CN115435836A - Displacement and temperature double-parameter sensing system and method based on SNAP structure microcavity - Google Patents
Displacement and temperature double-parameter sensing system and method based on SNAP structure microcavity Download PDFInfo
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Abstract
The invention relates to a displacement and temperature double-parameter sensing system based on an SNAP (single-wavelength passive optical network) structure microcavity. The coupling waveguide is provided with an emergent end and an incident end, the emergent end and the incident end are arranged oppositely, and the SNAP structure microcavity is arranged between the emergent end and the incident end. The wavelength of the central wave band of the first-order resonant mode of the SNAP structure microcavity cannot change along with displacement. When the temperature changes, the wavelength of the central wave band of the SNAP structure microcavity changes along with the change of the temperature. The shift is monitored by using the transmittance change of the resonance mode, and the temperature is monitored by using the change of the wavelength of the central waveband of the microcavity of the SNAP structure, so that the simultaneous measurement of two parameters of the shift and the temperature is realized. The invention also discloses a realization method of the displacement and temperature double-parameter sensing system based on the SNAP structure micro-cavity.
Description
Technical Field
The invention relates to the technical field of optical sensing, in particular to a displacement and temperature double-parameter sensing system and method based on a micro-cavity with an SNAP structure.
Background
In recent years, with the rapid development of precision and ultra-precision machining technologies, the demand for sensing technologies has been increasing. Optical sensing has a series of advantages of non-physical contact, electromagnetic interference resistance and high sensitivity, so that the optical sensing has important research significance in a plurality of aspects such as biosensing, displacement sensing, temperature sensing, force sensing and the like. At present, optical sensing is mainly carried out through the following structures such as Fabry-Perot cavities, surface plasmons and whispering gallery mode micro-cavities. The whispering gallery mode microcavity has excellent sensitivity and detection limit due to the ultrahigh Q value and the extremely small mode volume, and the SNAP structure microcavity serving as one of the modes has the characteristics of convenience in manufacturing and low cost, so that the whispering gallery mode microcavity has a wide application prospect. For example, in the existing displacement sensing system based on the double-chain SNAP structure microcavity array, the displacement sensing system mainly comprises a tunable laser, a polarization controller, a coupling waveguide, SNAP structure microcavity array double chains, a displacement device, a photoelectric detector and a computer. The tunable laser generates sweep-frequency laser, the sweep-frequency laser enters the double-chain SNAP structural microcavity through the polarization controller and the coupling waveguide, and the photoelectric detector acquires a resonance spectrum and sends the resonance spectrum to the computer for processing. When the micro-cavity moves, displacement sensing of half SNAP structure length is realized based on resonance spectrum characteristics of the single SNAP structure micro-cavity; and when the length of each cross-over half SNAP structure is over, the resonance spectrums generated by the SNAP micro-cavities in the double chains are sequentially switched and used, so that the displacement sensing in the full range is realized.
The displacement sensing system can realize high-precision sensing of large-range displacement. However, the resonance center wavelength of the SNAP structure microcavity of the displacement sensing system is difficult to simultaneously and accurately sense displacement and temperature.
Disclosure of Invention
The invention provides a displacement and temperature double-parameter sensing system based on an SNAP structure microcavity, aiming at solving the problem that the displacement sensing system of the SNAP structure microcavity array in the technical scheme is difficult to simultaneously and accurately sense the displacement and the temperature. The SNAP structure microcavity sensing system in the scheme can realize accurate sensing of temperature and displacement at the same time.
