CN111913366A - High-speed continuous automatic exposure machine - Google Patents
High-speed continuous automatic exposure machine Download PDFInfo
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- CN111913366A CN111913366A CN202010731199.0A CN202010731199A CN111913366A CN 111913366 A CN111913366 A CN 111913366A CN 202010731199 A CN202010731199 A CN 202010731199A CN 111913366 A CN111913366 A CN 111913366A
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70716—Stages
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
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Abstract
本发明公开了一种高速连续自动曝光机,包括支撑台,所述支撑台的上端固定连接有若干个支撑柱,所述支撑柱的上端孤独感连接有工作台板,所述工作台板的上端后部固定连接有连接架,所述连接架的前端上部固定连接有横移机构,所述横移机构的前部活动连接有升降机构,所述连接架的上端中部固定连接有一号机座,所述一号机座的上端固定连接有一号电机,所述连接架的上端左部固定连接有支撑架,所述支撑架的下端前部固定连接有曝光器。本发明所述的一种高速连续自动曝光机,进料‑曝光‑送料等作业流程全自动化,曝光速度快,不需要操作员进行放框准备,省去了不必要的等待时间,提高生产效率,提高了产能,并能节约电能消耗。
The invention discloses a high-speed continuous automatic exposure machine, comprising a support table, the upper end of the support table is fixedly connected with a plurality of support columns, the upper end of the support column is connected with a worktable, and the upper end of the support A connecting frame is fixedly connected to the rear of the upper end, a traverse mechanism is fixedly connected to the upper part of the front end of the connecting frame, a lifting mechanism is movably connected to the front of the traverse mechanism, and the middle part of the upper end of the connecting frame is fixedly connected to a No. A No. 1 motor is fixedly connected to the upper end of the No. 1 machine base, a support frame is fixedly connected to the left part of the upper end of the connecting frame, and an exposure device is fixedly connected to the front part of the lower end of the support frame. The high-speed continuous automatic exposure machine described in the present invention has fully automatic operation processes such as feeding-exposure-feeding, high exposure speed, no need for operators to prepare frames, saves unnecessary waiting time, and improves production efficiency , improve the production capacity, and can save power consumption.
Description
技术领域technical field
本发明涉及曝光机技术领域,特别涉及一种高速连续自动曝光机。The invention relates to the technical field of exposure machines, in particular to a high-speed continuous automatic exposure machine.
背景技术Background technique
随着电子技术的发展,线路板(PCB/FPC等)的应用越来越广泛,对于其加工制造的技术要求越来越高。通常,线路板曝光是线路板制造过程中的一道重要工序,分为内层曝光、外层曝光及防焊曝光三种情况。目前,对线路板进行曝光通常在曝光机中实现,曝光机一包括有CCD机构、对位机构和光源机构,CCD机构和对位机构配合完成线路板的对位,光源机构完成曝光。传统技术中,半自动防焊曝光机采用双框交替进出的模式,这种方式的局限性在于,由于防焊曝光制程需要能量较高,曝光时间较长,当曝光区产品曝光未完成时,操作员已经做好放框准备,需要等待,不仅会降低生产效率、影响产能,而且需耗费较多的电能。故此,我们提出一种高速连续自动曝光机。With the development of electronic technology, the application of circuit boards (PCB/FPC, etc.) is more and more extensive, and the technical requirements for its processing and manufacturing are getting higher and higher. Usually, circuit board exposure is an important process in the circuit board manufacturing process, which is divided into three situations: inner layer exposure, outer layer exposure and solder mask exposure. At present, the exposure of circuit boards is usually realized in an exposure machine. The first exposure machine includes a CCD mechanism, an alignment mechanism and a light source mechanism. The CCD mechanism and the alignment mechanism cooperate to complete the alignment of the circuit board, and the light source mechanism completes the exposure. In the traditional technology, the semi-automatic solder mask exposure machine adopts the mode of alternating in and out of double frames. The limitation of this method is that because the solder mask exposure process requires high energy and long exposure time, when the exposure of the product in the exposure area is not completed, the operation The staff is ready to put the frame and need to wait, which will not only reduce the production efficiency and affect the production capacity, but also consume more power. Therefore, we propose a high-speed continuous automatic exposure machine.
