CN111863588A - Excimer lamp - Google Patents
Excimer lamp Download PDFInfo
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- CN111863588A CN111863588A CN202010830481.4A CN202010830481A CN111863588A CN 111863588 A CN111863588 A CN 111863588A CN 202010830481 A CN202010830481 A CN 202010830481A CN 111863588 A CN111863588 A CN 111863588A
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- heat dissipation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/36—Seals between parts of vessels; Seals for leading-in conductors; Leading-in conductors
- H01J61/366—Seals for leading-in conductors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/52—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space
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- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Electromagnetism (AREA)
- Non-Portable Lighting Devices Or Systems Thereof (AREA)
Abstract
The invention relates to the technical field of lamps and discloses an excimer lamp, which comprises a first lamp cap, a second lamp cap, a first electrode tip, a second electrode tip, a conductive heat dissipation rod, a light-transmitting annular sleeve and a conductive ring network, wherein the first lamp cap is arranged on the first lamp cap; according to the excimer lamp provided by the invention, through the arrangement of the conductive heat dissipation rod, a large amount of heat generated by light emitting in the light-transmitting annular sleeve is dissipated and conducted through the conductive heat dissipation rod and then is dissipated and conducted through the first lamp holder; meanwhile, the conductive ring network can conduct heat dissipation and conduction on a large amount of heat generated by light emission in the light-transmitting annular sleeve and conduct heat dissipation and conduction through the second lamp cap; this kind of structural arrangement mode has promoted the radiating effect of whole excimer lamp greatly, derives printing opacity annular sleeve's heat, makes the inside temperature of printing opacity annular sleeve can fall to stabilize excimer lamp's excitation efficiency, thereby produce continuous stable ultraviolet ray.
Description
Technical Field
The invention relates to the technical field of lamps, in particular to an excimer lamp.
Background
The excimer lamp, also called ultraviolet excimer lamp, bombards the excimer gas in the lamp tube with high voltage and high frequency outside the lamp tube to emit ultraviolet ray, and because the photon energy of the emitted ultraviolet ray is higher than the bond energy of most organic molecules, it can realize good optical cleaning and optical modification in the manufacture of semiconductor and liquid crystal screen, and can kill virus and bacteria, etc. with good treatment effect and fast speed.
The excimer lamp has a low excitation efficiency, and the temperature of the excimer lamp rises after a period of operation, which causes a drastic decrease in excitation efficiency, so that the heat dissipation of the excimer lamp becomes very important to maintain the excitation efficiency of the excimer lamp. When the excimer lamp is used, the excimer lamp can be excited under a certain high voltage, and the electric shock prevention function needs to be realized on the structural design of the excimer lamp, so that the human body is prevented from being injured.
Disclosure of Invention
The invention aims to provide an excimer lamp, and aims to solve the problem that the excimer lamp in the prior art is poor in heat dissipation effect.
The present invention is achieved as described above, and an excimer lamp includes:
a first lamp cap made of a thermally conductive but electrically non-conductive material;
a second lamp cap disposed opposite the first lamp cap, the second lamp cap being made of a thermally conductive but electrically non-conductive material;
the first electrode tip is arranged in the first lamp holder and is used for being connected with an external power supply;
the second electrode tip is arranged in the second lamp cap and is used for being connected with an external power supply;
the two ends of the conductive heat dissipation rod are respectively arranged in the first lamp cap and the second lamp cap, and the conductive heat dissipation rod is electrically connected with the first electrode tip;
the light-transmitting annular sleeve is arranged around the conductive heat dissipation rod, the extending direction of the light-transmitting annular sleeve is consistent with the extending direction of the conductive heat dissipation rod, the annular sleeve is provided with an accommodating space, and excimer gas is filled in the accommodating space;
the conductive ring network surrounds the light-transmitting annular sleeve, the extending direction of the conductive ring network is consistent with the extending direction of the light-transmitting annular sleeve, and one end of the conductive ring network is electrically connected with the second electrode tip.
Further, the light-transmitting annular sleeve comprises an inner tube and an outer tube connected with the inner tube, a gap is formed between the inner tube and the outer tube, and the accommodating space is formed by the gap.
