CN111867773A - Plasma device and nozzle mold for plasma head - Google Patents
Plasma device and nozzle mold for plasma head Download PDFInfo
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- CN111867773A CN111867773A CN201880091217.4A CN201880091217A CN111867773A CN 111867773 A CN111867773 A CN 111867773A CN 201880091217 A CN201880091217 A CN 201880091217A CN 111867773 A CN111867773 A CN 111867773A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K10/00—Welding or cutting by means of a plasma
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Abstract
The invention provides a plasma device capable of detecting whether a plasma head is in a nozzle model assembling state which is a state that a nozzle model is assembled on a head body. In the plasma apparatus of the present disclosure, whether the plasma head is in the nozzle model fitting state is detected based on the pressure of the gas inside the plasma head. For example, when the pressure loss in the nozzle pattern is larger than the pressure loss in the normal nozzle, in the case where the nozzle pattern is attached to the head main body, the pressure of the gas in the plasma head becomes higher than that in the case where the normal nozzle is attached. In this case, it is possible to detect whether or not the plasma head is in the nozzle mold fitted state based on the pressure of the gas in the plasma head.
Description
Technical Field
The present disclosure relates to a plasma apparatus including a plasma head that outputs plasma, and a nozzle mold for a plasma head that is attachable to and detachable from a head body of the plasma head.
Background
Patent document 1, paragraph [0042], discloses that when information identifying a torch for a plasma cutting apparatus does not match information indicating a pressure and a gas flow rate predetermined when the plasma cutting apparatus is operated, the start of the operation of the plasma cutting apparatus is prevented. However, patent document 1 does not describe a torch model.
Patent documents 2 and 3 describe that teaching work of a robot is performed using a torch model instead of a normal torch. Among them, the robot described in patent document 2 is a plasma cutting robot, and a torch model is formed for light transmission. The robot described in patent document 2 is a welding robot, and a wire insertion hole is formed in a teaching tip 30 of a torch model.
Prior art documents
Patent document
Patent document 1: japanese Kohyo Table 2015-520676
Patent document 2: japanese Kokai Sho 60-190470
Patent document 3: japanese Kokai publication 2014-231066
Disclosure of Invention
Problems to be solved by the invention
The present disclosure addresses the problem of providing a plasma apparatus capable of detecting whether or not a plasma head is in a nozzle mold mounting state, which is a state in which a nozzle mold is mounted on a head body, and providing a nozzle mold for a plasma head that is detachable from the head body.
Means, action and Effect for solving the problems
In the plasma apparatus of the present disclosure, whether the plasma head is in the nozzle model fitting state is detected based on the pressure of the gas inside the plasma head. For example, when the pressure loss in the nozzle pattern is larger than the pressure loss in the normal nozzle, in the case where the nozzle pattern is attached to the head main body, the pressure of the gas in the plasma head becomes higher than that in the case where the normal nozzle is attached. In this case, it is possible to detect whether or not the plasma head is in the nozzle mold fitted state based on the pressure of the gas in the plasma head.
The gas in the plasma head is a gas existing inside the plasma head, and does not mean a specific gas. The plasma apparatus of the present disclosure generates plasma at atmospheric pressure, and the inside of the plasma head is not in a vacuum state.
The normal nozzle is a nozzle to be attached when plasma is irradiated from the plasma head. The nozzle pattern as opposed to the normal nozzle means a nozzle having the same outer shape and dimensions as the normal nozzle, but which should not be fitted when plasma is irradiated.
Drawings
Fig. 1 is a diagram conceptually showing the periphery of a plasma apparatus as an embodiment of the present disclosure.
Fig. 2 is a perspective view of a plasma head (not including a cover) of the plasma apparatus.
FIG. 3 is a cross-sectional view of a plane perpendicular to the x-axis of the plasma head.
FIG. 4 is a cross-sectional view of a plane perpendicular to the y-axis of the plasma head.
Fig. 5 is a perspective view of a normal nozzle which is detachable from the head main body of the plasma head.
Fig. 6 is a perspective view of a nozzle mold that is detachable from the head main body.
Fig. 7 is a bottom view of the nozzle mold.
Fig. 8 is a sectional view of a plane perpendicular to the x-axis of the nozzle model.
Fig. 9 is a diagram showing a gas supply path in the plasma device.
Fig. 10 is a view conceptually showing the periphery of the control device of the plasma device.
Fig. 11 is a flowchart showing a nozzle model mounting state detection routine stored in the storage unit of the control device.
Fig. 12 is a perspective view of a nozzle model different from the above-described nozzle model.
Fig. 13 is a cross-sectional view of a plane perpendicular to the y-axis of a normal nozzle different from the normal nozzle described above.
Fig. 14 is a perspective view of the normal nozzle.
Fig. 15 is a perspective view of a nozzle model of the normal nozzle.
Fig. 16 is a cross-sectional view of a plane perpendicular to the y-axis of the nozzle model.
Detailed Description
Hereinafter, a plasma apparatus and a nozzle model for a plasma head (hereinafter, simply referred to as a nozzle model) according to the present disclosure will be described based on the drawings.