发明内容SUMMARY OF THE INVENTION
本发明的主要目的在于提供一种高速连续自动曝光机,可以有效解决背景技术中的问题。The main purpose of the present invention is to provide a high-speed continuous automatic exposure machine, which can effectively solve the problems in the background art.
为实现上述目的,本发明采取的技术方案为:To achieve the above object, the technical scheme adopted in the present invention is:
一种高速连续自动曝光机,包括支撑台,所述支撑台的上端固定连接有若干个支撑柱,所述支撑柱的上端孤独感连接有工作台板,所述工作台板的上端后部固定连接有连接架,所述连接架的前端上部固定连接有横移机构,所述横移机构的前部活动连接有升降机构,所述升降机构的下端左部和下端右部分别固定连接有一号气动夹爪和二号气动夹爪,所述连接架的上端中部固定连接有一号机座,所述一号机座的上端固定连接有一号电机,所述一号电机的输出端贯穿一号机座的前端并穿出固定连接有一号连接杆,所述一号连接杆远离一号电机的一部穿插固定连接有连接柱,所述连接柱的前部与升降机构的上部穿插活动连接,所述连接架的上端左部固定连接有支撑架,所述支撑架的下端前部固定连接有曝光器。A high-speed continuous automatic exposure machine includes a support table, the upper end of the support table is fixedly connected with a plurality of support columns, the upper end of the support column is connected with a worktable, and the upper end of the worktable is fixed at the rear A connecting frame is connected, the upper part of the front end of the connecting frame is fixedly connected with a traverse mechanism, the front part of the traverse mechanism is movably connected with a lifting mechanism, and the lower left part of the lower end and the lower right part of the lower end are fixedly connected with a number one. Pneumatic gripper and No. 2 pneumatic gripper, the middle part of the upper end of the connecting frame is fixedly connected with a No. 1 frame, the upper end of the No. 1 frame is fixedly connected with a No. 1 motor, and the output end of the No. 1 motor runs through the No. 1 motor The front end of the seat is fixedly connected with a No. 1 connecting rod. A part of the No. 1 connecting rod away from the No. 1 motor is inserted and fixedly connected with a connecting column. A support frame is fixedly connected to the upper left part of the connecting frame, and an exposure device is fixedly connected to the front part of the lower end of the support frame.
优选的,所述工作台板的上端中部固定连接有曝光台和暂存台,所述暂存台设置在曝光台的右侧,所述曝光台与暂存台之间的距离等于一号气动夹爪与二号气动夹爪之间的距离,所述曝光台设置在曝光器的正下方。Preferably, an exposure stage and a temporary storage stage are fixedly connected to the middle of the upper end of the worktable, the temporary storage stage is arranged on the right side of the exposure stage, and the distance between the exposure stage and the temporary storage stage is equal to the No. 1 pneumatic The distance between the clamping jaw and the No. 2 pneumatic clamping jaw, the exposure stage is set directly below the exposure device.
优选的,所述工作台板的上端左前部固定连接有二号机座,所述二号机座的上端固定连接有二号电机,所述二号电机的输出端贯穿二号机座的后端并穿插固定连接有二号连接杆,所述二号连接杆的后端固定连接有三号气动夹爪,所述三号气动夹爪与曝光台位置相配合。Preferably, the No. 2 machine base is fixedly connected to the left front of the upper end of the worktable, the No. 2 motor is fixedly connected to the upper end of the No. 2 machine base, and the output end of the No. 2 motor penetrates the rear of the No. 2 machine base. A No. 2 connecting rod is fixedly connected to the end of the No. 2 connecting rod. The rear end of the No. 2 connecting rod is fixedly connected with a No. 3 pneumatic gripper, and the No. 3 pneumatic gripper is matched with the position of the exposure table.
