CN111929154A - In-situ nano indentation testing device and method - Google Patents

In-situ nano indentation testing device and method Download PDF

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Publication number
CN111929154A
CN111929154A CN202010656965.1A CN202010656965A CN111929154A CN 111929154 A CN111929154 A CN 111929154A CN 202010656965 A CN202010656965 A CN 202010656965A CN 111929154 A CN111929154 A CN 111929154A
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CN
China
Prior art keywords
test piece
protective sleeve
sleeve
testing device
situ
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Pending
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CN202010656965.1A
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Chinese (zh)
Inventor
周宝河
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Beijing Mingxuan Biotechnology Co ltd
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Beijing Mingxuan Biotechnology Co ltd
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Priority to CN202010656965.1A priority Critical patent/CN111929154A/en
Publication of CN111929154A publication Critical patent/CN111929154A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N3/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N3/02Details
    • G01N3/06Special adaptations of indicating or recording means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N3/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N3/02Details
    • G01N3/06Special adaptations of indicating or recording means
    • G01N3/068Special adaptations of indicating or recording means with optical indicating or recording means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N3/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N3/08Investigating strength properties of solid materials by application of mechanical stress by applying steady tensile or compressive forces
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/0001Type of application of the stress
    • G01N2203/0003Steady
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/0014Type of force applied
    • G01N2203/0016Tensile or compressive
    • G01N2203/0019Compressive
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/02Details not specific for a particular testing method
    • G01N2203/06Indicating or recording means; Sensing means
    • G01N2203/0641Indicating or recording means; Sensing means using optical, X-ray, ultraviolet, infrared or similar detectors
    • G01N2203/0647Image analysis

Abstract

The invention discloses an in-situ nano indentation testing device and a method, which comprises a base and a mounting vertical plate arranged at the left upper end of the base, wherein a fixed cylinder is arranged on the base at the right side of the mounting vertical plate, a supporting column is arranged in the fixed cylinder, the lower end of the supporting column is connected with a precise displacement sensor for detecting the deformation stroke of a test piece, and a test piece supporting block for placing the test piece is arranged at the upper end of the supporting column. And the replacement in the later period is also convenient.