Examples
As shown in fig. 1, the plasma apparatus generates plasma under atmospheric pressure, and includes a plasma head 6, a control box 8, and the like. The plasma head 6 can be held by the robot 10 and can be moved three-dimensionally by the robot 10.
As shown in fig. 2, the plasma head 6 includes a plasma generating portion 12, a heating gas supply portion 14, and the like. The plasma generating unit 12 generates plasma by turning the supplied process gas into plasma. The heated gas supply unit 14 supplies heated gas obtained by heating the heating gas. In the plasma head 6, the plasma generated in the plasma generating portion 12 is output together with the heating gas supplied from the heating gas supplying portion 14, and is irradiated to the object W to be processed shown in fig. 1. The process gas is supplied in the direction of arrow P in the plasma head 6.
As shown in fig. 3 and 4, the plasma generating portion 12 includes a head main body 18 formed of an insulator such as ceramic, a pair of electrode portions 20 and 22, a nozzle 38, and the like. The pair of electrode portions 20 and 22 are held by the head main body 18 so as to be separated in the width direction, and a discharge space 24 is formed between the pair of electrode portions 20 and 22 of the head main body 18. Hereinafter, in the present plasma apparatus, the direction in which the pair of electrode portions 20 and 22 (hereinafter, the pair may be abbreviated as the electrode portion 20 and 22 or the plurality of electrode portions 20 and 22, etc., unless otherwise stated) are arranged in the width direction of the head main body 18 is referred to as the x direction, the direction in which the plasma generating portion 12 and the heating gas supply portion 14 are arranged is referred to as the y direction, and the direction in which the electrode portions 20 and 22 extend is referred to as the z direction. The z direction is the same as the P direction. The x-direction, y-direction, and z-direction are orthogonal to each other.
As shown in fig. 2 and 3, the heated gas supply unit 14 includes a gas pipe 30, a heater 32, a connection unit 34, and the like. These gas pipe 30, heater 32, and the like are covered with a cover 35 shown in fig. 3. The heater 32 is disposed on the gas pipe 30, and the gas pipe 30 is heated by the heater 32, thereby heating the heating gas flowing through the gas pipe 30.
As shown in fig. 3, the connection portion 34 connects the gas pipe 30 to a normal nozzle (hereinafter, may be simply referred to as a nozzle) 38, and includes a heated gas supply passage 36. In a state where the nozzle 38 is attached to the head main body 18, one end of the heated gas supply passage 36 communicates with the gas pipe 30, and the other end communicates with a heated gas passage 39 formed in the nozzle 38.
In the plasma generating section 12, the outer peripheries of part of the electrode sections 20 and 22 are covered with electrode covers 44 and 45 made of an insulator such as ceramic. The electrode covers 44 and 45 are each formed in a substantially hollow cylindrical shape, and have both ends open in the longitudinal direction. Gaps between the inner peripheral surfaces of the electrode covers 44 and 45 and the outer peripheral surfaces of the electrode portions 20 and 22 form gas passages 44c and 45c, and openings on the downstream sides of the electrode covers 44 and 45 face the discharge space 24. Further, a part of the electrode portions 20 and 22 is in a state of protruding from the openings on the downstream side of the electrode covers 44 and 45.
A plurality of gas passages 51-53 are formed on the upstream side of the portions of the head main body 18 holding the electrode portions 20, 22. These gas passages 51 to 53 and the gas pipe 30 of the heated gas supply unit 14 are connected to the control box 8 via pipes 56a to 56d as shown in fig. 9. On the other hand, a nitrogen source 54 for supplying nitrogen gas and a dry air source 55 for supplying dry air (including oxygen as an active gas) are connected to the control box 8. A flow rate adjusting mechanism 60 is provided between the connection portions of the nitrogen gas source 54 and the dry air source 55 of the control box 8 and the connection portions of the pipes 56a to 56 d. The flow rate adjusting mechanism 60 controls the flow rate of nitrogen gas, dry air, or the like (hereinafter, may be simply referred to as air or gas) supplied to the plasma head 6, and includes individual flow rate adjusters 62a to 62d, pressure sensors 64a to 64d, a mixer 66, and the like.
On the other hand, a plurality of (6 in the present embodiment) main body side plasma passages 70a, 70b … are formed in a portion of the head main body 18 on the downstream side of the discharge space 24, and the plurality of main body side plasma passages 70a, 70b … are arranged at intervals in the x direction and are formed to extend in the z direction. The upstream ends of the plurality of main body side plasma passages 70a and 70b … are open to the discharge space 24.
The nozzle 38 is formed of an insulator such as ceramic, and includes a nozzle body 72 and a passage structure 74, as shown in fig. 3 to 5. As shown in fig. 3 and 4, the passage structure 74 includes a passage forming portion 82 and a flange portion 84, and the passage forming portion 82 forms nozzle- side plasma passages 80a and 80b … that are a plurality of (6 in the present embodiment) through holes. The passage structural body 74 is detachably attached by a bolt 86 or the like in a state where the flange portion 84 is positioned on the head main body 18.
