (8) in the driven disc accommodating cavity; the target tape (3) sequentially bypasses a target tape winding post (15) in the active disc accommodating cavity, a target tape winding post (15) in the reaction cavity accommodating cavity which is positioned at the same side of the reaction cavity (2) as the active disc accommodating cavity, the target tape winding post (15) in the reaction cavity (2), the target tape winding post (15) in the reaction cavity accommodating cavity which is positioned at the same side of the reaction cavity (2) as the passive disc accommodating cavity, and the target tape winding post (15) in the passive disc accommodating cavity;
shielding belt winding columns (16) are arranged in the driving disc accommodating cavity and the driven disc accommodating cavity, a shielding belt winding column (16) is arranged at the corner close to the right rear side, the right rear side of the rear shielding belt driving disc (9), the corner close to the right front side of the reaction cavity accommodating cavity and the left rear side of the front shielding belt driving disc (9) in the driving disc accommodating cavity, and a shielding belt winding column (16) is arranged at the corner close to the left rear side, the corner close to the left front side of the reaction cavity accommodating cavity, the right rear side of the front shielding belt driven disc (10) and the left rear side of the rear shielding belt driven disc (10) in the driven disc accommodating cavity; one end of a shielding belt (4) which penetrates through two shielding belt strip-shaped passing seams (30) at the rear side of the reaction cavity (2) is fixed on a shielding belt driving disc (9) at the rear side in a driving disc accommodating cavity, and the other end of the shielding belt (4) sequentially bypasses a shielding belt winding column (16) at the rear right side of the shielding belt driving disc (9) at the rear side, bypasses a shielding belt winding column (16) at a corner close to the right rear side in the driving disc accommodating cavity, penetrates through two shielding belt strip-shaped passing seams (30) at the rear side of the reaction cavity (2), bypasses a shielding belt winding column (16) at a corner close to the left rear side in a driven disc accommodating cavity, bypasses the shielding belt winding column (16) at the left rear side of the rear shielding belt driven disc (10), and is fixed on the rear shielding belt driven disc (10); pass shield band (4) one end that two shield band strips of reaction chamber (2) front side were crossed seam (30) and be fixed in on shield band initiative dish (9) that lie in the front side in the initiative dish holding cavity, the other end is walked around shield band winding post (16) of front side shield band initiative dish (9) left rear side in proper order, walk around shield band winding post (16) that are close to the right front side corner of reaction chamber holding cavity, pass two shield band strips of reaction chamber (2) front side and cross seam (30), walk around shield band winding post (16) that are close to the left front side corner of reaction chamber holding cavity, and the shield band winding post (16) back of front side shield band driven dish (10) right rear side, be fixed in on front end shield band driven dish (10).
7. The desktop plasma ultrafast X-ray source of claim 5, wherein the target tape winding column (15) comprises a fixed target tape winding column and a rotary target tape winding column, the fixed target tape winding column comprises a vertically arranged winding cylinder and an upper and a lower limiting rings sleeved on the winding cylinder, and an area between the upper and the lower limiting rings is a winding area; the rotary type target tape winding post comprises an upper winding post body (35) which is vertically arranged, an upper limiting ring, a lower winding post body (36) which is vertically arranged and is sleeved on the upper winding post body (35), and a miniature bearing (37) which is fixed at the upper end of the lower winding post body (36), wherein the lower end of the upper winding post body (35) is embedded into the miniature bearing (37).
8. The desktop plasma ultrafast X-ray source OF claim 1, wherein the optical window (5) is made OF white gem or OF-grade fused quartz glass, and an anti-reflection film is evaporated on the surface OF the optical window; the X-ray window (6) is made of beryllium, aluminum film or diamond sheet, and the rear side of the X-ray window is provided with a nickel sheet.
9. The desktop plasma ultrafast X-ray source of claim 1, wherein the pump delay path comprises five mirrors and one lens (24), the centers of four reflectors are distributed at four vertex points of the same rectangle, the other reflector is positioned on an extension line of a central connecting line of two reflectors positioned on the same side in the four reflectors, the three reflectors with the centers positioned on the same straight line are all positioned in the extending direction of the initial segment of the pump beam distributed by the beam splitter (23), the other two reflectors are arranged on a one-dimensional electric translation table, the included angles between the central axes of the five reflectors and the extension line of the initial segment of the pump beam distributed by the beam splitter (23) are 45 degrees, and the central axes of two reflectors which are distributed at the four vertex points of the same rectangle and are far away from the beam splitter (23) are vertical to the central axes of the other three reflectors; the pumping beam distributed by the beam splitter (23) is reflected by four reflectors distributed at four vertexes of the same rectangle in sequence, then reflected by a fifth reflector and then passes through a lens (24) to act on a sample (29);
the shooting light path comprises two reflectors and an off-axis parabolic mirror (20), wherein one reflector is arranged on a shooting beam starting section distributed by the beam splitter (23), the included angle between the axis of the reflector and the shooting beam starting section distributed by the beam splitter (23) is 45 degrees, the other reflector is arranged on a shooting beam extension line reflected by the reflector, the axis of the other reflector is perpendicular to the central axis of the reflector, and the off-axis parabolic mirror (20) is arranged on a shooting beam extension line reflected by the reflector of the second reflected shooting beam, is used for reflecting the shooting beam, penetrates through the optical window (5) and focuses on the target band;
an X-ray focusing element (25) for restraining X-rays is arranged on the rear side of the X-ray window (6), and the X-ray focusing element (25) is fixed on the six-dimensional electric translation table.
10. The desktop plasma ultrafast X-ray source of any one of claims 1 to 9, wherein the reaction chamber (2) is a copper reaction chamber, the target belt (3) is a copper belt, and the shielding belt (4) is a mylar film.
CN202010798982.9A 2020-08-11 2020-08-11 Desktop type plasma ultrafast X-ray source Active CN111935891B (en)

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