CN111895914A - Displacement sensing system based on double-chain SNAP structure microcavity array - Google Patents
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Abstract
The invention discloses a displacement sensing system based on a double-chain SNAP structure microcavity array. The tunable laser generates sweep-frequency laser, the sweep-frequency laser enters the double-chain SNAP structural microcavity through the polarization controller and the coupling waveguide, and the photoelectric detector acquires a resonance spectrum and sends the resonance spectrum to the computer for processing. When the micro-cavity moves, displacement sensing of half SNAP structure length is realized based on resonance spectrum characteristics of the single SNAP structure micro-cavity; and when the length of each SNAP structure is over half, the full-range displacement sensing is realized by sequentially switching resonance spectrums generated by SNAP micro-cavities in the double chains. The displacement sensing system can realize high-precision sensing of large-range displacement, and has the advantages of small volume, low cost and microstructure measurement.
Description
Technical Field
The invention relates to the technical field of optical sensing, in particular to a displacement sensing system based on a double-chain type surface nano-scale axial photon (SNAP) structure microcavity array.
Background
In the last two decades, precision and ultra-precision machining technologies, such as ultra-precision machining tools, lithography machines and other equipment, have been developed rapidly, and fundamentally depend on the development of ultra-precision displacement measurement equipment. The ultra-precise displacement measuring equipment comprises a magnetoelectric sensor, a photoelectric encoder, a grating ruler measuring system and the like. The resolution of the magnetoelectric sensing system is difficult to achieve submicron level, and the problems of difficult integration of magnetic stripes, magnetic leakage and the like exist. The photoelectric encoder comprises a photoelectric encoder and a grating ruler which are used for measuring in a photoelectric sensing mode, and has the problems of high manufacturing cost, large volume, high requirement on actual environment and the like. The SNAP structure microcavity as a high-performance optical resonant cavity has great potential in the field of high-precision displacement sensing. Theoretically, the displacement sensor can reach submicron precision, is not easy to be interfered by external electromagnetic interference, is manufactured based on optical fibers, has low cost and small volume, and is suitable for high-precision displacement measurement in some microstructure fields. However, the microcavity axial size of a single SNAP structure is limited, and large-range displacement sensing is difficult to realize. Therefore, in order to solve the problem of limited axial measurement range of the SNAP structure microcavity and promote its application in the field of wide-range displacement sensing, a novel displacement sensing scheme and system need to be developed.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provides a displacement sensing system based on a double-chain SNAP structure microcavity array.
The purpose of the invention is realized by the following technical scheme:
a displacement sensing system based on a double-chain SNAP structure microcavity array mainly comprises a tunable laser, a polarization controller, a coupling waveguide, SNAP structure microcavity array double chains, a displacement device, a photoelectric detector and a computer. The tunable laser is connected with the polarization controller, the polarization controller is connected with the coupling waveguide, the coupling waveguide is connected with the photoelectric detector, the output end of the photoelectric detector is connected with the data input port of a computer, the surface nano axial photon structure microcavity array double chains are fixed on the displacement device, and the position device is arranged on the moving platform.
The tunable laser generates continuous laser with tunable wavelength and inputs the laser into an optical fiber, the polarization controller controls the polarization state of light waves in the optical fiber, the coupling waveguide couples the light waves in the optical fiber into SNAP structure micro-cavities with two chains through an evanescent field, the photoelectric detector is used for converting optical signals into electric signals, the double chains of the SNAP structure micro-cavity array are core devices of a sensing system and used for generating resonant light wave signals, and the displacement device is used for adjusting the displacement of the micro-cavity array relative to the coupling waveguide, so that the SNAP structure micro-cavity array moves relative to the coupling waveguide, and the coupling position of the micro-cavities and the waveguide is changed to change the Q value and the transmittance of a resonant mode in the micro-cavities. And the photoelectric detector is input into the computer for processing after measuring the resonance signal.