Further, the excimer lamp still includes electrically conductive cooling tube, electrically conductive cooling tube's extending direction with electrically conductive heat dissipation stick's extending direction is unanimous, electrically conductive cooling tube's inner wall encircles electrically conductive heat dissipation stick arranges, electrically conductive cooling tube with the clearance has between the electrically conductive heat dissipation stick, the clearance intussuseption is filled with elasticity conducting material, electrically conductive cooling tube's outer wall laminating printing opacity annular casing's inner tube.
Further, printing opacity annular tube's quantity is a plurality of, along printing opacity annular tube's extending direction, and is a plurality of printing opacity annular tube arranges according to the preface interval, is provided with annular heat radiation fin between two adjacent printing opacity annular tube, annular heat radiation fin cover is established the periphery of electrically conductive cooling tube, the printing opacity annular tube of both sides is supported respectively at annular heat radiation fin's both ends.
Further, the second electrode tip comprises a first connecting section and a second connecting section, an annular ring is arranged at one end, close to the second electrode tip, of the conductive ring network in an inward protruding mode, a conductive fixing nut is arranged in the second lamp cap and provided with a threaded hole, a fixing portion is arranged on the outer periphery of one end of the fixing nut in a surrounding mode, the fixing portion tightly presses and fixes the annular ring of the conductive ring network, the first connecting section of the second electrode tip is provided with external threads, and the first connecting section of the second electrode tip is in threaded connection with the fixing nut.
Further, still be provided with in the second lamp holder and keep apart the pottery, keep apart the pottery and have a section and a third linkage segment that compress tightly, the section that compresses tightly is fixed fixation nut's fixed part, the third linkage segment with electrically conductive radiating rod cooperation contact, keep apart the pottery and kept apart electrically conductive radiating rod with fixation nut.
Furthermore, one end of the conductive heat dissipation rod, which is close to the first electrode tip, is provided with a thread groove, the first electrode tip is provided with a fourth connecting section and a fifth connecting section, the fourth connecting section is provided with an external thread, and the fourth connecting section of the first electrode tip is in threaded connection with the thread groove of the conductive heat dissipation rod.
Further, the outer wall in the middle of the fifth connecting section of the first electrode tip is inwards sunken to form a first annular groove, the excimer lamp further comprises a first electrode buckle used for being connected with the fifth connecting section in a clamped mode, the first electrode buckle is embedded into a first embedding section in the first lamp holder and stretches out a first stretching section of the first lamp holder, the first stretching section is used for being connected with an external power supply, the first embedding section is provided with a first clamping groove, the fifth connecting section is embedded into the first clamping groove, the outer wall of the first embedding section is provided with a first limiting groove, the first limiting groove is communicated with the first clamping groove, the first limiting groove and the first annular groove of the fifth connecting section are arranged oppositely, a first elastic clamp spring is arranged in the first limiting groove, and the first elastic clamp spring can limit the fifth connecting section.
Further, the outer wall in the middle of the second linkage segment of the second electrode tip is inwards sunken to form a second annular groove, the excimer lamp further comprises a second electrode buckle used for being connected with the second linkage segment in a clamped mode, the second electrode buckle is provided with an embedded second embedded segment in the second lamp holder and extends out the second extending segment of the second lamp holder, the second extending segment is used for being connected with an external power supply, the second embedded segment is provided with a second clamping groove, the second linkage segment is embedded into the second clamping groove, the outer wall of the second embedded segment is provided with a second limiting groove, the second limiting groove is communicated with the second clamping groove, the second limiting groove is arranged opposite to the second annular groove of the second linkage segment, a second elastic clamp spring is arranged in the second limiting groove, and the second elastic clamp spring can limit the second linkage segment.
Furthermore, a first protective sleeve is sleeved on the periphery of the first electrode buckle, a first protective ring is annularly arranged in the middle of the first protective sleeve, and the first protective ring is used for sealing a gap between the first lamp holder and the first protective sleeve; the periphery cover is equipped with the second protective sheath to the second electrode knot, the middle part ring of second protective sheath is equipped with the second guard circle, the second guard circle is used for the closing cap the second lamp holder with clearance between the second protective sheath.
Compared with the prior art, the excimer lamp provided by the invention has the advantages that through the arrangement of the conductive heat dissipation rods, a large amount of heat generated by light emitting in the light-transmitting annular sleeve is dissipated and conducted through the conductive heat dissipation rods and then is dissipated and conducted through the first lamp holder; meanwhile, the conductive ring network can conduct heat dissipation and conduction on a large amount of heat generated by light emission in the light-transmitting annular sleeve and conduct heat dissipation and conduction through the second lamp cap; this kind of structural arrangement mode has promoted the radiating effect of whole excimer lamp greatly, derives printing opacity annular sleeve's heat, makes the inside temperature of printing opacity annular sleeve can fall to stabilize excimer lamp's excitation efficiency, thereby produce continuous stable ultraviolet ray.