优选的,所述连接架为L形板,所述连接架的下端后部与工作台板的上端后部之间固定连接有加强柱,所述连接架的右下部开设有通口。Preferably, the connecting frame is an L-shaped plate, a reinforcing column is fixedly connected between the lower end rear part of the connecting frame and the upper end rear part of the worktable, and a through opening is opened in the lower right part of the connecting frame.
优选的,所述横移机构包括连接板,所述连接板的前端开设有卡槽,所述卡槽内卡接固定有滑架,所述滑架的前部滑动连接有两个复合滑块,所述复合滑块的后部和前部分别开设有一号滑槽和二号滑槽,所述连接板的后端与连接架的前端上部固定连接。Preferably, the traverse mechanism includes a connecting plate, a front end of the connecting plate is provided with a card slot, a carriage is fastened and fixed in the card slot, and two composite sliding blocks are slidably connected to the front of the carriage. , the rear part and the front part of the composite slider are respectively provided with a No. 1 chute and a No. 2 chute, and the rear end of the connecting plate is fixedly connected with the upper part of the front end of the connecting frame.
优选的,所述滑架为工字形钢架,所述滑架的前部滑动连接在一号滑槽内,所述一号滑槽为水平设置,所述二号滑槽为垂直设置。Preferably, the sliding frame is an I-shaped steel frame, and the front part of the sliding frame is slidably connected in the No. 1 chute, the No. 1 chute is set horizontally, and the No. 2 chute is set vertically.
优选的,所述升降机构包括滑杆,所述滑杆设置有两个,两个所述滑杆的前端均固定连接有连接块,两个所述连接块的前端共同固定连接有安装板,所述安装板的上端固定连接有传动杆,所述安装板的前端左部和前端右部分别固定连接有一号安装架和二号安装架,所述一号安装架的下端与一号气动夹爪的上端固定连接,所述二号安装架的下端与二号气动夹爪的上端固定连接。Preferably, the lifting mechanism includes a sliding rod, there are two sliding rods, the front ends of the two sliding rods are fixedly connected with a connecting block, and the front ends of the two connecting blocks are fixedly connected with a mounting plate together, The upper end of the mounting plate is fixedly connected with a transmission rod, the front left part of the front end and the front right part of the front end of the mounting plate are fixedly connected to a No. 1 mounting frame and a No. The upper end of the claw is fixedly connected, and the lower end of the No. 2 mounting frame is fixedly connected with the upper end of the No. 2 pneumatic clamping jaw.
优选的,滑杆滑动连接在二号滑槽内,所述传动杆的上部与连接柱的前部穿插活动连接。Preferably, the sliding rod is slidably connected in the No. 2 chute, and the upper part of the transmission rod is interspersed and movably connected with the front part of the connecting column.
