CN108844468B - Displacement sensing method based on echo wall micro-cavity multi-order axial mode joint calculation - Google Patents
Displacement sensing method based on echo wall micro-cavity multi-order axial mode joint calculation Download PDFInfo
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Abstract
The invention discloses a displacement sensing method based on echo wall micro-cavity multi-order axial mode combined solution, which comprises the steps of obtaining multi-order axial modes and constructing a sensing model. The acquisition of a multi-order axial mode is realized through a microcavity coupling system, laser emitted by a tuned laser enters the microcavity coupling system through a polarization controller, and a photoelectric detector is used for acquiring a resonance spectrum of a microcavity; the construction of the sensing model is realized based on the resonance spectrum of different coupling positions of the microcavity, a three-dimensional surface graph of the resonance spectrum is obtained by moving the microcavity, the position coding and calibration are carried out on the three-dimensional surface graph, and the axial large-range and high-resolution displacement sensing of the microcavity is realized by combining an accurate positioning method in a coding section. The method can effectively reduce the influence of environmental factors such as external temperature change and the like on the sensing precision, and can overcome the defect that a single-mode sensing scheme is difficult to combine large range and high resolution.
Description
Technical Field
The invention belongs to the technical field of optical sensing, and particularly relates to a displacement sensing method based on echo wall micro-cavity multi-order axial mode combined resolving.
Background
The echo wall microcavity as a high-performance optical micro-resonant cavity has wide attention and application due to the extremely high Q value characteristic, and has excellent performance in the fields of micro-displacement measurement, micro-force measurement, biochemical sensing and other high-sensitivity sensing. Experiments and theories show that the Q value is 107If the whispering gallery microcavity is used for displacement sensing, the theoretical resolution can reach the sub-nanometer level.
In recent years, displacement sensing research based on echo wall micro-cavities is increasingly widespread, and the displacement sensing research can be divided into two types according to different detection modes: 1) displacement sensing is realized based on the shift of a resonance peak caused by micro-cavity deformation; 2) and displacement sensing is realized based on the change of the microcavity coupling condition. The first scheme mainly converts displacement into deformation of a microcavity, displacement detection is realized by constructing the relation between the deformation and resonance peak shift, and high-precision measurement is difficult to realize in an actual environment due to the fact that the center wavelength of the resonance peak is extremely sensitive to external temperature. The second scheme mainly converts displacement into coupling condition change, further changes the Q value and the transmittance of the resonant mode in the cavity, and realizes displacement sensing based on the Q value or the transmittance. In view of the need to develop a new displacement sensing scheme based on the microcavity, the present invention provides a displacement sensing scheme based on the microcavity multi-order axial mode joint solution, which can simultaneously realize a large range and a high resolution and has a good temperature noise interference resistance.
Disclosure of Invention
In order to solve the defects and shortcomings of the prior art, a displacement sensing method based on echo wall microcavity multi-order axial mode joint calculation is provided, the spatial variation characteristics of characteristic parameters of each resonance mode caused by axial displacement of the microcavity are utilized, the microcavity is subjected to position coding according to a Q value, and the axial large-range and high-resolution displacement sensing of the microcavity is realized by combining an accurate positioning scheme in each coding section. The method can effectively reduce the influence of environmental factors such as external temperature change and the like on the sensing precision, and can overcome the defect that a single-mode sensing scheme is difficult to combine large range and high resolution.