Drawings
FIG. 1 is a schematic perspective view of an excimer lamp provided in an embodiment of the present invention;
FIG. 2 is a schematic sectional view of an excimer lamp provided in an embodiment of the present invention;
FIG. 3 is an enlarged schematic view at A of FIG. 2 according to an embodiment of the present invention;
FIG. 4 is an enlarged schematic view of FIG. 2 at B according to an embodiment of the present invention;
FIG. 5 is an enlarged schematic view at C of FIG. 2 according to an embodiment of the present invention;
fig. 6 is an exploded view of the first electrode button and the first electrode head provided by the embodiment of the invention;
fig. 7 is an exploded view of a second electrode button and a second electrode head provided in the embodiment of the invention;
fig. 8 is a schematic perspective view of a conductive loop network provided by an embodiment of the present invention;
FIG. 9 is a schematic perspective view of a light-transmissive annular sleeve provided in accordance with an embodiment of the present invention;
fig. 10 is a perspective view of a ring-shaped heat sink fin according to an embodiment of the present invention;
FIG. 11 is a perspective view of a retaining nut provided in accordance with an embodiment of the present invention;
fig. 12 is a schematic perspective view of an isolating ceramic provided by an embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
The same or similar reference numerals in the drawings of the present embodiment correspond to the same or similar components; in the description of the present invention, it should be understood that if there is an orientation or positional relationship indicated by the terms "upper", "lower", "left", "right", etc. based on the orientation or positional relationship shown in the drawings, it is only for convenience of describing the present invention and simplifying the description, but it is not intended to indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and therefore, the terms describing the positional relationship in the drawings are only used for illustrative purposes and are not to be construed as limiting the present patent, and the specific meaning of the terms may be understood by those skilled in the art according to specific circumstances.
The following describes the implementation of the present invention in detail with reference to specific embodiments.
Referring to fig. 1-12, a preferred embodiment of the present invention is provided.
An excimer lamp, comprising:
a first lamp cap 1, the first lamp cap 1 being made of a thermally conductive but electrically non-conductive material;
a second lamp cap 2, the second lamp cap 2 being arranged opposite to the first lamp cap 1, the second lamp cap 2 being made of a thermally conductive but electrically non-conductive material;
the first electrode tip 3 is installed in the first lamp cap 1, and the first electrode tip 3 is used for being connected with an external power supply;
the second electrode tip 4 is installed in the second lamp cap 2, and the second electrode tip 4 is used for being connected with an external power supply;
the lamp holder comprises a first lamp holder 1, a second lamp holder 2, a conductive heat dissipation rod 5 and a first electrode tip 3, wherein the two ends of the conductive heat dissipation rod 5 are respectively installed in the first lamp holder 1 and the second lamp holder 2;
the light-transmitting annular sleeve 6 is arranged around the conductive heat dissipation rod 5, the extending direction of the light-transmitting annular sleeve 6 is consistent with that of the conductive heat dissipation rod 5, the annular sleeve is provided with an accommodating space, and excimer gas is filled in the accommodating space;
the conductive ring network 7 is arranged around the light-transmitting ring sleeve 6, the extending direction of the conductive ring network 7 is consistent with that of the light-transmitting ring sleeve 6, and one end of the conductive ring network 7 is electrically connected with the second electrode tip 4.
The light-emitting principle of the excimer lamp is as follows: first electrode tip 3 connects the electricity, electrically conductive radiating rod 5 is connected with first electrode tip 3 electricity, second electrode tip 4 connects the electricity, second electrode tip 4 is connected with electrically conductive looped netowrk 7 electricity, the printing opacity annular sleeve 6 encircles electrically conductive radiating rod 5 and arranges, electrically conductive looped netowrk 7 encircles printing opacity annular sleeve 6 and arranges, two electrodes of mutual disposition have been formed in the inboard and the outside at printing opacity annular sleeve 6 equivalently, discharge space has been formed between these two electrodes, apply high enough discharge voltage at two electrodes, excimer gas in the printing opacity annular sleeve 6 in the discharge space can be punctured, form dielectric barrier discharge, and can produce the ultraviolet ray.