与现有技术相比,本发明具有如下有益效果:Compared with the prior art, the present invention has the following beneficial effects:
在使用时,先在本高速连续自动曝光机的右侧安装进料输送带,且进料输送带呈前后方向设置,在本高速连续自动曝光机的左侧安装送料输送带,且送料输送带呈左右方向设置,然后,一号电机通过一号连接杆带动一号气动夹爪和二号气动夹爪作左右移动的同时作上下移动,使二号气动夹爪从进料输送带上抓取待曝光的器件并将其放置在暂存台上,使一号气动夹爪从暂存台上抓取待曝光的器件并将其放置曝光台上,使待曝光的器件被曝光器曝光,然后二号电机通过三号气动夹爪将曝光好的器件从曝光台上取下并放置在送料输送带上,完成进料-曝光-送料等作业流程,整个过程全自动化,曝光速度快,不需要操作员进行放框准备,省去了不必要的等待时间,提高生产效率,提高了产能,并能节约电能消耗。When using, first install the feeding conveyor belt on the right side of the high-speed continuous automatic exposure machine, and the feeding conveyor belt is set in the front and rear direction, install the feeding conveyor belt on the left side of the high-speed continuous automatic exposure machine, and the feeding conveyor belt Set up in the left and right direction, and then, the No. 1 motor drives the No. 1 pneumatic gripper and the No. 2 pneumatic gripper to move left and right while moving up and down through the No. 1 connecting rod, so that the No. 2 pneumatic gripper grabs from the feed conveyor belt The device to be exposed is placed on the temporary storage table, and the No. 1 pneumatic gripper grabs the device to be exposed from the temporary storage table and places it on the exposure table, so that the device to be exposed is exposed by the exposure device, and then The No. 2 motor removes the exposed device from the exposure table and places it on the feeding conveyor belt through the No. 3 pneumatic gripper, and completes the feeding-exposure-feeding process. The whole process is fully automated and the exposure speed is fast. The operator prepares the frame, eliminating unnecessary waiting time, improving production efficiency, increasing productivity, and saving power consumption.
附图说明Description of drawings
图1为本发明一种高速连续自动曝光机的整体结构图;Fig. 1 is the overall structure diagram of a kind of high-speed continuous automatic exposure machine of the present invention;
图2为本发明一种高速连续自动曝光机的后视结构示意图;Fig. 2 is the rear view structure schematic diagram of a kind of high-speed continuous automatic exposure machine of the present invention;
图3为本发明一种高速连续自动曝光机的横移机构的结构示意图;3 is a schematic structural diagram of a traverse mechanism of a high-speed continuous automatic exposure machine of the present invention;
图4为本发明一种高速连续自动曝光机的复合滑块的结构示意图;4 is a schematic structural diagram of a composite slider of a high-speed continuous automatic exposure machine of the present invention;
图5为本发明一种高速连续自动曝光机的升降机构的结构示意图。5 is a schematic structural diagram of a lifting mechanism of a high-speed continuous automatic exposure machine of the present invention.
图中:1、支撑台;2、支撑柱;3、工作台板;4、连接架;5、横移机构;6、升降机构;7、一号机座;8、一号电机;9、一号连接杆;10、连接柱;11、支撑架;12、曝光器;13、一号气动夹爪;14、二号气动夹爪;15、曝光台;16、暂存台;17、二号机座;18、二号电机;19、二号连接杆;20、三号气动夹爪;21、加强柱;51、连接板;52、卡槽;53、滑架;54、复合滑块;55、一号滑槽;56、二号滑槽;61、滑杆;62、连接块;63、安装板;64、传动杆;65、一号安装架;66、二号安装架。In the figure: 1. Supporting table; 2. Supporting column; 3. Working table board; 4. Connecting frame; 5. Traverse mechanism; 6. Lifting mechanism; No. 1 connecting rod; 10, connecting column; 11, supporting frame; 12, exposure device; 13, No. 1 pneumatic gripper; 14, No. 2 pneumatic gripper; 15, exposure table; 16, temporary storage table; 17, two No. frame; 18, No. 2 motor; 19, No. 2 connecting rod; 20, No. 3 pneumatic gripper; 21, Reinforcing column; 51, connecting plate; 52, card slot; 53, sliding frame; 54, composite slider ; 55, No. 1 chute; 56, No. 2 chute; 61, sliding rod; 62, connecting block; 63, mounting plate; 64, transmission rod; 65, No. 1 mounting frame; 66, No. 2 mounting frame.
具体实施方式Detailed ways
为使本发明实现的技术手段、创作特征、达成目的与功效易于明白了解,下面结合具体实施方式,进一步阐述本发明。In order to make the technical means, creative features, achievement goals and effects realized by the present invention easy to understand, the present invention will be further described below with reference to the specific embodiments.