The purpose of the invention is realized by the following technical scheme:
a displacement sensing method based on echo wall microcavity multi-order axial mode joint solution comprises the following specific steps:
s1, obtaining a resonance spectrum of a multi-order axial mode through a microcavity coupling system, wherein the microcavity coupling system comprises a tuned laser, a polarization controller, a coupling waveguide, an echo wall microcavity and a photoelectric detector, laser emitted by the tuned laser enters the microcavity coupling system through the polarization controller, the sizes of the coupling waveguide and the echo wall microcavity are optimized, the coupling condition between the coupling waveguide and the echo wall microcavity is adjusted, efficient excitation of the multi-order axial mode is guaranteed, axial movement of the echo wall microcavity is achieved through a high-precision nano translation stage, and the photoelectric detector is used for obtaining resonance spectrums of different coupling positions;
s2, construction of a displacement sensing model: utilizing resonance spectrums at different coupling positions to draw a three-dimensional curved surface graph of the resonance spectrums, utilizing a Q value to carry out binarization processing on each axial mode in the three-dimensional curved surface graph of the resonance spectrums, synthesizing binary values corresponding to each axial mode into multi-bit binary codes, carrying out position coding, and finishing segmentation of a mode field area; and in each coding section, a mode with a monotonous change of the Q value is selected for accurate positioning, and high-resolution sensing of displacement is carried out, so that the axial large-range and high-resolution displacement sensing of the microcavity is realized.
Preferably, the coupling waveguide in step S1 may be a micro-nano tapered fiber, a coupling prism, an integrated optical waveguide, a ground tilt fiber, or a fiber grating.
Preferably, the whispering gallery micro-cavity described in step S1 may be a bottle mouth cavity, a cylindrical cavity, a polished crystal material cavity, or a surface nano-axial photonic structure micro-cavity.
Further, the resonance spectrum in step S1 includes pure multi-order axial modes, and the axial distribution length of the mode field corresponding to each order of axial mode is 0.1-1 mm.
The key point of the method is the acquisition of a multi-order axial mode and the construction of a sensing model. The axial movement of the microcavity is realized through a high-precision nano translation stage so as to accurately acquire resonance spectrums at different coupling positions. The system comprises a tuned laser, a polarization controller, a coupling waveguide, an echo wall microcavity and a photoelectric detector, wherein the tuned laser scans the wavelength, the scanning laser is coupled to the echo wall microcavity after passing through the polarization controller, and the photoelectric detector acquires the resonance spectrum of the coupling system at the output port of the coupling waveguide. The construction of the sensing model is realized based on the resonance spectrum of different coupling positions of the microcavity, a three-dimensional surface graph of the resonance spectrum is obtained by moving the microcavity, the position of the three-dimensional surface graph is coded, and high-precision displacement sensing is realized by combining an accurate positioning method in a coding section. The position coding and the accurate positioning mode selection are realized by a method combining microcavity coupling theory analysis and experimental measurement.
The working principle of the displacement sensing method based on the echo wall microcavity multi-order axial mode combined solution is shown in the figure 1: firstly, a micro-cavity coupling experiment test platform system is utilized, a resonance spectrum (shown in fig. 2) containing multi-order pure axial modes is obtained by optimizing an echo wall micro-cavity and a coupling waveguide structure, and the axial distribution range of each mode field needs to be ensured to be large enough because the axial distribution range of each mode field determines the displacement sensing range. Secondly, the nanometer translation stage controls the echo wall micro-cavity to generate high-precision displacement, a three-dimensional surface graph of a resonance spectrum of the coupling system is drawn based on the resonance spectrums of different coupling positions, the characteristics of the three-dimensional surface graph are analyzed in detail, and a position coding scheme is planned preliminarily. Finally, performing binarization processing on each order of axial mode according to the Q value, and synthesizing binary values corresponding to each order of axial mode into multi-bit binary codes, thereby realizing position coding of the microcavity; and selecting a monotonous high-sensitivity axial mode for accurate positioning in each coding section, and finally realizing the axial large-range and high-resolution displacement sensing of the echo wall microcavity.
Compared with the prior art, the invention has the following beneficial effects:
1. the invention realizes displacement sensing by adopting the Q value and the transmittance change characteristic of the multi-order axial mode of the echo wall micro-cavity, has better temperature noise interference resistance and is beneficial to the practicability of the micro-displacement sensing system based on the echo wall micro-cavity.
2. According to the invention, the multi-order axial mode is subjected to binarization processing according to the Q value, binary position coding is formed, displacement sensing with large range and high resolution can be realized simultaneously, and the defect that the displacement sensing based on a single mode is difficult to have both large range and high resolution is overcome.