According to the excimer lamp, through the arrangement of the conductive heat dissipation rod 5, a large amount of heat generated by light emission in the light-transmitting annular sleeve 6 is dissipated and conducted through the conductive heat dissipation rod 5 and then is dissipated and conducted through the first lamp holder 1; meanwhile, the conductive ring network 7 can conduct heat dissipation and conduction on a large amount of heat generated by light emission in the light-transmitting annular sleeve 6 and conduct heat dissipation and conduction through the second lamp holder 2; this kind of structural arrangement mode has promoted the radiating effect of whole excimer lamp greatly, derives the heat of printing opacity annular tube 6, makes the inside temperature of printing opacity annular tube 6 can drop to stabilize excimer lamp's excitation efficiency, thereby produce continuous stable ultraviolet ray.
The excimer gas is a mixed gas formed by mixing an inert gas and a halogen gas.
Preferably, the first lamp cap 1 and the second lamp cap 2 are made of a ceramic material, which has firstly a good thermal conductivity, while the ceramic is not electrically conductive; furthermore, the light-transmissive annular duct may be made of glass or sapphire; the conductive ring net 7 and the conductive heat dissipation rod 5 are made of metal materials, and have good heat dissipation performance while having conductive performance.
Specifically, the light-transmitting annular sleeve 6 comprises an inner tube 61 and an outer tube 62 connected with the inner tube 61, wherein a space is formed between the inner tube 61 and the outer tube 62, and the space forms an accommodating space; the excimer gas is arranged in the accommodating space.
The light-transmitting annular sleeve 6 is provided with an opening connected with the accommodating space, the light-transmitting annular sleeve 6 is further provided with a tube cover used for opening or closing the opening, when the light-transmitting annular sleeve 6 is required to be filled with the excimer gas, the tube cover only needs to be opened, the excimer gas is filled into the light-transmitting annular sleeve 6 from the opening, and after the excimer gas is filled, the tube cover only needs to be closed.
As an embodiment of the present invention, the excimer lamp further comprises an electrically conductive heat dissipation tube 8, the extending direction of the electrically conductive heat dissipation tube 8 is consistent with the extending direction of the electrically conductive heat dissipation rod 5, the inner wall of the electrically conductive heat dissipation tube 8 is arranged around the electrically conductive heat dissipation rod 5, a gap is formed between the electrically conductive heat dissipation tube 8 and the electrically conductive heat dissipation rod 5, the gap is filled with an elastic and electrically conductive material 9, and the outer wall of the electrically conductive heat dissipation tube 8 is attached to the inner tube 61 of the light-transmitting annular sleeve 6; in this way, firstly, the electric connection between the conductive radiating rod 5 and the conductive radiating pipe 8 is realized by filling the elastic conductive material 9, such as a metal mesh, in the gap, so that the conductive radiating pipe 8 and the conductive looped network 7 form oppositely arranged electrodes, and the excimer gas in the light-transmitting annular sleeve 6 can be excited; simultaneously because printing opacity annular sleeve 6 can produce a large amount of heats when carrying out luminous work, the phenomenon of thermal expansion takes place easily for printing opacity annular sleeve 6, because inner tube 61 laminating electrically conductive heat dissipation tube 8's of printing opacity annular sleeve 6 outer wall, it is gapped between electrically conductive heat dissipation tube 8 and the electrically conductive heat dissipation stick 5, elastic conducting material is filled in the clearance, thus, even printing opacity annular sleeve 6 takes place the phenomenon of thermal expansion, the space of the certain thermal expansion deformation of printing opacity annular sleeve 6 has also been given, can not be because of receiving the extrusion and broken, the life of printing opacity annular sleeve 6 has been improved. Specifically, the heat and conductive pipe 8 is made of metal having better electrical and thermal conductivity.
As an embodiment of the present invention, the number of the light-transmitting annular sleeves 6 is plural, the plural light-transmitting annular sleeves 6 are sequentially arranged at intervals along the extending direction of the light-transmitting annular sleeves 6, an annular heat dissipation fin 10 is arranged between two adjacent light-transmitting annular sleeves 6, the annular heat dissipation fin 10 is sleeved on the periphery of the conductive heat dissipation tube 8, and two ends of the annular heat dissipation fin 10 are respectively abutted against the light-transmitting annular sleeves 6 on two sides; if the length of the light-transmitting annular sleeve 6 is too long, a large amount of heat is generated in the working process, so that the annular heat-radiating fins 10 are arranged between the adjacent light-transmitting annular sleeves 6 by arranging the plurality of light-transmitting annular sleeves 6 which are arranged in sequence, and the annular heat-radiating fins 10 can be made of ceramic materials with better heat conductivity, and the arrangement mode is very favorable for the dissipation of the heat generated by the light-transmitting annular sleeves 6.