As shown in fig. 3 and 5, the nozzle body 72 is substantially T-shaped in a side view in the x direction, and includes a holding portion 75 and a protruding portion 76. The holding portion 75 is formed with a recess 78 for communicating the heated gas passage 39. One through hole 79 is formed in the protruding portion 76 so as to penetrate the protruding portion 76 in the longitudinal direction. One end of the through hole 79 opens into the recess 78. The nozzle body 72 is detachably attached to the head body 18 at the holding portion 75 by a plurality of bolts 87. In this way, the nozzle 38 is detachably attached to the head main body 18.
In the state where the nozzle 38 is attached to the head main body 18, the flange portion 84 is positioned inside the recessed portion 78, and the passage forming portion 82 is positioned inside the through hole 79, but the gaps between the recessed portion 78, the through hole 79, and the flange portion 84 and the passage forming portion 82 serve as the heated gas output passage 89. The heating gas is supplied to the heating gas output passage 89 through the heating gas passage 39 and the concave portion 78. The nozzle- side plasma passages 80a and 80b … extend in the z direction and are disposed to correspond to the main body- side plasma passages 70a and 70b …, respectively, and the nozzle- side plasma passages 80a and 80b … and the main body- side plasma passages 70a and 70b … are in a state of communicating with each other, respectively. The cross-sectional areas of the nozzle- side plasma passages 80a and 80b … and the cross-sectional areas of the main body- side plasma passages 70a and 70b … are substantially the same.
On the other hand, a nozzle mold 90 made of resin shown in fig. 6 to 8 may be mounted on the head main body 18 instead of the nozzle 38. The nozzle mold 90 does not include a passage structure, and is also a nozzle mold body 90. As shown in fig. 6, the nozzle model body 90 is substantially T-shaped in a side view from the x direction, and includes a holding portion 92 and a protruding portion 94. A recess 96 is formed in the holding portion 92, and a heating gas passage 98 is formed in a state of being opened in the recess 96. Although no through-hole is formed in the protruding portion 94, a through-hole 100 as a gas passage penetrating the holding portion 92 in the z direction is formed in a portion of the holding portion 92 that is offset from a portion corresponding to the protruding portion 94. The through hole 100 communicates the inside of the nozzle mold 90, that is, the recess 96, with the outside (atmosphere) of the plasma head 6, in other words, opens in the recess 96 and opens in the outside of the plasma head 6. The cross-sectional area of the through hole 100 is smaller than the sum of the cross-sectional areas of the main body- side plasma passages 70a and 70b …, smaller than the sum of the cross-sectional areas of the nozzle- side plasma passages 80a and 80b … of the normal nozzle 38, and smaller than the cross-sectional area of the heating gas discharge passage 89. Therefore, the pressure loss in the nozzle model 90 is larger than that in the normal nozzle 38.
On the other hand, a slit 102 as a weak portion is formed in an annular shape on the outer peripheral surface of the base end portion of the protruding portion 94. The projection 94 is easily broken at the slot 102 in the case of abutting against an object or the like. The dimensions of the holding portion 92 and the projecting portion 94 of the nozzle model body 90 are the same as the dimensions of the holding portion 75 and the projecting portion 76 of the nozzle body 72 of the normal nozzle 38.
As shown in fig. 8, the nozzle mold 90 can be detachably attached to the head main body 18 by bolts 87 at the holding portion 92, like the nozzle 38. In a state where the nozzle mold 90 is attached to the head main body 18, the main body side plasma passages 70a, 70b … are opened in the concave portion 96, and communicate with the gas pipe 30 via the heating gas passage 98. The relative position of the through hole 100 with respect to the nozzle model body 90 is different from the relative position of the nozzle- side plasma passages 80a and 80b … with respect to the nozzle body 72 in a state in which the nozzle 38 is mounted on the head body 18.
As shown in fig. 10, a control device 150 mainly including a computer is provided in the control box 8. The control device 150 includes an execution unit 150c, a storage unit 150m, an input/output unit 150f, a timer 150t, and the like, and the input/output unit 150f is connected to the flow rate adjustment mechanism 60, the heater 32, the frequency adjustment mechanism 152, the display 154, and the like, and is also connected to a start switch 156, a stop switch 158, and the like. The display 154 displays the state of the plasma apparatus.
The frequency adjustment mechanism 152 includes an a/D (alternating current/direct current) converter, a switching circuit, and the like, which are not shown. An ac voltage supplied from a commercial ac power supply 166 is converted into a dc voltage, and PWM (pulse width modulation) is performed by a switching circuit. Then, a voltage of a predetermined frequency obtained by PWM is applied to the electrode portions 20 and 22.
The pressure sensors 64a to 64d detect the pressure of the gas supplied to the plasma head 6 via the pipes 56a to 56d, in other words, the pressure of the gas inside the plasma head 6. For example, in a state where the normal nozzle 38 is attached to the head body 18, the detection values Pi of the tubes 56a to 56d and the pressure sensors 64a to 64d when the plasma head 6 is not clogged are values corresponding to the sum of the pressure losses Δ Pti in the tubes 56a to 56d and the pressure losses Δ Phi in the plasma head 6 (i represents a, b, c, d, respectively, the same applies hereinafter).