Further, the coupling waveguide may be a micro-nano tapered fiber, a coupling prism, an integrated optical waveguide, a ground tilt fiber, or a fiber grating.
Furthermore, each SNAP structure on the microcavity array is a microcavity, the SNAP structures on the two chains have the same axial length, and the longitudinal section shape of the SNAP structure can be a parabola shape, a Gaussian curve shape or a trapezoid shape.
Furthermore, the two SNAP microcavity array chains are placed in parallel, the distance is controlled to be more than 1mm, and the distance of half SNAP structure length is staggered in the axial direction.
Furthermore, ERV between the two SNAP microcavity array chains is different, so that resonance modes generated by different chains are convenient to distinguish on a resonance spectrum.
Further, the coupling waveguide is always kept in contact with the SNAP structure microcavity array during the working process.
Further, the SNAP structure microcavity array is obtained by utilizing arc discharge, carbon dioxide laser or ultraviolet light to act on optical fibers, the axial length L of a single microcavity of the SNAP structure is 0.5-1.5 mm, the number of the arrays can be determined according to actual needs without limitation, and the ERV of the surface nano axial photon structure microcavity is 10-100 nm.
The invention also discloses a method for realizing the displacement sensing system based on the surface nano axial photon structure microcavity array structure, which mainly comprises the following steps:
step S1: laser emitted from the tunable laser is acted by the polarization controller and then input into the tapered fiber waveguide, the laser is coupled into the SNAP structural microcavity through the evanescent field of the tapered fiber, corresponding resonance spectrum data are measured by the photoelectric detector, and the data input into the computer are processed to obtain a resonance spectrum.
Step S2: when the displacement device moves in a single direction, the SNAP structure microcavity array generates displacement relative to the coupling optical waveguide, accordingly, the Q value and the transmittance of each axial mode in a resonance spectrum will change, after the Q value or the transmittance is subjected to binary coding, the characteristics are identified through a computer, the position where coupling occurs can be mapped, and displacement measurement within half of the length of the SNAP structure can be realized based on the effect. Because ERV between the double-chain SNAP structure arrays is different, resonance modes of the double-chain SNAP structure arrays on a resonance spectrum can be distinguished, and on the basis, the resonance spectrum generated by SNAP micro-cavities in the double chains can be switched and used in sequence every time the length of the double-chain SNAP structure is spanned, so that full-range displacement sensing can be realized.
The working process and principle of the invention are as follows: according to the scheme, by utilizing the principle that mode field distribution and resonance spectrum characteristic parameters of the microcavity depend on cavity ERV, the SNAP structure microcavity arrays are manufactured on the optical fiber through a certain processing means, the two SNAP structure microcavity arrays are distributed in a staggered mode, the two SNAP structure microcavity arrays have half length difference of the SNAP structure, and the microcavity arrays are fixed through a displacement device and are mutually coupled with the coupling waveguide. The variation of the SNAP structure radial dimension is extremely small and is only in the nanometer level, so that the excitation of a high-order mode can be well inhibited. The change of a resonance mode is caused by changing the relative displacement of the coupling waveguide and the microcavity, the change of a corresponding Q value and the change of the light wave transmittance are represented on a mode spectrum, binary coding is carried out by utilizing the parameters, and the binary coding is mapped to a corresponding coupling position; when the parameters change, the corresponding binary codes change simultaneously, the indicated displacement also changes correspondingly, and high-resolution sensing is realized in each coding region according to the resonance mode with the highest sensitivity; and then high-resolution sensing of the displacement of half the length of the SNAP structure is realized. By arranging the SNAP structure microcavity array double chains with different ERVs, the microcavities on the two chains can be coupled with the coupling waveguide at the same time, and two resonance regions can appear on a resonance spectrum because the resonance center wavelengths of the resonance spectrum generated by the two chains are different. If the resonance data of the region with the smaller resonance wavelength is used for measuring the displacement in the length of a half SNAP structure, when the coupling waveguide is coupled with the position with the largest radius of the microcavity, the phenomenon that all even-order modes disappear appears on the resonance spectrum of the microcavity, the phenomenon is used as a switching signal, and then the resonance data of the region with the larger resonance wavelength is used for measuring the displacement of the length of the SNAP structure; the steps are repeated, and continuous measurement of the large-range displacement can be realized.