Specifically, the second electrode tip 4 comprises a first connecting section 41 and a second connecting section 42, an annular ring 71 is convexly arranged inward at one end of the conductive ring net 7 close to the second electrode tip 4, an electrically conductive fixing nut 21 is arranged in the second lamp holder 2, the fixing nut 21 is provided with a threaded hole, a fixing part 211 is annularly arranged on the outer periphery of one end of the fixing nut 21, the fixing part 211 tightly presses the annular ring 71 of the fixed conductive ring net 7, the first connecting section 41 of the second electrode tip 4 is provided with an external thread, and the first connecting section 41 of the second electrode tip 4 is in threaded connection with the fixing nut 21; by this arrangement of the structure, the electrical connection of the conductive loop network 7 to the second electrode head 4 is achieved.
Furthermore, an isolation ceramic 22 is further arranged in the second lamp holder 2, the isolation ceramic 22 is provided with a pressing section 221 and a third connecting section 222, the pressing section 221 presses the fixing part 211 of the fixing nut 21, the third connecting section 222 is in fit contact with the conductive heat dissipation rod 5, and the isolation ceramic 22 isolates the conductive heat dissipation rod 5 from the fixing nut 21; the pressing section 221 of the isolating ceramic 22 presses the fixing portion 211 of the fixing nut 21, further presses the annular ring 71 of the conductive ring network 7, so that the conductive ring network 7 is fixed, and the isolating ceramic 22 isolates the conductive heat dissipation rod 5 and the fixing nut 21, namely, the isolating of the conductive heat dissipation rod 5 and the second electrode tip 4 is realized.
Specifically, one end of the conductive heat sink rod 5 near the third connection section 222 has a groove, and the third connection section 222 is embedded in the groove to achieve a fit contact with the conductive heat sink rod 5.
Specifically, one end of the conductive heat dissipation rod 5 close to the first electrode tip 3 is provided with a threaded groove, the first electrode tip 3 is provided with a fourth connecting section 31 and a fifth connecting section 32, the fourth connecting section 31 is provided with an external thread, and the fourth connecting section 31 of the first electrode tip 3 is in threaded connection with the threaded groove of the conductive heat dissipation rod 5; in this way, the electrical connection of the electrically conductive heat-dissipating rod 5 to the first electrode head 3 is achieved.
Furthermore, the outer wall in the middle of the fifth connecting section 32 of the first electrode head 3 is recessed inwards to form a first annular groove 321, the excimer lamp further comprises a first electrode buckle 11 used for being clamped with the fifth connecting section 32, the first electrode buckle 11 is provided with a first embedding section 111 embedded in the first lamp holder 1 and a first extending section 112 extending out of the first lamp holder 1, the first extending section 112 is used for being connected with an external power supply, the first embedding section 111 is provided with a first clamping groove 1111, the fifth connecting section 32 is embedded in the first clamping groove 1111, the outer wall of the first embedding section 111 is provided with a first limiting groove 1112, the first limiting groove 1112 penetrates through the first clamping groove 1111, the first limiting groove 1112 and the first annular groove 321 of the fifth connecting section 32 are arranged in a right-against mode, a first elastic snap spring 1113 is arranged in the first limiting groove 1112, and the first elastic snap spring 1113 can limit the fifth connecting section 32; first electrode buckle 11 is used for being connected with external power supply, and first electrode tip 3 can be directly detained 11 joints with first electrode, realizes being connected with external power supply, the assembly of being convenient for.