在本发明的描述中,需要说明的是,术语“上”、“下”、“内”、“外”“前端”、“后端”、“两端”、“一端”、“另一端”等指示的方位或位置关系为基于附图所示的方位或位置关系,仅是为了便于描述本发明和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本发明的限制。此外,术语“第一”、“第二”仅用于描述目的,而不能理解为指示或暗示相对重要性。In the description of the present invention, it should be noted that the terms "upper", "lower", "inner", "outer", "front end", "rear end", "two ends", "one end" and "the other end" The orientation or positional relationship indicated by etc. is based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the indicated device or element must have a specific orientation, with a specific orientation. The orientation configuration and operation are therefore not to be construed as limitations of the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed to indicate or imply relative importance.
在本发明的描述中,需要说明的是,除非另有明确的规定和限定,术语“安装”、“设置有”、“连接”等,应做广义理解,例如“连接”,可以是固定连接,也可以是可拆卸连接,或一体地连接;可以是机械连接,也可以是电连接;可以是直接相连,也可以通过中间媒介间接相连,可以是两个元件内部的连通。对于本领域的普通技术人员而言,可以具体情况理解上述术语在本发明中的具体含义。In the description of the present invention, it should be noted that, unless otherwise expressly specified and limited, the terms "installed", "provided with", "connected", etc. should be understood in a broad sense, for example, "connected" may be a fixed connection It can also be a detachable connection or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or the internal communication between the two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood in specific situations.
如图1-5所示,一种高速连续自动曝光机,包括支撑台1,支撑台1的上端固定连接有若干个支撑柱2,支撑柱2的上端孤独感连接有工作台板3,工作台板3的上端后部固定连接有连接架4,连接架4的前端上部固定连接有横移机构5,横移机构5的前部活动连接有升降机构6,升降机构6的下端左部和下端右部分别固定连接有一号气动夹爪13和二号气动夹爪14,连接架4的上端中部固定连接有一号机座7,一号机座7的上端固定连接有一号电机8,一号电机8的输出端贯穿一号机座7的前端并穿出固定连接有一号连接杆9,一号连接杆9远离一号电机8的一部穿插固定连接有连接柱10,连接柱10的前部与升降机构6的上部穿插活动连接,连接架4的上端左部固定连接有支撑架11,支撑架11的下端前部固定连接有曝光器12。As shown in Figures 1-5, a high-speed continuous automatic exposure machine includes a support table 1, the upper end of the support table 1 is fixedly connected with a number of
工作台板3的上端中部固定连接有曝光台15和暂存台16,暂存台16设置在曝光台15的右侧,曝光台15与暂存台16之间的距离等于一号气动夹爪13与二号气动夹爪14之间的距离,曝光台15设置在曝光器12的正下方,降低位置校准难度,提高曝光精度,提高自动化程度。An exposure table 15 and a temporary storage table 16 are fixedly connected to the middle of the upper end of the
工作台板3的上端左前部固定连接有二号机座17,二号机座17的上端固定连接有二号电机18,二号电机18的输出端贯穿二号机座17的后端并穿插固定连接有二号连接杆19,二号连接杆19的后端固定连接有三号气动夹爪20,三号气动夹爪20与曝光台15位置相配合,可以起到从曝光台15上抓取曝光好的器件的作用,是实现自动化曝光的重要组成部分。The upper left front part of the
连接架4为L形板,连接架4的下端后部与工作台板3的上端后部之间固定连接有加强柱21,提高连接架4的支撑稳定性,连接架4的右下部开设有通口,可以为设置进料输送带提供安装空间。The connecting frame 4 is an L-shaped plate, and a reinforcing