Compared with the prior art, the invention also has the following advantages:
(1) the displacement sensing system based on the double-chain SNAP structure microcavity array has submicron resolution, and is small in size, simple to manufacture, low in cost and suitable for microstructure measurement occasions.
(2) The double-chain SNAP structure microcavity array in the displacement sensing system based on the double-chain SNAP structure microcavity array provided by the invention always keeps contact with the coupling waveguide in the working process, and the weak electrostatic force between the double-chain SNAP structure microcavity array and the coupling waveguide provides stability for the system, so that the whole system has better anti-vibration interference capability.
(3) The displacement sensing system based on the double-chain SNAP structure microcavity array provided by the invention realizes large-range and high-precision displacement sensing, and overcomes the defect that the measurement of large-range displacement cannot be realized due to the fact that the axial length of a single SNAP structure microcavity is small.
Drawings
FIG. 1 is a schematic structural diagram of a displacement sensing system based on a double-chain SNAP structure microcavity array provided by the invention.
Fig. 2 is a schematic view of an installation structure of the double chains of the microcavity array of the SNAP structure and the displacement device provided by the invention.
FIG. 3 is a theoretical resonance mode spectrum of SNAP-structured microcavities with different ERVs provided by the present invention.
FIG. 4 is a graph showing the relationship between transmittance and displacement for each mode provided by the present invention.
The reference numerals in the above figures illustrate:
the method comprises the following steps of 1-tuning a laser, 2-polarization controllers, 3-coupling waveguides, 4-SNAP structure microcavity arrays, 5-displacement devices, 6-photodetectors and 7-computers.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention clearer and clearer, the present invention is further described below with reference to the accompanying drawings and examples.
Example 1:
as shown in fig. 1 to 4, the present embodiment discloses a displacement sensing system based on a microcavity array with a double-chain SNAP structure. The system is based on the resonance mode characteristics of the SNAP structure microcavity, and displacement sensing is realized by using the resonance parameter change caused by the relative displacement generated by the microcavity and the coupling waveguide 3. Two SNAP structure microcavity arrays 4 are placed in parallel, and the length of the SNAP structure is staggered by half in the axial direction.
Within half SNAP structure length, when the displacement device moves in a single direction, the SNAP structure microcavity array 4 generates displacement relative to the coupling optical waveguide 3, correspondingly, Q values and transmittances of all axial modes in a resonance spectrum will change, after binary coding is carried out on the Q values or transmittances, a mapping relation between codes and the displacement can be established, and high-resolution sensing is realized according to the resonance mode with the highest sensitivity in each coding region; on the basis, by arranging microcavity arrays with different Effective Radius Variations (ERVs), the coupling waveguide 3 is coupled with the microcavities on the two chains at the same time, and according to the microcavity coupling theory, different single chains are coupled with the coupling waveguide 3 to generate resonance spectrum regions with different resonance center wavelengths. The function of measuring the displacement in the length of the whole SNAP structure can be realized by sequentially utilizing the characteristic parameters of different resonance spectrum regions; the measurement of the displacement in the whole range can be realized by carrying out array arrangement on the micro-cavities and repeating the measurement steps. Meanwhile, the SNAP structure microcavity array 4 has the advantages of simple manufacture, low cost and small volume, and is suitable for the precise measurement of high-precision and large-range displacement of some microstructures.