Pi＝ΔPti+ΔPhi(i＝a、b、c、d)
The pressure loss Δ Pti (Δ Pta, Δ Ptb, Δ Ptc, Δ Ptd) in each of the tubes 56a to 56d is determined by the flow rate of the gas flowing through each of the tubes 56a to 56d, when the cross-sectional area, length L, and the like of the tubes 56a to 56d are the same.
The pressure losses Δ Pha, Δ Phb, and Δ Phc in the plasma head 6 are determined based on the sectional areas and lengths of the gas passages 51, 52, and 53, the main body side plasma passages 70a and 70b …, the sectional areas and lengths of the nozzle side plasma passages 80a and 80b …, the flow rate of the gas flowing through the plasma head 6, and the like, and the pressure loss Δ Phd is determined based on the sectional areas and lengths of the gas pipe 30, the heating gas supply passage 36, the heating gas passage 39, the heating gas output passage 89, and the like, the flow rate of the gas flowing through them, and the like. The gas supplied to the gas passages 52, 53 is supplied to the main body side plasma passages 70a, 70b … and the nozzle side plasma passages 80a, 80b … via the discharge space 24, but their pressure loss is mainly determined by the main body side plasma passages 70a, 70b … and the nozzle side plasma passages 80a, 80b …. Therefore, the pressure loss in the plasma head 6 of the gas supplied to the gas passages 51, 52, 53 is substantially the same (Δ Pha ═ Δ Phb ═ Δ Phc).
When the pressure losses of the pipes 56a to 56d are substantially the same, the detection values Pi of the pressure sensors 64a to 64d are mainly determined by the pressure loss in the plasma head 6. In this sense, the pressure sensors 64a to 64d can also be considered to detect the pressure of the gas inside the plasma head 6.
Hereinafter, the detection values Pi of the pressure sensors 64i when the plasma head 6 and the pipes 56a to 56d are not clogged or the like in the state where the normal nozzle 38 is attached to the head main body 18 will be referred to as pressure reference values Pfi, respectively.
The start switch 156 is operated when an instruction is given to drive the plasma apparatus, and the stop switch 158 is operated when an instruction is given to stop the plasma apparatus.
In the plasma apparatus of the present embodiment, when the start switch 156 is turned on, a voltage of a desired frequency is applied to the electrode portions 20 and 22 after a predetermined gas supply time (for example, a time of about 0.1sec to several sec) has elapsed from the time when the supply of the nitrogen gas, the dry air, the process gas, and the like to the plasma head 6 is started. This is because it is preferable to apply a voltage to the electrode portions 20, 22 after the process gas is supplied to the discharge space 24. Then, by generating electric discharge between the electrode portions 20 and 22, the processing gas supplied to the discharge space 24 is converted into plasma, and plasma is generated and output. The plasma is output from the nozzle 38 together with the heating gas and irradiated onto the object W to be treated.
Usually, the teaching of the robot 10 is performed while the plasma head 6 is held by the robot 10 before the plasma processing operation for the object W to be processed. On the other hand, although the nozzle 38 may be damaged by contact with the object W to be processed or a peripheral object in teaching, the nozzle 38 is made of ceramic or the like and is expensive. Therefore, in many cases, the nozzle model 90 is attached to the head main body 18 instead of the nozzle 38 for teaching. However, after the teaching, the start switch 156 may be turned on with the nozzle mold 90 attached, and the pressure inside the nozzle mold 90 may increase to a high temperature. This may cause the nozzle mold 90 to be damaged, thereby making the periphery dirty or the plasma head 6 dirty.
Therefore, in the present embodiment, it is detected whether or not the plasma head 6 is in the nozzle model mounting state, which is the state in which the nozzle model 90 is mounted on the head main body 18, based on the detection values of the pressure sensors 64a to 64d before the elapse of the gas supply time from the time when the supply of the gas to the plasma head 6 is started by the on operation of the start switch 156.
Specifically, when all of the detection values Pa to pd (pi) of the pressure sensors 64a to 64d are higher than the threshold values Ptha to pthd (pthi), the nozzle model assembled state is detected. As described above, since the pressure loss in the nozzle model 90 is larger than the pressure loss in the normal nozzle 38, when the nozzle model 90 is attached to the head main body 18 in place of the normal nozzle 38, the detection values Pi of the pressure sensors 64a to d are all higher than the pressure reference value Pfi. Therefore, in the present embodiment, the threshold Pthi is set to the pressure criterion value Pfi or a value higher than the pressure criterion value Pfi by a set value. The same applies to the case where the plasma head 6 is clogged. When the pipes 56a to 56d and the gas pipe 30 are clogged, the detection value Pj of only a part of the corresponding pressure sensors 64a to d is higher than the threshold value Pthj (j is a part of a, b, c, and d).
The nozzle model assembly state detection routine shown in the flowchart of fig. 11 is executed at predetermined cycle times from the time when the start switch 156 is turned on until the gas supply time elapses.