Description

In-situ nano indentation testing device and method
Technical Field
The invention relates to a mechatronic precision scientific instrument, in particular to an in-situ nanoindentation testing device and method.
Background
The in-situ nano indentation testing technology is a leading-edge technology developed on the basis of the early ex-situ indentation testing technology in recent years, and is also in an exploration stage abroad at present. The in-situ nano indentation testing technology is used for observing the deformation and damage processes of materials and products thereof under the action of load on line through a high-resolution microscopic imaging system in the process of pressing a diamond pressure head into and out of the surface of a tested piece. Early ex-situ indentation testing techniques were unable to observe the damage process of the material on-line. In-situ indentation tests can yield more information about material deformation damage than ex-situ tests. For this reason, the in-situ indentation testing technique is a hot point of research in the world. Some representative work was done by the federal worker in switzerland, Hysitron in the united states, in situ testing. In China, the ex-situ indentation testing device is not formed yet, let alone the research on the in-situ indentation testing technology.
The prior patent with the patent publication number of CN102252923B discloses an indentation testing device, which can measure the mechanical property of a three-dimensional test piece material (the maximum size is 5mm multiplied by 3 mm) with the characteristic size of more than millimeter by utilizing the testing device provided by the invention; in the test process, the load resolution reaches a micro-Newton level, and the displacement resolution reaches a nano level; the testing device can be arranged in a high-resolution microscopic imaging system to observe the whole indentation process, and provides possibility for researching the deformation damage mechanism of the material, but the testing mode can only be matched with a camera part to observe one side of a test piece, so that dead angles exist in observation, and the test piece is inconvenient to fix.
Disclosure of Invention
The present invention is directed to an in-situ nanoindentation testing apparatus and method, so as to solve the problems mentioned in the background art.
In order to achieve the purpose, the invention provides the following technical scheme:
an in-situ nano indentation testing device comprises a base and a mounting vertical plate arranged at the left upper end of the base, wherein a fixed cylinder is arranged on the base on the right side of the mounting vertical plate, a supporting column is arranged inside the fixed cylinder, the lower end of the supporting column is connected with a precise displacement sensor for detecting the deformation stroke of a test piece, a test piece supporting block for placing the test piece is arranged at the upper end of the supporting column, a second protective sleeve is slidably sleeved outside the upper end of the fixed cylinder, the lower end of the second protective sleeve is connected with a telescopic rod for driving the second protective sleeve to slide up and down along the fixed cylinder, a push rod is arranged at the output end of the;
a guide sleeve is arranged above the second protective sleeve, one side of the guide sleeve is connected and fixed with the mounting vertical plate through a positioning rod, a guide post is in sliding fit in the guide sleeve, the upper end of the guide post is connected with one end of a force conversion hinge, the other end of the force conversion hinge is connected with an output rod of the output end of the piezoelectric stack driver, and the lower end of the guide post is connected with a pressure head which is matched with a test piece supporting block and used for generating downward pressure on a test piece;
a first protective sleeve matched with a second protective sleeve is integrally arranged at the lower end of the guide sleeve, and a sealing element is arranged between the first protective sleeve and the second protective sleeve;
the inner wall of the outer side of the second protective sleeve is provided with a plurality of image acquisition blocks for acquiring test images of the test piece, the image acquisition blocks are distributed on the outer side of the second protective sleeve in an array mode, and the image acquisition blocks are electrically connected with the data input end of the control panel through transmission lines;
the second protective sleeve and the first protective sleeve are also provided with positioning pieces for auxiliary fixing of the test piece based on negative pressure adsorption;
as a further scheme of the invention: the setting element includes the gas tube of being connected with the inlet end of first lag, is equipped with the solenoid valve that is used for damming on the gas tube, the pump that is used for the air feed is connected to the inlet end of gas tube, the setting element is still including setting up at the inside exhaust chamber of support column, exhaust chamber and external intercommunication, the toper fixture block that sets up at the support column top is connected to the exhaust chamber upper end, test piece supporting shoe lower extreme is equipped with the toper draw-in groove relative with the toper fixture block, the air vent that a plurality of and toper draw-in groove are linked together is seted up on test piece supporting shoe surface, the air vent is vertical hole.
As a still further scheme of the invention: the image acquisition block is an acquisition end of a scanning electron microscope or a transmission electron microscope.
As a still further scheme of the invention: and a sealing ring is arranged between the second protective sleeve and the fixed cylinder.
As a still further scheme of the invention: and the air inlet end of the inflator pump is connected with an inert gas storage box.
As a still further scheme of the invention: the sealing element comprises an annular sealing groove arranged at the lower end of the second protecting sleeve and an annular sealing ring arranged at the lower end of the first protecting sleeve, and the sealing ring is matched with the sealing groove, so that the sealing property between the two protecting sleeves is ensured.
As a still further scheme of the invention: the inert gas is nitrogen or argon.
A test method of an in-situ nano indentation test device comprises the steps of placing a test piece on the upper end of a support block of the test piece, driving a second protective sleeve to move upwards through a telescopic rod to be in butt joint with a first protective sleeve to form a test area, driving a pressure head to generate downward pressure on the test piece through a matching force conversion hinge and a guide column of a piezoelectric stack driver, transmitting detected pressure and displacement values to a control panel through the piezoelectric stack driver and a precise displacement sensor, obtaining mechanical data of the test piece through calculation, and collecting deformation images of the test piece from multiple angles by a plurality of image collecting blocks in the test process.
Compared with the prior art, the invention has the beneficial effects that: according to the invention, a closed environment is established in the test area, the annular image acquisition points are designed, so that dead-angle-free shooting is carried out, the test piece can be prevented from being broken and damaging workers by the closed detection mode, in addition, the adsorption force is established by utilizing negative pressure, so that the test piece is fixed without arranging a clamp, the broken test piece can be adsorbed and fixed by the negative pressure fixing mode, the later-stage cleaning is convenient, and the test piece support block is detachably arranged, so that the later-stage replacement is also convenient.