Fig. 1 is a schematic structural diagram of a displacement sensing system based on a microcavity array with a double-chain SNAP structure according to the present invention, and in order to express the system principle more clearly, the sizes and proportions of all devices in the diagram do not conform to real proportions, and thus the description is given. The system comprises a tunable laser 1, a polarization controller 2, a coupling waveguide 3, a SNAP structure microcavity array double chain 4, a displacement device 5, a photoelectric detector 6 and a computer 7. The tunable laser 1 generates continuous laser with tunable wavelength and inputs the laser into the connecting optical fiber; the polarization controller 2 controls the polarization state of light waves in the optical fiber; the coupling waveguide 3 couples the light waves into the SNAP structure microcavity double-chain 4 through an evanescent field; the SNAP structure microcavity array double-chain 4 is a core device of a sensing system, is fixed on a connecting unit of a displacement device 5 and is used for frequency selection of continuous wavelength light waves; the displacement device 5 is used for changing the relative coupling position of the microcavity and the coupling waveguide, so that the reliability and the precision of the displacement sensing system are verified; the photoelectric detector 6 is used for converting the optical signal into an electric signal and acquiring resonance spectrum data of the coupling system; the computer 7 is used for processing the resonance spectrum data output by the photoelectric detector 6 and outputting and displaying the resonance spectrum data.
In this embodiment, the working wavelength of the tunable laser 1 is around 1550nm, and the line width is 300 kHz; the coupling waveguide 3 is a tapered optical fiber with a taper waist diameter of about 2; the SNAP structure microcavity array double-chain 4 is obtained by arc discharge machining, and the number of the arrays is 4. In the working process of the system, the coupling waveguide 3 is kept in contact with the SNAP structure microcavity array double chains 4, so that the stability of the coupling system is improved. Laser emitted from the tunable laser 1 enters a double chain 4 of the SNAP structure microcavity array through the coupling waveguide 3, and light waves with specific wavelengths meeting resonance conditions form resonance in the microcavity. The mode characteristic parameters (Q value and transmittance) in the resonance spectrum are influenced by the coupling condition (namely the microcavity coupling position), when the displacement device 5 makes the SNAP structure microcavity array double-chain 4 generate displacement, each axial mode characteristic parameter in the resonance spectrum changes, the displacement and the resonance spectrum characteristic parameters can be corresponded by carrying out binary coding on the characteristic parameters, and the axial displacement sensing of the SNAP structure microcavity array double-chain 4 can be realized based on the effect.
When the SNAP structure microcavity array double-chain 4 moves relative to the coupling waveguide, the measurement of the length displacement of a half SNAP structure can be realized by identifying the characteristic parameters of a single-chain a (see FIG. 2) on a mode spectrum; when the coupling waveguide is coupled with the position with the maximum radius of the microcavity, the phenomenon that all even-order modes on a resonance spectrum disappear can occur, the even-order modes are used as switching points to be switched to a mode spectrum region of the single chain b, and the displacement measurement of the length of the half SNAP structure is realized by identifying characteristic parameters of the resonance spectrum region of the single chain b; by repeating the above measurement process, continuous measurement of the displacement in the full range can be realized. On the premise of ensuring the processing quality of the SNAP structure microcavity double-chain 4, the resolution and the measuring range of the displacement sensing system are respectively determined by the order of the axial mode and the number of microcavity arrays on the single chain.
Fig. 2 is a positional relationship diagram of connection between a connection unit of the displacement device and two single chains of the SNAP microcavity array in this embodiment, the central axes of the single chain a and the single chain b are parallel to each other, and the distance between the two chains is not less than 1mm so as to avoid mutual coupling, and the two connection units of the displacement device in the diagram do not necessarily differ by half the length L/2 of the SNAP structure, but it is necessary to ensure that the two single chains have the microcavity staggered by half the length L/2 of the SNAP structure.