In step 1 (hereinafter, abbreviated as S1. the same applies to the other steps), the detection values Pi of the pressure sensors 64i are read, and in S2, it is determined whether or not the detection values Pi are higher than the threshold value Pthi. When all the detection values Pi are higher than the threshold values Pthi, respectively, it is detected that the pressure loss of the plasma head 6 is larger than the pressure loss of the normal nozzles 38. In S3, the supply of the gas to the plasma head 6 is completely stopped by the individual flow rate regulators 62a to d, and in S4, the contents of "the nozzle model assembled state or the clogged state" are displayed on the display 154.
On the other hand, if the determination at S2 is no, it is determined at S5 whether or not all of the detection values Pi are equal to or less than the threshold value Pthi. If the determination at S5 is yes, it is detected that the normal nozzle 38 is attached to the head main body 18 and that neither the pipes 56a to 56d nor the plasma head 6 is clogged. In this case, S3, 4 is not executed. However, if the determination at S5 is no, S3 and S354 are similarly executed because it is considered that any of the pipes 56a to 56d or the gas pipe 30 is clogged.
In this way, since the pressure loss of the nozzle model 90 is larger than that in the normal nozzle 38, whether or not the nozzle model is in the assembled state can be easily detected based on the detection value Pi of the pressure sensor 64 i. Further, since the through hole 100 is provided in the nozzle mold 90, the pressure inside the recess 96 can be prevented from increasing, and the nozzle mold 90 can be safely removed when it is detected that the nozzle mold is in the nozzle mold fitted state.
As described above, in the present embodiment, the nozzle model assembly state detection unit is configured by the part stored and the part executed in S1 and S2 of the nozzle model assembly state detection program of fig. 11 of the control device 150, and the gas supply stop unit is configured by the part stored and the part executed in S3. One or two or more of the pressure sensors 64a to 64d may correspond to the pressure sensor described in claim 1. For example, when it is confirmed that the pipes 56a to 56d and the head main body 18 are not clogged, whether or not the nozzle mold is in the assembled state can be detected based on the detection value of one of the pressure sensors 64a to d.
The nozzle model is not limited to the nozzle model 90 in the above embodiment. Fig. 12 shows an example of a nozzle pattern, and in the nozzle pattern 180 shown in fig. 12, a through hole 182 as a gas passage is formed in the holding portion 92 so as to extend in the x direction in a state of opening in the recess 96 and opening outside the plasma head 6, that is, so as to penetrate through a side surface of the holding portion 92. The through hole 182 extends in a direction intersecting the main body side plasma paths 70a, 70b … in a state where the nozzle mold 180 is attached to the head main body 18.
A normal nozzle 200 (hereinafter, may be simply referred to as a nozzle 200) shown in fig. 13 and 14 can be attached to the head main body 18. The nozzle 200 includes a passage structure 204 and a nozzle body 206, and the passage structure 204 includes a passage forming portion 209 and a flange portion 208. A recess 210 is formed in the flange portion 208, and one nozzle-side plasma passage 212 that opens in the recess 210 is formed in the passage forming portion 209. The passage structure 204 is attached to the head main body 18 at the flange portion 208 by bolts not shown. In the state where the passage structure 204 is attached to the head main body 18, all of the plurality of main body- side plasma passages 70a and 70b … are opened in the recess 210. The nozzle-side plasma passage 212 has a cross-sectional area larger than the sum of the cross-sectional areas of the body- side plasma passages 70a and 70b ….
The nozzle body 206 includes a holding portion 214 and a protruding portion 216, and the width in the x direction (length in the x direction) of the protruding portion 216 is narrower than the width of the protruding portion 76 of the nozzle body 72 of the nozzle 38. A recess 220 is formed in the holding portion 214, and a heating gas passage 222 is formed. The heated gas passage 222 communicates with the heated gas supply passage 36 of the coupling portion 34 and the recess 220. In the protruding portion 216, a through hole 224 penetrating the protruding portion 216 in the longitudinal direction is formed in a state of being opened in the recessed portion 220.
The nozzle body 206 is attached to the head body 18 at the holding portion 214 by a plurality of bolts 87, whereby the nozzle 200 is assembled to the head body 18. In this state, the flange portion 208 is positioned inside the recess portion 220, and the passage forming portion 209 is positioned inside the through hole 224. Gaps between the recess 220, the through hole 224, the flange 208, and the passage forming portion 209 serve as a heated gas output passage 226.
The head main body 18 can be provided with a nozzle mold 230 instead of the nozzle 200. As shown in fig. 15 and 16, the nozzle mold 230, i.e., the nozzle mold body 230, includes a holding portion 232 and a protruding portion 234. The dimensions of the holding portions 232 and the protruding portions 234 of the nozzle mold 230 are the same as the dimensions of the holding portions 214 and the protruding portions 216 of the nozzle body 206 of the nozzle 200. A recess 236 and a heated gas passage 238 are formed in the holding portion 232, and a through hole 240 as a gas passage is provided in a portion of the holding portion 232 apart from a position corresponding to the protrusion 234, the through hole 240 penetrating the holding portion 232 in the z direction in a state where it is opened in the recess 236 and opened outside the plasma head 6, even in a state where the inside of the nozzle mold 230 communicates with the outside of the plasma head 6. The cross-sectional area of the through hole 240 is smaller than the sum of the cross-sectional areas of the main body-side plasma passages 70a and b …, smaller than the cross-sectional area of the heating gas passage 226, and smaller than the cross-sectional area of the nozzle-side plasma passage 208 of the normal nozzle 200. Also, the pressure loss in the nozzle model 230 is larger than that in the normal nozzle 200. An annular slit 242 is formed in the proximal end portion of the protrusion 234.