The technical scheme adopted by the invention is as follows: a displacement and temperature double-parameter sensing system based on an SNAP structure micro-cavity comprises a tunable laser, a polarization controller, a coupling waveguide, the SNAP structure micro-cavity, a displacement device, a photoelectric detector and a computer. The tunable laser, the polarization controller, the coupling waveguide, the photoelectric detector and the computer are sequentially connected, the displacement device is fixedly connected with the SNAP structure microcavity and can slide. The coupling waveguide is provided with an emergent end and an incident end, the emergent end and the incident end are arranged oppositely, and the SNAP structure microcavity is arranged between the emergent end and the incident end. The SNAP structure micro-cavity is provided with two bulges, the shapes and the positions of the two bulges on the SNAP structure micro-cavity are limited by the change function of the effective radius of the axial section outline of the SNAP structure micro-cavity along with the axial position, and the change function of the effective radius of the axial section outline of the SNAP structure micro-cavity along with the axial position is as follows:
in the formula: Δ r eff The effective radius change of the axial position of the SNAP structure micro-cavity is obtained; λ c is the laser wavelength emitted by the tunable laser; r0 is the radius of the non-convex part of the SNAP structure microcavity; n is the refractive index of the SNAP structure microcavity material; s is the shape adjusting parameter of the SNAP structure micro-cavity; z is the axial length of the SNAP structure microcavity; and L is the distance between two small bulges at the middle part of the microcavity of the SNAP structure.
Because the axial cross-sectional profile shape of the SNAP structure microcavity is similar to a bat shape, the SNAP structure microcavity with such a shape is conventionally called a bat-shaped SNAP structure microcavity.
The scheme utilizes the principle that mode field distribution and resonance spectrum characteristic parameters of the microcavity depend on the nanoscale effective radius bulge of the cavity, manufactures the SNAP structural microcavity on the optical fiber by a certain processing means, fixes the microcavity by a displacement device and enables the microcavity to be mutually coupled with the coupling waveguide. The variation of the SNAP structure radial dimension is extremely small and is only in the nanometer level, so that the excitation of a high-order mode can be well inhibited. The SNAP structure microcavity of the scheme has the advantages that the wavelength of the central wave band cannot change along with displacement. When the temperature changes, the wavelength of the central wave band of the SNAP structure microcavity changes along with the change of the temperature. The wavelength variation of the microcavity center band of the SNAP structure is linear with the variation of the temperature, and can be calculated by the following formula:
in the formula: delta lambda represents the wavelength variation of the central wave band of the SNAP structure microcavity, lambda 0 Represents the resonance wavelength when the temperature is not changed, Δ T represents the amount of change in temperature,
represents the thermo-optic coefficient of the SNAP structure microcavity material,
representing the thermal expansion coefficient of the SNAP structure microcavity material.
From the above formula, the wavelength of the center waveband of the SNAP structure microcavity changes linearly with temperature, and at the same time, the transmittance of each order of resonance mode changes with the change of displacement. The shift is monitored by using the transmittance change of the resonance mode, and the temperature is monitored by using the change of the wavelength of the central waveband of the microcavity of the SNAP structure, so that the simultaneous measurement of two parameters of the shift and the temperature is realized.
Laser generated by a tunable laser enters a polarization controller through an optical fiber, the polarization controller adjusts the polarization state of the laser and inputs the laser into a coupling waveguide through the optical fiber, the coupling waveguide is coupled with the SNAP structure microcavity, the laser meeting resonance conditions is coupled into the SNAP structure microcavity, and a photoelectric detector is connected with the coupling waveguide and used for receiving the laser from the coupling waveguide and converting received optical signals into electric signals, so that a coupled resonance spectrum is obtained.
Preferably, in a function of change of an effective radius of the profile of the axial section of the SNAP structure microcavity along with an axial position, a distance L =300 μm between two bulges in the middle of the SNAP structure microcavity; the axial length z =400 μm of the SNAP-structure microcavity; radius r0=62.5 μm of the non-convex part of the SNAP-structure microcavity; the refractive index n =1.452 of the SNAP structure microcavity material; and (3) adjusting parameters s =40 of the microcavity profile of the SNAP structure. The SNAP structure microcavity can be obtained by arc discharge, carbon dioxide laser or ultraviolet light acting on a uniform optical fiber.