Fig. 3 is a theoretical resonance spectrogram of different coupling positions of the double chains 4 of the SNAP-structure microcavity array in this embodiment, the resonance spectrums of the SNAP-structure microcavities in the two chains are in different bands, wherein the resonance band of the single chain a is 1550.44-1550.68nm, the resonance band of the single chain b is 1550.75-1551nm, and the encoded signals are not repeated, so as to facilitate identification. The 8 troughs in the resonance spectrum represent the first 8 axial modes. Microcavity coupling theory shows that the characteristic parameters of the resonant mode are determined by the coupling coefficient, and the coupling coefficient is determined by the overlap integral of the mode field and the coupling waveguide mode field, so that the field distribution of each axial mode determines the variation characteristic of the Q value or transmittance of each axial mode along with the coupling position. As can be seen from fig. 3, at different coupling positions, the Q value and transmittance of each resonant mode are different and have a certain regularity.
FIG. 4 shows the transmittance of the first 8 th order axial mode in the microcavity with half the length of SNAP structure of single strand a as a function of displacement. It can be seen that for the 1 st order mode, its penetration goes through the process from large to small and then small to large during the left-to-right change of the coupling position; for the 2 nd order mode, two similar courses of change are experienced; similarly, the n-order axial mode undergoes n similar courses of change. The change rule of each-order mode characteristic parameter of the SNAP structure microcavity in the single chain b is the same. The large-range displacement sensing can be realized by comprehensively utilizing the change rule of the characteristic parameters of the axial modes of all the steps. In the sensing method, the axial distribution range of the resonance mode determines the measuring range of the displacement sensing, and the transmittance change size in unit displacement determines the resolution of the displacement sensing.
Example 2:
in this embodiment, the working wavelength of the tunable laser 1 is around 1550nm, and the line width is 300 kHz; the coupling waveguide 3 is a grinding dip angle optical fiber and is obtained by grinding the end face of a conventional optical fiber with high precision; the single SNAP structure microcavity on the SNAP structure microcavity array double-chain 4 is obtained by processing a carbon dioxide laser, the axial length of the single SNAP structure microcavity is about 300, the single SNAP structure microcavity is in a Gaussian curve shape in the radial direction, the maximum radius change is about 15nm, and the array number is 50.
Example 3:
in this embodiment, the working wavelength of the tunable laser 1 is around 1550nm, and the line width is 300 kHz; the coupling waveguide 3 is a coupling prism; the single microcavity on the double-chain 4 of the SNAP structure microcavity array is obtained by ultraviolet laser processing, the axial length of the single microcavity is about 400, the single microcavity is in a radial trapezoid shape, the maximum radius change is about 10nm, and the array number is 20.
In summary, the invention provides a displacement sensing system based on a double-chain SNAP structure microcavity array, which is based on the mode field distribution and mode spectrum structure characteristics of the SNAP structure microcavity, utilizes the characteristic that the change of displacement can cause the change of characteristic parameters of each axial mode of the SNAP structure microcavity, and realizes the sensing of the length displacement of a half SNAP structure by measuring the Q value or transmittance of each mode in a resonance spectrum and mapping the Q value or transmittance onto a corresponding binary code; through setting up two SNAP structure microcavity array single chains that have different ERV, guarantee that two resonance spectra distinguish apart so that distinguish to distinguish the order that each single chain got into the coupling from this, the mutual switching of two resonance spectra district is realized to rethread switching point, realizes the displacement continuous measurement function of a plurality of SNAP structure lengths.
The above embodiments are preferred embodiments of the present invention, but the present invention is not limited to the above embodiments, and any other changes, modifications, substitutions, combinations, and simplifications which do not depart from the spirit and principle of the present invention should be construed as equivalents thereof, and all such changes, modifications, substitutions, combinations, and simplifications are intended to be included in the scope of the present invention.