Drawings
FIG. 1 is a schematic structural diagram of the present invention.
Fig. 2 is a schematic view of the internal structure of the present invention.
Fig. 3 is a partial enlarged view of the structure of the present invention.
Wherein: the device comprises a base 1, a sealing ring 2, a sealing groove 3, a control panel 4, a force conversion hinge 5, an output rod 6, a piezoelectric stack driver 7, an installation vertical plate 8, an inflator pump 9, an electromagnetic valve 10, a guide post 11, a guide sleeve 12, a pressure head 13, a first protective sleeve 14, an image acquisition block 15, a second protective sleeve 16, a buffer block 17, a push rod 18, an expansion rod 19, a test piece 20, a support post 21, a conical clamping groove 22, a conical clamping block 23, a test piece supporting block 24, a fixing cylinder 25 and a transmission line 41.
Detailed Description
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on those shown in the drawings, and are used only for convenience in describing the present invention and for simplicity in description, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present invention. Furthermore, the terms "first", "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art through specific situations.
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example 1
Referring to fig. 1-3, in the embodiment of the present invention, an in-situ nanoindentation testing apparatus includes a base 1 and an installation vertical plate 8 disposed at a left upper end of the base 1, a fixed cylinder 25 is disposed on the base 1 on a right side of the installation vertical plate 8, a supporting column 21 is disposed inside the fixed cylinder 25, a precision displacement sensor for detecting a deformation stroke of a test piece 20 is connected to a lower end of the supporting column 21, a test piece supporting block 24 for placing the test piece 20 is disposed at an upper end of the supporting column 21, a second protecting sleeve 16 is slidably sleeved outside an upper end of the fixed cylinder 25, a lower end of the second protecting sleeve 16 is connected to a telescopic rod 19 for driving the second protecting sleeve to slide up and down along the fixed cylinder 25, a sealing ring is disposed between the second protecting sleeve 16 and the fixed cylinder 25, a push rod 18 is disposed at an;
a guide sleeve 12 is arranged above the second protective sleeve 16, one side of the guide sleeve 12 is fixedly connected with the mounting vertical plate 8 through a positioning rod, a guide post 11 is slidably matched in the guide sleeve 12, the upper end of the guide post 11 is connected with one end of a force conversion hinge 5, the other end of the force conversion hinge 5 is connected with an output rod 6 at the output end of the piezoelectric stack driver 7, and the lower end of the guide post 11 is connected with a pressure head 13 which is matched with a test piece supporting block 24 and used for generating downward pressure on a test piece 20;
a first protective sleeve 14 matched with a second protective sleeve 16 is integrally arranged at the lower end of the guide sleeve 12, and a sealing element is arranged between the first protective sleeve 14 and the second protective sleeve 16;
the inner wall of the outer side of the second protective sleeve 16 is provided with a plurality of image acquisition blocks 15 for acquiring test images of the test piece 20, the image acquisition blocks 15 are distributed outside the second protective sleeve 16 in an array manner, the image acquisition blocks 15 are acquisition ends of a Scanning Electron Microscope (SEM) or a Transmission Electron Microscope (TEM), and the image acquisition blocks 15 are electrically connected with a data input end of the control panel 4 through transmission lines 41, so that when a test is carried out, a plurality of image acquisition blocks 15 can shoot the test process of the test piece 20 from a plurality of angles, and therefore shooting dead angles are eliminated;
the second protective sleeve 16 and the first protective sleeve 14 are also provided with positioning parts for assisting in fixing the test piece 20 based on negative pressure adsorption;
the setting element includes the gas tube of being connected with the inlet end of first lag 14, is equipped with the solenoid valve 10 that is used for damming on the gas tube, the pump 9 that is used for the air feed is connected to the inlet end of gas tube, the setting element is still including setting up at the inside exhaust chamber of support column 21, exhaust chamber and external intercommunication, the toper fixture block 23 that sets up at support column 21 top is connected to the exhaust chamber upper end, 24 lower extremes of test piece supporting shoe are equipped with the toper draw-in groove 22 relative with toper fixture block 23, the air vent that a plurality of and toper draw-in groove 22 are linked together is seted up on 24 surfaces of test piece supporting shoe, the air vent is vertical hole. Thus, the test piece 20 positioned at the top of the test piece supporting block 24 can be adsorbed and fixed by negative pressure, so that the fixation of the test piece 20 is completed, and even if the test piece 20 is broken in the test process, fragments of the test piece 20 can be adsorbed and collected at the top of the test piece supporting block 24, so that the collection in the later period can be facilitated, and the influence on the next test can not be caused;
in practical use, gas is filled into the sealed chamber formed by the two protective sleeves through the inflator pump 9 and then is discharged through the vent hole, so that negative pressure adsorption force is generated at the test piece supporting block 24, and the test piece 20 is fixed;
the air inlet end of the inflator pump 9 is connected with an inert gas storage tank, so that high temperature is prevented from being generated when the test piece 20 is extruded, and oxygen in the air is enabled to oxidize the test piece 20;
the sealing element comprises an annular sealing groove 3 arranged at the lower end of the second protecting sleeve 16 and an annular sealing ring 2 arranged at the lower end of the first protecting sleeve 14, and the sealing ring 2 is matched with the sealing groove 3, so that the sealing property between the two protecting sleeves is ensured.
It should be noted that: the buffer block enables the compression degree between the two protective sleeves to have a certain interval, and damage to the two protective sleeves in the test process is avoided;
the working principle of the invention is as follows: the test piece 20 is placed at the upper end of the test piece supporting block 24, the second protective sleeve 16 is driven to move upwards through the telescopic rod and is in butt joint with the first protective sleeve 14 to form a test area, the piezoelectric stack driver 7 is matched with the force conversion hinge 5 and the guide column 11 for transmission, so that the pressure head 13 is driven to generate downward pressure on the test piece 20, the piezoelectric stack driver 7 and the precise displacement sensor can transmit detected pressure and displacement values to the control panel 4, mechanical data of the test piece 20 can be obtained through calculation, and in the test process, the plurality of image acquisition blocks 15 can acquire deformation images of the test piece 20 from multiple angles.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.