横移机构5包括连接板51,连接板51的前端开设有卡槽52,卡槽52内卡接固定有滑架53,滑架53的前部滑动连接有两个复合滑块54,复合滑块54的后部和前部分别开设有一号滑槽55和二号滑槽56,连接板51的后端与连接架4的前端上部固定连接,可以起到使一号气动夹爪13和二号气动夹爪14左右移动的作用,便于抓取待曝光的器件。The
滑架53为工字形钢架,滑架53的前部滑动连接在一号滑槽55内,一号滑槽55为水平设置,二号滑槽56为垂直设置,可以使一号气动夹爪13和二号气动夹爪14实现左右移动的同时实现上下移动。The sliding
升降机构6包括滑杆61,滑杆61设置有两个,两个滑杆61的前端均固定连接有连接块62,两个连接块62的前端共同固定连接有安装板63,安装板63的上端固定连接有传动杆64,安装板63的前端左部和前端右部分别固定连接有一号安装架65和二号安装架66,一号安装架65的下端与一号气动夹爪13的上端固定连接,二号安装架66的下端与二号气动夹爪14的上端固定连接,可以起到抓取待曝光的器件的作用。The lifting mechanism 6 includes a sliding
滑杆61滑动连接在二号滑槽56内,传动杆64的上部与连接柱10的前部穿插活动连接,可以使一号电机8起到驱动一号气动夹爪13和二号气动夹爪14实现左右移动的同时实现上下移动的作用。The sliding
需要说明的是,本发明为一种高速连续自动曝光机,在使用时,先在本高速连续自动曝光机的右侧安装进料输送带,且进料输送带呈前后方向设置,在本高速连续自动曝光机的左侧安装送料输送带,且送料输送带呈左右方向设置,然后,启动一号电机8,一号电机8驱动一号连接杆9向右转动,在一号连接杆9右转的过程中,一号连接杆9通过传动杆64带动升降机构6的其他结构运动,使升降机构6上的滑杆61在二号滑槽56内先上移后下移,并同时使复合滑块54通过一号滑槽55在滑架53上右移,使安装板63在右移的过程中先上移后下移,从而带动一号气动夹爪13和二号气动夹爪14右移动的同时先上移后下移,在二号气动夹爪14下移到进料输送带上后,使二号气动夹爪14从进料输送带上抓取待曝光的器件,使一号气动夹爪13从暂存台16上抓取待曝光的器件,然后使一号电机8反向驱动,使一号连接杆9左转,使一号气动夹爪13和二号气动夹爪14左移动的同时先上移后下移,使二号气动夹爪14从进料输送带上抓取的待曝光的器件放置在暂存台16上,使一号气动夹爪13从暂存台16上抓取的待曝光的器件放置在曝光台15上,使待曝光的器件被曝光器12曝光,在曝光后,然后启动二号电机18,使二号电机18带动二号连接杆19转动,使三号气动夹爪20将曝光好的器件从曝光台15上取下并放置在送料输送带上,完成进料-曝光-送料等作业流程,整个过程全自动化,重复上述操作,能极大地加快曝光速度,提高生产效率。It should be noted that the present invention is a high-speed continuous automatic exposure machine. When in use, a feeding conveyor belt is first installed on the right side of the high-speed continuous automatic exposure machine, and the feeding conveyor belt is arranged in the front and rear directions. The feeding conveyor belt is installed on the left side of the continuous automatic exposure machine, and the feeding conveyor belt is set in the left and right direction. Then, start the No. 1
以上显示和描述了本发明的基本原理和主要特征和本发明的优点。本行业的技术人员应该了解,本发明不受上述实施例的限制,上述实施例和说明书中描述的只是说明本发明的原理,在不脱离本发明精神和范围的前提下,本发明还会有各种变化和改进,这些变化和改进都落入要求保护的本发明范围内。本发明要求保护范围由所附的权利要求书及其等效物界定。The basic principles and main features of the present invention and the advantages of the present invention have been shown and described above. Those skilled in the art should understand that the present invention is not limited by the above-mentioned embodiments, and the descriptions in the above-mentioned embodiments and the description are only to illustrate the principle of the present invention. Without departing from the spirit and scope of the present invention, the present invention will have Various changes and modifications fall within the scope of the claimed invention. The claimed scope of the present invention is defined by the appended claims and their equivalents.
Claims (8)
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