The outer wall of the middle of the second connecting section 42 of the second electrode head 4 is recessed inwards to form a second annular groove 421, the excimer lamp further comprises a second electrode buckle 23 used for being clamped with the second connecting section 42, the second electrode buckle 23 is provided with a second embedding section 231 embedded into the second lamp holder 2 and a second extending section 232 extending out of the second lamp holder 2, the second extending section 232 is used for being connected with an external power supply, the second embedding section 231 is provided with a second clamping groove 2311, the second connecting section 42 is embedded into the second clamping groove 2311, the outer wall of the second embedding section 231 is provided with a second limiting groove 2312, the second limiting groove 2312 penetrates through the second clamping groove 2311, the second limiting groove 2312 is arranged opposite to the second annular groove 421 of the second connecting section 42, a second elastic clamp spring 2313 is arranged in the second limiting groove 2312, and the second elastic clamp spring 2313 can limit the second connecting section 42; the second electrode buckle 23 is used for being connected with an external power supply, and the second electrode tip 4 can be directly clamped with the second electrode buckle 23 to be connected with the external power supply, so that the assembly is convenient.
The first electrode buckle 11 is sleeved with a first protective sleeve 113 at the periphery, a first protective ring 1131 is annularly arranged in the middle of the first protective sleeve 113, and the first protective ring 1131 is used for covering a gap between the first lamp holder 1 and the first protective sleeve 113; the second electrode buckle 23 is sleeved with a second protective sleeve 233, a second protective ring 2331 is annularly arranged in the middle of the second protective sleeve 233, and the second protective ring 2331 is used for covering a gap between the second lamp holder 2 and the second protective sleeve 233; the first protection ring 113, the first protection ring 1131, the second protection ring 233 and the second protection ring 2331 can effectively prevent the high voltage from contacting with the human body, and prevent the human body from being injured.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents and improvements made within the spirit and principle of the present invention are intended to be included within the scope of the present invention.
Claims (10)
1. An excimer lamp, comprising:
a first lamp cap made of a thermally conductive but electrically non-conductive material;
a second lamp cap disposed opposite the first lamp cap, the second lamp cap being made of a thermally conductive but electrically non-conductive material;
the first electrode tip is arranged in the first lamp holder and is used for being connected with an external power supply;
the second electrode tip is arranged in the second lamp cap and is used for being connected with an external power supply;
the two ends of the conductive heat dissipation rod are respectively arranged in the first lamp cap and the second lamp cap, and the conductive heat dissipation rod is electrically connected with the first electrode tip;
the light-transmitting annular sleeve is arranged around the conductive heat dissipation rod, the extending direction of the light-transmitting annular sleeve is consistent with the extending direction of the conductive heat dissipation rod, the annular sleeve is provided with an accommodating space, and excimer gas is filled in the accommodating space;
the conductive ring network surrounds the light-transmitting annular sleeve, the extending direction of the conductive ring network is consistent with the extending direction of the light-transmitting annular sleeve, and one end of the conductive ring network is electrically connected with the second electrode tip.
2. The excimer lamp of claim 1, wherein the light-transmissive annular sleeve comprises an inner tube and an outer tube connected to the inner tube, the inner tube and the outer tube having a space therebetween, the space forming the receiving space.
3. The excimer lamp of claim 2, wherein the excimer lamp further comprises an electrically conductive heat dissipation tube, the extending direction of the electrically conductive heat dissipation tube is consistent with the extending direction of the electrically conductive heat dissipation rod, the inner wall of the electrically conductive heat dissipation tube surrounds the electrically conductive heat dissipation rod, a gap is formed between the electrically conductive heat dissipation tube and the electrically conductive heat dissipation rod, the gap is filled with an elastic and electrically conductive material, and the outer wall of the electrically conductive heat dissipation tube is attached to the inner tube of the light-transmitting annular sleeve.
4. The excimer lamp as claimed in claim 3, wherein the number of the light-transmitting annular sleeves is plural, the plural light-transmitting annular sleeves are sequentially arranged at intervals along the extending direction of the light-transmitting annular sleeves, an annular heat dissipation fin is disposed between two adjacent light-transmitting annular sleeves, the annular heat dissipation fin is sleeved on the periphery of the conductive heat dissipation tube, and two ends of the annular heat dissipation fin are respectively abutted against the light-transmitting annular sleeves at two sides.
5. An excimer lamp as claimed in any one of claims 1 to 4, wherein the second electrode tip comprises a first connecting section and a second connecting section, an end of the conductive ring net close to the second electrode tip is provided with an annular ring protruding inwards, an electrically conductive fixing nut is arranged in the second lamp cap, the fixing nut is provided with a threaded hole, a peripheral ring at one end of the fixing nut is provided with a fixing part, the fixing part is used for pressing and fixing the annular ring of the conductive ring net, the first connecting section of the second electrode tip is provided with an external thread, and the first connecting section of the second electrode tip is in threaded connection with the fixing nut.