Preferably, the coupling waveguide is in contact with the SNAP-structure microcavity during operation. The coupling waveguide can be micro-nano tapered optical fiber, coupling prism, planar waveguide, grinding dip angle optical fiber or fiber grating. The working wavelength of the tunable laser is 1550nm, and the line width of the tunable laser is 300kHz. The coupling waveguide is a tapered fiber with a taper waist diameter of 2 um. In the working process of the system, the coupling waveguide is kept in contact with the SNAP structure microcavity array, and the weak electrostatic force between the coupling waveguide and the SNAP structure microcavity array provides stability for the system, so that the whole system has better anti-vibration interference capability.
A realization method of a displacement and temperature double-parameter sensing system based on an SNAP structure microcavity comprises the following steps:
the method comprises the following steps: laser emitted by the tunable laser is input into the coupling waveguide after being acted by the polarization controller, light waves in the coupling waveguide pass through the SNAP structure microcavity and are transmitted to the photoelectric detector, and the photoelectric detector converts the light waves into electric signals and sends the electric signals to the computer for processing.
Step two: and the displacement device moves along a certain direction, so that the SNAP structure microcavity generates displacement change relative to the coupling waveguide. However, the central wavelength of the central band of the first-order resonant mode in the generated resonant spectrum does not change with the change of the displacement, when the temperature changes, the central wavelength of the central band of the first-order resonant mode changes with the change of the temperature, and simultaneously, the transmittance of each-order resonant mode changes with the change of the displacement.
Step three: and inputting the generated resonance spectrum data into a computer, monitoring the displacement by the computer according to the transmittance change of the resonance mode, and monitoring the temperature according to the change of the central wavelength of the middle part of the first-order resonance mode.
Compared with the prior art, the invention has the beneficial effects that:
1. the displacement and temperature double-parameter sensing system based on the SNAP structure microcavity adopted by the invention can realize simultaneous sensing of displacement and temperature, solves the problem that two sets of coupling systems are required for simultaneously sensing temperature and displacement, simplifies the sensing system and further reduces the cost.
2. The SNAP structure microcavity keeps contact with the coupling waveguide all the time in the working process, and the weak electrostatic force between the SNAP structure microcavity and the coupling waveguide provides stability for the system, so that the whole system has better anti-vibration interference capability.
3. The SNAP structure micro-cavity adopted by the invention has small volume and low cost and is suitable for microstructure measurement occasions.
Drawings
Fig. 1 is a schematic structural diagram of a displacement and temperature dual-parameter sensing system based on a SNAP structure microcavity provided by the invention.
FIG. 2 is a schematic axial profile of a microcavity surface nanoscale projection of a SNAP structure provided by the present invention.
FIG. 3 shows the resonance mode spectra of SNAP-structured microcavities provided by the present invention at various locations.
Fig. 4 is a graph of transmittance versus displacement for the first 10 th order mode of the SNAP-structure microcavity provided by the present invention.
Fig. 5 is a graph comparing the curve of the change of the center wavelength with displacement of the first-order resonant mode of the microcavity with a parabolic shape.
FIG. 6 is a graph showing the relationship between the center wavelength of the first-order resonance mode and the temperature at an initial wavelength of 1550nm and an initial temperature of 298K according to the present invention.
Fig. 7 is a flowchart of an implementation method of the displacement and temperature dual-parameter sensing system based on the SNAP structure microcavity according to the present invention.
Detailed Description
The drawings are for illustrative purposes only and are not to be construed as limiting the patent; for better illustration of the present embodiment, some parts of the drawings may be omitted, enlarged or reduced, and do not represent the size of the actual product; it will be understood by those skilled in the art that certain well-known structures in the drawings and descriptions thereof may be omitted. The positional relationships depicted in the drawings are for illustrative purposes only and are not to be construed as limiting the present patent.
The same or similar reference numerals in the drawings of the embodiments of the present invention correspond to the same or similar parts; in the description of the present invention, it should be understood that if there are orientations or positional relationships indicated by the terms "upper", "lower", "left", "right", "long", "short", etc., based on the orientations or positional relationships shown in the drawings, the description is merely for convenience of description and simplification, but it is not intended to indicate or imply that the device or element referred to must have a specific orientation, be constructed in a specific orientation and be operated, and therefore, the terms describing the positional relationships in the drawings are only used for illustrative purposes and are not to be construed as limitations of the present patent, and specific meanings of the terms described above can be understood according to specific situations by those skilled in the art.