The nozzle mold 230 is detachably attached to the head main body 18 at the holding portion 232 by a plurality of bolts 87, but in this state, the main body side plasma passages 70a and 70b … are opened in the concave portion 236, and the gas pipe 30 is communicated via the heated gas passage 238. Also, the relative position of the through hole 240 with respect to the nozzle model body 230 is different from the relative position of the nozzle-side plasma passage 212 with respect to the nozzle body 206 in the normal nozzle 200.
In the present embodiment, in the state where the nozzle mold 230 is attached to the head main body 18, even when the start switch 156 is turned on, the nozzle mold attachment state is detected when each of the detection values Pi of the pressure sensors 64a to 64d is higher than the threshold value Pthi'. For example, the threshold value Pthi' in the present embodiment may be set to a value smaller than the threshold value Pthi in the above-described embodiment. This is because the pressure loss in the plasma head 6 in the case where the normal nozzle 200 is fitted to the head main body 18 is smaller than the pressure loss in the plasma head 6 in the case where the normal nozzle 38 is fitted.
In the above embodiment, the threshold value is changed for each normal nozzle, but the threshold value does not necessarily need to be changed for each normal nozzle, and may be always the same value. When the pressure loss in the nozzle model is sufficiently larger than the pressure loss in a normal nozzle that can be mounted on the head main body 18, the threshold value is not problematic even if the threshold value is the same.
Further, two or more through holes may be provided in the nozzle mold.
The structure of the plasma generating portion 12 is not limited to the plasma generating portions of the above embodiments. For example, the heating gas supply unit 14 is not indispensable. Further, it is not essential to supply nitrogen gas to the plasma generating part 12, and only the process gas may be supplied. In this case, whether or not the nozzle model is in the assembled state is detected based on the detection value of the pressure sensor 64c, and the present disclosure can be implemented in various modifications and improvements based on the knowledge of those skilled in the art in addition to the aspects described in the above embodiments.
Description of the reference numerals
12: plasma generation unit 24: discharge spaces 20, 22: electrode portion 38, 200: nozzle 30: gas pipes 44c, 45 c: gas passages 51, 52, 53: gas passage 64: the pressure sensor 70: body-side plasma passage 89, 226: heating gas output passage 80, 212: nozzle- side plasma passage 90, 180, 230: nozzle models 100, 182, 240: through-hole 150: control device
Can claim the disclosure of
(1) A plasma apparatus, comprising: a plasma head for outputting plasma generated by converting a supplied process gas into plasma from a nozzle; and a pressure sensor that detects a pressure of a gas in the plasma head, wherein the nozzle is detachably attached to a head main body of the plasma head, and a nozzle model is attachable to the head main body in place of a normal nozzle as the nozzle, and the plasma apparatus includes a nozzle model attachment state detection unit that detects whether or not the plasma head is in a nozzle model attachment state in which the nozzle model is attached to the head main body, based on the pressure of the gas detected by the pressure sensor.
For example, it can be detected that the plasma head is in the nozzle model fitted state when the detection value of the pressure sensor is higher than the threshold value. The nozzle module according to any one of the items (4) to (8) can be attached to a head body of a plasma head of the plasma apparatus described in this item.
(2) The plasma apparatus according to the item (1), wherein the plasma head includes a pair of electrode portions, the process gas is turned into the plasma by a discharge between the pair of electrode portions, and the nozzle mold assembled state detecting portion detects whether the plasma head is in the nozzle mold assembled state in a state where the process gas is supplied to the plasma head but a voltage is not applied to the pair of electrode portions.
(3) The plasma apparatus according to the item (1) or (2), wherein the plasma apparatus comprises: a flow rate adjustment mechanism that controls at least a flow rate of the process gas supplied to the plasma head; and a gas supply stopping unit configured to stop the supply of the process gas to the plasma head by the flow rate adjusting mechanism when the nozzle mold assembly state detecting unit detects that the plasma head is in the nozzle mold assembly state.
In some cases, a plurality of gases including a process gas are supplied to the plasma head, and in this case, the flow rates of the plurality of gases supplied to the plasma head are adjusted by a flow rate adjusting mechanism. Further, when the plasma head is in the nozzle mold mounted state, the supply of all of the plurality of gases including the process gas to the plasma head can be stopped.
(4) A nozzle model for a plasma head, which is a nozzle model that can be attached to and detached from a head main body of the plasma head in place of a normal nozzle, the plasma head including the head main body and a nozzle that can be attached to and detached from the head main body and that outputs plasma from the nozzle, the normal nozzle being the nozzle, wherein at least one main body side plasma passage that is a plasma passage is formed in the head main body, the nozzle model has at least one gas passage that communicates the inside of the nozzle model with the outside of the plasma head, and the sum of the cross-sectional areas of the at least one gas passage is smaller than the sum of the cross-sectional areas of the at least one main body side plasma passage.