3. The invention provides a large-range and high-resolution displacement sensing method based on a echo wall microcavity, which is realized by utilizing the coupling characteristic of a multi-order axial mode of the echo wall microcavity, carrying out position coding in the axial direction and carrying out accurate positioning in each coding section.
Drawings
FIG. 1 is a displacement sensing schematic diagram based on echo wall microcavity multi-order axial mode joint solution in the invention.
FIG. 2 is a whispering gallery microcavity resonance spectrum containing pure multi-order axial modes.
FIG. 3 is a three-dimensional curved surface diagram of the resonance spectrum composed of the resonance spectrum of different coupling positions of the microcavity.
FIG. 4 is a schematic diagram of position coding for implementing displacement sensing based on multi-order axial mode joint solution in the present invention.
Detailed Description
The following examples are presented to further illustrate the present invention and should not be construed as limiting the invention. Unless otherwise specified, the technical means used in the examples are conventional means well known to those skilled in the art. Reagents, methods and apparatus used in the present invention are conventional in the art unless otherwise indicated.
Fig. 1 is a system schematic diagram of a displacement sensing method based on echo wall microcavity multi-order axial mode joint solution provided by the invention. The displacement sensing method based on the echo wall microcavity multistage axial mode joint solution comprises the following specific steps:
1. obtaining a resonance spectrum of a multi-order pure axial mode: the resonance spectrum of the multi-order axial mode is obtained through a microcavity coupling system, and the system comprises a tuned laser, a polarization controller, a microcavity coupling system and a photoelectric detector. In this embodiment, the working wavelength of the tuned laser is around 1550nm, and the linewidth is 300 kHz; the coupling waveguide is obtained by drawing a single-mode fiber through a flame by using a tapered fiber with the diameter of the taper waist of about 2 mu m; the echo wall micro-cavity adopts a quasi-cylindrical cavity obtained by arc discharge machining, the axial length of the quasi-cylindrical cavity is about 400 mu m, the radial direction of the quasi-cylindrical cavity is parabolic, and the maximum radius change is about 18 nm. In the working process of the system, the coupling tapered optical fiber keeps contact with the microcavity so as to improve the stability of the coupling tapered optical fiber, the tuning laser scans the wavelength, and the photoelectric detector acquires the intensity of the scanning laser at the output port of the tapered optical fiber. FIG. 2 is a graph of the resonance spectrum obtained in this example, including pure 6-order axial modes, with the Q-value and transmittance of each mode determined by the overlap integral of the field distribution and the tapered fiber mode field distribution.
2. Constructing a sensing model: when the microcavity generates displacement along the axial direction, the change of the coupling condition can cause the change of the Q value and transmittance of each mode, and based on the resonance spectrums at different coupling positions, a three-dimensional curved surface diagram of the resonance spectrum of the microcavity coupling system can be obtained, as shown in fig. 3, wherein the horizontal and vertical coordinates respectively represent the wavelength and the coupling position, and the color gray scale represents the transmittance. It can be seen that the Q value and transmittance of each order axial mode show regular changes with the increase of the coupling position coordinate, but are not monotonous, so to implement large-scale and high-resolution displacement sensing by using these modes, it is necessary to process the whole mode field area in segments, and then select the mode with monotonous change of Q value and high sensitivity in each section to implement accurate positioning. Fig. 4 is a schematic diagram of a position coding scheme according to the present invention, which takes a fourth-order mode as an example, and performs binarization processing on a Q value of the fourth-order mode by selecting a suitable threshold, and combines binary values corresponding to each-order axial mode into a multi-bit binary code, thereby completing segmentation of a mode field region. Meanwhile, as can be seen from fig. 4, a mode with monotonically changing Q value can be always found inside each segment, thereby realizing high-resolution displacement sensing inside the segment.
This scheme requires two points of attention in its implementation: firstly, selecting a proper binary threshold value of a Q value to ensure the uniqueness of a code; secondly, near the mode field node, the mode under-coupling can make the resonance peak nearly disappear, and at this moment, directly calculating the Q value brings a large error, and the binary value of the mode needs to be set according to the transmittance.