The technical scheme of the invention is further described in detail by the following specific embodiments in combination with the attached drawings:
example 1
As shown in fig. 1-6, an embodiment of a displacement and temperature dual-parameter sensing system based on a SNAP structure microcavity is shown, and the displacement and temperature dual-parameter sensing system based on the SNAP structure microcavity includes a tunable laser 1, a polarization controller 2, a coupling waveguide 3, a SNAP structure microcavity 4, a displacement device 5, a photodetector 6 and a computer 7. The tunable laser 1, the polarization controller 2, the coupling waveguide 3, the photoelectric detector and the computer 7 are sequentially connected, the displacement device 5 is fixedly connected with the SNAP structure microcavity 4, and the displacement device 5 can slide. The coupling waveguide 3 is provided with an emergent end 301 and an incident end 302, the emergent end 301 and the incident end 302 are oppositely arranged, and the SNAP structure microcavity 4 is arranged between the emergent end 301 and the incident end 302. The SNAP structure micro-cavity 4 is provided with two bulges, the shapes and the positions of the two bulges on the SNAP structure micro-cavity 4 are limited by the change function of the effective radius of the axial section outline of the SNAP structure micro-cavity 4 along with the axial position, and the change function of the effective radius of the axial section outline of the SNAP structure micro-cavity 4 along with the axial position is as follows:
in the formula: Δ r eff The effective radius change of the axial position of the SNAP structure micro-cavity is obtained; λ c is the laser wavelength emitted by the tunable laser; r0 is the radius of the non-convex part of the SNAP structure microcavity; n is the refractive index of the SNAP structure microcavity material; s is the shape adjusting parameter of the SNAP structure micro-cavity; z is the axial length of the SNAP structure microcavity; and L is the distance between two bulges of the SNAP structure microcavity.
Since the axial cross-sectional profile shape of the SNAP-structure micro-cavity 4 is similar to a bat shape, the SNAP-structure micro-cavity 4 of such a shape is conventionally called a bat-shaped SNAP-structure micro-cavity. The distance between the two bulges on the SNAP structure microcavity 4 is the central wave band of the SNAP structure microcavity 4.
The working principle of the embodiment is as follows: according to the scheme, by utilizing the principle that mode field distribution and resonance spectrum characteristic parameters of the microcavity depend on the nanoscale effective radius bulge of the cavity, the SNAP structure microcavity 4 is manufactured on the optical fiber through a certain processing means, and the SNAP structure microcavity 3 is fixed through the displacement device 5 and is mutually coupled with the coupling waveguide 3. Because the variation of the radial size of the SNAP structure microcavity 4 is extremely small and is only in nanometer level, the excitation of a high-order mode can be well inhibited. The SNAP structure microcavity 4 of the scheme has the advantages that the wavelength of the first-order resonance mode central wave band cannot change along with displacement. When the temperature changes, the wavelength of the central wave band of the SNAP structural microcavity 4 changes along with the change of the temperature. The variation of the wavelength of the first-order resonant mode central band of the SNAP structure microcavity 4 is in a linear relationship with the variation of the temperature, and can be calculated by the following formula:
in the formula: Δ λ represents SNAP structural microcavity 4 thWavelength variation of the center band of the first-order resonance mode, Δ T represents temperature variation, λ 0 Indicating the resonant wavelength at which the temperature has not changed,
represents the thermo-optic coefficient of the SNAP structural microcavity 4 material,
representing the coefficient of thermal expansion of the SNAP-structure microcavity 4 material.
From the above formula, the central band wavelength of the first-order resonance mode of the SNAP-structure microcavity 4 changes linearly with temperature, and at the same time, the transmittance of each-order resonance mode changes with the change of displacement. The shift is monitored by using the transmittance change of the resonant mode, and the temperature is monitored by using the change of the central waveband wavelength of the first-order resonant mode of the SNAP structure microcavity 4, so that the simultaneous measurement of the two parameters of the shift and the temperature is realized.