For example, when the sum of the sectional areas of the nozzle-side plasma passages of each of a plurality of normal nozzles that can be mounted on the head main body is equal to or greater than the sum of the sectional areas of the main-body-side plasma passages, the sum of the sectional areas of the gas passages of the normal nozzle model is generally smaller than the sum of the sectional areas of the nozzle-side plasma passages of the normal nozzles. The gas passage is a passage for communicating the inside of the nozzle mold with the outside of the plasma head, and the heating gas output passage does not match. Fig. 1 of patent document 3 describes a torch in which a wire insertion hole formed in a tip model has a smaller cross-sectional area than a wire insertion hole of a torch body. However, the through hole of the tip mold is a hole for inserting a wire and is not a gas passage.
(5) A nozzle mold for a plasma head, which can be attached to and detached from a head body of the plasma head in place of a normal nozzle, the plasma head includes the head body and a nozzle that is attachable to and detachable from the head body, and outputs plasma from the nozzle, the normal nozzle being the nozzle, wherein at least one nozzle-side plasma passage as a plasma passage that outputs the plasma is formed in the normal nozzle, the nozzle mold has at least one through hole for communicating the inside of the nozzle mold with the outside of the plasma head, the relative position of each through hole of the at least one through hole with respect to the nozzle mold body, which is the main body of the nozzle mold, is different from the relative position of each nozzle-side plasma passage of the at least one nozzle-side plasma passage with respect to the nozzle main body of the normal nozzle.
The through hole of the nozzle mold and the nozzle-side plasma passage of the normal nozzle are different in shape (cross-sectional area, length, etc.), relative position, magnitude of pressure loss, and the like. The heated gas output passage does not correspond to the through hole.
(6) A nozzle mold for a plasma head, which is attachable to and detachable from a head main body of the plasma head in place of a normal nozzle, the plasma head being provided with the head main body and a nozzle that is attachable to and detachable from the head main body and outputs plasma from the nozzle, the normal nozzle being the nozzle, wherein at least one main body side plasma passage serving as a plasma passage is formed in the head main body, and the nozzle mold has a through hole that communicates an inside of the nozzle mold with an outside of the plasma head and extends in a direction intersecting with an extending direction of the main body side plasma passage.
Patent documents 2 and 3 do not describe a torch model having a through hole extending in a direction different from a direction of a passage formed in a main body side of a torch main body.
(7) A nozzle mold for a plasma head, which is attachable to and detachable from a head main body of the plasma head instead of a normal nozzle, wherein the plasma head includes the head main body and a nozzle that is attachable to and detachable from the head main body and outputs plasma from the nozzle, and the normal nozzle is the nozzle, and a nozzle mold main body that is a main body of the nozzle mold is provided with a fragile portion.
Patent documents 2 and 3 do not describe the provision of a weakened portion in the torch model body. The nozzle mold of the present disclosure may not have a through hole.
(8) A nozzle pattern for a plasma head, which is attachable to and detachable from a head main body of the plasma head in place of a normal nozzle, wherein the plasma head includes the head main body and a nozzle that is attachable to and detachable from the head main body, and outputs plasma from the nozzle, and the normal nozzle is the nozzle, and wherein a pressure loss in the nozzle pattern is larger than a pressure loss in the normal nozzle.
The through-holes formed in the nozzle patterns described in patent documents 2 and 3 have the same shape as the through-holes formed in the normal nozzles. Therefore, it is estimated that the pressure loss in the through hole of the nozzle model is substantially the same as the pressure loss in the through hole of the normal nozzle.
Claims (8)
1. A plasma apparatus, comprising:
a plasma head for outputting plasma generated by converting a supplied process gas into plasma from a nozzle; and
a pressure sensor that detects a pressure of a gas within the plasma head, wherein,
The nozzle is detachably mounted on a head body of the plasma head, a nozzle mold can be mounted on the head body in place of a normal nozzle as the nozzle,
the plasma apparatus includes a nozzle model-fitted state detection unit that detects whether the plasma head is in a nozzle model-fitted state, which is a state in which the nozzle model is fitted to the head main body, based on the pressure of the gas detected by the pressure sensor.
2. The plasma apparatus according to claim 1,
the plasma head includes a pair of electrode portions, the process gas is made into plasma by electric discharge between the pair of electrode portions,
the nozzle mold assembly state detection unit detects whether the plasma head is in the nozzle mold assembly state in a state where the process gas is supplied to the plasma head and the voltage is not applied to the pair of electrode portions.
3. The plasma apparatus according to claim 1 or 2,
the plasma device includes: a flow rate adjustment mechanism that controls at least a flow rate of the process gas supplied to the plasma head; and a gas supply stopping unit configured to stop the supply of the process gas to the plasma head by the flow rate adjusting mechanism when the nozzle mold assembly state detecting unit detects that the plasma head is in the nozzle mold assembly state.