In summary, the present invention provides a displacement sensing method based on echo wall microcavity multi-order axial mode joint solution, the method is based on the large-range and high-resolution displacement sensing of the echo wall microcavity, and the implementation approach is to use the coupling characteristic of the echo wall microcavity multi-order axial mode to perform position coding in the axial direction and perform accurate positioning in each coding section.
The above embodiments are preferred embodiments of the present invention, but the present invention is not limited to the above embodiments, and any other changes, modifications, substitutions, combinations and simplifications which do not depart from the spirit and principle of the present invention should be construed as equivalents thereof, and all such changes, modifications, substitutions, combinations and simplifications are intended to be included in the scope of the present invention.
Claims (4)
1. A displacement sensing method based on echo wall microcavity multi-order axial mode joint solution is characterized by comprising the following specific steps:
s1, obtaining a resonance spectrum of a multi-order axial mode through a microcavity coupling system, wherein the microcavity coupling system comprises a tuned laser, a polarization controller, a coupling waveguide, an echo wall microcavity and a photoelectric detector, laser emitted by the tuned laser enters the coupling waveguide through the polarization controller and then enters the echo wall microcavity after being coupled, the size of the coupling waveguide and the size of the echo wall microcavity are optimized, the coupling condition between the coupling waveguide and the echo wall microcavity are adjusted, efficient excitation of the multi-order axial mode is guaranteed, axial movement of the echo wall microcavity is achieved through a high-precision nano translation stage, and the photoelectric detector is used for obtaining resonance spectrums at different coupling positions;
s2, construction of a displacement sensing model: utilizing resonance spectrums at different coupling positions to draw a three-dimensional curved surface graph of the resonance spectrums, utilizing a Q value to carry out binarization processing on each axial mode in the three-dimensional curved surface graph of the resonance spectrums, synthesizing binary values corresponding to each axial mode into multi-bit binary codes, carrying out position coding, and finishing segmentation of a mode field area; and in each coding section, an axial mode with monotonicity and high sensitivity Q value is selected to realize high-resolution sensing of displacement in the section, so that axial large-range and high-resolution displacement sensing of the microcavity is realized.
2. The displacement sensing method based on the echo-wall microcavity multistage axial mode joint solution of claim 1, wherein the coupling waveguide in step S1 can be a micro-nano tapered fiber, a coupling prism, an integrated optical waveguide, a ground tilt fiber or a fiber grating.
3. The displacement sensing method based on the echo-wall micro-cavity multi-order axial mode joint solution of claim 1, wherein the echo-wall micro-cavity in step S1 can be a bottle mouth cavity, a cylindrical cavity, a polished crystal material cavity or a surface nano axial photon structure micro-cavity.
4. The displacement sensing method based on the multi-order axial mode joint solution of the whispering gallery microcavity as claimed in claim 1, wherein the resonance spectrum in step S1 includes pure multi-order axial modes, and the axial distribution lengths of the mode fields corresponding to the axial modes of each order are 0.1-1 mm.
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| CN111829437A (en) * | 2020-06-10 | 2020-10-27 | 广东工业大学 | Displacement sensing system of double-waveguide coupling SNAP structure microcavity array |
| CN111895914B (en) * | 2020-06-10 | 2022-03-25 | 广东工业大学 | Displacement sensing system based on double-chain SNAP structure microcavity array |
| CN112577426A (en) * | 2020-11-30 | 2021-03-30 | 中国科学院长春光学精密机械与物理研究所 | Axial probe type sensing test method |
| CN113446947B (en) * | 2021-06-25 | 2022-07-12 | 广东工业大学 | Angular displacement sensing system and method based on double SNAP structure microcavity array |
| CN113701791B (en) * | 2021-08-11 | 2023-04-28 | 广东工业大学 | Method for coding and identifying displacement by utilizing resonance spectrum of SNAP structure microcavity |
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