The working process of the embodiment is as follows: laser generated by a tunable laser 1 enters a polarization controller 2 through an optical fiber, the polarization controller 2 adjusts the polarization state of the laser and inputs the laser into a coupling waveguide 3 through the optical fiber, the coupling waveguide 3 is coupled with an SNAP structure microcavity 4, the laser meeting resonance conditions is coupled into the SNAP structure microcavity 4, and a photoelectric detector 6 is connected with the coupling waveguide 3 and used for receiving the laser from the coupling waveguide and converting a received optical signal into an electric signal, so that a coupled resonance spectrum is obtained.
The beneficial effects of this embodiment: the displacement and temperature double-parameter sensing system based on the SNAP structure microcavity adopted by the invention can realize simultaneous sensing of displacement and temperature, solves the problem that two sets of coupling systems are required for simultaneously sensing temperature and displacement, simplifies the sensing system and further reduces the cost. The SNAP structural microcavity 4 has small volume and low cost and is suitable for microstructure measurement occasions.
Example 2
An embodiment 2 of the displacement and temperature dual-parameter sensing system based on the SNAP structure microcavity is further defined on the basis of the embodiment 1, as shown in FIGS. 1-6.
Specifically, in a function of the change of the effective radius of the profile of the axial section of the SNAP structure microcavity 4 along with the axial position, the distance L =300 μm between two bulges in the middle of the SNAP structure microcavity 4; the axial length z =400 μm of the SNAP-structure microcavity 4; radius r0=62.5 μm of the non-convex part of the SNAP-structure microcavity 4; the refractive index n =1.452 of the SNAP structure microcavity 4 material; and (4) adjusting the profile of the SNAP structural microcavity 4 by s =40. The SNAP-structure microcavity 4 can be obtained by arc discharge, carbon dioxide laser or ultraviolet light acting on a uniform fiber.
Specifically, the coupling waveguide 3 is in contact with the SNAP-structure microcavity 4 during operation. The coupling waveguide 3 is a tapered fiber with the taper waist diameter of 2um, and the coupling waveguide 3 is a tapered fiber with the taper waist diameter of 2 um. The tunable laser 1 has an operating wavelength of 1550nm and a linewidth of 300kHz.
The beneficial effects of this embodiment: in the working process of the system, the coupling waveguide 3 is kept in contact with the SNAP structural microcavity 4, and the weak electrostatic force between the coupling waveguide and the SNAP structural microcavity 4 provides stability for the system, so that the whole system has better anti-vibration interference capability.
Example 3
An embodiment 3 of a displacement and temperature dual-parameter sensing system based on a SNAP structure microcavity is, on the basis of the embodiment 1 or 2, as shown in fig. 7, an implementation method of the displacement and temperature dual-parameter sensing system based on a shape SNAP structure microcavity, and includes the following steps:
the method comprises the following steps: laser emitted by the tunable laser 1 is input into the coupling waveguide 3 after being acted by the polarization controller 2, light waves in the coupling waveguide 3 pass through the SNAP structure microcavity 4 and are transmitted to the photoelectric detector, and the photoelectric detector converts the light waves into electric signals and sends the electric signals to the computer 7 for processing.
Step two: the displacement device 5 moves along a certain direction, so that the SNAP structural microcavity 4 generates displacement change relative to the coupling waveguide 3.
Step three: the generated resonance spectrum data is input into a computer 7, the computer 7 monitors the displacement according to the transmittance change of the resonance mode, and monitors the temperature according to the change of the central wavelength of the middle part of the first-order resonance mode.
The beneficial effects of this embodiment: according to the displacement and temperature double-parameter sensing system based on the SNAP structure micro-cavity, the method can realize simultaneous sensing of displacement and temperature.
It should be understood that the above-described embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the claims of the present invention.