Claims (10)
1. A displacement sensing system based on a double-chain SNAP structure microcavity array is characterized by comprising a tunable laser, a polarization controller, a coupling waveguide, an SNAP structure microcavity array group, a displacement device, a photoelectric detector and a computer; one end of the polarization controller is connected with the tunable laser, and the other end of the polarization controller is connected with one end of the coupling waveguide; one end of the photoelectric detector is connected with the other end of the waveguide, and the other end of the photoelectric detector is connected with the computer; the coupling waveguide is provided with an emergent end and an incident end, and the emergent end and the incident end are arranged oppositely; the SNAP structure microcavity array group is arranged between the emergent end and the incident end of the coupling waveguide, so that laser is emitted from the emergent end and enters the incident end after passing through the SNAP structure microcavity array group; two ends of the SNAP structure micro-cavity array group are fixedly arranged on the displacement device; the displacement device is arranged on the mobile platform; the SNAP structure microcavity array group consists of a plurality of SNAP structure microcavity arrays which are arranged in parallel;
the tunable laser generates laser with continuously tunable wavelength and inputs the laser into a polarization controller, and the polarization controller controls the polarization state of the light wave in the optical fiber; the coupling waveguide couples the light waves in the optical fiber into the SNAP structure microcavity array group through an evanescent field; the photoelectric detector is used for converting the optical signal into an electric signal; the displacement device is used for adjusting the displacement of the SNAP structure microcavity array group relative to the coupling waveguide, so that the SNAP structure microcavity array group moves relative to the coupling waveguide, and the coupling position of the microcavity and the waveguide is changed, so as to change the Q value and the transmittance of a resonance mode in a coupling resonance spectrum; and the photoelectric detector is input into the computer for processing after measuring the resonance signal.
2. The displacement sensing system based on the double-chain type SNAP structure microcavity array according to claim 1, wherein the SNAP structure microcavity array group comprises a first SNAP structure microcavity array and a second SNAP structure microcavity array; the first SNAP structure micro-cavity array and the second SNAP structure micro-cavity array are parallel to each other, and the internal micro-cavity of the first SNAP structure micro-cavity array and the internal micro-cavity of the second SNAP structure micro-cavity array are arranged in a staggered mode.
3. The displacement sensing system based on the double-chain SNAP structure microcavity array according to claim 1, wherein the coupling waveguide is a micro-nano tapered fiber, a coupling prism, an integrated optical waveguide, a ground tilt angle fiber or a fiber grating.
4. The displacement sensing system based on the double-chain SNAP structure microcavity array according to claim 1, wherein each SNAP structure on the SNAP structure microcavity array set is a microcavity, and each SNAP structure microcavity array has the same axial length.
5. The displacement sensing system based on the double-chain SNAP structure microcavity array according to claim 1, wherein the shape of the longitudinal cross section of the SNAP structure in the SNAP structure microcavity array group is parabolic, Gaussian curve or trapezoid.
6. The displacement sensing system based on the double-chain SNAP structure microcavity array according to claim 2, wherein the first SNAP structure microcavity array and the second SNAP structure microcavity array are arranged in parallel, the distance is set to be more than 1mm, and the half SNAP structure length is staggered in the axial direction.
7. The displacement sensing system based on the double-chain SNAP structure microcavity array according to claim 2, wherein different effective radius variations are adopted between the first SNAP structure microcavity array and the second SNAP structure microcavity array, so that different resonance modes are generated to facilitate distinguishing on a resonance spectrum.
8. The displacement sensing system based on the double-chain SNAP structure microcavity array according to claim 1, wherein the coupling waveguide is always kept in contact with the SNAP structure microcavity array group during operation.
9. The displacement sensing system based on the double-chain SNAP structure microcavity array according to claim 1, wherein the SNAP structure microcavity array group is obtained by using arc discharge, carbon dioxide laser or ultraviolet light to act on an optical fiber; the axial length L range of a single microcavity of the SNAP structure microcavity array group is 0.5-1.5 mm, and the array number can be determined according to actual needs.