6. The excimer lamp as claimed in claim 5, wherein an isolating ceramic is further disposed in the second lamp cap, the isolating ceramic has a pressing section and a third connecting section, the pressing section presses and fixes the fixing portion of the fixing nut, the third connecting section is in fit contact with the conductive heat-dissipating rod, and the isolating ceramic isolates the conductive heat-dissipating rod from the fixing nut.
7. The excimer lamp as set forth in claim 5, wherein the end of the conductive heat dissipation rod near the first electrode tip has a threaded groove, the first electrode tip has a fourth connection section and a fifth connection section, the fourth connection section has an external thread, and the fourth connection section of the first electrode tip is in threaded connection with the threaded groove of the conductive heat dissipation rod.
8. An excimer lamp as claimed in claim 7, wherein an outer wall of the first electrode head intermediate the fifth connecting section is recessed inwardly to form a first annular groove, the excimer lamp also comprises a first electrode buckle which is used for being clamped with the fifth connecting section, the first electrode buckle is provided with a first embedded section embedded into the first lamp holder and a first extending section extending out of the first lamp holder, the first extending section is used for being connected with an external power supply, the first embedding section is provided with a first clamping groove, the fifth connecting section is embedded into the first clamping groove, the outer wall of the first embedding section is provided with a first limiting groove, the first limiting groove penetrates through the first clamping groove, the first limiting groove is arranged opposite to the first annular groove of the fifth connecting section, and a first elastic clamp spring is arranged in the first limiting groove and can limit the fifth connecting section.
9. An excimer lamp as claimed in claim 8, wherein an outer wall of the second electrode head intermediate the second connecting section is recessed inwardly to form a second annular groove, the excimer lamp also comprises a second electrode buckle which is used for being clamped with the second connecting section, the second electrode buckle is provided with a second embedded section embedded into the second lamp holder and a second extending section extending out of the second lamp holder, the second extending section is used for being connected with an external power supply, the second embedding section is provided with a second clamping groove, the second connecting section is embedded into the second clamping groove, the outer wall of the second embedding section is provided with a second limiting groove, the second limiting groove penetrates through the second clamping groove, the second limiting groove is arranged opposite to the second annular groove of the second connecting section, and a second elastic clamp spring is arranged in the second limiting groove and can limit the second connecting section.
10. An excimer lamp as claimed in claim 9, wherein the first electrode button is peripherally sleeved with a first protective sheath, a first protective ring is annularly arranged in the middle of the first protective sheath, and the first protective ring is used for covering a gap between the first lamp cap and the first protective sheath; the periphery cover is equipped with the second protective sheath to the second electrode knot, the middle part ring of second protective sheath is equipped with the second guard circle, the second guard circle is used for the closing cap the second lamp holder with clearance between the second protective sheath.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010830481.4A CN111863588A (en) | 2020-08-18 | 2020-08-18 | Excimer lamp |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010830481.4A CN111863588A (en) | 2020-08-18 | 2020-08-18 | Excimer lamp |
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| Publication Number | Publication Date |
|---|---|
| CN111863588A true CN111863588A (en) | 2020-10-30 |
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|---|---|---|---|
| CN202010830481.4A Pending CN111863588A (en) | 2020-08-18 | 2020-08-18 | Excimer lamp |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113270309A (en) * | 2021-06-21 | 2021-08-17 | 深圳市大博实业有限公司 | UV excimer lamp |
| CN114050103A (en) * | 2020-11-11 | 2022-02-15 | 肯扎纳因达普特拉萨迪股份有限公司 | Extreme ultraviolet 222nm excimer lamp and manufacturing method thereof |
-
2020
- 2020-08-18 CN CN202010830481.4A patent/CN111863588A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114050103A (en) * | 2020-11-11 | 2022-02-15 | 肯扎纳因达普特拉萨迪股份有限公司 | Extreme ultraviolet 222nm excimer lamp and manufacturing method thereof |
| CN113270309A (en) * | 2021-06-21 | 2021-08-17 | 深圳市大博实业有限公司 | UV excimer lamp |
| WO2022267449A1 (en) * | 2021-06-21 | 2022-12-29 | 深圳市大博实业有限公司 | Uv excimer lamp |
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