Claims (8)

1. An in-situ nano indentation testing device comprises a base (1) and a mounting vertical plate (8) arranged at the left upper end of the base, wherein a fixed cylinder (25) is arranged on the base (1) on the right side of the mounting vertical plate (8), a supporting column (21) is arranged inside the fixed cylinder (25), the lower end of the supporting column (21) is connected with a precision displacement sensor for detecting the deformation stroke of a test piece (20), a test piece supporting block (24) for placing the test piece (20) is arranged at the upper end of the supporting column (21), a second protective sleeve (16) is slidably sleeved outside the upper end of the fixed cylinder (25), the lower end of the second protective sleeve (16) is connected with a telescopic rod (19) for driving the second protective sleeve to slide up and down along the fixed cylinder (25), a push rod (18) is arranged at the output end of the telescopic rod (19), and a;
the piezoelectric stacking device is characterized in that a guide sleeve (12) is arranged above the second protective sleeve (16), one side of the guide sleeve (12) is fixedly connected with a mounting vertical plate (8) through a positioning rod, a guide post (11) is in sliding fit in the guide sleeve (12), the upper end of the guide post (11) is connected with one end of a force conversion hinge (5), the other end of the force conversion hinge (5) is connected with an output rod (6) at the output end of a piezoelectric stacking driver (7), and the lower end of the guide post (11) is connected with a pressure head (13) which is matched with a test piece supporting block (24) and used for generating downward pressure on a test piece (20);
a first protective sleeve (14) matched with a second protective sleeve (16) is integrally arranged at the lower end of the guide sleeve (12), and a sealing element is arranged between the first protective sleeve (14) and the second protective sleeve (16);
the inner wall of the outer side of the second protective sleeve (16) is provided with a plurality of image acquisition blocks (15) used for acquiring test images of the test piece (20), the image acquisition blocks (15) are distributed on the outer side of the second protective sleeve (16) in an array mode, and the image acquisition blocks (15) are electrically connected with the data input end of the control panel (4) through transmission lines (41);
and positioning pieces for assisting in fixing the test piece (20) based on negative pressure adsorption are further arranged on the second protective sleeve (16) and the first protective sleeve (14).
2. The in-situ nanoindentation testing device according to claim 1, wherein the positioning element comprises an inflation tube connected with an air inlet end of the first protective sleeve (14), the inflation tube is provided with an electromagnetic valve (10) for intercepting flow, the air inlet end of the inflation tube is connected with an inflator pump (9) for supplying air, the positioning element further comprises an exhaust cavity arranged inside the supporting column (21), the exhaust cavity is communicated with the outside, the upper end of the exhaust cavity is connected with a conical clamping block (23) arranged at the top of the supporting column (21), the lower end of the test piece supporting block (24) is provided with a conical clamping groove (22) opposite to the conical clamping block (23), the surface of the test piece supporting block (24) is provided with a plurality of vent holes communicated with the conical clamping groove (22), and the vent holes are vertical holes.
3. The in-situ nanoindentation testing device of claim 1, wherein the image collection block (15) is a collection end of a scanning electron microscope or a transmission electron microscope.
4. The in-situ nanoindentation test device of claim 1, wherein a sealing ring is disposed between the second protective sleeve (16) and the stationary sleeve (25).
5. The in-situ nanoindentation testing device of claim 2, wherein a gas inlet end of the inflator pump (9) is connected to an inert gas storage tank.
6. The in-situ nanoindentation test device of claim 1, wherein the sealing member comprises an annular sealing groove (3) disposed at a lower end of the second protective sheath (16) and an annular sealing ring (2) disposed at a lower end of the first protective sheath (14), and the sealing ring (2) is engaged with the sealing groove (3) so as to ensure sealing performance between the two protective sheaths.
7. The in-situ nanoindentation testing device of claim 5, wherein the inert gas is nitrogen or argon.
8. The testing method of the in-situ nanoindentation testing device as defined in any one of claims 1 through 7, wherein a test piece (20) is placed at the upper end of a test piece supporting block (24), then the second protective sleeve (16) is driven by a telescopic rod to move upwards to be in butt joint with the first protective sleeve (14) to construct a testing area, then the piezoelectric stack driver (7) is matched with the force conversion hinge (5) and the guide post (11) to drive the pressure head (13) to generate downward pressure on the test piece (20), the piezoelectric stack driver (7) and the precise displacement sensor can transmit detected pressure and displacement values to the control panel (4), mechanical data of the test piece (20) can be obtained through calculation, and during testing, a plurality of image acquisition blocks (15) can acquire deformation images of the test piece (20) from multiple angles.
CN202010656965.1A 2020-07-09 2020-07-09 In-situ nano indentation testing device and method Pending CN111929154A (en)

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