10. The displacement sensing system based on the double-chain SNAP structure microcavity array according to claim 1, wherein the effective radius variation of the SNAP structure microcavity array group is 10-100 nm.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113446947A (en) * | 2021-06-25 | 2021-09-28 | 广东工业大学 | Angular displacement sensing system and method based on double SNAP structure microcavity array |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4253239A (en) * | 1979-08-02 | 1981-03-03 | Electronic Modules Corporation | Length probe with tracing unit and switch arrangement |
| CN103575699A (en) * | 2013-11-05 | 2014-02-12 | 北京邮电大学 | Photonic crystal sensor array based on radius-graded and staggered resonant cavities |
| CN104048942A (en) * | 2014-05-13 | 2014-09-17 | 北京邮电大学 | Microcavity-staggered-reused photonic crystal sensor array structure with gradually changed waveguide vertical direction radius |
| CN106654855A (en) * | 2016-11-09 | 2017-05-10 | 西南大学 | Optical chaos generating device based on silicon photon microcavity |
| EP3312554A1 (en) * | 2016-10-24 | 2018-04-25 | Blum-Novotest GmbH | Measuring system for measurement on tools in a machine tool |
| CN108844468A (en) * | 2018-06-01 | 2018-11-20 | 广东工业大学 | A kind of displacement sensing method based on the multistage axial mode Combined Calculation of Echo Wall microcavity |
| CN108871200A (en) * | 2018-06-01 | 2018-11-23 | 广东工业大学 | A kind of probe-type micro-displacement sensing system based on nano surface axial direction photon structure Echo Wall microcavity |
| CN108873175A (en) * | 2018-06-01 | 2018-11-23 | 广东工业大学 | A kind of optical band pass filter based on single fiber coupled surface nanometer axial direction photon structure microcavity |
-
2020
- 2020-06-10 CN CN202010524947.8A patent/CN111895914B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4253239A (en) * | 1979-08-02 | 1981-03-03 | Electronic Modules Corporation | Length probe with tracing unit and switch arrangement |
| CN103575699A (en) * | 2013-11-05 | 2014-02-12 | 北京邮电大学 | Photonic crystal sensor array based on radius-graded and staggered resonant cavities |
| CN104048942A (en) * | 2014-05-13 | 2014-09-17 | 北京邮电大学 | Microcavity-staggered-reused photonic crystal sensor array structure with gradually changed waveguide vertical direction radius |
| EP3312554A1 (en) * | 2016-10-24 | 2018-04-25 | Blum-Novotest GmbH | Measuring system for measurement on tools in a machine tool |
| CN106654855A (en) * | 2016-11-09 | 2017-05-10 | 西南大学 | Optical chaos generating device based on silicon photon microcavity |
| CN108844468A (en) * | 2018-06-01 | 2018-11-20 | 广东工业大学 | A kind of displacement sensing method based on the multistage axial mode Combined Calculation of Echo Wall microcavity |
| CN108871200A (en) * | 2018-06-01 | 2018-11-23 | 广东工业大学 | A kind of probe-type micro-displacement sensing system based on nano surface axial direction photon structure Echo Wall microcavity |
| CN108873175A (en) * | 2018-06-01 | 2018-11-23 | 广东工业大学 | A kind of optical band pass filter based on single fiber coupled surface nanometer axial direction photon structure microcavity |
Non-Patent Citations (2)
| Title |
|---|
| XUEYING JIN.ET AL.: "Multiple-channel dynamic bandpass filter via radiation modes-assisted transparency in a side-coupled SNAP microcavity", 《APPLIED PHYSICS EXPRESS》 * |
| 刘正等: "基于光学微腔的MOEMS微位移传感器", 《自动化与仪表》 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113446947A (en) * | 2021-06-25 | 2021-09-28 | 广东工业大学 | Angular displacement sensing system and method based on double SNAP structure microcavity array |
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