Claims (10)
1. A displacement and temperature double-parameter sensing system based on an SNAP (single-wavelength amplification) structure microcavity comprises a tunable laser (1), a polarization controller (2), a coupling waveguide (3), an SNAP structure microcavity (4), a displacement device (5), a photoelectric detector (6) and a computer (7), wherein the tunable laser (1), the polarization controller (2), the coupling waveguide (3), the photoelectric detector (6) and the computer (7) are sequentially connected, the displacement device (5) is fixedly connected with the SNAP structure microcavity (4), the displacement device (5) can slide, the coupling waveguide (3) is provided with an emergent end (301) and an incident end (302), and the emergent end (301) and the incident end (302) are oppositely arranged; the SNAP structure microcavity (4) is arranged between the emergent end (301) and the incident end (302), and is characterized in that two bulges are arranged on the SNAP structure microcavity (4), the shapes and positions of the two bulges on the SNAP structure microcavity (4) are limited by the function of the change of the effective radius of the axial section profile of the SNAP structure microcavity (4) along with the axial position, and the function of the change of the effective radius of the axial section profile of the SNAP structure microcavity (4) along with the axial position is as follows:
in the formula: Δ r eff The effective radius change of the SNAP structure microcavity axial position is obtained; λ c is the laser wavelength emitted by the tunable laser; r0 is the radius of the non-convex part of the SNAP structure microcavity; n is the refractive index of the SNAP structure microcavity material; s is the shape adjusting parameter of the SNAP structure micro-cavity; z is the axial length of the SNAP structure microcavity; and L is the distance between two bulges of the SNAP structure microcavity.
2. The displacement and temperature dual-parameter sensing system based on the SNAP-structure microcavity as claimed in claim 2, wherein the distance L =300 μm between two bulges of the SNAP-structure microcavity, and the axial length z =400 μm of the SNAP-structure microcavity.
3. A displacement and temperature dual-parameter sensing system based on a SNAP-structure microcavity according to claim 3, wherein the radius r0=62.5 μm of the non-convex portion of the SNAP-structure microcavity.
4. The displacement and temperature dual-parameter sensing system based on the SNAP structure microcavity is characterized in that the refractive index n =1.452 of the SNAP structure microcavity material; and the SNAP structure microcavity profile adjusting parameter s =40.
5. The displacement and temperature dual-parameter sensing system based on the SNAP structure microcavity is characterized in that the SNAP structure microcavity (4) belongs to a whispering gallery mode microcavity.
6. A displacement and temperature dual-parameter sensing system based on a SNAP structure microcavity according to claim 5, wherein the SNAP structure microcavity (4) can be obtained by arc discharge, carbon dioxide laser or ultraviolet light acting on a uniform optical fiber.
7. A displacement and temperature dual-parameter sensing system based on a SNAP-structure microcavity according to claim 1, wherein the coupling waveguide (3) is in contact with the SNAP-structure microcavity (4) during operation.
8. The displacement and temperature double-parameter sensing system based on the SNAP structure microcavity is characterized in that the coupling waveguide (3) can be a micro-nano tapered fiber, a coupling prism, a planar waveguide, a ground tilt angle fiber or a fiber grating.
9. The displacement and temperature dual-parameter sensing system based on the SNAP structure microcavity is characterized in that the tunable laser (1) has an operating wavelength of 1550nm and a line width of 300kHz.
10. A realization method of a displacement and temperature double-parameter sensing system based on an SNAP structure microcavity is characterized by comprising the following steps:
the method comprises the following steps: laser emitted by the tunable laser (1) is acted by the polarization controller (2) and then is input into the coupling waveguide (3), light waves in the coupling waveguide (3) pass through the SNAP structure microcavity (4) and then are transmitted to the photoelectric detector (6), and the photoelectric detector (6) converts the light waves into electric signals and sends the electric signals to the computer (7) for processing;
step two: the displacement device (5) moves along a certain direction, so that the SNAP structure microcavity (4) generates displacement change relative to the coupling waveguide (3);
step three: the generated resonance spectrum data is input into a computer (7), the computer (7) monitors the displacement according to the transmittance change of the resonance mode, and monitors the temperature according to the change of the central wavelength of the middle part of the first-order resonance mode.
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- 2022-08-30 CN CN202211051037.8A patent/CN115435836A/en active Pending
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