4. A nozzle model for a plasma head, which is attachable to and detachable from a head main body of the plasma head in place of a normal nozzle, wherein the plasma head includes the head main body and a nozzle that is attachable to and detachable from the head main body and outputs plasma from the nozzle, and the normal nozzle is the nozzle,
at least one body-side plasma passage as a plasma passage is formed in the head body,
the nozzle pattern having at least one gas passage communicating an interior of the nozzle pattern with an exterior of the plasma head,
the sum of the sectional areas of the at least one gas passage is smaller than the sum of the sectional areas of the at least one body-side plasma passage.
5. A nozzle model for a plasma head, which is attachable to and detachable from a head main body of the plasma head in place of a normal nozzle, wherein the plasma head includes the head main body and a nozzle that is attachable to and detachable from the head main body and outputs plasma from the nozzle, and the normal nozzle is the nozzle,
forming at least one nozzle-side plasma passage as a plasma passage for outputting the plasma at the normal nozzle,
The nozzle mold has at least one through hole for communicating the inside of the nozzle mold with the outside of the plasma head,
the relative position of each through hole of the at least one through hole with respect to the nozzle mold body, which is the main body of the nozzle mold, is different from the relative position of each nozzle-side plasma passage of the at least one nozzle-side plasma passage with respect to the nozzle main body of the normal nozzle.
6. A nozzle model for a plasma head, which is attachable to and detachable from a head main body of the plasma head in place of a normal nozzle, wherein the plasma head includes the head main body and a nozzle that is attachable to and detachable from the head main body and outputs plasma from the nozzle, and the normal nozzle is the nozzle,
at least one body-side plasma passage as a plasma passage is formed in the head body,
the nozzle mold has a through hole which communicates the inside of the nozzle mold with the outside of the plasma head and extends in a direction intersecting with the extending direction of the main body side plasma passage.
7. A nozzle model for a plasma head, which is attachable to and detachable from a head main body of the plasma head in place of a normal nozzle, wherein the plasma head includes the head main body and a nozzle that is attachable to and detachable from the head main body and outputs plasma from the nozzle, and the normal nozzle is the nozzle,
The nozzle mold body, which is the main body of the nozzle mold, is provided with a weak portion.
8. A nozzle model for a plasma head, which is attachable to and detachable from a head main body of the plasma head in place of a normal nozzle, wherein the plasma head includes the head main body and a nozzle that is attachable to and detachable from the head main body and outputs plasma from the nozzle, and the normal nozzle is the nozzle,
the pressure loss in the nozzle model is larger than that in the normal nozzle.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2018/011151 WO2019180841A1 (en) | 2018-03-20 | 2018-03-20 | Plasma device, dummy nozzle for plasma head |
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| CN111867773A true CN111867773A (en) | 2020-10-30 |
| CN111867773B CN111867773B (en) | 2022-08-23 |
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| JP (1) | JP7066827B2 (en) |
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|---|---|---|---|---|
| JPS62172580U (en) * | 1986-04-22 | 1987-11-02 | ||
| JPH0726070U (en) * | 1993-09-30 | 1995-05-16 | 株式会社小松製作所 | Teaching nozzle device for plasma cutting machine |
| JP2014231066A (en) * | 2013-05-28 | 2014-12-11 | 株式会社ダイヘン | Teaching tip |
| CN105873712A (en) * | 2014-01-07 | 2016-08-17 | 林肯环球股份有限公司 | Increased durability welding torch assembly and components |
| US20170001255A1 (en) * | 2015-07-02 | 2017-01-05 | Lincoln Global, Inc. | Adaptive plasma cutting system and method |
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2018
- 2018-03-20 JP JP2020507187A patent/JP7066827B2/en active Active
- 2018-03-20 WO PCT/JP2018/011151 patent/WO2019180841A1/en active Application Filing
- 2018-03-20 CN CN201880091217.4A patent/CN111867773B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62172580U (en) * | 1986-04-22 | 1987-11-02 | ||
| JPH0726070U (en) * | 1993-09-30 | 1995-05-16 | 株式会社小松製作所 | Teaching nozzle device for plasma cutting machine |
| JP2014231066A (en) * | 2013-05-28 | 2014-12-11 | 株式会社ダイヘン | Teaching tip |
| CN105873712A (en) * | 2014-01-07 | 2016-08-17 | 林肯环球股份有限公司 | Increased durability welding torch assembly and components |
| JP2017507783A (en) * | 2014-01-07 | 2017-03-23 | リンカーン グローバル， インコーポレイテッドＬｉｎｃｏｌｎ Ｇｌｏｂａｌ， Ｉｎｃ． | Welding torch assembly and components with improved durability |
| US20170001255A1 (en) * | 2015-07-02 | 2017-01-05 | Lincoln Global, Inc. | Adaptive plasma cutting system and method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPWO2019180841A1 (en) | 2021-03-11 |
| CN111867773B (en) | 2022-08-23 |
| WO2019180841A1 (en) | 2019-09-26 |
| JP7066827B2 (en) | 2022-05-13 |
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